US20180068962A1 - Semiconductor package device and method of manufacturing the same - Google Patents
Semiconductor package device and method of manufacturing the same Download PDFInfo
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- US20180068962A1 US20180068962A1 US15/649,474 US201715649474A US2018068962A1 US 20180068962 A1 US20180068962 A1 US 20180068962A1 US 201715649474 A US201715649474 A US 201715649474A US 2018068962 A1 US2018068962 A1 US 2018068962A1
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- conductive pillar
- mems
- layer
- package body
- package structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
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- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- B81C1/0023—Packaging together an electronic processing unit die and a micromechanical structure die
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Definitions
- the present disclosure relates generally to a semiconductor package device and a method of manufacturing the same. More particularly, the present disclosure relates to a semiconductor package device including a micro-electromechanical systems (MEMS) structure and a method of manufacturing the same.
- MEMS micro-electromechanical systems
- the comparative MEMS package structure is formed by Quad Flat No-leads (QFN) technique.
- QFN Quad Flat No-leads
- a MEMS die is placed on a die paddle of a lead frame and the electrical connection between the MEMS die and the lead frame is attained by wire bonding.
- the use of the wire bond technique may limit miniaturization of the MEMS package structure (e.g. a bottleneck of the dimension of the MEMS package structure is 4.5 millimeters (mm)*4.5 mm*1.2 mm).
- the conductive path is relatively long, which causes relatively high resistance (compared with the conductive pillar). The high resistance can adversely affect electrical performance of the MEMS package structure.
- the molding compound is selected to have a coefficient of thermal expansion (CTE) close to the CTE of the lead frame; however, such arrangement may inevitably cause a CTE mismatch between the molding compound and the MEMS die, which may hinder performance of the MEMS die or even damage the MEMS die.
- CTE coefficient of thermal expansion
- a micro-electromechanical systems (MEMS) package structure comprises a MEMS die, a conductive pillar adjacent to the MEMS die, a package body and a binding layer on the package body.
- the package body encapsulates the MEMS die and the conductive pillar, and exposes a top surface of the conductive pillar.
- a glass transition temperature (Tg) of the package body is greater than a temperature for forming the binding layer (Tc).
- a MEMS package structure comprises a substrate, a MEMS die, a conductive pillar and a package body.
- the substrate includes a dielectric layer and a redistribution layer (RDL). At least a portion of a top surface of the RDL is exposed from the dielectric layer.
- the MEMS die is disposed over the substrate.
- a conductive pillar electrically connects the MEMS die to the RDL of the substrate by flip-chip bonding.
- the package body is disposed on the substrate and encapsulates the MEMS die and the conductive pillar.
- a method for manufacturing a MEMS package structure comprises: disposing a MEMS die on a carrier; forming a conductive pillar on the carrier and adjacent to the MEMS die; forming a package body to encapsulate the MEMS die and the conductive pillar and to expose a top surface of the conductive pillar; and forming a binding layer on the package body, wherein a glass transition temperature (Tg) of the package body is greater than a temperature for forming the binding layer (Tc).
- Tg glass transition temperature
- FIG. 1A illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure
- FIG. 1B illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure
- FIG. 1C illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure
- FIG. 1D illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure
- FIG. 1E illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure
- FIG. 1F illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure
- FIG. 1G illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure
- FIG. 1H illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure
- FIG. 1I illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure
- FIG. 2A illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 2B illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 2C illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 2D illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 2D ′ illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 2E illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 2F illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 2G illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 2H illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 3A illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 3B illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 4A illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 4B illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 4C illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 5A illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 5B illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 5C illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 5D illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 6A illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 6B illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure
- FIG. 6C illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure.
- FIG. 6D illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure.
- FIG. 1A illustrates a cross-sectional view of a semiconductor package device 1 A in accordance with some embodiments of the present disclosure.
- the semiconductor package device 1 A includes a circuit layer 10 , a MEMS device 11 , conductive pillars 12 , a package body 13 , a binding layer 14 a , an insulation layer 14 b , a redistribution layer (RDL) 15 and one or more electrical contacts 16 .
- RDL redistribution layer
- the circuit layer 10 may include one or more electronic components, such as passive electronic components and/or active electronic components.
- the circuit layer 10 may include, e.g., a microprocessor (e.g., a single-core or multi-core microprocessor), a memory device, a chipset, a graphics device, or an application specific integrated circuit (ASIC) according to various embodiments of the present disclosure.
- a microprocessor e.g., a single-core or multi-core microprocessor
- ASIC application specific integrated circuit
- the MEMS device 11 is disposed on the circuit layer 10 .
- MEMS refers to a class of structures or devices fabricated using semiconductor-like processes and exhibiting mechanical characteristics such as the ability to move or deform. MEMS often, but not always, interact with electrical signals.
- the MEMS device 11 may be or include, but is not limited to, one or more gyroscopes, accelerometers, pressure sensors, microphones, actuators, mirrors, heaters, printer nozzles magnetometers, or a combination of two or more thereof.
- the package body 13 is disposed on the circuit layer 10 to cover or encapsulate at least a portion of the MEMS device 11 or the entire MEMS device 11 .
- the package body 13 includes, e.g., an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof.
- the composition of the filler in the package body 13 is greater than or equal to, e.g., about 60%, about 70%, about 80%, about 90%, or about 95% by mass.
- the composition of the filler in the package body 13 may be, e.g., about 87% or about 89%.
- a glass transition temperature (Tg) of the package body 13 is greater than a temperature (Tc) for forming the binding layer 14 a or the insulation layer 14 b .
- the glass transition temperature of the package body 13 is in a range from about 100° C. to about 250° C., from about 125° C. to about 220° C., or from about 150° C. to about 195° C.
- the glass transition temperature of the package body 13 is in a range from about 155° C. to about 161° C., from about 151° C. to about 160° C. or from about 184° C. to about 195° C.
- a coefficient of thermal expansion (CTE) of the package body 13 is in a range from about 4 ppm/° C. to about 12 ppm (parts per million)/° C.
- the CTE of the package body 13 is in a range from about 7 ppm/° C. to about 9 ppm/° C., from about 10 ppm/° C. to about 12 ppm/° C. or from about 4 ppm/° C. to about 6 ppm/° C.
- the conductive pillar 12 penetrates the package body to electrically connect to one or more conductive contacts of the circuit layer 10 .
- a portion of the conductive pillar 12 is encapsulated by the package body 13 ; and a top surface of the conductive pillar 12 is exposed from the package body 13 .
- the conductive pillar 12 is disposed adjacent to the MEMS device 11 .
- a seed layer 12 s is disposed between the conductive pillar 12 and the circuit layer 10 .
- lateral surface(s) of the conductive pillar 12 may directly contact the package body 13 .
- the seed layer 12 s comprises, e.g., titanium (Ti), copper (Cu) or a combination thereof.
- the conductive pillar 12 includes a first portion on the circuit layer 10 and a second portion on the first portion. In some embodiments, a thickness of the first portion may be greater than a thickness of the second portion. A time for forming the first portion may be longer than a time for forming the second portion. In some other embodiments, the thickness of the first portion may be less than, or substantially equal to, the thickness of the second portion. In some embodiments, the first portion of the conductive pillar 12 and the second portion of the conductive pillar 12 are made of (or include) the same material. Alternatively, the first portion of the conductive pillar 12 and the second portion of the conductive pillar 12 are made of (or include) different materials.
- the first portion of the conductive pillar 12 is made of Cu, while the second portion of the conductive pillar 12 is made of tin (Sn), silver (Ag), nickel (Ni), or a combination of two or more thereof.
- the binding layer 14 a is disposed on the package body 13 and the top surface of the conductive pillar 12 .
- the binding layer 14 a may include at least one recess to expose at least one portion of the top surface of the conductive pillar 12 .
- the binding layer 14 a comprises polyimide (PI), polybenzoxazole (PBO), solder resist, Ajinomoto build-up film (ABF), molding compound, epoxy-based material, or a combination of two or more thereof.
- the RDL 15 is disposed on the binding layer 14 .
- the RDL 15 extends into the recess of the binding layer 14 a and electrically contacts at least a portion of the top surface of the conductive pillar 12 that is exposed from the package body 13 .
- the insulation layer 14 b is disposed on the binding layer 14 a to cover or encapsulate at least a portion of the RDL 15 or the entire RDL 15 .
- the insulation layer 14 b may include at least one recess to expose a portion of RDL 15 .
- the insulation layer 14 b comprises PI, PBO, solder resist, ABF, molding compound, epoxy-based material, or a combination of two or more thereof.
- a conductive layer 16 u (e.g., under bump metallurgy (UBM)) is disposed within the recess of the insulation layer 14 b to electrically contact on the exposed portion of the RDL 15 .
- the electrical contact 16 (e.g., C4 pad (controlled collapse chip connection pad)) is disposed on the conductive layer 16 u to provide electrical connections between the circuit layer 10 and external device(s).
- the semiconductor package device 1 A does not include the conductive layer 16 u ; and the electrical contact 16 is directly disposed within the recess of the insulation layer 14 b to electrically contact the exposed portion of the RDL 15 .
- the comparative MEMS package structure formed by Quad Flat No-leads (QFN) technique may limit miniaturization of the MEMS package structure (e.g. a bottleneck of the dimension of the MEMS package structure is 4.5 mm*4.5 mm*1.2 mm).
- the relatively long conductive path may cause high resistance, which would adversely affect electrical performance of the comparative MEMS package structure.
- FIG. 1 In some embodiments shown in FIG. 1
- the total size of the semiconductor package device 1 A can be reduced (e.g., to about 3.5 mm*2.6 mm*0.5 mm, about 3.0 mm*2.2 mm*0.4 mm, about 2.5 mm*2.0 mm*0.3 mm, or less).
- the semiconductor package device 1 can have a better performance for signal transmission.
- the molding compound is selected to have a CTE close to the CTE of the lead frame.
- such arrangement may cause a CTE mismatch between the molding compound and the MEMS die.
- the CTE mismatch may damage the MEMS die or hinder performance of the MEMS die.
- the semiconductor package device 1 A does not include a lead frame structure, and thus the material of the molding compound (e.g., the package body 13 ) can be selected so that the CTE of the molding compound can match the CTE of the MEMS device 11 to avoid warpage of the semiconductor package device 1 A.
- FIG. 1B illustrates a cross-sectional view of a semiconductor package device 1 B in accordance with some embodiments of the present disclosure.
- the semiconductor package device 1 B is similar to the semiconductor package device 1 A shown in FIG. 1A , except that the semiconductor package device 1 B includes the insulation layer 14 b but does not include a binding layer 14 a.
- the RDL 15 is disposed on the package body 13 and electrically contacts at least a portion of the top surface of the conductive pillar 12 that is exposed from the package body 13 .
- the insulation layer 14 b is disposed on the package body 13 to cover or encapsulate at least a portion of the RDL 15 or the entire RDL 15 .
- the insulation layer 14 b may include at least one recess to expose at least a portion of RDL 15 .
- the insulation layer 14 b comprises PI, PBO, solder resist, ABF, molding compound, epoxy-based material, or a combination of two or more thereof.
- the conductive layer 16 u (e.g., under bump metallurgy (UBM)) is disposed within the recess of the insulation layer 14 b to electrically contact on the exposed portion of the RDL 15 .
- the electrical contact 16 (e.g., C4 pad) is disposed on the conductive layer 16 u to provide electrical connections between the circuit layer 10 and external device(s).
- the semiconductor package device 1 B does not include the conductive layer 16 u ; and the electrical contact 16 is directly disposed within the recess of the insulation layer 14 b to electrically contact on the exposed portion of the RDL 15 .
- FIG. 1C illustrates a cross-sectional view of a semiconductor package device 1 C in accordance with some embodiments of the present disclosure.
- the semiconductor package device 1 C is similar to the semiconductor package device 1 A shown in FIG. 1A , and at least one difference therebetween is that in the semiconductor package device 1 A of FIG. 1A , an active surface of the MEMS device 11 is connected to the circuit layer 10 by, for example, flip-chip technique; while in semiconductor package device 1 C of FIG. 1C , a back surface of the MEMS device 11 is connected to the circuit layer 10 through an adhesive layer 11 h (e.g., glue).
- the active surface of the MEMS device is electrically connected to the RDL 15 through electrical connections 15 v (e.g., vias) penetrating the package body 13 .
- FIG. 1D illustrates a cross-sectional view of a semiconductor package device 1 D in accordance with some embodiments of the present disclosure.
- the semiconductor package device 1 D is similar to the semiconductor package device 1 A shown in FIG. 1A , except that the semiconductor package device 1 D does not include the RDL 15 and the binding layer 14 a.
- a conductive pad 12 p is disposed on the package body 13 and electrically contacts at least a portion of the top surface of the conductive pillar 12 that is exposed from the package body 13 .
- the insulation layer 14 b is disposed on the package body 13 to cover or encapsulate the conductive pad 12 p .
- the insulation layer 14 b includes at least one recess to expose at least one portion of the conductive pad 12 p .
- the electrical contact 16 is disposed on the insulation layer 14 b and extends into the recess of the insulation layer 14 b to electrically contact the conductive pad 12 p.
- the semiconductor package device 1 D since the electrical contact 16 is directly disposed on the conductive pad 12 p to be electrically connected to the conductive pillar 12 , the semiconductor package device 1 D does not include additional RDL, reducing the manufacturing cost.
- FIG. 1E illustrates a cross-sectional view of a semiconductor package device 1 E in accordance with some embodiments of the present disclosure.
- the semiconductor package device 1 E includes the semiconductor package device 1 D as shown in FIG. 1D , a package body 19 and a substrate 18 .
- the substrate 18 may be a flexible substrate or a rigid substrate, depending upon the applications according to various embodiments.
- the substrate 18 includes a dielectric layer 18 d and a conductive patterned layer 18 r . At least a portion of a top surface of the conductive patterned layer 18 r is exposed from the dielectric layer 18 d .
- the electrical contact of the semiconductor package device 1 D is disposed on the exposed portion of the top surface of the conductive patterned layer 18 r .
- an external contact layer may be also formed or disposed on the substrate 18 .
- the external contact layer includes a ball grid array (BGA).
- the external contact layer includes an array such as, but not limited to, a land grid array (LGA) or a pin grid array (PGA).
- the external contact layer includes solder balls 18 b , which may include lead or may be leadfree (e.g., including one or more materials such as alloys of gold and tin solder or alloys of silver and tin solder).
- the package body 19 is disposed on the substrate 18 to cover or encapsulate the semiconductor package device 1 D.
- the package body 19 includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof.
- FIG. 1F illustrates a cross-sectional view of a semiconductor package device 1 F in accordance with some embodiments of the present disclosure.
- the semiconductor package device 1 F is similar to the semiconductor package device 1 A shown in FIG. 1A , except that the semiconductor package device 1 F does not include the package body 13 , the binding layers 14 a , the insulation layer 14 b or the RDL 15 .
- the conductive pillar 12 is disposed on the circuit layer 10 and electrically connected to the conductive contacts of the circuit layer 10 .
- the seed layer 12 s may be disposed between the conductive pillar 12 and the circuit layer 10 .
- the electrical contact 12 c is disposed on the conductive pillar 12 .
- the conductive pillar 12 and the electrical contact 12 c provide electrical connections between the circuit layer 10 and external device(s).
- FIG. 1G illustrates a cross-sectional view of a semiconductor package device 1 G in accordance with some embodiments of the present disclosure.
- the semiconductor package device 1 G is similar to the semiconductor package device 1 F shown in FIG. 1F , except that the semiconductor package device 1 G further includes a package body 13 .
- the package body 13 is disposed on the circuit layer 10 to cover or encapsulate the MEMS device 11 and lateral surface(s) of the conductive pillar 12 .
- a top surface of the conductive pillar 12 is exposed from the package body 13 .
- the package body 13 includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof.
- the electrical contact 12 c is disposed on the top surface of the conductive pillar 12 that is exposed from the package body 13 .
- the conductive pillar 12 and the electrical contact 12 c provide electrical connections between the circuit layer 10 and external device(s).
- FIG. 1H illustrates a cross-sectional view of a semiconductor package device 1 H in accordance with some embodiments of the present disclosure.
- the semiconductor package device 1 H is similar to the semiconductor package device 1 G shown in FIG. 1G , except that the semiconductor package device 1 H further includes one or more support elements 12 c 1 .
- the support elements 12 c 1 are disposed on the package body and electrically isolated from the MEMS device 11 or the circuit layer 10 .
- the support elements 12 c 1 may be solder balls or other suitable structures.
- the support elements 12 c 1 may be dummy balls. The dummy balls 12 c 1 are used to provide an additional support for the semiconductor package device 1 H when the semiconductor package device 1 H is connected or bonded to other device(s) or circuit board(s).
- FIG. 1I illustrates a cross-sectional view of a semiconductor package device 1 I in accordance with some embodiments of the present disclosure.
- the semiconductor package device 1 I includes the semiconductor package device 1 F as shown in FIG. 1F , a package body 19 and a substrate 18 .
- the substrate 18 may be a flexible substrate or a rigid substrate, depending upon the applications according to various embodiments.
- the substrate 18 includes a dielectric layer 18 d and a conductive patterned layer 18 r . At least a portion of a top surface of the conductive patterned layer 18 r is exposed from the dielectric layer 18 d .
- the electrical contact 12 c of the semiconductor package device 1 F is disposed on the exposed portion of the top surface of the conductive patterned layer 18 r .
- an external contact layer may be also formed or disposed on the substrate 18 .
- the external contact layer includes a BGA.
- the external contact layer includes an array such as, but not limited to, an LGA or a PGA.
- the external contact layer includes solder balls 18 b , which may include lead or may be lead-free (e.g., including one or more materials such as alloys of gold and tin solder or alloys of silver and tin solder).
- the package body 19 is disposed on the substrate 18 to cover or encapsulate the semiconductor package device 1 F.
- the package body 18 includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof.
- FIGS. 2A, 2B, 2C, 2D, 2D ′, 2 E, 2 F, 2 G and 2 H are cross-sectional views of a semiconductor structure fabricated at various stages, in accordance with some embodiments of the present disclosure. Various figures may be simplified for a better understanding of the aspects of the present disclosure.
- the circuit layer 20 may include one or more electronic components, such as passive electronic components and/or active electronic components.
- the circuit layer 20 may include, a microprocessor (e.g., a single-core or multi-core microprocessor), a memory device, a chipset, a graphics device, or an ASIC according to various embodiments of the present disclosure.
- the MEMS device 21 is disposed on the circuit layer 20 .
- the MEMS device 21 may be or include, but is not limited to, one or more gyroscopes, accelerometers, pressure sensors, microphones, actuators, mirrors, heaters, printer nozzles magnetometers, or a combination of two or more thereof.
- the MEMS device 21 can be connected to the circuit layer 20 by, for example, flip-chip technique.
- a seed layer 22 s is formed on a top surface of the circuit layer 20 and a top surface and lateral surface(s) of the MEMS device 21 .
- the seed layer 22 s comprises Ti, Cu or a combination thereof.
- the seed layer 22 s can be formed by, e.g., sputtering or other suitable techniques.
- a photoresist layer 27 is formed on the seed layer 22 s ; and one or more openings 27 h are formed at predetermined location(s) to penetrate the photoresist layer 27 and to expose the seed layer 22 s .
- the photoresist layer 27 is a dry film photoresist or other suitable photoresist.
- the openings 27 h can be formed by, e.g., etching, laser drilling or other suitable processes.
- a conductive pillar 22 is formed within the openings 27 h and on at least a portion of the seed layer 22 s that is exposed from the photoresist layer 27 .
- the conductive pillar 22 is formed by, e.g., electroplating or other suitable processes.
- the conductive pillar 22 may be formed by a single electroplating process.
- the conductive pillar 22 ′ may include two (or more) portions (e.g., a first portion 22 a ′ on the seed layer 22 s and a second portion 22 b ′ on the first portion 22 a ′) formed by two (or more) electroplating processes.
- a thickness of the first portion 22 a ′ is greater than a thickness of the second portion 22 b ′. In some other embodiments, the thickness of the first portion 22 a ′ may be less than, or substantially equal to, the thickness of the second portion 22 b ′. In some embodiments, the first portion 22 a ′ of the conductive pillar 22 ′ and the second portion 22 b ′ of the conductive pillar 22 ′ are made of (or include) the same material. Alternatively, the first portion 22 a ′ of the conductive pillar 22 ′ and the second portion 22 b ′ of the conductive pillar 22 ′ are made of (or include) different materials.
- the first portion 22 a ′ of the conductive pillar 22 ′ is made of Cu, while the second portion 22 b ′ of the conductive pillar 22 ′ is made of Sn, Ag, Ni, or a combination of two or more thereof.
- the photoresist layer 27 and at least a portion of the seed layer 22 s are removed.
- the photoresist layer 27 and the portion of the seed layer 22 s can be removed by, e.g., etching or other suitable processes.
- a package body 23 is formed or disposed to cover or encapsulate a top surface of the circuit layer 20 , the MEM device 21 and the conductive pillar 22 .
- the package body 23 includes an epoxy resin including fillers (e.g., SiO 2 ), a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof.
- the composition of the filler in the package body 23 is greater than or equal to, e.g., about 60%, about 70%, about 80%, about 90%, or about 95% by mass.
- the composition of the filler in the package body 23 may be, e.g., about 87% or about 89%.
- the glass transition temperature of the package body 23 is in a range from about 100° C. to about 250° C., from about 125° C. to about 220° C., or from about 150° C. to about 195° C.
- the glass transition temperature of the package body 23 is in a range from about 155° C. to about 161° C., from about 151° C. to about 160° C. or from about 184° C. to about 195° C.
- a CTE of the package body 23 is in a range from about 4 ppm/° C. to about 12 ppm/° C.
- the CTE of the package body 23 is in a range from about 7 ppm/° C. to about 9 ppm/° C., from about 10 ppm/° C. to about 12 ppm/° C. or from about 4 ppm/° C. to about 6 ppm/° C.
- a portion of the package body 23 is then removed to expose a top surface of the conductive pillar 22 .
- the removing operation is carried out by, e.g., grinding or other suitable processes.
- a binding layer 24 a is formed on the package body 23 .
- the binding layer 24 a may include at least one recess to expose at least a portion of the top surface of the conductive pillar 22 .
- the binding layer 24 a comprises PI, PBO, solder resist, ABF, molding compound, epoxy-based material, or a combination of two or more thereof.
- a temperature for forming the binding layer 24 a is less than the glass transition temperature of the package body 23 .
- the temperature for forming the binding layer 24 a is a curing temperature of a material of the binding layer 24 a .
- the CTE of the package body 23 may increase (e.g., as a result of undergoing a conversion at or above the glass transition temperature).
- the difference between the CTE of the package body 23 and the CTE of the MEMS device 21 or the CTE of the circuit layer 20 may increase as well, which may lead to warpage of the semiconductor package device.
- a RDL 25 is formed on the binding layer 24 a and extends into the recess of the binding layer 24 to electrically contact the exposed portion of the top surface of the conductive pillar 22 .
- An insulation layer 24 b is formed on the RDL 25 .
- the insulation layer 24 b may include a recess to expose a portion of the RDL 25 .
- the insulation layer 24 b comprises PI, PBO, solder resist, ABF, molding compound, epoxy-based material, or a combination of two or more thereof.
- a temperature for forming the insulation layer 24 b is less than the glass transition temperature of the package body 23 .
- the temperature for forming the insulation layer 24 b is a curing temperature of a material of the insulation layer 24 b.
- a conductive layer 26 u (e.g., UBM) is formed or disposed in the recess of the insulation layer 24 b to contact the exposed portion of the RDL 25 , and then an electrical contact 26 (e.g., a C4 pad) is formed or disposed on the conductive layer 26 u .
- an electrical contact 26 e.g., a C4 pad
- at least a portion of a back side of the circuit layer 20 may be removed by, e.g., grinding process.
- a singulation is performed to form the semiconductor package device 2 .
- the singulation may be performed through the binding layer 24 a , the insulation layer 24 b , the RDL 25 , the package body 23 and the circuit layer 20 .
- the singulation may be performed, for example, by using a dicing saw, laser or other appropriate cutting technique.
- the semiconductor package device 2 is similar to the semiconductor package device 1 A shown in FIG. 1A .
- FIGS. 3A and 3B are cross-sectional views of a semiconductor structure fabricated at various stages, in accordance with some embodiments of the present disclosure. Various figures may have been simplified for a better understanding of the aspects of the present disclosure. In some embodiments, the operations shown in FIG. 3A may be carried out after the operations shown in FIG. 2F .
- a conductive layer 35 is formed on at least a portion of the top surface of the conductive pillar 22 that is exposed from the package body 23 .
- the conductive layer 35 may be formed by the following operations: (i) defining regions for the following physical vapor deposition (PVD) process by using a shadow mask; and (ii) depositing conductive material (e.g., Cu) to form the conductive layer 35 .
- the conductive layer 35 may be formed by the following operations: (i) defining regions of the conductive layer 35 by using laser drilling to remove a portion of the package body 23 ; and (ii) forming the conductive layer 35 by printing.
- an oxide layer 34 is formed on the package body 23 . At least a portion of the conductive layer 35 is exposed from the oxide layer 34 .
- the oxide layer 35 is formed by using, e.g., a PVD process.
- an electrical contact 36 (e.g., a C4 pad) is formed or disposed on the exposed portion of the conductive layer 35 .
- the electrical contact 36 is a solder ball (e.g., Sn ball).
- a Ni layer may be deposited on the conductive layer 35 before the formation of the oxide layer 35 to improve the adhesion between the conductive layer 35 and the electrical contact 36 .
- the binding layer 24 a and the insulation layer 24 b may be selected from, e.g., PI or PBO or a combination thereof.
- the temperature e.g., about 200° C. to about 450° C., about 200° C. to about 400° C., or about 200° C. to about 350° C.
- the glass transition temperature e.g., about 150° C. to about 195° C.
- the manufacturing process does not involve a process with a temperature higher than the glass transition temperature of the package body 23 (e.g., photolithography, electroplating, PI or PBO curing), and therefore avoids reliability issues as mentioned above.
- FIGS. 4A, 4B and 4C are cross-sectional views of a semiconductor structure fabricated at various stages, in accordance with some embodiments of the present disclosure. Various figures may have been simplified for a better understanding of the aspects of the present disclosure.
- the circuit layer 40 may include one or more electronic components, such as passive electronic components and/or active electronic components.
- the circuit layer 40 may include, a microprocessor (e.g., a single-core or multi-core microprocessor), a memory device, a chipset, a graphics device, or an ASIC according to various embodiments of the present disclosure.
- the MEMS device 41 is disposed on the circuit layer 40 .
- the MEMS device 41 may be or include, but is not limited to, one or more gyroscopes, accelerometers, pressure sensors, microphones, actuators, mirrors, heaters, printer nozzles magnetometers or a combination of two or more thereof.
- the MEMS device 41 can be connected to the circuit layer 40 by, for example, flip-chip technique.
- a package body 43 is formed or disposed to cover or encapsulate a top surface of the circuit layer 40 and the MEM device 41 .
- the package body 43 includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof.
- a portion of the package body 43 is removed to form openings 43 h to expose the circuit layer 40 .
- the package body 43 can be removed by using, e.g., laser drilling or other suitable processes.
- a conductive material e.g., Cu, Ni or a combination thereof
- An electrical contact 46 e.g., a C4 pad
- the electrical contact 46 is a solder ball (e.g., Sn ball).
- the manufacturing process does not involve a process with a temperature higher than the glass transition temperature of the package body 43 (e.g., photolithography, electroplating, PI or PBO curing), and therefore avoids reliability issues as mentioned above.
- FIGS. 5A, 5B, 5C and 5D are cross-sectional views of a semiconductor structure fabricated at various stages, in accordance with some embodiments of the present disclosure. Various figures may have been simplified for a better understanding of the aspects of the present disclosure.
- the conductive pillar 22 is formed on the circuit layer 20 and electrically connected to the conductive contacts of the circuit layer 20 .
- an electrical contact 22 c may be formed on the conductive pillar 22 .
- a singulation is performed to form the semiconductor package device 5 ′.
- the singulation may be performed through the circuit layer 20 .
- the singulation may be performed, for example, by using a dicing saw, laser or other appropriate cutting technique.
- the semiconductor package device 5 ′ is similar to the semiconductor package device 1 B shown in FIG. 1B .
- the semiconductor package device 5 ′ is inverted and connected to a substrate 28 .
- the substrate 28 is placed on a carrier 28 c .
- the substrate 28 includes a dielectric layer 28 d and a conductive patterned layer 28 r . At least a portion of a top surface of the conductive patterned layer 28 r is exposed from the dielectric layer 28 d .
- the electrical contact 22 c of the semiconductor package device 5 ′ is disposed on the exposed portion of the top surface of the conductive patterned layer 28 r.
- the carrier 28 c is removed from the substrate 28 .
- a package body 29 is formed on the substrate 28 to encapsulate or cover the semiconductor package device 5 ′.
- the package body 29 includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof.
- An electrical contact 28 b is then formed or disposed on the conductive patterned layer 28 d of the substrate 28 to form the semiconductor package device 5 .
- the semiconductor package device 5 is similar to the semiconductor package device 1 H shown in FIG. 1H .
- the processes shown in FIGS. 5A, 5B, 5C and 5D are carried out in substrate level rather than wafer level. Therefore, a binding layer can be eliminated and the semiconductor package device 5 ′ (including the circuit layer 20 and the MEMS device 21 ) can be connected to the substrate 28 without performing the process under wafer level, which may reduce the cost for manufacturing the semiconductor package device 5 having a fan-out structure.
- FIGS. 6A, 6B and 6C are cross-sectional views of a semiconductor structure fabricated at various stages, in accordance with some embodiments of the present disclosure. Various figures may have been simplified for a better understanding of the aspects of the present disclosure.
- FIG. 6A The operations shown in FIG. 6A are similar to those shown in FIG. 5A , except that the conductive contact 22 c (instead of a conductive pillar) is formed on the circuit layer 20 .
- a singulation is performed to form the semiconductor package device 6 ′.
- the singulation may be performed through the circuit layer 20 .
- the singulation may be performed, for example, by using a dicing saw, laser or other appropriate cutting technique.
- the semiconductor package device 6 ′ is inverted and connected to conductive pillars 22 of the substrate 28 .
- the conductive contacts 22 c are aligned with the corresponding conductive pillars 22 .
- the substrate 28 is placed on a carrier 28 c .
- the substrate 28 includes a dielectric layer 28 d and a conductive patterned layer 28 r . At least a portion of a top surface of the conductive patterned layer 28 r is exposed from the dielectric layer 28 d .
- the electrical contact 22 c of the semiconductor package device 5 ′ is disposed on the exposed portion of the top surface of the conductive patterned layer 28 r.
- the carrier 28 c is removed from the substrate 28 .
- a package body 29 is formed on the substrate 28 to encapsulate or cover the semiconductor package device 6 ′.
- the package body 29 includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof.
- An electrical contact 28 b is then formed or disposed on the conductive patterned layer 28 r of the substrate 28 to form the semiconductor package device 6 .
- the terms “approximately,” “substantially,” “substantial” and “about” are used to describe and account for small variations. When used in conjunction with an event or circumstance, the terms can refer to instances in which the event or circumstance occurs precisely as well as instances in which the event or circumstance occurs to a close approximation.
- the terms can refer to a range of variation less than or equal to ⁇ 10% of that numerical value, such as less than or equal to ⁇ 5%, less than or equal to ⁇ 4%, less than or equal to ⁇ 3%, less than or equal to ⁇ 2%, less than or equal to ⁇ 1%, less than or equal to ⁇ 0.5%, less than or equal to ⁇ 0.1%, or less than or equal to ⁇ 0.05%.
- two numerical values can be deemed to be “substantially” the same or “substantially” equal if a difference between the values is less than or equal to ⁇ 10% of an average of the values, such as less than or equal to ⁇ 5%, less than or equal to ⁇ 4%, less than or equal to ⁇ 3%, less than or equal to ⁇ 2%, less than or equal to ⁇ 1%, less than or equal to ⁇ 0.5%, less than or equal to ⁇ 0.1%, or less than or equal to ⁇ 0.05%.
- substantially parallel can refer to a range of angular variation relative to 0° that is less than or equal to ⁇ 10°, such as less than or equal to ⁇ 5°, less than or equal to ⁇ 4°, less than or equal to ⁇ 3°, less than or equal to ⁇ 2°, less than or equal to ⁇ 1°, less than or equal to ⁇ 0.5°, less than or equal to ⁇ 0.1°, or less than or equal to ⁇ 0.05°.
- substantially perpendicular can refer to a range of angular variation relative to 90° that is less than or equal to ⁇ 10°, such as less than or equal to ⁇ 5°, less than or equal to ⁇ 4°, less than or equal to ⁇ 3°, less than or equal to ⁇ 2°, less than or equal to ⁇ 1°, less than or equal to ⁇ 0.5°, less than or equal to ⁇ 0.1°, or less than or equal to ⁇ 0.05°.
- Two surfaces can be deemed to be coplanar or substantially coplanar if a displacement between the two surfaces is no greater than 5 ⁇ m, no greater than 2 ⁇ m, no greater than 1 ⁇ m, or no greater than 0.5 ⁇ m.
- conductive As used herein, the terms “conductive,” “electrically conductive” and “electrical conductivity” refer to an ability to transport an electric current. Electrically conductive materials typically indicate those materials that exhibit little or no opposition to the flow of an electric current. One measure of electrical conductivity is Siemens per meter (S/m). Typically, an electrically conductive material is one having a conductivity greater than approximately 10 4 S/m, such as at least 10 5 S/m or at least 10 6 S/m. The electrical conductivity of a material can sometimes vary with temperature. Unless otherwise specified, the electrical conductivity of a material is measured at room temperature.
- a component provided “on” or “over” another component can encompass cases where the former component is directly on (e.g., in physical contact with) the latter component, as well as cases where one or more intervening components are located between the former component and the latter component.
Abstract
In one or more embodiments, a micro-electromechanical systems (MEMS) package structure comprises a MEMS die, a conductive pillar adjacent to the MEMS die, a package body and a binding layer on the package body. The package body encapsulates the MEMS die and the conductive pillar, and exposes a top surface of the conductive pillar. A glass transition temperature (Tg) of the package body is greater than a temperature for forming the binding layer (Tc).
Description
- This application claims the benefit of and priority to U.S. Provisional Patent Application No. 62/383,094, filed Sep. 2, 2016, the contents of which are incorporated herein by reference in its entirety.
- The present disclosure relates generally to a semiconductor package device and a method of manufacturing the same. More particularly, the present disclosure relates to a semiconductor package device including a micro-electromechanical systems (MEMS) structure and a method of manufacturing the same.
- The comparative MEMS package structure is formed by Quad Flat No-leads (QFN) technique. For example, a MEMS die is placed on a die paddle of a lead frame and the electrical connection between the MEMS die and the lead frame is attained by wire bonding. However, the use of the wire bond technique may limit miniaturization of the MEMS package structure (e.g. a bottleneck of the dimension of the MEMS package structure is 4.5 millimeters (mm)*4.5 mm*1.2 mm). Moreover, due to the loop height of the bonding wire, the conductive path is relatively long, which causes relatively high resistance (compared with the conductive pillar). The high resistance can adversely affect electrical performance of the MEMS package structure. Further, in the process of packaging the MEMS, the molding compound is selected to have a coefficient of thermal expansion (CTE) close to the CTE of the lead frame; however, such arrangement may inevitably cause a CTE mismatch between the molding compound and the MEMS die, which may hinder performance of the MEMS die or even damage the MEMS die.
- In one aspect according to some embodiments, a micro-electromechanical systems (MEMS) package structure comprises a MEMS die, a conductive pillar adjacent to the MEMS die, a package body and a binding layer on the package body. The package body encapsulates the MEMS die and the conductive pillar, and exposes a top surface of the conductive pillar. A glass transition temperature (Tg) of the package body is greater than a temperature for forming the binding layer (Tc).
- In another aspect according to some embodiments, a MEMS package structure comprises a substrate, a MEMS die, a conductive pillar and a package body. The substrate includes a dielectric layer and a redistribution layer (RDL). At least a portion of a top surface of the RDL is exposed from the dielectric layer. The MEMS die is disposed over the substrate. A conductive pillar electrically connects the MEMS die to the RDL of the substrate by flip-chip bonding. The package body is disposed on the substrate and encapsulates the MEMS die and the conductive pillar.
- In yet another aspect according to some embodiments, a method for manufacturing a MEMS package structure comprises: disposing a MEMS die on a carrier; forming a conductive pillar on the carrier and adjacent to the MEMS die; forming a package body to encapsulate the MEMS die and the conductive pillar and to expose a top surface of the conductive pillar; and forming a binding layer on the package body, wherein a glass transition temperature (Tg) of the package body is greater than a temperature for forming the binding layer (Tc).
- Aspects of some embodiments of the present disclosure are best understood from the following detailed description when read with the accompanying figures. It is noted that various structures may not be drawn to scale, and dimensions of the various structures may be arbitrarily increased or reduced for clarity of discussion.
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FIG. 1A illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure; -
FIG. 1B illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure; -
FIG. 1C illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure; -
FIG. 1D illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure; -
FIG. 1E illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure; -
FIG. 1F illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure; -
FIG. 1G illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure; -
FIG. 1H illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure; -
FIG. 1I illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure; -
FIG. 2A illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 2B illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 2C illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 2D illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 2D ′ illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 2E illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 2F illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 2G illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 2H illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 3A illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 3B illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 4A illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 4B illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 4C illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 5A illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 5B illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 5C illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 5D illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 6A illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 6B illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; -
FIG. 6C illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure; and -
FIG. 6D illustrates various stage(s) of a method of manufacturing a semiconductor package in accordance with some embodiments of the present disclosure. - Common reference numerals are used throughout the drawings and the detailed description to indicate the same or similar elements. The present disclosure will be more apparent from the following detailed description taken in conjunction with the accompanying drawings.
-
FIG. 1A illustrates a cross-sectional view of asemiconductor package device 1A in accordance with some embodiments of the present disclosure. Thesemiconductor package device 1A includes acircuit layer 10, aMEMS device 11,conductive pillars 12, apackage body 13, abinding layer 14 a, aninsulation layer 14 b, a redistribution layer (RDL) 15 and one or moreelectrical contacts 16. - The
circuit layer 10 may include one or more electronic components, such as passive electronic components and/or active electronic components. In some embodiments, thecircuit layer 10 may include, e.g., a microprocessor (e.g., a single-core or multi-core microprocessor), a memory device, a chipset, a graphics device, or an application specific integrated circuit (ASIC) according to various embodiments of the present disclosure. - The
MEMS device 11 is disposed on thecircuit layer 10. In some embodiments, MEMS refers to a class of structures or devices fabricated using semiconductor-like processes and exhibiting mechanical characteristics such as the ability to move or deform. MEMS often, but not always, interact with electrical signals. TheMEMS device 11 may be or include, but is not limited to, one or more gyroscopes, accelerometers, pressure sensors, microphones, actuators, mirrors, heaters, printer nozzles magnetometers, or a combination of two or more thereof. - The
package body 13 is disposed on thecircuit layer 10 to cover or encapsulate at least a portion of theMEMS device 11 or theentire MEMS device 11. In some embodiments, thepackage body 13 includes, e.g., an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof. In some embodiments, the composition of the filler in thepackage body 13 is greater than or equal to, e.g., about 60%, about 70%, about 80%, about 90%, or about 95% by mass. For example, the composition of the filler in thepackage body 13 may be, e.g., about 87% or about 89%. - In some embodiments, a glass transition temperature (Tg) of the
package body 13 is greater than a temperature (Tc) for forming thebinding layer 14 a or theinsulation layer 14 b. In some embodiments, the glass transition temperature of thepackage body 13 is in a range from about 100° C. to about 250° C., from about 125° C. to about 220° C., or from about 150° C. to about 195° C. For example, the glass transition temperature of thepackage body 13 is in a range from about 155° C. to about 161° C., from about 151° C. to about 160° C. or from about 184° C. to about 195° C. In some embodiments, a coefficient of thermal expansion (CTE) of thepackage body 13 is in a range from about 4 ppm/° C. to about 12 ppm (parts per million)/° C. For example, the CTE of thepackage body 13 is in a range from about 7 ppm/° C. to about 9 ppm/° C., from about 10 ppm/° C. to about 12 ppm/° C. or from about 4 ppm/° C. to about 6 ppm/° C. - The
conductive pillar 12 penetrates the package body to electrically connect to one or more conductive contacts of thecircuit layer 10. A portion of theconductive pillar 12 is encapsulated by thepackage body 13; and a top surface of theconductive pillar 12 is exposed from thepackage body 13. In some embodiments, theconductive pillar 12 is disposed adjacent to theMEMS device 11. In some embodiments, aseed layer 12 s is disposed between theconductive pillar 12 and thecircuit layer 10. In some embodiments, there is no seed layer between theconductive pillar 12 and thepackage body 13. In other words, lateral surface(s) of theconductive pillar 12 may directly contact thepackage body 13. In some embodiments, theseed layer 12 s comprises, e.g., titanium (Ti), copper (Cu) or a combination thereof. - In some embodiments, the
conductive pillar 12 includes a first portion on thecircuit layer 10 and a second portion on the first portion. In some embodiments, a thickness of the first portion may be greater than a thickness of the second portion. A time for forming the first portion may be longer than a time for forming the second portion. In some other embodiments, the thickness of the first portion may be less than, or substantially equal to, the thickness of the second portion. In some embodiments, the first portion of theconductive pillar 12 and the second portion of theconductive pillar 12 are made of (or include) the same material. Alternatively, the first portion of theconductive pillar 12 and the second portion of theconductive pillar 12 are made of (or include) different materials. For example, in some embodiments, the first portion of theconductive pillar 12 is made of Cu, while the second portion of theconductive pillar 12 is made of tin (Sn), silver (Ag), nickel (Ni), or a combination of two or more thereof. - The
binding layer 14 a is disposed on thepackage body 13 and the top surface of theconductive pillar 12. Thebinding layer 14 a may include at least one recess to expose at least one portion of the top surface of theconductive pillar 12. In some embodiments, the bindinglayer 14 a comprises polyimide (PI), polybenzoxazole (PBO), solder resist, Ajinomoto build-up film (ABF), molding compound, epoxy-based material, or a combination of two or more thereof. - The
RDL 15 is disposed on the binding layer 14. TheRDL 15 extends into the recess of thebinding layer 14 a and electrically contacts at least a portion of the top surface of theconductive pillar 12 that is exposed from thepackage body 13. - The
insulation layer 14 b is disposed on thebinding layer 14 a to cover or encapsulate at least a portion of theRDL 15 or theentire RDL 15. Theinsulation layer 14 b may include at least one recess to expose a portion ofRDL 15. In some embodiments, theinsulation layer 14 b comprises PI, PBO, solder resist, ABF, molding compound, epoxy-based material, or a combination of two or more thereof. - A
conductive layer 16 u (e.g., under bump metallurgy (UBM)) is disposed within the recess of theinsulation layer 14 b to electrically contact on the exposed portion of theRDL 15. The electrical contact 16 (e.g., C4 pad (controlled collapse chip connection pad)) is disposed on theconductive layer 16 u to provide electrical connections between thecircuit layer 10 and external device(s). In some embodiments, thesemiconductor package device 1A does not include theconductive layer 16 u; and theelectrical contact 16 is directly disposed within the recess of theinsulation layer 14 b to electrically contact the exposed portion of theRDL 15. - As mentioned above, the comparative MEMS package structure formed by Quad Flat No-leads (QFN) technique may limit miniaturization of the MEMS package structure (e.g. a bottleneck of the dimension of the MEMS package structure is 4.5 mm*4.5 mm*1.2 mm). In addition, due to the loop height of the bonding wire, the relatively long conductive path may cause high resistance, which would adversely affect electrical performance of the comparative MEMS package structure. In some embodiments shown in
FIG. 1A of the present disclosure, by using aconductive pillar 12 to provide an electrical connection, the total size of thesemiconductor package device 1A can be reduced (e.g., to about 3.5 mm*2.6 mm*0.5 mm, about 3.0 mm*2.2 mm*0.4 mm, about 2.5 mm*2.0 mm*0.3 mm, or less). In addition, due to the relatively smaller resistance of the conductive pillar 12 (compared to the bonding wire in the comparative MEMS package structure), thesemiconductor package device 1 can have a better performance for signal transmission. - Moreover, in the process of packaging the comparative QFN MEMS structure, the molding compound is selected to have a CTE close to the CTE of the lead frame. However, such arrangement may cause a CTE mismatch between the molding compound and the MEMS die. The CTE mismatch may damage the MEMS die or hinder performance of the MEMS die. As shown in the embodiments shown in
FIG. 1A of the present disclosure, thesemiconductor package device 1A does not include a lead frame structure, and thus the material of the molding compound (e.g., the package body 13) can be selected so that the CTE of the molding compound can match the CTE of theMEMS device 11 to avoid warpage of thesemiconductor package device 1A. - In some embodiments, the binding
layer 14 a may be omitted.FIG. 1B illustrates a cross-sectional view of asemiconductor package device 1B in accordance with some embodiments of the present disclosure. Thesemiconductor package device 1B is similar to thesemiconductor package device 1A shown inFIG. 1A , except that thesemiconductor package device 1B includes theinsulation layer 14 b but does not include abinding layer 14 a. - As shown in
FIG. 1B , theRDL 15 is disposed on thepackage body 13 and electrically contacts at least a portion of the top surface of theconductive pillar 12 that is exposed from thepackage body 13. - The
insulation layer 14 b is disposed on thepackage body 13 to cover or encapsulate at least a portion of theRDL 15 or theentire RDL 15. Theinsulation layer 14 b may include at least one recess to expose at least a portion ofRDL 15. In some embodiments, theinsulation layer 14 b comprises PI, PBO, solder resist, ABF, molding compound, epoxy-based material, or a combination of two or more thereof. - The
conductive layer 16 u (e.g., under bump metallurgy (UBM)) is disposed within the recess of theinsulation layer 14 b to electrically contact on the exposed portion of theRDL 15. The electrical contact 16 (e.g., C4 pad) is disposed on theconductive layer 16 u to provide electrical connections between thecircuit layer 10 and external device(s). In some embodiments, thesemiconductor package device 1B does not include theconductive layer 16 u; and theelectrical contact 16 is directly disposed within the recess of theinsulation layer 14 b to electrically contact on the exposed portion of theRDL 15. -
FIG. 1C illustrates a cross-sectional view of a semiconductor package device 1C in accordance with some embodiments of the present disclosure. The semiconductor package device 1C is similar to thesemiconductor package device 1A shown inFIG. 1A , and at least one difference therebetween is that in thesemiconductor package device 1A ofFIG. 1A , an active surface of theMEMS device 11 is connected to thecircuit layer 10 by, for example, flip-chip technique; while in semiconductor package device 1C ofFIG. 1C , a back surface of theMEMS device 11 is connected to thecircuit layer 10 through an adhesive layer 11 h (e.g., glue). The active surface of the MEMS device is electrically connected to theRDL 15 throughelectrical connections 15 v (e.g., vias) penetrating thepackage body 13. -
FIG. 1D illustrates a cross-sectional view of asemiconductor package device 1D in accordance with some embodiments of the present disclosure. Thesemiconductor package device 1D is similar to thesemiconductor package device 1A shown inFIG. 1A , except that thesemiconductor package device 1D does not include theRDL 15 and thebinding layer 14 a. - As shown in
FIG. 1D , aconductive pad 12 p is disposed on thepackage body 13 and electrically contacts at least a portion of the top surface of theconductive pillar 12 that is exposed from thepackage body 13. Theinsulation layer 14 b is disposed on thepackage body 13 to cover or encapsulate theconductive pad 12 p. Theinsulation layer 14 b includes at least one recess to expose at least one portion of theconductive pad 12 p. Theelectrical contact 16 is disposed on theinsulation layer 14 b and extends into the recess of theinsulation layer 14 b to electrically contact theconductive pad 12 p. - In accordance with the embodiments shown in
FIG. 1D , since theelectrical contact 16 is directly disposed on theconductive pad 12 p to be electrically connected to theconductive pillar 12, thesemiconductor package device 1D does not include additional RDL, reducing the manufacturing cost. -
FIG. 1E illustrates a cross-sectional view of asemiconductor package device 1E in accordance with some embodiments of the present disclosure. Thesemiconductor package device 1E includes thesemiconductor package device 1D as shown inFIG. 1D , apackage body 19 and asubstrate 18. - The
substrate 18 may be a flexible substrate or a rigid substrate, depending upon the applications according to various embodiments. In some embodiments, thesubstrate 18 includes adielectric layer 18 d and a conductive patternedlayer 18 r. At least a portion of a top surface of the conductive patternedlayer 18 r is exposed from thedielectric layer 18 d. The electrical contact of thesemiconductor package device 1D is disposed on the exposed portion of the top surface of the conductive patternedlayer 18 r. In some embodiments, an external contact layer may be also formed or disposed on thesubstrate 18. In some embodiments, the external contact layer includes a ball grid array (BGA). In other embodiments, the external contact layer includes an array such as, but not limited to, a land grid array (LGA) or a pin grid array (PGA). In some embodiments, the external contact layer includessolder balls 18 b, which may include lead or may be leadfree (e.g., including one or more materials such as alloys of gold and tin solder or alloys of silver and tin solder). - The
package body 19 is disposed on thesubstrate 18 to cover or encapsulate thesemiconductor package device 1D. In some embodiments, thepackage body 19 includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof. -
FIG. 1F illustrates a cross-sectional view of asemiconductor package device 1F in accordance with some embodiments of the present disclosure. Thesemiconductor package device 1F is similar to thesemiconductor package device 1A shown inFIG. 1A , except that thesemiconductor package device 1F does not include thepackage body 13, the bindinglayers 14 a, theinsulation layer 14 b or theRDL 15. - As shown in
FIG. 1F , theconductive pillar 12 is disposed on thecircuit layer 10 and electrically connected to the conductive contacts of thecircuit layer 10. Theseed layer 12 s may be disposed between theconductive pillar 12 and thecircuit layer 10. Theelectrical contact 12 c is disposed on theconductive pillar 12. Theconductive pillar 12 and theelectrical contact 12 c provide electrical connections between thecircuit layer 10 and external device(s). -
FIG. 1G illustrates a cross-sectional view of asemiconductor package device 1G in accordance with some embodiments of the present disclosure. Thesemiconductor package device 1G is similar to thesemiconductor package device 1F shown inFIG. 1F , except that thesemiconductor package device 1G further includes apackage body 13. - The
package body 13 is disposed on thecircuit layer 10 to cover or encapsulate theMEMS device 11 and lateral surface(s) of theconductive pillar 12. A top surface of theconductive pillar 12 is exposed from thepackage body 13. In some embodiments, thepackage body 13 includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof. - The
electrical contact 12 c is disposed on the top surface of theconductive pillar 12 that is exposed from thepackage body 13. Theconductive pillar 12 and theelectrical contact 12 c provide electrical connections between thecircuit layer 10 and external device(s). -
FIG. 1H illustrates a cross-sectional view of asemiconductor package device 1H in accordance with some embodiments of the present disclosure. Thesemiconductor package device 1H is similar to thesemiconductor package device 1G shown inFIG. 1G , except that thesemiconductor package device 1H further includes one ormore support elements 12c 1. - The
support elements 12c 1 are disposed on the package body and electrically isolated from theMEMS device 11 or thecircuit layer 10. In some embodiments, thesupport elements 12c 1 may be solder balls or other suitable structures. In some embodiments, thesupport elements 12c 1 may be dummy balls. Thedummy balls 12c 1 are used to provide an additional support for thesemiconductor package device 1H when thesemiconductor package device 1H is connected or bonded to other device(s) or circuit board(s). -
FIG. 1I illustrates a cross-sectional view of a semiconductor package device 1I in accordance with some embodiments of the present disclosure. The semiconductor package device 1I includes thesemiconductor package device 1F as shown inFIG. 1F , apackage body 19 and asubstrate 18. - The
substrate 18 may be a flexible substrate or a rigid substrate, depending upon the applications according to various embodiments. In some embodiments, thesubstrate 18 includes adielectric layer 18 d and a conductive patternedlayer 18 r. At least a portion of a top surface of the conductive patternedlayer 18 r is exposed from thedielectric layer 18 d. Theelectrical contact 12 c of thesemiconductor package device 1F is disposed on the exposed portion of the top surface of the conductive patternedlayer 18 r. In some embodiments, an external contact layer may be also formed or disposed on thesubstrate 18. In some embodiments, the external contact layer includes a BGA. In other embodiments, the external contact layer includes an array such as, but not limited to, an LGA or a PGA. In some embodiments, the external contact layer includessolder balls 18 b, which may include lead or may be lead-free (e.g., including one or more materials such as alloys of gold and tin solder or alloys of silver and tin solder). - The
package body 19 is disposed on thesubstrate 18 to cover or encapsulate thesemiconductor package device 1F. In some embodiments, thepackage body 18 includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof. -
FIGS. 2A, 2B, 2C, 2D, 2D ′, 2E, 2F, 2G and 2H are cross-sectional views of a semiconductor structure fabricated at various stages, in accordance with some embodiments of the present disclosure. Various figures may be simplified for a better understanding of the aspects of the present disclosure. - Referring to
FIG. 2A , acircuit layer 20 is provided. Thecircuit layer 20 may include one or more electronic components, such as passive electronic components and/or active electronic components. In some embodiments, thecircuit layer 20 may include, a microprocessor (e.g., a single-core or multi-core microprocessor), a memory device, a chipset, a graphics device, or an ASIC according to various embodiments of the present disclosure. - The
MEMS device 21 is disposed on thecircuit layer 20. TheMEMS device 21 may be or include, but is not limited to, one or more gyroscopes, accelerometers, pressure sensors, microphones, actuators, mirrors, heaters, printer nozzles magnetometers, or a combination of two or more thereof. In some embodiments, theMEMS device 21 can be connected to thecircuit layer 20 by, for example, flip-chip technique. - Referring to
FIG. 2B , aseed layer 22 s is formed on a top surface of thecircuit layer 20 and a top surface and lateral surface(s) of theMEMS device 21. In some embodiments, theseed layer 22 s comprises Ti, Cu or a combination thereof. In some embodiments, theseed layer 22 s can be formed by, e.g., sputtering or other suitable techniques. - Referring to
FIG. 2C , aphotoresist layer 27 is formed on theseed layer 22 s; and one ormore openings 27 h are formed at predetermined location(s) to penetrate thephotoresist layer 27 and to expose theseed layer 22 s. In some embodiments, thephotoresist layer 27 is a dry film photoresist or other suitable photoresist. In some embodiments, theopenings 27 h can be formed by, e.g., etching, laser drilling or other suitable processes. - Referring to
FIG. 2D , aconductive pillar 22 is formed within theopenings 27 h and on at least a portion of theseed layer 22 s that is exposed from thephotoresist layer 27. In some embodiments, theconductive pillar 22 is formed by, e.g., electroplating or other suitable processes. In some embodiments, theconductive pillar 22 may be formed by a single electroplating process. In some other embodiments, referring toFIG. 2D ′, theconductive pillar 22′ may include two (or more) portions (e.g., afirst portion 22 a′ on theseed layer 22 s and asecond portion 22 b′ on thefirst portion 22 a′) formed by two (or more) electroplating processes. A thickness of thefirst portion 22 a′ is greater than a thickness of thesecond portion 22 b′. In some other embodiments, the thickness of thefirst portion 22 a′ may be less than, or substantially equal to, the thickness of thesecond portion 22 b′. In some embodiments, thefirst portion 22 a′ of theconductive pillar 22′ and thesecond portion 22 b′ of theconductive pillar 22′ are made of (or include) the same material. Alternatively, thefirst portion 22 a′ of theconductive pillar 22′ and thesecond portion 22 b′ of theconductive pillar 22′ are made of (or include) different materials. For example, in some embodiments, thefirst portion 22 a′ of theconductive pillar 22′ is made of Cu, while thesecond portion 22 b′ of theconductive pillar 22′ is made of Sn, Ag, Ni, or a combination of two or more thereof. - Referring to
FIG. 2E , thephotoresist layer 27 and at least a portion of theseed layer 22 s are removed. In some embodiments, thephotoresist layer 27 and the portion of theseed layer 22 s can be removed by, e.g., etching or other suitable processes. After the operation shown inFIG. 2E , there may beseed layer 22 s that exists between theconductive pillar 22 and thecircuit layer 20. - Referring to
FIG. 2F , apackage body 23 is formed or disposed to cover or encapsulate a top surface of thecircuit layer 20, theMEM device 21 and theconductive pillar 22. In some embodiments, thepackage body 23 includes an epoxy resin including fillers (e.g., SiO2), a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof. In some embodiments, the composition of the filler in thepackage body 23 is greater than or equal to, e.g., about 60%, about 70%, about 80%, about 90%, or about 95% by mass. For example, the composition of the filler in thepackage body 23 may be, e.g., about 87% or about 89%. In some embodiments, the glass transition temperature of thepackage body 23 is in a range from about 100° C. to about 250° C., from about 125° C. to about 220° C., or from about 150° C. to about 195° C. For example, the glass transition temperature of thepackage body 23 is in a range from about 155° C. to about 161° C., from about 151° C. to about 160° C. or from about 184° C. to about 195° C. In some embodiments, a CTE of thepackage body 23 is in a range from about 4 ppm/° C. to about 12 ppm/° C. For example, the CTE of thepackage body 23 is in a range from about 7 ppm/° C. to about 9 ppm/° C., from about 10 ppm/° C. to about 12 ppm/° C. or from about 4 ppm/° C. to about 6 ppm/° C. - In some embodiments, a portion of the
package body 23 is then removed to expose a top surface of theconductive pillar 22. In some embodiments, the removing operation is carried out by, e.g., grinding or other suitable processes. - Referring to
FIG. 2G , abinding layer 24 a is formed on thepackage body 23. Thebinding layer 24 a may include at least one recess to expose at least a portion of the top surface of theconductive pillar 22. In some embodiments, the bindinglayer 24 a comprises PI, PBO, solder resist, ABF, molding compound, epoxy-based material, or a combination of two or more thereof. In some embodiments, a temperature for forming thebinding layer 24 a is less than the glass transition temperature of thepackage body 23. In some embodiments, the temperature for forming thebinding layer 24 a is a curing temperature of a material of thebinding layer 24 a. In some embodiments, if the temperature for forming thebinding layer 24 a is greater than, or substantially equal to, the glass transition temperature of thepackage body 23 and the time for forming the binding layers 24 is long (e.g., 2 hours), the CTE of thepackage body 23 may increase (e.g., as a result of undergoing a conversion at or above the glass transition temperature). In this case, the difference between the CTE of thepackage body 23 and the CTE of theMEMS device 21 or the CTE of thecircuit layer 20 may increase as well, which may lead to warpage of the semiconductor package device. - A
RDL 25 is formed on thebinding layer 24 a and extends into the recess of the binding layer 24 to electrically contact the exposed portion of the top surface of theconductive pillar 22. - An
insulation layer 24 b is formed on theRDL 25. Theinsulation layer 24 b may include a recess to expose a portion of theRDL 25. In some embodiments, theinsulation layer 24 b comprises PI, PBO, solder resist, ABF, molding compound, epoxy-based material, or a combination of two or more thereof. In some embodiments, a temperature for forming theinsulation layer 24 b is less than the glass transition temperature of thepackage body 23. In some embodiments, the temperature for forming theinsulation layer 24 b is a curing temperature of a material of theinsulation layer 24 b. - A
conductive layer 26 u (e.g., UBM) is formed or disposed in the recess of theinsulation layer 24 b to contact the exposed portion of theRDL 25, and then an electrical contact 26 (e.g., a C4 pad) is formed or disposed on theconductive layer 26 u. In some embodiments, at least a portion of a back side of thecircuit layer 20 may be removed by, e.g., grinding process. - Referring to
FIG. 2H , a singulation is performed to form thesemiconductor package device 2. For example, the singulation may be performed through thebinding layer 24 a, theinsulation layer 24 b, theRDL 25, thepackage body 23 and thecircuit layer 20. The singulation may be performed, for example, by using a dicing saw, laser or other appropriate cutting technique. In some embodiments, thesemiconductor package device 2 is similar to thesemiconductor package device 1A shown inFIG. 1A . -
FIGS. 3A and 3B are cross-sectional views of a semiconductor structure fabricated at various stages, in accordance with some embodiments of the present disclosure. Various figures may have been simplified for a better understanding of the aspects of the present disclosure. In some embodiments, the operations shown inFIG. 3A may be carried out after the operations shown inFIG. 2F . - Referring to
FIG. 3A , aconductive layer 35 is formed on at least a portion of the top surface of theconductive pillar 22 that is exposed from thepackage body 23. In some embodiments, theconductive layer 35 may be formed by the following operations: (i) defining regions for the following physical vapor deposition (PVD) process by using a shadow mask; and (ii) depositing conductive material (e.g., Cu) to form theconductive layer 35. Alternatively, theconductive layer 35 may be formed by the following operations: (i) defining regions of theconductive layer 35 by using laser drilling to remove a portion of thepackage body 23; and (ii) forming theconductive layer 35 by printing. - After the
conductive layer 35 is deposited, an oxide layer 34 is formed on thepackage body 23. At least a portion of theconductive layer 35 is exposed from the oxide layer 34. In some embodiments, theoxide layer 35 is formed by using, e.g., a PVD process. - Referring to
FIG. 3B , an electrical contact 36 (e.g., a C4 pad) is formed or disposed on the exposed portion of theconductive layer 35. In some embodiments, the electrical contact 36 is a solder ball (e.g., Sn ball). In some embodiments, a Ni layer may be deposited on theconductive layer 35 before the formation of theoxide layer 35 to improve the adhesion between theconductive layer 35 and the electrical contact 36. - In some embodiments as shown in
FIG. 2G , the bindinglayer 24 a and theinsulation layer 24 b may be selected from, e.g., PI or PBO or a combination thereof. However, the temperature (e.g., about 200° C. to about 450° C., about 200° C. to about 400° C., or about 200° C. to about 350° C.) for curing the PI or PBO is higher than the glass transition temperature (e.g., about 150° C. to about 195° C.) of thepackage body 23. Therefore, after the PI or PBO binding layer is formed, the wafer may be bent (e.g., wafer warpage), which may lead to robot handling issue, wafer crack or increased stress of the die. As shown in the operations shown inFIGS. 3A and 3B , since theconductive layer 35 and the oxide layer 34 are formed by PVD process, the manufacturing process does not involve a process with a temperature higher than the glass transition temperature of the package body 23 (e.g., photolithography, electroplating, PI or PBO curing), and therefore avoids reliability issues as mentioned above. -
FIGS. 4A, 4B and 4C are cross-sectional views of a semiconductor structure fabricated at various stages, in accordance with some embodiments of the present disclosure. Various figures may have been simplified for a better understanding of the aspects of the present disclosure. - Referring to
FIG. 4A , acircuit layer 40 is provided. Thecircuit layer 40 may include one or more electronic components, such as passive electronic components and/or active electronic components. In some embodiments, thecircuit layer 40 may include, a microprocessor (e.g., a single-core or multi-core microprocessor), a memory device, a chipset, a graphics device, or an ASIC according to various embodiments of the present disclosure. - The
MEMS device 41 is disposed on thecircuit layer 40. TheMEMS device 41 may be or include, but is not limited to, one or more gyroscopes, accelerometers, pressure sensors, microphones, actuators, mirrors, heaters, printer nozzles magnetometers or a combination of two or more thereof. In some embodiments, theMEMS device 41 can be connected to thecircuit layer 40 by, for example, flip-chip technique. - A
package body 43 is formed or disposed to cover or encapsulate a top surface of thecircuit layer 40 and theMEM device 41. In some embodiments, thepackage body 43 includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof. - Referring to
FIG. 4B , a portion of thepackage body 43 is removed to formopenings 43 h to expose thecircuit layer 40. In some embodiments, thepackage body 43 can be removed by using, e.g., laser drilling or other suitable processes. - Referring to
FIG. 4C , a conductive material (e.g., Cu, Ni or a combination thereof) is filled within the one ormore openings 43 h to form theconductive pillar 42 by, e.g., screen printing process. An electrical contact 46 (e.g., a C4 pad) is then formed or disposed on theconductive pillar 42. In some embodiments, the electrical contact 46 is a solder ball (e.g., Sn ball). - As shown in the operations shown in
FIGS. 4A-4C , since theconductive pillar 42 is formed by screen printing process, the manufacturing process does not involve a process with a temperature higher than the glass transition temperature of the package body 43 (e.g., photolithography, electroplating, PI or PBO curing), and therefore avoids reliability issues as mentioned above. -
FIGS. 5A, 5B, 5C and 5D are cross-sectional views of a semiconductor structure fabricated at various stages, in accordance with some embodiments of the present disclosure. Various figures may have been simplified for a better understanding of the aspects of the present disclosure. - Referring to
FIG. 5A , theconductive pillar 22 is formed on thecircuit layer 20 and electrically connected to the conductive contacts of thecircuit layer 20. In some embodiments, anelectrical contact 22 c may be formed on theconductive pillar 22. - Referring to
FIG. 5B , a singulation is performed to form thesemiconductor package device 5′. For example, the singulation may be performed through thecircuit layer 20. The singulation may be performed, for example, by using a dicing saw, laser or other appropriate cutting technique. In some embodiments, thesemiconductor package device 5′ is similar to thesemiconductor package device 1B shown inFIG. 1B . - Referring to
FIG. 5C , thesemiconductor package device 5′ is inverted and connected to asubstrate 28. Thesubstrate 28 is placed on acarrier 28 c. Thesubstrate 28 includes adielectric layer 28 d and a conductive patternedlayer 28 r. At least a portion of a top surface of the conductive patternedlayer 28 r is exposed from thedielectric layer 28 d. Theelectrical contact 22 c of thesemiconductor package device 5′ is disposed on the exposed portion of the top surface of the conductive patternedlayer 28 r. - Referring to
FIG. 5D , thecarrier 28 c is removed from thesubstrate 28. Apackage body 29 is formed on thesubstrate 28 to encapsulate or cover thesemiconductor package device 5′. In some embodiments, thepackage body 29 includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof. - An
electrical contact 28 b is then formed or disposed on the conductive patternedlayer 28 d of thesubstrate 28 to form thesemiconductor package device 5. In some embodiments, thesemiconductor package device 5 is similar to thesemiconductor package device 1H shown inFIG. 1H . - In some embodiments, the processes shown in
FIGS. 5A, 5B, 5C and 5D are carried out in substrate level rather than wafer level. Therefore, a binding layer can be eliminated and thesemiconductor package device 5′ (including thecircuit layer 20 and the MEMS device 21) can be connected to thesubstrate 28 without performing the process under wafer level, which may reduce the cost for manufacturing thesemiconductor package device 5 having a fan-out structure. -
FIGS. 6A, 6B and 6C are cross-sectional views of a semiconductor structure fabricated at various stages, in accordance with some embodiments of the present disclosure. Various figures may have been simplified for a better understanding of the aspects of the present disclosure. - The operations shown in
FIG. 6A are similar to those shown inFIG. 5A , except that theconductive contact 22 c (instead of a conductive pillar) is formed on thecircuit layer 20. - Referring to
FIG. 6B , a singulation is performed to form thesemiconductor package device 6′. For example, the singulation may be performed through thecircuit layer 20. The singulation may be performed, for example, by using a dicing saw, laser or other appropriate cutting technique. - Referring to
FIG. 6C , thesemiconductor package device 6′ is inverted and connected toconductive pillars 22 of thesubstrate 28. As shown inFIG. 6C , theconductive contacts 22 c are aligned with the correspondingconductive pillars 22. Thesubstrate 28 is placed on acarrier 28 c. Thesubstrate 28 includes adielectric layer 28 d and a conductive patternedlayer 28 r. At least a portion of a top surface of the conductive patternedlayer 28 r is exposed from thedielectric layer 28 d. Theelectrical contact 22 c of thesemiconductor package device 5′ is disposed on the exposed portion of the top surface of the conductive patternedlayer 28 r. - Referring to
FIG. 6D , thecarrier 28 c is removed from thesubstrate 28. Apackage body 29 is formed on thesubstrate 28 to encapsulate or cover thesemiconductor package device 6′. In some embodiments, thepackage body 29 includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination of two or more thereof. - An
electrical contact 28 b is then formed or disposed on the conductive patternedlayer 28 r of thesubstrate 28 to form thesemiconductor package device 6. - As used herein, the terms “approximately,” “substantially,” “substantial” and “about” are used to describe and account for small variations. When used in conjunction with an event or circumstance, the terms can refer to instances in which the event or circumstance occurs precisely as well as instances in which the event or circumstance occurs to a close approximation. For example, when used in conjunction with a numerical value, the terms can refer to a range of variation less than or equal to ±10% of that numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. For example, two numerical values can be deemed to be “substantially” the same or “substantially” equal if a difference between the values is less than or equal to ±10% of an average of the values, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. For example, “substantially” parallel can refer to a range of angular variation relative to 0° that is less than or equal to ±10°, such as less than or equal to ±5°, less than or equal to ±4°, less than or equal to ±3°, less than or equal to ±2°, less than or equal to ±1°, less than or equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°. For example, “substantially” perpendicular can refer to a range of angular variation relative to 90° that is less than or equal to ±10°, such as less than or equal to ±5°, less than or equal to ±4°, less than or equal to ±3°, less than or equal to ±2°, less than or equal to ±1°, less than or equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°.
- Two surfaces can be deemed to be coplanar or substantially coplanar if a displacement between the two surfaces is no greater than 5 μm, no greater than 2 μm, no greater than 1 μm, or no greater than 0.5 μm.
- As used herein, the terms “conductive,” “electrically conductive” and “electrical conductivity” refer to an ability to transport an electric current. Electrically conductive materials typically indicate those materials that exhibit little or no opposition to the flow of an electric current. One measure of electrical conductivity is Siemens per meter (S/m). Typically, an electrically conductive material is one having a conductivity greater than approximately 104 S/m, such as at least 105 S/m or at least 106 S/m. The electrical conductivity of a material can sometimes vary with temperature. Unless otherwise specified, the electrical conductivity of a material is measured at room temperature.
- In the description of some embodiments, a component provided “on” or “over” another component can encompass cases where the former component is directly on (e.g., in physical contact with) the latter component, as well as cases where one or more intervening components are located between the former component and the latter component.
- Additionally, amounts, ratios, and other numerical values are sometimes presented herein in a range format. It is to be understood that such range format is used for convenience and brevity and should be understood flexibly to include numerical values explicitly specified as limits of a range, but also to include all individual numerical values or sub-ranges encompassed within that range as if each numerical value and sub-range is explicitly specified.
- While the present disclosure has been described and illustrated with reference to specific embodiments thereof, these descriptions and illustrations do not limit the present disclosure. It can be clearly understood by those skilled in the art that various changes may be made, and equivalent components may be substituted within the embodiments without departing from the true spirit and scope of the present disclosure as defined by the appended claims. The illustrations may not necessarily be drawn to scale. There may be distinctions between the artistic renditions in the present disclosure and the actual apparatus, due to variables in manufacturing processes and such. There may be other embodiments of the present disclosure which are not specifically illustrated. The specification and drawings are to be regarded as illustrative rather than restrictive. Modifications may be made to adapt a particular situation, material, composition of matter, method, or process to the objective, spirit and scope of the present disclosure. All such modifications are intended to be within the scope of the claims appended hereto. While the methods disclosed herein have been described with reference to particular operations performed in a particular order, it can be understood that these operations may be combined, sub-divided, or re-ordered to form an equivalent method without departing from the teachings of the present disclosure. Therefore, unless specifically indicated herein, the order and grouping of the operations are not limitations of the present disclosure.
Claims (28)
1. A micro-electromechanical systems (MEMS) package structure, comprising:
a MEMS die;
a conductive pillar adjacent to the MEMS die;
a package body encapsulating the MEMS die and the conductive pillar, and exposing a top surface of the conductive pillar; and
a binding layer on the package body, wherein a glass transition temperature (Tg) of the package body is greater than a temperature for forming the binding layer (Tc).
2. The MEMS package structure of claim 1 , wherein the binding layer comprises polyimide (PI), polybenzoxazole (PBO), solder resist, Ajinomoto build-up film (ABF), molding compound, epoxy-based material, or a combination of two or more thereof.
3. The MEMS package structure of claim 1 , wherein the Tg of the package body is in a range from about 150° C. to about 195° C.
4. The MEMS package structure of claim 1 , wherein the package body comprises a filler, and a content of the filler in the package body is greater than or equal to about 80% by mass.
5. The MEMS package structure of claim 1 , wherein a coefficient of thermal expansion (CTE) of the package body is in a range from about 4 ppm/° C. to about 12 ppm/° C.
6. The MEMS package structure of claim 1 , wherein a sidewall of the conductive pillar directly contacts the package body.
7. The MEMS package structure of claim 1 , wherein the conductive pillar comprises a first portion and a second portion on the first portion, and a thickness of the first portion is greater than a thickness of the second portion.
8. The MEMS package structure of claim 7 , wherein the first portion of the conductive pillar and the second portion of the conductive pillar comprise different materials.
9. The MEMS package structure of claim 1 , further comprising a redistribution layer (RDL) on the binding layer and electrically connected to at least a portion of the top surface of the conductive pillar that is exposed from the binding layer.
10. The MEMS package structure of claim 1 , further comprising a conductive pad on the package body to electrically connected to an exposed portion of the top surface of the conductive pillar, wherein a portion of the conductive pad is exposed from the binding layer.
11. The MEMS package structure of claim 1 , further comprising an electronic component on which the MEMS die and the conductive pillar are disposed, wherein the MEMS die is electrically connected to the electronic component.
12. The MEMS package structure of claim 11 , further comprising a seed layer between the conductive pillar and the electronic component.
13. The MEMS package structure of claim 1 , further comprising a substrate, wherein the MEMS die is electrically connected to the substrate through the conductive pillar.
14. A micro-electromechanical systems (MEMS) package structure, comprising
a substrate including a dielectric layer and a redistribution layer (RDL), at least a portion of a top surface of the RDL exposed from the dielectric layer;
a MEMS die on the substrate;
a conductive pillar electrically connecting the MEMS die to the RDL of the substrate by flip-chip bonding; and
a package body on the substrate and encapsulating the MEMS die and the conductive pillar.
15. The MEMS package structure of claim 14 , further comprising a seed layer adjacent to the conductive pillar.
16. The MEMS package structure of claim 14 , wherein a sidewall of the conductive pillar directly contacts the package body.
17. The MEMS package structure of claim 14 , wherein the top surface of the RDL does not protrude from a top surface of the dielectric layer.
18. The MEMS package structure of claim 14 , wherein the dielectric layer defines at least one opening to expose at least a portion of a bottom surface of the RDL.
19. The MEMS package structure of claim 14 , wherein the dielectric layer is a solder resist layer.
20. A method for manufacturing a micro-electromechanical systems (MEMS) package structure, the method comprising:
disposing a MEMS die on a carrier;
forming a conductive pillar on the carrier and adjacent to the MEMS die;
forming a package body to encapsulate the MEMS die and the conductive pillar and to expose a top surface of the conductive pillar; and
forming a binding layer on the package body, wherein a glass transition temperature (Tg) of the package body is greater than a temperature for forming the binding layer (Tc).
21. The method of claim 20 , wherein the Tg of the package body is in a range from about 150° C. to about 195° C.
22. The method of claim 20 , wherein the package body comprises a filler, and a content of the filler in the package body is greater than or equal to about 80% by mass.
23. The method of claim 20 , wherein a coefficient of thermal expansion (CTE) of the package body is in a range from about 4 ppm/° C. to about 12 ppm/° C.
24. The method of claim 20 , wherein the operation of forming the conductive pillar comprises:
forming a first portion of the conductive pillar on the carrier by electroplating; and
forming a second portion of the conductive pillar on the first portion of the conductive pillar by electroplating, wherein a time for forming the first portion of the conductive pillar is longer than a time for forming the second portion of the conductive pillar.
25. The method of claim 24 , wherein a thickness of the first portion of the conductive pillar is greater than a thickness of the second portion of the conductive pillar.
26. The method of claim 20 , further comprising forming a conductive pad on the package body to electrically connect to the conductive pillar before forming the binding layer.
27. The method of claim 20 , wherein the binding layer comprises polyimide (PI), polybenzoxazole (PBO), solder resist, Ajinomoto build-up film (ABF), molding compound, epoxy-based material, or a combination of two or more thereof.
28. The method of claim 20 , further comprising forming a redistribution layer (RDL) on the binding layer and electrically connecting to at least a portion of the top surface of the conductive pillar that is exposed from the binding layer.
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US11043730B2 (en) | 2018-05-14 | 2021-06-22 | Mediatek Inc. | Fan-out package structure with integrated antenna |
US11024954B2 (en) * | 2018-05-14 | 2021-06-01 | Mediatek Inc. | Semiconductor package with antenna and fabrication method thereof |
US10510591B1 (en) * | 2018-06-29 | 2019-12-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Package-on-package structure and method of manufacturing package |
CN111134654B (en) * | 2019-12-25 | 2021-06-29 | 上海交通大学 | Photoelectric nerve probe integrated with internal metal shielding layer and preparation method thereof |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9087832B2 (en) * | 2013-03-08 | 2015-07-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Warpage reduction and adhesion improvement of semiconductor die package |
US20150257263A1 (en) * | 2014-03-07 | 2015-09-10 | Rogers Corporation | Circuit materials, circuit laminates, and articles formed therefrom |
US20170338204A1 (en) * | 2016-05-17 | 2017-11-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Device and Method for UBM/RDL Routing |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5783867A (en) * | 1995-11-06 | 1998-07-21 | Ford Motor Company | Repairable flip-chip undercoating assembly and method and material for same |
CN1271165C (en) * | 2003-09-03 | 2006-08-23 | 中国科学院化学研究所 | Liquid epoxy packaging material and its preparation method and application |
US8008410B2 (en) * | 2006-11-15 | 2011-08-30 | Sumitomo Bakelite Company, Ltd. | Epoxy resin composition for encapsulating semiconductor and semiconductor device |
KR101464008B1 (en) | 2006-12-05 | 2014-11-20 | 스미또모 베이크라이트 가부시키가이샤 | Semiconductor package, core layer material, buildup layer material, and encapsulation resin composition |
US9352956B2 (en) | 2014-01-16 | 2016-05-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | MEMS devices and methods for forming same |
JP2016107251A (en) * | 2014-12-10 | 2016-06-20 | 株式会社エンプラス | Fluid handing device, and method for manufacturing fluid handing device |
US9893017B2 (en) * | 2015-04-09 | 2018-02-13 | STATS ChipPAC Pte. Ltd. | Double-sided semiconductor package and dual-mold method of making same |
US10224298B2 (en) * | 2016-09-02 | 2019-03-05 | Advanced Semiconductor Engineering, Inc. | Semiconductor package device having glass transition temperature greater than binding layer temperature |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9087832B2 (en) * | 2013-03-08 | 2015-07-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Warpage reduction and adhesion improvement of semiconductor die package |
US20150257263A1 (en) * | 2014-03-07 | 2015-09-10 | Rogers Corporation | Circuit materials, circuit laminates, and articles formed therefrom |
US20170338204A1 (en) * | 2016-05-17 | 2017-11-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Device and Method for UBM/RDL Routing |
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US10734337B2 (en) | 2020-08-04 |
US20190198469A1 (en) | 2019-06-27 |
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US10224298B2 (en) | 2019-03-05 |
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