US20090280730A1 - Burnishing apparatus and process - Google Patents
Burnishing apparatus and process Download PDFInfo
- Publication number
- US20090280730A1 US20090280730A1 US12/437,564 US43756409A US2009280730A1 US 20090280730 A1 US20090280730 A1 US 20090280730A1 US 43756409 A US43756409 A US 43756409A US 2009280730 A1 US2009280730 A1 US 2009280730A1
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- United States
- Prior art keywords
- tape
- burnishing
- contact
- roller
- guide rollers
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
- B24B21/12—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces involving a contact wheel or roller pressing the belt against the work
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
Definitions
- Magnetic media such as magnetic disk
- magnetic disk is widely used for storage of information in various applications, such as computer systems as well as a vast array of consumer products.
- the demand for high recording density increased tremendously.
- films formed on surface of the disk such as magnetic layers and protective films, are becoming thinner.
- various coatings or films are formed on surfaces of a disk substrate.
- tape cleaning is carried out on the surfaces of the disks by a burnishing apparatus.
- the tape cleaning is to polish or burnish the surfaces of the disk by pressing a burnishing tape having abrasive particles bonded thereon, against the surfaces of the disk while the disk is rotating.
- abrasive particles can separate from the tape during burnishing process. As such, the abrasive particles are undesirably deposited onto the surfaces of the disk. Such delamination of the abrasive particles from the burnishing tape results in unacceptable high failure rates and affects the performance of the magnetic disk.
- Embodiments generally relate to burnishing apparatus and process for burnishing a media, such as magnetic disk.
- the burnishing process can also be used to burnish other types of media.
- a burnishing apparatus in one embodiment, includes a tape dispensing assembly having a tape supply module for dispensing a tape.
- the burnishing apparatus includes a plurality of tape guide rollers for guiding the tape provided.
- a contact roller mount unit is provided.
- the contact roller mount unit includes a plurality of contact guide rollers and a contact roller. The contact roller contacts the tape against a surface of a media during burnishing.
- the tape guide rollers and the contact guide rollers are arranged to provide a zero contact force against the media to be burnished.
- a process of burnishing a media includes dispensing a tape to a contact roller mounted on a contact roller mount unit.
- the contact roller mount unit further includes a plurality of contact guide rollers.
- the process includes routing the tape to form a tape path through a plurality of tape guide rollers and pressing the tape against a surface of the media.
- the tape guide rollers and the contact guide rollers are arranged to provide a zero contact force during burnishing.
- FIGS. 1 a - c show front, top and simplified side views of a burnishing apparatus in accordance with one embodiment
- FIG. 2 shows an embodiment of contact rollers inactive and active mechanism
- FIG. 3 a - i show an embodiment of a process of burnishing a media.
- Embodiments generally relate to burnishing apparatus and process of burnishing a media, such as a magnetic media.
- Magnetic media for example, includes magnetic disk.
- the burnishing apparatus can also be used to polish a wafer.
- the burnishing apparatus and process can also be used to burnish other types of media.
- FIGS. 1 a - c show a front, top and simplified side view of a burnishing apparatus 100 in accordance with one embodiment.
- the burnishing apparatus includes a support platform 101 mounted on a base unit 102 .
- Various assemblies are mounted on the support platform 101 to facilitate burnishing of a media 190 , such as a magnetic disk.
- the support platform includes a contact roller assembly 120 , a tape dispensing assembly 150 and a tape collector assembly 180 as shown in FIG. 1 c . Providing other types of assembly is also useful.
- the support platform is divided into first and second halves which mirror each other to burnish both major surfaces, such as front and back surfaces of the media simultaneously.
- the support platform 101 is divided into first and second halves, 103 a and 103 b .
- the assemblies on the second half 103 b burnish one of the major surfaces, for example, the back surface 190 b of the disk while the assemblies on the first half 103 a burnish the other major surface, for example, the front surface 190 a of the disk.
- the assemblies will be described with respect to burnishing one of the disk surfaces as illustrated in FIG. 1 c.
- the apparatus comprises a contact roller assembly 120 provided on the support platform.
- the contact roller assembly includes a roller module 121 .
- the roller module comprises a roller mount unit 122 with a contact roller 123 mounted thereto.
- the contact roller in one embodiment, is freely rotatable around an axis of rotation.
- the roller mount unit in one embodiment, can be adjusted to position the contact roller.
- the roller mount unit comprises a plurality of contact guide rollers.
- first and second contact guide rollers, 124 and 125 are provided on each side, 122 a and 122 b , of the roller mount unit.
- the first guide roller 124 in one embodiment is located lower than the second contact guide roller 125 .
- the roller mount unit 122 in one embodiment, comprises an air bearing unit 126 . In one embodiment, the roller mount unit is mounted on the air bearing unit. The air bearing 126 unit reduces frictions during movement of the roller mount unit 122 or positioning the contact roller towards the media 190 prior to burnishing and frictions occurred during the burnishing process. Providing more than one air bearing unit and having the air bearing unit at other location of the roller mount unit may also be useful.
- the first and second roller mount units which mirror each other, in one embodiment, are connected and synchronized to move in the same distance towards each other such that the contact rollers can exert the same contact force on the front and back side surfaces of the media.
- the first and second roller mount units are connected with each other by string and pulley mechanism.
- a flexible coupling such as a string or cable 130 and a plurality of pulleys 133 are provided in the roller mount units and routed on opposing sides, 101 a and 101 c, of the support platform 101 adjacent to the roller mount units to synchronize the movement and contact force of the contact rollers.
- live weight 134 is provided at one end of the string to maintain the contact force of the contact rollers. Providing other means or techniques to synchronize the movement and maintain the contact force of the contact rollers is also useful.
- the burnishing apparatus includes a tape dispensing assembly 150 mounted on the front surface 101 e of the support platform.
- the tape dispensing assembly includes a tape supply module 151 for providing a burnishing tape 152 .
- the tape supply module includes a roll of burnishing tape in a tape reel 153 .
- the burnishing tape includes a first surface 152 a and a second surface 152 b .
- the burnishing tape in one embodiment, includes a flexible backing material, such as Mylar.
- the first surface 152 a of the burnishing tape for example, includes aluminum oxide or other abrasive material embedded in a binder system coated onto the flexible backing material.
- the burnishing tape can be 1 micron Alumina manufactured by Mypox of Japan. Other types of burnishing tape are also useful.
- the burnishing tape in one embodiment, comprises a width sufficient to process a side of the disk. Providing other widths is also useful.
- the tape supply module 151 in one embodiment, continuously provides a burnishing tape to a plurality of rollers during burnishing.
- the tape supply module comprises a drive roller (not shown) driven by, for example, a motor (not shown).
- the speed or velocity of the burnishing tape dispensed is determined by the speed of the drive roller which in turn determined by the motor.
- the motor in one embodiment, can be set to dispense the tape to the roller at either a constant or variable speed or velocity. For example, this can be achieved by setting the motor with the desired revolutions per minute (rpm), which can be constant or varied. In one embodiment, the motor is set to dispense burnishing tape at a constant speed.
- an encoder 154 is provided.
- the encoder 154 measures the number of pulses (distance) and pulse rate (tape speed) and provides feedback to the motor to control the speed. Providing other means to control the speed and velocity of dispensing the tape is also useful.
- the encoder in one embodiment, can also be included as one of the tape guide rollers which will be discussed in the following paragraph.
- a sensor 155 is provided adjacent to the tape supply module 151 .
- the sensor senses the amount of tape reaming in the reel.
- the sensor comprises a laser displacement sensor.
- the laser sensor for example, can detect distances with a precision of ⁇ 0.05 mm. Providing other types of sensor can also be useful.
- the sensor enables signal to be provided to inform an operator to install a new tape supply such as to replace the empty tape supply module.
- the tape dispensing assembly may comprise an automatic tape change function.
- the tape dispensing assembly comprises primary and secondary tape supply modules (not shown) for providing burnishing tape.
- a tape change module (not shown) can be provided between the tape supply modules to enable an automatic tape change function.
- the tape change module causes tape from the secondary supply to attach to the tape from the primary supply.
- the tapes are coupled, resulting in the primary tape guiding the secondary tape to the rollers, effecting tape change.
- the secondary tape supply becomes the primary tape supply.
- An operator can install a new tape supply to replace the empty primary supply, which becomes the secondary tape supply.
- a plurality of tape guide rollers are provided on the front surface 101 e of the support platform to define a tape path, indicated by arrows.
- the tape path includes a first segment from the tape supply module 151 to the contact roller 123 and a second segment from the contact roller 123 to a tape collector module 181 .
- the tape guide rollers are mounted on the front surface of the support platform to guide the tape along the tape path.
- the tape guide rollers are freely rotatable.
- the tape guide roller in one embodiment, can be a circular cylinder covered by an anti-skid material, such as polyurethane. Other anti-skid materials are also useful.
- the tape guide rollers may include self centering tape guides which align the tape in the center of the tape path. This avoids or reduces tape misalignment on the disk surface during burnishing.
- the first segment of the tape path includes of a plurality of tape guide rollers. In one embodiment, two tape guide rollers are provided in the first segment. Providing other number of tape guide rollers including the encoder to serve as one of the tape guide rollers is also useful.
- the first and second tape guide rollers, 156 and 157 , in the first segment are mounted on a tape guide unit 158 .
- the tape guide unit in one embodiment, is movable.
- an adjustment unit 159 may further be provided adjacent to the tape guide unit 158 . The adjustment unit may be used to fine tune or adjust the movement of the tape guide unit.
- the tape guide unit in one embodiment, can be adjusted to move in unison with the movement of the contact mount unit to position the contact rollers for burnishing.
- the rotational axis of the first tape guide roller and the rotational axis of the first contact guide roller are arranged in such a manner to be in line with each other to form a common plane R 1 .
- the rotational axis of the second tape guide roller and the rotational axis of the second contact guide roller are arranged in a manner to be in line with each other to form a common plane R 2 .
- the common planes, R 1 and R 2 are arranged to be substantially parallel with each other.
- the common planes R 1 and R 2 are arranged in parallel with each other. As such, the burnishing tape is arranged to be always maintained in parallel as shown in FIG. 1 c .
- Such arrangement of rollers enables the resultant force of tape tension F T acted on a contact force F C of the contact roller against the media to be zero during burnishing. This is possible as the angle between the contact force F C and tension force F T is maintained at about 90°. Any angle other than 90° will create a net resultant force that tends to adjust the tape guide unit and brings the angle back to 90°.
- the burnishing apparatus is therefore in a state of equilibrium. Providing other arrangement of the rollers to achieve the state of equilibrium is also useful.
- the rotational axes of the first and second tape guide rollers and the encoder are aligned in one direction forming a common plane as shown as Y-Y. In another embodiment, the rotational axes of the first and second tape guide rollers and the encoder need not be aligned in one direction.
- a third and fourth tape guide rollers, 160 and 161 are provided in the second segment of the tape path.
- the rotational axis of the third tape guide roller is arranged to be substantially in line with the rotational axis of the encoder to form a common plane R 3 .
- the rotational axis of the fourth tape guide roller in one embodiment, is arranged to be substantially in line with the rotational axis of the second tape guide roller in the common plane R 2 .
- the planes, R 1 , R 2 and R 3 in one embodiment, are parallel to each other. As such, the burnishing tape is always maintained in parallel as indicated by the arrows.
- the rotational axis of the third tape guide roller need not be in line with the rotational axis of the encoder to form a common plane.
- the rotational axis of the fourth tape guide roller need not be in line with the rotational axis of the second tape guide roller.
- the rotational axes of the third and fourth tape guide rollers are not aligned to form a common plane. Having the rotational axes of the third and fourth tape guide rollers aligned to form a common plane can also be useful.
- the burnishing apparatus 100 also includes a tape collector assembly 180 mounted on the front surface of the support platform in one embodiment.
- the tape collector assembly 180 includes a tape collector module 181 for collecting the used burnishing tape.
- the tape collector module includes a tape reel 182 .
- the tape collector module in one embodiment, continuously collects used burnishing tape when the tape collector module is activated.
- the tape collector module comprises a drive roller (not shown) driven by, for example, a motor (not shown).
- the drive roller of the tape collector module may be driven by the same motor of the tape supply module. Coupling means or linkages may be provided to enable the same motor to be used for dispensing and collecting the burnishing tape.
- a sensor 183 can also be provided adjacent to the tape collector module in one embodiment.
- the sensor senses the amount of tape collected in the reel.
- the sensor comprises a laser displacement sensor. Providing other types of sensor can also be useful.
- the sensor enables signal to be provided to inform an operator to remove the used tape such as to replace the full tape collector module with an empty collector module.
- An automatic tape change module can also be provided to automatically replace the full tape collector module with an empty tape collector module. This will not affect the burnishing process and hence increase throughput.
- the tape collector assembly 180 further includes a tape advancing roller mount unit 184 .
- the tape advancing roller mount unit 184 in one embodiment, is arranged to be adjacent to the tape collector module 181 . Providing the tape advancing roller mount unit at other location is also useful.
- the tape advancing roller mount unit is movable.
- the tape advancing roller mount unit in one embodiment, includes a tape advancing roller 185 . Providing more than one tape advancing roller is also useful.
- the tape advancing roller 185 in one embodiment, is used for maintaining the tension of the tape during burnishing of the media.
- the tape advancing mount unit 184 in one embodiment, further includes an air bearing unit 186 .
- the tape advancing roller mount unit is mounted on the air bearing unit. The air bearing unit reduces frictions during movement of the tape advancing roller mount unit during burnishing and frictions occurred while collecting the used burnishing tape.
- the first and second tape advancing mount units which mirror each other, in one embodiment, are connected and synchronized to move in the same direction and distance.
- the first and second tape advancing roller mount units are connected with each other by string and pulley mechanism.
- a flexible string or a cable 187 and a plurality of pulleys 188 are provided in the tape advancing roller mount units to synchronize the movement and maintain the tension of the tape as shown in FIG. 1 a .
- live weights 189 are coupled to the string facilitated by the pulleys, where the live weight constantly pulls the tape for maintaining the tape tensioning.
- the tension of the tape for example, is half of the live weight. Providing other means or techniques to synchronize the movement and maintain the tape tensioning is also useful.
- a plurality of sensors are provided adjacent to a side 101 d of the support platform.
- the sensors are provided adjacent to the tape advancing roller mount unit 184 .
- the sensors sense the distance and movement of the tape advancing roller mount unit.
- the sensors include a first or extend limit sensor 191 located farther away from the side 101 d of the support platform and a second or retract limit sensor 192 located nearer to the side 101 d of the support platform.
- the sensors comprise a laser displacement sensor.
- the sensors enable the tape collector module to automatically collect the used burnishing tape once activated.
- FIG. 2 shows an embodiment 200 of contact rollers inactive and active mechanism.
- a motor 210 is provided to control the inactive and active mechanism of the contact rollers 123 .
- a stepper motor is provided. Providing other types of motor is also useful.
- the stepper motor controls the contact rollers 123 in both halves, 103 a and 103 b , of the support platform 101 .
- the stepper motor is attached to the back surface 101 f of the support platform.
- Linkages are coupled to the stepper motor to the roller mount units for positioning the contact rollers as desired. For example, the stepper motor positions the contact rollers 123 in an inactive or active position. In the inactive position, the contact rollers are “opened”.
- the contact rollers 123 are “closed”. Closing of the contact rollers enables burnishing of the media to take place.
- the contact rollers 123 are attached to the terminal ends of rod-shaped shafts whose other ends are attached to the open/close fingers 220 .
- the open/close fingers 220 are adapted to engage threads on a bi-directional ball screw 230 extending outwardly from a rotary shaft of the stepper motor 210 .
- air bearing unit 126 is provided on each of the roller mount unit 122 . The air bearing units reduce frictions during movement of the roller mount unit towards the media prior to burnishing and frictions occurred during the burnishing process.
- FIGS. 3 a - i show an embodiment of a process of burnishing a media.
- the media to be burnished includes a magnetic media in one embodiment.
- Magnetic media for example, includes magnetic disk.
- the burnishing process can also be used or can be modified to polish a wafer. For simplicity, the process will be described with respect to burnishing one of the disk surfaces.
- the media 390 to be burnished as shown in FIG. 3 a for example, a magnetic disk, is attached at an end of a spindle (not shown).
- the spindle supports the magnetic disk such that its surfaces to be burnished are arranged vertically, and is rotated by a motor (not shown). Providing other means to support the magnetic disk to be burnished is also useful.
- FIG. 3 a shows an inactive position of the contact roller prior to burnishing the media 390 .
- the contact rollers are opened, enabling placement of the disk in the space between the contact rollers 323 .
- a burnishing tape 352 is dispensed from a tape supply module 351 prior to burnishing.
- the burnishing tape includes a first surface 352 a and a second surface 352 b .
- the burnishing tape in one embodiment, includes a flexible backing material, such as Mylar.
- the first surface 352 a of the burnishing tape for example, includes aluminum oxide or other abrasive material embedded in a binder system coated onto the flexible backing material.
- the burnishing tape 352 is fed from the tape supply module 351 to a contact roller 323 , which is provided on a contact roller mount unit 322 , through a first tape guide roller 356 and a first contact guide roller 324 .
- the contact roller 323 is freely rotatable around an axis of rotation.
- the burnishing tape 352 is routed to an encoder 354 , through a second contact guide roller 325 mounted on the roller mount unit 322 and a second tape guide roller 357 .
- the first and second tape guide rollers, 356 and 357 are mounted on a tape guide unit 358 .
- the burnishing tape 352 is routed to a tape collector module 381 through a third tape guide roller 360 , a tape advancing roller 385 and a fourth tape guide roller 361 .
- the tape advancing roller that is mounted on a tape advancing roller mount unit 384 maintains the tension of the tape.
- FIG. 3 b shows a portion of the burnishing apparatus initializing the inactive position of the contact rollers.
- a motor (not shown) coupled to the contact roller mount unit 322 is used to initialize the inactive mechanism such that the contact rollers are closed.
- a stepper motor can be used to position the contact rollers in inactive position. Providing other types of motor is also useful.
- the tape guide unit 358 in one embodiment, is movable. In one embodiment, an adjustment unit 359 may further be provided adjacent to the tape guide unit 358 as shown in FIG. 3 a . The adjustment unit may be used to fine tune or adjust the movement of the tape guide unit.
- the tape guide unit 358 in one embodiment, is arranged to move in unison with the movement of the contact mount unit 322 as illustrated in FIG. 3 b . Prior to burnishing, the burnishing apparatus is in a state of equilibrium. In one embodiment, the rotational axis of the first tape guide roller and the rotational axis of the first contact guide roller are arranged in such a manner to be in line with each other to form a common plane R 1 .
- the rotational axis of the second tape guide roller and the rotational axis of the second contact guide roller are arranged in a manner to be in line with each other to form a common plane R 2 .
- the common planes, R 1 and R 2 are arranged to be substantially parallel with each other.
- the common planes R 1 and R 2 are arranged in parallel with each other.
- the burnishing tape is arranged to be always maintained in parallel as indicated by arrows illustrated in FIG. 3 b .
- Such arrangement of rollers enables the resultant force of tape tension F T acted on a contact force F C of the contact roller against the media to be zero in the inactive position of the contact rollers as shown in FIG. 3 c .
- the contact force F C is zero at the instantaneous moment when the contact roller just contacts the surface of the disk. This is possible as the angle 0 between the contact force and tension force F T is maintained at about 90°. Any angle other than 90° will create a net resultant force that tends to adjust the tape guide unit and brings the angle ⁇ back to 90° as shown as dotted lines in FIG. 3 d .
- the burnishing apparatus is therefore in a state of equilibrium. Providing other arrangement of the rollers to achieve the state of equilibrium is also useful.
- the arrangement of the rollers also provides the advantage of minimizing damage caused to the burnishing tape as the first surface of the burnishing tape 352 a which comprises abrasive particles never touches any of the rollers prior to contacting the surface of the disk 390 during burnishing as illustrated in FIG. 3 a.
- the tape supply module 351 rotates in a direction, for example, a counter clockwise direction to dispense the burnishing tape.
- the burnishing tape moves in a direction as indicated by the arrows.
- the encoder 354 picks up the number of pulses (distance) and pulse rate (tape speed) and provide feedback to a motor (not shown) which is coupled to the tape supply module 351 to control the speed of dispensing the burnishing tape.
- sufficient live weight (not shown) is added to forward the tape dispensed by the tape supply module in one embodiment.
- the live weight coupled to the tape advancing roller will be lowered by half a distance of the dispensed length of the burnishing tape.
- the tape advancing roller moves in a direction as shown by the arrow to maintain the tension of the tape.
- the burnishing process continues by dispensing another length of the burnishing tape.
- the live weight for example, is lowered by another half of the dispensed length, resulting in the tape advancing roller moving in a direction as shown by the dotted lines in FIG. 3 f .
- the live weight constantly pulls the tape and maintains the tension of the tape.
- the tape supply module continues to dispense the burnishing tape until the air bearing unit 386 of the tape advancing roller mount unit 385 is almost fully extended. Consequently, the first or the extend limit sensor 391 will be activated as illustrated in FIG. 3 g .
- the motor (not shown) of the tape collector module 381 winds or collects the used burnishing tape.
- the air bearing unit 386 and the tape advancing roller 385 will retract and move in the direction as indicated by the arrows and dotted lines.
- the winding of the tape stops when the second or retract limit sensor 392 is activated as shown in FIG. 3 i .
- the process continues from FIGS. 3 a - i until the entire surface of the media is fully burnished.
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Abstract
A burnishing apparatus is presented. The burnishing apparatus includes a tape dispensing assembly. The tape dispensing assembly includes a tape supply module for dispensing a tape. A plurality of tape guide rollers is provided for guiding the tape. The burnishing apparatus includes a contact roller mount unit which has a plurality of contact guide rollers and a contact roller. The contact roller contacts the tape against a surface of a media during burnishing. The tape guide rollers and the contact guide rollers are arranged to provide a zero contact force against the media to be burnished.
Description
- This application claims the benefit of U.S. Provisional Patent Application No. 61/051,688 filed on May 9, 2008, the entire contents of which are herein incorporated by reference.
- Magnetic media, such as magnetic disk, is widely used for storage of information in various applications, such as computer systems as well as a vast array of consumer products. In recent years, the demand for high recording density increased tremendously. Accordingly, films formed on surface of the disk, such as magnetic layers and protective films, are becoming thinner.
- In manufacturing magnetic disks, various coatings or films are formed on surfaces of a disk substrate. In order to remove small protrusions generated during these film formation processes and in order to clean the surfaces of the disks, tape cleaning is carried out on the surfaces of the disks by a burnishing apparatus. The tape cleaning is to polish or burnish the surfaces of the disk by pressing a burnishing tape having abrasive particles bonded thereon, against the surfaces of the disk while the disk is rotating.
- When the bonding strength of the abrasive particles to the tape surface is inadequate, abrasive particles can separate from the tape during burnishing process. As such, the abrasive particles are undesirably deposited onto the surfaces of the disk. Such delamination of the abrasive particles from the burnishing tape results in unacceptable high failure rates and affects the performance of the magnetic disk.
- From the foregoing discussion, it is desirable to provide improved burnishing apparatus and process for burnishing a media.
- Embodiments generally relate to burnishing apparatus and process for burnishing a media, such as magnetic disk. The burnishing process can also be used to burnish other types of media.
- In one embodiment, a burnishing apparatus is presented. The burnishing apparatus includes a tape dispensing assembly having a tape supply module for dispensing a tape. The burnishing apparatus includes a plurality of tape guide rollers for guiding the tape provided. A contact roller mount unit is provided. The contact roller mount unit includes a plurality of contact guide rollers and a contact roller. The contact roller contacts the tape against a surface of a media during burnishing. The tape guide rollers and the contact guide rollers are arranged to provide a zero contact force against the media to be burnished.
- A process of burnishing a media is provided in another embodiment. The process includes dispensing a tape to a contact roller mounted on a contact roller mount unit. The contact roller mount unit further includes a plurality of contact guide rollers. The process includes routing the tape to form a tape path through a plurality of tape guide rollers and pressing the tape against a surface of the media. The tape guide rollers and the contact guide rollers are arranged to provide a zero contact force during burnishing.
- These and other objects, along with advantages and features of the present invention herein disclosed, will become apparent through reference to the following description and the accompanying drawings. Furthermore, it is to be understood that the features of the various embodiments described herein are not mutually exclusive and can exist in various combinations and permutations.
- In the drawings, like reference characters generally refer to the same parts throughout the different views. Also, the drawings are not necessarily to scale, emphasis instead generally being placed upon illustrating the principles of the invention. In the following description, various embodiments of the present invention are described with reference to the following drawings, in which:
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FIGS. 1 a-c show front, top and simplified side views of a burnishing apparatus in accordance with one embodiment; -
FIG. 2 shows an embodiment of contact rollers inactive and active mechanism; and -
FIG. 3 a-i show an embodiment of a process of burnishing a media. - Embodiments generally relate to burnishing apparatus and process of burnishing a media, such as a magnetic media. Magnetic media, for example, includes magnetic disk. The burnishing apparatus can also be used to polish a wafer. The burnishing apparatus and process can also be used to burnish other types of media.
FIGS. 1 a-c show a front, top and simplified side view of aburnishing apparatus 100 in accordance with one embodiment. The burnishing apparatus includes asupport platform 101 mounted on abase unit 102. Various assemblies are mounted on thesupport platform 101 to facilitate burnishing of amedia 190, such as a magnetic disk. For example, the support platform includes acontact roller assembly 120, atape dispensing assembly 150 and atape collector assembly 180 as shown inFIG. 1 c. Providing other types of assembly is also useful. - In one embodiment, the support platform is divided into first and second halves which mirror each other to burnish both major surfaces, such as front and back surfaces of the media simultaneously. In one embodiment, the
support platform 101 is divided into first and second halves, 103 a and 103 b. For example, the assemblies on thesecond half 103 b burnish one of the major surfaces, for example, theback surface 190 b of the disk while the assemblies on thefirst half 103 a burnish the other major surface, for example, thefront surface 190 a of the disk. To simplify discussion, the assemblies will be described with respect to burnishing one of the disk surfaces as illustrated inFIG. 1 c. - In one embodiment, the apparatus comprises a
contact roller assembly 120 provided on the support platform. The contact roller assembly includes aroller module 121. The roller module comprises aroller mount unit 122 with acontact roller 123 mounted thereto. The contact roller, in one embodiment, is freely rotatable around an axis of rotation. The roller mount unit, in one embodiment, can be adjusted to position the contact roller. In one embodiment, the roller mount unit comprises a plurality of contact guide rollers. In one embodiment, first and second contact guide rollers, 124 and 125, are provided on each side, 122 a and 122 b, of the roller mount unit. Thefirst guide roller 124, in one embodiment is located lower than the secondcontact guide roller 125. Providing more than two contact guide rollers and having the second guide roller located lower than the first guide roller may also be useful. Theroller mount unit 122, in one embodiment, comprises an air bearingunit 126. In one embodiment, the roller mount unit is mounted on the air bearing unit. The air bearing 126 unit reduces frictions during movement of theroller mount unit 122 or positioning the contact roller towards themedia 190 prior to burnishing and frictions occurred during the burnishing process. Providing more than one air bearing unit and having the air bearing unit at other location of the roller mount unit may also be useful. - The first and second roller mount units which mirror each other, in one embodiment, are connected and synchronized to move in the same distance towards each other such that the contact rollers can exert the same contact force on the front and back side surfaces of the media. In one embodiment, the first and second roller mount units are connected with each other by string and pulley mechanism. A flexible coupling, such as a string or
cable 130 and a plurality ofpulleys 133 are provided in the roller mount units and routed on opposing sides, 101 a and 101 c, of thesupport platform 101 adjacent to the roller mount units to synchronize the movement and contact force of the contact rollers. In one embodiment,live weight 134 is provided at one end of the string to maintain the contact force of the contact rollers. Providing other means or techniques to synchronize the movement and maintain the contact force of the contact rollers is also useful. - The burnishing apparatus includes a
tape dispensing assembly 150 mounted on thefront surface 101 e of the support platform. The tape dispensing assembly includes atape supply module 151 for providing a burnishingtape 152. Typically, the tape supply module includes a roll of burnishing tape in atape reel 153. In one embodiment, the burnishing tape includes afirst surface 152 a and asecond surface 152 b. The burnishing tape, in one embodiment, includes a flexible backing material, such as Mylar. Thefirst surface 152 a of the burnishing tape, for example, includes aluminum oxide or other abrasive material embedded in a binder system coated onto the flexible backing material. For example, the burnishing tape can be 1 micron Alumina manufactured by Mypox of Japan. Other types of burnishing tape are also useful. The burnishing tape, in one embodiment, comprises a width sufficient to process a side of the disk. Providing other widths is also useful. - The
tape supply module 151, in one embodiment, continuously provides a burnishing tape to a plurality of rollers during burnishing. In one embodiment, the tape supply module comprises a drive roller (not shown) driven by, for example, a motor (not shown). The speed or velocity of the burnishing tape dispensed is determined by the speed of the drive roller which in turn determined by the motor. The motor, in one embodiment, can be set to dispense the tape to the roller at either a constant or variable speed or velocity. For example, this can be achieved by setting the motor with the desired revolutions per minute (rpm), which can be constant or varied. In one embodiment, the motor is set to dispense burnishing tape at a constant speed. To ensure that the tape is dispensed at the desired velocity, anencoder 154 is provided. Theencoder 154, for example, measures the number of pulses (distance) and pulse rate (tape speed) and provides feedback to the motor to control the speed. Providing other means to control the speed and velocity of dispensing the tape is also useful. The encoder, in one embodiment, can also be included as one of the tape guide rollers which will be discussed in the following paragraph. - In one embodiment, a
sensor 155 is provided adjacent to thetape supply module 151. The sensor senses the amount of tape reaming in the reel. In one embodiment, the sensor comprises a laser displacement sensor. The laser sensor, for example, can detect distances with a precision of ±0.05 mm. Providing other types of sensor can also be useful. The sensor enables signal to be provided to inform an operator to install a new tape supply such as to replace the empty tape supply module. - In another embodiment, the tape dispensing assembly may comprise an automatic tape change function. To effect automatic tape change, the tape dispensing assembly comprises primary and secondary tape supply modules (not shown) for providing burnishing tape. A tape change module (not shown) can be provided between the tape supply modules to enable an automatic tape change function. When tape from the primary supply is about to run out, as determined by, for example, a sensor, the tape change module causes tape from the secondary supply to attach to the tape from the primary supply. The tapes are coupled, resulting in the primary tape guiding the secondary tape to the rollers, effecting tape change. Once tape change is effected, the secondary tape supply becomes the primary tape supply. An operator can install a new tape supply to replace the empty primary supply, which becomes the secondary tape supply. By providing automatic tape change function, interruption of processing is avoided which increases throughput.
- A plurality of tape guide rollers are provided on the
front surface 101 e of the support platform to define a tape path, indicated by arrows. The tape path includes a first segment from thetape supply module 151 to thecontact roller 123 and a second segment from thecontact roller 123 to atape collector module 181. The tape guide rollers are mounted on the front surface of the support platform to guide the tape along the tape path. The tape guide rollers are freely rotatable. The tape guide roller, in one embodiment, can be a circular cylinder covered by an anti-skid material, such as polyurethane. Other anti-skid materials are also useful. In one embodiment, the tape guide rollers may include self centering tape guides which align the tape in the center of the tape path. This avoids or reduces tape misalignment on the disk surface during burnishing. - The first segment of the tape path, in one embodiment, includes of a plurality of tape guide rollers. In one embodiment, two tape guide rollers are provided in the first segment. Providing other number of tape guide rollers including the encoder to serve as one of the tape guide rollers is also useful. The first and second tape guide rollers, 156 and 157, in the first segment, for example, are mounted on a
tape guide unit 158. The tape guide unit, in one embodiment, is movable. In one embodiment, anadjustment unit 159 may further be provided adjacent to thetape guide unit 158. The adjustment unit may be used to fine tune or adjust the movement of the tape guide unit. The tape guide unit, in one embodiment, can be adjusted to move in unison with the movement of the contact mount unit to position the contact rollers for burnishing. - In one embodiment, the rotational axis of the first tape guide roller and the rotational axis of the first contact guide roller are arranged in such a manner to be in line with each other to form a common plane R1. Similarly, the rotational axis of the second tape guide roller and the rotational axis of the second contact guide roller, in one embodiment, are arranged in a manner to be in line with each other to form a common plane R2. The common planes, R1 and R2, are arranged to be substantially parallel with each other. In one embodiment, the common planes R1 and R2 are arranged in parallel with each other. As such, the burnishing tape is arranged to be always maintained in parallel as shown in
FIG. 1 c. Such arrangement of rollers enables the resultant force of tape tension FT acted on a contact force FC of the contact roller against the media to be zero during burnishing. This is possible as the angle between the contact force FC and tension force FT is maintained at about 90°. Any angle other than 90° will create a net resultant force that tends to adjust the tape guide unit and brings the angle back to 90°. The burnishing apparatus is therefore in a state of equilibrium. Providing other arrangement of the rollers to achieve the state of equilibrium is also useful. - In one embodiment, the rotational axes of the first and second tape guide rollers and the encoder are aligned in one direction forming a common plane as shown as Y-Y. In another embodiment, the rotational axes of the first and second tape guide rollers and the encoder need not be aligned in one direction.
- A third and fourth tape guide rollers, 160 and 161, are provided in the second segment of the tape path. In one embodiment, the rotational axis of the third tape guide roller is arranged to be substantially in line with the rotational axis of the encoder to form a common plane R3. The rotational axis of the fourth tape guide roller, in one embodiment, is arranged to be substantially in line with the rotational axis of the second tape guide roller in the common plane R2. The planes, R1, R2 and R3, in one embodiment, are parallel to each other. As such, the burnishing tape is always maintained in parallel as indicated by the arrows. Alternatively, the rotational axis of the third tape guide roller need not be in line with the rotational axis of the encoder to form a common plane. Similarly, the rotational axis of the fourth tape guide roller need not be in line with the rotational axis of the second tape guide roller. In one embodiment, the rotational axes of the third and fourth tape guide rollers are not aligned to form a common plane. Having the rotational axes of the third and fourth tape guide rollers aligned to form a common plane can also be useful.
- The
burnishing apparatus 100 also includes atape collector assembly 180 mounted on the front surface of the support platform in one embodiment. Thetape collector assembly 180 includes atape collector module 181 for collecting the used burnishing tape. Typically, the tape collector module includes atape reel 182. The tape collector module, in one embodiment, continuously collects used burnishing tape when the tape collector module is activated. In one embodiment, the tape collector module comprises a drive roller (not shown) driven by, for example, a motor (not shown). In another embodiment, the drive roller of the tape collector module may be driven by the same motor of the tape supply module. Coupling means or linkages may be provided to enable the same motor to be used for dispensing and collecting the burnishing tape. - A
sensor 183 can also be provided adjacent to the tape collector module in one embodiment. The sensor senses the amount of tape collected in the reel. In one embodiment, the sensor comprises a laser displacement sensor. Providing other types of sensor can also be useful. The sensor enables signal to be provided to inform an operator to remove the used tape such as to replace the full tape collector module with an empty collector module. An automatic tape change module can also be provided to automatically replace the full tape collector module with an empty tape collector module. This will not affect the burnishing process and hence increase throughput. - In one embodiment, the
tape collector assembly 180 further includes a tape advancingroller mount unit 184. The tape advancingroller mount unit 184, in one embodiment, is arranged to be adjacent to thetape collector module 181. Providing the tape advancing roller mount unit at other location is also useful. In one embodiment, the tape advancing roller mount unit is movable. The tape advancing roller mount unit, in one embodiment, includes atape advancing roller 185. Providing more than one tape advancing roller is also useful. Thetape advancing roller 185, in one embodiment, is used for maintaining the tension of the tape during burnishing of the media. - The tape advancing
mount unit 184, in one embodiment, further includes anair bearing unit 186. In one embodiment, the tape advancing roller mount unit is mounted on the air bearing unit. The air bearing unit reduces frictions during movement of the tape advancing roller mount unit during burnishing and frictions occurred while collecting the used burnishing tape. - The first and second tape advancing mount units which mirror each other, in one embodiment, are connected and synchronized to move in the same direction and distance. In one embodiment, the first and second tape advancing roller mount units are connected with each other by string and pulley mechanism. For example, a flexible string or a
cable 187 and a plurality ofpulleys 188 are provided in the tape advancing roller mount units to synchronize the movement and maintain the tension of the tape as shown inFIG. 1 a. In one embodiment,live weights 189 are coupled to the string facilitated by the pulleys, where the live weight constantly pulls the tape for maintaining the tape tensioning. The tension of the tape, for example, is half of the live weight. Providing other means or techniques to synchronize the movement and maintain the tape tensioning is also useful. - In one embodiment, a plurality of sensors are provided adjacent to a
side 101 d of the support platform. In one embodiment, the sensors are provided adjacent to the tape advancingroller mount unit 184. The sensors, in one embodiment, sense the distance and movement of the tape advancing roller mount unit. The sensors include a first or extendlimit sensor 191 located farther away from theside 101 d of the support platform and a second or retractlimit sensor 192 located nearer to theside 101 d of the support platform. In one embodiment, the sensors comprise a laser displacement sensor. The sensors, in one embodiment, enable the tape collector module to automatically collect the used burnishing tape once activated. -
FIG. 2 shows anembodiment 200 of contact rollers inactive and active mechanism. To control the inactive and active mechanism of thecontact rollers 123, amotor 210 is provided. In one embodiment, a stepper motor is provided. Providing other types of motor is also useful. In one embodiment, the stepper motor controls thecontact rollers 123 in both halves, 103 a and 103 b, of thesupport platform 101. The stepper motor is attached to theback surface 101 f of the support platform. Linkages are coupled to the stepper motor to the roller mount units for positioning the contact rollers as desired. For example, the stepper motor positions thecontact rollers 123 in an inactive or active position. In the inactive position, the contact rollers are “opened”. This enables placement of the media (not shown), for example, a magnetic disk, in a space between the contact rollers. In the active position, thecontact rollers 123 are “closed”. Closing of the contact rollers enables burnishing of the media to take place. - In one embodiment, the
contact rollers 123 are attached to the terminal ends of rod-shaped shafts whose other ends are attached to the open/close fingers 220. The open/close fingers 220 are adapted to engage threads on abi-directional ball screw 230 extending outwardly from a rotary shaft of thestepper motor 210. As previously discussed,air bearing unit 126 is provided on each of theroller mount unit 122. The air bearing units reduce frictions during movement of the roller mount unit towards the media prior to burnishing and frictions occurred during the burnishing process. -
FIGS. 3 a-i show an embodiment of a process of burnishing a media. The media to be burnished includes a magnetic media in one embodiment. Magnetic media, for example, includes magnetic disk. The burnishing process can also be used or can be modified to polish a wafer. For simplicity, the process will be described with respect to burnishing one of the disk surfaces. Themedia 390 to be burnished as shown inFIG. 3 a, for example, a magnetic disk, is attached at an end of a spindle (not shown). The spindle supports the magnetic disk such that its surfaces to be burnished are arranged vertically, and is rotated by a motor (not shown). Providing other means to support the magnetic disk to be burnished is also useful. -
FIG. 3 a shows an inactive position of the contact roller prior to burnishing themedia 390. In the inactive position, the contact rollers are opened, enabling placement of the disk in the space between thecontact rollers 323. As shown inFIG. 3 a, a burnishingtape 352 is dispensed from atape supply module 351 prior to burnishing. In one embodiment, the burnishing tape includes afirst surface 352 a and asecond surface 352 b. The burnishing tape, in one embodiment, includes a flexible backing material, such as Mylar. Thefirst surface 352 a of the burnishing tape, for example, includes aluminum oxide or other abrasive material embedded in a binder system coated onto the flexible backing material. The burnishingtape 352, in one embodiment, is fed from thetape supply module 351 to acontact roller 323, which is provided on a contactroller mount unit 322, through a firsttape guide roller 356 and a firstcontact guide roller 324. In one embodiment, thecontact roller 323 is freely rotatable around an axis of rotation. The burnishingtape 352 is routed to anencoder 354, through a secondcontact guide roller 325 mounted on theroller mount unit 322 and a secondtape guide roller 357. The first and second tape guide rollers, 356 and 357, are mounted on atape guide unit 358. - The burnishing
tape 352 is routed to atape collector module 381 through a thirdtape guide roller 360, atape advancing roller 385 and a fourthtape guide roller 361. The tape advancing roller that is mounted on a tape advancingroller mount unit 384 maintains the tension of the tape. -
FIG. 3 b shows a portion of the burnishing apparatus initializing the inactive position of the contact rollers. To simplified discussion, only a portion of the burnishing apparatus is shown. In one embodiment, a motor (not shown) coupled to the contactroller mount unit 322 is used to initialize the inactive mechanism such that the contact rollers are closed. For example, a stepper motor can be used to position the contact rollers in inactive position. Providing other types of motor is also useful. - The
tape guide unit 358, in one embodiment, is movable. In one embodiment, anadjustment unit 359 may further be provided adjacent to thetape guide unit 358 as shown inFIG. 3 a. The adjustment unit may be used to fine tune or adjust the movement of the tape guide unit. Thetape guide unit 358, in one embodiment, is arranged to move in unison with the movement of thecontact mount unit 322 as illustrated inFIG. 3 b. Prior to burnishing, the burnishing apparatus is in a state of equilibrium. In one embodiment, the rotational axis of the first tape guide roller and the rotational axis of the first contact guide roller are arranged in such a manner to be in line with each other to form a common plane R1. Similarly, the rotational axis of the second tape guide roller and the rotational axis of the second contact guide roller, in one embodiment, are arranged in a manner to be in line with each other to form a common plane R2. The common planes, R1 and R2, are arranged to be substantially parallel with each other. In one embodiment, the common planes R1 and R2 are arranged in parallel with each other. As such, the burnishing tape is arranged to be always maintained in parallel as indicated by arrows illustrated inFIG. 3 b. Such arrangement of rollers enables the resultant force of tape tension FT acted on a contact force FC of the contact roller against the media to be zero in the inactive position of the contact rollers as shown inFIG. 3 c. The contact force FC is zero at the instantaneous moment when the contact roller just contacts the surface of the disk. This is possible as the angle 0 between the contact force and tension force FT is maintained at about 90°. Any angle other than 90° will create a net resultant force that tends to adjust the tape guide unit and brings the angle θ back to 90° as shown as dotted lines inFIG. 3 d. The burnishing apparatus is therefore in a state of equilibrium. Providing other arrangement of the rollers to achieve the state of equilibrium is also useful. - In addition to the afore-mentioned, the arrangement of the rollers also provides the advantage of minimizing damage caused to the burnishing tape as the first surface of the burnishing
tape 352 a which comprises abrasive particles never touches any of the rollers prior to contacting the surface of thedisk 390 during burnishing as illustrated inFIG. 3 a. - During burnishing of the media, the
tape supply module 351 rotates in a direction, for example, a counter clockwise direction to dispense the burnishing tape. The burnishing tape moves in a direction as indicated by the arrows. As shown inFIG. 3 e, theencoder 354 picks up the number of pulses (distance) and pulse rate (tape speed) and provide feedback to a motor (not shown) which is coupled to thetape supply module 351 to control the speed of dispensing the burnishing tape. To control the tension of the burnishing tape, sufficient live weight (not shown) is added to forward the tape dispensed by the tape supply module in one embodiment. For example, for every dispensed interval, the live weight coupled to the tape advancing roller will be lowered by half a distance of the dispensed length of the burnishing tape. As such, the tape advancing roller moves in a direction as shown by the arrow to maintain the tension of the tape. - In
FIG. 3 f, the burnishing process continues by dispensing another length of the burnishing tape. The live weight, for example, is lowered by another half of the dispensed length, resulting in the tape advancing roller moving in a direction as shown by the dotted lines inFIG. 3 f. The live weight constantly pulls the tape and maintains the tension of the tape. - The tape supply module continues to dispense the burnishing tape until the
air bearing unit 386 of the tape advancingroller mount unit 385 is almost fully extended. Consequently, the first or the extendlimit sensor 391 will be activated as illustrated inFIG. 3 g. Once the extendlimit sensor 391 is activated, the motor (not shown) of thetape collector module 381 winds or collects the used burnishing tape. As shown inFIG. 3 h, theair bearing unit 386 and thetape advancing roller 385 will retract and move in the direction as indicated by the arrows and dotted lines. The winding of the tape stops when the second or retractlimit sensor 392 is activated as shown inFIG. 3 i. The process continues fromFIGS. 3 a-i until the entire surface of the media is fully burnished. - The invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The foregoing embodiments, therefore, are to be considered in all respects illustrative rather than limiting the invention described herein. Scope of the invention is thus indicated by the appended claims, rather than by the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced therein.
Claims (20)
1. A burnishing apparatus comprising:
a tape dispensing assembly comprises a tape supply module for dispensing a tape;
a plurality of tape guide rollers for guiding the tape; and
a contact roller mount unit which comprises a plurality of contact guide rollers and a contact roller, the contact roller contacts the tape against a surface of a media during burnishing,
wherein the tape guide rollers and the contact guide rollers are arranged to provide a zero contact force against the media to be burnished.
2. The burnishing apparatus of claim 1 wherein the tape guide rollers and contact guide rollers are arranged such that the angle between the contact force and a tension force of the tape is maintained at about 90°.
3. The burnishing apparatus of claim 1 further comprises a tape collector assembly to collect the used tape.
4. The burnishing apparatus of claim 1 wherein:
the plurality of contact guide rollers comprises a first and a second contact guide rollers; and
the plurality of tape guide rollers comprises a first and a second tape guide rollers mounted on a tape guide unit.
5. The burnishing apparatus of claim 4 wherein:
a rotational axis of the first tape guide roller and a rotational axis of the first contact guide roller are arranged in such a manner to be in line with each other to form a common plane R1; and
a rotational axis of the second tape guide roller and a rotational axis of the second contact guide roller are arranged in a manner to be in line with each other to form a common plane R2,
wherein the common planes, R1 and R2, are arranged to be substantially parallel with each other.
6. The burnishing apparatus of claim 4 wherein:
a rotational axis of the first tape guide roller and a rotational axis of the first contact guide roller are arranged in such a manner to be in line with each other to form a common plane R1; and
a rotational axis of the second tape guide roller and a rotational axis of the second contact guide roller are arranged in a manner to be in line with each other to form a common plane R2,
wherein the common planes R1 and R2 are arranged to be parallel with each other.
7. The burnishing apparatus of claim 1 wherein the contact roller mount unit further comprises an air bearing unit.
8. The burnishing apparatus of claim 1 further comprises a tape advancing roller mount unit.
9. The burnishing apparatus of claim 8 wherein the tape advancing roller mount unit comprises a tape advancing roller.
10. The burnishing apparatus of claim 9 wherein the tape advancing roller is movable and is coupled to a live weight to maintain a tension force of the tape during burnishing.
11. The burnishing apparatus of claim 10 wherein the tape advancing roller mount unit includes an air bearing unit.
12. The burnishing apparatus of claim 11 wherein the tape advancing roller is coupled to the live weight using a string and pulley mechanism.
13. A process of burnishing a media comprising:
dispensing a tape to a contact roller mounted on a contact roller mount unit, the contact roller mount unit further includes a plurality of contact guide rollers;
routing the tape to form a tape path through a plurality of tape guide rollers; and
pressing the tape against a surface of the media,
wherein the tape guide rollers and the contact guide rollers are arranged to provide a zero contact force during burnishing.
14. The process of burnishing of claim 13 further comprises collecting the used tape.
15. The process of burnishing of claim 13 wherein the tape guide rollers and contact guide rollers are arranged such that the angle between the contact force and a tension force of the tape is maintained at about 90°.
16. The process of burnishing of claim 15 wherein:
the plurality of contact guide rollers comprises a first and a second contact guide rollers; and
the plurality of tape guide rollers comprises a first and a second tape guide rollers mounted on a tape guide unit.
17. The process of burnishing of claim 16 wherein:
a rotational axis of the first tape guide roller and a rotational axis of the first contact guide roller are arranged in such a manner to be in line with each other to form a common plane R1; and
a rotational axis of the second tape guide roller and a rotational axis of the second contact guide roller are arranged in a manner to be in line with each other to form a common plane R2,
wherein the common planes, R1 and R2, are arranged to be substantially parallel with each other.
18. The process of burnishing of claim 13 comprising:
routing the burnishing tape to a tape advancing roller, the tape advancing roller is movable and is coupled to a live weight to maintain a tension force of the tape during burnishing.
19. The process of burnishing of claim 18 wherein the tape advancing roller is coupled to the live weight using a string and pulley mechanism.
20. The process of burnishing of claim 18 wherein the tape advancing roller is moved until it activates a first limit sensor to activate collecting of the used tape.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US12/437,564 US20090280730A1 (en) | 2008-05-09 | 2009-05-08 | Burnishing apparatus and process |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US5168808P | 2008-05-09 | 2008-05-09 | |
US12/437,564 US20090280730A1 (en) | 2008-05-09 | 2009-05-08 | Burnishing apparatus and process |
Publications (1)
Publication Number | Publication Date |
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US20090280730A1 true US20090280730A1 (en) | 2009-11-12 |
Family
ID=41267246
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US12/437,564 Abandoned US20090280730A1 (en) | 2008-05-09 | 2009-05-08 | Burnishing apparatus and process |
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US (1) | US20090280730A1 (en) |
Cited By (4)
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US20090170411A1 (en) * | 2007-12-29 | 2009-07-02 | Kenneth Barton | Micropolishing assembly for micropolishing piston rings |
US20120122375A1 (en) * | 2010-11-16 | 2012-05-17 | Supfina Grieshaber GmbH & Co., KG | Device for measuring the feed motion of a finishing belt |
JP2014002824A (en) * | 2012-06-20 | 2014-01-09 | Showa Denko Kk | Burnishing method and burnishing device |
WO2024135150A1 (en) * | 2022-12-22 | 2024-06-27 | 株式会社荏原製作所 | Information processing device, inference device, machine learning device, information processing method, inference method, and machine learning method |
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US4930259A (en) * | 1988-02-19 | 1990-06-05 | Magnetic Perpherals Inc. | Magnetic disk substrate polishing assembly |
US5099615A (en) * | 1989-09-22 | 1992-03-31 | Exclusive Design Company, Inc. | Automated rigid-disk finishing system providing in-line process control |
US6566707B1 (en) * | 1998-01-08 | 2003-05-20 | Sanyo Electric Co., Ltd. | Transistor, semiconductor memory and method of fabricating the same |
US6893329B2 (en) * | 2003-03-17 | 2005-05-17 | Hitachi High-Tech Electronics Engineering Co., Ltd. | Polishing apparatus with abrasive tape, polishing method using abrasive tape and manufacturing method for magnetic disk |
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US4930259A (en) * | 1988-02-19 | 1990-06-05 | Magnetic Perpherals Inc. | Magnetic disk substrate polishing assembly |
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US20090170411A1 (en) * | 2007-12-29 | 2009-07-02 | Kenneth Barton | Micropolishing assembly for micropolishing piston rings |
US20120122375A1 (en) * | 2010-11-16 | 2012-05-17 | Supfina Grieshaber GmbH & Co., KG | Device for measuring the feed motion of a finishing belt |
JP2014002824A (en) * | 2012-06-20 | 2014-01-09 | Showa Denko Kk | Burnishing method and burnishing device |
WO2024135150A1 (en) * | 2022-12-22 | 2024-06-27 | 株式会社荏原製作所 | Information processing device, inference device, machine learning device, information processing method, inference method, and machine learning method |
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