US20090316750A1 - System and method for reducing temperature variation during burn in - Google Patents
System and method for reducing temperature variation during burn in Download PDFInfo
- Publication number
- US20090316750A1 US20090316750A1 US12/488,379 US48837909A US2009316750A1 US 20090316750 A1 US20090316750 A1 US 20090316750A1 US 48837909 A US48837909 A US 48837909A US 2009316750 A1 US2009316750 A1 US 2009316750A1
- Authority
- US
- United States
- Prior art keywords
- integrated circuit
- temperature
- test
- under test
- ambient temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/42—Circuits effecting compensation of thermal inertia; Circuits for predicting the stationary value of a temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
Definitions
- Embodiments relate to systems and methods for reducing temperature variation during burn in.
- systems and methods for reducing temperature variation during burn-in testing are disclosed.
- power consumed by an integrated circuit under test is measured.
- An ambient temperature associated with the integrated circuit is measured.
- a desired junction temperature of the integrated circuit is achieved by adjusting a body bias voltage of the integrated circuit.
- an ambient temperature in a region proximate to an integrated circuit is measured. Electrical power utilized by the integrated circuit is measured. A thermal resistance value for the integrated circuit is accessed and a junction temperature of the integrated circuit id determined without direct measurement of the junction temperature.
- FIG. 1 illustrates an exemplary arrangement of integrated circuit devices configured for a burn-in operation, in accordance with embodiments.
- FIG. 2 illustrates a flow chart for a computer-implemented method of reducing power during burn in testing, in accordance with embodiments.
- FIG. 3 illustrates an exemplary arrangement of integrated circuit devices configured for a burn-in operation, in accordance with other embodiments.
- FIG. 4 illustrates a flow chart for a computer-implemented method of reducing power during burn in testing, in accordance with embodiments.
- FIG. 5 illustrates a flow chart for a computer-implemented method of determining a junction temperature of an integrated circuit, in accordance with embodiments.
- Embodiments are described in the context of design and operation of integrated semiconductors. More particularly, embodiments relate to systems and methods for reducing temperature variation during burn-in testing of integrated circuits. It is appreciated, however, that elements of embodiments may be utilized in other areas of semiconductor operation.
- embodiments will focus on coupling a body-bias voltage to pFETs (or p-type MOSFETS) formed in surface N-wells via a conductive sub-surface region of N-type doping when a p-type substrate and an N-well process are utilized, embodiments are equally applicable to coupling a body-bias voltage to nFETs (or n-type MOSFETS) formed in surface P-wells via a conductive sub-surface region of P-type doping when an n-type substrate and a P-well process are utilized. Consequently, embodiments are well suited to semiconductors formed in n-type materials, and such embodiments are considered within the scope of the disclosure.
- Burn-in operations to detect integrated circuit defects are generally performed at stressing temperatures, e.g., 150 degrees Celsius, stressing voltages, e.g., 1.5 times nominal operating voltage, and at low operating frequencies, usually orders of magnitude slower than normal operating frequencies. Under these conditions, leakage current tends to dominate power consumption and heat production of the integrated circuit device.
- FIG. 1 illustrates an exemplary arrangement 100 of integrated circuit devices configured for a burn-in operation, in accordance with embodiments.
- Arrangement 100 comprises a plurality of integrated circuit devices under test, 101 , 102 through N.
- the integrated circuits may be typically arrayed on a printed wiring board 110 , which may include sockets for accepting the integrated circuit devices under test.
- wiring board 110 is typically placed in a temperature chamber capable of temperature regulation, e.g., adding or removing heat, at high temperatures, e.g., 150 degrees Celsius.
- a typical burn-in chamber may comprise a plurality of similar wiring boards.
- Wiring board 110 comprises a distribution network, e.g., wiring traces, to conduct electrical signals between various power supplies, test controllers and/or instrumentation and the integrated circuit devices under test.
- Wiring board 110 comprises an operating voltage (Vdd) supply distribution network 141 and a test control distribution network 142 . It is appreciated that such wiring networks can be configured in a wide varied of well known networks, including bus, point-to-point, and individual topologies in accordance with embodiments.
- Operating voltage supply 140 and test controller 150 are shown on wiring board 110 . Embodiments are well suited to situating such components elsewhere within a test environment. For example, operating voltage supply 140 is frequently located outside of a thermal chamber, and wired to a connector on wiring board 110 .
- Test control distribution network 142 couples a plurality of signals between test controller 150 and the integrated circuit devices under test.
- operating voltage supply distribution network 141 couples a plurality of signals between operating voltage supply 140 and the integrated circuit devices under test.
- test unit controller 150 typically stimulates the integrated circuit devices under test with a test pattern sequence and/or test commands and accesses a result.
- JTAG Joint Test Action Group
- ABIST array built-in self test
- Operating voltage supply 140 provides voltage and current to operate the integrated circuit devices under test, typically at a stressing voltage, e.g., 1.5 times nominal operating voltage for the integrated circuit devices under test.
- Current consumption, particularly leakage current consumption, in most semiconductors increases with increasing operating voltage and with increases in operating temperature. Such current increases are generally exponential in nature, e.g., a ten percent increase in operating voltage can cause a 100 percent increase in leakage current consumption.
- Operating the integrated circuit devices under test at a stressing elevated temperature also greatly increases their current requirements. As a deleterious consequence, operating voltage supply 140 must have a significantly greater current capacity to operate the integrated circuit devices under test in comparison to a current capacity required to operate the same integrated circuit devices under nominal temperature and voltage conditions.
- Static power consumption in modern semiconductor processes e.g., processes with a minimum feature size of about 0.13 microns and smaller, is no longer a negligible component of total power consumption. Further, static power, as a percentage of total power, is tending to increase with successive generations of semiconductor process.
- maximum operating frequency is generally proportional to the quantity (1 ⁇ Vt/Vdd), that is, one minus the threshold voltage divided by the supply voltage (for small process geometries).
- supply voltage (Vdd) typically also is decreased in order to avoid deleterious effects such as oxide breakdown. Consequently, threshold voltage should also be decreased in order to maintain or increase a desirable maximum operating frequency.
- gate oxides are made thinner so that a gate can maintain control of the channel. A thinner gate oxide leads to an increased gate capacitance. Since “off” or leakage current of a CMOS device is generally proportional to gate capacitance, the trend to make gate oxides thinner tends to increase leakage current.
- positive bias voltage generator 120 is coupled to positive bias voltage distribution network 121 , which in turn is coupled to the integrated circuits under test.
- Positive bias voltage generator 120 provides a body-biasing voltage, e.g., zero to five volts, to n type wells disposed beneath pFET devices in the integrated circuit devices under test.
- body biasing enables adjustment of threshold voltages of the pFET devices, for example, to reduce leakage current of the pFET devices.
- negative bias voltage generator 130 is coupled to negative bias voltage distribution network 131 , which in turn is coupled to the integrated circuits under test.
- Negative bias voltage generator 130 provides a body-biasing voltage, e.g., ⁇ 5 to zero volts, to p type wells disposed beneath nFET devices in the integrated circuit devices under test. Such body biasing enables adjustment of threshold voltages of the nFET devices, for example, to reduce leakage current of the nFET devices.
- bias voltage distribution networks 121 and 131 can be configured in a wide varied of well known networks, including bus, point-to-point, and individual topologies in accordance with embodiments.
- bias voltage generators 120 and 130 are variable voltage sources. Their output voltage can be set (within a range) to a specific value. It is desirable, but not required, that such specific values be set digitally, e.g., by a command from test controller 150 . Body biasing currents are typically on the order of low micro amps per integrated circuit. Consequently, bias voltage generators 120 and 130 generally can be relatively small and inexpensive voltage sources.
- FIG. 2 illustrates a flow chart for a computer-implemented method 200 of reducing power during burn in testing, in accordance with embodiments.
- an integrated circuit device is tested to determine a set of body bias voltages which minimize leakage current. In general, the testing will determine a unique n well voltage and a unique p well voltage for the integrated circuit device. It is appreciated that integrated circuits with a variety of power domains and body biasing wells are well suited to embodiments.
- semiconductor packaging does not affect leakage current; therefore leakage current may be accurately measured on an unpackaged device, e.g., on a wafer tester.
- no additional special test equipment or fixturing is required to perform block 210 within a typical semiconductor manufacturing process.
- Body bias voltages that minimize leakage current will generally be determined outside of a burn-in process, for example during wafer testing.
- a set of body bias voltages that minimize leakage current may be determined for an entire batch of integrated circuits, e.g., for a wafer or for multiple wafers processes at the same time. Further, embodiments are well suited to determining body bias voltages that minimize leakage current for individual integrated circuits.
- information of the set of body bias voltages is stored in a computer usable media.
- block 210 and block 240 are well suited to being performed on different test equipment, physically separated, e.g., on different continents, at different times, e.g., weeks or months apart. Storing information of the set of body bias voltages enables transmission and/or retrieval of this information for use over distances in time and space.
- information of the set of body bias voltages is accessed from a computer usable media.
- the computer usable media of block 220 may differ from the computer usable media of block 230 .
- information (data) may be copied and/or transmitted in a variety of ways from media to media.
- the body bias voltages determined in block 210 are applied to an integrated circuit during burn-in testing.
- power consumption and dissipation of the integrated circuits under test can be reduced by orders of magnitude.
- much less capable and much less expensive operating voltage supplies and thermal chambers may be utilized for performing burn-in testing.
- greater numbers of integrated circuits can be burned in with existing equipment, thereby increasing throughput of a burn-in process.
- expensive exotic heat sinking arrangements conventionally utilized with high function integrated circuits are no longer required.
- junction temperatures there will generally be a distribution of junction temperatures, “chip temperatures,” in a population of integrated circuits undergoing burn in. For example, most temperature chambers are unable to maintain a precisely uniform ambient temperature at all locations within the chamber.
- manufacturing variations among the integrated circuits under test contribute to differences in power consumption, and hence differences in heat output between the various integrated circuits. Consequently, such differences in ambient temperature and heat output contribute to variations in junction temperatures among the integrated circuits under test.
- junction temperature variation has been addressed by mechanical temperature control of each integrated circuit, e.g., forcing heat into and drawing heat out of each integrated circuit in order to adjust its junction temperature to the desired temperature.
- mechanical temperature control of each integrated circuit e.g., forcing heat into and drawing heat out of each integrated circuit in order to adjust its junction temperature to the desired temperature.
- such conventional individual device temperature control is mechanically complex and expensive.
- such structures for externally applied heating and cooling generally have their own relatively large thermal mass, which greatly limits their ability to respond to changes in thermal requirements.
- the coupling of heating and cooling, as well as temperature measurements are generally made to integrated circuit packaging, rather than directly to junctions. Consequently, the junction temperature of the integrated circuit is controlled to an undesirable approximation.
- T temperature
- P power consumed by the integrated circuit.
- ⁇ i is the lumped thermal resistance of the integrated circuit package comprising, for example, a thermal resistance from the integrated circuit to a coupled heatsink to ambient and/or a thermal resistance from the integrated circuit to a circuit board.
- thermal resistance of the integrated circuit package ⁇ i
- ⁇ i the thermal resistance of the integrated circuit package
- a desire of a burn-in process is to operate the integrated circuits under test at a specific operating voltage, e.g., 1.5 times nominal operating voltage.
- a specific operating voltage e.g. 1.5 times nominal operating voltage.
- Current requirements of an integrated circuit in general, are a function of attributes of that integrated circuit and the voltage applied.
- the power consumed by a particular integrated circuit is essentially fixed for that integrated circuit under the conventional art.
- power consumption of an integrated circuit can be adjusted by adjusting threshold voltage(s) of the integrated circuit, even if operating voltage of the integrated circuit is held constant.
- Threshold voltage(s) can be adjusted by adjusting body-bias voltage(s) supplied to body-biasing wells disposed beneath active semiconductors of the integrated circuit. Adjusting threshold voltage(s) of an integrated circuit can make changes in, e.g., increase or decrease, the leakage current of the integrated circuit, which is a significant component of an integrated circuit's power consumption, especially during low frequency operation, for example, during a burn-in process.
- junction temperature of an integrated circuit under test can be controlled by controlling the power consumed by the integrated circuit.
- the power consumed by the integrated circuit operating at a fixed operating voltage can be controlled by adjusting body biasing voltages to the integrated circuit, which in turn influence leakage current of the integrated circuit.
- FIG. 3 illustrates an exemplary arrangement 300 of integrated circuit devices configured for a burn-in operation, in accordance with embodiments.
- Arrangement 300 comprises a plurality of integrated circuit devices under test, 101 , 102 through N.
- the integrated circuits are typically arrayed on a printed wiring board 310 , which may comprise sockets for accepting the integrated circuit devices under test.
- wiring board 310 is typically placed in a temperature chamber capable of temperature regulation, e.g., adding or removing heat, at high temperatures, e.g., 150 degrees Celsius.
- a typical burn-in chamber may comprise a plurality of similar wiring boards.
- Wiring board 310 comprises an operating voltage supply 340 , which may be similar to operating voltage supply 140 .
- Operating voltage supply 340 provides voltage and current to integrated circuit devices under test 101 , 102 , etc., though current monitors 301 , 302 , etc.
- Operating voltage supply 340 is shown on wiring board 310 .
- Embodiments are well suited to situating such components elsewhere within a test environment. For example, operating voltage supply 340 is frequently located outside of a thermal chamber, and wired to a connector on wiring board 310 .
- test controller 350 provides significantly more function than test controller 150 ( FIG. 1 ). As will be discussed in more detail below, test controller 350 is coupled to voltage supplies, current measurement devices and ambient temperature sensor(s) in order to measure and control electrical parameters related to power consumption and temperature of the integrated circuit devices under test.
- Test controller 350 is desirably located on wiring board 310 .
- embodiments are well suited to situating test controller 350 components elsewhere within a test environment, e.g., on a separate wiring board coupled to wiring board 310 , or outside of a thermal chamber.
- test controller 350 were implemented as a workstation computer, it would generally be impractical to place such a workstation in a thermal chamber due to its size and operating temperature limits.
- test unit controller which may or may not be apart of test controller 350 , typically stimulates the integrated circuit devices under test with a test pattern sequence and/or test commands and accesses a result.
- JTAG Joint Test Action Group
- ABIST array built-in self test
- current monitor 301 measures current supplied to integrated circuit 101
- current monitor 302 measures current supplied to integrated circuit 102 .
- Each current measurement is reported back to test controller 350 , for example via a digital bus. It is appreciated that other wiring arrangements for reporting individual integrated circuit currents are well suited to embodiments.
- Test controller 350 is further coupled to operating voltage supply 340 , such that test controller 350 has knowledge of the operating voltage supplied to each integrated circuit under test.
- the operating voltage for each integrated circuit under test will be the same.
- embodiments are well suited to a variety of operating voltages for the integrated circuits under test.
- Each integrated circuit under test is coupled to an associated positive and/or negative body-bias voltage source.
- integrated circuit 101 is coupled to positive body-bias voltage source 321 and negative body-bias voltage source 331 .
- integrated circuit 102 is coupled to positive body-bias voltage source 322 and negative body-bias voltage source 332 .
- the body-bias voltage sources are in turn coupled to, and controlled by test controller 350 .
- test controller 350 can determine the power consumed by each integrated circuit under test.
- Ambient temperature sensor 360 provides an ambient temperature measurement to test controller 350 .
- one ambient temperature sensor per wiring board 310 provides a good approximation of the ambient temperature for integrated circuits under test on wiring board 310 .
- ambient temperature sensors it is generally less complex and less expensive to measure ambient temperature than to directly measure junction temperature of the integrated circuits under test.
- the number of ambient temperature sensors utilized can be adjusted based upon cost constraints, accuracy requirements and understanding of thermal variations within a particular chamber.
- test controller 350 can adjust the positive and/or negative body biases of each integrated circuit under test to increase or decrease threshold voltage, and thus leakage current, and consequently power consumption and in turn to achieve the desired junction temperature.
- FIG. 4 illustrates a flow chart for a computer-implemented method 400 of reducing power during burn in testing, in accordance with embodiments.
- power consumed by an integrated circuit during a test process is measured. For example, current and voltage to the integrated circuit can be measured.
- an ambient temperature associated with the integrated circuit is measured.
- the ambient temperature should be more closely associated with the integrated circuit than a “set point” of a temperature chamber.
- the ambient temperature can be measured by a single ambient temperature sensor on a wiring board, e.g., wiring board 310 of FIG. 3 , comprising an array of integrated circuits.
- the ambient temperature can be measured by an ambient temperature sensor in close proximity to the integrated circuit.
- a body bias voltage of the integrated circuit is adjusted to achieve a desired junction temperature of the integrated circuit.
- body-biasing voltage can affect threshold voltages, which in turn affect leakage current which is a significant component of integrated circuit power consumption.
- the junction temperature of an integrated circuit can be directly manipulated. In combination with information of an ambient temperature of the integrated circuit, a desired junction temperature can be achieved.
- a junction temperature of an integrated circuit can be controlled without directly measuring the junction temperature of the integrated circuit. It is generally less complex and less expensive to measure ambient temperature than to directly measure junction temperature of an integrated circuit. Further, systems to measure power and control low current voltages are typically less complex and less expensive than creating individual thermal environments for large numbers of integrated circuits. As a beneficial result, embodiments reduce temperature variation during burn in with much less cost, much less complexity and with greater reliability than the conventional practice.
- FIG. 5 illustrates a flow chart for a computer-implemented method 500 of determining a junction temperature of an integrated circuit, in accordance with embodiments.
- an ambient temperature in a region proximate to the integrated circuit is measured.
- the ambient temperature sensing device should be in the same thermal conditions as the integrated circuit.
- electrical power utilized by the integrated circuit is measured. Typically, such measurement is performed by measuring voltage and current supplied to the integrated circuit.
- a thermal resistance value for the integrated circuit is accessed, for example, from computer memory.
- the thermal resistance value can be determined from packaging design information, but is typically measured during development of the integrated circuit and its packaging.
- junction temperature of the integrated circuit is determined. For example, using power, ambient temperature and thermal resistance, junction temperature can be computed using Relation 1, above.
- a junction temperature of an integrated circuit can be determined without directly measuring the junction temperature of the integrated circuit. It is generally less complex and less expensive to measure ambient temperature than to directly measure junction temperature of an integrated circuit. Further, power utilized by an integrated circuit can be measured in a straightforward manner. Beneficially, embodiments determine a junction temperature of an integrated circuit in a less costly and less complex manner than under the conventional art.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Systems and methods for reducing temperature variation during burn-in testing. In one embodiment, power consumed by an integrated circuit under test is measured. An ambient temperature associated with the integrated circuit is measured. A desired junction temperature of the integrated circuit is achieved by adjusting a body bias voltage of the integrated circuit. By controlling temperature of individual integrated circuits, temperature variation during burn-in testing can be reduced.
Description
- This patent application is a Divisional of U.S. patent application Ser. No. 11/881,006, filed on Jul. 24, 2007, which is a Continuation of U.S. patent application Ser. No. 10/791,099, filed on Mar. 1, 2004, now U.S. Pat. No. 7,248,988, which are hereby incorporated by reference in their entirety. Commonly-owned U.S. patent application Ser. No. 10/334,272, filed Dec. 31, 2002, now U.S. Pat. No. 6,936,898, entitled “Diagonal Deep Well Region for Routing Body-Bias Voltage for MOSFETs in Surface Well Regions” to Pelham and Burr, is hereby incorporated by reference in its entirety.
- Embodiments relate to systems and methods for reducing temperature variation during burn in.
- Highly integrated semiconductor devices, e.g., microprocessors, frequently dissipate a great deal of heat, particularly when operated at elevated temperatures and voltages to screen for defects during burn-in operations. Such heat dissipation is deleterious during burn-in operations, conventionally requiring complex and expensive heat sinking, e.g., water baths and/or liquid metal cooling, and expensive test chambers with very high cooling capacities.
- Therefore, systems and methods for reducing temperature variation during burn-in are highly desired.
- Accordingly, systems and methods for reducing temperature variation during burn-in testing are disclosed. In one embodiment, power consumed by an integrated circuit under test is measured. An ambient temperature associated with the integrated circuit is measured. A desired junction temperature of the integrated circuit is achieved by adjusting a body bias voltage of the integrated circuit. By controlling temperature of individual integrated circuits, temperature variation during burn-in testing can be reduced.
- In accordance with other embodiments, an ambient temperature in a region proximate to an integrated circuit is measured. Electrical power utilized by the integrated circuit is measured. A thermal resistance value for the integrated circuit is accessed and a junction temperature of the integrated circuit id determined without direct measurement of the junction temperature.
-
FIG. 1 illustrates an exemplary arrangement of integrated circuit devices configured for a burn-in operation, in accordance with embodiments. -
FIG. 2 illustrates a flow chart for a computer-implemented method of reducing power during burn in testing, in accordance with embodiments. -
FIG. 3 illustrates an exemplary arrangement of integrated circuit devices configured for a burn-in operation, in accordance with other embodiments. -
FIG. 4 illustrates a flow chart for a computer-implemented method of reducing power during burn in testing, in accordance with embodiments. -
FIG. 5 illustrates a flow chart for a computer-implemented method of determining a junction temperature of an integrated circuit, in accordance with embodiments. - In the following detailed description, system and method for reducing temperature variation during burn in, numerous specific details are set forth in order to provide a thorough understanding. However, it will be recognized by one skilled in the art that embodiments may be practiced without these specific details or with equivalents thereof. In other instances, well-known methods, procedures, components, and circuits have not been described in detail as not to unnecessarily obscure aspects of embodiments.
- Some portions of the detailed descriptions which follow (e.g.,
processes - It should be borne in mind, however, that all of these and similar terms are to be associated with the appropriate physical quantities and are merely convenient labels applied to these quantities. Unless specifically stated otherwise as apparent from the following discussions, it is appreciated that throughout the detailed description of embodiments, discussions utilizing terms such as “storing” or “dividing” or “computing” or “testing” or “calculating” or “determining” or “storing” or “measuring” or “adjusting” or “generating” or “performing” or “comparing” or “synchronizing” or “accessing” or “retrieving” or “conveying” or “sending” or “resuming” or “installing” or “gathering” or the like, refer to the action and processes of a computer system, or similar electronic computing device” that manipulates and transforms data represented as physical (electronic) quantities within the computer system's registers and memories into other data similarly represented as physical quantities within the computer system memories or registers or other such information storage, transmission or display devices.
- Embodiments are described in the context of design and operation of integrated semiconductors. More particularly, embodiments relate to systems and methods for reducing temperature variation during burn-in testing of integrated circuits. It is appreciated, however, that elements of embodiments may be utilized in other areas of semiconductor operation.
- Although the following description of embodiments will focus on coupling a body-bias voltage to pFETs (or p-type MOSFETS) formed in surface N-wells via a conductive sub-surface region of N-type doping when a p-type substrate and an N-well process are utilized, embodiments are equally applicable to coupling a body-bias voltage to nFETs (or n-type MOSFETS) formed in surface P-wells via a conductive sub-surface region of P-type doping when an n-type substrate and a P-well process are utilized. Consequently, embodiments are well suited to semiconductors formed in n-type materials, and such embodiments are considered within the scope of the disclosure.
- Burn-in operations to detect integrated circuit defects are generally performed at stressing temperatures, e.g., 150 degrees Celsius, stressing voltages, e.g., 1.5 times nominal operating voltage, and at low operating frequencies, usually orders of magnitude slower than normal operating frequencies. Under these conditions, leakage current tends to dominate power consumption and heat production of the integrated circuit device.
-
FIG. 1 illustrates anexemplary arrangement 100 of integrated circuit devices configured for a burn-in operation, in accordance with embodiments.Arrangement 100 comprises a plurality of integrated circuit devices under test, 101, 102 through N. The integrated circuits may be typically arrayed on a printedwiring board 110, which may include sockets for accepting the integrated circuit devices under test. Because it is desirable to operate the integrated circuit devices under test at a stressing elevated temperature,wiring board 110 is typically placed in a temperature chamber capable of temperature regulation, e.g., adding or removing heat, at high temperatures, e.g., 150 degrees Celsius. A typical burn-in chamber may comprise a plurality of similar wiring boards. -
Wiring board 110 comprises a distribution network, e.g., wiring traces, to conduct electrical signals between various power supplies, test controllers and/or instrumentation and the integrated circuit devices under test.Wiring board 110 comprises an operating voltage (Vdd)supply distribution network 141 and a testcontrol distribution network 142. It is appreciated that such wiring networks can be configured in a wide varied of well known networks, including bus, point-to-point, and individual topologies in accordance with embodiments. -
Operating voltage supply 140 andtest controller 150 are shown onwiring board 110. Embodiments are well suited to situating such components elsewhere within a test environment. For example,operating voltage supply 140 is frequently located outside of a thermal chamber, and wired to a connector onwiring board 110. Testcontrol distribution network 142 couples a plurality of signals betweentest controller 150 and the integrated circuit devices under test. Similarly, operating voltagesupply distribution network 141 couples a plurality of signals betweenoperating voltage supply 140 and the integrated circuit devices under test. - A test unit controller, which may or may not be apart of
test controller 150, typically stimulates the integrated circuit devices under test with a test pattern sequence and/or test commands and accesses a result. Embodiments are well suited to a wide variety of test unit controllers and testing methods, including, for example, Joint Test Action Group (JTAG) boundary scan and array built-in self test (ABIST). -
Operating voltage supply 140 provides voltage and current to operate the integrated circuit devices under test, typically at a stressing voltage, e.g., 1.5 times nominal operating voltage for the integrated circuit devices under test. Current consumption, particularly leakage current consumption, in most semiconductors increases with increasing operating voltage and with increases in operating temperature. Such current increases are generally exponential in nature, e.g., a ten percent increase in operating voltage can cause a 100 percent increase in leakage current consumption. Operating the integrated circuit devices under test at a stressing elevated temperature also greatly increases their current requirements. As a deleterious consequence, operatingvoltage supply 140 must have a significantly greater current capacity to operate the integrated circuit devices under test in comparison to a current capacity required to operate the same integrated circuit devices under nominal temperature and voltage conditions. - As a typical burn-in configuration can comprise several tens of integrated circuit devices under test per
wiring board 110, and numerous wiring boards per chamber, the requirements placed upon operatingvoltage supply 140 can easily be measured in multiple kilowatts. A precision voltage supply capable of supplying such power and suitable for testing integrated circuit devices can be prohibitively expensive. - Static power consumption in modern semiconductor processes, e.g., processes with a minimum feature size of about 0.13 microns and smaller, is no longer a negligible component of total power consumption. Further, static power, as a percentage of total power, is tending to increase with successive generations of semiconductor process.
- For example, maximum operating frequency is generally proportional to the quantity (1−Vt/Vdd), that is, one minus the threshold voltage divided by the supply voltage (for small process geometries). As process geometry shrinks, supply voltage (Vdd) typically also is decreased in order to avoid deleterious effects such as oxide breakdown. Consequently, threshold voltage should also be decreased in order to maintain or increase a desirable maximum operating frequency. Correspondingly, gate oxides are made thinner so that a gate can maintain control of the channel. A thinner gate oxide leads to an increased gate capacitance. Since “off” or leakage current of a CMOS device is generally proportional to gate capacitance, the trend to make gate oxides thinner tends to increase leakage current. As an unfortunate result, the on-going decrease in semiconductor process size also leads to an ever-increasing power consumption deriving from static power dissipation. Further, essentially all of the electrical energy provided by operating
voltage supply 140 is converted into heat by the integrated circuit devices under test. As a deleterious effect, for most highly integrated circuits, the integrated circuits under test produce more than enough heat to achieve a desired stress temperature, and the temperature chamber is no longer required to provide such heat. In sharp contrast, the temperature chamber must now be capable of removing vast heat loads, contributing to requirements for a very expensive chamber. - Further, conducting such vast amounts of heat out of the integrated circuit die, through the integrated circuit packaging and into the temperature chamber environment is problematic. Heat dissipation requirements of highly integrated circuits, e.g., microprocessors, generally outpace heat dissipation capabilities of the integrated circuit packaging under burn-in stress conditions. Consequently, very expensive “exotic” heat sinking arrangements, e.g., water baths and liquid metal cooling are conventionally employed to get the heat out of integrated circuits during burn-in testing.
- Certain semiconductor devices have beet body biasing well structures to control power consumption during operation. U.S. patent application Ser. No. 10/334,272, now U.S. Pat. No. 6,936,898, incorporated herein by reference and referenced above, describes such devices in more depth. In accordance with embodiments, such body biasing well structures can be advantageously utilized during burn-in operations to control particular parameters of a burn-in process.
- Still referring to
FIG. 1 , positivebias voltage generator 120 is coupled to positive biasvoltage distribution network 121, which in turn is coupled to the integrated circuits under test. Positivebias voltage generator 120 provides a body-biasing voltage, e.g., zero to five volts, to n type wells disposed beneath pFET devices in the integrated circuit devices under test. Such body biasing enables adjustment of threshold voltages of the pFET devices, for example, to reduce leakage current of the pFET devices. - In a similar manner, negative
bias voltage generator 130 is coupled to negative biasvoltage distribution network 131, which in turn is coupled to the integrated circuits under test. Negativebias voltage generator 130 provides a body-biasing voltage, e.g., −5 to zero volts, to p type wells disposed beneath nFET devices in the integrated circuit devices under test. Such body biasing enables adjustment of threshold voltages of the nFET devices, for example, to reduce leakage current of the nFET devices. - It is appreciated that such bias
voltage distribution networks bias generators wiring board 110, or bias generators may be located off ofwiring board 110, in accordance with embodiments. - In general,
bias voltage generators test controller 150. Body biasing currents are typically on the order of low micro amps per integrated circuit. Consequently,bias voltage generators -
FIG. 2 illustrates a flow chart for a computer-implementedmethod 200 of reducing power during burn in testing, in accordance with embodiments. Inblock 210, an integrated circuit device is tested to determine a set of body bias voltages which minimize leakage current. In general, the testing will determine a unique n well voltage and a unique p well voltage for the integrated circuit device. It is appreciated that integrated circuits with a variety of power domains and body biasing wells are well suited to embodiments. - Advantageously, semiconductor packaging does not affect leakage current; therefore leakage current may be accurately measured on an unpackaged device, e.g., on a wafer tester. As a beneficial consequence, in general, no additional special test equipment or fixturing is required to perform block 210 within a typical semiconductor manufacturing process. Body bias voltages that minimize leakage current will generally be determined outside of a burn-in process, for example during wafer testing. A set of body bias voltages that minimize leakage current may be determined for an entire batch of integrated circuits, e.g., for a wafer or for multiple wafers processes at the same time. Further, embodiments are well suited to determining body bias voltages that minimize leakage current for individual integrated circuits.
- In
optional block 220, information of the set of body bias voltages, e.g., numerical representations of the voltages, is stored in a computer usable media. As previously described, block 210 and block 240, below, are well suited to being performed on different test equipment, physically separated, e.g., on different continents, at different times, e.g., weeks or months apart. Storing information of the set of body bias voltages enables transmission and/or retrieval of this information for use over distances in time and space. - In
optional block 230, information of the set of body bias voltages is accessed from a computer usable media. In accordance with embodiments, the computer usable media ofblock 220 may differ from the computer usable media ofblock 230. As is well known in the data processing arts, information (data) may be copied and/or transmitted in a variety of ways from media to media. Inblock 240, the body bias voltages determined inblock 210 are applied to an integrated circuit during burn-in testing. - Advantageously, by controlling body bias voltages to minimize leakage current during burn-in processing, power consumption and dissipation of the integrated circuits under test can be reduced by orders of magnitude. As a beneficial consequence of such greatly reduced power consumption, much less capable and much less expensive operating voltage supplies and thermal chambers may be utilized for performing burn-in testing. Alternatively, greater numbers of integrated circuits can be burned in with existing equipment, thereby increasing throughput of a burn-in process. In addition, expensive exotic heat sinking arrangements conventionally utilized with high function integrated circuits are no longer required.
- It is desirable to operate each integrated circuit at a specific junction temperature during burn in, for example 150 degrees Celsius. Unfortunately, there will generally be a distribution of junction temperatures, “chip temperatures,” in a population of integrated circuits undergoing burn in. For example, most temperature chambers are unable to maintain a precisely uniform ambient temperature at all locations within the chamber. In addition, manufacturing variations among the integrated circuits under test contribute to differences in power consumption, and hence differences in heat output between the various integrated circuits. Consequently, such differences in ambient temperature and heat output contribute to variations in junction temperatures among the integrated circuits under test.
- Conventionally, junction temperature variation has been addressed by mechanical temperature control of each integrated circuit, e.g., forcing heat into and drawing heat out of each integrated circuit in order to adjust its junction temperature to the desired temperature. Unfortunately, such conventional individual device temperature control is mechanically complex and expensive. In addition, such structures for externally applied heating and cooling generally have their own relatively large thermal mass, which greatly limits their ability to respond to changes in thermal requirements. Further, the coupling of heating and cooling, as well as temperature measurements, are generally made to integrated circuit packaging, rather than directly to junctions. Consequently, the junction temperature of the integrated circuit is controlled to an undesirable approximation.
-
Relation 1 below is an approximation of junction temperature of an integrated circuit: -
Tjunction=Tambient+Pθi (Relation 1) - where T is temperature, P is power consumed by the integrated circuit. “θi” is the lumped thermal resistance of the integrated circuit package comprising, for example, a thermal resistance from the integrated circuit to a coupled heatsink to ambient and/or a thermal resistance from the integrated circuit to a circuit board.
- It is to be appreciated that the thermal resistance of the integrated circuit package, θi, is highly consistent among similar integrated circuits under test, and can be treated as a constant herein.
- It is to be further appreciated that a desire of a burn-in process is to operate the integrated circuits under test at a specific operating voltage, e.g., 1.5 times nominal operating voltage. Current requirements of an integrated circuit, in general, are a function of attributes of that integrated circuit and the voltage applied. Hence, for a desirable specific operating voltage, the power consumed by a particular integrated circuit is essentially fixed for that integrated circuit under the conventional art.
- Beneficially, however, in accordance with embodiments, power consumption of an integrated circuit can be adjusted by adjusting threshold voltage(s) of the integrated circuit, even if operating voltage of the integrated circuit is held constant. Threshold voltage(s) can be adjusted by adjusting body-bias voltage(s) supplied to body-biasing wells disposed beneath active semiconductors of the integrated circuit. Adjusting threshold voltage(s) of an integrated circuit can make changes in, e.g., increase or decrease, the leakage current of the integrated circuit, which is a significant component of an integrated circuit's power consumption, especially during low frequency operation, for example, during a burn-in process.
- In accordance with an embodiment, junction temperature of an integrated circuit under test can be controlled by controlling the power consumed by the integrated circuit. The power consumed by the integrated circuit operating at a fixed operating voltage can be controlled by adjusting body biasing voltages to the integrated circuit, which in turn influence leakage current of the integrated circuit.
-
FIG. 3 illustrates anexemplary arrangement 300 of integrated circuit devices configured for a burn-in operation, in accordance with embodiments.Arrangement 300 comprises a plurality of integrated circuit devices under test, 101, 102 through N. The integrated circuits are typically arrayed on a printedwiring board 310, which may comprise sockets for accepting the integrated circuit devices under test. Because it is desirable to operate the integrated circuit devices under test at a stressing elevated temperature,wiring board 310 is typically placed in a temperature chamber capable of temperature regulation, e.g., adding or removing heat, at high temperatures, e.g., 150 degrees Celsius. A typical burn-in chamber may comprise a plurality of similar wiring boards. -
Wiring board 310 comprises an operatingvoltage supply 340, which may be similar to operatingvoltage supply 140.Operating voltage supply 340 provides voltage and current to integrated circuit devices undertest current monitors Operating voltage supply 340 is shown onwiring board 310. Embodiments are well suited to situating such components elsewhere within a test environment. For example, operatingvoltage supply 340 is frequently located outside of a thermal chamber, and wired to a connector onwiring board 310. - In accordance with embodiments,
test controller 350 provides significantly more function than test controller 150 (FIG. 1 ). As will be discussed in more detail below,test controller 350 is coupled to voltage supplies, current measurement devices and ambient temperature sensor(s) in order to measure and control electrical parameters related to power consumption and temperature of the integrated circuit devices under test. -
Test controller 350 is desirably located on wiringboard 310. However, due to various factors, e.g., the physical size and/or nature of equipment used to implementtest controller 350, embodiments are well suited to situatingtest controller 350 components elsewhere within a test environment, e.g., on a separate wiring board coupled towiring board 310, or outside of a thermal chamber. For example, iftest controller 350 were implemented as a workstation computer, it would generally be impractical to place such a workstation in a thermal chamber due to its size and operating temperature limits. - A test unit controller, which may or may not be apart of
test controller 350, typically stimulates the integrated circuit devices under test with a test pattern sequence and/or test commands and accesses a result. Embodiments are well suited to a wide variety of test unit controllers and testing methods, including, for example, Joint Test Action Group (JTAG) boundary scan and array built-in self test (ABIST). - It is to be appreciated that
current monitor 301 measures current supplied tointegrated circuit 101, and thatcurrent monitor 302 measures current supplied tointegrated circuit 102. Each current measurement is reported back totest controller 350, for example via a digital bus. It is appreciated that other wiring arrangements for reporting individual integrated circuit currents are well suited to embodiments. -
Test controller 350 is further coupled to operatingvoltage supply 340, such thattest controller 350 has knowledge of the operating voltage supplied to each integrated circuit under test. In general, the operating voltage for each integrated circuit under test will be the same. However, embodiments are well suited to a variety of operating voltages for the integrated circuits under test. - Each integrated circuit under test is coupled to an associated positive and/or negative body-bias voltage source. For example, integrated
circuit 101 is coupled to positive body-bias voltage source 321 and negative body-bias voltage source 331. Likewise, integratedcircuit 102 is coupled to positive body-bias voltage source 322 and negative body-bias voltage source 332. The body-bias voltage sources are in turn coupled to, and controlled bytest controller 350. - With information of the operating voltage and current supplied to each integrated circuit under test,
test controller 350 can determine the power consumed by each integrated circuit under test.Ambient temperature sensor 360 provides an ambient temperature measurement to testcontroller 350. There can be a plurality of ambient temperature sensors associated withwiring board 310. For example, one ambient temperature sensor perwiring board 310 provides a good approximation of the ambient temperature for integrated circuits under test onwiring board 310. Alternatively, there could be an ambient temperature sensor associated with, and in proximity to, each integrated circuit under test onwiring board 310. - Advantageously, it is generally less complex and less expensive to measure ambient temperature than to directly measure junction temperature of the integrated circuits under test. The number of ambient temperature sensors utilized can be adjusted based upon cost constraints, accuracy requirements and understanding of thermal variations within a particular chamber.
- With information of power consumed by each integrated circuit under test and ambient temperature, the junction temperature of each integrated circuit under test can be determined using
Relation 1, above. If the computed junction temperature is not the desired junction temperature,test controller 350 can adjust the positive and/or negative body biases of each integrated circuit under test to increase or decrease threshold voltage, and thus leakage current, and consequently power consumption and in turn to achieve the desired junction temperature. -
FIG. 4 illustrates a flow chart for a computer-implementedmethod 400 of reducing power during burn in testing, in accordance with embodiments. Inblock 410, power consumed by an integrated circuit during a test process is measured. For example, current and voltage to the integrated circuit can be measured. - In
block 420, an ambient temperature associated with the integrated circuit is measured. The ambient temperature should be more closely associated with the integrated circuit than a “set point” of a temperature chamber. For example, the ambient temperature can be measured by a single ambient temperature sensor on a wiring board, e.g.,wiring board 310 ofFIG. 3 , comprising an array of integrated circuits. Alternatively, the ambient temperature can be measured by an ambient temperature sensor in close proximity to the integrated circuit. - In
block 430, a body bias voltage of the integrated circuit is adjusted to achieve a desired junction temperature of the integrated circuit. It is to be appreciated that body-biasing voltage can affect threshold voltages, which in turn affect leakage current which is a significant component of integrated circuit power consumption. By adjusting, e.g., increasing or decreasing, integrated circuit power consumption, the junction temperature of an integrated circuit can be directly manipulated. In combination with information of an ambient temperature of the integrated circuit, a desired junction temperature can be achieved. - In this novel manner, a junction temperature of an integrated circuit can be controlled without directly measuring the junction temperature of the integrated circuit. It is generally less complex and less expensive to measure ambient temperature than to directly measure junction temperature of an integrated circuit. Further, systems to measure power and control low current voltages are typically less complex and less expensive than creating individual thermal environments for large numbers of integrated circuits. As a beneficial result, embodiments reduce temperature variation during burn in with much less cost, much less complexity and with greater reliability than the conventional practice.
-
FIG. 5 illustrates a flow chart for a computer-implementedmethod 500 of determining a junction temperature of an integrated circuit, in accordance with embodiments. Inblock 510, an ambient temperature in a region proximate to the integrated circuit is measured. The ambient temperature sensing device should be in the same thermal conditions as the integrated circuit. - In
block 520, electrical power utilized by the integrated circuit is measured. Typically, such measurement is performed by measuring voltage and current supplied to the integrated circuit. - In
block 530, a thermal resistance value for the integrated circuit is accessed, for example, from computer memory. The thermal resistance value can be determined from packaging design information, but is typically measured during development of the integrated circuit and its packaging. - In
block 540, a junction temperature of the integrated circuit is determined. For example, using power, ambient temperature and thermal resistance, junction temperature can be computed usingRelation 1, above. - In this novel manner, a junction temperature of an integrated circuit can be determined without directly measuring the junction temperature of the integrated circuit. It is generally less complex and less expensive to measure ambient temperature than to directly measure junction temperature of an integrated circuit. Further, power utilized by an integrated circuit can be measured in a straightforward manner. Beneficially, embodiments determine a junction temperature of an integrated circuit in a less costly and less complex manner than under the conventional art.
- In accordance with embodiments, system and method for reducing temperature variation during burn in, are thus described. While the detailed description has been described in particular embodiments, it should be appreciated that the scope of this disclosure should not be construed as limited by such embodiments, but rather construed according to the below claims.
Claims (5)
1. A method of determining a junction temperature of an integrated circuit, said method comprising:
measuring an ambient temperature in a region proximate to said integrated circuit;
measuring electrical power utilized by said integrated circuit;
accessing a thermal resistance value for said integrated circuit, wherein said thermal resistance value is dependent on packaging of said integrated circuit; and
determining a junction temperature of said integrated circuit by using at least said measured ambient temperature, said measured power, and said thermal resistance value.
2. The method of claim 1 wherein said determining comprises multiplying said thermal resistance value by said measured electrical power and adding said measured ambient temperature.
3. The method of claim 1 wherein said measuring electrical power comprises measuring current supplied to said integrated circuit.
4. The method of claim 1 wherein said measuring electrical power comprises measuring voltage supplied to said integrated circuit.
5. The method of claim 1 wherein said thermal resistance value is accessed from a computer usable media.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/488,379 US20090316750A1 (en) | 2004-03-01 | 2009-06-19 | System and method for reducing temperature variation during burn in |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/791,099 US7248988B2 (en) | 2004-03-01 | 2004-03-01 | System and method for reducing temperature variation during burn in |
US11/881,006 US7565259B2 (en) | 2004-03-01 | 2007-07-24 | System and method for reducing temperature variation during burn in |
US12/488,379 US20090316750A1 (en) | 2004-03-01 | 2009-06-19 | System and method for reducing temperature variation during burn in |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/881,006 Division US7565259B2 (en) | 2004-03-01 | 2007-07-24 | System and method for reducing temperature variation during burn in |
Publications (1)
Publication Number | Publication Date |
---|---|
US20090316750A1 true US20090316750A1 (en) | 2009-12-24 |
Family
ID=34887569
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/791,099 Expired - Lifetime US7248988B2 (en) | 2004-03-01 | 2004-03-01 | System and method for reducing temperature variation during burn in |
US11/881,006 Expired - Lifetime US7565259B2 (en) | 2004-03-01 | 2007-07-24 | System and method for reducing temperature variation during burn in |
US12/488,379 Abandoned US20090316750A1 (en) | 2004-03-01 | 2009-06-19 | System and method for reducing temperature variation during burn in |
US12/506,070 Expired - Lifetime US8843344B2 (en) | 2004-03-01 | 2009-07-20 | System and method for reducing temperature variation during burn in |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/791,099 Expired - Lifetime US7248988B2 (en) | 2004-03-01 | 2004-03-01 | System and method for reducing temperature variation during burn in |
US11/881,006 Expired - Lifetime US7565259B2 (en) | 2004-03-01 | 2007-07-24 | System and method for reducing temperature variation during burn in |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/506,070 Expired - Lifetime US8843344B2 (en) | 2004-03-01 | 2009-07-20 | System and method for reducing temperature variation during burn in |
Country Status (4)
Country | Link |
---|---|
US (4) | US7248988B2 (en) |
JP (1) | JP4768710B2 (en) |
CN (1) | CN1926439B (en) |
WO (1) | WO2005085884A2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7834648B1 (en) * | 2004-03-01 | 2010-11-16 | Eric Chen-Li Sheng | Controlling temperature in a semiconductor device |
US8909383B2 (en) | 2011-12-22 | 2014-12-09 | International Business Machines Corporation | Proactive cooling of chips using workload information and controls |
US10049957B2 (en) | 2011-03-03 | 2018-08-14 | International Business Machines Corporation | On-chip control of thermal cycling |
Families Citing this family (61)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6974252B2 (en) * | 2003-03-11 | 2005-12-13 | Intel Corporation | Failsafe mechanism for preventing an integrated circuit from overheating |
US7248988B2 (en) * | 2004-03-01 | 2007-07-24 | Transmeta Corporation | System and method for reducing temperature variation during burn in |
US6897671B1 (en) * | 2004-03-01 | 2005-05-24 | Transmeta Corporation | System and method for reducing heat dissipation during burn-in |
US7376849B2 (en) * | 2004-06-30 | 2008-05-20 | Intel Corporation | Method, apparatus and system of adjusting one or more performance-related parameters of a processor |
US9161783B2 (en) | 2004-10-20 | 2015-10-20 | Vertiflex, Inc. | Interspinous spacer |
US8317864B2 (en) | 2004-10-20 | 2012-11-27 | The Board Of Trustees Of The Leland Stanford Junior University | Systems and methods for posterior dynamic stabilization of the spine |
US8425559B2 (en) | 2004-10-20 | 2013-04-23 | Vertiflex, Inc. | Systems and methods for posterior dynamic stabilization of the spine |
US8152837B2 (en) | 2004-10-20 | 2012-04-10 | The Board Of Trustees Of The Leland Stanford Junior University | Systems and methods for posterior dynamic stabilization of the spine |
US8123782B2 (en) | 2004-10-20 | 2012-02-28 | Vertiflex, Inc. | Interspinous spacer |
US8613747B2 (en) | 2004-10-20 | 2013-12-24 | Vertiflex, Inc. | Spacer insertion instrument |
US8128662B2 (en) | 2004-10-20 | 2012-03-06 | Vertiflex, Inc. | Minimally invasive tooling for delivery of interspinous spacer |
US9119680B2 (en) | 2004-10-20 | 2015-09-01 | Vertiflex, Inc. | Interspinous spacer |
US8012207B2 (en) | 2004-10-20 | 2011-09-06 | Vertiflex, Inc. | Systems and methods for posterior dynamic stabilization of the spine |
US7763074B2 (en) | 2004-10-20 | 2010-07-27 | The Board Of Trustees Of The Leland Stanford Junior University | Systems and methods for posterior dynamic stabilization of the spine |
US8167944B2 (en) | 2004-10-20 | 2012-05-01 | The Board Of Trustees Of The Leland Stanford Junior University | Systems and methods for posterior dynamic stabilization of the spine |
US8273108B2 (en) | 2004-10-20 | 2012-09-25 | Vertiflex, Inc. | Interspinous spacer |
US8277488B2 (en) | 2004-10-20 | 2012-10-02 | Vertiflex, Inc. | Interspinous spacer |
US8123807B2 (en) | 2004-10-20 | 2012-02-28 | Vertiflex, Inc. | Systems and methods for posterior dynamic stabilization of the spine |
US9023084B2 (en) | 2004-10-20 | 2015-05-05 | The Board Of Trustees Of The Leland Stanford Junior University | Systems and methods for stabilizing the motion or adjusting the position of the spine |
US8409282B2 (en) | 2004-10-20 | 2013-04-02 | Vertiflex, Inc. | Systems and methods for posterior dynamic stabilization of the spine |
WO2009086010A2 (en) | 2004-12-06 | 2009-07-09 | Vertiflex, Inc. | Spacer insertion instrument |
US7141998B1 (en) * | 2005-05-19 | 2006-11-28 | International Business Machines Corporation | Method and apparatus for burn-in optimization |
US7333904B2 (en) * | 2005-08-26 | 2008-02-19 | Delphi Technologies, Inc. | Method of determining FET junction temperature |
US7574321B2 (en) * | 2005-10-11 | 2009-08-11 | Exar Corporation | Model predictive thermal management |
US8845726B2 (en) | 2006-10-18 | 2014-09-30 | Vertiflex, Inc. | Dilator |
US7583535B2 (en) * | 2006-12-30 | 2009-09-01 | Sandisk Corporation | Biasing non-volatile storage to compensate for temperature variations |
US7525843B2 (en) * | 2006-12-30 | 2009-04-28 | Sandisk Corporation | Non-volatile storage with adaptive body bias |
US7468919B2 (en) * | 2006-12-30 | 2008-12-23 | Sandisk Corporation | Biasing non-volatile storage based on selected word line |
US7468920B2 (en) * | 2006-12-30 | 2008-12-23 | Sandisk Corporation | Applying adaptive body bias to non-volatile storage |
US7583539B2 (en) * | 2006-12-30 | 2009-09-01 | Sandisk Corporation | Non-volatile storage with bias for temperature compensation |
US7554853B2 (en) * | 2006-12-30 | 2009-06-30 | Sandisk Corporation | Non-volatile storage with bias based on selective word line |
WO2008130564A1 (en) | 2007-04-16 | 2008-10-30 | Vertiflex Inc. | Interspinous spacer |
US7606071B2 (en) * | 2007-04-24 | 2009-10-20 | Sandisk Corporation | Compensating source voltage drop in non-volatile storage |
US7606072B2 (en) * | 2007-04-24 | 2009-10-20 | Sandisk Corporation | Non-volatile storage with compensation for source voltage drop |
AU2009206098B2 (en) * | 2008-01-15 | 2014-10-30 | Vertiflex, Inc. | Interspinous spacer |
US8489357B2 (en) * | 2008-07-25 | 2013-07-16 | Delphi Technologies, Inc. | Current and temperature sensing of standard field-effect transistors |
US8087823B2 (en) * | 2008-08-18 | 2012-01-03 | International Business Machines Corporation | Method for monitoring thermal control |
WO2011084477A2 (en) | 2009-12-15 | 2011-07-14 | Vertifex, Inc. | Spinal spacer for cervical and other vertebra, and associated systems and methods |
US9709625B2 (en) * | 2010-11-19 | 2017-07-18 | International Business Machines Corporation | Measuring power consumption in an integrated circuit |
JP2012138020A (en) * | 2010-12-27 | 2012-07-19 | Panasonic Corp | Multichip system, communication device, video/audio device and automobile |
US8814425B1 (en) * | 2011-09-30 | 2014-08-26 | Emc Corporation | Power measurement transducer |
US8814424B1 (en) * | 2011-09-30 | 2014-08-26 | Emc Corporation | Power measurement transducer |
TWI483104B (en) * | 2011-12-20 | 2015-05-01 | Hon Hai Prec Ind Co Ltd | Electronic device testing system and method |
KR101975409B1 (en) | 2012-07-26 | 2019-05-08 | 삼성전자주식회사 | System on chip and temperature control method thereof |
US9675303B2 (en) | 2013-03-15 | 2017-06-13 | Vertiflex, Inc. | Visualization systems, instruments and methods of using the same in spinal decompression procedures |
US10524772B2 (en) | 2014-05-07 | 2020-01-07 | Vertiflex, Inc. | Spinal nerve decompression systems, dilation systems, and methods of using the same |
US10346239B1 (en) * | 2016-06-27 | 2019-07-09 | Amazon Technologies, Inc. | Predictive failure of hardware components |
CN106501699B (en) * | 2016-10-20 | 2019-02-19 | 北京工业大学 | The method for real-time measurement of bipolar transistor junction temperature under a kind of saturation state |
JP2018080920A (en) * | 2016-11-14 | 2018-05-24 | セイコーエプソン株式会社 | Temperature measurement device, inspection device, and method for control |
US10101382B2 (en) * | 2016-12-30 | 2018-10-16 | Texas Instruments Incorporated | Systems and methods for dynamic Rdson measurement |
CN109738779B (en) * | 2019-01-30 | 2021-05-18 | 上海联影医疗科技股份有限公司 | Semiconductor junction temperature calculation method and device, computer equipment and storage medium |
CN111398780A (en) * | 2020-03-20 | 2020-07-10 | 北京航空航天大学 | Circuit board temperature distribution rapid test method based on small amount of measuring point data |
WO2021226408A1 (en) * | 2020-05-08 | 2021-11-11 | Flir Commercial Systems, Inc. | Burn-in mitigation and associated imaging systems and methods |
CN111722086B (en) * | 2020-06-29 | 2023-01-24 | 中国人民解放军国防科技大学 | High-power processor chip aging test method |
CN112857595B (en) * | 2021-01-15 | 2022-12-27 | 苏州浪潮智能科技有限公司 | Aging chamber temperature detection method, system and medium |
CN113742153B (en) * | 2021-09-15 | 2023-12-26 | 北京字节跳动网络技术有限公司 | Equipment testing method and device, readable medium and electronic equipment |
CN114137385A (en) * | 2021-10-19 | 2022-03-04 | 深圳市紫光同创电子有限公司 | Chip aging test equipment and method |
CN113777474B (en) * | 2021-11-10 | 2022-03-15 | 北京京瀚禹电子工程技术有限公司 | Test method and system for temperature-resistant aging test of integrated circuit |
US12102542B2 (en) | 2022-02-15 | 2024-10-01 | Boston Scientific Neuromodulation Corporation | Interspinous spacer and methods and systems utilizing the interspinous spacer |
US11838014B1 (en) * | 2022-07-28 | 2023-12-05 | Micron Technology, Inc. | Semiconductor device having voltage generator generating well potential |
CN117148124B (en) * | 2023-11-01 | 2024-02-20 | 杭州高坤电子科技有限公司 | Integrated circuit thermal resistance testing method, system and storage medium |
Citations (61)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3244267A (en) * | 1963-08-01 | 1966-04-05 | Merck & Co Inc | Convergence apparatus |
US3366220A (en) * | 1965-11-23 | 1968-01-30 | Gen Foods Corp | Method and apparatus for single filing |
US4265356A (en) * | 1979-08-20 | 1981-05-05 | The Lodge & Shipley Company | Apparatus for combining articles from plural lanes into a single lane |
US4313720A (en) * | 1980-03-03 | 1982-02-02 | Emhart Industries, Inc. | Parison transfer means |
US4354813A (en) * | 1979-10-09 | 1982-10-19 | Motosacoche S.A. | Plant for producing containers by drawing-blowing of preforms in plastic material |
US4434583A (en) * | 1981-07-06 | 1984-03-06 | Burgess Jr Warren C | Automatically adjustable workpiece guide and feed mechanism |
US4938636A (en) * | 1988-11-14 | 1990-07-03 | Aidlin Automation Corp. | Method and apparatus for feeding container bodies |
US5119337A (en) * | 1989-05-20 | 1992-06-02 | Kabushiki Kaisha Toshiba | Semiconductor memory device having burn-in test function |
US5161665A (en) * | 1990-11-13 | 1992-11-10 | Riverwood International Corporation | Lane merger apparatus |
US5186307A (en) * | 1991-04-16 | 1993-02-16 | Sidel | Transport device for removing interlocked preforms |
US5309090A (en) * | 1990-09-06 | 1994-05-03 | Lipp Robert J | Apparatus for heating and controlling temperature in an integrated circuit chip |
US5406212A (en) * | 1991-07-19 | 1995-04-11 | Sumitomo Electric Industries, Ltd. | Burn-in apparatus and method for self-heating semiconductor devices having built-in temperature sensors |
US5501552A (en) * | 1994-04-29 | 1996-03-26 | Goldco Industries, Inc. | Conveying system for unstable articles having a neck ring |
US5607706A (en) * | 1995-04-05 | 1997-03-04 | Husky Injection Molding Systems Ltd. | Preconditioning preforms on a reheat blow molding system |
US5701666A (en) * | 1994-08-31 | 1997-12-30 | Motorola, Inc. | Method for manufacturing a stimulus wafer for use in a wafer-to-wafer testing system to test integrated circuits located on a product wafer |
US5713666A (en) * | 1995-08-30 | 1998-02-03 | Seelink Technology | Thermal testing apparatus and method |
US5772000A (en) * | 1996-03-28 | 1998-06-30 | Serres; Paul J. | Hop vine transfer system |
US5834038A (en) * | 1994-12-14 | 1998-11-10 | Nissei Asb Machine Co., Ltd. | Blow molding apparatus |
US5844429A (en) * | 1996-02-01 | 1998-12-01 | Lg Semicon Co., Ltd. | Burn-in sensing circuit |
US5927853A (en) * | 1994-10-19 | 1999-07-27 | Christiaens; Filip | Method for thermal impedance evaluation of packaged semiconductor components |
US5944165A (en) * | 1995-05-02 | 1999-08-31 | Lever Brothers Company | Lane distribution apparatus |
US5995428A (en) * | 1997-11-22 | 1999-11-30 | United Microelectronics Corp. | Circuit for burn-in operation on a wafer of memory devices |
US6035407A (en) * | 1995-08-14 | 2000-03-07 | Compaq Computer Corporation | Accomodating components |
US6037792A (en) * | 1996-12-21 | 2000-03-14 | Stmicroelectronics, Inc. | Burn-in stress test mode |
US6100751A (en) * | 1997-06-20 | 2000-08-08 | Intel Corporation | Forward body biased field effect transistor providing decoupling capacitance |
US6104061A (en) * | 1997-07-08 | 2000-08-15 | Micron Technology, Inc. | Memory cell with vertical transistor and buried word and body lines |
US6114866A (en) * | 1997-09-08 | 2000-09-05 | Mitsubishi Electric Systems Lsi Design Corporation | Semiconductor device test board and method for evaluating semiconductor devices |
US6137301A (en) * | 1998-05-11 | 2000-10-24 | Vanguard International Semiconductor Company | EPROM used as a voltage monitor for semiconductor burn-in |
US6141193A (en) * | 1999-03-15 | 2000-10-31 | National Semiconductor Corporation | Shunt regulator with shutdown protection to prevent excessive power dissipation |
US6149299A (en) * | 1997-12-11 | 2000-11-21 | National Semiconductor Corporation | Direct temperature sensing of a semiconductor device semiconductor device |
US6157201A (en) * | 1995-04-20 | 2000-12-05 | Sun Microsystems, Inc. | Burn-in system for reliable integrated circuit manufacturing |
US6203191B1 (en) * | 1998-10-28 | 2001-03-20 | Speculative Incorporated | Method of junction temperature determination and control utilizing heat flow |
US6218892B1 (en) * | 1997-06-20 | 2001-04-17 | Intel Corporation | Differential circuits employing forward body bias |
US20010048708A1 (en) * | 1998-02-02 | 2001-12-06 | Kazuyuki Mikubo | Method of calculating thermal resistance in semiconductor package accommodating semiconductor chip within a case which can be applied to calculation for semiconductor package with a radiation fins. |
US20020030533A1 (en) * | 1997-06-20 | 2002-03-14 | De Vivek K. | Circuit including forward body bias from supply voltage and ground nodes |
US20020050833A1 (en) * | 1996-10-21 | 2002-05-02 | Thomas P. Jones | Temperature control of electronic devices using power following feedback |
US6455336B1 (en) * | 2001-08-27 | 2002-09-24 | International Business Machines Corporation | Power reduction method and design technique for burn-in |
US20020140496A1 (en) * | 2000-02-16 | 2002-10-03 | Ali Keshavarzi | Forward body biased transistors with reduced temperature |
US20020145194A1 (en) * | 2001-04-06 | 2002-10-10 | Intel Corporation | Diamond heat spreading and cooling technique for integrated circuits |
US20020186031A1 (en) * | 1996-10-21 | 2002-12-12 | Delta Design, Inc. | Method and apparatus for temperature control of a device during testing |
US20030001604A1 (en) * | 2001-07-02 | 2003-01-02 | Intel Corporation | Integrated circuit burn-in methods and apparatus |
US20030091681A1 (en) * | 2001-02-09 | 2003-05-15 | Drysdale Barrie Lloyd | Method and apparatus for handling injection molded articles |
US6620352B1 (en) * | 2000-07-27 | 2003-09-16 | Ball Corporation | Automated material distribution control for stretch blow molded articles |
US20040016977A1 (en) * | 2002-05-07 | 2004-01-29 | Hitachi, Ltd. | Semiconductor integrated circuit device |
US20040083075A1 (en) * | 2002-10-29 | 2004-04-29 | Xuejun Fan | Junction temperatures measurements in semiconductor chip package technology |
US20040111231A1 (en) * | 2002-04-24 | 2004-06-10 | Yoshiyuki Ando | Integrated circuits having post-silicon adjustment control |
US20040108867A1 (en) * | 2002-12-04 | 2004-06-10 | Butler Richard M. | System for and method of assessing chip acceptability and increasing yield |
US20040140818A1 (en) * | 2002-11-28 | 2004-07-22 | Martin Perner | Circuit and method for determining at least one voltage, current and/or power value for an integrated circuit |
US20040150417A1 (en) * | 2003-01-30 | 2004-08-05 | Paulos John James | Integrated circuit with junction temperature sensing diode |
US6786639B2 (en) * | 2002-08-30 | 2004-09-07 | International Business Machines Corporation | Device for sensing temperature of an electronic chip |
US20040183588A1 (en) * | 2001-04-17 | 2004-09-23 | Massachusetts Institute Of Technology | Adaptive power supply and substrate control for ultra low power digital processors using triple well control |
US20050048159A1 (en) * | 2002-01-28 | 2005-03-03 | Yoshino Kogyosho Co Ltd | Preform conveying device |
US20050088137A1 (en) * | 2003-09-04 | 2005-04-28 | Aviad Cohen | Methods and apparatus for optimal voltage and frequency control of thermally limited systems |
US6897671B1 (en) * | 2004-03-01 | 2005-05-24 | Transmeta Corporation | System and method for reducing heat dissipation during burn-in |
US6900650B1 (en) * | 2004-03-01 | 2005-05-31 | Transmeta Corporation | System and method for controlling temperature during burn-in |
US6956437B2 (en) * | 2003-12-23 | 2005-10-18 | Agere Systems Inc. | Metal-oxide-semiconductor device having integrated bias circuit |
US20060020838A1 (en) * | 2004-06-30 | 2006-01-26 | Tschanz James W | Method, apparatus and system of adjusting one or more performance-related parameters of a processor |
US20070158776A1 (en) * | 2004-06-04 | 2007-07-12 | Alexandre Julio | PN-Junction Temperature Sensing Apparatus |
US7248988B2 (en) * | 2004-03-01 | 2007-07-24 | Transmeta Corporation | System and method for reducing temperature variation during burn in |
US7275012B2 (en) * | 2002-12-30 | 2007-09-25 | Intel Corporation | Automated method and apparatus for processor thermal validation |
US20090154525A1 (en) * | 2007-12-14 | 2009-06-18 | Industrial Technology Research Institute | Apparatus and method for measuring characteristic and chip temperature of led |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55107255A (en) * | 1979-02-12 | 1980-08-16 | Mitsubishi Electric Corp | Substrate potential generating circuit device |
JPS6020394A (en) * | 1983-07-14 | 1985-02-01 | Ricoh Co Ltd | Power source switching circuit |
JPS6159688A (en) * | 1984-08-31 | 1986-03-27 | Hitachi Ltd | Semiconductor integrated circuit device |
US4838664A (en) | 1986-07-10 | 1989-06-13 | Brent Graham | Diagnostic overlay |
CA1340569C (en) | 1987-05-05 | 1999-06-01 | Sungho Jin | Superconductive body having improved properties, and apparatus and systems comprising such a body |
US4855672A (en) | 1987-05-18 | 1989-08-08 | Shreeve Robert W | Method and process for testing the reliability of integrated circuit (IC) chips and novel IC circuitry for accomplishing same |
US5467300A (en) * | 1990-06-14 | 1995-11-14 | Creative Integrated Systems, Inc. | Grounded memory core for Roms, Eproms, and EEpproms having an address decoder, and sense amplifier |
EP0836194B1 (en) * | 1992-03-30 | 2000-05-24 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device |
US5461338A (en) * | 1992-04-17 | 1995-10-24 | Nec Corporation | Semiconductor integrated circuit incorporated with substrate bias control circuit |
US5491432A (en) * | 1992-08-07 | 1996-02-13 | Lsi Logic Corporation | CMOS Differential driver circuit for high offset ground |
US5430404A (en) * | 1992-10-28 | 1995-07-04 | Integrated Device Technology, Inc. | Output driver circuits with enhanced supply-line bounce control and improved VOH characteristic |
JP3307453B2 (en) * | 1993-03-18 | 2002-07-24 | ソニー株式会社 | Boost circuit |
KR0169157B1 (en) * | 1993-11-29 | 1999-02-01 | 기다오까 다까시 | Semiconductor circuit and mos-dram |
JP3311133B2 (en) * | 1994-02-16 | 2002-08-05 | 株式会社東芝 | Output circuit |
US5559368A (en) * | 1994-08-30 | 1996-09-24 | The Regents Of The University Of California | Dynamic threshold voltage mosfet having gate to body connection for ultra-low voltage operation |
JP2718375B2 (en) * | 1994-09-30 | 1998-02-25 | 日本電気株式会社 | Charge pump circuit |
US5689209A (en) * | 1994-12-30 | 1997-11-18 | Siliconix Incorporated | Low-side bidirectional battery disconnect switch |
JP3175521B2 (en) * | 1995-01-27 | 2001-06-11 | 日本電気株式会社 | Silicon-on-insulator semiconductor device and bias voltage generation circuit |
JP3641511B2 (en) * | 1995-06-16 | 2005-04-20 | 株式会社ルネサステクノロジ | Semiconductor device |
US5689144A (en) * | 1996-05-15 | 1997-11-18 | Siliconix Incorporated | Four-terminal power MOSFET switch having reduced threshold voltage and on-resistance |
KR100189752B1 (en) * | 1996-06-01 | 1999-06-01 | 구본준 | Power pump circuit with independent well bias voltage |
US5841299A (en) * | 1997-02-06 | 1998-11-24 | Intel Corporation | Method and apparatus for implementing an adiabatic logic family |
JP4046383B2 (en) * | 1997-04-01 | 2008-02-13 | 株式会社ルネサステクノロジ | Semiconductor integrated circuit device |
US5929695A (en) * | 1997-06-02 | 1999-07-27 | Stmicroelectronics, Inc. | Integrated circuit having selective bias of transistors for low voltage and low standby current and related methods |
US5986476A (en) * | 1997-08-08 | 1999-11-16 | Intel Corporation | Method and apparatus for implementing a dynamic adiabatic logic family |
US6252614B1 (en) * | 1998-07-20 | 2001-06-26 | Toshiba American Information Systems, Inc. | Software architecture which maintains system performance while pipelining data to an MFP and uses shared DLL |
JP2000088915A (en) * | 1998-09-14 | 2000-03-31 | Sony Corp | Method and apparatus for testing semiconductor |
JP2000206174A (en) * | 1999-01-14 | 2000-07-28 | Matsushita Electric Ind Co Ltd | Method for inspecting semiconductor device |
US6794620B1 (en) | 2001-11-07 | 2004-09-21 | Advanced Micro Devices, Inc. | Feedforward temperature control of device under test |
US7205758B1 (en) * | 2004-02-02 | 2007-04-17 | Transmeta Corporation | Systems and methods for adjusting threshold voltage |
-
2004
- 2004-03-01 US US10/791,099 patent/US7248988B2/en not_active Expired - Lifetime
-
2005
- 2005-03-01 JP JP2007501961A patent/JP4768710B2/en active Active
- 2005-03-01 WO PCT/US2005/006830 patent/WO2005085884A2/en active Application Filing
- 2005-03-01 CN CN200580006776.3A patent/CN1926439B/en active Active
-
2007
- 2007-07-24 US US11/881,006 patent/US7565259B2/en not_active Expired - Lifetime
-
2009
- 2009-06-19 US US12/488,379 patent/US20090316750A1/en not_active Abandoned
- 2009-07-20 US US12/506,070 patent/US8843344B2/en not_active Expired - Lifetime
Patent Citations (69)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3244267A (en) * | 1963-08-01 | 1966-04-05 | Merck & Co Inc | Convergence apparatus |
US3366220A (en) * | 1965-11-23 | 1968-01-30 | Gen Foods Corp | Method and apparatus for single filing |
US4265356A (en) * | 1979-08-20 | 1981-05-05 | The Lodge & Shipley Company | Apparatus for combining articles from plural lanes into a single lane |
US4354813A (en) * | 1979-10-09 | 1982-10-19 | Motosacoche S.A. | Plant for producing containers by drawing-blowing of preforms in plastic material |
US4313720A (en) * | 1980-03-03 | 1982-02-02 | Emhart Industries, Inc. | Parison transfer means |
US4434583A (en) * | 1981-07-06 | 1984-03-06 | Burgess Jr Warren C | Automatically adjustable workpiece guide and feed mechanism |
US4938636A (en) * | 1988-11-14 | 1990-07-03 | Aidlin Automation Corp. | Method and apparatus for feeding container bodies |
US5119337A (en) * | 1989-05-20 | 1992-06-02 | Kabushiki Kaisha Toshiba | Semiconductor memory device having burn-in test function |
US5309090A (en) * | 1990-09-06 | 1994-05-03 | Lipp Robert J | Apparatus for heating and controlling temperature in an integrated circuit chip |
US5161665A (en) * | 1990-11-13 | 1992-11-10 | Riverwood International Corporation | Lane merger apparatus |
US5186307A (en) * | 1991-04-16 | 1993-02-16 | Sidel | Transport device for removing interlocked preforms |
US5406212A (en) * | 1991-07-19 | 1995-04-11 | Sumitomo Electric Industries, Ltd. | Burn-in apparatus and method for self-heating semiconductor devices having built-in temperature sensors |
US5501552A (en) * | 1994-04-29 | 1996-03-26 | Goldco Industries, Inc. | Conveying system for unstable articles having a neck ring |
US6577148B1 (en) * | 1994-08-31 | 2003-06-10 | Motorola, Inc. | Apparatus, method, and wafer used for testing integrated circuits formed on a product wafer |
US5701666A (en) * | 1994-08-31 | 1997-12-30 | Motorola, Inc. | Method for manufacturing a stimulus wafer for use in a wafer-to-wafer testing system to test integrated circuits located on a product wafer |
US5927853A (en) * | 1994-10-19 | 1999-07-27 | Christiaens; Filip | Method for thermal impedance evaluation of packaged semiconductor components |
US5834038A (en) * | 1994-12-14 | 1998-11-10 | Nissei Asb Machine Co., Ltd. | Blow molding apparatus |
US5607706A (en) * | 1995-04-05 | 1997-03-04 | Husky Injection Molding Systems Ltd. | Preconditioning preforms on a reheat blow molding system |
US6157201A (en) * | 1995-04-20 | 2000-12-05 | Sun Microsystems, Inc. | Burn-in system for reliable integrated circuit manufacturing |
US5944165A (en) * | 1995-05-02 | 1999-08-31 | Lever Brothers Company | Lane distribution apparatus |
US6035407A (en) * | 1995-08-14 | 2000-03-07 | Compaq Computer Corporation | Accomodating components |
US5713666A (en) * | 1995-08-30 | 1998-02-03 | Seelink Technology | Thermal testing apparatus and method |
US5844429A (en) * | 1996-02-01 | 1998-12-01 | Lg Semicon Co., Ltd. | Burn-in sensing circuit |
US5772000A (en) * | 1996-03-28 | 1998-06-30 | Serres; Paul J. | Hop vine transfer system |
US20020050833A1 (en) * | 1996-10-21 | 2002-05-02 | Thomas P. Jones | Temperature control of electronic devices using power following feedback |
US20020186031A1 (en) * | 1996-10-21 | 2002-12-12 | Delta Design, Inc. | Method and apparatus for temperature control of a device during testing |
US20030001605A1 (en) * | 1996-10-21 | 2003-01-02 | Delta Design, Inc. | Temperature control of electronic devices using power following feedback |
US6037792A (en) * | 1996-12-21 | 2000-03-14 | Stmicroelectronics, Inc. | Burn-in stress test mode |
US6310485B1 (en) * | 1996-12-21 | 2001-10-30 | Stmicroelectronics, Inc. | Integrated circuit device having a burn-in mode for which entry into and exit from can be controlled |
US6100751A (en) * | 1997-06-20 | 2000-08-08 | Intel Corporation | Forward body biased field effect transistor providing decoupling capacitance |
US20020030533A1 (en) * | 1997-06-20 | 2002-03-14 | De Vivek K. | Circuit including forward body bias from supply voltage and ground nodes |
US6218892B1 (en) * | 1997-06-20 | 2001-04-17 | Intel Corporation | Differential circuits employing forward body bias |
US6104061A (en) * | 1997-07-08 | 2000-08-15 | Micron Technology, Inc. | Memory cell with vertical transistor and buried word and body lines |
US6114866A (en) * | 1997-09-08 | 2000-09-05 | Mitsubishi Electric Systems Lsi Design Corporation | Semiconductor device test board and method for evaluating semiconductor devices |
US5995428A (en) * | 1997-11-22 | 1999-11-30 | United Microelectronics Corp. | Circuit for burn-in operation on a wafer of memory devices |
US6149299A (en) * | 1997-12-11 | 2000-11-21 | National Semiconductor Corporation | Direct temperature sensing of a semiconductor device semiconductor device |
US20010048708A1 (en) * | 1998-02-02 | 2001-12-06 | Kazuyuki Mikubo | Method of calculating thermal resistance in semiconductor package accommodating semiconductor chip within a case which can be applied to calculation for semiconductor package with a radiation fins. |
US6262588B1 (en) * | 1998-05-11 | 2001-07-17 | Vanguard International Semiconductor Corporation | Bias monitor for semiconductor burn-in |
US6137301A (en) * | 1998-05-11 | 2000-10-24 | Vanguard International Semiconductor Company | EPROM used as a voltage monitor for semiconductor burn-in |
US6203191B1 (en) * | 1998-10-28 | 2001-03-20 | Speculative Incorporated | Method of junction temperature determination and control utilizing heat flow |
US6141193A (en) * | 1999-03-15 | 2000-10-31 | National Semiconductor Corporation | Shunt regulator with shutdown protection to prevent excessive power dissipation |
US20020140496A1 (en) * | 2000-02-16 | 2002-10-03 | Ali Keshavarzi | Forward body biased transistors with reduced temperature |
US6620352B1 (en) * | 2000-07-27 | 2003-09-16 | Ball Corporation | Automated material distribution control for stretch blow molded articles |
US20030091681A1 (en) * | 2001-02-09 | 2003-05-15 | Drysdale Barrie Lloyd | Method and apparatus for handling injection molded articles |
US20020145194A1 (en) * | 2001-04-06 | 2002-10-10 | Intel Corporation | Diamond heat spreading and cooling technique for integrated circuits |
US20040183588A1 (en) * | 2001-04-17 | 2004-09-23 | Massachusetts Institute Of Technology | Adaptive power supply and substrate control for ultra low power digital processors using triple well control |
US20050240844A1 (en) * | 2001-07-02 | 2005-10-27 | Intel Corporation | Integrated circuit burn-in methods and apparatus |
US20030001604A1 (en) * | 2001-07-02 | 2003-01-02 | Intel Corporation | Integrated circuit burn-in methods and apparatus |
US6455336B1 (en) * | 2001-08-27 | 2002-09-24 | International Business Machines Corporation | Power reduction method and design technique for burn-in |
US20050048159A1 (en) * | 2002-01-28 | 2005-03-03 | Yoshino Kogyosho Co Ltd | Preform conveying device |
US20040111231A1 (en) * | 2002-04-24 | 2004-06-10 | Yoshiyuki Ando | Integrated circuits having post-silicon adjustment control |
US20040016977A1 (en) * | 2002-05-07 | 2004-01-29 | Hitachi, Ltd. | Semiconductor integrated circuit device |
US6786639B2 (en) * | 2002-08-30 | 2004-09-07 | International Business Machines Corporation | Device for sensing temperature of an electronic chip |
US20040083075A1 (en) * | 2002-10-29 | 2004-04-29 | Xuejun Fan | Junction temperatures measurements in semiconductor chip package technology |
US6853944B2 (en) * | 2002-10-29 | 2005-02-08 | Koninklijke Philips Electronics N.V. | Junction temperatures measurements in semiconductor chip package technology |
US20040140818A1 (en) * | 2002-11-28 | 2004-07-22 | Martin Perner | Circuit and method for determining at least one voltage, current and/or power value for an integrated circuit |
US20040108867A1 (en) * | 2002-12-04 | 2004-06-10 | Butler Richard M. | System for and method of assessing chip acceptability and increasing yield |
US7275012B2 (en) * | 2002-12-30 | 2007-09-25 | Intel Corporation | Automated method and apparatus for processor thermal validation |
US20040150417A1 (en) * | 2003-01-30 | 2004-08-05 | Paulos John James | Integrated circuit with junction temperature sensing diode |
US20050088137A1 (en) * | 2003-09-04 | 2005-04-28 | Aviad Cohen | Methods and apparatus for optimal voltage and frequency control of thermally limited systems |
US6956437B2 (en) * | 2003-12-23 | 2005-10-18 | Agere Systems Inc. | Metal-oxide-semiconductor device having integrated bias circuit |
US6900650B1 (en) * | 2004-03-01 | 2005-05-31 | Transmeta Corporation | System and method for controlling temperature during burn-in |
US7242205B1 (en) * | 2004-03-01 | 2007-07-10 | Transmeta Corporation | System and method for reducing heat dissipation during burn-in |
US7248988B2 (en) * | 2004-03-01 | 2007-07-24 | Transmeta Corporation | System and method for reducing temperature variation during burn in |
US6897671B1 (en) * | 2004-03-01 | 2005-05-24 | Transmeta Corporation | System and method for reducing heat dissipation during burn-in |
US20070271061A1 (en) * | 2004-03-01 | 2007-11-22 | Transmeta Corporation | System and method for reducing temperature variation during burn in |
US20070158776A1 (en) * | 2004-06-04 | 2007-07-12 | Alexandre Julio | PN-Junction Temperature Sensing Apparatus |
US20060020838A1 (en) * | 2004-06-30 | 2006-01-26 | Tschanz James W | Method, apparatus and system of adjusting one or more performance-related parameters of a processor |
US20090154525A1 (en) * | 2007-12-14 | 2009-06-18 | Industrial Technology Research Institute | Apparatus and method for measuring characteristic and chip temperature of led |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7834648B1 (en) * | 2004-03-01 | 2010-11-16 | Eric Chen-Li Sheng | Controlling temperature in a semiconductor device |
US10049957B2 (en) | 2011-03-03 | 2018-08-14 | International Business Machines Corporation | On-chip control of thermal cycling |
US8909383B2 (en) | 2011-12-22 | 2014-12-09 | International Business Machines Corporation | Proactive cooling of chips using workload information and controls |
Also Published As
Publication number | Publication date |
---|---|
US20090289654A1 (en) | 2009-11-26 |
CN1926439B (en) | 2010-06-09 |
US20050192773A1 (en) | 2005-09-01 |
JP4768710B2 (en) | 2011-09-07 |
WO2005085884A9 (en) | 2006-02-09 |
US20070271061A1 (en) | 2007-11-22 |
CN1926439A (en) | 2007-03-07 |
US7565259B2 (en) | 2009-07-21 |
WO2005085884A3 (en) | 2006-08-03 |
US8843344B2 (en) | 2014-09-23 |
US7248988B2 (en) | 2007-07-24 |
WO2005085884A2 (en) | 2005-09-15 |
JP2007526486A (en) | 2007-09-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8843344B2 (en) | System and method for reducing temperature variation during burn in | |
US7463050B1 (en) | System and method for controlling temperature during burn-in | |
US6552561B2 (en) | Apparatus and method for controlling temperature in a device under test using integrated temperature sensitive diode | |
US9285417B2 (en) | Low-voltage IC test for defect screening | |
US7595652B2 (en) | System and method for reducing heat dissipation during burn-in | |
US5825193A (en) | Semiconductor integrated circuit device | |
US6545494B1 (en) | Apparatus and method for controlling temperature in a wafer using integrated temperature sensitive diode | |
US7170310B2 (en) | System and method using locally heated island for integrated circuit testing | |
US6577146B2 (en) | Method of burning in an integrated circuit chip package | |
JP4789917B2 (en) | System and method for regulating temperature during burn-in | |
US6989684B2 (en) | System for and method of assessing chip acceptability and increasing yield | |
JPH10135286A (en) | Method and system for sorting high temperature detect product | |
US6771089B1 (en) | Test fixture having an adjustable capacitance and method for testing a semiconductor component | |
US6968287B2 (en) | System and method for predicting burn-in conditions | |
JPH0992697A (en) | Semiconductor wafer and test method therefor | |
Vassighi | Heat and Power Management for High Performance Integrated Circuits | |
JPH0688856A (en) | Method and device for testing semiconductor device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- AFTER EXAMINER'S ANSWER OR BOARD OF APPEALS DECISION |