US20100303653A1 - Turbomolecular pump - Google Patents

Turbomolecular pump Download PDF

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Publication number
US20100303653A1
US20100303653A1 US12/675,236 US67523608A US2010303653A1 US 20100303653 A1 US20100303653 A1 US 20100303653A1 US 67523608 A US67523608 A US 67523608A US 2010303653 A1 US2010303653 A1 US 2010303653A1
Authority
US
United States
Prior art keywords
turbomolecular pump
housing
circumference
vibration ring
rotating bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/675,236
Other languages
English (en)
Inventor
Rainer Hoelzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Assigned to OERLIKON LEYBOLD VACUUM GMBH reassignment OERLIKON LEYBOLD VACUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HOELZER, RAINER
Publication of US20100303653A1 publication Critical patent/US20100303653A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/0563—Bearings cartridges
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
    • F16C27/066—Ball or roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Definitions

  • the invention relates to a turbomolecular pump comprising a rotor which is mounted on a housing by means of at least one roller bearing, with the roller bearing being supported on the housing by means of an elastic vibration ring.
  • Turbomolecular pumps are operated at high rotational speeds of more than 10,000 rpm. Vibrations in the drive assembly of the turbomolecular pump and particularly in the bearings may generate heat, resulting in the possible occurrence of sudden and fast increases of temperature both during permanent operation at a constant rotational speed and during a drop or rise of the rotational speed. Such increases of temperature will cause mechanical stress in the involved component parts and thus will considerably reduce the operating life of the roller bearing and respectively the plurality of roller bearings.
  • turbomolecular pumps it is common practice to support the roller bearings in vibration rings for elastic suspension of the roller bearing within narrow limits relative to the housing. Thereby, it is rendered possible to operate the turbomolecular pump above the second-order rigid-body resonance frequency of the rotor and to keep the bearing forces low when running through the critical rotational speeds as well as during operation at the nominal rotational speed.
  • vibration rings use is made of rings of round section, rectangular rings or rings of other geometric cross sections.
  • known vibration rings are of a homogeneous nature throughout their circumference. This makes it possible to design a vibratory system wherein the non-rotating bearing shell of the roller bearing will serve as a vibratory mass, and the bearing stiffness and the stiffness of the vibration ring will function as a spring.
  • the non-rotating bearing shell may happen to perform a movement that is independent from the rotating bearing shell and the housing, thus generating considerable quantities of heat energy.
  • the anisotropic vibration ring and respectively the anisotropy of the ring can be technically realized in various manners.
  • the vibration ring is formed in one piece, and its outer shape is anisotropic along the circumference, i.e. the shape is not invariably constant or regular but is irregular.
  • the vibration ring can comprise e.g. a plurality of radial support sites distributed irregularly along the circumference. In this arrangement, the distance from a support site to its neighboring support site towards one side is unequal to the distance to the neighboring support site on the other side.
  • a support site is to be understood herein as a site on the vibration ring where the non-rotating bearing shell is directly fastened and supported relative to the housing.
  • the length of a support site in the circumferential direction can be varied, which holds true also for the mutual distance of the non-supporting regions between the support sites.
  • the vibration ring is formed by an elastic body which preferably consists of an elastomer, wherein said body is continuously closed on the housing side and on the bearing side is interrupted by axial grooves which separate the support sites from each other.
  • an elastic body which preferably consists of an elastomer, wherein said body is continuously closed on the housing side and on the bearing side is interrupted by axial grooves which separate the support sites from each other.
  • the vibration ring can be made of different materials distributed along the circumference and having different vibration and damping properties.
  • Such a vibration ring can have an identical cross section along its whole circumference while, however, due to the different materials along the circumference with their different vibration and damping properties, the vibration ring has an inhomogeneous and respectively anisotropic design with regard to these properties.
  • the vibration ring can also consist e.g. of a helical coil which is made of a uniform spring wire and, depending on the varying pitch, has locally different vibration and damping properties.
  • the FIGURE is a schematic cross-sectional view of a turbomolecular pump comprising a rotor which is supported on the housing by a roller bearing.
  • turbomolecular pump 10 designed for operation at a nominal rotational speed far above 10,000 rpm.
  • Said turbomolecular pump 10 comprises a housing 12 with a roller bearing 16 held thereon by means of a vibration ring 14 , said roller bearing 16 in turn carrying a rotor 18 .
  • Roller bearing 16 comprises an outer non-rotating bearing shell 20 , an inner rotating bearing shell 22 , roller bodies 24 and a roller-body cage 26 .
  • Said vibration ring 14 is formed in one piece of an elastomer and is of an anisotropic form along its circumference.
  • Vibration ring 14 consists of a plastic body 15 which on the housing side is continuously closed along the circumferential direction.
  • Vibration ring 14 comprises eight support sites 30 distributed irregularly along its circumference and formed as support pads facing radially inwardly.
  • Said support sites 30 or support pads 30 are separated from each other by axial grooves 32 of circular cross section. All of said axial grooves 32 have the same width, the same depth and the same shape, but can also be designed differently from each other and particularly have different groove widths, different groove depths and different groove cross-sections.
  • the groove width n of the axial grooves 32 can—but does not have to—be identical for all axial grooves 32 .
  • the support site width s varies along the circumference.
  • the distance a 1 between mutually adjacent support sites 30 towards one side is unequal to the distance a 2 to the adjacent support site on the other side. These distances respectively refer to the center in the circumferential direction of the support sites or pads 30 .

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Support Of The Bearing (AREA)
  • Vibration Prevention Devices (AREA)
  • Mounting Of Bearings Or Others (AREA)
US12/675,236 2007-08-29 2008-08-19 Turbomolecular pump Abandoned US20100303653A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE202007012052U DE202007012052U1 (de) 2007-08-29 2007-08-29 Turbomolekularpumpe
DE202007012052.4 2007-08-29
PCT/EP2008/060854 WO2009027274A1 (de) 2007-08-29 2008-08-19 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
US20100303653A1 true US20100303653A1 (en) 2010-12-02

Family

ID=39884650

Family Applications (1)

Application Number Title Priority Date Filing Date
US12/675,236 Abandoned US20100303653A1 (en) 2007-08-29 2008-08-19 Turbomolecular pump

Country Status (6)

Country Link
US (1) US20100303653A1 (de)
EP (1) EP2181265A1 (de)
JP (1) JP2010537121A (de)
CN (1) CN101796303A (de)
DE (1) DE202007012052U1 (de)
WO (1) WO2009027274A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220243616A1 (en) * 2021-01-29 2022-08-04 Raytheon Technologies Corporation Asymmetry in annular centering spring

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015111049B4 (de) 2015-07-08 2022-10-13 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN108916219B (zh) * 2017-01-23 2020-09-11 诸暨市源浦机械科技有限公司 一种空调压缩机上的深沟球轴承专用的多级减震环
CN108678975A (zh) * 2018-07-17 2018-10-19 中国工程物理研究院机械制造工艺研究所 一种抗振动分子泵

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2101346A (en) * 1935-10-15 1937-12-07 Benjamin C Robertson Ball bearing mounting
US3759626A (en) * 1970-10-23 1973-09-18 Pfeiffer Gmbh A Bearing arrangement for molecular and turbo molecular pumps
US3976340A (en) * 1974-01-23 1976-08-24 Nadella Device for mounting a radial rolling bearing
US4277113A (en) * 1979-10-01 1981-07-07 Mechanical Technology Incorporated Composite material compliant bearing element
US4668108A (en) * 1985-03-22 1987-05-26 General Electric Company Bearing having anisotropic stiffness
US4872767A (en) * 1985-04-03 1989-10-10 General Electric Company Bearing support
US6682219B2 (en) * 2002-04-03 2004-01-27 Honeywell International Inc. Anisotropic support damper for gas turbine bearing
US20060018774A1 (en) * 2004-07-20 2006-01-26 Fausto Casaro Annular support for rolling bearings
US7052183B2 (en) * 2004-06-15 2006-05-30 Honeywell International Inc. Composite resilient mount
US7149281B2 (en) * 2003-04-17 2006-12-12 General Electric Company Method and device for mounting a rotating member
US7243894B2 (en) * 2002-02-15 2007-07-17 3M Innovative Properties Company Mount for vibratory elements
US20080138202A1 (en) * 2006-08-09 2008-06-12 Martin Eilers Arrangement for supporting a shaft of a vacuum pump and a vacuum pump with such an arrangement
US7731426B2 (en) * 2007-04-27 2010-06-08 Honeywell International Inc. Rotor supports and systems
US7857519B2 (en) * 2007-12-07 2010-12-28 Pratt & Whitney Canada Corp. Compact bearing support
US8118570B2 (en) * 2007-10-31 2012-02-21 Honeywell International Inc. Anisotropic bearing supports for turbochargers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT220542B (de) * 1960-08-12 1962-03-26 Ludwig Binder & Co Elastische Lagerung
GB0509190D0 (en) * 2005-05-05 2005-06-15 Boc Group Plc Vacuum pump
GB0511877D0 (en) * 2005-06-10 2005-07-20 Boc Group Plc Vacuum pump

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2101346A (en) * 1935-10-15 1937-12-07 Benjamin C Robertson Ball bearing mounting
US3759626A (en) * 1970-10-23 1973-09-18 Pfeiffer Gmbh A Bearing arrangement for molecular and turbo molecular pumps
US3976340A (en) * 1974-01-23 1976-08-24 Nadella Device for mounting a radial rolling bearing
US4277113A (en) * 1979-10-01 1981-07-07 Mechanical Technology Incorporated Composite material compliant bearing element
US4668108A (en) * 1985-03-22 1987-05-26 General Electric Company Bearing having anisotropic stiffness
US4872767A (en) * 1985-04-03 1989-10-10 General Electric Company Bearing support
US7243894B2 (en) * 2002-02-15 2007-07-17 3M Innovative Properties Company Mount for vibratory elements
US6682219B2 (en) * 2002-04-03 2004-01-27 Honeywell International Inc. Anisotropic support damper for gas turbine bearing
US7149281B2 (en) * 2003-04-17 2006-12-12 General Electric Company Method and device for mounting a rotating member
US7052183B2 (en) * 2004-06-15 2006-05-30 Honeywell International Inc. Composite resilient mount
US20060018774A1 (en) * 2004-07-20 2006-01-26 Fausto Casaro Annular support for rolling bearings
US20080138202A1 (en) * 2006-08-09 2008-06-12 Martin Eilers Arrangement for supporting a shaft of a vacuum pump and a vacuum pump with such an arrangement
US7731426B2 (en) * 2007-04-27 2010-06-08 Honeywell International Inc. Rotor supports and systems
US8118570B2 (en) * 2007-10-31 2012-02-21 Honeywell International Inc. Anisotropic bearing supports for turbochargers
US7857519B2 (en) * 2007-12-07 2010-12-28 Pratt & Whitney Canada Corp. Compact bearing support

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220243616A1 (en) * 2021-01-29 2022-08-04 Raytheon Technologies Corporation Asymmetry in annular centering spring
US11542835B2 (en) * 2021-01-29 2023-01-03 Raytheon Technologies Corporation Asymmetry in annular centering spring

Also Published As

Publication number Publication date
EP2181265A1 (de) 2010-05-05
WO2009027274A1 (de) 2009-03-05
CN101796303A (zh) 2010-08-04
JP2010537121A (ja) 2010-12-02
DE202007012052U1 (de) 2009-01-08

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Legal Events

Date Code Title Description
AS Assignment

Owner name: OERLIKON LEYBOLD VACUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:HOELZER, RAINER;REEL/FRAME:023991/0321

Effective date: 20100212

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION