US20120196393A1 - Packaging method of wafer level chips - Google Patents
Packaging method of wafer level chips Download PDFInfo
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- US20120196393A1 US20120196393A1 US13/166,167 US201113166167A US2012196393A1 US 20120196393 A1 US20120196393 A1 US 20120196393A1 US 201113166167 A US201113166167 A US 201113166167A US 2012196393 A1 US2012196393 A1 US 2012196393A1
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- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
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- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
Definitions
- the present invention generally relates to a packaging method. More particularly, the present invention relates to a packaging method of wafer level chips.
- a light emitting diode (LED) is not only able to significantly reduce power consumption, but also has longer lifetimes, faster response speed, compact size, lower maintenance cost and grater reliability. Accordingly, the LED has become an indispensable element in the modern life, especially in the electronic, communication, and consumer products fields.
- FIG. 1A to FIG. 1E are cross-sectional views showing conventional packaging steps of an LED chip. Please refer to FIG. 1A to FIG. 1E .
- a substrate 110 is provided, and the substrate 110 has a plurality of electrodes 112 a and 112 b on which a plurality of LED dies to be respectively disposed so as to form a plurality of LED chips.
- one LED die 120 of the LED dies to be disposed is first bonded on the electrode 112 b of the substrate 110 .
- the LED die 120 on the electrode 112 b is electrically connected to the electrode 112 a through a wire bonding.
- the LED die 120 on the electrode 112 b is electrically connected to the electrode 112 a through a bonding wire 130 .
- a fluorescent layer 140 is forming on the LED die 120 .
- a packaging gel 150 is provided to cover the LED die 120 and corresponding electrodes 112 a and 112 b , and thus one LED chip 100 of the LED chips is fabricated.
- merely one LED chip 100 can be manufactured by each run.
- each of the packaging steps needs to be performed one thousand times, and therefore the conventional packaging process of the LED chips is a rather time consuming and tedious process and it is not quite cost effective.
- the present invention is directed to a packaging method of wafer level chips which is capable of reducing packaging time and manufacturing cost, and thus improves manufacturing efficiency.
- the present invention provides a packaging method of wafer level chips.
- the packaging method of wafer level chips includes following steps. First, a plurality of chips attached on a first film is provided. Herein, the chips on the first film are disposed respectively corresponding to a plurality of electrode patterns of a substrate, and a base surface of each of the chips is contacted with the first film. Next, a phosphor layer is respectively formed on at least one surface of each of the chips. Then, a second film is disposed on the phosphor layers, and the second film is opposite to the first film. Further, the first film is removed from the base surface of each of the chips. Next, the base surfaces of the chips are attached to the substrate. Afterward, each of the chips is electrically connected with the corresponding electrode pattern through a wire bonding. Finally, a packaging gel is provided to cover each of the chips, and the packaging gel is solidified.
- the packaging method of wafer level chips further includes removing the second film before electrically connecting each of the chips with the corresponding electrode pattern by the wire bonding.
- the attaching step includes disposing an attaching material on the base surfaces to make that the base surfaces being attached to the substrate through the attaching material.
- the attaching step further includes a reflow process to reflow the attaching material between the base surfaces and the substrate.
- the phosphor layer is formed through a coating process which comprises a spin-coating method, a printing technique, a scraper method, a screen printing method, a spraying method, an electrophoresis deposit method, a evaporation method or a sputter process.
- the attaching step further includes baking the attaching material between the base surfaces and the substrate.
- the attaching material is a solder paste, a silver glue or a eutectoid material.
- each of the chips includes a bump and a die, and the bump is disposed between the phosphor layer and the die.
- the bump of each of the chips is electrically connected with the corresponding electrode through the wire bonding.
- the first film and the second film are blue tapes.
- the substrate is a silicon substrate, a ceramic substrate or a substrate formed by a resin injection method.
- the chip is a light emitting diode chip.
- the packaging method of the wafer level chips is capable of reducing packaging time and manufacturing cost, and thus improves manufacturing efficiency.
- FIG. 1A to FIG. 1E are cross-sectional views showing conventional packaging steps of an LED chip.
- FIG. 2A to FIG. 2H are cross-sectional views showing packaging steps of the wafer level chips according to an embodiment of the present invention.
- FIG. 3 is a flow chart illustrating the packaging steps depicted in FIG. 2A to FIG. 2H .
- FIG. 2A to FIG. 2H are cross-sectional views showing packaging steps of wafer level chips according to an embodiment of the present invention.
- FIG. 3 is a flow chart illustrating the packaging steps depicted in FIG. 2A to FIG. 2H . Please refer to FIG. 2A to FIG. 2H and FIG. 3 .
- a plurality of chips 210 attached on a first film 220 a is provided, wherein the chips 210 on the first film 220 a are disposed respectively corresponding to a plurality of electrode patterns 232 of a substrate 230 , and a base surface S 1 of each of the chips 210 are contacted with the first film 220 a (step S 110 ).
- step S 110 a base surface S 1 of each of the chips 210 are contacted with the first film 220 a
- each of the chips 210 includes at least one bump 212 (two are schematically shown) and a die 214 which is a light emitting diode (LED) die, for example.
- the substrate 230 is a silicon substrate, a ceramic substrate or a substrate formed by a resin injection method, while the invention is not limited thereto.
- the first film 220 a of the embodiment is, for example, a blue tape.
- the chips 210 are wafer level chips.
- the chips 210 on the first film 220 a are, for example, LED chips, and have been classified based on their individual optical and electrical property (e.g. the emission wavelength, voltage, or radiant flux).
- a phosphor layer 240 is formed on at least one surface of each of the chips 210 (step S 120 ).
- the phosphor layer 240 may be formed on the surfaces of each of the chips 210 expect the base surfaces 51 thereof through a coating process, and the coating process of the embodiment may be a spin-coating method, a printing technique, a scraper method, a screen printing method, a spraying method, an electrophoresis deposit method, a evaporation method or a sputter process.
- the bumps 212 are disposed between the phosphor layer 240 and the die 214 .
- the bumps 212 are, for example, gold (Au) balls or aluminum (A 1 ) balls for chip package, while the invention is not limited thereto.
- a second film 220 b is disposed on the phosphor layers 240 , and the second film 220 b is opposite to the first film 220 a (step S 130 ).
- the second film 220 b is above the first film 220 a
- the second film 220 b is, for example, a blue tape.
- the first film 220 a is removed from the base surface S 1 of each of the chips 210 (step S 140 ). Specifically, from FIG. 2C to FIG. 2D , the structure of the chips 210 between the first film 220 a and the second film 220 b originally in FIG.
- the first film 220 a of FIG. 2C is removed from the base surface S 1 of each of the chips 210 to form the structure shown in FIG. 2D from FIG. 2C .
- the attaching step may include disposing an attaching material 250 on the base surfaces S 1 to make that the base surfaces S 1 being attached to the substrate 230 through the attaching material 250 .
- the attaching step may be performed under high temperature (e.g. from 150 degrees Celsius to 280 degrees Celsius), so that the chips 210 can be firmly attached to the substrate 230 .
- the attaching material 250 of the embodiment may be a solder paste, a silver glue, or a eutectoid reaction and the attaching step may further include reflow process to reflow the attaching material 250 between the base surfaces S 1 and the substrate 230 .
- the attaching material 250 is between the base surfaces S 1 and the substrate 230 .
- the attaching material 250 may be a silver paste, and the attaching step may further include baking the attaching material 250 between the base surfaces S 1 and the carriage 230 .
- the attaching material 230 may be a eutectic material, and the attaching step may further include heating the eutectic material.
- each of the chips 210 is electrically connected with the corresponding electrode pattern 232 through a wire bonding (step S 160 ).
- each of the chips 210 is electrically connected with the corresponding electrode pattern 232 through a bonding wire 260 .
- the structure originally shown in FIG. 2F may be flipped so that the chips 210 are above the substrate 230 , and the second film 220 b original in FIG. 2F is removed.
- the bumps 212 is electrically connected with the electrode pattern 232 through the bumps 212 and the bonding wire 260
- the bonding wire 260 is, for example, a gold line, an aluminum steel, or a metal wire.
- a packaging gel 270 is provided to encompass the chips 210 , and the packaging gel is, solidified (step S 170 ).
- the package gel 270 encompasses the chips 210 , the bonding wire 260 and the electrode patterns 232 .
- the packaging process of the wafer level chips i.e. the chips 210
- the packaging method of the embodiment is much faster than the conventional packaging method when a plurality of wafer level chips requires to be packaging.
- the newly provided packaging method of the wafer level chips significantly and effectively reduces the packaging time and manufacturing cost and thus improves manufacturing efficiency.
- the packaging method of the embodiment of the invention a plurality of chips respectively disposed corresponding to a plurality of electrode patterns are processed in each one step, and thus the packaging method is much faster than the conventional package method in which merely one die can be process during each step. Therefore, the newly provided packaging method significantly and effectively reduces the packing time and manufacturing cost and facilities for packaging on a massive scale.
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Abstract
A packaging method of wafer level chips including following steps is provided. First, a plurality of chips attached on a first film is provided, and the chips on the first film are disposed respectively corresponding to a plurality of electrode patterns of a substrate. Then, a phosphor layer is respectively formed on at least one surface of each of the chips. Next, a second film is disposed on the phosphor layers, and the second film is opposite to the first film. Further, the first film is removed from the base surface of each of the chips. Then, the base surfaces of the chips are attached to the substrate. Afterward, each of the chips is electrically connected with the corresponding electrode pattern through a wire bonding. Finally, a packaging gel is provided to cover each of the chips, and the packaging gel is solidified.
Description
- This application claims the priority benefits of U.S. provisional application Ser. No. 61/436,605, filed on Jan. 27, 2011. The entirety of the above-mentioned patent application is hereby incorporated by reference herein and made a part of this specification.
- 1. Field of the Invention
- The present invention generally relates to a packaging method. More particularly, the present invention relates to a packaging method of wafer level chips.
- 2. Description of Related Art
- Nowadays, compared to other light source such as incandescence, a light emitting diode (LED) is not only able to significantly reduce power consumption, but also has longer lifetimes, faster response speed, compact size, lower maintenance cost and grater reliability. Accordingly, the LED has become an indispensable element in the modern life, especially in the electronic, communication, and consumer products fields.
-
FIG. 1A toFIG. 1E are cross-sectional views showing conventional packaging steps of an LED chip. Please refer toFIG. 1A toFIG. 1E . First, as shown inFIG. 1A , asubstrate 110 is provided, and thesubstrate 110 has a plurality ofelectrodes FIG. 1B , one LED die 120 of the LED dies to be disposed is first bonded on theelectrode 112 b of thesubstrate 110. After that, as shown inFIG. 1C , theLED die 120 on theelectrode 112 b is electrically connected to theelectrode 112 a through a wire bonding. For example, theLED die 120 on theelectrode 112 b is electrically connected to theelectrode 112 a through abonding wire 130. Then, referring toFIG. 1D , afluorescent layer 140 is forming on the LED die 120. Finally, apackaging gel 150 is provided to cover theLED die 120 andcorresponding electrodes LED chip 100 of the LED chips is fabricated. However, during the conventional packaging steps depicted fromFIG. 1A toFIG. 1E , merely oneLED chip 100 can be manufactured by each run. Thus, to fabricate one thousandLED chips 100, each of the packaging steps needs to be performed one thousand times, and therefore the conventional packaging process of the LED chips is a rather time consuming and tedious process and it is not quite cost effective. - Accordingly, the present invention is directed to a packaging method of wafer level chips which is capable of reducing packaging time and manufacturing cost, and thus improves manufacturing efficiency.
- As embodied and broadly described herein, the present invention provides a packaging method of wafer level chips. The packaging method of wafer level chips includes following steps. First, a plurality of chips attached on a first film is provided. Herein, the chips on the first film are disposed respectively corresponding to a plurality of electrode patterns of a substrate, and a base surface of each of the chips is contacted with the first film. Next, a phosphor layer is respectively formed on at least one surface of each of the chips. Then, a second film is disposed on the phosphor layers, and the second film is opposite to the first film. Further, the first film is removed from the base surface of each of the chips. Next, the base surfaces of the chips are attached to the substrate. Afterward, each of the chips is electrically connected with the corresponding electrode pattern through a wire bonding. Finally, a packaging gel is provided to cover each of the chips, and the packaging gel is solidified.
- According to an embodiment of the present invention, the packaging method of wafer level chips further includes removing the second film before electrically connecting each of the chips with the corresponding electrode pattern by the wire bonding.
- According to an embodiment of the present invention, the attaching step includes disposing an attaching material on the base surfaces to make that the base surfaces being attached to the substrate through the attaching material.
- According to an embodiment of the present invention, the attaching step further includes a reflow process to reflow the attaching material between the base surfaces and the substrate.
- According to an embodiment of the present invention, the phosphor layer is formed through a coating process which comprises a spin-coating method, a printing technique, a scraper method, a screen printing method, a spraying method, an electrophoresis deposit method, a evaporation method or a sputter process.
- According to an embodiment of the present invention, the attaching step further includes baking the attaching material between the base surfaces and the substrate.
- According to an embodiment of the present invention, the attaching material is a solder paste, a silver glue or a eutectoid material.
- According to an embodiment of the present invention, each of the chips includes a bump and a die, and the bump is disposed between the phosphor layer and the die.
- According to an embodiment of the present invention, the bump of each of the chips is electrically connected with the corresponding electrode through the wire bonding.
- According to an embodiment of the present invention, the first film and the second film are blue tapes.
- According to an embodiment of the present invention, the substrate is a silicon substrate, a ceramic substrate or a substrate formed by a resin injection method.
- According to an embodiment of the present invention, the chip is a light emitting diode chip.
- According to the above descriptions, since a plurality of chips respectively disposed corresponding to a plurality of electrode patterns of the substrate are processed in each one step, the packaging method of the wafer level chips is capable of reducing packaging time and manufacturing cost, and thus improves manufacturing efficiency.
- In order to make the above features and advantages of the present invention comprehensible, embodiments are described in detail below with the accompanying drawings.
- The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.
-
FIG. 1A toFIG. 1E are cross-sectional views showing conventional packaging steps of an LED chip. -
FIG. 2A toFIG. 2H are cross-sectional views showing packaging steps of the wafer level chips according to an embodiment of the present invention. -
FIG. 3 is a flow chart illustrating the packaging steps depicted inFIG. 2A toFIG. 2H . - Reference will now be made in detail to the present preferred embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers are used in the drawings and the description to refer to the same or like parts.
- The figures are not drawn to scale and they are provided merely to illustrate the present invention. Several aspects of the invention are described below with reference to example applications for illustration. It should be understood that numerous specific details, relationships and methods are set forth to provide a full understanding of the invention. The present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. For example, the present invention can be embodied as a method or a system.
-
FIG. 2A toFIG. 2H are cross-sectional views showing packaging steps of wafer level chips according to an embodiment of the present invention.FIG. 3 is a flow chart illustrating the packaging steps depicted inFIG. 2A toFIG. 2H . Please refer toFIG. 2A toFIG. 2H andFIG. 3 . First, as shown inFIG. 2A , a plurality ofchips 210 attached on afirst film 220 a is provided, wherein thechips 210 on thefirst film 220 a are disposed respectively corresponding to a plurality ofelectrode patterns 232 of asubstrate 230, and a base surface S1 of each of thechips 210 are contacted with thefirst film 220 a (step S110). Further, as shown inFIG. 2A , each of thechips 210 includes at least one bump 212 (two are schematically shown) and adie 214 which is a light emitting diode (LED) die, for example. Herein, thesubstrate 230 is a silicon substrate, a ceramic substrate or a substrate formed by a resin injection method, while the invention is not limited thereto. Moreover, thefirst film 220 a of the embodiment is, for example, a blue tape. In the embodiment, thechips 210 are wafer level chips. Furthermore, thechips 210 on thefirst film 220 a are, for example, LED chips, and have been classified based on their individual optical and electrical property (e.g. the emission wavelength, voltage, or radiant flux). - Then, as shown in
FIG. 2B , aphosphor layer 240 is formed on at least one surface of each of the chips 210 (step S120). In detail, thephosphor layer 240 may be formed on the surfaces of each of thechips 210 expect the base surfaces 51 thereof through a coating process, and the coating process of the embodiment may be a spin-coating method, a printing technique, a scraper method, a screen printing method, a spraying method, an electrophoresis deposit method, a evaporation method or a sputter process. In the embodiment, thebumps 212 are disposed between thephosphor layer 240 and thedie 214. Moreover, thebumps 212 are, for example, gold (Au) balls or aluminum (A1) balls for chip package, while the invention is not limited thereto. - After step S120, as shown in
FIG. 2C , asecond film 220 b is disposed on the phosphor layers 240, and thesecond film 220 b is opposite to thefirst film 220 a (step S130). Herein, thesecond film 220 b is above thefirst film 220 a, and thesecond film 220 b is, for example, a blue tape. Then, as shown inFIG. 2D , thefirst film 220 a is removed from the base surface S1 of each of the chips 210 (step S140). Specifically, fromFIG. 2C toFIG. 2D , the structure of thechips 210 between thefirst film 220 a and thesecond film 220 b originally inFIG. 2C may be flipped first, so that thefirst film 220 a is above thesecond film 220 b and between thesubstrate 230 and thechips 210. Further, the position of each of the chips may be slightly adjusted according to the positions of theelectrode patterns 232. Then, thefirst film 220 a ofFIG. 2C is removed from the base surface S1 of each of thechips 210 to form the structure shown inFIG. 2D fromFIG. 2C . - After step S140, as shown in
FIG. 2F , the base surfaces S1 of thechips 210 original inFIG. 2C are attached to the substrate 230 (step S150). Specifically, as shown inFIG. 2E , the attaching step (i.e. step S150) may include disposing an attachingmaterial 250 on the base surfaces S1 to make that the base surfaces S1 being attached to thesubstrate 230 through the attachingmaterial 250. In the embodiment, the attaching step may be performed under high temperature (e.g. from 150 degrees Celsius to 280 degrees Celsius), so that thechips 210 can be firmly attached to thesubstrate 230. For example, the attachingmaterial 250 of the embodiment may be a solder paste, a silver glue, or a eutectoid reaction and the attaching step may further include reflow process to reflow the attachingmaterial 250 between the base surfaces S1 and thesubstrate 230. The attachingmaterial 250 is between the base surfaces S1 and thesubstrate 230. Alternatively, the attachingmaterial 250 may be a silver paste, and the attaching step may further include baking the attachingmaterial 250 between the base surfaces S1 and thecarriage 230. Moreover, in another embodiment, the attachingmaterial 230 may be a eutectic material, and the attaching step may further include heating the eutectic material. - Referring to
FIG. 2G , after thechips 210 are attached to theelectrode patterns 232 of thesubstrate 230, each of thechips 210 is electrically connected with the correspondingelectrode pattern 232 through a wire bonding (step S160). For example, each of thechips 210 is electrically connected with the correspondingelectrode pattern 232 through abonding wire 260. Specifically, the structure originally shown inFIG. 2F may be flipped so that thechips 210 are above thesubstrate 230, and thesecond film 220 b original inFIG. 2F is removed. Then, as shown inFIG. 2G , thebumps 212 is electrically connected with theelectrode pattern 232 through thebumps 212 and thebonding wire 260, and thebonding wire 260 is, for example, a gold line, an aluminum steel, or a metal wire. - Finally, as shown in
FIG. 2H , apackaging gel 270 is provided to encompass thechips 210, and the packaging gel is, solidified (step S170). Herein, thepackage gel 270 encompasses thechips 210, thebonding wire 260 and theelectrode patterns 232. In this way, the packaging process of the wafer level chips (i.e. the chips 210) is completed. It should be noted that, since a plurality ofchips 210 are processed during each step (i.e. step S110 to step S170), a great number ofchips 210 can be packaged by each run of the packaging process as described above. Thus, the packaging method of the embodiment is much faster than the conventional packaging method when a plurality of wafer level chips requires to be packaging. Thus, the newly provided packaging method of the wafer level chips significantly and effectively reduces the packaging time and manufacturing cost and thus improves manufacturing efficiency. - Based on the above, through the packaging method of the embodiment of the invention, a plurality of chips respectively disposed corresponding to a plurality of electrode patterns are processed in each one step, and thus the packaging method is much faster than the conventional package method in which merely one die can be process during each step. Therefore, the newly provided packaging method significantly and effectively reduces the packing time and manufacturing cost and facilities for packaging on a massive scale.
- It will be apparent to those skilled in the art that various modifications and variations can be made to the structure of the present invention without departing from the scope or spirit of the invention. In view of the foregoing, it is intended that the present invention cover modifications and variations of this invention provided they fall within the scope of the following claims and their equivalents.
Claims (12)
1. A packaging method of wafer level chips, comprising:
providing a plurality of chips attached on a first film, wherein the chips on the first film are disposed respectively corresponding to a plurality of electrode patterns of a substrate, and a base surface of each of the chips is contacted with the first film;
respectively forming a phosphor layer on at least one surface of each of the chips;
disposing a second film on the phosphor layers, and the second film being opposite to the first film;
removing the first film from the base surface of each of the chips;
attaching the base surfaces of the chips to the substrate;
electrically connecting each of the chips with the corresponding electrode pattern through a wire bonding; and
providing a packaging gel to encompass each of the chips, and solidifying the packaging gel.
2. The packaging method of the wafer level chips according to claim 1 , further comprising removing the second film before electrically connecting each of the chips with the corresponding electrode pattern by the wire bonding.
3. The packaging method of the wafer level chips according to claim 1 , wherein the attaching step comprises disposing an attaching material on the base surfaces to make that the base surfaces being attached to the substrate through the attaching material.
4. The packaging method of the wafer level chips according to claim 3 , wherein the attaching step further comprises a reflow process to reflow the attaching material between the base surfaces and the substrate.
5. The packaging method of the wafer level chips according to claim 1 , wherein the phosphor layer is formed through a coating process which comprises a spin-coating method, a printing technique, a scraper method, a screen printing method, a spraying method, an electrophoresis deposit method, a evaporation method or a sputter process.
6. The packaging method of the wafer level chips according to claim 3 , wherein the attaching step further comprises baking the attaching material between the base surfaces and the substrate.
7. The packaging method of the wafer level chips according to claim 3 , wherein the attaching material is a solder paste, a silver glue or a eutectoid material.
8. The packaging method of the wafer level chips according to claim 1 , wherein each of the chips comprises a bump and a die, and the bump is disposed between the phosphor layer and the die.
9. The packaging method of the wafer level chips according to claim 7 , wherein the bump of each of the chips is electrically connected with the corresponding electrode through the wire bonding.
10. The packaging method of the wafer level chips according to claim 1 , wherein the first film and the second film are blue tapes.
11. The packaging method of the wafer level chips according to claim 1 , wherein the substrate is a silicon substrate, a ceramic substrate or a substrate formed by a resin injection method.
12. The packaging method of the wafer level chips according to claim 1 , wherein the chip is a light emitting diode chip.
Priority Applications (3)
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US13/166,167 US8227271B1 (en) | 2011-01-27 | 2011-06-22 | Packaging method of wafer level chips |
TW100127212A TW201232677A (en) | 2011-01-27 | 2011-08-01 | Packaging method of wafer level chips |
CN2011102612140A CN102623583A (en) | 2011-01-27 | 2011-09-06 | Packaging method of wafer level chips |
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US201161436605P | 2011-01-27 | 2011-01-27 | |
US13/166,167 US8227271B1 (en) | 2011-01-27 | 2011-06-22 | Packaging method of wafer level chips |
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US20120196393A1 true US20120196393A1 (en) | 2012-08-02 |
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US13/166,167 Expired - Fee Related US8227271B1 (en) | 2011-01-27 | 2011-06-22 | Packaging method of wafer level chips |
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KR101881446B1 (en) | 2013-01-25 | 2018-07-24 | 삼성전자주식회사 | Method for manufacturing the light emitting device package |
CN103395571B (en) * | 2013-08-13 | 2016-05-11 | 肇庆爱晟电子科技有限公司 | The packing method of the thermistor chip of arranging based on pallet |
TWI601225B (en) * | 2013-10-07 | 2017-10-01 | 晶元光電股份有限公司 | Light-emitting diode assembly and manufacturing method thereof |
KR101584201B1 (en) | 2014-01-13 | 2016-01-13 | 삼성전자주식회사 | Semiconductor light emitting device |
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TW201232677A (en) | 2012-08-01 |
CN102623583A (en) | 2012-08-01 |
US8227271B1 (en) | 2012-07-24 |
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