US20150090584A1 - Plating apparatus and cleaning device used in the plating apparatus - Google Patents
Plating apparatus and cleaning device used in the plating apparatus Download PDFInfo
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- US20150090584A1 US20150090584A1 US14/497,520 US201414497520A US2015090584A1 US 20150090584 A1 US20150090584 A1 US 20150090584A1 US 201414497520 A US201414497520 A US 201414497520A US 2015090584 A1 US2015090584 A1 US 2015090584A1
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- Prior art keywords
- substrate
- substrate holder
- sidewall
- plating
- dry
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/004—Sealing devices
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/005—Contacting devices
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/02—Tanks; Installations therefor
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/08—Rinsing
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/48—Electroplating: Baths therefor from solutions of gold
Definitions
- the dry-type plating apparatus entails an installation space for a mechanism of pressing the substrate holder against the sidewall of the plating bath. Therefore, a footprint of the dry-type plating apparatus becomes larger than that of the dip-type plating apparatus.
- the cleaning device further comprises a cleaning nozzle configured to supply a cleaning liquid to the cleaning element.
- FIG. 4 is a right side view of the substrate holder shown in FIG. 2 ;
- FIG. 7 is a schematic view showing a dry-type plating bath
- FIG. 19 is an enlarged view showing a part enclosed by a symbol A shown in FIG. 17 .
- the first plating solution may be a plating solution, such as a copper plating solution, a nickel plating solution, or the like, which is relatively inexpensive and/or has a property that metal is relatively less likely to be deposited on the substrate holder 8 even if the plating solution is attached to the substrate holder 8 .
- a plating solution such as a copper plating solution, a nickel plating solution, or the like, which is relatively inexpensive and/or has a property that metal is relatively less likely to be deposited on the substrate holder 8 even if the plating solution is attached to the substrate holder 8 .
- the pressing mechanism 115 for moving the substrate holder 8 in a direction toward the sidewall 36 and in a direction away from the sidewall 36 .
- the pressing mechanism 115 includes a suction pad 116 having a hollow 116 a and an actuator 118 for moving the suction pad 116 .
- an annular tube, a pneumatic cylinder, a ball screw mechanism, or the like is used as the actuator 118 .
- the pressing mechanism 115 is configured to press the substrate holder 8 holding the substrate W against an outer surface of the sidewall 36 , thereby closing an outer opening end of the hole 36 a , formed in the sidewall 36 , with the substrate holder 8 holding the substrate W.
- a plating solution chamber 109 in which the second plating solution is present is formed between the substrate W and the partition 107 .
- the substrate holder 8 is transported into the holder cell 37 by the transporter 101 .
- the holder hangers 108 are placed on a hanging base 120 on a pedestal 121 disposed on the holder cell 37 , so that the substrate holder 8 is suspended in the holder cell 37 .
- FIG. 10A is a view showing the substrate holder 8 when hanging from the hanging base 120 .
- the hanging base 120 has an electrical contact 122 that is electrically connected to a plating power source 98 .
- the substrate holder 8 is placed on the hanging base 120 to hang from the hanging base 120 , and then the pressing mechanism 115 presses the substrate holder 8 against the sidewall 36 . While the pressing mechanism 115 presses the substrate holder 8 against the sidewall 36 to close the hole 36 a with the substrate holder 8 holding the substrate W, the pressing mechanism 115 , at the same time, presses the feeding terminal 91 of the substrate holder 8 against the electrical contact 122 .
- the plating solution may be attached to the sidewall 36 that contacts the substrate holder 8 .
- a metal may be deposited on the sidewall 36 , possibly causing the leakage of the second plating solution from a gap between the sidewall 36 and the third seal portion 69 of the substrate holder 8 .
- a possible way of cleaning the sidewall 36 includes the step of ejecting a cleaning liquid directly toward the sidewall 36 .
- the plating apparatus includes a cleaning device 140 that can remove the deposited metal.
- FIG. 15 is a schematic view showing the cleaning device 140 pressed against the sidewall 36 of the plating bath 35 .
- the cleaning nozzle 155 may be provided on the dry-type plating bath 35 instead of the cleaning device 140 .
- the cleaning nozzle 155 is provided above the plating bath 35 , i.e., on the pedestal 121 .
- the cleaning nozzle 155 is configured to supply the cleaning liquid widely toward the cleaning device 140 (cleaning element 142 ) located obliquely downwardly from the cleaning nozzle 155 .
- a fan-shaped nozzle or the like may be used as the cleaning nozzle 155 .
- a drainage hole 156 is formed in a bottom of the frame 141 .
- the cleaning liquid that has entered a gap between the movable member 145 and the frame 141 is discharged through the drainage hole 156 to the exterior of the cleaning device 140 . Further, the cleaning liquid is discharged through the drain 125 a of the holder cell 37 to the exterior of the holder cell 37 .
- the cleaning device 140 has substantially the same shape and size as those of the substrate holder 8 . Therefore, the transporter 101 can transport the cleaning device 140 , as with the substrate holder 8 , to a predetermined position beside the sidewall 36 of the dry-type plating bath 35 . Specifically, the cleaning device 140 is transported to a predetermined position in the holder cell 37 by the transporter 101 . The hangers 146 of the cleaning device 140 are placed on the hanging base 120 so that the cleaning device 140 hangs from the hanging base 120 . The cleaning device 140 is then pressed against the sidewall 36 by the pressing mechanism 115 . The cleaning device 140 is pressed by the pressing mechanism 115 under an appropriate contact surface pressure that does not cause the sidewall 36 to wear. A surface treatment may be applied to the sidewall 36 so as to impart wear resistance to the sidewall 36 .
- the substrate holder 8 in a vertical position is taken out from the storage container 30 by the arm 104 of the transporter 101 .
- the arm 104 gripping the substrate holder 8 , is moved in the horizontal direction to transfer the substrate holder 8 to the substrate holder opening-closing mechanism 24 .
- the substrate holder opening-closing mechanism 24 changes the substrate holder 8 from the vertical position to the horizontal position, and opens the substrate holder 8 .
- the arm 104 moves the substrate holder 8 in the horizontal direction to a position above the pretreatment bath 33 .
- the lifter 103 lowers the arm 104 , together with the substrate holder 8 , to set the substrate holder 8 at a predetermined position in the pretreatment bath 33 .
- the substrate W is pretreated.
- the gripper 111 of the arm 104 grips the substrate holder 8 , and the lifter 103 lifts the arm 104 to raise the substrate holder 8 from the pretreatment bath 33 .
- the arm 104 moves the substrate holder 8 in the horizontal direction to a position above the first rinsing bath 40 .
- the arm 104 moves the substrate holder 8 in the horizontal direction to a position above the blow cell 38 . Further, the lifter 103 lowers the arm 104 , together with the substrate holder 8 , to set the substrate holder 8 at a predetermined position in the blow cell 38 .
- a jet of N 2 gas or clean air is supplied onto the substrate holder 8 so as to remove droplets attached to the surface of the substrate W held by the substrate holder 8 , thereby drying the substrate W.
- the gripper 111 of the arm 104 grips the substrate holder 8 , and the lifter 103 lifts the arm 104 to raise the substrate holder 8 from the blow cell 38 .
- the arm 104 moves in the horizontal direction to transfer the substrate holder 8 to the substrate holder opening-closing mechanism 24 .
- the substrate holder opening-closing mechanism 24 opens the substrate holder 8 in the previously-described manner.
- the substrate transfer robot 22 removes the processed substrate W from the substrate holder 8 and then transfers the substrate W to the spin-rinse dryer 6 .
- the spin-rinse dryer 6 rotates the substrate W at a high speed to dry the substrate W.
- the substrate transfer robot 22 removes the dried substrate W from the spin-rinse dryer 6 and returns the substrate W to the cassette on the load port 2 . In this manner, the process of the substrate W is completed.
- FIG. 16 is a view comparing the length of the plating apparatus according to the embodiment to the length of a typical dry-type plating apparatus.
- the plating apparatus according to the embodiment is shorter by length L than that of the typical dry-type plating apparatus.
- the typical dry-type plating apparatus includes seven dry-type plating baths 35 .
- the plating apparatus according to the embodiment includes five dip-type plating baths 34 and two dry-type plating baths 35 . Since the plating apparatus according to the embodiment includes the dry-type plating baths 35 and the dip-type plating baths 34 , the plating solution remaining on the substrate holder 8 can be reduced without enlarging the footprint of the plating apparatus.
- FIG. 19 is an enlarged view showing a part enclosed by a symbol A shown in FIG. 17 .
- the substrate holder 8 has a projecting surface (i.e., a surface 63 a of the seal ring 63 ) projecting in the normal direction of the substrate W, and stepped portion 70 at the outside of the projecting surface 63 a .
- a portion of holder ring 62 lying at an inner side of the annular stepped portion 70 is inserted into the hole 36 a .
- the annular stepped portion 70 extends so as to surround the outer opening end of the hole 36 a .
- the substrate holder 8 has third seal portion 69 on the stepped portion 70 .
- the portion of the seal ring 63 that constitutes the most projecting surface of the substrate holder 8 serves as the third seal portion 69
- the portion of the seal ring 63 provided on the stepped portion 70 of the holder ring 62 serves as the third seal portion 69 .
- the above-discussed cleaning device 140 can also be used in the dry-type plating bath 35 shown in FIG. 17 .
Abstract
A plating apparatus for plating a substrate is disclosed. The plating apparatus includes: a dip-type plating bath; a dry-type plating bath having a hole in a sidewall thereof; and a pressing mechanism configured to press a substrate holder, holding a substrate, against the sidewall of the dry-type plating bath to close the hole. The substrate holder includes a base member and a holding member configured to sandwich the substrate therebetween, a first seal portion configured to seal a gap between the substrate and the holding member, a second seal portion configured to seal a gap between the base member and the holding member, and a third seal portion configured to seal a gap between the holding member and the sidewall of the dry-type plating bath.
Description
- This document claims priority to Japanese Patent Application Number 2013-207188 filed Oct. 2, 2013, the entire contents of which are hereby incorporated by reference.
- It is a common practice in TAB (tape automated bonding) or flip chip to form protruding connection electrodes (i.e., bumps) of gold, copper, solder or nickel, or of multiple layers of such metals at predetermined portions (electrodes) of a surface of a semiconductor chip having interconnects formed therein so that the semiconductor chip can be electrically coupled via the bumps to substrate electrodes or TAB electrodes. There are various methods usable for forming the bumps, such as electroplating, vapor deposition, printing, and ball bumping. In recent years, electroplating, which can form fine bumps and can be performed in a relatively stable manner, has been widely used, as the number of I/O in a semiconductor chip increases and the electrode pitch becomes smaller.
- Dip-type electroplating is one of typical electroplating methods. In this dip-type electroplating, a substrate is placed vertically in a plating bath and is immersed in a plating solution while the plating solution is supplied from a bottom of the plating bath to overflow it. A dip-type plating apparatus typically includes a substrate holder for holding the substrate in the vertical position. The substrate holder has a seal member for forming a hermetically closed space that surrounds a periphery of the substrate. Feeding electrodes are disposed in this hermetically closed space. The substrate is held by the substrate holder with a surface (to be plated) of the substrate exposed, and the substrate, together with the substrate holder, is immersed in the plating solution, so that the surface of the substrate is plated.
- However, in such a dip-type plating apparatus, when the substrate holder is raised from the plating bath, the substrate holder carries the plating solution from the plating bath, thus reducing an amount of the plating solution in the plating bath. Particularly in a case of using an expensive plating solution, such as a gold plating solution, frequent refill of the plating solution results in an increase in cost. Further, in a case of performing multistage plating for different metals using a plurality of plating solutions, the plating solution, attached to the substrate holder, may be mixed into another plating solution in the next plating bath. As a result, several kinds of metals may be deposited on the substrate.
- Moreover, if the plating solution remains on the substrate holder, the metal may be deposited on the substrate holder. Particularly, the gold plating solution has a property that gold is likely to be deposited. If a subsequent plating process is performed with the metal deposited on the seal member, the hermetically closed space may not be formed properly in the substrate holder, and the plating solution may possibly enter the hermetically closed space, thus contacting the feeding electrodes. Further, the deposited metal may hinder a movement of a movable part of the substrate holder. In order to prevent such metal deposition, it is necessary to perform cleaning of the substrate holder more frequently, resulting in an increase in an amount of cleaning liquid to be used and an increase in a cleaning time.
- Under such circumstances, there is known a dry-type plating apparatus for plating a substrate by bringing only a surface to be plated of the substrate into contact with a plating solution (see Japanese laid-open patent publication No. 2004-353048 and Japanese laid-open patent publication No. 2000-192298, for example). A plating bath used in this dry-type plating apparatus has an opening in a sidewall thereof. A substrate holder is pressed against the sidewall of the plating bath so that the opening is closed with the substrate holder holding the substrate. In this state, a plating solution is supplied into the plating bath and then the substrate is plated with its surface, to be plated, in contact with the plating solution. Such a dry-type plating apparatus can minimize an area where the plating solution contacts the substrate holder. Therefore, it is possible to reduce the amount of the plating solution attached to the substrate holder.
- However, the dry-type plating apparatus entails an installation space for a mechanism of pressing the substrate holder against the sidewall of the plating bath. Therefore, a footprint of the dry-type plating apparatus becomes larger than that of the dip-type plating apparatus.
- Thus, there is proposed a plating apparatus employing a combination of a dry-type plating bath used in the dry-type plating apparatus and a dip-type plating bath used in the dip-type plating apparatus. The dip-type plating bath can relatively reduce the footprint thereof, while the dry-type plating bath can reduce the amount of the plating solution attached to the substrate holder. Therefore, the plating apparatus having such a configuration can reduce the amount of the plating solution attached to the substrate holder, without enlarging the footprint thereof.
- However, since the dry-type plating bath and the dip-type plating bath have configurations significantly different from each other, the plating apparatus needs to be provided with two types of substrate holders for use in the dry-type plating bath and in the dip-type plating bath. When the multistage plating is performed on the substrate, the substrate is set in one of the two types of substrate holders and plated, and is then set in the other substrate holder and plated. Therefore, every time the substrate is transported between the dry-type plating bath and the dip-type plating bath, it is necessary to remove the substrate from one of the two types of substrate holders and set the substrate in the other substrate holder. These operations make it difficult to plate the substrate continuously.
- As described above, the dry-type plating apparatus can reduce the amount of the plating solution attached to the substrate holder, but on the other hand, the plating solution may be attached to the sidewall of the plating bath that contacts the substrate holder. As a result, the metal may be deposited on the sidewall. Particularly, in the case of gold plating, the gold is liable to be deposited on the sidewall. If the metal is deposited on the sidewall, the opening of the sidewall is not closed in the subsequent plating process, and as a result the plating solution may possibly flow out to the exterior of the plating bath. Although it has been proposed to remove the metal by ejecting a cleaning liquid to the sidewall of the plating bath, it is difficult to remove the metal by the jet flow of the cleaning liquid.
- According to an embodiment, there is provided a plating apparatus which can reduce a plating solution attached to a substrate holder without enlarging a footprint of the plating apparatus, and can plate the substrate continuously in multiple stages.
- According to an embodiment, there is provided a cleaning device which can remove a metal deposited on a sidewall of a dry-type plating bath.
- Embodiments, which will be described below, relate to a plating apparatus for plating a surface of a substrate, such as a wafer, and further relates to a cleaning device for cleaning a plating bath of the plating apparatus.
- In an embodiment, there is provide a plating apparatus for plating a substrate, comprising: a substrate holder configured to hold the substrate; a dip-type plating bath configured to hold a first plating solution in which the substrate holder holding the substrate is immersed; a dry-type plating bath having a hole in a sidewall thereof and configured to hold a second plating solution; a transporter configured to transport the substrate holder to the dip-type plating bath and to a predetermined position beside the sidewall of the dry-type plating bath; and a pressing mechanism configured to press the substrate holder, holding the substrate, against the sidewall of the dry-type plating bath to thereby close the hole with the substrate holder holding the substrate, wherein the substrate holder includes a base member and a holding member configured to sandwich the substrate therebetween, a first seal portion configured to seal a gap between the substrate and the holding member, a second seal portion configured to seal a gap between the base member and the holding member, and a third seal portion configured to seal a gap between the holding member and the sidewall of the dry-type plating bath.
- In an embodiment, the plating apparatus further comprises an electrical contact electrically connected to a plating power source, wherein the substrate holder includes a feeding terminal to be electrically connected to the substrate, and wherein the pressing mechanism is configured to press the substrate holder, holding the substrate, against the sidewall of the dry-type plating bath to close the hole with the substrate holder holding the substrate while pressing the feeding terminal against the electrical contact.
- In an embodiment, the substrate holder includes a projecting surface projecting in a normal direction of the substrate, and a stepped portion provided outside of the projecting surface, and the third seal portion is provided on the stepped portion so that the third seal portion is pressed against the sidewall by the pressing mechanism.
- In an embodiment, the projecting surface of the substrate holder lies in the same plane as an inner surface of the sidewall when the substrate holder is pressed against the sidewall.
- In an embodiment, the first seal portion, the second seal portion, and the third seal portion are formed from a single seal member.
- In an embodiment, the dry-type plating bath has an electrolyte chamber configured to hold an electrolyte, and a partition configured to isolate the second plating solution from the electrolyte, and an anode is disposed in the electrolyte chamber.
- In an embodiment, the plating apparatus further comprises a cleaning device configured to clean the sidewall of the dry-type plating bath, wherein the cleaning device has substantially the same shape and size as those of the substrate holder, and wherein the transporter is configured to transport the cleaning device to the predetermined position beside the sidewall of the dry-type plating bath.
- In an embodiment, the cleaning device includes a cleaning element configured to contact the sidewall of the dry-type plating bath, and a rotating mechanism configured to rotate the cleaning element on the sidewall.
- In an embodiment, the plating apparatus further comprises a cleaning nozzle configured to supply a cleaning liquid to the cleaning element.
- In an embodiment, the second plating solution comprises a gold plating solution.
- In an embodiment, there is provide a cleaning device for use in a plating apparatus that includes (i) a substrate holder configured to hold a substrate, (ii) a dry-type plating bath having a hole in a sidewall thereof and configured to hold a plating solution, and (iii) a pressing mechanism configured to press the substrate holder, holding the substrate, against the sidewall of the dry-type plating bath to thereby close the hole with the substrate holder holding the substrate, the cleaning device comprising: a cleaning element configured to contact the sidewall of the dry-type plating bath; and a rotating mechanism configured to rotate the cleaning element on the sidewall of the dry-type plating bath, wherein the cleaning device has substantially the same shape and size as those of the substrate holder.
- In an embodiment, the cleaning device further comprises a cleaning nozzle configured to supply a cleaning liquid to the cleaning element.
- According to the embodiments described above, the plating apparatus includes the dip-type plating bath that can relatively reduce a footprint thereof, and the dry-type plating bath that can reduce an amount of the plating solution attached to the substrate holder. Further, the plating apparatus includes the substrate holder that can be used in both the dip-type plating bath and the dry-type plating bath. These configurations can reduce the plating solution attached to the substrate holder without enlarging the footprint of the plating apparatus, and can enable the plating apparatus to perform multistage plating on the substrate continuously.
- Further, according to the embodiments described above, the cleaning element is rubbed against the sidewall of the plating bath to thereby remove the metal deposited on the sidewall of the plating bath.
-
FIG. 1 is a schematic plan view showing a plating apparatus according to an embodiment; -
FIG. 2 is a perspective view showing a substrate holder; -
FIG. 3 is a plan view showing the substrate holder shown inFIG. 2 ; -
FIG. 4 is a right side view of the substrate holder shown inFIG. 2 ; -
FIG. 5 is an enlarged view showing a part of the substrate holder shown inFIG. 4 ; -
FIG. 6 is a schematic view showing a dip-type plating bath; -
FIG. 7 is a schematic view showing a dry-type plating bath; -
FIG. 8 is a view showing a part of the substrate holder pressed against a sidewall of the dry-type plating bath; -
FIG. 9 is a view showing a drainage hole provided in a bottom of the substrate holder; -
FIG. 10A is a view showing the substrate holder when hanging from a hanging base of the dry-type plating apparatus; -
FIG. 10B is a view showing the substrate holder with its feeding terminal pressed against an electrical contact; -
FIG. 11A is a view showing the substrate holder before hanging from a hanging base of the dip-type plating bath; -
FIG. 11B is a view showing the substrate holder when hanging from the hanging base of the dip-type plating bath; -
FIG. 12A is a view showing the substrate holder before hanging from the hanging base having an electrical contact on an upper surface thereof; -
FIG. 12B is a view showing the substrate holder when hanging from the hanging base shown inFIG. 12A ; -
FIG. 13 is a plan view showing a cleaning device; -
FIG. 14 is a cross-sectional view of the cleaning device; -
FIG. 15 is a schematic view showing the cleaning device pressed against the sidewall of the dry-type plating bath; -
FIG. 16 is a view comparing the length of the plating apparatus according to the embodiment to the length of a typical dry-type plating apparatus; -
FIG. 17 is a view showing a modified example of the dry-type plating bath; -
FIG. 18 is a view showing a drainage hole provided in a bottom of the substrate holder; and -
FIG. 19 is an enlarged view showing a part enclosed by a symbol A shown in FIG. 17. - Embodiments will be described in detail with reference to the drawings. In
FIGS. 1 to 19 , identical or corresponding elements are denoted by the same reference numerals and duplicate descriptions thereof are omitted.FIG. 1 is a schematic plan view showing a plating apparatus according to an embodiment. As shown inFIG. 1 , the plating apparatus includes an apparatus frame 1, twoload ports 2 each receiving thereon a cassette in which substrates W, such as wafers, are stored, and acontroller 3 configured to control operations of the plating apparatus. The plating apparatus further includes analigner 4 for aligning a position of an orientation flat or a notch with a predetermined direction, a spin-rinse dryer (SRD) 6 for rotating a plated substrate W at a high speed to dry the substrate, a substrate holder opening-closingmechanism 24 for loading the substrate W onto a substrate holder 8 (seeFIGS. 2 through 5 ) and unloading the substrate W from thesubstrate holder 8 by opening and closing thesubstrate holder 8, and asubstrate transfer robot 22 for transporting the substrate W. Thealigner 4, the spin-rinsedryer 6, the substrate holder opening-closingmechanism 24, and thesubstrate transfer robot 22 are arranged in the apparatus frame 1. - In the apparatus frame 1, there are disposed a
storage container 30 for storingsubstrate holders 8 therein, apre-cleaning bath 32 for pre-cleaning the substrate W, held by thesubstrate holder 8, with a cleaning liquid, such as pure water, and apretreatment bath 33 for pretreating the substrate W with a pretreatment liquid. Adjacent to thepretreatment bath 33, there are disposed afirst rinsing bath 40 for rinsing the pretreated substrate W with a rinsing liquid, and a plurality of dip-type plating baths 34 each for plating the substrate W. Each of the dip-type plating baths 34 is configured to hold therein a first plating solution in which thesubstrate holder 8 holding the substrate W is immersed. The first plating solution may be a plating solution, such as a copper plating solution, a nickel plating solution, or the like, which is relatively inexpensive and/or has a property that metal is relatively less likely to be deposited on thesubstrate holder 8 even if the plating solution is attached to thesubstrate holder 8. - Adjacent to the dip-
type plating baths 34, there are disposed asecond rinsing bath 41 for rinsing the plated substrate W with a rinsing liquid, and a plurality of dry-type plating baths 35 each for plating the substrate W. Each of the dry-type plating baths 35 is configured to hold a second plating solution therein. The second plating solution may be a plating solution, such as a gold plating solution, or the like, which is relatively expensive and/or has a property that metal is relatively likely to be deposited on thesubstrate holder 8 when the plating solution is attached to thesubstrate holder 8. Adjacent to the dry-type plating baths 35, there are disposed athird rinsing bath 42 for rinsing the plated substrate W with a rinsing liquid, and ablow cell 38 for removing the rinsing liquid from the substrate W and thesubstrate holder 8. Thestorage container 30 is configured to hold a plurality ofsubstrate holders 8 in the vertical position and in parallel. Theblow cell 38 is configured to remove droplets remaining on the surface of the substrate, held by thesubstrate holder 8, by ejecting N2 gas or clean air to thereby dry the substrate. - The
storage container 30, thepre-cleaning bath 32, thepretreatment bath 33, thefirst rinsing bath 40, the dip-type plating baths 34, thesecond rinsing bath 41, the dry-type plating baths 35, thethird rinsing bath 42, and theblow cell 38 are arranged in series in accordance with the sequence of processes. Thesebaths processing baths 50. - On the apparatus frame 1, there is provided a
transporter 101 for transporting thesubstrate holder 8 together with the substrate W between thestorage container 30, theprocessing baths 50, and the substrate holder opening-closingmechanism 24. Thetransporter 101 includes a fixedbase 102 fixedly mounted to the apparatus frame 1 and extending in a horizontal direction, alifter 103 configured to be movable on the fixingbase 102 in the horizontal direction, and anarm 104 coupled to thelifter 103. Thearm 104 has agripper 111 for gripping thesubstrate holder 8. Thearm 104 and thelifter 103 move together in the horizontal direction, and thearm 104 is lifted and lowered by thelifter 103. A drive source for moving thelifter 103 and thearm 104 in the horizontal direction can employ a linear motor, a rack-and-pinion, or a combination of a ball screw and a servomotor. - As shown in
FIGS. 2 through 5 , thesubstrate holder 8 includes abase member 54 having a rectangular plate shape, and a holdingmember 58 rotatably coupled to thebase member 54 through ahinge 56 which allows the holdingmember 58 to open and close with respect to thebase member 54. Thesubstrate holder 8 holds the substrate W by sandwiching the substrate W between thebase member 54 and the holdingmember 58. In another configuration, the holdingmember 58 may be disposed at a position opposite to thebase member 54 so as to be opened and closed by moving the holdingmember 58 toward thebase member 54 and away from thebase member 54. - The
base member 54 may be made of vinyl chloride. The holdingmember 58 includes abase portion 60 and anannular holder ring 62. As shown inFIG. 5 , the surface of theholder ring 62 is covered with aseal ring 63 that is made of an elastic material, such as rubber. Theseal ring 63 has an annularfirst seal portion 66. Thisfirst seal portion 66 is configured to be brought into pressure contact with a peripheral portion of the substrate W to thereby seal a gap between the holdingmember 58 and the substrate W. Further, theseal ring 63 has an annularsecond seal portion 68 on its surface facing thebase member 54. Thesecond seal portion 68 is configured to be brought into pressure contact with thebase member 54 to thereby seal a gap between thebase member 54 and the holdingmember 58. - The
holder ring 62 has an annular steppedportion 70, and a retainingring 64 is disposed below the steppedportion 70. The retainingring 64 is rotatably mounted to aspacer 65. The retainingring 64 is made of a material having high rigidity and excellent acid and alkali corrosion resistance. For example, the retainingring 64 is made of titanium. Thespacer 65 is made of a material, for example PTFE, having a low friction coefficient so that the retainingring 64 can rotate smoothly. - At the outer side of the retaining
ring 64, a plurality ofclampers 74 are disposed at equal intervals along a circumferential direction of the retainingring 64. Theclampers 74 are secured to thebase member 54. Each of theclampers 74 has an inverted L-shape having a projectingportion 74 a projecting inwardly. The retainingring 64 has a plurality of projectingportions 64 a projecting outwardly. A lower surface of the projectingportion 74 a of theclamper 74 is configured to be in contact with an upper surface of the projectingportion 64 a of the retainingring 64. - The lower surface of the projecting
portion 74 a of theclamper 74 and the upper surface of the projectingportion 64 a of the retainingring 64 have tapered surfaces respectively inclined in opposite directions along the rotational direction of the retainingring 64. A plurality of (e.g., three) raisedportions 64 b protruding upwardly are provided on the retainingring 64 at predetermined positions along the circumferential direction of the retaining ring 64 (seeFIG. 3 ). The retainingring 64 can be rotated by pushing and rotating each raisedportion 64 b in a lateral direction by means of a rotating pin (not shown). - With the holding
member 58 open, the substrate W is inserted into the central portion of thebase member 54, and the holdingmember 58 is then closed through thehinge 56. Subsequently, the retainingring 64 is rotated clockwise so that each projectingportion 64 a of the retainingring 64 slides into the inwardly projectingportion 74 a of eachclamper 74. As a result, thebase member 54 and the holdingmember 58 are fastened to each other to lock the holdingmember 58 by engagement between the tapered surfaces of the retainingring 64 and the tapered surfaces of theclampers 74. The holdingmember 58 can be unlocked by rotating the retainingring 64 counterclockwise to disengage the projectingportions 64 a of the retainingring 64 from theclampers 74. - When the holding
member 58 is locked, thefirst seal portion 66 is pressed against the peripheral portion of the substrate W. Thefirst seal portion 66 is uniformly pressed against the substrate W to thereby seal the gap between the peripheral portion of the substrate W and the holdingmember 58. Similarly, when the holdingmember 58 is locked, thesecond seal portion 68 is pressed against the surface of thebase member 54. Thesecond seal portion 68 is uniformly pressed against thebase member 54 to thereby seal the gap between thebase member 54 and the holdingmember 58. - As shown in
FIG. 3 , a pair ofholder hangers 108 is provided on an end portion of thebase member 54 so as to project outwardly. Eachholder hander 108 is constituted by aninner hanger portion 90 and anouter hanger portion 94. Ahand lever 92 extends between theinner hanger portions 90 on both sides. In theprocessing bath 50, thesubstrate holder 8 is suspended from a surrounding wall of the bath through either theinner hanger portions 90 or theouter hanger portions 94 of theholder hanger 108. - A ring-shaped
protrusion 82 having a size corresponding to a size of the substrate W is formed on the upper surface of thebase member 54. Theprotrusion 82 has anannular support surface 80 that contacts the peripheral portion of the substrate W to support the substrate W. Theprotrusion 82 hasrecesses 84 arranged at predetermined positions along a circumferential direction of theprotrusion 82. - As shown in
FIG. 3 , a plurality of (12 as illustrated)electrical conductors 86 are disposed in therecesses 84, respectively. Theseelectrical conductors 86 are connected respectively to wires extending from a feedingterminal 91 provided on theholder hanger 108. As shown inFIG. 5 , when the substrate W is loaded onto thesubstrate holder 8, end portions of theelectrical conductors 86 are brought into resilient contact withelectrical contacts 88 that are fixed to the holdingmember 58. - The
electrical contact 88, which is electrically connected to theelectrical conductor 86, has a plate spring shape. Theelectrical contact 88 has a contact portion located outside thefirst seal portion 66 and projecting inwardly in a plate spring shape. Theelectrical contact 88 has spring characteristics that can generate a resilient force and is configured to easily bend at the contact portion. When the substrate W is held between thebase member 54 and the holdingmember 58, the contact portions of theelectrical contacts 88 come into resilient contact with the peripheral portion of the substrate W that is supported on thesupport surface 80 of thebase member 54. - When the
first seal portion 66 is pressed against the substrate W and thesecond seal portion 68 is pressed against thebase member 54, a hermetically closed space is formed along the peripheral portion of the substrate W. Theelectrical contacts 88 and theelectrical conductors 86 are located in this hermetically closed space. Even if thesubstrate holder 8 is immersed in the plating solution, the plating solution does not enter the hermetically closed space of thesubstrate holder 8. Therefore, thesubstrate holder 8 can be used in the dip-type plating bath 34. - The holding
member 58 is opened and closed by a not-shown pneumatic cylinder and by a weight of the holdingmember 58 itself. Specifically, thebase member 54 has a through-hole 54 a, and a pneumatic cylinder (not shown) is provided in the opposite position of the through-hole 54 a. The holdingmember 58 is opened by pushing up theholder ring 62 of the holdingmember 58 with a piston rod of the pneumatic cylinder through the through-hole 54 a. The holdingmember 58 is closed by its own weight when the piston rod is retracted. -
FIG. 6 is a schematic view showing the dip-type plating bath 34. As shown inFIG. 6 , the dip-type plating bath 34 (hereinafter simply referred to as plating bath 34) is configured to be able to hold the first plating solution therein. Ananode 71, held by ananode holder 72, is immersed in the first plating solution. Thesubstrate holder 8, together with the substrate W, is immersed in the first plating solution held in theplating bath 34. Specifically, theholder hangers 108 of thesubstrate holder 8 are placed on a hangingbase 129 on apedestal 133 disposed on the platingbath 34, so that thesubstrate holder 8 is suspended in theplating bath 34. Theanode 71 and the substrate W are disposed so as to face each other in the first plating solution. As described above, a copper plating solution, a nickel plating solution, or a solder plating solution may be used as the first plating solution held in theplating bath 34. - An
overflow bath 99 is disposed around the platingbath 34, so that the first plating solution that has overflowed an upper edge of the platingbath 34 flows into theoverflow bath 99. The first plating solution that has flowed into theoverflow bath 99 is returned into the platingbath 34 through a circulation line (shown by arrow inFIG. 6 ). - In the vicinity of the surface of the substrate W held by the
substrate holder 8 in theplating bath 34, there is disposed apaddle 100 as an agitating tool for agitating the first plating solution. Thepaddle 100 is vertically disposed and is configured to reciprocate in parallel to the substrate W to agitate the first plating solution, thereby uniformly supplying a sufficient amount of metal ions to the surface of the substrate W. - The
anode 71 is electrically connected to a positive pole of aplating power source 75 via theanode holder 72, and the substrate W is electrically connected to a negative pole of theplating power source 75 via thesubstrate holder 8. By applying a voltage between theanode 71 and the substrate W, the substrate W is plated until a metal film is formed on the surface of the substrate W. While the substrate W is plated, the first plating solution circulates between the platingbath 34 and theoverflow bath 99. -
FIG. 7 is a schematic view showing the dry-type plating bath 35. As shown inFIG. 7 , aholder cell 37 is disposed beside the dry-type plating bath 35 (hereinafter simply referred to as plating bath 35). Thesubstrate holder 8 is transported by thetransporter 101 into theholder cell 37. More specifically, thesubstrate holder 8 is transported to a predetermined position beside asidewall 36 of the platingbath 35. - The plating
bath 35 is configured to hold an electrolyte and the second plating solution therein. Ananode 96 held by ananode holder 97 is immersed in the electrolyte. A plating solution may be used as the electrolyte. Theanode 96 is kept immersed in the electrolyte in theplating bath 35 at all times. With such a configuration, a surface of theanode 96 is prevented from being deteriorated. Particularly, in a case where theanode 96 is made of copper, a black film formed on the surface of theanode 96 is prevented from being dried and falling, or being oxidized. - An
overflow bath 127 is disposed adjacent to theplating bath 35. The electrolyte that has overflowed an upper edge of the platingbath 35 flows into theoverflow bath 127. The electrolyte that has flowed into theoverflow bath 127 is returned to theplating bath 35 by a pump through a circulation line. - The
anode holder 97, holding theanode 96, is disposed at a predetermined position in theplating bath 35, and thesubstrate holder 8, holding the substrate W, is disposed at a predetermined position in theholder cell 37. Thesidewall 36 of the platingbath 35 has ahole 36 a whose inner opening end is closed with apartition 107. Thepartition 107 has a structure that allows an electrical current to pass therethrough while not allowing a liquid to pass therethrough. Thepartition 107 is constituted by a porous material (e.g., ceramic, such as SiC (silicon carbide) or alumina), an ion exchange membrane, or the like. For example, in a case where a soluble anode is used as theanode 96, the ion exchange membrane is used as thepartition 107. Thepartition 107 is disposed at a position facing the substrate W, and is located between theanode 96 and the substrate W. - In the
holder cell 37, there is disposed apressing mechanism 115 for moving thesubstrate holder 8 in a direction toward thesidewall 36 and in a direction away from thesidewall 36. Thepressing mechanism 115 includes asuction pad 116 having a hollow 116 a and anactuator 118 for moving thesuction pad 116. As theactuator 118, an annular tube, a pneumatic cylinder, a ball screw mechanism, or the like is used. Thepressing mechanism 115 is configured to press thesubstrate holder 8 holding the substrate W against an outer surface of thesidewall 36, thereby closing an outer opening end of thehole 36 a, formed in thesidewall 36, with thesubstrate holder 8 holding the substrate W. In this state, aplating solution chamber 109 in which the second plating solution is present is formed between the substrate W and thepartition 107. - In the
sidewall 36 of the platingbath 35, there are provideddelivery passages communication passages delivery passages plating solution chamber 109. The second plating solution is supplied into thedelivery passage 112 a and then supplied through thecommunication passage 110 a into theplating solution chamber 109. The second plating solution that has been introduced into theplating solution chamber 109 contacts a surface, to be plated, of the substrate W. The second plating solution that has contacted the substrate W is introduced through thecommunication passage 110 b into thedelivery passage 112 b and then discharged from thedelivery passage 112 b. - The discharged second plating solution is stored in a
reservoir tank 113 through adischarge line 114. Asupply line 119 for supplying the second plating solution to thedelivery passage 112 a is connected to a lower part of thereservoir tank 113, and a pump P for delivering the second plating solution is mounted to thesupply line 119. When the pump P is driven, the second plating solution in thereservoir tank 113 is returned to thedelivery passage 112 a through thesupply line 119. Arecovery line 124 for recovering the second plating solution in thesupply line 119 is connected to thesupply line 119. More specifically, one end of therecovery line 124 is connected to thesupply line 119, and the other end of therecovery line 124 is connected to thereservoir tank 113. An on-offvalve 126 is attached to therecovery line 124. When the on-offvalve 126 is opened, the second plating solution is delivered through therecovery line 124 into thereservoir tank 113. Adrain valve 128 is attached to a lower part of thesupply line 119. When thedrain valve 128 is opened, the second plating solution is discharged to the exterior. - The second plating solution circulates through the circulation line as indicated by white arrow in
FIG. 7 . The width of theplating solution chamber 109, i.e., the distance between the substrate W and thepartition 107, is short enough to cause the second plating solution on the surface of the substrate W to flow at a high velocity. Further, the direction in which the second plating solution flows may be switched to the opposite direction by a switching mechanism (not shown). Thedelivery passages communication passages - One surface of the
partition 107 is in contact with the electrolyte and the other surface of thepartition 107 is in contact with the second plating solution. As described above, thepartition 107 allows the electrical current to pass therethrough but does not allow a liquid to pass therethrough. Thus, thepartition 107 serves to isolate the second plating solution in theplating solution chamber 109 from the electrolyte in anelectrolyte chamber 106. -
FIG. 8 is a view showing a part of thesubstrate holder 8 pressed against thesidewall 36 of the dry-type plating bath 35. As shown inFIG. 8 , thesubstrate holder 8 has an annularthird seal portion 69 that is shaped so as to surround the outer opening end of thehole 36 a formed in thesidewall 36. When thesubstrate holder 8 is pressed against thesidewall 36, thethird seal portion 69 is pressed against the outer surface of thesidewall 36 to seal a gap between thesidewall 36 and the holdingmember 58, thereby preventing the leakage of the second plating solution from theplating solution chamber 109. Thefirst seal portion 66, thesecond seal portion 68, and thethird seal portion 69 are formed from a single seal member (i.e., the seal ring 63). - Since the second plating solution is blocked by the
third seal portion 69, the second plating solution hardly contacts thesubstrate holder 8. Therefore, an amount of the second plating solution attached to thesubstrate holder 8 can be minimized. Consequently, an amount of metal deposited on thesubstrate holder 8 can be reduced, and an amount of the second plating solution for replenishing the platingbath 35 can be reduced. - As described above, since the
substrate holder 8 has thefirst seal portion 66, thesecond seal portion 68, and thethird seal portion 69, thesubstrate holder 8 can be used both in the dip-type plating bath 34 and the dry-type plating bath 35. Therefore, it is not necessary to switch a substrate holder from one for use in the dip-type plating bath 34 to the other for use in the dry-type plating bath 35. As a result, the plating apparatus can perform multistage plating on the substrate W continuously. - As shown in
FIG. 7 , atray 125 is disposed in a bottom of theholder cell 37, and the second plating solution that has leaked from thethird seal portion 69 is discharged through adrain 125 a formed in thetray 125 to the exterior of theholder cell 37. In a case where thesubstrate holder 8 is not shared by the dip-type plating bath 34, i.e., in a case where thesubstrate holder 8 is used only in the dry-type plating bath 35, adrainage hole 117 communicating with the hermetically closed space may be provided in a bottom of thesubstrate holder 8, as shown inFIG. 9 . With this configuration, even if the second plating solution enters the hermetically closed space of thesubstrate holder 8, the second plating solution is discharged through thedrainage hole 117 to the exterior of thesubstrate holder 8. - The
suction pad 116 is coupled to a vacuum source (not shown) that produces a vacuum in the hollow 116 a of thesuction pad 116. With thesubstrate holder 8 held on thesuction pad 116 via the vacuum suction, theactuator 118 moves thesuction pad 116 in a direction away from thesidewall 36, thereby separating thesubstrate holder 8 from thesidewall 36. - The
substrate holder 8 is transported into theholder cell 37 by thetransporter 101. Theholder hangers 108 are placed on a hangingbase 120 on apedestal 121 disposed on theholder cell 37, so that thesubstrate holder 8 is suspended in theholder cell 37. -
FIG. 10A is a view showing thesubstrate holder 8 when hanging from the hangingbase 120. As shown inFIG. 10A , the hangingbase 120 has anelectrical contact 122 that is electrically connected to aplating power source 98. Thesubstrate holder 8 is placed on the hangingbase 120 to hang from the hangingbase 120, and then thepressing mechanism 115 presses thesubstrate holder 8 against thesidewall 36. While thepressing mechanism 115 presses thesubstrate holder 8 against thesidewall 36 to close thehole 36 a with thesubstrate holder 8 holding the substrate W, thepressing mechanism 115, at the same time, presses the feedingterminal 91 of thesubstrate holder 8 against theelectrical contact 122. -
FIG. 10B is a view showing thesubstrate holder 8 with its feedingterminal 91 pressed against theelectrical contact 122. As shown inFIG. 10B , the feedingterminal 91 is brought into contact with theelectrical contact 122, thereby electrically connecting the substrate W to a negative pole of theplating power source 98 via thesubstrate holder 8. A slidingmember 123 for enabling thesubstrate holder 8 to move smoothly is provided on the hangingbase 120. This slidingmember 123 is made of a material having a low coefficient of friction. The feedingterminal 91 is preferably a resilient member that is brought into resilient contact with theelectrical contact 122. -
FIG. 11A is a view showing thesubstrate holder 8 before hanging from the hangingbase 120 of the dip-type plating bath 34.FIG. 11B is a view showing thesubstrate holder 8 when hanging from the hangingbase 120. As shown inFIGS. 11A and 11B , in the case where thesubstrate holder 8 is used in the dip-type plating bath 34, thesubstrate holder 8 is moved in the direction shown by arrow until theholder hanger 108 is inserted into the hangingbase 120. As a result of this movement, the feedingterminal 91 is brought into contact with theelectrical contact 122. In this case, since it is not necessary to slide thesubstrate holder 8 in a lateral direction, the slidingmember 123 needs not to be provided on the hangingbase 120. -
FIGS. 12A and 12B show another embodiment of hangingbase 120 used in the dip-type plating bath 34. More specifically,FIG. 12A is a view showing thesubstrate holder 8 before hanging from the hangingbase 120 having anelectrical contact 132 provided on an upper surface of the hangingbase 120.FIG. 12B is a view showing thesubstrate holder 8 when hanging from the hangingbase 120 shown inFIG. 12A . As shown inFIGS. 12A and 12B , in addition to the feedingterminal 91 provided on a side surface of theholder hanger 108, a feedingterminal 131 may be provided on a bottom surface of theholder hanger 108 and theelectric contact 132 may be provided on the upper surface of the hangingbase 120. More specifically, theholder hanger 108 of thesubstrate holder 8 may be provided with both of the feedingterminal 131 for the dip-type plating bath 34 and the feedingterminal 91 for the dry-type plating bath 35. As shown inFIG. 12B , when thesubstrate holder 8 is used in the dip-type plating bath 34, the feedingterminal 131 is brought into contact with theelectrical contact 132. Since theholder hanger 108 of thesubstrate holder 8 is provided with the feeding terminals respectively for the dip-type plating bath 34 and the dry-type plating bath 35, these feeding terminals are allowed to have shapes and materials suitable for current densities used in the respective plating baths. - The substrate W is plated as follows. The
substrate holder 8 holding the substrate W is transported into theholder cell 37. Thepressing mechanism 115 presses the substrate holder, holding the substrate W, against thesidewall 36 of the platingbath 35 to close the outer opening end of thehole 36 a with thesubstrate holder 8 holding the substrate W and, at the same time, presses the feedingterminal 91 of thesubstrate holder 8 against theelectrical contact 122. The gap between the holdingmember 58 and thesidewall 36 of the platingbath 35 is sealed with thethird seal portion 69. The second plating solution is supplied to theplating solution chamber 109 through thedelivery passage 112 a and thecommunication passage 110 a to contact the surface, to be plated, of the substrate W. In this state, a voltage is applied between the substrate W and theanode 96 by theplating power source 98, whereby the substrate W is plated. - After the plating of the substrate W is completed, the supply of the second plating solution to the
plating solution chamber 109 is stopped. Then, the on-offvalve 126 is opened to recover the second plating solution from theplating solution chamber 109 through therecovery line 124. Thereafter, thepressing mechanism 115 is operated so as to separate thesubstrate holder 8 from thesidewall 36 of the platingbath 35. Thesubstrate holder 8 is then removed from theholder cell 37 by thetransporter 101. - When the substrate W is plated with use of the plating
bath 35 discussed above, the plating solution may be attached to thesidewall 36 that contacts thesubstrate holder 8. As a result, a metal may be deposited on thesidewall 36, possibly causing the leakage of the second plating solution from a gap between thesidewall 36 and thethird seal portion 69 of thesubstrate holder 8. In order to prevent such metal deposition, it is necessary to clean thesidewall 36. A possible way of cleaning thesidewall 36 includes the step of ejecting a cleaning liquid directly toward thesidewall 36. However, it is difficult for the jet of the cleaning liquid to remove the deposited metal. Thus, the plating apparatus according to the embodiment includes acleaning device 140 that can remove the deposited metal. -
FIG. 13 is a plan view showing thecleaning device 140, andFIG. 14 is a cross-sectional view of thecleaning device 140. As shown inFIGS. 13 and 14 , thecleaning device 140 includes anannular cleaning element 142 that is to be brought into contact with thesidewall 36, a circularmovable member 145 that holds thecleaning element 142, abearing 144 that rotatably supports themovable member 145, and arotating mechanism 143 for rotating themovable member 145 and thecleaning element 142. As thecleaning element 142, a non-woven fabric, a PVA sponge, or the like may be used. Therotating mechanism 143 and thebearing 144 are fixed to aframe 141. A pair ofhangers 146 is provided on an end portion of theframe 141 so as to project outwardly. Thebearing 144 is made of a corrosion-resistant material, such as resin or ceramic. Thecleaning device 140 may further include acleaning nozzle 155 for ejecting a cleaning liquid toward thecleaning element 142. The cleaningnozzle 155 is disposed above thecleaning element 142 and ejects the cleaning liquid toward thecleaning element 142 or a contact area of thecleaning element 142 and thesidewall 36, thereby wetting thecleaning element 142. - The
rotating mechanism 143 includes apneumatic cylinder 150 and alinkage mechanism 151 for transmitting the movement of thepneumatic cylinder 150 to themovable member 145. Thelinkage mechanism 151 includes afirst link 151 a coupled to apiston rod 150 a of thepneumatic cylinder 150, and asecond link 151 b fixed to themovable member 145. Instead of a combination of thepneumatic cylinder 150 and thelinkage mechanism 151, a rack-and-pinion may be used as therotating mechanism 143. As shown inFIG. 14 , one end of thesecond link 151 b is coupled to thefirst link 151 a, and the other end of thesecond link 151 b is fixed to themovable member 145. - The
rotating mechanism 143 further includes twogas delivery conduits pneumatic cylinder 150. Thepneumatic cylinder 150 is connected to thegas delivery conduits - When a gas is supplied into the
pneumatic cylinder 150 through thegas delivery conduit 152A, thepiston rod 150 a extends to rotate thecleaning element 142 and themovable member 145 through a certain angle in a counterclockwise direction. When the gas is supplied into thepneumatic cylinder 150 through thegas delivery conduit 152B, thepiston rod 150 a retracts to rotate thecleaning element 142 and themovable member 145 through the certain angle in a clockwise direction. By repeating such operations of thepneumatic cylinder 150, thecleaning element 142 is rotated through the certain angle in the clockwise direction and the counterclockwise direction alternately. In other words, thecleaning element 142 oscillates in its circumferential direction. Therotating mechanism 143 may employ a combination of a motor and gears to completely rotate thecleaning element 142 in one direction. -
FIG. 15 is a schematic view showing thecleaning device 140 pressed against thesidewall 36 of the platingbath 35. As shown inFIG. 15 , the cleaningnozzle 155 may be provided on the dry-type plating bath 35 instead of thecleaning device 140. The cleaningnozzle 155 is provided above the platingbath 35, i.e., on thepedestal 121. The cleaningnozzle 155 is configured to supply the cleaning liquid widely toward the cleaning device 140 (cleaning element 142) located obliquely downwardly from the cleaningnozzle 155. A fan-shaped nozzle or the like may be used as the cleaningnozzle 155. When thecleaning device 140 is being transported into theholder cell 37, the cleaningnozzle 155 ejects the cleaning liquid to thecleaning element 142 to wet thecleaning element 142. The cleaningnozzle 155 may continuously eject the cleaning liquid to thecleaning element 142 during cleaning of thesidewall 36 as well. - As shown in
FIG. 14 , adrainage hole 156 is formed in a bottom of theframe 141. The cleaning liquid that has entered a gap between themovable member 145 and theframe 141 is discharged through thedrainage hole 156 to the exterior of thecleaning device 140. Further, the cleaning liquid is discharged through thedrain 125 a of theholder cell 37 to the exterior of theholder cell 37. - The
cleaning device 140 has substantially the same shape and size as those of thesubstrate holder 8. Therefore, thetransporter 101 can transport thecleaning device 140, as with thesubstrate holder 8, to a predetermined position beside thesidewall 36 of the dry-type plating bath 35. Specifically, thecleaning device 140 is transported to a predetermined position in theholder cell 37 by thetransporter 101. Thehangers 146 of thecleaning device 140 are placed on the hangingbase 120 so that thecleaning device 140 hangs from the hangingbase 120. Thecleaning device 140 is then pressed against thesidewall 36 by thepressing mechanism 115. Thecleaning device 140 is pressed by thepressing mechanism 115 under an appropriate contact surface pressure that does not cause thesidewall 36 to wear. A surface treatment may be applied to thesidewall 36 so as to impart wear resistance to thesidewall 36. - As shown in
FIG. 15 , thepressing mechanism 115 presses thecleaning device 140 against thesidewall 36 of the platingbath 35 to bring thecleaning element 142 into contact with thesidewall 36. The area where thecleaning element 142 is in contact is an area around the outer opening end of thehole 36 a formed in thesidewall 36. - The cleaning
nozzle 155 supplies the cleaning liquid to a contact area of thecleaning element 142 and thesidewall 36 to wet thecleaning element 142. In this state, thecleaning element 142 is rotated on thesidewall 36 by therotating mechanism 143 to remove the metal deposited on thesidewall 36. Thecleaning element 142 is removably held by themovable member 145 so that thecleaning element 142 can be exchanged with a new cleaning element. - If the
cleaning device 140 is pressed against thesidewall 36 with a force equal to a force with which thepressing mechanism 115 presses thesubstrate holder 8 against thesidewall 36, thecleaning element 142 may not rotate smoothly, thus possibly damaging the surface of thesidewall 36. In order to prevent this, as shown inFIGS. 13 and 14 , thecleaning device 140 may include pressing-force regulators 160 for regulating the pressing force with which thecleaning element 142 is pressed against thesidewall 36. As shown inFIG. 14 , each pressing-force regulator 160 includes aprotruding element 163 housed in ahousing aperture 161 formed in theframe 141 and a biasingmember 162 for biasing the protrudingelement 163. The biasingmember 162 comprises an expandable member, such as a spring, to bias the protrudingelement 163 in a direction as to press the protrudingelement 163 against thesidewall 36. - The pressing-
force regulators 160 are arranged on theframe 141 at a plurality of (four inFIG. 13 ) positions along the circumferential direction of thecleaning element 142. Thecleaning device 140 is pressed from a back side thereof by thepressing mechanism 115 so that thecleaning element 142 is pressed against the area surrounding the outer opening end of thehole 36 a of thesidewall 36. At this time, the protrudingelements 163 of the pressing-force regulators 160 are brought into contact with thesidewall 36 to be retracted, thus receiving a part of the pressing force of thepressing mechanism 115. As a result, thecleaning element 142 is in contact with thesidewall 36 at the appropriate contact surface pressure and can therefore rotate smoothly. - As another mechanism of regulating the force of pressing the
cleaning device 140 against thesidewall 36, the pressing force of theactuator 118 may be regulated. For example, in the case where theactuator 118 comprises a pneumatic cylinder, a working-air line may be switched to a different working-air line in which a working-air pressure is regulated by a precision pressure regulating valve, so that the pressing force of the pneumatic cylinder can be reduced. - As described above, since the
cleaning device 140 has substantially the same shape and size as those of thesubstrate holder 8, thetransporter 101 can transport thecleaning device 140, as with thesubstrate holder 8, to theholder cell 37 that is adjacent to the dry-type plating bath 35 and can set thecleaning device 140, as with thesubstrate holder 8, to the predetermined position in theholder cell 37. Therefore, thecleaning device 140 can clean thesidewall 36 without stopping the operation of the plating apparatus. Thecleaning device 140 is stored in thestorage container 30 in advance, and is removed from thestorage container 30 by thetransporter 101 as necessary. While the plating apparatus is being operated, thecleaning device 140 can continuously clean thesidewall 36 of the dry-type plating bath 35 when it is not in use. Thecleaning device 140 is cleaned in thethird rinsing bath 42. A dedicated rinsing bath for cleaning thecleaning device 140 may be separately provided. - Next, the operation of the plating apparatus in its entirety will be described. First, the
substrate holder 8 in a vertical position is taken out from thestorage container 30 by thearm 104 of thetransporter 101. Thearm 104, gripping thesubstrate holder 8, is moved in the horizontal direction to transfer thesubstrate holder 8 to the substrate holder opening-closingmechanism 24. The substrate holder opening-closingmechanism 24 changes thesubstrate holder 8 from the vertical position to the horizontal position, and opens thesubstrate holder 8. - The
substrate transfer robot 22 takes out a substrate W from the cassette mounted to theload port 2 and places the substrate W on thealigner 4. Thealigner 4 aligns the position of an orientation flat or a notch of the substrate W with a predetermined direction. Thesubstrate transfer robot 22 removes the substrate W from thealigner 4 and inserts the substrate W into thesubstrate holder 8. In this state, the substrate holder opening-closingmechanism 24 closes thesubstrate holder 8 to lock thesubstrate holder 8. - Next, the substrate holder opening-closing
mechanism 24 changes thesubstrate holder 8 from the horizontal position to the vertical position. Thegripper 111 of thearm 104 grips thesubstrate holder 8 that is in the vertical position and moves thesubstrate holder 8 in the horizontal direction to a position above thepre-cleaning bath 32. Thelifter 103 of thetransporter 101 then lowers thearm 104, together with thesubstrate holder 8, to set thesubstrate holder 8 at a predetermined position in thepre-cleaning bath 32. In this state, the substrate W is pre-cleaned. After the pre-cleaning of the substrate W is completed, thegripper 111 of thearm 104 grips thesubstrate holder 8, and thelifter 103 lifts thearm 104 to raise thesubstrate holder 8 from thepre-cleaning bath 32. - Then, the
arm 104 moves thesubstrate holder 8 in the horizontal direction to a position above thepretreatment bath 33. Thelifter 103 lowers thearm 104, together with thesubstrate holder 8, to set thesubstrate holder 8 at a predetermined position in thepretreatment bath 33. In this state, the substrate W is pretreated. After the pretreatment of the substrate W is completed, thegripper 111 of thearm 104 grips thesubstrate holder 8, and thelifter 103 lifts thearm 104 to raise thesubstrate holder 8 from thepretreatment bath 33. Thereafter, thearm 104 moves thesubstrate holder 8 in the horizontal direction to a position above thefirst rinsing bath 40. Thelifter 103 lowers thearm 104, together with thesubstrate holder 8, to set thesubstrate holder 8 at a predetermined position in thefirst rinsing bath 40. In this state, the substrate W is rinsed. After the rinsing of the substrate W is completed, thegripper 111 of thearm 104 grips thesubstrate holder 8, and thelifter 103 lifts thearm 104 to raise thesubstrate holder 8 from thefirst rinsing bath 40. - The
arm 104 moves thesubstrate holder 8 in the horizontal direction to a position above the dip-type plating bath 34. Further, thelifter 103 of thetransporter 101 lowers thearm 104, together with thesubstrate holder 8, to set thesubstrate holder 8 at a predetermined position in the dip-type plating bath 34. Thesubstrate holder 8, together with the substrate W, is immersed in the plating solution. Thereafter, the substrate W is plated. Since thesubstrate holder 8 has thefirst seal portion 66 and thesecond seal portion 68, the plating solution does not enter thesubstrate holder 8. After the plating of the substrate W is completed, thegripper 111 of thearm 104 grips thesubstrate holder 8, and thelifter 103 lifts thearm 104 to raise thesubstrate holder 8 from the dip-type plating bath 34. - The
arm 104 moves thesubstrate holder 8 in the horizontal direction to a position above thesecond rinsing bath 41. Further, thelifter 103 lowers thearm 104, together with thesubstrate holder 8, to set thesubstrate holder 8 at a predetermined position in thesecond rinsing bath 41. In this state, the plated substrate W is rinsed. After the rinsing of the substrate W is completed, thegripper 111 of thearm 104 grips thesubstrate holder 8, and thelifter 103 lifts thearm 104 to raise thesubstrate holder 8 from thesecond rinsing bath 41. - The
arm 104 moves thesubstrate holder 8 in the horizontal direction to a position above theholder cell 37 adjacent to theplating bath 35. Thelifter 103 lowers thearm 104, together with thesubstrate holder 8, to set thesubstrate holder 8 at a predetermined position in theholder cell 37. Thepressing mechanism 115 presses thesubstrate holder 8 against thesidewall 36, thereby placing thesubstrate holder 8 in tight contact with thesidewall 36. In this state, the second plating solution is supplied into theplating solution chamber 109. Then, the substrate W is plated by applying the voltage between theanode 96 and the substrate W. Since thesubstrate holder 8 has thethird seal portion 69, the second plating solution does not leak from the platingbath 35 during the plating of the substrate W. - After the plating of the substrate W is completed, the supply of the second plating solution into the
plating solution chamber 109 is stopped, and the second plating solution is discharged from theplating solution chamber 109. When the vacuum is created in the hollow 116 a of thesuction pad 116, thesuction pad 116 holds thesubstrate holder 8 by the vacuum suction and, in this state, thepressing mechanism 115 separates thesubstrate holder 8 from thesidewall 36. Thereafter, the vacuum in the hollow 116 a is broken, and thelifter 103 lifts thearm 104 to raise thesubstrate holder 8 from theholder cell 37. - The
arm 104 moves thesubstrate holder 8 in the horizontal direction to a position above thethird rinsing bath 42. Further, thelifter 103 of thetransporter 101 lowers thearm 104, together with thesubstrate holder 8, to set thesubstrate holder 8 at a predetermined position in thethird rinsing bath 42. In this state, rinsing of the plated substrate W is performed. After the rinsing of the substrate W is completed, thegripper 111 of thearm 104 grips thesubstrate holder 8, and thelifter 103 lifts thearm 104 to raise thesubstrate holder 8 from thethird rinsing bath 42. - The
arm 104 moves thesubstrate holder 8 in the horizontal direction to a position above theblow cell 38. Further, thelifter 103 lowers thearm 104, together with thesubstrate holder 8, to set thesubstrate holder 8 at a predetermined position in theblow cell 38. In theblow cell 38, a jet of N2 gas or clean air is supplied onto thesubstrate holder 8 so as to remove droplets attached to the surface of the substrate W held by thesubstrate holder 8, thereby drying the substrate W. After the blow process is completed, thegripper 111 of thearm 104 grips thesubstrate holder 8, and thelifter 103 lifts thearm 104 to raise thesubstrate holder 8 from theblow cell 38. - The
arm 104 moves in the horizontal direction to transfer thesubstrate holder 8 to the substrate holder opening-closingmechanism 24. The substrate holder opening-closingmechanism 24 opens thesubstrate holder 8 in the previously-described manner. Thesubstrate transfer robot 22 removes the processed substrate W from thesubstrate holder 8 and then transfers the substrate W to the spin-rinsedryer 6. The spin-rinsedryer 6 rotates the substrate W at a high speed to dry the substrate W. Thesubstrate transfer robot 22 removes the dried substrate W from the spin-rinsedryer 6 and returns the substrate W to the cassette on theload port 2. In this manner, the process of the substrate W is completed. -
FIG. 16 is a view comparing the length of the plating apparatus according to the embodiment to the length of a typical dry-type plating apparatus. The plating apparatus according to the embodiment is shorter by length L than that of the typical dry-type plating apparatus. The typical dry-type plating apparatus includes seven dry-type plating baths 35. In contrast, the plating apparatus according to the embodiment includes five dip-type plating baths 34 and two dry-type plating baths 35. Since the plating apparatus according to the embodiment includes the dry-type plating baths 35 and the dip-type plating baths 34, the plating solution remaining on thesubstrate holder 8 can be reduced without enlarging the footprint of the plating apparatus. -
FIG. 17 is a view showing a modified embodiment of dry-type plating bath 35.Partition 107 is held by apartition holder 139 disposed in theplating bath 35. The interior of the platingbath 35 is partitioned intoelectrolyte chamber 106 andplating solution chamber 109 by thepartition 107. In theplating solution chamber 109, there is disposed apaddle 130 for agitating the second plating solution. Thepaddle 130 is vertically disposed and is configured to reciprocate in parallel with the substrate W so as to agitate the second plating solution. -
Sidewall 36 of the platingbath 35 hashole 36 a for allowing the surface, to be plated, of the substrate W to contact the second plating solution in theplating solution chamber 109. Thesubstrate holder 8, holding the substrate W, is pressed against thesidewall 36 of the platingbath 35 by thepressing mechanism 115 to close thehole 36 a with thesubstrate holder 8 holding the substrate W. In this state, the second plating solution is supplied into theplating solution chamber 109 to contact the surface, to be plated, of the substrate W. Then, a voltage is applied between the substrate W andanode 96 to thereby plate the substrate W. While the substrate W is being plated, the second plating solution circulates between an overflow bath (not shown) and theplating solution chamber 109. Specifically, the second plating solution overflows theplating solution chamber 109 into the overflow bath (not shown) and is returned into theplating solution chamber 109. - In the case where the
substrate holder 8 is not shared by the dip-type plating bath 34, i.e., in the case where thesubstrate holder 8 is used only in theplating bath 35, as shown inFIG. 18 , thedrainage hole 117 communicating with the above-described hermetically closed space may be provided in the bottom of thesubstrate holder 8. With this configuration, even if the second plating solution enters the hermetically closed space of thesubstrate holder 8, the second plating solution is discharged through thedrainage hole 117 to the exterior of thesubstrate holder 8. -
FIG. 19 is an enlarged view showing a part enclosed by a symbol A shown inFIG. 17 . Thesubstrate holder 8 has a projecting surface (i.e., asurface 63 a of the seal ring 63) projecting in the normal direction of the substrate W, and steppedportion 70 at the outside of the projectingsurface 63 a. When thepressing mechanism 115 presses thesubstrate holder 8 against thesidewall 36, a portion ofholder ring 62 lying at an inner side of the annular steppedportion 70 is inserted into thehole 36 a. In this state, the annular steppedportion 70 extends so as to surround the outer opening end of thehole 36 a. Thesubstrate holder 8 hasthird seal portion 69 on the steppedportion 70. When thesubstrate holder 8 is pressed against thesidewall 36 by thepressing mechanism 115, thethird seal portion 69 on the steppedportion 70 is brought into contact with thesidewall 36. Thethird seal portion 69 is pressed against theouter surface 36 b of thesidewall 36 to seal a gap between thesidewall 36 and the holdingmember 58 of thesubstrate holder 8. - In the embodiment shown in
FIGS. 5 and 8 , thethird seal portion 69 constitutes the most projecting surface, of the holdingmember 58, projecting in the normal direction of the substrate W. However, in the embodiment shown inFIG. 19 , thethird seal portion 69 is provided on the steppedportion 70. Thefirst seal portion 66, thesecond seal portion 68, and thethird seal portion 69 constitute the integrally-formedseal ring 63 made of an elastic material, such as rubber. Theseal ring 63 shown inFIG. 19 has the same structure as theseal ring 63 shown inFIGS. 5 and 8 . Specifically, when thesubstrate holder 8 is used in theplating bath 35 shown inFIG. 7 , the portion of theseal ring 63 that constitutes the most projecting surface of thesubstrate holder 8 serves as thethird seal portion 69, and when thesubstrate holder 8 is used in theplating bath 35 shown inFIG. 17 , the portion of theseal ring 63 provided on the steppedportion 70 of theholder ring 62 serves as thethird seal portion 69. - In order to agitate the plating solution in the vicinity of the surface of the substrate W, the
paddle 130 is preferably disposed as close to the surface of the substrate W as possible. Therefore, when thesubstrate holder 8 is pressed against thesidewall 36, the most projecting surface of thesubstrate holder 8, i.e., thesurface 63 a of theseal ring 63, preferably lies in the same plane as aninner surface 36 c of thesidewall 36. With such a configuration, thepaddle 130 can be disposed closer to the surface, to be plated, of the substrate W. Alternatively, thesurface 63 a of theseal ring 63 may project from theinner surface 36 c of thesidewall 36 toward the plating solution chamber so that thepaddle 130 can be disposed even closer to the surface, to be plated, of the substrate W. - The above-discussed
cleaning device 140 can also be used in the dry-type plating bath 35 shown inFIG. 17 . - The previous description of embodiments is provided to enable a person skilled in the art to make and use the present invention. Moreover, various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles and specific examples defined herein may be applied to other embodiments. Therefore, the present invention is not intended to be limited to the embodiments described herein but is to be accorded the widest scope as defined by limitation of the claims and equivalents.
Claims (12)
1. A plating apparatus for plating a substrate, comprising:
a substrate holder configured to hold the substrate;
a dip-type plating bath configured to hold a first plating solution in which the substrate holder holding the substrate is immersed;
a dry-type plating bath having a hole in a sidewall thereof and configured to hold a second plating solution;
a transporter configured to transport the substrate holder to the dip-type plating bath and to a predetermined position beside the sidewall of the dry-type plating bath; and
a pressing mechanism configured to press the substrate holder, holding the substrate, against the sidewall of the dry-type plating bath to thereby close the hole with the substrate holder holding the substrate,
wherein the substrate holder includes a base member and a holding member configured to sandwich the substrate therebetween, a first seal portion configured to seal a gap between the substrate and the holding member, a second seal portion configured to seal a gap between the base member and the holding member, and a third seal portion configured to seal a gap between the holding member and the sidewall of the dry-type plating bath.
2. The plating apparatus according to claim 1 , further comprising an electrical contact electrically connected to a plating power source,
wherein the substrate holder includes a feeding terminal to be electrically connected to the substrate, and
wherein the pressing mechanism is configured to press the substrate holder, holding the substrate, against the sidewall of the dry-type plating bath to close the hole with the substrate holder holding the substrate while pressing the feeding terminal against the electrical contact.
3. The plating apparatus according to claim 1 , wherein:
the substrate holder includes a projecting surface projecting in a normal direction of the substrate, and a stepped portion provided outside of the projecting surface; and
the third seal portion is provided on the stepped portion so that the third seal portion is pressed against the sidewall by the pressing mechanism.
4. The plating apparatus according to claim 3 , wherein the projecting surface of the substrate holder lies in the same plane as an inner surface of the sidewall when the substrate holder is pressed against the sidewall.
5. The plating apparatus according to claim 1 , wherein the first seal portion, the second seal portion, and the third seal portion are formed from a single seal member.
6. The plating apparatus according to claim 1 , wherein:
the dry-type plating bath has an electrolyte chamber configured to hold an electrolyte, and a partition configured to isolate the second plating solution from the electrolyte; and
an anode is disposed in the electrolyte chamber.
7. The plating apparatus according to claim 1 , further comprising a cleaning device configured to clean the sidewall of the dry-type plating bath,
wherein the cleaning device has substantially the same shape and size as those of the substrate holder, and
wherein the transporter is configured to transport the cleaning device to the predetermined position beside the sidewall of the dry-type plating bath.
8. The plating apparatus according to claim 7 , wherein the cleaning device includes a cleaning element configured to contact the sidewall of the dry-type plating bath, and a rotating mechanism configured to rotate the cleaning element on the sidewall.
9. The plating apparatus according to claim 8 , further comprising a cleaning nozzle configured to supply a cleaning liquid to the cleaning element.
10. The plating apparatus according to claim 1 , wherein the second plating solution comprises a gold plating solution.
11. A cleaning device for use in a plating apparatus that includes
(i) a substrate holder configured to hold a substrate,
(ii) a dry-type plating bath having a hole in a sidewall thereof and configured to hold a plating solution, and
(iii) a pressing mechanism configured to press the substrate holder, holding the substrate, against the sidewall of the dry-type plating bath to thereby close the hole with the substrate holder holding the substrate,
the cleaning device comprising:
a cleaning element configured to contact the sidewall of the dry-type plating bath; and
a rotating mechanism configured to rotate the cleaning element on the sidewall of the dry-type plating bath,
wherein the cleaning device has substantially the same shape and size as those of the substrate holder.
12. The cleaning device according to claim 11 , further comprising a cleaning nozzle configured to supply a cleaning liquid to the cleaning element.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2013207188A JP2015071802A (en) | 2013-10-02 | 2013-10-02 | Plating apparatus and cleaning device used in the same |
JP2013-207188 | 2013-10-02 |
Publications (1)
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US20150090584A1 true US20150090584A1 (en) | 2015-04-02 |
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Application Number | Title | Priority Date | Filing Date |
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US14/497,520 Abandoned US20150090584A1 (en) | 2013-10-02 | 2014-09-26 | Plating apparatus and cleaning device used in the plating apparatus |
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US (1) | US20150090584A1 (en) |
JP (1) | JP2015071802A (en) |
TW (1) | TW201514347A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107190308A (en) * | 2017-07-12 | 2017-09-22 | 信丰迅捷兴电路科技有限公司 | Circuit board electroplating production system |
US20170321343A1 (en) * | 2016-05-09 | 2017-11-09 | Ebara Corporation | Substrate holder and plating apparatus using the same |
CN109689944A (en) * | 2016-09-08 | 2019-04-26 | 株式会社荏原制作所 | Substrate holder, plater, the manufacturing method of substrate holder and substrate keeping method |
CN116097077A (en) * | 2022-06-17 | 2023-05-09 | 株式会社荏原制作所 | Leakage determination method and plating apparatus |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI609100B (en) | 2012-03-30 | 2017-12-21 | 諾發系統有限公司 | Cleaning electroplating substrate holders using reverse current deplating |
US10416092B2 (en) | 2013-02-15 | 2019-09-17 | Lam Research Corporation | Remote detection of plating on wafer holding apparatus |
US9746427B2 (en) * | 2013-02-15 | 2017-08-29 | Novellus Systems, Inc. | Detection of plating on wafer holding apparatus |
EP3376530B1 (en) * | 2017-03-16 | 2019-08-14 | ATOTECH Deutschland GmbH | Automated substrate holder loading device |
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US20040245112A1 (en) * | 2003-05-29 | 2004-12-09 | Masahiko Sekimoto | Apparatus and method for plating a substrate |
US20130292254A1 (en) * | 2012-03-28 | 2013-11-07 | Santosh Kumar | Methods and apparatuses for cleaning electroplating substrate holders |
-
2013
- 2013-10-02 JP JP2013207188A patent/JP2015071802A/en active Pending
-
2014
- 2014-09-26 US US14/497,520 patent/US20150090584A1/en not_active Abandoned
- 2014-09-30 TW TW103133878A patent/TW201514347A/en unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US20040245112A1 (en) * | 2003-05-29 | 2004-12-09 | Masahiko Sekimoto | Apparatus and method for plating a substrate |
US20130292254A1 (en) * | 2012-03-28 | 2013-11-07 | Santosh Kumar | Methods and apparatuses for cleaning electroplating substrate holders |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170321343A1 (en) * | 2016-05-09 | 2017-11-09 | Ebara Corporation | Substrate holder and plating apparatus using the same |
US10738390B2 (en) * | 2016-05-09 | 2020-08-11 | Ebara Corporation | Substrate holder and plating apparatus using the same |
TWI719199B (en) * | 2016-05-09 | 2021-02-21 | 日商荏原製作所股份有限公司 | Substrate holder and plating apparatus using the same |
CN109689944A (en) * | 2016-09-08 | 2019-04-26 | 株式会社荏原制作所 | Substrate holder, plater, the manufacturing method of substrate holder and substrate keeping method |
US11384447B2 (en) * | 2016-09-08 | 2022-07-12 | Ebara Corporation | Substrate holder, plating apparatus, method for manufacturing substrate holder, and method for holding substrate |
CN107190308A (en) * | 2017-07-12 | 2017-09-22 | 信丰迅捷兴电路科技有限公司 | Circuit board electroplating production system |
CN116097077A (en) * | 2022-06-17 | 2023-05-09 | 株式会社荏原制作所 | Leakage determination method and plating apparatus |
Also Published As
Publication number | Publication date |
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JP2015071802A (en) | 2015-04-16 |
TW201514347A (en) | 2015-04-16 |
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