US20150362724A1 - Optical deflector apparatus capable of increasing offset deflecting amount of mirror - Google Patents
Optical deflector apparatus capable of increasing offset deflecting amount of mirror Download PDFInfo
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- US20150362724A1 US20150362724A1 US14/733,371 US201514733371A US2015362724A1 US 20150362724 A1 US20150362724 A1 US 20150362724A1 US 201514733371 A US201514733371 A US 201514733371A US 2015362724 A1 US2015362724 A1 US 2015362724A1
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- piezoelectric
- mirror
- drive voltage
- optical deflector
- cantilevers
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- 230000003287 optical effect Effects 0.000 title claims abstract description 68
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- 235000012239 silicon dioxide Nutrition 0.000 description 11
- 239000000377 silicon dioxide Substances 0.000 description 11
- 238000000206 photolithography Methods 0.000 description 6
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910016570 AlCu Inorganic materials 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
- B81B3/0043—Increasing angular deflection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
Definitions
- the presently disclosed subject matter relates to an optical deflector apparatus.
- the optical deflector apparatus can be applied as an optical scanner to a laser pico projector, a laser radar, a bar code reader, an area sensor, an adaptive front-lighting system (AFS) type head lamp, a head-up display unit, and other optical apparatuses, to generate scanning light.
- AFS adaptive front-lighting system
- an optical deflector apparatus is constructed by a micro electro mechanical system (MEMS) device manufactured by using semiconductor manufacturing processes and micro machine technology.
- MEMS micro electro mechanical system
- a prior art optical deflector apparatus as a MEMS device is constructed by a mirror, an outer frame (fixed frame) surrounding the mirror, piezoelectric actuators coupled between the mirror and the outer frame, serving as cantilevers for rocking the mirror with respect to an axis (X-axis) of the mirror in a rocking operation mode (see: JP2012-198314A).
- an AFS control when a steering angle read from a steering angle sensor or the like is larger than a predetermined value, the area of high luminous intensities needs to be shifted from a central position of the head lamp to a right side or a left side of the head lamp, to substantially decline the optical axis of the head lamp while the visibility in a high-beam mode is maintained. If such an AFC control is applied to the above-described prior art optical deflector apparatus, an offset voltage is applied to the piezoelectric actuators to deflect the mirror around the X-axis. This is called an offset operation mode.
- rocking drive voltages are offset by an offset voltage corresponding to the shifted amount of the optical axis of the head lamp, for example.
- the offset voltage is combined with the rocking drive voltages to generate combined drive voltages which are applied to the piezoelectric actuators (see: FIGS. 14 , 15 , 16 and 17 of JP2012-198314A).
- the piezoelectric actuators are used commonly for a rocking operation mode and an offset operation mode.
- an optical deflector apparatus includes a mirror, an inner frame surrounding the mirror, an outer frame surrounding the inner frame, an inner piezoelectric actuator coupled between the mirror and the inner frame and adapted to flex the mirror around an axis of the mirror, an outer piezoelectric actuator coupled between the inner frame and the outer frame and adapted to flex the mirror around the axis of the mirror, and a driver adapted to generate an offset drive voltage and a rocking drive voltage.
- the offset drive voltage is applied to a first piezoelectric actuator selected from the inner piezoelectric actuator and the outer piezoelectric actuator.
- the rocking drive voltage is applied to a second piezoelectric actuator different from the first piezoelectric actuator, selected from the inner piezoelectric actuator and the outer piezoelectric actuator.
- the offset deflecting amount (angle) can be increased, and also, the rocking amount (angle) can be increased.
- FIG. 1 is a plan view illustrating a first embodiment of the optical deflector apparatus according to the presently disclosed subject matter
- FIGS. 2A and 2B are views for explaining the operation of the inner piezoelectric actuator of FIG. 1 ;
- FIG. 3 is a cross-sectional view of the optical deflector of FIG. 1 ;
- FIG. 4 is a graph for explaining the relationship between the deflection angle and offset angle of the mirror of FIG. 1 ;
- FIGS. 5A , 5 B, 5 C and 5 D are timing diagrams of the drive voltages applied to the piezoelectric actuators of FIG. 1 ;
- FIG. 6 is a plan view illustrating a second embodiment of the optical deflector apparatus according to the presently disclosed subject matter
- FIGS. 7A , 7 B, 7 C and 7 D are timing diagrams of the drive voltages applied to the piezoelectric actuators of FIG. 6 ;
- FIG. 8 is a plan view illustrating a first modification of the optical deflector apparatus of FIG. 6 ;
- FIG. 9 is a plan view illustrating a second modification of the optical deflector apparatus of FIG. 6 ;
- FIG. 10 is a plan view illustrating a third modification of the optical deflector apparatus of FIG. 6 ;
- FIG. 11 is a plan view illustrating a fourth modification of the optical deflector apparatus of FIG. 6 ;
- FIG. 12 is a plan view illustrating a fifth modification of the optical deflector apparatus of FIG. 6 ;
- FIG. 13 is a plan view illustrating a sixth modification of the optical deflector apparatus of FIG. 6 ;
- FIG. 14 is a plan view illustrating a third embodiment of the optical deflector apparatus according to the presently disclosed subject matter.
- FIGS. 15A and 15B are timing diagrams of the drive voltages applied to the piezoelectric actuators of FIG. 14 ;
- FIG. 16 is a plan view illustrating a fourth embodiment of the optical deflector apparatus according to the presently disclosed subject matter.
- FIGS. 17A and 17B are timing diagrams of the drive voltages applied to the piezoelectric actuators of FIG. 16 .
- FIG. 1 which illustrates a first embodiment of the optical deflector apparatus according to the presently disclosed subject matter as a one-dimensional MEMS device
- reference numeral 10 designates a one-dimensional optical deflector
- 20 designates a driver for driving the optical deflector 10
- 30 designates a laser light source.
- the optical deflector 10 is constructed by a rectangular mirror 1 for reflecting incident light L from the laser light source 30 , a rectangular inner frame (movable frame) 2 surrounding the mirror 1 , and a rectangular outer frame (fixed frame) surrounding the inner frame 2 .
- a pair of meander-type inner piezoelectric actuators 4 a and 4 b are coupled between coupling portions 1 a and 1 b of the mirror 1 and inner coupling portions 2 a and 2 b of the inner frame 2 and serving as cantilevers for rocking the mirror 1 around an X-axis on the plane of the mirror 1 centered at the center 0 of the mirror 1 .
- the inner piezoelectric actuators 4 a and 4 b are arranged opposite to each other with respect to the mirror 1 .
- a pair of torsion bars 5 a and 5 b are coupled to outer circumferences of the inner frame 2 along the X-axis.
- linear outer piezoelectric actuators 6 a - 1 and 6 a - 2 are coupled between the torsion bar 5 a and the outer frame 3
- linear outer piezoelectric actuators 6 b - 1 and 6 b - 2 are coupled between the torsion bar 5 b and the outer frame 3 .
- the flexing direction of the outer piezoelectric actuators 6 a - 1 and 6 b - 1 are opposite to that of the outer piezoelectric actuators 6 b - 1 and 6 b - 2 , so that the outer piezoelectric actuators 6 a - 1 , 6 a - 2 , 6 b - 1 and 6 b - 2 serve as cantilevers for rocking the mirror 1 around the X-axis.
- the torsion bars 5 a and 5 b can be coupled to the outer frame 3 .
- the mirror 1 can be square, rectangular, polygonal or elliptical.
- the meander-type inner piezoelectric actuators 4 a and 4 b are symmetrical to each other with respect to the Y-axis.
- the meander-type inner piezoelectric actuator 4 a is constructed by piezoelectric cantilevers 4 a - 1 s , 4 a - 2 and 4 a - 3 s which are serially-coupled from the coupling portion 1 a of the mirror 1 to a coupling portion 2 a of the inner frame 2 via folded portions Fa 12 and Fa 23 .
- each of the piezoelectric cantilevers 4 a - 1 s , 4 a - 2 and 4 a - 3 s is in parallel with the Y-axis.
- the piezoelectric cantilevers 4 a - 1 s , 4 a - 2 and 4 a - 3 s are folded at their ends or meandering from the mirror 1 to the inner frame 2 , so that the amplitudes of the piezoelectric cantilevers 4 a - 1 s , 4 a - 2 and 4 a - 3 s can be changed along directions perpendicular to the X-axis.
- the meander-type inner piezoelectric actuator 4 b is constructed by piezoelectric cantilevers 4 b - 1 s , 4 b - 2 and 4 b - 3 s which are serially-coupled from the coupling portion 1 b of the mirror 1 to an inner coupling portion 2 b of the inner frame 2 via folded portions Fb 12 and Fb 23 .
- each of the piezoelectric cantilevers 4 b - 1 s , 4 b - 2 and 4 b - 3 s are in parallel with the Y-axis.
- the piezoelectric cantilevers 4 b - 1 s , 4 b - 2 and 4 b - 3 s are folded at their ends or meandering from the mirror 1 to the inner frame 2 , so that the piezoelectric cantilevers 4 b - 1 s , 4 b - 2 and 4 b - 3 s can be changed along directions perpendicular to the X-axis.
- the meander-type inner piezoelectric actuators 4 a ( 4 b ) operate as follows.
- the piezoelectric cantilevers 4 a - 1 s , 4 a - 2 and 4 a - 3 s are divided into an odd-numbered group of the piezoelectric cantilevers 4 a - 1 s and 4 a - 3 s ( 4 b - 1 s and 4 b - 3 s ), and an even-numbered group of the piezoelectric cantilever 4 a - 2 ( 4 b - 2 ) alternating with the odd-numbered group of the piezoelectric cantilevers 4 a - 1 s and 4 a - 3 s ( 4 b - 1 s and 4 b - 3 s ).
- the piezoelectric cantilevers 4 a - 1 s , 4 a - 2 and 4 a - 3 s are as illustrated in FIG. 2A .
- the odd-numbered group of the piezoelectric cantilevers 4 a - 1 s and 4 a - 3 s are flexed in one direction, for example, in an upward direction U, and the even-numbered group of the piezoelectric cantilever 4 a - 2 is flexed in the other direction, i.e., in a downward direction D.
- the odd-numbered group of the piezoelectric cantilevers 4 a -is and 4 a - 3 s are flexed in the downward direction D
- the even-numbered group of the piezoelectric cantilever 4 a - 2 is flexed in the upward direction U.
- each of the piezoelectric cantilever 4 a - 1 s and 4 a - 3 s is about half of that of the piezoelectric cantilever 4 a - 2
- the flexing amounts of the piezoelectric cantilevers 4 a - 1 s and 4 a - 3 s are about half of that of the piezoelectric cantilever 4 a - 2 ; however, the flexing center of the piezoelectric actuator 4 a is close to the center thereof.
- the mirror 1 is flexed around the X-axis by the inner piezoelectric actuators 4 a and 4 b.
- the number of piezoelectric cantilevers in each of the inner piezoelectric actuators 4 a and 4 b can be other values such as 4, 5, . . . .
- the torsion bars 5 a and 5 b have ends coupled to the outer circumference of the inner frame 2 . Therefore, the torsion bars 5 a and 5 b are twisted by the outer piezoelectric actuators 6 a - 1 , 6 a - 2 , 6 b - 1 and 6 b - 2 to rock the mirror 1 around the X-axis. Other ends of the torsion bars 5 a and 5 b can be coupled to the inner circumference of the outer frame 3 .
- a method for manufacturing the optical deflector 10 of FIG. 1 is explained with reference to FIG. 3 .
- a silicon-on-insulator (SOI) structure constructed by a monocrystalline silicon support layer (“Handle” layer) 301 , an intermediate (buried) silicon dioxide layer (“Box” layer) 302 , and a monocrystalline silicon active layer (“Device” layer) 303 is prepared. Also, by a thermal oxidation process, a silicon dioxide layer 304 is formed on the support layer 301 , and a silicon dioxide layer 305 is formed on the active layer 303 .
- SOI silicon-on-insulator
- piezoelectric actuator cantilevers 4 a - 1 s , 4 a - 2 , 4 a - 3 s, 4 b - 1 s , 4 b - 2 , 4 b - 3 s and the piezoelectric actuators 6 b - 1 and 6 b - 2 are formed on the silicon dioxide layer 305 .
- a Pt/Ti lower electrode layer 306 consisting of an about 50 nm thick Ti and an about 150 nm thick Pt on Ti is formed by a sputtering process.
- an about 3 ⁇ m thick PZT layer 307 is deposited on the lower electrode layer 306 by an arc discharge reactive ion plating (ADRIP) process at a temperature of about 500° C. to 600° C.
- an about 150 nm thick Ti upper electrode layer 308 is formed on the PZT layer 307 by a sputtering process.
- the upper electrode layer 308 and the PZT layer 307 are patterned by a photolithography and etching process.
- the lower electrode layer 306 and the silicon dioxide layer 305 are patterned by a photolithography and etching process.
- an about 500 nm thick silicon dioxide interlayer 309 is formed on the entire surface by a plasma chemical vapor deposition (CVD) process.
- CVD plasma chemical vapor deposition
- contact holes are perforated in the silicon dioxide interlayer 309 by a photolithography and dry etching process.
- the contact holes correspond to the piezoelectric cantilevers 4 a - 1 s , 4 a - 2 , 4 a - 3 s, 4 b - 1 s , 4 b - 2 and 4 b - 3 s, the piezoelectric actuators 6 a - 1 , 6 a - 2 , 6 b - 1 and 6 b - 2 and the pads P formed on the outer frame 3 .
- wiring layers 310 made of AlCu (1% Cu) are formed by a photolithography process, a sputtering process, and a lift-off process.
- the wiring layers 310 are electrically connected between the upper electrode layers 308 of the piezoelectric cantilevers 4 a - 1 s , 4 a - 2 , 4 a - 3 s, 4 b - 1 s , 4 b - 2 and 4 b - 3 s and the piezoelectric actuators 6 a - 1 , 6 a - 2 , 6 b - 1 and 6 b - 2 and their corresponding pads P.
- the silicon dioxide layer 304 is etched by a photolithography and dry etching process, so that the silicon dioxide layer 304 is left in an area corresponding to the inner frame 2 and the outer frame 3 .
- the support layer 301 is etched by a dry etching process using the silicon dioxide layer 304 as an etching mask. Then, the silicon dioxide layer 302 is etched by a wet etching process using the support layer 301 as an etching mask.
- an aluminum (Al) reflective metal layer 311 is formed by an evaporation process on the active layer 303 , and is patterned by a photolithography and etching process, thus completing the optical deflector 10 .
- the torsion bars 5 a and 5 b are formed by the active layer 303 .
- FIG. 4 is a graph for explaining the deflection angle and offset angle of the mirror 1 of FIG. 1 .
- the driver 20 controls the outer piezoelectric actuators 6 a - 1 , 6 a - 2 , 6 b - 1 and 6 b - 2 using sinusoidal-wave voltages V X1 and V X2 opposite in phase to each other, so that the rocking angle of the mirror 1 is from ⁇ to + ⁇ with respect to a normal line n 1 normal to the plane m 1 of the mirror 1 as illustrated in FIG. 4 .
- the driver 20 controls the inner piezoelectric actuators 4 a and 4 b using saw-tooth drive voltages V OFFSET1 and V OFFSET2 opposite in phase to each other, so that the rocking angle of the mirror 1 is shifted by ⁇ OFFSET , so that the plane m 1 of the mirror 1 is rotated by ⁇ OFFSET to a plane m 2 with a normal line n 2 as illustrated in FIG. 4 .
- the driver 20 also controls the outer piezoelectric actuators 6 a - 1 , 6 a - 2 , 6 b - 1 and 6 b - 2 using the above-mentioned sinusoidal-wave voltages V X1 and V X2 , so that the rocking angle of the mirror 1 is from ⁇ to + ⁇ with respect to the normal line n 2 , i. e. , from ⁇ OFFSET to + ⁇ OFFSET with respect to the normal line n 1 .
- the rocking angle of the mirror 1 from ⁇ 10° to +10° with respect to the normal line n 1 is changed by the offset angle ⁇ OFFSET 5° of the inner piezoelectric actuators 4 a and 4 b to the rocking angle of the mirror 1 from ⁇ 15° to +5° with respect to the normal line n 1 .
- Rocking sinusoidal-wave drive voltages V X1 and V X2 opposite in phase to each other as illustrated in FIGS. 5A and 5B are applied by the driver 20 to the outer piezoelectric actuators 6 a - 1 and 6 a - 2 , respectively, so that the outer piezoelectric actuators 6 a - 1 and 6 a - 2 carry out flexing operations in opposite directions to each other, which would distort the torsion bar 5 a in a direction to cause a torque in the mirror 1 around the X-axis.
- the above-mentioned rocking sinusoidal-wave drive voltages V X1 and V X2 are applied by the driver 20 to the outer piezoelectric actuators 6 b - 1 and 6 b - 2 , respectively, so that the outer piezoelectric actuators 6 b - 1 and 6 b - 2 carry out flexing operations in opposite directions to each other, which also would distort the torsion bar 5 b in the above-mentioned direction to cause a torque in the mirror 1 around the X-axis.
- the torsion bars 5 a and 5 b are twisted to rock the mirror 1 around the X-axis.
- the frequency f X of the sinusoidal-wave drive voltages V X1 and V X2 is a resonant frequency such as 20 kHz of a mechanical vibrating system of the mirror 1 with respect to the X-axis depending upon the mirror 1 , the inner frame 2 and the inner piezoelectric actuators 4 a and 4 b, the rocking angle of the mirror 1 can further be enhanced.
- An offset saw-tooth drive voltage V OFFSET1 as illustrated in FIG. 5C is applied by the driver 20 to the odd-numbered piezoelectric cantilevers 4 a - 1 s and 4 a - 3 s of the inner piezoelectric actuator 4 a and the odd-numbered.
- piezoelectric cantilevers 4 b - 1 s and 4 b - 3 s of the inner piezoelectric actuator 4 b Simultaneously, an offset drive voltage V OFFSET2 as illustrated in FIG.
- the odd-numbered piezoelectric cantilevers 4 a - 1 s , 4 a - 3 s; 4 b - 1 s , 4 b - 3 s and the even-numbered piezoelectric cantilevers 4 a - 2 and 4 b - 2 carry out flexing operations in opposite directions to each other. As a result, the mirror 1 is flexed in one direction.
- the offset drive voltage V OFFSET1 is rectangular-wave shaped as indicated by a solid line in FIG. 5C
- the offset drive voltage V OFFSET2 is pulse-shaped as indicated by a solid line in FIG. 5D
- the offset drive voltage V OFFSET2 can be L(low level).
- the offset drive voltage V OFFSET1 is pulse-shaped as indicated by a dotted line in FIG. 5C
- the offset drive voltage V OFFSET2 is rectangular-wave shaped as indicated by a dotted line FIG. 5D .
- the offset drive voltage V OFFSET1 can be L (low level).
- the offset drive voltages V OFFSET1 and V OFFSET2 have the same frequency f X of the rocking sinusoidal-wave drive voltages V X1 , and V X2 .
- the amplitude of the rectangular-waved offset drive voltage V OFFSET1 or V OFFSET2 corresponds to an offset angle of the mirror 1 .
- T A is an image active period
- T B is a blanking period. That is, in a horizontal scanning by the rocking sinusoidal-wave drive voltages V X1 and V X2 , the scanning speed is constant in the image active period T A , while the scanning speed is low in the blanking period T B . Therefore, since image display is impossible in the blanking period T B , the offset drive voltages V OFFSET1 and V OFFSET2 are inactive or pulse-shaped.
- the offset drive voltages V OFFSET1 and V OFFSET2 can always be active even in the blanking period T B ; however, in this case, charges may be stored in the PZT layer 308 so that the polarization within the PZT layer 308 would be decreased to decrease the offset angle of the mirror 1 .
- the offset drive voltages V OFFSET1 and V OFFSET2 are caused to be inactive or pulse-shaped in the blanking period T B , the charges stored in the PZT layer 308 are emitted to recover the offset angle corresponding to the rectangular-waved offset drive voltage V OFFSET1 or V OFFSET2 in the active period T A .
- the lengths of the piezoelectric cantilevers can be the same, so that the flexing amounts of the piezoelectric cantilevers can be enhanced.
- the piezoelectric cantilevers 4 a - 1 s , 4 a - 2 and 4 a - 3 s and the piezoelectric cantilevers 4 b - 1 s , 4 b - 2 and 4 b - 3 s can be symmetrical with respect to the center 0 of the mirror 1 .
- the offset drive voltage V OFFSET1 is applied to the piezoelectric cantilevers 4 a - 1 s , 4 a - 3 s and 4 b - 2
- the offset drive voltage V OFFSET2 is applied to the piezoelectric cantilevers 4 b - 1 s , 4 b - 3 s and 4 a - 2
- the meander-type piezoelectric cantilevers 4 a and 4 b can be provided between the inner frame 2 and the outer frame 3
- the piezoelectric actuators 6 a - 1 and 6 a - 2 along with the torsion bars 4 a and 4 b can be provided between the mirror 1 and the inner frame 2 .
- FIG. 6 which illustrates a second embodiment of the optical deflector apparatus according to the presently disclosed subject matter
- the torsion bars 5 a and 5 b and the outer piezoelectric actuators 6 a - 1 , 6 a - 2 , 6 b - 1 and 6 b - 2 of FIG. 1 are replaced by a pair of meander-type outer piezoelectric actuators 7 a and 7 b which are symmetrical to each other with respect to the Y-axis.
- the meander-type outer piezoelectric actuator 7 a is constructed by piezoelectric cantilevers 7 a - 1 s , 7 a - 2 and 7 a - 3 s which are serially-coupled from a coupling portion 2 c of the inner frame 2 to a coupling portion 3 a of the outer frame 3 via folded portions Fc 12 and Fc 23 .
- each of the piezoelectric cantilevers 7 a - 1 s , 7 a - 2 and 7 a - 3 s is in parallel with the Y-axis.
- the piezoelectric cantilevers 7 a - 1 s , 7 a - 2 and 7 a - 3 s are folded at their ends or meandering from the inner frame 2 to the outer frame 3 so that the amplitudes of the piezoelectric cantilevers 7 a - 1 s , 7 a - 2 and 7 a - 3 s can be changed along directions perpendicular to the X-axis.
- the meander-type outer piezoelectric actuator 7 b is constructed by piezoelectric cantilevers 7 b - 1 s , 7 b - 2 and 7 b - 3 s which are serially-coupled from a coupling portion 2 d of the inner frame 2 to a coupling portion 3 b of the outer frame 3 via folded portions Fd 12 and Fd 23 .
- each of the piezoelectric cantilevers 7 b - 1 s , 7 b - 2 and 7 b - 3 s are in parallel with the Y-axis.
- the piezoelectric cantilevers 7 b - 1 s , 7 b - 2 and 7 b - 3 s are folded at their ends or meandering from the inner frame 2 to the outer frame 3 so that the piezoelectric cantilevers 7 b - 1 s , 7 b - 2 and 7 b - 3 s can be changed along directions perpendicular to the X-axis.
- the meander-type outer piezoelectric actuators 7 a ( 7 b ) operate in the same way as the inner piezoelectric actuators 4 a ( 4 b ).
- the mirror 1 is rocked around the X-axis by the outer piezoelectric actuators 7 a and 7 b.
- the number of piezoelectric cantilevers in each of the outer piezoelectric actuators 7 a and 7 b can be other values such as 4, 5, . . . .
- a rocking saw-tooth drive voltage V X1 ′ as illustrated in FIG. 7A is applied by the driver 20 to the odd-numbered piezoelectric cantilevers 7 a - 1 s and 7 a - 3 s of the outer piezoelectric actuator 7 a and the odd-numbered piezoelectric cantilevers 7 b - 1 s and 7 b - 3 s of the inner piezoelectric actuator 7 b.
- a rocking saw-tooth drive voltage V X2 ′ as illustrated in FIG.
- the odd-numbered piezoelectric cantilevers 7 s - 1 s , 7 a - 3 s; 7 b - 1 s , 7 b - 3 s and the even-numbered piezoelectric cantilevers 7 a - 2 and 7 b - 2 carry out flexing operations in opposite directions to each other.
- the mirror 1 is rocked around the X-axis.
- the meander-type outer piezoelectric actuators 7 a and 7 b are specialized for a rocking operation mode around the X-axis
- the meander-type inner piezoelectric actuators 4 a and 4 b are specialized for an offset operation mode around the X-axis.
- the meander-type inner piezoelectric actuators 4 a and 4 b can be specialized for a rocking operation mode around the X-axis
- the meander-type outer piezoelectric actuators 7 a and 7 b can be specialized for an offset operation mode around the X-axis.
- FIG. 8 which illustrates a first modification of the optical deflector apparatus of FIG. 6
- the meander-type inner piezoelectric actuator 4 b of FIG. 6 is replaced by a meander-type inner piezoelectric actuator 4 b ′ which is symmetrical to the meander-type inner piezoelectric actuator 4 a with respect to the center 0 of the mirror 1
- the meander-type outer piezoelectric actuator 7 b of FIG. 6 is replaced by a meander-type outer piezoelectric actuator 7 b ′ which is symmetrical to the meander-type inner piezoelectric actuator 7 a with respect to the center 0 of the mirror 1 .
- the rocking saw-tooth drive voltage V X1 ′ is applied by the driver 20 to the piezoelectric cantilevers 7 a - 1 s , 7 a - 3 s and 7 b - 2
- the rocking saw-tooth drive voltage V X2 ′ is applied by the driver 20 to the piezoelectric cantilevers 7 a - 2 , 7 b - 1 s and 7 b - 3 s.
- the offset saw-tooth drive voltage V OFFSET1 is applied by the driver 20 to the piezoelectric cantilevers 4 a - 1 s , 4 a - 3 s and 4 b - 2 and the offset saw-tooth drive voltage V OFFSET2 is applied by the driver 20 to the piezoelectric cantilevers 4 a - 2 , 4 b - 1 s and 4 b - 3 s.
- FIG. 9 which illustrates a second modification of the optical deflector apparatus of FIG. 6
- the piezoelectric cantilevers 7 a - 1 s , 7 a - 3 s, 7 b - 1 s and 7 b - 3 s of FIG. 6 are replaced by piezoelectric cantilevers 7 a - 1 , 7 a - 3 , 7 b - 1 and 7 b - 3 , respectively, whose length is the same as that of the piezoelectric cantilevers 7 a - 2 and 7 b - 2 .
- the operation of the optical deflector of FIG. 9 is the same as that of the optical deflector of FIG.
- FIG. 10 which illustrates a third modification of the optical deflector apparatus of FIG. 6
- the piezoelectric cantilevers 4 a - 1 s , 4 a - 3 s, 4 b - 1 s and 4 b - 3 s of FIG. 6 are replaced by piezoelectric cantilevers 4 a - 1 , 4 a - 3 , 4 b - 1 and 4 b - 3 , respectively, whose length is the same as that of the piezoelectric cantilevers 4 a - 2 and 4 b - 2 .
- the operation of the optical deflector of FIG. 10 is the same as that of the optical deflector of FIG.
- FIG. 11 which illustrates a fourth modification of the optical deflector apparatus of FIG. 6
- the operation of the optical deflector of FIG. 11 is the same as that of the optical deflector of FIG. 6 , except for the following.
- the rocking saw-tooth drive voltage V X1 ′ is applied by the driver 20 to the piezoelectric cantilevers 7 a - 1 , 7 a - 3 , 7 b - 1 and 7 b - 3 .
- the offset saw-tooth drive voltage V OFFSET1 is applied by the driver 20 to the piezoelectric cantilevers 4 a - 1 , 4 a - 3 , 4 b - 1 and 4 b - 3 .
- FIG. 12 which illustrates a fifth modification of the optical deflector apparatus of FIG. 6
- the rocking saw-tooth drive voltage V X1 ′ is applied by the driver 20 to the piezoelectric cantilevers 7 a - 1 , 7 a - 3 , 7 b - 1 and 7 b - 3 .
- the offset saw-tooth drive voltage V OFFSET1 is applied by the driver 20 to the piezoelectric cantilevers 4 a - 1 , 4 a - 3 and 4 b - 2
- the offset saw--tooth drive voltage V OFFSET2 is applied by the driver 20 to the piezoelectric cantilevers 4 a - 2 , 4 b - 1 and 4 b - 3 .
- FIG. 13 which illustrates a sixth modification of the deflector apparatus of FIG. 6
- the meander-type outer piezoelectric actuator 7 b of FIG. 12 is replaced by a meander-type outer piezoelectric actuator 7 b ′ which is symmetrical to the meander type outer piezoelectric actuator 7 a of FIG. 12 with respect to the center 0 of the mirror 1 .
- the operation of the optical deflector of FIG. 13 is the same as that of the optical deflector of FIG.
- the meander-type outer piezoelectric actuators 7 a and 7 b ( 7 b ′) are specialized for a rocking operation mode around the X-axis
- the meander-type inner piezoelectric actuators 4 a and 4 b ( 4 b ′) are specialized for an offset operation mode around the X-axis.
- the meander-type inner piezoelectric actuators 4 a and 4 b ( 4 b ′) can be specialized for a rocking operation mode around the X-axis
- the meander-type outer piezoelectric actuators 7 a and 7 b ( 7 b ′) can be specialized for an offset operation mode around the X-axis.
- FIG. 14 which illustrates a third embodiment of the optical deflector apparatus according to the presently disclosed subject matter as a two-dimensional MEMS device
- reference numeral 100 designates a two-dimensional optical deflector
- 200 designates a driver
- 300 designates a laser light source.
- the optical deflector 100 includes the optical deflector 10 of FIG. 1 . Additionally, in order to carry out another rocking operation mode around the Y-axis, the optical deflector 100 includes another outer frame (fixed frame) 101 , a pair of torsion bars 102 a and 102 b coupled to the outer circumference of the outer frame 3 along the Y-axis, and linear outer piezoelectric actuators 103 a - 1 and 103 a - 2 coupled between the torsion bar 102 a and the outer frame 101 , and linear outer piezoelectric actuators 103 b - 1 and 103 b - 2 coupled between the torsion bar 102 b and the outer frame 101 .
- the outer frame 3 serves as a movable frame.
- the flexing direction of the outer piezoelectric actuators 103 a - 1 and 103 b - 1 is opposite to that of the outer piezoelectric actuators 103 a - 2 and 103 b - 2 , so that each of the outer piezoelectric actuators 103 a - 1 , 103 a - 2 , 103 b - 1 and 103 b - 2 serves as cantilevers for rocking the mirror 1 around the Y-axis.
- the torsion bars 102 a and 102 b can be coupled to the outer frame 101 .
- the outer frame 101 has the same structure as the outer frame 3 as illustrated in FIG. 3 .
- the pads P are formed on the outer frame 101 , not on the outer frame 3 .
- the torsion bars 102 a and 102 b have the same structure as the torsion bars 5 a and 5 b as illustrated in FIG. 3 .
- the linear piezoelectric actuators 103 a - 1 , 103 a - 2 , 103 b - 1 and 103 b - 2 have the same structure as the linear piezoelectric actuators 6 a - 1 , 6 a - 2 , 6 b -a and 6 b - 2 as illustrated in FIG. 3 .
- Rocking sinusoidal-wave drive voltages V Y1 and V Y2 opposite in phase to each other as illustrated in FIGS. 15A and 15B are applied by the driver 200 to the outer piezoelectric actuators 103 a - 1 and 103 a - 2 , respectively, so that the outer piezoelectric actuators 103 a - 1 and 103 a - 2 carry out flexing operations in opposite directions to each other, which would distort the torsion bar 102 a in a direction to cause a torque in the mirror 1 around the Y-axis.
- the above-mentioned rocking sinusoidal-wave drive voltages V Y1 and V Y2 are applied by the driver 200 to the outer piezoelectric actuators 103 b - 1 and 103 b - 2 , respectively, so that the outer piezoelectric actuators 103 b - 1 and 103 b - 2 carry out flexing operations in opposite directions to each other, which would distort the torsion bar 102 b in the above-mentioned direction to cause a torque in the mirror 1 around the Y-axis.
- the torsion bars 102 a and 102 b are twisted to rock the mirror 1 around the Y-axis.
- the frequency f Y of the rocking sinusoidal-wave drive voltages V Y1 and V Y2 is 60 Hz, for example, much lower than the resonant frequency f X of the sinusoidal-wave drive voltages V X1 and V X2 .
- FIG. 16 which illustrates a fourth embodiment of the optical deflector apparatus according to the presently disclosed subject matter as a two-dimensional MEMS device
- the torsion bars 102 a and 102 b and the linear piezoelectric actuators 103 a - 1 , 103 a - 2 , 103 b - 1 and 103 b - 2 of FIG. 14 are replaced by a pair of meander-type piezoelectric actuators 104 a and 104 b which are symmetrical to each other with respect to the X-axis.
- the piezoelectric actuator 104 a is constructed by piezoelectric actuators 104 a - 1 s , 104 a - 2 and 104 a - 3 s which are serially coupled from an outer coupling portion 3 c of the outer frame 3 to a coupling portion 101 a of the outer frame 101 via folded portions Fe 12 and Fe 23 .
- each of the piezoelectric cantilevers 104 a - 1 s , 104 a - 2 and 104 a - 3 s are in parallel with the X-axis.
- the piezoelectric actuators 104 a - 1 s , 104 a - 2 and 104 a - 3 s are folded at their ends or meandering from the outer frame 3 to the outer frame 101 , so that amplitudes of the piezoelectric actuators 104 a - 1 s , 104 a - 2 and 104 a - 3 s can be changed along directions perpendicular to the Y-axis.
- the piezoelectric actuator 104 b is constructed by piezoelectric actuators 104 b - 1 s , 104 b - 2 and 104 b - 3 s which are serially coupled from an outer coupling portion 3 d of the outer frame 3 to a coupling portion 101 a of the outer frame 101 via folded portions Ff 12 and Ff 23 .
- each of the piezoelectric cantilevers 104 b - 1 s , 104 b - 2 and 104 b - 3 s are in parallel with the X-axis.
- the piezoelectric actuators 104 b - 1 s , 104 b - 2 and 104 b - 3 s are folded at their ends or meandering from the outer frame 3 to the outer frame 101 , so that amplitudes of the piezoelectric actuators 104 b - 1 s , 104 b - 2 and 104 b - 3 s can be changed along directions perpendicular to the Y-axis.
- the meander-type piezoelectric actuators 104 a and 104 b operate in the same way as the meander-type piezoelectric actuators 4 a and 4 b.
- the mirror 1 is rocked around the Y-axis by the piezoelectric actuators 104 a and 104 b.
- the number of piezoelectric cantilevers 104 a and 104 b can be other values such as 4, 5, . . . .
- the meander-type piezoelectric actuators 104 a and 104 b have the same structure as the meander-type piezoelectric actuators 4 a and 4 b as illustrated in FIG. 3 .
- a rocking saw-tooth drive voltage V Y1 ′ as illustrated in FIG. 17A is applied by the driver 200 to the odd-numbered piezoelectric cantilevers 104 a - 1 s and 104 a - 3 s of the outer piezoelectric actuator 104 a and the odd-numbered piezoelectric cantilevers 104 b - 1 s and 104 b - 3 s of the outer piezoelectric actuator 104 b.
- the odd-numbered piezoelectric cantilevers 104 a - 1 s , 104 a - 3 s, 104 b - 1 s , 104 b - 3 s and the even-numbered piezoelectric cantilevers 104 a - 2 and 104 b - 2 carry out flexing operations in phase with each other.
- the mirror 1 is rocked around the Y-axis.
- the frequency f y of the rocking saw-tooth drive voltages V Y1 ′ and V Y2 ′ is 60 Hz, for example, much lower than the resonant frequency f X of the sinusoidal-wave drive voltages V X1 and V X2 .
- the length of piezoelectric cantilevers 104 a - 1 s , 104 a - 3 s, 104 b - 1 s and 104 b - 3 s is half of the piezoelectric cantilever 104 a - 2 and 104 b - 2 ; however, the length of piezoelectric cantilevers 104 a - 1 s , 104 a -- 3 s, 104 b - 1 s and 104 b - 3 s can be the same as that of the piezoelectric cantilever 104 a - 2 and 104 b - 2 . Also, the piezoelectric actuators 104 a and 104 b can be symmetrical to each other with respect to the center 0 of the mirror 1 .
Abstract
In an optical deflector apparatus including a mirror, an inner frame, an outer frame, an inner piezoelectric actuator adapted to flex the mirror around an axis of the mirror, an outer piezoelectric actuator adapted to flex the mirror around the axis of the mirror, and a driver adapted to generate an offset drive voltage and a rocking drive voltage. The offset drive voltage is applied to a first piezoelectric actuator selected from the inner piezoelectric actuator and the outer piezoelectric actuator. The rocking drive voltage is applied to a second piezoelectric actuator different from the first piezoelectric actuator.
Description
- This application claims the priority benefit under 35 U.S.C. §119 to Japanese Patent Application No. JP2014-121658 filed on Jun. 12, 2014, which disclosure is hereby incorporated in its entirety by reference.
- 1. Field
- The presently disclosed subject matter relates to an optical deflector apparatus. The optical deflector apparatus can be applied as an optical scanner to a laser pico projector, a laser radar, a bar code reader, an area sensor, an adaptive front-lighting system (AFS) type head lamp, a head-up display unit, and other optical apparatuses, to generate scanning light.
- 2. Description of the Related Art
- Generally, in an optical scanner or the like, an optical deflector apparatus is constructed by a micro electro mechanical system (MEMS) device manufactured by using semiconductor manufacturing processes and micro machine technology.
- A prior art optical deflector apparatus as a MEMS device is constructed by a mirror, an outer frame (fixed frame) surrounding the mirror, piezoelectric actuators coupled between the mirror and the outer frame, serving as cantilevers for rocking the mirror with respect to an axis (X-axis) of the mirror in a rocking operation mode (see: JP2012-198314A).
- On the other hand, in an AFS control, when a steering angle read from a steering angle sensor or the like is larger than a predetermined value, the area of high luminous intensities needs to be shifted from a central position of the head lamp to a right side or a left side of the head lamp, to substantially decline the optical axis of the head lamp while the visibility in a high-beam mode is maintained. If such an AFC control is applied to the above-described prior art optical deflector apparatus, an offset voltage is applied to the piezoelectric actuators to deflect the mirror around the X-axis. This is called an offset operation mode.
- In the above-described prior art optical deflector apparatus, when a rocking operation mode and an offset operation are simultaneously carried out, rocking drive voltages are offset by an offset voltage corresponding to the shifted amount of the optical axis of the head lamp, for example. In other words, the offset voltage is combined with the rocking drive voltages to generate combined drive voltages which are applied to the piezoelectric actuators (see:
FIGS. 14 , 15, 16 and 17 of JP2012-198314A). In this case, the piezoelectric actuators are used commonly for a rocking operation mode and an offset operation mode. - In the above-described prior art optical deflector apparatus, however, when the combined drive voltages become larger than a threshold value corresponding to the maximum rocking angle of the mirror with respect to the X-axis of the mirror, the piezoelectric actuators would be damaged. Therefore, the offset voltage is limited, so that the combined drive voltages do not exceed the threshold value. As a result, the offset deflecting amount of the mirror cannot be increased. Otherwise, if the offset voltage is caused to be increased, the rocking drive voltages need to be decreased. In this case, it is impossible to increase the rocking amount of the mirror.
- The presently disclosed subject matter seeks to solve the above-described problems.
- According to the presently disclosed subject matter, an optical deflector apparatus includes a mirror, an inner frame surrounding the mirror, an outer frame surrounding the inner frame, an inner piezoelectric actuator coupled between the mirror and the inner frame and adapted to flex the mirror around an axis of the mirror, an outer piezoelectric actuator coupled between the inner frame and the outer frame and adapted to flex the mirror around the axis of the mirror, and a driver adapted to generate an offset drive voltage and a rocking drive voltage. The offset drive voltage is applied to a first piezoelectric actuator selected from the inner piezoelectric actuator and the outer piezoelectric actuator. The rocking drive voltage is applied to a second piezoelectric actuator different from the first piezoelectric actuator, selected from the inner piezoelectric actuator and the outer piezoelectric actuator.
- According to the presently disclosed subject matter, since the first piezoelectric actuator for an offset operation mode is independent of the second piezoelectric actuator for a rocking operation mode, the offset deflecting amount (angle) can be increased, and also, the rocking amount (angle) can be increased.
- The above and other advantages and features of the presently disclosed subject matter will be more apparent from the following description of certain embodiments, taken in conjunction with the accompanying drawings, wherein:
-
FIG. 1 is a plan view illustrating a first embodiment of the optical deflector apparatus according to the presently disclosed subject matter; -
FIGS. 2A and 2B are views for explaining the operation of the inner piezoelectric actuator ofFIG. 1 ; -
FIG. 3 is a cross-sectional view of the optical deflector ofFIG. 1 ; -
FIG. 4 is a graph for explaining the relationship between the deflection angle and offset angle of the mirror ofFIG. 1 ; -
FIGS. 5A , 5B, 5C and 5D are timing diagrams of the drive voltages applied to the piezoelectric actuators ofFIG. 1 ; -
FIG. 6 is a plan view illustrating a second embodiment of the optical deflector apparatus according to the presently disclosed subject matter; -
FIGS. 7A , 7B, 7C and 7D are timing diagrams of the drive voltages applied to the piezoelectric actuators ofFIG. 6 ; -
FIG. 8 is a plan view illustrating a first modification of the optical deflector apparatus ofFIG. 6 ; -
FIG. 9 is a plan view illustrating a second modification of the optical deflector apparatus ofFIG. 6 ; -
FIG. 10 is a plan view illustrating a third modification of the optical deflector apparatus ofFIG. 6 ; -
FIG. 11 is a plan view illustrating a fourth modification of the optical deflector apparatus ofFIG. 6 ; -
FIG. 12 is a plan view illustrating a fifth modification of the optical deflector apparatus ofFIG. 6 ; -
FIG. 13 is a plan view illustrating a sixth modification of the optical deflector apparatus ofFIG. 6 ; -
FIG. 14 is a plan view illustrating a third embodiment of the optical deflector apparatus according to the presently disclosed subject matter; -
FIGS. 15A and 15B are timing diagrams of the drive voltages applied to the piezoelectric actuators ofFIG. 14 ; -
FIG. 16 is a plan view illustrating a fourth embodiment of the optical deflector apparatus according to the presently disclosed subject matter; and -
FIGS. 17A and 17B are timing diagrams of the drive voltages applied to the piezoelectric actuators ofFIG. 16 . - In
FIG. 1 , which illustrates a first embodiment of the optical deflector apparatus according to the presently disclosed subject matter as a one-dimensional MEMS device,reference numeral 10 designates a one-dimensional optical deflector, 20 designates a driver for driving theoptical deflector - The
optical deflector 10 is constructed by arectangular mirror 1 for reflecting incident light L from thelaser light source 30, a rectangular inner frame (movable frame) 2 surrounding themirror 1, and a rectangular outer frame (fixed frame) surrounding theinner frame 2. - Also, in order to realize an offset operation mode, a pair of meander-type inner
piezoelectric actuators coupling portions mirror 1 andinner coupling portions inner frame 2 and serving as cantilevers for rocking themirror 1 around an X-axis on the plane of themirror 1 centered at thecenter 0 of themirror 1. The innerpiezoelectric actuators mirror 1. - Further, in order to realize a rocking operation mode, a pair of
torsion bars inner frame 2 along the X-axis. Also, linear outer piezoelectric actuators 6 a-1 and 6 a-2 are coupled between thetorsion bar 5 a and theouter frame 3, and linear outerpiezoelectric actuators 6 b-1 and 6 b-2 are coupled between thetorsion bar 5 b and theouter frame 3. In this case, the flexing direction of the outer piezoelectric actuators 6 a-1 and 6 b-1 are opposite to that of the outerpiezoelectric actuators 6 b-1 and 6 b-2, so that the outer piezoelectric actuators 6 a-1, 6 a-2, 6 b-1 and 6 b-2 serve as cantilevers for rocking themirror 1 around the X-axis. Note that thetorsion bars outer frame 3. - The
mirror 1 can be square, rectangular, polygonal or elliptical. - The meander-type inner
piezoelectric actuators - In more detail, the meander-type inner
piezoelectric actuator 4 a is constructed by piezoelectric cantilevers 4 a-1 s, 4 a-2 and 4 a-3 s which are serially-coupled from thecoupling portion 1 a of themirror 1 to acoupling portion 2 a of theinner frame 2 via folded portions Fa12 and Fa23. Also, each of the piezoelectric cantilevers 4 a-1 s, 4 a-2 and 4 a-3 s is in parallel with the Y-axis. Therefore, the piezoelectric cantilevers 4 a-1 s, 4 a-2 and 4 a-3 s are folded at their ends or meandering from themirror 1 to theinner frame 2, so that the amplitudes of the piezoelectric cantilevers 4 a-1 s, 4 a-2 and 4 a-3 s can be changed along directions perpendicular to the X-axis. - Similarly, the meander-type inner
piezoelectric actuator 4 b is constructed bypiezoelectric cantilevers 4 b-1 s, 4 b-2 and 4 b-3 s which are serially-coupled from thecoupling portion 1 b of themirror 1 to aninner coupling portion 2 b of theinner frame 2 via folded portions Fb12 and Fb23. Also, each of thepiezoelectric cantilevers 4 b-1 s, 4 b-2 and 4 b-3 s are in parallel with the Y-axis. Therefore, thepiezoelectric cantilevers 4 b-1 s, 4 b-2 and 4 b-3 s are folded at their ends or meandering from themirror 1 to theinner frame 2, so that thepiezoelectric cantilevers 4 b-1 s, 4 b-2 and 4 b-3 s can be changed along directions perpendicular to the X-axis. - The meander-type inner
piezoelectric actuators 4 a (4 b) operate as follows. - In the inner
piezoelectric actuators 4 a (4 b), the piezoelectric cantilevers 4 a-1 s, 4 a-2 and 4 a-3 s (4 b-1 s, 4 b-2 and 4 b-3 s) are divided into an odd-numbered group of the piezoelectric cantilevers 4 a-1 s and 4 a-3 s (4 b-1 s and 4 b-3 s), and an even-numbered group of the piezoelectric cantilever 4 a-2 (4 b-2) alternating with the odd-numbered group of the piezoelectric cantilevers 4 a-1 s and 4 a-3 s (4 b-1 s and 4 b-3 s). - When no drive voltages are applied to the piezoelectric cantilevers 4 a-1 s, 4 a-2 and 4 a-3 s, the piezoelectric cantilevers 4 a-1 s, 4 a-2 and 4 a-3 s are as illustrated in
FIG. 2A . - On the other hand, when a first drive voltage is applied to the odd-numbered group of the piezoelectric cantilevers 4 a-1 s and 4 a-3 s and a second drive voltage opposite in phase to the first drive voltage is applied to the even-numbered group of the piezoelectric cantilever 4 a-2, for example, the odd-numbered group of the piezoelectric cantilever 4 a-1 s and 4 a-3 s are flexed in one direction, for example, in an upward direction U, and the even-numbered group of the piezoelectric cantilever 4 a-2 is flexed in the other direction, i.e., in a downward direction D. Otherwise, the odd-numbered group of the piezoelectric cantilevers 4 a-is and 4 a-3 s are flexed in the downward direction D, the even-numbered group of the piezoelectric cantilever 4 a-2 is flexed in the upward direction U. In this case, since the length of each of the piezoelectric cantilever 4 a-1 s and 4 a-3 s is about half of that of the piezoelectric cantilever 4 a-2, the flexing amounts of the piezoelectric cantilevers 4 a-1 s and 4 a-3 s are about half of that of the piezoelectric cantilever 4 a-2; however, the flexing center of the
piezoelectric actuator 4 a is close to the center thereof. - Thus, the
mirror 1 is flexed around the X-axis by the innerpiezoelectric actuators - Note that the number of piezoelectric cantilevers in each of the inner
piezoelectric actuators - Returning to
FIG. 1 , thetorsion bars inner frame 2. Therefore, thetorsion bars mirror 1 around the X-axis. Other ends of thetorsion bars outer frame 3. - A method for manufacturing the
optical deflector 10 ofFIG. 1 is explained with reference toFIG. 3 . - First, a silicon-on-insulator (SOI) structure constructed by a monocrystalline silicon support layer (“Handle” layer) 301, an intermediate (buried) silicon dioxide layer (“Box” layer) 302, and a monocrystalline silicon active layer (“Device” layer) 303 is prepared. Also, by a thermal oxidation process, a
silicon dioxide layer 304 is formed on thesupport layer 301, and asilicon dioxide layer 305 is formed on theactive layer 303. Further, piezoelectric actuator cantilevers 4 a-1 s, 4 a-2, 4 a-3 s, 4 b-1 s, 4 b-2, 4 b-3 s and thepiezoelectric actuators 6 b-1 and 6 b-2 are formed on thesilicon dioxide layer 305. - Next, a Pt/Ti
lower electrode layer 306 consisting of an about 50 nm thick Ti and an about 150 nm thick Pt on Ti is formed by a sputtering process. Then, an about 3 μmthick PZT layer 307 is deposited on thelower electrode layer 306 by an arc discharge reactive ion plating (ADRIP) process at a temperature of about 500° C. to 600° C. Then, an about 150 nm thick Tiupper electrode layer 308 is formed on thePZT layer 307 by a sputtering process. - Next, the
upper electrode layer 308 and thePZT layer 307 are patterned by a photolithography and etching process. Then, thelower electrode layer 306 and thesilicon dioxide layer 305 are patterned by a photolithography and etching process. - Next, an about 500 nm thick
silicon dioxide interlayer 309 is formed on the entire surface by a plasma chemical vapor deposition (CVD) process. - Next, contact holes are perforated in the
silicon dioxide interlayer 309 by a photolithography and dry etching process. The contact holes correspond to the piezoelectric cantilevers 4 a-1 s, 4 a-2, 4 a-3 s, 4 b-1 s, 4 b-2 and 4 b-3 s, the piezoelectric actuators 6 a-1, 6 a-2, 6 b-1 and 6 b-2 and the pads P formed on theouter frame 3. - Next, wiring layers 310 made of AlCu (1% Cu) are formed by a photolithography process, a sputtering process, and a lift-off process. The wiring layers 310 are electrically connected between the upper electrode layers 308 of the piezoelectric cantilevers 4 a-1 s, 4 a-2, 4 a-3 s, 4 b-1 s, 4 b-2 and 4 b-3 s and the piezoelectric actuators 6 a-1, 6 a-2, 6 b-1 and 6 b-2 and their corresponding pads P.
- Next, the
silicon dioxide layer 304 is etched by a photolithography and dry etching process, so that thesilicon dioxide layer 304 is left in an area corresponding to theinner frame 2 and theouter frame 3. - Next, the
support layer 301 is etched by a dry etching process using thesilicon dioxide layer 304 as an etching mask. Then, thesilicon dioxide layer 302 is etched by a wet etching process using thesupport layer 301 as an etching mask. - Finally, an aluminum (Al)
reflective metal layer 311 is formed by an evaporation process on theactive layer 303, and is patterned by a photolithography and etching process, thus completing theoptical deflector 10. - In Fig, 3, the
torsion bars active layer 303. -
FIG. 4 is a graph for explaining the deflection angle and offset angle of themirror 1 ofFIG. 1 . - The
driver 20 controls the outer piezoelectric actuators 6 a-1, 6 a-2, 6 b-1 and 6 b-2 using sinusoidal-wave voltages VX1 and VX2 opposite in phase to each other, so that the rocking angle of themirror 1 is from −θ to +θ with respect to a normal line n1 normal to the plane m1 of themirror 1 as illustrated inFIG. 4 . - On the other hand, the
driver 20 controls the innerpiezoelectric actuators mirror 1 is shifted by θOFFSET , so that the plane m1 of themirror 1 is rotated by θOFFSET to a plane m2 with a normal line n2 as illustrated inFIG. 4 . In this state, thedriver 20 also controls the outer piezoelectric actuators 6 a-1, 6 a-2, 6 b-1 and 6 b-2 using the above-mentioned sinusoidal-wave voltages VX1 and VX2, so that the rocking angle of themirror 1 is from −θ to +θ with respect to the normal line n2, i. e. , from −θ−θOFFSET to +θ−θOFFSET with respect to the normal line n1. For example, the rocking angle of themirror 1 from −10° to +10° with respect to the normal line n1 is changed by the offset angle θOFFSET5° of the innerpiezoelectric actuators mirror 1 from −15° to +5° with respect to the normal line n1. - The rocking operation of the
mirror 1 by the outer piezoelectric actuators 6 a-1, 6 a-2, 6 b-1 and 6 b-2 in a rocking operation mode around the X-axis will be explained below. - Rocking sinusoidal-wave drive voltages VX1 and VX2 opposite in phase to each other as illustrated in
FIGS. 5A and 5B are applied by thedriver 20 to the outer piezoelectric actuators 6 a-1 and 6 a-2, respectively, so that the outer piezoelectric actuators 6 a-1 and 6 a-2 carry out flexing operations in opposite directions to each other, which would distort thetorsion bar 5 a in a direction to cause a torque in themirror 1 around the X-axis. Simultaneously, the above-mentioned rocking sinusoidal-wave drive voltages VX1 and VX2 are applied by thedriver 20 to the outerpiezoelectric actuators 6 b-1 and 6 b-2, respectively, so that the outerpiezoelectric actuators 6 b-1 and 6 b-2 carry out flexing operations in opposite directions to each other, which also would distort thetorsion bar 5 b in the above-mentioned direction to cause a torque in themirror 1 around the X-axis. As a result, thetorsion bars mirror 1 around the X-axis. In this case, if the frequency fX of the sinusoidal-wave drive voltages VX1 and VX2 is a resonant frequency such as 20 kHz of a mechanical vibrating system of themirror 1 with respect to the X-axis depending upon themirror 1, theinner frame 2 and the innerpiezoelectric actuators mirror 1 can further be enhanced. - The offset operation of the
mirror 1 by the innerpiezoelectric actuators - An offset saw-tooth drive voltage VOFFSET1 as illustrated in
FIG. 5C is applied by thedriver 20 to the odd-numbered piezoelectric cantilevers 4 a-1 s and 4 a-3 s of the innerpiezoelectric actuator 4 a and the odd-numbered.piezoelectric cantilevers 4 b-1 s and 4 b-3 s of the innerpiezoelectric actuator 4 b. Simultaneously, an offset drive voltage VOFFSET2 as illustrated inFIG. 5D opposite in phase to the offset drive voltage VOFFSET1 is applied by thedriver 20 to the even-numbered piezoelectric cantilever 4 a-2 of the innerpiezoelectric actuator 4 a and the even-numberedpiezoelectric cantilever 4 b-2 of the innerpiezoelectric actuator 4 b. Therefore, the odd-numbered piezoelectric cantilevers 4 a-1 s, 4 a-3 s; 4 b-1 s, 4 b-3 s and the even-numbered piezoelectric cantilevers 4 a-2 and 4 b-2 carry out flexing operations in opposite directions to each other. As a result, themirror 1 is flexed in one direction. - For example, in a positive offset angle, the offset drive voltage VOFFSET1 is rectangular-wave shaped as indicated by a solid line in
FIG. 5C , while the offset drive voltage VOFFSET2 is pulse-shaped as indicated by a solid line inFIG. 5D . In this case, the offset drive voltage VOFFSET2 can be L(low level). Contrary to this, in a negative offset angle, the offset drive voltage VOFFSET1 is pulse-shaped as indicated by a dotted line inFIG. 5C , while the offset drive voltage VOFFSET2 is rectangular-wave shaped as indicated by a dotted lineFIG. 5D . In this case, the offset drive voltage VOFFSET1 can be L (low level). The offset drive voltages VOFFSET1 and VOFFSET2 have the same frequency fX of the rocking sinusoidal-wave drive voltages VX1, and VX2. The amplitude of the rectangular-waved offset drive voltage VOFFSET1 or VOFFSET2 corresponds to an offset angle of themirror 1. - In
FIGS. 5A , 5B, 5C and 5D, TA is an image active period, and TB is a blanking period. That is, in a horizontal scanning by the rocking sinusoidal-wave drive voltages VX1and VX2, the scanning speed is constant in the image active period TA, while the scanning speed is low in the blanking period TB. Therefore, since image display is impossible in the blanking period TB, the offset drive voltages VOFFSET1 and VOFFSET2 are inactive or pulse-shaped. - In addition, the offset drive voltages VOFFSET1 and VOFFSET2 can always be active even in the blanking period TB; however, in this case, charges may be stored in the
PZT layer 308 so that the polarization within thePZT layer 308 would be decreased to decrease the offset angle of themirror 1. Contrary to this, as stated above, when the offset drive voltages VOFFSET1 and VOFFSET2 are caused to be inactive or pulse-shaped in the blanking period TB, the charges stored in thePZT layer 308 are emitted to recover the offset angle corresponding to the rectangular-waved offset drive voltage VOFFSET1 or VOFFSET2 in the active period TA. - In the meander
type piezoelectric actuators FIG. 1 , the lengths of the piezoelectric cantilevers can be the same, so that the flexing amounts of the piezoelectric cantilevers can be enhanced. Also, the piezoelectric cantilevers 4 a-1 s, 4 a-2 and 4 a-3 s and thepiezoelectric cantilevers 4 b-1 s, 4 b-2 and 4 b-3 s can be symmetrical with respect to thecenter 0 of themirror 1. In this case, the offset drive voltage VOFFSET1 is applied to the piezoelectric cantilevers 4 a-1 s, 4 a-3 s and 4 b-2, while the offset drive voltage VOFFSET2 is applied to thepiezoelectric cantilevers 4 b-1 s, 4 b-3 s and 4 a-2. Further, the meander-type piezoelectric cantilevers inner frame 2 and theouter frame 3, while the piezoelectric actuators 6 a-1 and 6 a-2 along with thetorsion bars mirror 1 and theinner frame 2. - In
FIG. 6 , which illustrates a second embodiment of the optical deflector apparatus according to the presently disclosed subject matter, thetorsion bars FIG. 1 are replaced by a pair of meander-type outerpiezoelectric actuators - In more detail, the meander-type outer
piezoelectric actuator 7 a is constructed bypiezoelectric cantilevers 7 a-1 s, 7 a-2 and 7 a-3 s which are serially-coupled from acoupling portion 2 c of theinner frame 2 to acoupling portion 3 a of theouter frame 3 via folded portions Fc12 and Fc23. Also, each of thepiezoelectric cantilevers 7 a-1 s, 7 a-2 and 7 a-3 s is in parallel with the Y-axis. Therefore, thepiezoelectric cantilevers 7 a-1 s, 7 a-2 and 7 a-3 s are folded at their ends or meandering from theinner frame 2 to theouter frame 3 so that the amplitudes of thepiezoelectric cantilevers 7 a-1 s, 7 a-2 and 7 a-3 s can be changed along directions perpendicular to the X-axis. - Similarly, the meander-type outer
piezoelectric actuator 7 b is constructed bypiezoelectric cantilevers 7 b-1 s, 7 b-2 and 7 b-3 s which are serially-coupled from acoupling portion 2 d of theinner frame 2 to acoupling portion 3 b of theouter frame 3 via folded portions Fd12 and Fd23. Also, each of thepiezoelectric cantilevers 7 b-1 s, 7 b-2 and 7 b-3 s are in parallel with the Y-axis. Therefore, thepiezoelectric cantilevers 7 b-1 s, 7 b-2 and 7 b-3 s are folded at their ends or meandering from theinner frame 2 to theouter frame 3 so that thepiezoelectric cantilevers 7 b-1 s, 7 b-2 and 7 b-3 s can be changed along directions perpendicular to the X-axis. - The meander-type outer
piezoelectric actuators 7 a (7 b) operate in the same way as the innerpiezoelectric actuators 4 a (4 b). - Thus, the
mirror 1 is rocked around the X-axis by the outerpiezoelectric actuators - Note that the number of piezoelectric cantilevers in each of the outer
piezoelectric actuators - The rocking operation of the
mirror 1 by the outerpiezoelectric actuators - A rocking saw-tooth drive voltage VX1′ as illustrated in
FIG. 7A is applied by thedriver 20 to the odd-numberedpiezoelectric cantilevers 7 a-1 s and 7 a-3 s of the outerpiezoelectric actuator 7 a and the odd-numberedpiezoelectric cantilevers 7 b-1 s and 7 b-3 s of the innerpiezoelectric actuator 7 b. Simultaneously, a rocking saw-tooth drive voltage VX2′ as illustrated inFIG. 7B is applied by thedriver 20 to the even-numberedpiezoelectric cantilever 7 a-2 of the outerpiezoelectric actuator 7 a and the even-numberedpiezoelectric cantilever 7 b-2 of the outerpiezoelectric actuator 7 b. Therefore, the odd-numbered piezoelectric cantilevers 7 s-1 s, 7 a-3 s; 7 b-1 s, 7 b-3 s and the even-numberedpiezoelectric cantilevers 7 a-2 and 7 b-2 carry out flexing operations in opposite directions to each other. As a result, themirror 1 is rocked around the X-axis. - In
FIG. 6 , the meander-type outerpiezoelectric actuators piezoelectric actuators piezoelectric actuators piezoelectric actuators - In
FIG. 8 , which illustrates a first modification of the optical deflector apparatus ofFIG. 6 , the meander-type innerpiezoelectric actuator 4 b ofFIG. 6 is replaced by a meander-type innerpiezoelectric actuator 4 b′ which is symmetrical to the meander-type innerpiezoelectric actuator 4 a with respect to thecenter 0 of themirror 1, and the meander-type outerpiezoelectric actuator 7 b ofFIG. 6 is replaced by a meander-type outerpiezoelectric actuator 7 b′ which is symmetrical to the meander-type innerpiezoelectric actuator 7 a with respect to thecenter 0 of themirror 1. The operation of the optical deflector ofFIG. 8 is the same as that of the optical deflector ofFIG. 6 , except the following. The rocking saw-tooth drive voltage VX1′ is applied by thedriver 20 to thepiezoelectric cantilevers 7 a-1 s, 7 a-3 s and 7 b-2, and the rocking saw-tooth drive voltage VX2′ is applied by thedriver 20 to thepiezoelectric cantilevers 7 a-2, 7 b-1 s and 7 b-3 s. Also, the offset saw-tooth drive voltage VOFFSET1 is applied by thedriver 20 to the piezoelectric cantilevers 4 a-1 s, 4 a-3 s and 4 b-2 and the offset saw-tooth drive voltage VOFFSET2 is applied by thedriver 20 to the piezoelectric cantilevers 4 a-2, 4 b-1 s and 4 b-3 s. - In
FIG. 9 , which illustrates a second modification of the optical deflector apparatus ofFIG. 6 , thepiezoelectric cantilevers 7 a-1 s, 7 a-3 s, 7 b-1 s and 7 b-3 s ofFIG. 6 are replaced bypiezoelectric cantilevers 7 a-1, 7 a-3, 7 b-1 and 7 b-3, respectively, whose length is the same as that of thepiezoelectric cantilevers 7 a-2 and 7 b-2. The operation of the optical deflector ofFIG. 9 is the same as that of the optical deflector ofFIG. 6 , except that the rocking saw-tooth drive voltage VX1′ is applied by thedriver 20 to thepiezoelectric cantilevers 7 a-1, 7 a-3, 7 b-1 and 7 b-3. - In
FIG. 10 , which illustrates a third modification of the optical deflector apparatus ofFIG. 6 , the piezoelectric cantilevers 4 a-1 s, 4 a-3 s, 4 b-1 s and 4 b-3 s ofFIG. 6 are replaced by piezoelectric cantilevers 4 a-1, 4 a-3, 4 b-1 and 4 b-3, respectively, whose length is the same as that of the piezoelectric cantilevers 4 a-2 and 4 b-2. The operation of the optical deflector ofFIG. 10 is the same as that of the optical deflector ofFIG. 6 , except that the offset saw-tooth drive voltage VOFFSET1 is applied by thedriver 20 to the piezoelectric cantilevers 4 a-1, 4 a-3, 4 b-1 and 4 b-3. - In
FIG. 11 , which illustrates a fourth modification of the optical deflector apparatus ofFIG. 6 , the piezoelectric cantilevers 4 a-1 s, 4 a-3 s, 4 b-1 s, 4 b-3 s, 7 a-1 s, 7 a-3 s, 7 b-1 s and 7 b-3 s ofFIG. 6 are replaced by piezoelectric cantilevers 4 a-1, 4 a-3, 4 b-1, 4 b-3, 7 a-1, 7 a-3, 7 b-1 and 7 b-3, respectively, whose length is the same as that of the piezoelectric cantilevers 4 a-2 and 4 b-2 and thepiezoelectric cantilevers 7 a-2 and 7 b-2. The operation of the optical deflector ofFIG. 11 is the same as that of the optical deflector ofFIG. 6 , except for the following. The rocking saw-tooth drive voltage VX1′ is applied by thedriver 20 to thepiezoelectric cantilevers 7 a-1, 7 a-3, 7 b-1 and 7 b-3. Also, the offset saw-tooth drive voltage VOFFSET1 is applied by thedriver 20 to the piezoelectric cantilevers 4 a-1, 4 a-3, 4 b-1 and 4 b-3. - In
FIG. 12 , which illustrates a fifth modification of the optical deflector apparatus ofFIG. 6 , the piezoelectric cantilevers 4 a-1 s, 4 a-3 s, 4 b-1 s and 4 b-3 s, 7 a-1 s, 7 a-3 s, 7 b-1 s and 7 b-3 s ofFIG. 6 are replaced by piezoelectric cantilevers 4 a-1, 4 a-3, 4 b-1, 4 b-3, 7 a-1, 7 a-3, 7 b-1 and 7 b-3, respectively, whose length is the same as that of the piezoelectric cantilevers 4 a-2 and 4 b-2 and thepiezoelectric cantilevers 7 a-2, and 7 b-2. Additionally, the meander-type innerpiezoelectric actuator 4 b ofFIG. 6 is replaced by a meander-type innerpiezoelectric actuator 4 b′ which is symmetrical to the meander-type innerpiezoelectric actuator 4 a with respect to thecenter 0 of themirror 1. The operation of the optical deflector ofFIG. 12 is the same as that of the optical deflector ofFIG. 6 , except for the following. The rocking saw-tooth drive voltage VX1′ is applied by thedriver 20 to thepiezoelectric cantilevers 7 a-1, 7 a-3, 7 b-1 and 7 b-3. Also, the offset saw-tooth drive voltage VOFFSET1 is applied by thedriver 20 to the piezoelectric cantilevers 4 a-1, 4 a-3 and 4 b-2, and the offset saw--tooth drive voltage VOFFSET2 is applied by thedriver 20 to the piezoelectric cantilevers 4 a-2, 4 b-1 and 4 b-3. - In
FIG. 13 , which illustrates a sixth modification of the deflector apparatus ofFIG. 6 , the meander-type outerpiezoelectric actuator 7 b ofFIG. 12 is replaced by a meander-type outerpiezoelectric actuator 7 b′ which is symmetrical to the meander type outerpiezoelectric actuator 7 a ofFIG. 12 with respect to thecenter 0 of themirror 1. The operation of the optical deflector ofFIG. 13 is the same as that of the optical deflector ofFIG. 12 , except that the rocking saw-tooth drive voltage VX1′ is applied by thedriver 20 to thepiezoelectric cantilevers 7 a-1, 7 a-3, 7 b-1 and 7 b-3, and the rocking saw-tooth drive voltage VX3′ is applied by thedriver 20 to thepiezoelectric cantilevers 7 a-2, 7 b-1 and 7 b-2. - Even in
FIGS. 8 , 9, 10, 11, 12 and 13, the meander-type outerpiezoelectric actuators piezoelectric actuators piezoelectric actuators piezoelectric actuators - In
FIG. 14 , which illustrates a third embodiment of the optical deflector apparatus according to the presently disclosed subject matter as a two-dimensional MEMS device,reference numeral 100 designates a two-dimensional optical deflector, 200 designates a driver, and 300 designates a laser light source. - The
optical deflector 100 includes theoptical deflector 10 ofFIG. 1 . Additionally, in order to carry out another rocking operation mode around the Y-axis, theoptical deflector 100 includes another outer frame (fixed frame) 101, a pair oftorsion bars outer frame 3 along the Y-axis, and linear outer piezoelectric actuators 103 a-1 and 103 a-2 coupled between thetorsion bar 102 a and theouter frame 101, and linear outerpiezoelectric actuators 103 b-1 and 103 b-2 coupled between thetorsion bar 102 b and theouter frame 101. In this case, theouter frame 3 serves as a movable frame. The flexing direction of the outer piezoelectric actuators 103 a-1 and 103 b-1 is opposite to that of the outer piezoelectric actuators 103 a-2 and 103 b-2, so that each of the outer piezoelectric actuators 103 a-1, 103 a-2, 103 b-1 and 103 b-2 serves as cantilevers for rocking themirror 1 around the Y-axis. Note that thetorsion bars outer frame 101. - The
outer frame 101 has the same structure as theouter frame 3 as illustrated inFIG. 3 . In this case, the pads P are formed on theouter frame 101, not on theouter frame 3. Also, thetorsion bars torsion bars FIG. 3 . Further, the linear piezoelectric actuators 103 a-1, 103 a-2, 103 b-1 and 103 b-2 have the same structure as the linear piezoelectric actuators 6 a-1, 6 a-2, 6 b-a and 6 b-2 as illustrated inFIG. 3 . - The rocking operation of the
mirror 1 by the outer piezoelectric actuators 103 a-1, 103 a-2, 103 b-1 and 103 b-2 in a rocking operation mode around the Y-axis will be explained below. - Rocking sinusoidal-wave drive voltages VY1 and VY2 opposite in phase to each other as illustrated in
FIGS. 15A and 15B are applied by thedriver 200 to the outer piezoelectric actuators 103 a-1 and 103 a-2, respectively, so that the outer piezoelectric actuators 103 a-1 and 103 a-2 carry out flexing operations in opposite directions to each other, which would distort thetorsion bar 102 a in a direction to cause a torque in themirror 1 around the Y-axis. Simultaneously, the above-mentioned rocking sinusoidal-wave drive voltages VY1 and VY2 are applied by thedriver 200 to the outerpiezoelectric actuators 103 b-1 and 103 b-2, respectively, so that the outerpiezoelectric actuators 103 b-1 and 103 b-2 carry out flexing operations in opposite directions to each other, which would distort thetorsion bar 102 b in the above-mentioned direction to cause a torque in themirror 1 around the Y-axis. As a result, thetorsion bars mirror 1 around the Y-axis. The frequency fY of the rocking sinusoidal-wave drive voltages VY1 and VY2 is 60 Hz, for example, much lower than the resonant frequency fX of the sinusoidal-wave drive voltages VX1 and VX2. - In
FIG. 16 , which illustrates a fourth embodiment of the optical deflector apparatus according to the presently disclosed subject matter as a two-dimensional MEMS device, thetorsion bars FIG. 14 are replaced by a pair of meander-type piezoelectric actuators - In more detail, the
piezoelectric actuator 104 a is constructed by piezoelectric actuators 104 a-1 s, 104 a-2 and 104 a-3 s which are serially coupled from anouter coupling portion 3 c of theouter frame 3 to acoupling portion 101 a of theouter frame 101 via folded portions Fe12 and Fe23. Also, each of the piezoelectric cantilevers 104 a-1 s, 104 a-2 and 104 a-3 s are in parallel with the X-axis. Therefore, the piezoelectric actuators 104 a-1 s, 104 a-2 and 104 a-3 s are folded at their ends or meandering from theouter frame 3 to theouter frame 101, so that amplitudes of the piezoelectric actuators 104 a-1 s, 104 a-2 and 104 a-3 s can be changed along directions perpendicular to the Y-axis. - Similarly, the
piezoelectric actuator 104 b is constructed bypiezoelectric actuators 104 b-1 s, 104 b-2 and 104 b-3 s which are serially coupled from anouter coupling portion 3 d of theouter frame 3 to acoupling portion 101 a of theouter frame 101 via folded portions Ff12 and Ff23. Also, each of thepiezoelectric cantilevers 104 b-1 s, 104 b-2 and 104 b-3 s are in parallel with the X-axis. Therefore, thepiezoelectric actuators 104 b-1 s, 104 b-2 and 104 b-3 s are folded at their ends or meandering from theouter frame 3 to theouter frame 101, so that amplitudes of thepiezoelectric actuators 104 b-1 s, 104 b-2 and 104 b-3 s can be changed along directions perpendicular to the Y-axis. - The meander-
type piezoelectric actuators type piezoelectric actuators - Thus, the
mirror 1 is rocked around the Y-axis by thepiezoelectric actuators - Note that the number of
piezoelectric cantilevers - The meander-
type piezoelectric actuators type piezoelectric actuators FIG. 3 . - The rocking operation by the
piezoelectric actuators - A rocking saw-tooth drive voltage VY1′ as illustrated in
FIG. 17A is applied by thedriver 200 to the odd-numbered piezoelectric cantilevers 104 a-1 s and 104 a-3 s of the outerpiezoelectric actuator 104 a and the odd-numberedpiezoelectric cantilevers 104 b-1 s and 104 b-3 s of the outerpiezoelectric actuator 104 b. Similarly, a rocking saw-tooth drive voltage VY2′ as illustrated inFIG. 17B is applied by thedriver 200 to the even-numbered piezoelectric cantilever 104 a-2 of the outerpiezoelectric actuator 104 a and the even-numberedpiezoelectric cantilever 104 b-2 of the outerpiezoelectric actuator 104 b. Therefore, the odd-numbered piezoelectric cantilevers 104 a-1 s, 104 a-3 s, 104 b-1 s, 104 b-3 s and the even-numbered piezoelectric cantilevers 104 a-2 and 104 b-2 carry out flexing operations in phase with each other. As a result, themirror 1 is rocked around the Y-axis. Even in this case, the frequency fy of the rocking saw-tooth drive voltages VY1′ and VY2′ is 60 Hz, for example, much lower than the resonant frequency fX of the sinusoidal-wave drive voltages VX1 and VX2. - In
FIG. 16 , the length of piezoelectric cantilevers 104 a-1 s, 104 a-3 s, 104 b-1 s and 104 b-3 s is half of the piezoelectric cantilever 104 a-2 and 104 b-2; however, the length of piezoelectric cantilevers 104 a-1 s, 104 a--3 s, 104 b-1 s and 104 b-3 s can be the same as that of the piezoelectric cantilever 104 a-2 and 104 b-2. Also, thepiezoelectric actuators center 0 of themirror 1. - It will be apparent to those skilled in the art that various modifications and variations can be made in the presently disclosed subject matter without departing from the spirit or scope of the presently disclosed subject matter. Thus, it is intended that the presently disclosed subject matter covers the modifications and variations of the presently disclosed subject matter provided they come within the scope of the appended claims and their equivalents. All related or prior art references described above and in the Background section of the present specification are hereby incorporated in their entirety by reference.
Claims (12)
1. An optical deflector apparatus comprising:
a mirror;
an inner frame surrounding said mirror;
a first outer frame surrounding said inner frame;
an inner piezoelectric actuator coupled between said mirror and said inner frame and adapted to flex said mirror around a first axis of said mirror;
a first outer piezoelectric actuator coupled between said inner frame and said first outer frame and adapted to flex said mirror around said first axis of said mirror;
a driver adapted to generate an offset drive voltage and a first rocking drive voltage,
said offset drive voltage being applied to a first piezoelectric actuator selected from said inner piezoelectric actuator and said outer piezoelectric actuator,
said first rocking drive voltage being applied to a second piezoelectric actuator different from said first piezoelectric actuator, selected from said inner piezoelectric actuator and said first outer piezoelectric actuator.
2. The optical deflector apparatus as set forth in claim 1 , wherein said first piezoelectric actuator comprises a first group of piezoelectric cantilevers and a second group of piezoelectric cantilevers alternating said first group of piezoelectric cantilevers folded at their ends and in parallel with a second axis of said mirror,
wherein said offset drive voltage is applied to said first group of piezoelectric cantilevers and an inverted voltage of said offset drive voltage is applied to said second group of piezoelectric cantilevers.
3. The optical deflector apparatus as set forth in claim 2 , wherein said offset drive voltage is rectangular-wave shaped in an active period and is pulse-shaped in a blanking period.
4. The optical deflector apparatus as set forth in claim 1 , wherein said second piezoelectric actuator comprises:
a first torsion bar coupled to said inner frame;
a pair of first linear piezoelectric actuators coupled between said inner frame and said first outer frame,
wherein said first rocking drive voltage is applied to one of said first linear piezoelectric actuators, and an inverted voltage of said first rocking drive voltage is applied to the other of said first linear piezoelectric actuators.
5. The optical deflector apparatus as set forth in claim 4 , wherein said first rocking drive voltage is sinusoidal-waved.
6. The optical deflector apparatus as set forth in claim 1 , wherein said second piezoelectric actuator comprises a third group of piezoelectric cantilevers and a fourth group of piezoelectric cantilevers alternating said third group of piezoelectric cantilevers folded at their ends and in parallel with a second axis of said mirror,
wherein said first rocking drive voltage is applied to said third group of piezoelectric cantilevers and an inverted voltage of said first rocking drive voltage is applied to said fourth group of piezoelectric cantilevers.
7. The optical deflector apparatus as set forth in claim 6 , wherein said first rocking drive voltage is saw-tooth-wave shaped.
8. The optical deflector apparatus as set forth in claim 1 , further comprising:
a second outer frame surrounding said first outer frame;
a second outer piezoelectric actuator adapted to rock said mirror around a second axis of said mirror,
said driver adapted to further generate a second rocking drive voltage,
said second rocking drive voltage being applied to said second outer piezoelectric actuator.
9. The optical deflector apparatus as set forth in claim 8 , wherein said second outer piezoelectric actuator comprises:
a second torsion bar coupled to said inner frame;
a pair of second linear piezoelectric actuators coupled between said second torsion bar and said second outer frame,
wherein said second rocking drive voltage is applied to one of said second linear piezoelectric actuators, and an inverted voltage of said second rocking drive voltage is applied to the other of said second linear piezoelectric actuators.
10. The optical deflector apparatus as set forth in claim 9 , wherein said second rocking drive voltage is sinusoidal-waved.
11. The optical deflector apparatus as set forth in claim 8 , wherein said second outer piezoelectric actuator comprises a fifth group of piezoelectric cantilevers and a sixth group of piezoelectric cantilevers alternating said fifth group of piezoelectric cantilevers folded at their ends and in parallel with said first axis of said mirror,
wherein said second rocking drive voltage is applied to said fifth group of piezoelectric cantilevers, and an inverted voltage of said fifth rocking drive voltage is applied to said sixth group of piezoelectric cantilevers.
12. The optical deflector apparatus as set forth in claim 10 , wherein said second rocking drive voltage is saw-tooth-wave shaped.
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DE102022200149A1 (en) | 2022-01-10 | 2023-07-13 | Robert Bosch Gesellschaft mit beschränkter Haftung | Micromechanical component |
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JP2016001275A (en) | 2016-01-07 |
US9488828B2 (en) | 2016-11-08 |
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EP2955561A1 (en) | 2015-12-16 |
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