US20140084253A1 - Transparent conductive electrode stack containing carbon-containing material - Google Patents

Transparent conductive electrode stack containing carbon-containing material Download PDF

Info

Publication number
US20140084253A1
US20140084253A1 US13/626,418 US201213626418A US2014084253A1 US 20140084253 A1 US20140084253 A1 US 20140084253A1 US 201213626418 A US201213626418 A US 201213626418A US 2014084253 A1 US2014084253 A1 US 2014084253A1
Authority
US
United States
Prior art keywords
layer
work function
transparent conductive
conductive electrode
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US13/626,418
Inventor
Tze-Chiang Chen
James B. Hannon
Ning Li
Satoshi Oida
George S. Tulevski
Devendra K. Sadana
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GlobalFoundries Inc
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to US13/626,418 priority Critical patent/US20140084253A1/en
Assigned to INTERNATIONAL BUSINESS MACHINES CORPORATION reassignment INTERNATIONAL BUSINESS MACHINES CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHEN, TZE-CHIANG, HANNON, JAMES B., LI, NING, OIDA, SATOSHI, SADANA, DEVENDRA K., TULEVSKI, GEORGE S.
Priority to US13/660,604 priority patent/US8741678B2/en
Priority to US14/170,708 priority patent/US8969115B2/en
Publication of US20140084253A1 publication Critical patent/US20140084253A1/en
Assigned to GLOBALFOUNDRIES U.S. 2 LLC reassignment GLOBALFOUNDRIES U.S. 2 LLC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: INTERNATIONAL BUSINESS MACHINES CORPORATION
Assigned to GLOBALFOUNDRIES INC. reassignment GLOBALFOUNDRIES INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: GLOBALFOUNDRIES U.S. 2 LLC, GLOBALFOUNDRIES U.S. INC.
Abandoned legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/82Cathodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/17Carrier injection layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/81Anodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/81Anodes
    • H10K50/816Multilayers, e.g. transparent multilayers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31678Of metal
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31855Of addition polymer from unsaturated monomers
    • Y10T428/31938Polymer of monoethylenically unsaturated hydrocarbon

Definitions

  • the present disclosure relates to a transparent conductive electrode and a method of forming the same. More particularly, the present disclosure relates to a transparent conductive electrode stack which includes at least a layer of a carbon-containing material, an organic light emitting diode (OLED) device that includes the transparent conductive electrode stack, and methods of forming the transparent conductive electrode stack and the OLED device containing the same.
  • OLED organic light emitting diode
  • OLED displays posses key advantages including vibrant color, high contrast ratios, wide viewing angles and are flexible over conventional liquid crystal displays (LCDs). Moreover, OLED lighting is much more efficient than incandescent bulbs and has similar efficiency as the nitride based light emitting diodes (LEDs).
  • LEDs nitride based light emitting diodes
  • a typical OLED comprises a substrate which is usually made of glass or a similar transparent material.
  • An anode layer is positioned on the substrate.
  • the anode layer can be made of a material having a relatively high work function and is substantially transparent for visible light.
  • a typical material for the anode layer is indium tin oxide (ITO).
  • ITO indium tin oxide
  • a layer of electroluminescent material is positioned on the anode layer, serving as the emitting layer of the OLED.
  • Common materials for forming the emitting layer are polymers such as, for example, poly(p-phenylenvinylene) (PPV) and molecules like tris (8-oxychinolinato)aluminum (Alq 3 ). In the case of molecules, the emitting layer typically comprises several layers of the molecules.
  • a cathode layer of material having a lower work function like aluminum (Al), calcium (Ca) or magnesium (Mg) is positioned on the emitting layer.
  • Al aluminum
  • Ca calcium
  • Mg magnesium
  • the basic principles of electroluminescence and, thus, of the OLED are the following:
  • the anode layer and the cathode layer inject charge carriers, i.e., electrons and holes, into the emitting layer.
  • the charge carriers are transported and the charge carriers of opposite charge form so called excitons, i.e., excited states.
  • the excitons decay radiatively into the ground state by generating light.
  • the generated light is then emitted by the OLED through the anode layer which is made of transparent material like ITO.
  • the color of the generated light depends on the material used for the organic emitting layer.
  • a transparent conductive electrode stack containing a work function adjusted carbon-containing material is provided.
  • a transparent conductive electrode stack is provided that includes, in any order, a layer of a carbon-containing material and a layer of a work function modifying material.
  • the presence of the work function modifying material in the transparent conductive electrode stack of the present disclosure shifts the work function of the layer of carbon-containing material to a higher value for better hole injection into the OLED device as compared to a transparent conductive electrode that includes only a layer of carbon-containing material and no work function modifying material.
  • a transparent conductive electrode stack in one aspect of the present disclosure, includes a layer of a carbon-containing material; and a layer of a work function modifying material located on an exposed surface of the layer of carbon-containing material.
  • an organic light emitting diode (OLED) device in another aspect of the present disclosure, includes a substrate; a transparent conductive electrode stack located on an exposed surface of the substrate; a layer of electroluminescent material located above the transparent conductive electrode stack; and a layer of a cathode material located on an exposed surface of the layer of electroluminescent material.
  • the transparent conductive electrode stack includes a layer of a carbon-containing material, and a layer of a work function modifying material located on an exposed surface of the layer of carbon-containing material.
  • a method of forming a transparent conductive electrode stack includes providing a layer of a carbon-containing material; and forming a layer of a work function modifying material on an exposed surface of the layer of carbon-containing material.
  • a method of forming an organic light emitting diode (OLED) device includes providing a substrate; forming a transparent conductive electrode stack on an exposed surface of the substrate, wherein the transparent electrode stack comprises a layer of a carbon-containing material and a layer of a work function modifying material on an exposed surface of the layer of carbon-containing material; forming a layer of electroluminescent material on an exposed surface of the transparent conductive electrode stack; and forming a layer of a cathode material on an exposed surface of the layer of electroluminescent material.
  • FIG. 1 is a pictorial representation (through a cross sectional view) illustrating a substrate that can be employed in one embodiment of the present disclosure.
  • FIG. 2 is a pictorial representation (through a cross sectional view) illustrating the substrate of FIG. 1 after forming a layer of a carbon-containing material on an exposed surface of the substrate.
  • FIG. 3 is a pictorial representation (through a cross sectional view) illustrating the structure of FIG. 2 after forming a layer of a work function modifying material on an exposed surface of the layer of carbon-containing material.
  • FIG. 4A is a pictorial representation (through a cross sectional view) illustrating an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material, and a layer of a metal oxide.
  • FIG. 4B is a pictorial representation (through a cross sectional view) illustrating an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material, and a layer of a conductive polymer.
  • FIG. 4C is a pictorial representation (through a cross sectional view) illustrating an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material, a layer of a conductive polymer and a layer of a metal oxide.
  • FIG. 4D is a pictorial representation (through a cross sectional view) illustrating an embodiment of the present disclosure in which the transparent conductive electrode stack includes a carbon-containing material, and a layer of a metal.
  • FIG. 4E is a pictorial representation (through a cross sectional view) illustrating an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material, and an array of metal dots.
  • FIG. 5 is a pictorial representation (through a cross sectional view) illustrating the structure of FIG. 3 after forming a layer of an electroluminescent material on an exposed surface of the layer of work function modifying material.
  • FIG. 6 is a pictorial representation (through a cross sectional view) illustrating the structure of FIG. 5 after forming a layer of a cathode material on an exposed surface of the layer of electroluminescent material.
  • the present disclosure which provides a transparent conductive electrode stack which includes at least a layer of a carbon-containing material, an organic light emitting diode (OLED) device that includes the transparent conductive electrode stack, and methods of forming the transparent conductive electrode stack and the OLED device containing the same, will now be described in greater detail by referring to the following discussion and drawings that accompany the present application.
  • OLED organic light emitting diode
  • indium tin oxide transparent conductive electrodes are used as an anode.
  • Such an OLED configuration has the following disadvantages.
  • Transparent conductive electrodes containing indium tin oxide contain the rare earth metal indium which is an expensive material thus increasing the cost of manufacturing indium tin oxide-containing OLED devices.
  • Indium tin oxide-containing OLED devices easily fail after bending and are thus not suitable for flexible applications.
  • indium tin oxide is toxic and alternative materials for transparent conductive electrodes are thus needed.
  • a transparent conductive electrode stack containing a work function adjusted carbon-containing material.
  • a transparent conductive electrode stack is provided that includes a layer of carbon-containing material and a layer of a work function modifying material.
  • the presence of the work function modifying material in the transparent conductive electrode stack of the present disclosure shifts the work function of the layer of carbon-containing material to a higher value for better hole injection into the OLED device as compared to a transparent conductive electrode that includes only a layer of carbon-containing material and no work function modifying material.
  • the transparent conductive electrode stack of the present disclosure is not limited to being used in only such a device. Instead, the transparent conductive electrode stack of the present disclosure can be used in other types of devices such as, for example, photovoltaic devices, solar cells, flat panel displays or touch screens.
  • the present disclosure illustrates and describes that the transparent conductive electrode stack contains a bottom carbon-containing layer and an upper layer(s) of work function modifying material(s), the present disclosure is not limited to only such an embodiment. Instead, and in some embodiments of the present disclosure, particularly when the work function modifying material is comprised of a metal or an array of metal dots, the layer of work function modifying material can be located beneath the layer of carbon-containing material.
  • the substrate 10 that can be employed in one embodiment of the present disclosure may be rigid or flexible and may include, for example, a semiconductor material, glass, a ceramic, tape, or a plastic.
  • the substrate 10 that is employed in the present disclosure is a transparent substrate.
  • the substrate 10 is transparent and is comprised of glass.
  • the substrate 10 is transparent and is comprised of a plastic.
  • the substrate 10 that is employed in the present disclosure may have a thickness from a few hundred microns to a few millimeters.
  • the substrate 10 that is employed may have a thickness from a few tens of microns to a few millimeters.
  • the substrate 10 can have other thicknesses that are above and/or below the ranges mentioned above.
  • the substrate 10 after forming a layer of a carbon-containing material 12 on an exposed surface of the substrate 10 .
  • the layer of carbon-containing material 12 serves as a transparent bottom electrode of an OLED device.
  • the layer of carbon-containing material 12 can serve as a top electrode of the OLED device.
  • the layer of carbon-containing material 12 can serve as an electrode of other types of devices such as, for example, photovoltaic devices, solar cells, flat panel displays, or touch screen devices.
  • the layer of carbon-containing material 12 comprises a layer of graphene.
  • graphene as used throughout the present disclosure denotes a one-atom-thick planar sheet of sp 2 -bonded carbon atoms that are densely packed in a honeycomb crystal lattice.
  • the graphene employed in the present disclosure has a two-dimensional (2D) hexagonal crystallographic bonding structure.
  • the layer of carbon-containing material 12 comprises a carbon nanotube.
  • carbon nanotube as used throughout the present disclosure denotes allotropes of carbon with a cylindrical nanostructure.
  • the carbon nanotubes can be single walled-nanotubes (SWNTs) or multi-walled nanotubes (MWNTs).
  • the layer of graphene can be provided in the present disclosure by first depositing a blanket layer of graphene onto a handle substrate.
  • the handle substrate is typically comprised of a material which can catalyze the formation of graphene on a surface thereof.
  • the handle substrate may comprise copper or a copper foil.
  • the handle substrate can be formed utilizing any deposition process well known to those skilled in the art.
  • a handle substrate comprised of copper can be formed by chemical vapor deposition, plasma enhanced chemical vapor deposition, physical vapor deposition, sputtering, plating, chemical solution deposition or electroless plating.
  • copper foils are formed by sputtering a copper foil from a copper-containing target.
  • the handle substrate has a thickness from 7 ⁇ m to 25 ⁇ m. In another embodiment, the handle substrate has a thickness from 20 ⁇ m to 30 ⁇ m. Other thicknesses for the handle substrate that are above and/or below the thickness ranges mentioned above can also be used in the present disclosure.
  • the blanket layer of graphene that can be used in the present disclosure is a contiguous layer of graphene that can be comprised of single-layer graphene (nominally 0.34 nm thick), few-layer graphene (2-10 graphene layers), multi-layer graphene (>10 graphene layers), a mixture of single-layer, few-layer, and multi-layer graphene, or any combination of graphene layers mixed with amorphous and/or disordered carbon phases that result by graphene formation at lower temperatures (between 200° C. and 900° C.).
  • a single layer of graphene is used in the present disclosure.
  • the blanket layer of graphene can be formed utilizing a deposition process such as, for example, chemical vapor deposition (CVD), plasma enhanced chemical vapor deposition (PECVD), and ultraviolet (UV) assisted CVD.
  • CVD chemical vapor deposition
  • PECVD plasma enhanced chemical vapor deposition
  • UV ultraviolet
  • the blanket layer of graphene is formed by CVD.
  • the deposition process that can be employed in the present disclosure in forming the blanket layer of graphene is initiated on the exposed surface of the handle substrate.
  • the deposition of the blanket layer of graphene on the exposed surface of the handle substrate can be performed at a temperature up to, but not exceeding, 500° C. for PECVD.
  • the depositing (i.e., growth) of graphene occurs at a temperature from 800° C. to 1080° C.
  • the deposition process that can be used in the present disclosure for forming the blanket layer of graphene includes utilizing any known carbon sources including, for example, benzene, propane, ethane and other hydrocarbons, and other carbon-containing gases.
  • the blanket layer of graphene can have a thickness from 0.34 nm to 0.8 nm. In another embodiment, the blanket layer of graphene can have a thickness from 0.7 nm to 3.4 nm. The blanket layer of graphene can have other thicknesses that are above the ranges mentioned above.
  • the blanket layer of graphene can be transferred to substrate 10 utilizing a bonding process. Bonding can be achieved at room temperature, up to about 300° C. Following bonding, the handle substrate can be removed by etching, planarization or grinding.
  • the blanket layer of graphene that is transferred to substrate 10 and is used as carbon-containing material 12 has a work function that about 4.5 eV. Such a work function is below the Fermi level of most electroluminescent material and therefore poor carrier injection and poor efficiency are obtained when OLED devices including only graphene as the transparent conductive electrode are employed. Also, the blanket layer of graphene that is transferred to substrate 10 has a sheet resistance of about 1800 ohms/square.
  • a carbon nanotube film can be formed directly on the surface of substrate 10 utilizing conventional techniques that are well known to those skilled in the art.
  • a carbon nanotube film can be formed by arc discharge, laser ablation, and chemical vapor deposition (CVD). These techniques typically take place in vacuum or with process gases. CVD growth of CNTs can occur in vacuum or at atmospheric pressure.
  • the carbon nanotube film can have a thickness from 20 nm to 100 nm. In another embodiment, the carbon nanotube film can have a thickness from 30 nm to 50 nm. The carbon nanotube film can have other thicknesses that are above and/or below the ranges mentioned above.
  • the carbon nanotube film which can be used as carbon-containing material 12 has a work function that is about 5 eV. Such a work function is below the Fermi level of most electroluminescent material and therefore poor carrier injection and poor efficiency are obtained when OLED devices including only carbon nanotubes (CNTs) as the transparent conductive electrode are employed. Also, the carbon nanotube film has a sheet resistance of about 100 ohms/square and can be improved with the more optimized process.
  • FIG. 3 there is illustrated the structure of FIG. 2 after forming a layer of a work function modifying material 14 on an exposed surface of the layer of carbon-containing material 12 .
  • the combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 provides a transparent conductive electrode stack of the present disclosure.
  • the presence of the layer of work function modifying material 14 within the transparent conductive electrode stack of the present disclosure increases the work function of the layer of carbon-containing material 12 and serves as a p-type dopant for the layer of carbon-containing material 12 .
  • the layer of work function modifying material 14 within the transparent conductive electrode stack of the present disclosure increases the work function of the layer of carbon-containing material 12 such that the work function of the layer of carbon-containing material 12 ‘substantially’ matches the Fermi level of the layer of electroluminescent material to be subsequently formed atop the transparent conductive electrode stack (i.e., elements 12 and 14 ).
  • substantially matches it is meant the layer of carbon-containing material 12 when used in conjunction with the layer of work function modifying material 14 has a work function that is within less than 0.7 eV from the Fermi level of the layer of electroluminescent material. As such, better hole injection into the layer of electroluminescent material is provided by employing the transparent conductive electrode stack of the present disclosure.
  • the layer of work function modifying material 14 within the transparent conductive electrode stack of the present disclosure increases the conductivity of the layer of carbon-containing material 12 without losing transmittance.
  • the layer of work function modifying material 14 that can be employed in the present disclosure may be a single layered structure. In another embodiment of the present disclosure, the layer of work function modifying material 14 that can be employed in the present disclosure may be a multilayered structure comprising at least two distinct layers of work function modifying materials.
  • the work function modifying material 14 that can be employed in the present disclosure can be a metal oxide, a conductive polymer, a metal, an array of metal dots, or any combination thereof including, for example, a multilayered structure including a metal oxide and a conductive polymer.
  • FIGS. 4A-4E Some specific examples of various transparent conductive electrode stacks of the present disclosure are illustrated in FIGS. 4A-4E . While these specific embodiments are shown and described, the transparent conductive electrode stack of the present disclosure is not limited to those shown in FIGS. 4A-4E .
  • FIG. 4A illustrates an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of carbon-containing material 12 and a layer of a metal oxide 16 .
  • FIG. 4B illustrates an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material 12 , and a layer of a conductive polymer 18 .
  • FIG. 4C illustrates an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material 12 , a layer of a conductive polymer 18 and a layer of a metal oxide 16 .
  • FIG. 4A illustrates an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of carbon-containing material 12 and a layer of a metal oxide 16 .
  • FIG. 4B illustrates an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material 12 , and a layer of a conductive polymer 18 .
  • FIG. 4C illustrates an
  • FIG. 4D illustrates an embodiment of the present disclosure in which the transparent conductive electrode stack includes a carbon-containing material 12 , and a layer of a metal 20
  • FIG. 4E illustrates an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material 12 , and an array of metal dots 22 .
  • elements 16 , 18 , 20 and 22 serve as the work function modifying material 14 and thus adjust the work function of the layer of carbon-containing material 12 so as to substantially match the Fermi level of the electroluminescent material.
  • the metal oxide when a metal oxide is employed as the work function modifying material 14 , the metal oxide includes a metal from Groups IIIB, IVB, VB, VIIB, VIIB, VIII or IIIA of the Periodic Table of Elements. Illustrated examples of metal oxides that can be employed in the present disclosure as work function modifying material 14 include, but are not limited to, MoO 3 , W 2 O 5 , Al 2 O 3 , V 2 O 5 and combinations or multilayers thereof.
  • the metal oxide can be formed utilizing any well known deposition process including, for example, evaporation, chemical solution deposition, chemical vapor deposition, and sputtering.
  • the conductive polymer (which can be referred to as an intrinsically conductive polymer) includes an organic polymer that conducts electricity.
  • conductive polymers that can be employed in the present disclosure include, for example, aromatic compounds containing no heteroatoms, aromatic compounds containing a nitrogen heteroatom, aromatic compounds containing a sulfur heteroatom, polymeric compounds containing double bonds and/or aromatic compounds that also contain double bonds.
  • the conductive polymers that can be employed in the present disclosure as the layer of work function modifying material 14 are selected from polyanilines and poly(3,4-ethylenedioxythiophene)poly(styrenesulfonate) or PEDOT:PSS for short.
  • the conductive polymer can be formed utilizing any well known deposition process including, for example, evaporation, chemical solution deposition, spin-coating, or dip coating.
  • the deposition of a conductive polymer directly on an exposed surface of the layer of carbon-containing material 12 can also form a uniform contact with the layer of carbon-containing material 12 .
  • the metal or metal dot includes an element from Groups IIIB, IVB, VB, VIIB, VIIB, VIII or IIIA of the Periodic Table of Elements.
  • Illustrated examples of metals or metal dots include, but are not limited to, Au, Pd, Pt, W, Ag, and/or Al.
  • a metal film can be formed utilizing any well known deposition process including, for example, evaporation, chemical solution deposition, chemical vapor deposition, and sputtering.
  • An array of metal dots can be formed by first depositing a metal and then patterning the same by photolithography and etching. Alternatively, an array of metal dots can be formed by deposition of a metal precursor through a mask which contains a preconfigured pattern formed therein.
  • the layer of work function modifying material 14 can have a thickness from 1 nm to 5 nm.
  • the layer of work function modifying material 14 can have other thicknesses that are above and/or below the range mentioned above.
  • the layer of electroluminescent material 24 that is employed in the present disclosure includes any organic material or multilayered stack of organic materials including, for example, organometallic chelates, conductive polymers, fluorescent dyes, phosphorescent dyes and conjugated dendrimers, that emits light in response to an electric current.
  • organic materials that can be used as the electroluminescent material 24 include, but are not limited to, poly(p-phenylenvinylene) (PPV), poly(naphthalene vinylenes) (PNVs), tris(2-phenyl pyridine)iridium (Ir(ppy) 3 ), and tris (8-oxychinolinato) aluminum (Alq 3 ).
  • PV poly(p-phenylenvinylene)
  • PNVs poly(naphthalene vinylenes)
  • Ir(ppy) 3 tris(2-phenyl pyridine)iridium
  • 8-oxychinolinato) aluminum Alq 3
  • the layer of electroluminescent material 24 can be formed by conventional techniques including, for example, spin-on coating, dip coating, immersion, and chemical vapor deposition.
  • the thickness of the layer of electroluminescent material 24 ranges from a few nm to a few hundred nm. Other thicknesses, including those above and/or below the aforementioned range can also be employed.
  • the layer of cathode material 26 can serve as an upper electrode of the OLED of the present disclosure.
  • the layer of cathode material 26 that is employed in the present disclosure includes a material or a multilayered stack of materials having a lower work function than the transparent conductive electrode stack of the present disclosure.
  • the layer of cathode material 26 can be comprised of aluminum (Al), calcium (Ca) and/or magnesium (Mg).
  • the layer of cathode material 26 may comprise a stack of LiF and Al.
  • the layer of cathode material 26 can be formed utilizing any deposition process including for example, thermal evaporation and sputtering. In some embodiments, the deposition process is performed through a shadow mask. Typically, and in one embodiment, the thickness of the layer of cathode material 26 ranges from 20 nm to 100 nm. Other thicknesses, including those above and/or below the aforementioned range can also be employed.
  • the transparent conductive electrode stack of the present disclosure which comprises a combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 is typically less toxic than a conventional ITO transparent conductive electrode. Also, transparent conductive electrode stacks comprised of the combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 are less expensive to fabricate than are their ITO counterparts. Further, transparent conductive electrode stacks comprised of the combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 are typically flexible and thus can be used in a wide variety of display and lighting applications.
  • transparent conductive electrode stacks comprised of the combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 typically have a higher mechanical strength than their ITO counterpart electrodes.
  • the transparent conductive electrode stacks comprised of combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 are chemically stable.
  • chemically stable it is meant that the carbon-containing material 12 can endure processing steps which include a strong acid, base, and solvent, and maintain its structural integrity.
  • the transparent conductive electrode stacks comprised of the combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 can provide an OLED device that has electrical properties that are similar to, and in some embodiments, slightly improved as compared with, an OLED device containing a conventional ITO electrode.
  • the transparent conductive electrode stacks comprised of the combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 can provide an OLED device that has a same or slightly higher quantum efficiency as compared to an OLED device containing a conventional ITO electrode. In some cases, the transparent conductive electrode stacks comprised of the combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 can provide an OLED device that has a same quantum efficiency as compared to an OLED device containing a conventional ITO electrode. The external quantum efficiency without any out coupling scheme is more than 20%.

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

A transparent conductive electrode stack containing a work function adjusted carbon-containing material is provided. Specifically, the transparent conductive electrode stack includes a layer of a carbon-containing material and a layer of a work function modifying material. The presence of the work function modifying material in the transparent conductive electrode stack shifts the work function of the layer of carbon-containing material to a higher value for better hole injection into the OLED device as compared to a transparent conductive electrode that includes only a layer of carbon-containing material and no work function modifying material.

Description

    BACKGROUND
  • The present disclosure relates to a transparent conductive electrode and a method of forming the same. More particularly, the present disclosure relates to a transparent conductive electrode stack which includes at least a layer of a carbon-containing material, an organic light emitting diode (OLED) device that includes the transparent conductive electrode stack, and methods of forming the transparent conductive electrode stack and the OLED device containing the same.
  • Organic light emitting diode device technology is emerging as a leading technology for displays and lighting. OLED displays posses key advantages including vibrant color, high contrast ratios, wide viewing angles and are flexible over conventional liquid crystal displays (LCDs). Moreover, OLED lighting is much more efficient than incandescent bulbs and has similar efficiency as the nitride based light emitting diodes (LEDs).
  • A typical OLED comprises a substrate which is usually made of glass or a similar transparent material. An anode layer is positioned on the substrate. The anode layer can be made of a material having a relatively high work function and is substantially transparent for visible light. A typical material for the anode layer is indium tin oxide (ITO). A layer of electroluminescent material is positioned on the anode layer, serving as the emitting layer of the OLED. Common materials for forming the emitting layer are polymers such as, for example, poly(p-phenylenvinylene) (PPV) and molecules like tris (8-oxychinolinato)aluminum (Alq3). In the case of molecules, the emitting layer typically comprises several layers of the molecules. A cathode layer of material having a lower work function like aluminum (Al), calcium (Ca) or magnesium (Mg) is positioned on the emitting layer. During operation of the OLED, the cathode layer and the anode layer are connected to a power supply.
  • The basic principles of electroluminescence and, thus, of the OLED are the following: The anode layer and the cathode layer inject charge carriers, i.e., electrons and holes, into the emitting layer. In the emitting layer, the charge carriers are transported and the charge carriers of opposite charge form so called excitons, i.e., excited states. The excitons decay radiatively into the ground state by generating light. The generated light is then emitted by the OLED through the anode layer which is made of transparent material like ITO. The color of the generated light depends on the material used for the organic emitting layer.
  • SUMMARY
  • A transparent conductive electrode stack containing a work function adjusted carbon-containing material is provided. Specifically, a transparent conductive electrode stack is provided that includes, in any order, a layer of a carbon-containing material and a layer of a work function modifying material. The presence of the work function modifying material in the transparent conductive electrode stack of the present disclosure shifts the work function of the layer of carbon-containing material to a higher value for better hole injection into the OLED device as compared to a transparent conductive electrode that includes only a layer of carbon-containing material and no work function modifying material.
  • In one aspect of the present disclosure, a transparent conductive electrode stack is provided. In this aspect of the present disclosure, the transparent conductive electrode stack includes a layer of a carbon-containing material; and a layer of a work function modifying material located on an exposed surface of the layer of carbon-containing material.
  • In another aspect of the present disclosure, an organic light emitting diode (OLED) device is provided. In this aspect of the present disclosure, the OLED device includes a substrate; a transparent conductive electrode stack located on an exposed surface of the substrate; a layer of electroluminescent material located above the transparent conductive electrode stack; and a layer of a cathode material located on an exposed surface of the layer of electroluminescent material. In accordance with the present disclosure, the transparent conductive electrode stack includes a layer of a carbon-containing material, and a layer of a work function modifying material located on an exposed surface of the layer of carbon-containing material.
  • In a further aspect of the present disclosure, a method of forming a transparent conductive electrode stack is provided. The method of forming the transparent conductive electrode stack includes providing a layer of a carbon-containing material; and forming a layer of a work function modifying material on an exposed surface of the layer of carbon-containing material.
  • In yet another aspect of the present disclosure, a method of forming an organic light emitting diode (OLED) device is provided. The method of forming the OLED device includes providing a substrate; forming a transparent conductive electrode stack on an exposed surface of the substrate, wherein the transparent electrode stack comprises a layer of a carbon-containing material and a layer of a work function modifying material on an exposed surface of the layer of carbon-containing material; forming a layer of electroluminescent material on an exposed surface of the transparent conductive electrode stack; and forming a layer of a cathode material on an exposed surface of the layer of electroluminescent material.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a pictorial representation (through a cross sectional view) illustrating a substrate that can be employed in one embodiment of the present disclosure.
  • FIG. 2 is a pictorial representation (through a cross sectional view) illustrating the substrate of FIG. 1 after forming a layer of a carbon-containing material on an exposed surface of the substrate.
  • FIG. 3 is a pictorial representation (through a cross sectional view) illustrating the structure of FIG. 2 after forming a layer of a work function modifying material on an exposed surface of the layer of carbon-containing material.
  • FIG. 4A is a pictorial representation (through a cross sectional view) illustrating an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material, and a layer of a metal oxide.
  • FIG. 4B is a pictorial representation (through a cross sectional view) illustrating an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material, and a layer of a conductive polymer.
  • FIG. 4C is a pictorial representation (through a cross sectional view) illustrating an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material, a layer of a conductive polymer and a layer of a metal oxide.
  • FIG. 4D is a pictorial representation (through a cross sectional view) illustrating an embodiment of the present disclosure in which the transparent conductive electrode stack includes a carbon-containing material, and a layer of a metal.
  • FIG. 4E is a pictorial representation (through a cross sectional view) illustrating an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material, and an array of metal dots.
  • FIG. 5 is a pictorial representation (through a cross sectional view) illustrating the structure of FIG. 3 after forming a layer of an electroluminescent material on an exposed surface of the layer of work function modifying material.
  • FIG. 6 is a pictorial representation (through a cross sectional view) illustrating the structure of FIG. 5 after forming a layer of a cathode material on an exposed surface of the layer of electroluminescent material.
  • DETAILED DESCRIPTION
  • The present disclosure, which provides a transparent conductive electrode stack which includes at least a layer of a carbon-containing material, an organic light emitting diode (OLED) device that includes the transparent conductive electrode stack, and methods of forming the transparent conductive electrode stack and the OLED device containing the same, will now be described in greater detail by referring to the following discussion and drawings that accompany the present application.
  • It is noted that the drawings of the present application are provided for illustrative purposes and, as such, they are not drawn to scale. In the drawings and the description that follows, like materials are referred to by like reference numerals. For purposes of the description hereinafter, the terms “upper”, “lower”, “right”, “left”, “vertical”, “horizontal”, “top”, “bottom”, and derivatives thereof shall relate to the components, layers and/or materials as oriented in the drawing figures which accompany the present application.
  • In the following description, numerous specific details are set forth, such as particular structures, components, materials, dimensions, processing steps and techniques, in order to provide a thorough understanding of the present disclosure. However, it will be appreciated by one of ordinary skill in the art that the present disclosure may be practiced with viable alternative process options without these specific details. In other instances, well-known structures or processing steps have not been described in detail in order to avoid obscuring the various embodiments of the present disclosure.
  • In current OLED displays and lighting technologies, indium tin oxide transparent conductive electrodes are used as an anode. Such an OLED configuration has the following disadvantages. Transparent conductive electrodes containing indium tin oxide contain the rare earth metal indium which is an expensive material thus increasing the cost of manufacturing indium tin oxide-containing OLED devices. Indium tin oxide-containing OLED devices easily fail after bending and are thus not suitable for flexible applications. Also, indium tin oxide is toxic and alternative materials for transparent conductive electrodes are thus needed.
  • In the present disclosure, the drawbacks mentioned above with respect to conventional indium tin oxide transparent conductive electrodes have been obviated by providing a transparent conductive electrode stack containing a work function adjusted carbon-containing material. Specifically, a transparent conductive electrode stack is provided that includes a layer of carbon-containing material and a layer of a work function modifying material. The presence of the work function modifying material in the transparent conductive electrode stack of the present disclosure shifts the work function of the layer of carbon-containing material to a higher value for better hole injection into the OLED device as compared to a transparent conductive electrode that includes only a layer of carbon-containing material and no work function modifying material.
  • Although the following description illustrates the transparent conductive electrode stack of the present disclosure as a component of an OLED device, the transparent conductive electrode stack of the present disclosure is not limited to being used in only such a device. Instead, the transparent conductive electrode stack of the present disclosure can be used in other types of devices such as, for example, photovoltaic devices, solar cells, flat panel displays or touch screens.
  • Also, and although the present disclosure illustrates and describes that the transparent conductive electrode stack contains a bottom carbon-containing layer and an upper layer(s) of work function modifying material(s), the present disclosure is not limited to only such an embodiment. Instead, and in some embodiments of the present disclosure, particularly when the work function modifying material is comprised of a metal or an array of metal dots, the layer of work function modifying material can be located beneath the layer of carbon-containing material.
  • Referring to FIG. 1, there is illustrated a substrate 10 that can be employed in one embodiment of the present disclosure. The substrate 10 that can be employed in the present disclosure may be rigid or flexible and may include, for example, a semiconductor material, glass, a ceramic, tape, or a plastic. Typically, the substrate 10 that is employed in the present disclosure is a transparent substrate. In one embodiment of the present disclosure, the substrate 10 is transparent and is comprised of glass. In another embodiment of the present disclosure, the substrate 10 is transparent and is comprised of a plastic. The substrate 10 that is employed in the present disclosure may have a thickness from a few hundred microns to a few millimeters. In another embodiment, the substrate 10 that is employed may have a thickness from a few tens of microns to a few millimeters. The substrate 10 can have other thicknesses that are above and/or below the ranges mentioned above.
  • Referring to FIG. 2, there is illustrated the substrate 10 after forming a layer of a carbon-containing material 12 on an exposed surface of the substrate 10. In some embodiments, and as illustrated in the drawings of the present disclosure, the layer of carbon-containing material 12 serves as a transparent bottom electrode of an OLED device. In other embodiments, the layer of carbon-containing material 12 can serve as a top electrode of the OLED device. In yet another embodiment, the layer of carbon-containing material 12 can serve as an electrode of other types of devices such as, for example, photovoltaic devices, solar cells, flat panel displays, or touch screen devices.
  • In one embodiment of the present disclosure, the layer of carbon-containing material 12 comprises a layer of graphene. The term “graphene” as used throughout the present disclosure denotes a one-atom-thick planar sheet of sp2-bonded carbon atoms that are densely packed in a honeycomb crystal lattice. The graphene employed in the present disclosure has a two-dimensional (2D) hexagonal crystallographic bonding structure.
  • In another embodiment of the present disclosure, the layer of carbon-containing material 12 comprises a carbon nanotube. The term “carbon nanotube” as used throughout the present disclosure denotes allotropes of carbon with a cylindrical nanostructure. The carbon nanotubes can be single walled-nanotubes (SWNTs) or multi-walled nanotubes (MWNTs).
  • In embodiments in which the carbon-containing material 12 is a layer of graphene, the layer of graphene can be provided in the present disclosure by first depositing a blanket layer of graphene onto a handle substrate. The handle substrate is typically comprised of a material which can catalyze the formation of graphene on a surface thereof. For example and in some embodiments of the present disclosure, the handle substrate may comprise copper or a copper foil.
  • The handle substrate can be formed utilizing any deposition process well known to those skilled in the art. For example, a handle substrate comprised of copper can be formed by chemical vapor deposition, plasma enhanced chemical vapor deposition, physical vapor deposition, sputtering, plating, chemical solution deposition or electroless plating. Typically, copper foils are formed by sputtering a copper foil from a copper-containing target.
  • In one embodiment, the handle substrate has a thickness from 7 μm to 25 μm. In another embodiment, the handle substrate has a thickness from 20 μm to 30 μm. Other thicknesses for the handle substrate that are above and/or below the thickness ranges mentioned above can also be used in the present disclosure.
  • The blanket layer of graphene that can be used in the present disclosure is a contiguous layer of graphene that can be comprised of single-layer graphene (nominally 0.34 nm thick), few-layer graphene (2-10 graphene layers), multi-layer graphene (>10 graphene layers), a mixture of single-layer, few-layer, and multi-layer graphene, or any combination of graphene layers mixed with amorphous and/or disordered carbon phases that result by graphene formation at lower temperatures (between 200° C. and 900° C.). Typically, a single layer of graphene is used in the present disclosure.
  • The blanket layer of graphene can be formed utilizing a deposition process such as, for example, chemical vapor deposition (CVD), plasma enhanced chemical vapor deposition (PECVD), and ultraviolet (UV) assisted CVD. In one embodiment, the blanket layer of graphene is formed by CVD. In some embodiments, the deposition process that can be employed in the present disclosure in forming the blanket layer of graphene is initiated on the exposed surface of the handle substrate.
  • In one embodiment, the deposition of the blanket layer of graphene on the exposed surface of the handle substrate can be performed at a temperature up to, but not exceeding, 500° C. for PECVD. In another embodiment, the depositing (i.e., growth) of graphene occurs at a temperature from 800° C. to 1080° C. The deposition process that can be used in the present disclosure for forming the blanket layer of graphene includes utilizing any known carbon sources including, for example, benzene, propane, ethane and other hydrocarbons, and other carbon-containing gases.
  • In one embodiment of the present disclosure, the blanket layer of graphene can have a thickness from 0.34 nm to 0.8 nm. In another embodiment, the blanket layer of graphene can have a thickness from 0.7 nm to 3.4 nm. The blanket layer of graphene can have other thicknesses that are above the ranges mentioned above.
  • After depositing the blanket layer of graphene on the handle substrate, the blanket layer of graphene can be transferred to substrate 10 utilizing a bonding process. Bonding can be achieved at room temperature, up to about 300° C. Following bonding, the handle substrate can be removed by etching, planarization or grinding.
  • The blanket layer of graphene that is transferred to substrate 10 and is used as carbon-containing material 12 has a work function that about 4.5 eV. Such a work function is below the Fermi level of most electroluminescent material and therefore poor carrier injection and poor efficiency are obtained when OLED devices including only graphene as the transparent conductive electrode are employed. Also, the blanket layer of graphene that is transferred to substrate 10 has a sheet resistance of about 1800 ohms/square.
  • When the carbon-containing material 12 is a carbon nanotube, a carbon nanotube film can be formed directly on the surface of substrate 10 utilizing conventional techniques that are well known to those skilled in the art. For example, a carbon nanotube film can be formed by arc discharge, laser ablation, and chemical vapor deposition (CVD). These techniques typically take place in vacuum or with process gases. CVD growth of CNTs can occur in vacuum or at atmospheric pressure.
  • In one embodiment of the present disclosure, the carbon nanotube film can have a thickness from 20 nm to 100 nm. In another embodiment, the carbon nanotube film can have a thickness from 30 nm to 50 nm. The carbon nanotube film can have other thicknesses that are above and/or below the ranges mentioned above.
  • The carbon nanotube film which can be used as carbon-containing material 12 has a work function that is about 5 eV. Such a work function is below the Fermi level of most electroluminescent material and therefore poor carrier injection and poor efficiency are obtained when OLED devices including only carbon nanotubes (CNTs) as the transparent conductive electrode are employed. Also, the carbon nanotube film has a sheet resistance of about 100 ohms/square and can be improved with the more optimized process.
  • Referring now to FIG. 3, there is illustrated the structure of FIG. 2 after forming a layer of a work function modifying material 14 on an exposed surface of the layer of carbon-containing material 12. The combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 provides a transparent conductive electrode stack of the present disclosure. The presence of the layer of work function modifying material 14 within the transparent conductive electrode stack of the present disclosure increases the work function of the layer of carbon-containing material 12 and serves as a p-type dopant for the layer of carbon-containing material 12.
  • Specifically, the layer of work function modifying material 14 within the transparent conductive electrode stack of the present disclosure increases the work function of the layer of carbon-containing material 12 such that the work function of the layer of carbon-containing material 12 ‘substantially’ matches the Fermi level of the layer of electroluminescent material to be subsequently formed atop the transparent conductive electrode stack (i.e., elements 12 and 14). By “substantially matches” it is meant the layer of carbon-containing material 12 when used in conjunction with the layer of work function modifying material 14 has a work function that is within less than 0.7 eV from the Fermi level of the layer of electroluminescent material. As such, better hole injection into the layer of electroluminescent material is provided by employing the transparent conductive electrode stack of the present disclosure.
  • Also, the layer of work function modifying material 14 within the transparent conductive electrode stack of the present disclosure increases the conductivity of the layer of carbon-containing material 12 without losing transmittance.
  • In one embodiment of the present disclosure, the layer of work function modifying material 14 that can be employed in the present disclosure may be a single layered structure. In another embodiment of the present disclosure, the layer of work function modifying material 14 that can be employed in the present disclosure may be a multilayered structure comprising at least two distinct layers of work function modifying materials.
  • The work function modifying material 14 that can be employed in the present disclosure can be a metal oxide, a conductive polymer, a metal, an array of metal dots, or any combination thereof including, for example, a multilayered structure including a metal oxide and a conductive polymer.
  • Some specific examples of various transparent conductive electrode stacks of the present disclosure are illustrated in FIGS. 4A-4E. While these specific embodiments are shown and described, the transparent conductive electrode stack of the present disclosure is not limited to those shown in FIGS. 4A-4E.
  • Specifically, FIG. 4A illustrates an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of carbon-containing material 12 and a layer of a metal oxide 16. FIG. 4B illustrates an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material 12, and a layer of a conductive polymer 18. FIG. 4C illustrates an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material 12, a layer of a conductive polymer 18 and a layer of a metal oxide 16. FIG. 4D illustrates an embodiment of the present disclosure in which the transparent conductive electrode stack includes a carbon-containing material 12, and a layer of a metal 20, while FIG. 4E illustrates an embodiment of the present disclosure in which the transparent conductive electrode stack includes a layer of a carbon-containing material 12, and an array of metal dots 22.
  • In each illustrated embodiment of the present disclosure, elements 16, 18, 20 and 22 serve as the work function modifying material 14 and thus adjust the work function of the layer of carbon-containing material 12 so as to substantially match the Fermi level of the electroluminescent material.
  • When a metal oxide is employed as the work function modifying material 14, the metal oxide includes a metal from Groups IIIB, IVB, VB, VIIB, VIIB, VIII or IIIA of the Periodic Table of Elements. Illustrated examples of metal oxides that can be employed in the present disclosure as work function modifying material 14 include, but are not limited to, MoO3, W2O5, Al2O3, V2O5 and combinations or multilayers thereof. The metal oxide can be formed utilizing any well known deposition process including, for example, evaporation, chemical solution deposition, chemical vapor deposition, and sputtering.
  • When a conductive polymer is employed as the layer of work function modifying material 14, the conductive polymer (which can be referred to as an intrinsically conductive polymer) includes an organic polymer that conducts electricity. Examples of conductive polymers that can be employed in the present disclosure include, for example, aromatic compounds containing no heteroatoms, aromatic compounds containing a nitrogen heteroatom, aromatic compounds containing a sulfur heteroatom, polymeric compounds containing double bonds and/or aromatic compounds that also contain double bonds. In some embodiments of the present disclosure, the conductive polymers that can be employed in the present disclosure as the layer of work function modifying material 14 are selected from polyanilines and poly(3,4-ethylenedioxythiophene)poly(styrenesulfonate) or PEDOT:PSS for short.
  • The conductive polymer can be formed utilizing any well known deposition process including, for example, evaporation, chemical solution deposition, spin-coating, or dip coating. In some embodiments of the present disclosure, the deposition of a conductive polymer directly on an exposed surface of the layer of carbon-containing material 12 can also form a uniform contact with the layer of carbon-containing material 12.
  • When a metal or an array of metal dots is employed as the layer of work function modifying material 14, the metal or metal dot includes an element from Groups IIIB, IVB, VB, VIIB, VIIB, VIII or IIIA of the Periodic Table of Elements. Illustrated examples of metals or metal dots include, but are not limited to, Au, Pd, Pt, W, Ag, and/or Al.
  • A metal film can be formed utilizing any well known deposition process including, for example, evaporation, chemical solution deposition, chemical vapor deposition, and sputtering. An array of metal dots can be formed by first depositing a metal and then patterning the same by photolithography and etching. Alternatively, an array of metal dots can be formed by deposition of a metal precursor through a mask which contains a preconfigured pattern formed therein.
  • In one embodiment of the present disclosure, the layer of work function modifying material 14 can have a thickness from 1 nm to 5 nm. The layer of work function modifying material 14 can have other thicknesses that are above and/or below the range mentioned above.
  • Referring to FIG. 5, there is illustrated the structure of FIG. 3 after forming a layer of an electroluminescent material 24 above the transparent conductive electrode stack containing elements 12 and 14. The layer of electroluminescent material 24 that is employed in the present disclosure includes any organic material or multilayered stack of organic materials including, for example, organometallic chelates, conductive polymers, fluorescent dyes, phosphorescent dyes and conjugated dendrimers, that emits light in response to an electric current. Examples of organic materials that can be used as the electroluminescent material 24 include, but are not limited to, poly(p-phenylenvinylene) (PPV), poly(naphthalene vinylenes) (PNVs), tris(2-phenyl pyridine)iridium (Ir(ppy)3), and tris (8-oxychinolinato) aluminum (Alq3).
  • The layer of electroluminescent material 24 can be formed by conventional techniques including, for example, spin-on coating, dip coating, immersion, and chemical vapor deposition. Typically, and in one embodiment, the thickness of the layer of electroluminescent material 24 ranges from a few nm to a few hundred nm. Other thicknesses, including those above and/or below the aforementioned range can also be employed.
  • Referring now to FIG. 6, there is illustrated the structure of FIG. 5 after formation of a layer of a cathode material 26 on an exposed surface of the layer of electroluminescent material 24. The layer of cathode material 26 can serve as an upper electrode of the OLED of the present disclosure. The layer of cathode material 26 that is employed in the present disclosure includes a material or a multilayered stack of materials having a lower work function than the transparent conductive electrode stack of the present disclosure. In one embodiment of the present disclosure, the layer of cathode material 26 can be comprised of aluminum (Al), calcium (Ca) and/or magnesium (Mg). In some embodiments, the layer of cathode material 26 may comprise a stack of LiF and Al.
  • The layer of cathode material 26 can be formed utilizing any deposition process including for example, thermal evaporation and sputtering. In some embodiments, the deposition process is performed through a shadow mask. Typically, and in one embodiment, the thickness of the layer of cathode material 26 ranges from 20 nm to 100 nm. Other thicknesses, including those above and/or below the aforementioned range can also be employed.
  • The transparent conductive electrode stack of the present disclosure which comprises a combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 is typically less toxic than a conventional ITO transparent conductive electrode. Also, transparent conductive electrode stacks comprised of the combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 are less expensive to fabricate than are their ITO counterparts. Further, transparent conductive electrode stacks comprised of the combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 are typically flexible and thus can be used in a wide variety of display and lighting applications. Furthermore, transparent conductive electrode stacks comprised of the combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 typically have a higher mechanical strength than their ITO counterpart electrodes. Moreover, the transparent conductive electrode stacks comprised of combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 are chemically stable. By “chemically stable” it is meant that the carbon-containing material 12 can endure processing steps which include a strong acid, base, and solvent, and maintain its structural integrity.
  • When used as a component of an OLED device, the transparent conductive electrode stacks comprised of the combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 can provide an OLED device that has electrical properties that are similar to, and in some embodiments, slightly improved as compared with, an OLED device containing a conventional ITO electrode.
  • In some embodiments, the transparent conductive electrode stacks comprised of the combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 can provide an OLED device that has a same or slightly higher quantum efficiency as compared to an OLED device containing a conventional ITO electrode. In some cases, the transparent conductive electrode stacks comprised of the combination of the layer of carbon-containing material 12 and the layer of work function modifying material 14 can provide an OLED device that has a same quantum efficiency as compared to an OLED device containing a conventional ITO electrode. The external quantum efficiency without any out coupling scheme is more than 20%.
  • While the present disclosure has been particularly shown and described with respect to preferred embodiments thereof, it will be understood by those skilled in the art that the foregoing and other changes in forms and details may be made without departing from the spirit and scope of the present disclosure. It is therefore intended that the present disclosure not be limited to the exact forms and details described and illustrated, but fall within the scope of the appended claims.

Claims (24)

1. A transparent conductive electrode stack comprising:
a layer of a carbon-containing material comprising a planar sheet of graphene; and
a layer of a work function modifying material located on an exposed surface of the layer of the carbon-containing material.
2.-3. (canceled)
4. The transparent conductive electrode of claim 1, wherein said layer of work function modifying material comprises at least one of a metal oxide, a conductive polymer, a metal, and an array of metal dots.
5. The transparent conductive electrode of claim 1, wherein said layer of work function modifying material comprises a metal oxide selected from the group consisting of MoO3, W2O5, Al2O3, V2O5 and combinations or multilayers thereof.
6. The transparent conductive electrode of claim 1, wherein said layer of work function modifying material comprises a conductive polymer selected from aromatic compounds containing no heteroatoms, aromatic compounds containing a nitrogen heteroatom, aromatic compounds containing a sulfur heteroatom, polymeric compounds containing double bonds and/or aromatic compounds that also contain double bonds.
7. The transparent conductive electrode of claim 6, wherein said conductive polymer is a polyaniline or poly(3,4-ethylenedioxythiophene)poly(styrenesulfonate).
8. The transparent conductive electrode of claim 1, wherein said layer of work function modifying material comprises a metal film or an array of metal dots, wherein said metal film and said array of metal dots includes as a metal one of Au, Pd, Pt, W, Ag, and Al.
9. The transparent conductive electrode of claim 1, wherein said layer of work function modifying material is located above said layer of carbon-containing material.
10. An organic light emitting diode (OLED) device comprising:
a substrate;
a transparent conductive electrode stack located on an exposed surface of the substrate;
a layer of electroluminescent material located above the transparent conductive electrode stack;
a layer of a cathode material located on an exposed surface of the layer of electroluminescent material, wherein said transparent conductive electrode stack comprises a layer of a carbon-containing material comprising a planar sheet of graphene, and a layer of a work function modifying material located on an exposed surface of the layer of carbon-containing material.
11. The OLED device of claim 10, wherein said substrate is transparent and is comprised of glass or a plastic.
12.-13. (canceled)
14. The OLED device of claim 10, wherein said layer of work function modifying material comprises at least one of a metal oxide, a conductive polymer, a metal, and an array of metal dots.
15. The OLED device of claim 10, wherein said layer of work function modifying material comprises a metal oxide selected from the group consisting of MoO3, W2O5, Al2O3, V2O5 and combinations or multilayers thereof.
16. The OLED device of claim 10, wherein said wherein said layer of work function modifying material comprises a conductive polymer selected from aromatic compounds containing no heteroatoms, aromatic compounds containing a nitrogen heteroatom, aromatic compounds containing a sulfur heteroatom, polymeric compounds containing double bonds and/or aromatic compounds that also contain double bonds.
17. The OLED device of claim 16, wherein said conductive polymer is a polyaniline or poly(3,4-ethylenedioxythiophene)poly(styrenesulfonate).
18. The OLED device of claim 10, wherein said layer of work function modifying material comprises a metal film or an array of metal dots, wherein said metal film and said array of metal dots includes as a metal one of Au, Pd, Pt, W, Ag, and Al.
19. The OLED device of claim 18, wherein said layer of work function modifying material is located above said layer of carbon-containing material.
20. The OLED device of claim 10, wherein said layer of electroluminescent material is selected from the group consisting of polyp-phenylenvinylene) (PPV), poly(naphthalene vinylenes) (PNVs), tris(2-phenyl pyridine)iridium (Ir(ppy)3), and tris (8-oxychinolinato) aluminum (Alq3).
21. The OLED device of claim 10, wherein said layer of cathode material comprises aluminum (Al), calcium (Ca), magnesium (Mg) or a combination thereof.
22. The OLED device of claim 10, wherein said layer of cathode material comprises a stack of LiF and Al.
23. The transparent conductive electrode stack of claim 1, wherein said planar sheet of graphene contacts an entirety surface of said layer of said work function modifying material.
24. The transparent conductive electrode stack of claim 1, wherein said planar sheet of graphene contains four entirely vertical sidewalls, an entirely planar top surface and an entirely planar bottom surface.
25. The OLED device of claim 10, wherein said planar sheet of graphene contacts an entirety surface of said layer of said work function modifying material.
26. The OLED device of claim 10, wherein said planar sheet of graphene contains four entirely vertical sidewalls, an entirely planar top surface and an entirely planar bottom surface.
US13/626,418 2012-09-25 2012-09-25 Transparent conductive electrode stack containing carbon-containing material Abandoned US20140084253A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US13/626,418 US20140084253A1 (en) 2012-09-25 2012-09-25 Transparent conductive electrode stack containing carbon-containing material
US13/660,604 US8741678B2 (en) 2012-09-25 2012-10-25 Transparent conductive electrode stack containing carbon-containing material
US14/170,708 US8969115B2 (en) 2012-09-25 2014-02-03 Transparent conductive electrode stack containing carbon-containing material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/626,418 US20140084253A1 (en) 2012-09-25 2012-09-25 Transparent conductive electrode stack containing carbon-containing material

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US13/660,604 Continuation US8741678B2 (en) 2012-09-25 2012-10-25 Transparent conductive electrode stack containing carbon-containing material
US13/660,604 Continuation-In-Part US8741678B2 (en) 2012-09-25 2012-10-25 Transparent conductive electrode stack containing carbon-containing material

Publications (1)

Publication Number Publication Date
US20140084253A1 true US20140084253A1 (en) 2014-03-27

Family

ID=50337978

Family Applications (3)

Application Number Title Priority Date Filing Date
US13/626,418 Abandoned US20140084253A1 (en) 2012-09-25 2012-09-25 Transparent conductive electrode stack containing carbon-containing material
US13/660,604 Active 2032-10-27 US8741678B2 (en) 2012-09-25 2012-10-25 Transparent conductive electrode stack containing carbon-containing material
US14/170,708 Expired - Fee Related US8969115B2 (en) 2012-09-25 2014-02-03 Transparent conductive electrode stack containing carbon-containing material

Family Applications After (2)

Application Number Title Priority Date Filing Date
US13/660,604 Active 2032-10-27 US8741678B2 (en) 2012-09-25 2012-10-25 Transparent conductive electrode stack containing carbon-containing material
US14/170,708 Expired - Fee Related US8969115B2 (en) 2012-09-25 2014-02-03 Transparent conductive electrode stack containing carbon-containing material

Country Status (1)

Country Link
US (3) US20140084253A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8969115B2 (en) * 2012-09-25 2015-03-03 International Business Machines Corporation Transparent conductive electrode stack containing carbon-containing material
US11173478B2 (en) * 2019-01-25 2021-11-16 Tsinghua University Photocatalytic structure and method for making the same

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2995136B1 (en) * 2012-09-04 2015-06-26 Soitec Silicon On Insulator PSEUDO-SUBSTRATE WITH IMPROVED EFFICIENCY OF USE OF MONOCRYSTALLINE MATERIAL
US10020300B2 (en) 2014-12-18 2018-07-10 Agilome, Inc. Graphene FET devices, systems, and methods of using the same for sequencing nucleic acids
US9618474B2 (en) 2014-12-18 2017-04-11 Edico Genome, Inc. Graphene FET devices, systems, and methods of using the same for sequencing nucleic acids
US9859394B2 (en) 2014-12-18 2018-01-02 Agilome, Inc. Graphene FET devices, systems, and methods of using the same for sequencing nucleic acids
US9857328B2 (en) 2014-12-18 2018-01-02 Agilome, Inc. Chemically-sensitive field effect transistors, systems and methods for manufacturing and using the same
WO2016100049A1 (en) 2014-12-18 2016-06-23 Edico Genome Corporation Chemically-sensitive field effect transistor
US10006910B2 (en) 2014-12-18 2018-06-26 Agilome, Inc. Chemically-sensitive field effect transistors, systems, and methods for manufacturing and using the same
WO2017201081A1 (en) 2016-05-16 2017-11-23 Agilome, Inc. Graphene fet devices, systems, and methods of using the same for sequencing nucleic acids

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070134510A1 (en) * 2003-12-05 2007-06-14 Horst Vestweber Organic electroluminescent element

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100573783C (en) * 2006-04-05 2009-12-23 清华大学 The manufacture method of carbon nano tube field transmitting electronic source
KR20110061245A (en) * 2009-12-01 2011-06-09 삼성전자주식회사 Organic light emitting device using graphene
KR101758649B1 (en) * 2010-03-31 2017-07-18 삼성전자주식회사 Method of manufacturing graphene using germanium layer
KR20130098884A (en) * 2010-05-05 2013-09-05 내셔널 유니버시티 오브 싱가포르 Hole doping of graphene
TW201211302A (en) * 2010-06-10 2012-03-16 Applied Materials Inc Graphene deposition
US9162883B2 (en) 2010-09-01 2015-10-20 International Business Machines Corporation Doped carbon nanotubes and transparent conducting films containing the same
US20140084253A1 (en) * 2012-09-25 2014-03-27 International Business Machines Corporation Transparent conductive electrode stack containing carbon-containing material

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070134510A1 (en) * 2003-12-05 2007-06-14 Horst Vestweber Organic electroluminescent element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8969115B2 (en) * 2012-09-25 2015-03-03 International Business Machines Corporation Transparent conductive electrode stack containing carbon-containing material
US11173478B2 (en) * 2019-01-25 2021-11-16 Tsinghua University Photocatalytic structure and method for making the same
US11602741B2 (en) 2019-01-25 2023-03-14 Tsinghua University Method for making photocatalytic structure

Also Published As

Publication number Publication date
US20140179045A1 (en) 2014-06-26
US20140087500A1 (en) 2014-03-27
US8969115B2 (en) 2015-03-03
US8741678B2 (en) 2014-06-03

Similar Documents

Publication Publication Date Title
US8969115B2 (en) Transparent conductive electrode stack containing carbon-containing material
US20140084252A1 (en) Doped graphene transparent conductive electrode
Lin et al. High‐performance quantum‐dot light‐emitting diodes using NiOx hole‐injection layers with a high and stable work function
Hu et al. Flexible organic light-emitting diodes with transparent carbon nanotube electrodes: problems and solutions
US7301167B2 (en) Organic light emitting devices and electroluminescent display panel applying the same
JP6305997B2 (en) Organic electroluminescence device
JP5679565B2 (en) Transparent conductive film, substrate with transparent conductive film, and organic electroluminescence device using the same
JP2010515205A (en) Organic optoelectronic device electrodes using nanotubes
US20060152147A1 (en) Electroluminescent device and method for preparing the same
Han et al. Flexible transparent electrodes for organic light-emitting diodes
Yao et al. Fully transparent quantum dot light-emitting diode with a laminated top graphene anode
KR20130074815A (en) All solution processible light-emitting device
JP2011522391A (en) Organic electroluminescence device
CN103682152A (en) Transparent conductive electrode and forming method therefor, organic light emitting diode (OLED) device and forming method therefor
Meng et al. Top‐emission organic light‐emitting diode with a novel copper/graphene composite anode
Lu et al. ITO-free organic light-emitting diodes with MoO3/Al/MoO3 as semitransparent anode fabricated using thermal deposition method
KR20130134636A (en) Organic light emitting diode device including graphene layer and graphene supporting layer
Huh et al. Characteristics of organic light-emitting diodes with conducting polymer anodes on plastic substrates
US8791487B2 (en) Zinc oxide-containing transparent conductive electrode
Lee et al. Solution processible MoOx-incorporated graphene anode for efficient polymer light-emitting diodes
Moon et al. Large area organic light emitting diodes with multilayered graphene anodes
JP2009301885A (en) Multi-unit type organic el element, and method for manufacturing the same
JP6663142B2 (en) Organic electroluminescent device
Lee et al. The Role of the Bottom Oxide Layer in Oxide‐Metal‐Oxide (OMO) Electrode for Stretchable Organic Light‐Emitting Diodes
JP2014165316A (en) Light-emitting element employing carbon nano-tube and light-emitting element also used as carbon nano-tube thin film transistor

Legal Events

Date Code Title Description
AS Assignment

Owner name: INTERNATIONAL BUSINESS MACHINES CORPORATION, NEW Y

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:CHEN, TZE-CHIANG;HANNON, JAMES B.;LI, NING;AND OTHERS;REEL/FRAME:029022/0826

Effective date: 20120924

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION

AS Assignment

Owner name: GLOBALFOUNDRIES U.S. 2 LLC, NEW YORK

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:INTERNATIONAL BUSINESS MACHINES CORPORATION;REEL/FRAME:036550/0001

Effective date: 20150629

AS Assignment

Owner name: GLOBALFOUNDRIES INC., CAYMAN ISLANDS

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:GLOBALFOUNDRIES U.S. 2 LLC;GLOBALFOUNDRIES U.S. INC.;REEL/FRAME:036779/0001

Effective date: 20150910