US20150349775A1 - Radiation Hardened By Design Digital Input/Output Circuits And Related Methods - Google Patents
Radiation Hardened By Design Digital Input/Output Circuits And Related Methods Download PDFInfo
- Publication number
- US20150349775A1 US20150349775A1 US12/776,188 US77618810A US2015349775A1 US 20150349775 A1 US20150349775 A1 US 20150349775A1 US 77618810 A US77618810 A US 77618810A US 2015349775 A1 US2015349775 A1 US 2015349775A1
- Authority
- US
- United States
- Prior art keywords
- output
- pad
- circuit
- input
- coupled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 44
- 238000013461 design Methods 0.000 title claims abstract description 31
- 230000005855 radiation Effects 0.000 title claims abstract description 18
- 239000000872 buffer Substances 0.000 claims description 17
- 238000010606 normalization Methods 0.000 claims description 15
- 238000012937 correction Methods 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 claims description 3
- 230000008569 process Effects 0.000 description 10
- 230000007704 transition Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- 239000011295 pitch Substances 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 230000005865 ionizing radiation Effects 0.000 description 7
- 238000013459 approach Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 6
- 230000000116 mitigating effect Effects 0.000 description 6
- 238000002955 isolation Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 230000021715 photosynthesis, light harvesting Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000002457 bidirectional effect Effects 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000036039 immunity Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 230000000191 radiation effect Effects 0.000 description 2
- 238000005510 radiation hardening Methods 0.000 description 2
- 230000011664 signaling Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 208000032750 Device leakage Diseases 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 1
- 238000010960 commercial process Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007850 degeneration Effects 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000003362 replicative effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
- H03K19/20—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits characterised by logic function, e.g. AND, OR, NOR, NOT circuits
- H03K19/23—Majority or minority circuits, i.e. giving output having the state of the majority or the minority of the inputs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/50—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/03—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H01L27/0255—
-
- H01L27/0629—
-
- H01L27/088—
-
- H01L27/092—
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
- H03K19/0002—Multistate logic
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
- H03K19/003—Modifications for increasing the reliability for protection
- H03K19/0033—Radiation hardening
- H03K19/00338—In field effect transistor circuits
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
- H03K19/003—Modifications for increasing the reliability for protection
- H03K19/00392—Modifications for increasing the reliability for protection by circuit redundancy
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
- H03K19/0175—Coupling arrangements; Interface arrangements
- H03K19/017509—Interface arrangements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
- H03K19/20—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits characterised by logic function, e.g. AND, OR, NOR, NOT circuits
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
- H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
- H03K3/027—Generators characterised by the type of circuit or by the means used for producing pulses by the use of logic circuits, with internal or external positive feedback
- H03K3/037—Bistable circuits
- H03K3/0377—Bistables with hysteresis, e.g. Schmitt trigger
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04042—Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/141—Analog devices
- H01L2924/1426—Driver
Definitions
- This invention relates generally to integrated circuits, and relates, more particularly, to radiation hardened by design digital input/ouput circuits and related methods.
- I/O circuits on an integrated circuit provide communication between external devices and the core logic circuits.
- the I/O and core circuits operate at different voltages.
- modern microcircuits use a higher input/output voltage (V DDIO ) of, for example, 3.3 V, 2.5 V, or 1.8 V, while the core supply voltage (V DD ) can be of approximately 1.2 V or lower in sub-130 nm process technologies.
- V DDIO input/output voltage
- the higher V DDIO allows interconnection to ICs operating at legacy voltages and potentially improves board level signal noise immunity.
- Mitigating radiation effects is important for ICs that are intended for harsh environments such as spacecraft. Ionizing radiation can affect the IC long term reliability through total ionizing dose (TID) effects, which impact individual device characteristics over time. Furthermore, the IC logic state may be temporarily altered to be incorrect by charge collected from ionizing radiation particle strikes, e.g., single event effects (SEE) produced by impinging heavy ions or protons. These particles can also produce a single event transient (SET) that can cause improper logic outputs or timing.
- SEE single event effects
- SET single event transient
- Correct communications into and out of an IC in the presence of ionizing radiation is important, particularly to avoiding placing the IC into an incorrect functional state, known as a single event functional interrupt (SEFI) which may include issuing an inadvertent command, such as erroneously asserting the reset.
- SEFI single event functional interrupt
- An I/O SET may also shorten a reference clock edge, which may result in loss of phase loop lock.
- Specialized radiation hardened processes have typically used silicon on insulator (SOI) substrates. The shorter path length that an ionizing radiation particle can travel in the silicon beneath the active circuits limits the amount of charge that can be collected. Consequently, for these processes, the relatively large I/O circuit capacitances and low-pass characteristics of digital circuits may mitigate SETs.
- Radiation hardening by design (RHBD) approaches include temporal redundancy to mitigate SETs but these impact the circuit speed.
- CMOS complementary metal-oxide-semiconductor
- SEE single event latchup
- Total ionizing dose effects are produced when ionizing radiation creates electron-hole pairs within the oxides. These can induce both trapping damage, which affects the subthreshold slope, and threshold voltage (V th ) shifts. Electrons, which are more mobile, can escape, and the holes produce a net positive charge. For commercial processes the core oxide scaling trend, which has reduced thicknesses below 5 nm, eliminates V th shifts by allowing both holes and electrons to escape the gate oxide before being trapped. Improved oxynitride gate composition has also reduced trapping damage. However, thick-gate transistors are still used in I/O circuits to allow high voltage tolerance and thus legacy voltage compatibility.
- the thicker gate oxide transistors used in I/O circuits as well as the very thick IC isolation oxides, i.e., shallow trench isolation (STI), remain vulnerable to TID effects in modern microcircuits fabricated on sub 100 nm technology nodes.
- STI shallow trench isolation
- TID primarily shifts metal-oxide-semiconductor (MOS) transistor threshold voltage (V th ) downwards.
- MOS metal-oxide-semiconductor
- PMOS P-Type MOS
- NMOS N-Type MOS
- Drain-to-source leakage in a single NMOS transistor is produced by a reduction in the V th at the transistor edges, i.e., the interface between the thin and thick oxides.
- the second primary leakage current path is created under the STI between diffusion areas, i.e., between NMOS sources or drains at different biases or from an NMOS source/drain diffusion to the N-type well.
- SEE logic upsets are manifest as single event upsets (SEU) and single event transients.
- SEU is due to impinging ionizing particles, such as cosmic rays or protons, generating charge that upsets the logic state of bi-stable storage elements.
- An SET is a temporary voltage glitch in combinational logic generated by the collection of charge deposited by a massive ionizing particle such as a heavy ion. The glitch to the wrong state is temporary, and its duration is dependent on the linear energy transfer (LET) of the striking ion and the capacitance and current drive of the node struck.
- LET linear energy transfer
- SET mitigation has become critical, since the amount of charge deposited does not scale, resulting in transient durations of over 1 ns.
- a sufficient current drive and/or node capacitance can mitigate any SET at the actual large pad drivers in I/O circuits.
- the small receiver, level shifting, and buffering circuits are vulnerable and must be otherwise protected.
- RHBD uses layout techniques to avoid creating or cut off the leakage current flow produced by prolonged TID exposure
- Annular, or edgeless, transistors apply the same bias across any transistor gate oxide to isolation oxide interface and thus eliminate NMOS transistor drain-to-source leakage increase due to TID.
- P+ guard rings create a back to back diode structure to interrupt current paths created by trapped positive charge in isolation oxides. Alternating P+ and N+ guard rings protect against latchup due to beyond the rail voltages applied to the pads or in other circuits due to particle strikes.
- FIG. 1 illustrates a schematic of an input pad circuitry for an input pad.
- FIG. 2 illustrates an example of an implementation of a topology for the embodiment of FIG. 1
- FIG. 3 illustrates a schematic of an output pad circuitry for an output pad.
- FIG. 4 illustrates an example of an implementation of a topology for the embodiment of FIG. 3 .
- FIG. 5 illustrates a diagram of an operation of the output pad circuitry of FIG. 3 , handling output data mismatches for the output pad of FIG. 3
- FIG. 6 illustrates a test die and pad ring layout for an implementation encompassing the circuits of FIGS. 1-5 .
- FIG. 7 shows TID impact, for irradiation up to 2 Mrad(Si), on a thick-gate circuit on the circuitry of FIGS. 1-6 .
- FIG. 8 illustrates a schematic of a portion of an output control circuit for an input/output pad.
- FIG. 9 is a schematic of an input/output pad circuitry for an input/output pad.
- FIG. 10 shows an example of an implementation of a topology for an input pad and related input pad circuitry at a 70 micrometer ( ⁇ m) pad pitch.
- FIG. 11 shows an example of an implementation of a topology for an output pad and related output pad circuitry at a 70 ⁇ m pad pitch.
- FIG. 12 illustrates a flowchart for a method for providing an integrated circuit with radiation hardened by design protection.
- Couple should be broadly understood and refer to connecting two or more elements or signals, electrically, mechanically or otherwise.
- Two or more electrical elements may be electrically coupled, but not mechanically or otherwise coupled; two or more mechanical elements may be mechanically coupled, but not electrically or otherwise coupled; two or more electrical elements may be mechanically coupled, but not electrically or otherwise coupled.
- Coupling (whether mechanical, electrical, or otherwise) may be for any length of time, e.g., permanent or semi-permanent or only for an instant.
- Electrode coupling and the like should be broadly understood and include coupling involving any electrical signal, whether a power signal, a data signal, and/or other types or combinations of electrical signals.
- Mechanical coupling and the like should be broadly understood and include mechanical coupling of all types. The absence of the word “removably,” “removable,” and the like near the word “coupled,” and the like does not mean that the coupling, etc. in question is or is not removable.
- an integrated circuit with radiation hardened by design protection can comprise a first pad of one or more pads, and a first pad circuitry of the first pad, wherein the first pad circuitry is coupled to the first pad, the first pad circuitry is triple-redundant, and the first pad is non-redundant.
- a method for providing an integrated circuit with radiation hardened by design protection can comprise providing a first pad of one or more pads, the first pad being non-redundant, and providing a first pad circuitry of the first pad, the first pad circuitry being triple-redundant.
- an integrated circuit can comprise one or more transistors, a first pad of one or more pads; and a first pad interface circuit to couple the one or more transistors to the first pad.
- the one or more pads can be at least one of input pads for the integrated circuit, or output pads for the integrated circuit.
- the first pad is single-redundant and can be coupled to the one or more transistors via the first pad interface circuit.
- the first pad interface circuit is triple-redundant and comprises a first circuit configured to handle a first data copy of a triple redundant data, a second circuit configured to handle a second data copy of the triple redundant data, and a third circuit configured to handle a third data copy of the triple redundant data.
- the first, second, and third circuits can be are separated from each other by at least approximately 10 ⁇ m.
- TMR techniques to the I/O circuits of application-specific integrated circuit (ASIC) designs that employ full fine-grained TMR in high speed core circuits.
- ASIC application-specific integrated circuit
- Other embodiments may use different TMR core circuits and or granularity of the redundancy.
- ASIC I/O circuits can include electrostatic discharge (ESD) protection, hysteretic noise rejection circuits, voltage level converters, and buffer circuits to drive the IC pad or internal routes to the core circuitry.
- ESD electrostatic discharge
- buffers may be supplied for both input and output pads.
- Dual N-type and P-type guard rings provide SEL and signal overshoot induced latchup mitigation in the pads.
- the guard rings also interrupt potential current paths induced by TID due to inversion of the shallow trench isolation (STI), thereby mitigating inter-device leakage.
- the circuit techniques described here are applicable to any RHBD IC using TMR techniques.
- FIG. 1 illustrates a schematic of input pad circuitry 1000 for input pad 1500 .
- FIG. 2 illustrates an example of an implementation of a topology for the embodiment of FIG. 1
- pad 1500 is directly connected to input path 1600 , which is coupled to ESD protection diodes 1610 , and which includes current limiting resistor 1620 .
- input path 1600 splits to create three copies of input data 1630 , namely, input copy 1631 , input copy 1632 , and input copy 1633 .
- resistor 1620 which can be a polysilicon resistor, and the input buffers.
- the large drive and board capacitance is sufficient to eliminate SETs at those nodes on the pad, package, and/or board side of resistor 1620 .
- Input path 1600 feeds into input path circuitry 1000 , where input copy 1631 is fed to input driving circuit 1100 , input copy 1632 is fed to input driving circuitry 1200 , and input copy 1633 is fed to input driving circuitry 1300 .
- Input driving circuitry 1100 comprises high-to-low level shifter 1110 (nominally shifting 2.5 V to 1.0 or 1.2 V in the presente example, where a CMOS cascode voltage switch design is used).
- Schmitt trigger 1120 provides hysteresis, and finally, buffer 1130 drives the processed input copy 1631 to core circuit 1400 .
- Thick-gate transistors for pad 1500 are located in voltage level shifter 1110 , to provide compatibility with high voltages.
- the thick-gate transistors can have effective (SiO 2 equivalent) thick-gate oxides of approximately 30 nm to approximately 50 nm, while other transistors can have thin-gate oxides of approximately 10 nm to approximately 25 nm.
- effective oxide thickness we mean equivalent SiO 2 thicknesses, as used in circuit simulators.
- Other oxide materials, such as those incorporating nitride or Hf, may have different actual thicknesses, as understood to those skilled in the art.
- input driving circuits 1200 and 1300 are similar to input driving circuit 1100 , but configured to transmit and process input copies 1632 and 1633 , respectively, to core circuit 1400 .
- Core circuit 1400 comprises input correction mechanism 1410 in the present example, configured to compare input copies 1631 , 1632 , and 1633 , as received from input driving circuits 1100 , 1200 , and 1300 , respectively. Input correction mechanism 1410 can then determine whether one of input copies 1631 - 1633 is corrupt, and elect a non-corrupt status for input data 1630 .
- FIG. 2 shows that annular NMOS gates are used throughout, for both thin-gate and thick-gate transistors.
- LSP low standby power
- FIG. 3 illustrates a schematic of output pad circuitry 3000 for output pad 3500 .
- FIG. 4 illustrates an example of an implementation of a topology for the embodiment of FIG. 3 .
- FIG. 5 illustrates a diagram of an operation of output pad circuitry 3000 handling output data mismatches for output pad 3500 .
- output copies 3631 , 3632 , and 3633 are transmitted by core circuit 1400 to output pad circuitry 3000 , where output copy 3631 is received by output receiving circuit 3100 , output copy 3632 is received by output receiving circuit 3200 , and output copy 3633 is received by output receiving circuit 3300 .
- Output copies 3631 - 3633 are TMR copies of each other, and output receiving circuits 3100 , 3200 , and 3300 are TMR versions of each other.
- output receiving circuit 3100 includes a differential CMOS low-to-high level-shifter 3110 to translate output copy 3631 up from core voltage V DD to V DDIO levels each redundant data path.
- the core voltage V DD can be of approximately 0.5 V to 1.5 V
- the V DDIO levels can be of approximately 1.5 V to 3.5 V, but there can be other examples compatible with higher I/O voltages.
- the level shifted output signal 3631 is then buffered at output buffer 3130 and transmitted to output driving circuit 3700 which controls the pad voltage.
- output driving circuit 3700 comprises majority gate 3710 , configured to receive and vote output copies 3631 - 3633 from output receiving circuits 3100 , 3200 , and 3300 , respectively, to determine a non-corrupt status for output data 3630 .
- Output driving circuit 3700 prevents data corruption on the output in the event that one of the core TMR paths for output copies 3631 - 3633 disagrees with the others or when an SET occurs in the pad circuitry.
- Output transistor drain diodes can provide the ESD path to V DDIO and V SS in the output pads.
- the pad capacitance which can range in some examples from approximately 1 picofarad (pF) to approximately 30 pF (when the board level contribution is included) combined with the larger V DDIO , is sufficient to absorb any SET induced charge at the output driver transistor drains.
- the level shifter and buffer circuit layout is shown at the bottom of FIG. 4 .
- annular NMOS transistor gate topologies are used throughout this embodiment. Simulated output pad operation with one input incorrect is shown in FIG. 5 , where the output transitions only with the majority of the inputs as expected.
- Majority gate 3710 was sized to provide the same current as a single redundant pad in the event of a mismatch on one input. Such sizing allows faster signal timing at the board level, even if there is an SET on one of the TMR core signals exiting the IC.
- TMR input and/or output pads and related circuitry can impact the overall energy consumption of the chip, but in a high performance design, this impact is not large, due to a number of factors.
- the I/Os generally operate at a lower frequency than the core circuits.
- core circuits can operate at over 500 MHz and the I/Os operate at 100 MHz.
- power dissipation is proportional to the capacitance of each node. The overall capacitance is dominated by the pad, package, and board trace, rather than the redundant circuits.
- Non-redundant and TMR versions of the pads were simulated with extracted parasitics to quantify the TMR power impact, as summarized in Table I.
- the pad energy dissipation for non-redundant output pad was estimated to be at approximately 77.5 picoJoules (pJ) per transition, while the pad energy dissipation for the TMR pad circuitry of FIGS. 3-4 was estimated to dissipate 115 pJ/transition when driving a load of 10 pF.
- the 48% increase can be attributed to triplication of the level shifters and output buffers, as well as the large size of the majority gate transistors, which as mentioned, have increased in drive strength.
- the total gate width increased 65% from the non-redundant to the TMR version.
- test chip with TMR pads in accordance with the present disclosure was fabricated on a 90 nm process, where the TMR pads comprise 57 input, 73 output, 12 V DDIO , 11 V DD , and 24 V SS pads.
- the device under test (DUT) is composed of a RHBD fully TMR high speed built-in self-test engine to test a RHBD cache.
- FIG. 6 shows the test die and pad ring layout. The die is 5 mm by 5 mm.
- FIG. 7 shows the TID impact on the thick-gate circuit (2.5 V supply V DDIO ) leakage current (I DDIO ) for irradiation up to 2 Mrad(Si).
- the results show a slight but steady decrease in the V DDIO leakage current I DDIO with radiation dose. The decrease was 8.7% after 2 Mrad(Si).
- the small I DDIO deviation demonstrates the effectiveness of the TID mitigation.
- FIG. 8 illustrates a schematic of a portion of output control circuit 8150 for input/output pad 8500 .
- FIG. 9 is a schematic of input/output pad circuitry 9000 for output pad 8500 , where input/output pad circuitry 9000 comprises output control circuit 8100 of FIG. 8 .
- output control circuit 8150 is configured to receive enable signal 8641 and control NMOS/PMOS pair 8710 based on the value of enable signal 8641 .
- NMOS/PMOS pair 8710 is part of output driving circuit 9700 , which also comprises NMOS/PMOS pairs 9720 and 9730 .
- NMOS/PMOS pairs 8710 , 9720 , and 9730 are redundant to each other and, being smaller and less complicated than the previously described output driving circuits of FIGS. 3-4 , output driving circuit 9700 can be easier to tri-state such as to permit pad 8500 to be used as either an input or an output pad.
- the small size and simplicity of output driving circuit 9700 may also permit easily adding slew rate and drive strength control, which can be helpful to reduce board level noise for a simpler driver.
- pad 8500 is driven by triple redundant NMOS and PMOS pairs 8710 , 9720 , and 9730 , all of which can be simultaneously disabled to tri-state the output driving circuit 9700 .
- FIG. 8 shows the logical description, where enable signal 8641 tri-states pad 8500 when de-asserted. This configuration allows pad 8500 to drive input pad circuitry 1000 (from FIG. 1 ) in the present example.
- the example of FIG. 8 is expanded in FIG. 9 to encompass output control circuits 9250 and 9350 , which are triple redundant with output control circuit 8150 .
- output control circuits 8150 , 9250 , and 9350 When enable signals 8641 , 9642 , and 9643 are de-asserted, output control circuits 8150 , 9250 , and 9350 cause NMOS/PMOS transistor pairs 8710 , 9720 , and 9730 , respectively, to be tri-stated such that input/output pad 8500 can be used as an input pad. Conversely, when enable signals 8641 , 8642 , and 8643 are asserted, output control circuits 8150 , 9250 , and 9350 transmit output copies 3631 , 3632 , and 3633 towards input/output pad 8500 via output driving circuit 9700 such that input/output pad 8500 can be used as an output pad.
- FIG. 9 shows how output control circuit 8110 is coupled to level shifting output normalization circuits 9110 and 9120 of output receiving circuit 9100 .
- output control circuit 9250 is coupled to output normalization circuits 9130 and 9140 of output receiving circuit 9200
- output control circuit 9350 is coupled to output normalization circuits 9150 and 9160 of output receiving circuit 9300 .
- each of output normalization circuits 9110 , 9120 , 9130 , 9140 , 9150 , and 9160 are similar to output receiving circuit 3100 of FIG. 3 , although other configurations are possible in other embodiments.
- the control and data signals coming out of output control circuits 8150 , 9250 , and 9350 can be level shifted and buffered.
- the overall output pad energy per transition is reduced, because stacks are not required and the final drive transistors (as well as their drivers) can be narrower—half as wide for the final drivers.
- the present example dissipates approximately 42.4 pJ/transition in simulation using the same slew rate and same load (10 pF) as the design of FIG. 3 . This dissipation amounts to 37% of the energy dissipation of the previous design.
- the majority gate stacked transistors drive the output pad.
- two of the three branches of the majority gate are also de-asserted, reducing the slew rate by 2 ⁇ 3. If a similar event occurs in the revised design of FIG. 9 , it will affect only one transistor of one of NMOS/PMOS pairs 8710 , 9720 or 9730 if the SET is produced by an ionizing particle strike on a node beyond the initial level shifters. In such a case, the drive current is reduced by 1 ⁇ 3.
- the event occurs on one of the inputs, e.g., originates in the TMR core circuitry, then it affects both transistors in one of NMOS/PMOS pairs 8710 , 9720 or 9730 .
- the output slew rate is still reduced by 1 ⁇ 3, but this can be brought back to 2 ⁇ 3 by further replicating those paths. For example, on a pad falling edge, one PMOS transistor will remain on, cancelling the current of one of the NMOS pull down transistors. In the event that one transistor is asserted due to an SET, the other still on transistors consume the current, keeping the output relatively stable.
- FIG. 10 shows an example of an implementation of a topology for input pad 10500 and input pad circuitry 10000 at a 70 ⁇ m pad pitch.
- FIG. 11 shows an example of an implementation of a topology for output pad 11500 and output pad circuitry 11000 at a 70 ⁇ m pad pitch.
- input pad circuitry 10000 comprises triple redundant input driving circuits 10100 , 10200 , and 10300 , where input driving circuits 10200 and 10300 are separated from each other by approximately 41 ⁇ m, and where input driving circuits 10100 and 10200 are separated from each other by approximately 65 ⁇ m.
- output pad circuitry 11000 comprises triple redundant output receiving circuits 11100 , 11200 , and 11300 , where output receiving circuits 11200 and 11300 are separated from each other by approximately 43 ⁇ m, and where output receiving circuits 11100 and 11300 are separated from each other by approximately 39 ⁇ m.
- input pad circuitry 10000 can be similar to input pad circuitry 1000 ( FIG. 1 ).
- output pad circuitry 11000 can be similar to output pad circuitry 3000 ( FIG. 3 ), and/or to the output portion of input/output pad circuit 9000 ( FIG. 9 ).
- FIG. 12 illustrates a flowchart for a method 12000 for providing an integrated circuit with radiation hardened by design protection.
- the integrated circuit can be similar to one of those described above with respect to FIGS. 1-11 .
- Block 12100 of method 12000 comprises providing a first pad of one or more pads, the first pad being non-redundant.
- the first pad can be similar to input pad 1500 ( FIGS. 1-2 ), to output pad 1500 ( FIGS. 3-4 ), input/output pad 8500 ( FIGS. 8-9 ), to input pad 10500 ( FIG. 10 ), and/or to output pad 11500 ( FIG. 11 ).
- Block 12200 of method 12000 comprises providing a first pad circuitry of the first pad, the first pad circuitry being triple-redundant.
- the first pad circuitry can be similar to input pad circuitry 1000 ( FIGS. 1-2 ), output pad circuitry 3000 ( FIGS. 3-4 ), input/output pad circuitry 9000 ( FIG. 9 ), input pad circuitry 10000 ( FIG. 10 ), and/or to output pad circuitry 11000 ( FIG. 11 ).
- some of the blocks of method 12000 can be subdivided into several sub-blocks.
- block 12200 can comprise a sub-block for providing first, second and third pad circuits of the first pad circuitry, where the first, second and third pad circuits are separated from each other by at least approximately 10 ⁇ m.
- one or more different blocks or sub-blocks of method 1200 can be combined into a single step or performed simultaneously, and/or the sequence of such procedures can be changed.
- different parts of the blocks of method 12000 can be provided simultaneously during one or more stages of a semiconductor manufacturing flow used to make the integrated circuit of method 12000 .
- method 12000 can comprise further or different blocks. Other variations can be implemented for method 12000 without departing from the scope of the present disclosure.
- the techniques and/or circuits described herein may be programmed and/or implemented into an FPGA or other integrated circuit, such as a structured ASIC or a custom design, rather than as part of an ASIC.
- the input, output, and input/output pads in the figures herein represent wirebond pads, there can be other examples where non-wirebond pads, such as bump pads or controlled collapse chip connection (C4) pads, can be used in accordance with the present disclosure. Additional examples of such changes have been given in the foregoing description.
- embodiments and limitations disclosed herein are not dedicated to the public under the doctrine of dedication if the embodiments and/or limitations: (1) are not expressly claimed in the claims; and (2) are or are potentially equivalents of express elements and/or limitations in the claims under the doctrine of equivalents.
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Computing Systems (AREA)
- General Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Description
- This application claims priority to:
-
- U.S. Provisional Patent Application 61/176,432, filed on May 7, 2009, and titled “Radiation Hardened By Design Digital I/O For High SEE and TID Immunity,” and
- U.S. Provisional Patent Application 61/326,592, filed on Apr. 21, 2010, and titled “Radiation Hardened By Design Digital Input/Output and Related Methods.”
The disclosures of each of the applications referenced above are incorporated herein by reference.
- At least part of the disclosure herein was funded with government support under grant number FA-945307-C-0186, awarded by the Air Force Research Laboratory Space Vehicles Directorate. The United States Government may have certain rights in this invention.
- This invention relates generally to integrated circuits, and relates, more particularly, to radiation hardened by design digital input/ouput circuits and related methods.
- Input and output (I/O) circuits on an integrated circuit (IC) provide communication between external devices and the core logic circuits. In modern microcircuits, the I/O and core circuits operate at different voltages. Typically, modern microcircuits use a higher input/output voltage (VDDIO) of, for example, 3.3 V, 2.5 V, or 1.8 V, while the core supply voltage (VDD) can be of approximately 1.2 V or lower in sub-130 nm process technologies. The higher VDDIO allows interconnection to ICs operating at legacy voltages and potentially improves board level signal noise immunity.
- Mitigating radiation effects is important for ICs that are intended for harsh environments such as spacecraft. Ionizing radiation can affect the IC long term reliability through total ionizing dose (TID) effects, which impact individual device characteristics over time. Furthermore, the IC logic state may be temporarily altered to be incorrect by charge collected from ionizing radiation particle strikes, e.g., single event effects (SEE) produced by impinging heavy ions or protons. These particles can also produce a single event transient (SET) that can cause improper logic outputs or timing.
- Correct communications into and out of an IC in the presence of ionizing radiation is important, particularly to avoiding placing the IC into an incorrect functional state, known as a single event functional interrupt (SEFI) which may include issuing an inadvertent command, such as erroneously asserting the reset. An I/O SET may also shorten a reference clock edge, which may result in loss of phase loop lock. Specialized radiation hardened processes have typically used silicon on insulator (SOI) substrates. The shorter path length that an ionizing radiation particle can travel in the silicon beneath the active circuits limits the amount of charge that can be collected. Consequently, for these processes, the relatively large I/O circuit capacitances and low-pass characteristics of digital circuits may mitigate SETs. Radiation hardening by design (RHBD) approaches include temporal redundancy to mitigate SETs but these impact the circuit speed.
- Radiation effects in complementary metal-oxide-semiconductor (CMOS) circuits are primarily manifest as prompt dose, TID, single event latchup (SEL), and other SEE. TID effects are principally exhibited as long-term degeneration of device characteristics due to positive trapped charge in oxides that are exposed to ionizing radiation. Prompt dose effects are due to the collection of photocurrents produced by incident radiation. The primary IC effect is power rail voltage (rail span) collapse due to inability of the power supply or IC wiring to deliver the required currents.
- Total Ionizing Dose Effects:
- Total ionizing dose effects are produced when ionizing radiation creates electron-hole pairs within the oxides. These can induce both trapping damage, which affects the subthreshold slope, and threshold voltage (Vth) shifts. Electrons, which are more mobile, can escape, and the holes produce a net positive charge. For commercial processes the core oxide scaling trend, which has reduced thicknesses below 5 nm, eliminates Vth shifts by allowing both holes and electrons to escape the gate oxide before being trapped. Improved oxynitride gate composition has also reduced trapping damage. However, thick-gate transistors are still used in I/O circuits to allow high voltage tolerance and thus legacy voltage compatibility. Consequently, the thicker gate oxide transistors used in I/O circuits, as well as the very thick IC isolation oxides, i.e., shallow trench isolation (STI), remain vulnerable to TID effects in modern microcircuits fabricated on sub 100 nm technology nodes.
- TID primarily shifts metal-oxide-semiconductor (MOS) transistor threshold voltage (Vth) downwards. P-Type MOS (PMOS) transistors are affected, but an increase in the parasitic (field) transistor Vth has no deleterious effects. TID produces two primary N-Type MOS (NMOS) transistor leakage paths. Drain-to-source leakage in a single NMOS transistor is produced by a reduction in the Vth at the transistor edges, i.e., the interface between the thin and thick oxides. The second primary leakage current path is created under the STI between diffusion areas, i.e., between NMOS sources or drains at different biases or from an NMOS source/drain diffusion to the N-type well.
- SEU and SET in Microcircuits:
- SEE logic upsets are manifest as single event upsets (SEU) and single event transients. SEU is due to impinging ionizing particles, such as cosmic rays or protons, generating charge that upsets the logic state of bi-stable storage elements. An SET is a temporary voltage glitch in combinational logic generated by the collection of charge deposited by a massive ionizing particle such as a heavy ion. The glitch to the wrong state is temporary, and its duration is dependent on the linear energy transfer (LET) of the striking ion and the capacitance and current drive of the node struck. Thus, SETs only upset the IC architectural state when captured by a receiving sequential circuit. For higher IC operating frequencies and reduced operating voltages, SET mitigation has become critical, since the amount of charge deposited does not scale, resulting in transient durations of over 1 ns. A sufficient current drive and/or node capacitance can mitigate any SET at the actual large pad drivers in I/O circuits. However, the small receiver, level shifting, and buffering circuits are vulnerable and must be otherwise protected.
- Radiation Hardening by Design:
- RHBD uses layout techniques to avoid creating or cut off the leakage current flow produced by prolonged TID exposure Annular, or edgeless, transistors apply the same bias across any transistor gate oxide to isolation oxide interface and thus eliminate NMOS transistor drain-to-source leakage increase due to TID. P+ guard rings create a back to back diode structure to interrupt current paths created by trapped positive charge in isolation oxides. Alternating P+ and N+ guard rings protect against latchup due to beyond the rail voltages applied to the pads or in other circuits due to particle strikes.
- Recently, due to the dramatically increasing processing costs and greater availability of state-of-the-art commercial foundry capacity, providing radiation hardness solely through design techniques rather than a specialized fabrication process, has garnered increased attention. Previous I/O SEE RHBD Approaches: have focused on field-programmable-gate-array (FPGA) based designs with triple modular redundancy (TMR) I/O circuits, achieved by triplication of the pads and triplication of driving/receiving circuits. Such approaches have been inefficient due to the large increase in area and resources needed to achieve TMR. A need thus exists in the art to develop radiation hardened by design digital input/output circuits and related methods that address such limitations of the current technology.
- The invention will be better understood from a reading of the following detailed description of examples of embodiments, taken in conjunction with the accompanying figures in the drawings in which:
-
FIG. 1 illustrates a schematic of an input pad circuitry for an input pad. -
FIG. 2 illustrates an example of an implementation of a topology for the embodiment ofFIG. 1 -
FIG. 3 illustrates a schematic of an output pad circuitry for an output pad. -
FIG. 4 illustrates an example of an implementation of a topology for the embodiment ofFIG. 3 . -
FIG. 5 illustrates a diagram of an operation of the output pad circuitry ofFIG. 3 , handling output data mismatches for the output pad ofFIG. 3 -
FIG. 6 illustrates a test die and pad ring layout for an implementation encompassing the circuits ofFIGS. 1-5 . -
FIG. 7 shows TID impact, for irradiation up to 2 Mrad(Si), on a thick-gate circuit on the circuitry ofFIGS. 1-6 . -
FIG. 8 illustrates a schematic of a portion of an output control circuit for an input/output pad. -
FIG. 9 is a schematic of an input/output pad circuitry for an input/output pad. -
FIG. 10 shows an example of an implementation of a topology for an input pad and related input pad circuitry at a 70 micrometer (μm) pad pitch. -
FIG. 11 shows an example of an implementation of a topology for an output pad and related output pad circuitry at a 70 μm pad pitch. -
FIG. 12 illustrates a flowchart for a method for providing an integrated circuit with radiation hardened by design protection. - For simplicity and clarity of illustration, the drawing figures illustrate the general manner of construction, and descriptions and details of well-known features and techniques may be omitted to avoid unnecessarily obscuring the invention. Additionally, elements in the drawing figures are not necessarily drawn to scale. For example, the dimensions of some of the elements in the figures may be exaggerated relative to other elements to help improve understanding of embodiments of the present invention. The same reference numerals in different figures denote the same elements.
- The terms “first,” “second,” “third,” “fourth,” and the like in the description and in the claims, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms “include,” and “have,” and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, device, or apparatus that comprises a list of elements is not necessarily limited to those elements, but may include other elements not expressly listed or inherent to such process, method, system, article, device, or apparatus.
- The terms “left,” “right,” “front,” “back,” “top,” “bottom,” “over,” “under,” and the like in the description and in the claims, if any, are used for descriptive purposes and not necessarily for describing permanent relative positions. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein are, for example, capable of operation in other orientations than those illustrated or otherwise described herein.
- The terms “couple,” “coupled,” “couples,” “coupling,” and the like should be broadly understood and refer to connecting two or more elements or signals, electrically, mechanically or otherwise. Two or more electrical elements may be electrically coupled, but not mechanically or otherwise coupled; two or more mechanical elements may be mechanically coupled, but not electrically or otherwise coupled; two or more electrical elements may be mechanically coupled, but not electrically or otherwise coupled. Coupling (whether mechanical, electrical, or otherwise) may be for any length of time, e.g., permanent or semi-permanent or only for an instant.
- “Electrical coupling” and the like should be broadly understood and include coupling involving any electrical signal, whether a power signal, a data signal, and/or other types or combinations of electrical signals. “Mechanical coupling” and the like should be broadly understood and include mechanical coupling of all types. The absence of the word “removably,” “removable,” and the like near the word “coupled,” and the like does not mean that the coupling, etc. in question is or is not removable.
- In one embodiment, an integrated circuit with radiation hardened by design protection can comprise a first pad of one or more pads, and a first pad circuitry of the first pad, wherein the first pad circuitry is coupled to the first pad, the first pad circuitry is triple-redundant, and the first pad is non-redundant.
- In one embodiment, a method for providing an integrated circuit with radiation hardened by design protection can comprise providing a first pad of one or more pads, the first pad being non-redundant, and providing a first pad circuitry of the first pad, the first pad circuitry being triple-redundant.
- In one embodiment, an integrated circuit can comprise one or more transistors, a first pad of one or more pads; and a first pad interface circuit to couple the one or more transistors to the first pad. The one or more pads can be at least one of input pads for the integrated circuit, or output pads for the integrated circuit. The first pad is single-redundant and can be coupled to the one or more transistors via the first pad interface circuit. The first pad interface circuit is triple-redundant and comprises a first circuit configured to handle a first data copy of a triple redundant data, a second circuit configured to handle a second data copy of the triple redundant data, and a third circuit configured to handle a third data copy of the triple redundant data. The first, second, and third circuits can be are separated from each other by at least approximately 10 μm.
- In this disclosure, we apply TMR techniques to the I/O circuits of application-specific integrated circuit (ASIC) designs that employ full fine-grained TMR in high speed core circuits. Other embodiments may use different TMR core circuits and or granularity of the redundancy.
- Several implementations may be carried out for input circuts, for output circuits/, and/or for input/output circuits. In the embodiments and approaches described herein, while the pads utilize TMR to mitigate SETs that may occur in the signaling path, a single pad is used per signal. The input pad splits a given input into three separate A, B, and C copies, which are correctable by voting in the IC core circuits. The output pad is similarly controlled by three copies of a given data bit, which are voltage shifted up and fed into a majority gate pad driving stage. Such approaches thus require 67% fewer input or output pads than when using the FPGA approach described above with TMR pads.
- There are several circuits that IC pads of the embodiments described herein may require. For example, ASIC I/O circuits can include electrostatic discharge (ESD) protection, hysteretic noise rejection circuits, voltage level converters, and buffer circuits to drive the IC pad or internal routes to the core circuitry. For example, buffers may be supplied for both input and output pads. Dual N-type and P-type guard rings provide SEL and signal overshoot induced latchup mitigation in the pads. The guard rings also interrupt potential current paths induced by TID due to inversion of the shallow trench isolation (STI), thereby mitigating inter-device leakage. The circuit techniques described here are applicable to any RHBD IC using TMR techniques.
- Input Pad Design:
- Turning to the drawings,
FIG. 1 illustrates a schematic ofinput pad circuitry 1000 forinput pad 1500.FIG. 2 illustrates an example of an implementation of a topology for the embodiment ofFIG. 1 - In the current example,
pad 1500 is directly connected to inputpath 1600, which is coupled toESD protection diodes 1610, and which includes current limitingresistor 1620. Afterresistor 1620,input path 1600 splits to create three copies ofinput data 1630, namely,input copy 1631,input copy 1632, andinput copy 1633. In this example, there are no diffusions to collect charge betweenresistor 1620, which can be a polysilicon resistor, and the input buffers. The large drive and board capacitance is sufficient to eliminate SETs at those nodes on the pad, package, and/or board side ofresistor 1620. -
Input path 1600 feeds intoinput path circuitry 1000, whereinput copy 1631 is fed to input drivingcircuit 1100,input copy 1632 is fed to input drivingcircuitry 1200, andinput copy 1633 is fed to input drivingcircuitry 1300.Input driving circuitry 1100 comprises high-to-low level shifter 1110 (nominally shifting 2.5 V to 1.0 or 1.2 V in the presente example, where a CMOS cascode voltage switch design is used).Schmitt trigger 1120 provides hysteresis, and finally,buffer 1130 drives the processedinput copy 1631 tocore circuit 1400. Thick-gate transistors forpad 1500 are located involtage level shifter 1110, to provide compatibility with high voltages. The thick-gate transistors can have effective (SiO2 equivalent) thick-gate oxides of approximately 30 nm to approximately 50 nm, while other transistors can have thin-gate oxides of approximately 10 nm to approximately 25 nm. By effective oxide thickness, we mean equivalent SiO2 thicknesses, as used in circuit simulators. Other oxide materials, such as those incorporating nitride or Hf, may have different actual thicknesses, as understood to those skilled in the art. In the present example,input driving circuits circuit 1100, but configured to transmit andprocess input copies core circuit 1400.Core circuit 1400 comprisesinput correction mechanism 1410 in the present example, configured to compareinput copies input driving circuits Input correction mechanism 1410 can then determine whether one of input copies 1631-1633 is corrupt, and elect a non-corrupt status forinput data 1630. - On modern nanometer scale fabrication technologies, one ionizing radiation particle can upset multiple circuit nodes. To avoid this, we maximized the spacing of the redundant circuit cells in the pads for the present example, as can be seen in
FIG. 2 . A pad pitch of 100 μm was used for the examples here, although other pad pitches, such as 70 μm, are also possible. Sub-circuit placements were made to maximize the redundant node spacing, while meeting the pitch requirements.FIG. 2 also shows that annular NMOS gates are used throughout, for both thin-gate and thick-gate transistors. To allow compatibility between the standard and low standby power (LSP) versions of the foundry 90 nm process, the longer core transistor channel length required by the latter is used throughout. Some modern fabrication processes may not support such edgeless transistor gate geometries. The SEE protection described herein, however, can still be accomplished without edgeless transistor gate geometries, which mainly afford TID mitigation. - Output Pad Design:
-
FIG. 3 illustrates a schematic ofoutput pad circuitry 3000 foroutput pad 3500.FIG. 4 illustrates an example of an implementation of a topology for the embodiment ofFIG. 3 .FIG. 5 illustrates a diagram of an operation ofoutput pad circuitry 3000 handling output data mismatches foroutput pad 3500. - In the present embodiment,
output copies core circuit 1400 tooutput pad circuitry 3000, whereoutput copy 3631 is received byoutput receiving circuit 3100,output copy 3632 is received byoutput receiving circuit 3200, andoutput copy 3633 is received byoutput receiving circuit 3300. Output copies 3631-3633 are TMR copies of each other, andoutput receiving circuits - In the present example,
output receiving circuit 3100 includes a differential CMOS low-to-high level-shifter 3110 to translateoutput copy 3631 up from core voltage VDD to VDDIO levels each redundant data path. In some examples, the core voltage VDD can be of approximately 0.5 V to 1.5 V, and the VDDIO levels can be of approximately 1.5 V to 3.5 V, but there can be other examples compatible with higher I/O voltages.Level shifter 3110 has been confirmed to operate for VDDIO=1.8 V with core supply voltages VDD as low as 0.6 V. The level shiftedoutput signal 3631 is then buffered atoutput buffer 3130 and transmitted tooutput driving circuit 3700 which controls the pad voltage. In the present example,output driving circuit 3700 comprisesmajority gate 3710, configured to receive and vote output copies 3631-3633 fromoutput receiving circuits output data 3630.Output driving circuit 3700 prevents data corruption on the output in the event that one of the core TMR paths for output copies 3631-3633 disagrees with the others or when an SET occurs in the pad circuitry. Output transistor drain diodes can provide the ESD path to VDDIO and VSS in the output pads. - As seen in the topology of
FIG. 4 , care was taken to ensure large critical node spacing for the level shifting and buffer circuits. The pad capacitance, which can range in some examples from approximately 1 picofarad (pF) to approximately 30 pF (when the board level contribution is included) combined with the larger VDDIO, is sufficient to absorb any SET induced charge at the output driver transistor drains. The level shifter and buffer circuit layout is shown at the bottom ofFIG. 4 . As inFIG. 2 , annular NMOS transistor gate topologies are used throughout this embodiment. Simulated output pad operation with one input incorrect is shown inFIG. 5 , where the output transitions only with the majority of the inputs as expected.Majority gate 3710 was sized to provide the same current as a single redundant pad in the event of a mismatch on one input. Such sizing allows faster signal timing at the board level, even if there is an SET on one of the TMR core signals exiting the IC. - Simulation of TMR Power Impact:
- TMR input and/or output pads and related circuitry, such as those described above for
FIGS. 1-4 , can impact the overall energy consumption of the chip, but in a high performance design, this impact is not large, due to a number of factors. First, the I/Os generally operate at a lower frequency than the core circuits. For our test chip, core circuits can operate at over 500 MHz and the I/Os operate at 100 MHz. Secondly, power dissipation (or energy per transition) is proportional to the capacitance of each node. The overall capacitance is dominated by the pad, package, and board trace, rather than the redundant circuits. - Non-redundant and TMR versions of the pads were simulated with extracted parasitics to quantify the TMR power impact, as summarized in Table I. The pad energy dissipation for non-redundant output pad was estimated to be at approximately 77.5 picoJoules (pJ) per transition, while the pad energy dissipation for the TMR pad circuitry of
FIGS. 3-4 was estimated to dissipate 115 pJ/transition when driving a load of 10 pF. The 48% increase can be attributed to triplication of the level shifters and output buffers, as well as the large size of the majority gate transistors, which as mentioned, have increased in drive strength. In the output pad, the total gate width increased 65% from the non-redundant to the TMR version. Simulating the input pad with single and triple redundancy resulted in an energy usage of 294 femtoJoules (fJ) per transition and 1350 fJ/transition, respectively. Such increase results from the threefold increase in data paths that must drive the core logic, as well as an increase in buffer sizes, which were added to speed the signaling from the pads to the core circuits. The input pad power dissipation is much smaller than the output pad power, and such increase does not significantly affect overall IC power. For a design with half input and half output pads, the overall I/O power impact of the TMR pads is thus less than 50%. -
TABLE I IMPACT OF TMR ON I/O ENERGY Energy per Transition (pJ) Input Pad Output Pad Non-redundant 0.294 77.5 TMR 1.35 115 - Experimentally Measured Results: A test chip with TMR pads in accordance with the present disclosure was fabricated on a 90 nm process, where the TMR pads comprise 57 input, 73 output, 12 VDDIO, 11 VDD, and 24 VSS pads. The device under test (DUT) is composed of a RHBD fully TMR high speed built-in self-test engine to test a RHBD cache.
FIG. 6 shows the test die and pad ring layout. The die is 5 mm by 5 mm. - The DUT was irradiated using a Co-60 Gammacell 220.
FIG. 7 shows the TID impact on the thick-gate circuit (2.5 V supply VDDIO) leakage current (IDDIO) for irradiation up to 2 Mrad(Si). The results show a slight but steady decrease in the VDDIO leakage current IDDIO with radiation dose. The decrease was 8.7% after 2 Mrad(Si). The small IDDIO deviation demonstrates the effectiveness of the TID mitigation. - SEE testing was performed at the Texas A&M University Cyclotron Institute SEE Beam Line. N, Ne, Ar, Cu, Kr and Au ions were used with LET ranging from 1.4 to 92.9 MeV-cm2/mg. Angles of 0° to 79° with 0° being perpendicular to the die surface were used in two orientations, across the top and bottom I/Os and across the left and right I/Os in the pad ring. The effective LET (LETeff) thus ranged from 1.4 to 219.8 MeV-cm2/mg. No errors were recorded in the TMR I/Os, demonstrating the efficacy of the invention.
- Input/Output Pad Design:
- The circuits described above with respect to
FIGS. 1-7 used only input or output pads to reduce risk and design time. Modern ASICs, however, often require bidirectional pads. Fortunately, the disclosure herein is equally applicable to such bidirectional pads, as seen in the examples ofFIGS. 8-10 .FIG. 8 illustrates a schematic of a portion ofoutput control circuit 8150 for input/output pad 8500.FIG. 9 is a schematic of input/output pad circuitry 9000 foroutput pad 8500, where input/output pad circuitry 9000 comprises output control circuit 8100 ofFIG. 8 . - In the present example,
output control circuit 8150 is configured to receive enablesignal 8641 and control NMOS/PMOS pair 8710 based on the value of enablesignal 8641. In the present example, NMOS/PMOS pair 8710 is part ofoutput driving circuit 9700, which also comprises NMOS/PMOS pairs PMOS pairs FIGS. 3-4 ,output driving circuit 9700 can be easier to tri-state such as to permitpad 8500 to be used as either an input or an output pad. The small size and simplicity ofoutput driving circuit 9700 may also permit easily adding slew rate and drive strength control, which can be helpful to reduce board level noise for a simpler driver. - In the present example,
pad 8500 is driven by triple redundant NMOS andPMOS pairs output driving circuit 9700.FIG. 8 shows the logical description, where enablesignal 8641tri-states pad 8500 when de-asserted. This configuration allowspad 8500 to drive input pad circuitry 1000 (fromFIG. 1 ) in the present example. The example ofFIG. 8 is expanded inFIG. 9 to encompassoutput control circuits output control circuit 8150. When enable signals 8641, 9642, and 9643 are de-asserted,output control circuits output pad 8500 can be used as an input pad. Conversely, when enable signals 8641, 8642, and 8643 are asserted,output control circuits output copies output pad 8500 viaoutput driving circuit 9700 such that input/output pad 8500 can be used as an output pad. - The example of
FIG. 9 shows how output control circuit 8110 is coupled to level shiftingoutput normalization circuits output receiving circuit 9100. Similarly,output control circuit 9250 is coupled tooutput normalization circuits output receiving circuit 9200, andoutput control circuit 9350 is coupled tooutput normalization circuits output receiving circuit 9300. In the present example, each ofoutput normalization circuits output receiving circuit 3100 ofFIG. 3 , although other configurations are possible in other embodiments. Through the output normalization circuits, the control and data signals coming out ofoutput control circuits FIG. 9 , the overall output pad energy per transition is reduced, because stacks are not required and the final drive transistors (as well as their drivers) can be narrower—half as wide for the final drivers. The present example dissipates approximately 42.4 pJ/transition in simulation using the same slew rate and same load (10 pF) as the design ofFIG. 3 . This dissipation amounts to 37% of the energy dissipation of the previous design. - In the design of
FIG. 3 , the majority gate stacked transistors drive the output pad. When one of the three inputs is de-asserted due to a SEE, two of the three branches of the majority gate are also de-asserted, reducing the slew rate by ⅔. If a similar event occurs in the revised design ofFIG. 9 , it will affect only one transistor of one of NMOS/PMOS pairs PMOS pairs - Continuing with the figures,
FIG. 10 shows an example of an implementation of a topology forinput pad 10500 andinput pad circuitry 10000 at a 70 μm pad pitch.FIG. 11 shows an example of an implementation of a topology foroutput pad 11500 andoutput pad circuitry 11000 at a 70 μm pad pitch. At this reduced pitch, it is still possible to provide large critical node spacing. For example,input pad circuitry 10000 comprises triple redundantinput driving circuits input driving circuits input driving circuits output pad circuitry 11000 comprises triple redundantoutput receiving circuits output receiving circuits output receiving circuits input pad circuitry 10000 can be similar to input pad circuitry 1000 (FIG. 1 ). In the same or other examples,output pad circuitry 11000 can be similar to output pad circuitry 3000 (FIG. 3 ), and/or to the output portion of input/output pad circuit 9000 (FIG. 9 ). - Moving on,
FIG. 12 illustrates a flowchart for amethod 12000 for providing an integrated circuit with radiation hardened by design protection. In some examples, the integrated circuit can be similar to one of those described above with respect toFIGS. 1-11 . -
Block 12100 ofmethod 12000 comprises providing a first pad of one or more pads, the first pad being non-redundant. There can be examples where the first pad can be similar to input pad 1500 (FIGS. 1-2 ), to output pad 1500 (FIGS. 3-4 ), input/output pad 8500 (FIGS. 8-9 ), to input pad 10500 (FIG. 10 ), and/or to output pad 11500 (FIG. 11 ). -
Block 12200 ofmethod 12000 comprises providing a first pad circuitry of the first pad, the first pad circuitry being triple-redundant. In some examples, the first pad circuitry can be similar to input pad circuitry 1000 (FIGS. 1-2 ), output pad circuitry 3000 (FIGS. 3-4 ), input/output pad circuitry 9000 (FIG. 9 ), input pad circuitry 10000 (FIG. 10 ), and/or to output pad circuitry 11000 (FIG. 11 ). - In some examples, some of the blocks of
method 12000 can be subdivided into several sub-blocks. For example, block 12200 can comprise a sub-block for providing first, second and third pad circuits of the first pad circuitry, where the first, second and third pad circuits are separated from each other by at least approximately 10 μm. In the same or other examples, one or more different blocks or sub-blocks ofmethod 1200 can be combined into a single step or performed simultaneously, and/or the sequence of such procedures can be changed. For example, different parts of the blocks ofmethod 12000 can be provided simultaneously during one or more stages of a semiconductor manufacturing flow used to make the integrated circuit ofmethod 12000. There can also be examples wheremethod 12000 can comprise further or different blocks. Other variations can be implemented formethod 12000 without departing from the scope of the present disclosure. - Although the radiation hardened by design digital input/output circuits and related methods herein have been described with reference to specific embodiments, various changes may be made without departing from the spirit or scope of the present disclosure. For example, the techniques and/or circuits described herein may be programmed and/or implemented into an FPGA or other integrated circuit, such as a structured ASIC or a custom design, rather than as part of an ASIC. As another example, the input, output, and input/output pads in the figures herein represent wirebond pads, there can be other examples where non-wirebond pads, such as bump pads or controlled collapse chip connection (C4) pads, can be used in accordance with the present disclosure. Additional examples of such changes have been given in the foregoing description. Accordingly, the disclosure of embodiments herein is intended to be illustrative of the scope of the invention and is not intended to be limiting. It is intended that the scope of this application shall be limited only to the extent required by the appended claims. The radiation hardened by design digital input/output circuits and related methods discussed herein may be implemented in a variety of embodiments, and the foregoing discussion of certain of these embodiments does not necessarily represent a complete description of all possible embodiments. Rather, the detailed description of the drawings, and the drawings themselves, disclose at least one preferred embodiment, and may disclose alternative embodiments.
- All elements claimed in any particular claim are essential to the embodiment claimed in that particular claim. Consequently, replacement of one or more claimed elements constitutes reconstruction and not repair. Additionally, benefits, other advantages, and solutions to problems have been described with regard to specific embodiments. The benefits, advantages, solutions to problems, and any element or elements that may cause any benefit, advantage, or solution to occur or become more pronounced, however, are not to be construed as critical, required, or essential features or elements of any or all of the claims.
- Moreover, embodiments and limitations disclosed herein are not dedicated to the public under the doctrine of dedication if the embodiments and/or limitations: (1) are not expressly claimed in the claims; and (2) are or are potentially equivalents of express elements and/or limitations in the claims under the doctrine of equivalents.
Claims (29)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/776,188 US9191009B1 (en) | 2009-05-07 | 2010-05-07 | Radiation hardened by design digital input/output circuits and related methods |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US17643209P | 2009-05-07 | 2009-05-07 | |
US32659210P | 2010-04-21 | 2010-04-21 | |
US12/776,188 US9191009B1 (en) | 2009-05-07 | 2010-05-07 | Radiation hardened by design digital input/output circuits and related methods |
Publications (2)
Publication Number | Publication Date |
---|---|
US9191009B1 US9191009B1 (en) | 2015-11-17 |
US20150349775A1 true US20150349775A1 (en) | 2015-12-03 |
Family
ID=54434706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/776,188 Expired - Fee Related US9191009B1 (en) | 2009-05-07 | 2010-05-07 | Radiation hardened by design digital input/output circuits and related methods |
Country Status (1)
Country | Link |
---|---|
US (1) | US9191009B1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9438025B1 (en) * | 2013-03-11 | 2016-09-06 | Defense Electronics Corporation | Radiation hardened chip level integrated recovery apparatus, methods, and integrated circuits |
US20190273499A1 (en) * | 2018-03-02 | 2019-09-05 | Infineon Technologies Ag | Electronic circuit and methods for producing and designing electronic circuits |
US20230305984A1 (en) * | 2020-03-06 | 2023-09-28 | Apogee Semiconductor, Inc. | Circuits and methods for enabling redundancy in an electronic system employing cold-sparing |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2610246C1 (en) * | 2015-12-11 | 2017-02-08 | Олег Александрович Козелков | Universal majority module |
US10579536B2 (en) | 2016-08-09 | 2020-03-03 | Arizona Board Of Regents On Behalf Of Arizona State University | Multi-mode radiation hardened multi-core microprocessors |
US9871520B1 (en) | 2016-08-15 | 2018-01-16 | Xilinx, Inc. | Voting circuit and self-correcting latches |
DE102016121696A1 (en) * | 2016-11-11 | 2018-05-17 | Tesat-Spacecom Gmbh & Co.Kg | Tristate-capable cross-flow-free output buffer |
US11374567B2 (en) * | 2017-02-11 | 2022-06-28 | Klas Olof Lilja | Circuit for low power, radiation hard logic cell |
CN107241090B (en) * | 2017-05-23 | 2020-12-22 | 中国人民解放军国防科学技术大学 | VCO (voltage controlled oscillator) bias circuit with single event effect resistance function |
US11205031B2 (en) * | 2019-02-25 | 2021-12-21 | Qiang Huang | System and method for facilitating use of commercial off-the-shelf (COTS) components in radiation-tolerant electronic systems |
US10734998B1 (en) * | 2019-05-31 | 2020-08-04 | The Boeing Company | Complementary self-limiting logic |
CN110880928A (en) * | 2019-12-05 | 2020-03-13 | 电子科技大学 | CMOS standard unit anti-radiation reinforcing circuit |
US11996843B2 (en) * | 2022-01-03 | 2024-05-28 | Texas Instruments Incorporated | Redundant analog built-in self test |
US11848673B1 (en) | 2022-08-18 | 2023-12-19 | Apogee Semiconductor, Inc. | Majority voter with error detection |
US11791831B1 (en) | 2023-05-19 | 2023-10-17 | Apogee Semiconductor, Inc. | Modular redundant threshold circuit and method |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6247143B1 (en) * | 1998-06-30 | 2001-06-12 | Sun Microsystems, Inc. | I/O handling for a multiprocessor computer system |
US6667520B1 (en) * | 2002-11-21 | 2003-12-23 | Honeywell International Inc. | SEU hard majority voter for triple redundancy |
US6838899B2 (en) * | 2002-12-30 | 2005-01-04 | Actel Corporation | Apparatus and method of error detection and correction in a radiation-hardened static random access memory field-programmable gate array |
US7467326B2 (en) * | 2003-02-28 | 2008-12-16 | Maxwell Technologies, Inc. | Self-correcting computer |
US7444565B1 (en) * | 2003-11-24 | 2008-10-28 | Itt Manufacturing Enterprises, Inc. | Re-programmable COMSEC module |
US7047440B1 (en) * | 2004-07-27 | 2006-05-16 | Freydel Lev R | Dual/triple redundant computer system |
US7476953B2 (en) * | 2005-02-04 | 2009-01-13 | Allegro Microsystems, Inc. | Integrated sensor having a magnetic flux concentrator |
US7266020B1 (en) * | 2005-07-19 | 2007-09-04 | Xilinx, Inc. | Method and apparatus for address and data line usage in a multiple context programmable logic device |
US7451421B1 (en) * | 2005-11-01 | 2008-11-11 | Xilinx, Inc. | Methods of implementing and modeling interconnect lines at optional boundaries in multi-product programmable IC dies |
US7424642B2 (en) * | 2006-04-24 | 2008-09-09 | Gm Global Technology Operations, Inc. | Method for synchronization of a controller |
US7622976B2 (en) * | 2006-07-06 | 2009-11-24 | Stc.Unm | Sequential circuit design for radiation hardened multiple voltage integrated circuits |
US7898284B2 (en) * | 2006-11-14 | 2011-03-01 | California Institute Of Technology | Asynchronous nano-electronics |
US7548405B2 (en) * | 2006-12-20 | 2009-06-16 | International Business Machines Corporation | Systems and methods using diodes to protect electronic devices |
US8698139B2 (en) * | 2008-11-25 | 2014-04-15 | Qualcomm Incorporated | Die-to-die power consumption optimization |
US8390327B1 (en) * | 2011-08-19 | 2013-03-05 | Texas Instruments Incorporated | Radiation-tolerant level shifting |
-
2010
- 2010-05-07 US US12/776,188 patent/US9191009B1/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9438025B1 (en) * | 2013-03-11 | 2016-09-06 | Defense Electronics Corporation | Radiation hardened chip level integrated recovery apparatus, methods, and integrated circuits |
US9720026B1 (en) | 2013-03-11 | 2017-08-01 | Defense Electronics Corporation | Radiation hardened chip level integrated recovery apparatus, methods, and integrated circuits |
US20190273499A1 (en) * | 2018-03-02 | 2019-09-05 | Infineon Technologies Ag | Electronic circuit and methods for producing and designing electronic circuits |
US10574234B2 (en) * | 2018-03-02 | 2020-02-25 | Infineon Technologies Ag | Electronic circuit and methods for producing and designing electronic circuits |
US20230305984A1 (en) * | 2020-03-06 | 2023-09-28 | Apogee Semiconductor, Inc. | Circuits and methods for enabling redundancy in an electronic system employing cold-sparing |
US11847084B2 (en) * | 2020-03-06 | 2023-12-19 | Apogee Semiconductor, Inc. | Circuits and methods for enabling redundancy in an electronic system employing cold-sparing |
Also Published As
Publication number | Publication date |
---|---|
US9191009B1 (en) | 2015-11-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9191009B1 (en) | Radiation hardened by design digital input/output circuits and related methods | |
US8354858B2 (en) | Apparatus and method for hardening latches in SOI CMOS devices | |
US8634174B2 (en) | Gate dielectric breakdown protection during ESD events | |
Makihara et al. | Hardness-by-design approach for 0.15/spl mu/m fully depleted CMOS/SOI digital logic devices with enhanced SEU/SET immunity | |
US20170012038A1 (en) | Electrostatic Discharge Protection for Level-Shifter Circuit | |
US20090072313A1 (en) | Hardened transistors in soi devices | |
US11177807B2 (en) | Circuit, method for sizing an aspect ratio of transistors of a circuit, and circuit arrangement | |
Trivedi et al. | A survey of radiation hardening by design (rhbd) techniques for electronic systems for space application | |
US10436836B2 (en) | Unbalanced multiplexer and scan flip-flops applying the same | |
JP2004228782A (en) | Level conversion circuit | |
US20110122539A1 (en) | Method and structure for over-voltage tolerant cmos input-output circuits | |
Ker et al. | Design of mixed-voltage I/O buffer by using NMOS-blocking technique | |
US9748955B1 (en) | Radiation-hardened CMOS logic device | |
Chen et al. | An Output Buffer for 3.3-V Applications in a 0.13-$\mu\hbox {m} $1/2.5-V CMOS Process | |
US7394291B2 (en) | High voltage tolerant output buffer | |
US20060164143A1 (en) | Method and system for reducing glitch effects within combinational logic | |
US8330494B2 (en) | Semiconductor device having a latch circuit | |
Sorge et al. | JICG MOS transistors for reduction of radiation effects in CMOS electronics | |
CN112567631B (en) | D-type trigger circuit | |
Clark et al. | Radiation hardened by design digital I/O for high SEE and TID immunity | |
Holman | Radiation-tolerant design for high performance mixed-signal circuits | |
Ker et al. | Design on mixed-voltage I/O buffers with consideration of hot-carrier reliability | |
Mitra et al. | Maximizing ESD design window by optimizing gate bias for cascoded drivers in 45nm and beyond SOI technologies | |
CN210578492U (en) | Single event effect resisting reinforcing circuit of CMOS integrated circuit | |
CN110830021A (en) | Single event effect resisting reinforcing circuit of CMOS integrated circuit |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: ARIZONA BOARD OF REGENTS, FOR AND ON BEHALF OF ARI Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:CLARK, LAWRENCE T.;NIELSEN, KYLE E.;SIGNING DATES FROM 20100709 TO 20110428;REEL/FRAME:026893/0707 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
CC | Certificate of correction | ||
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 4TH YR, SMALL ENTITY (ORIGINAL EVENT CODE: M2551); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY Year of fee payment: 4 |
|
FEPP | Fee payment procedure |
Free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY |
|
LAPS | Lapse for failure to pay maintenance fees |
Free format text: PATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY |
|
STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
|
FP | Lapsed due to failure to pay maintenance fee |
Effective date: 20231117 |