US20080224231A1

US20080224231A1 - Transistors having v-shape source/drain metal contacts

Info

Publication number: US20080224231A1
Application number: US12/105,298
Authority: US
Inventors: Huilong Zhu; Haining Yang; Zhijiong Luo
Original assignee: Individual
Current assignee: Individual
Priority date: 2006-04-25
Filing date: 2008-04-18
Publication date: 2008-09-18
Also published as: CN100521243C; CN101064343A; US20070262396A1; US7385258B2

Abstract

A semiconductor structure. The semiconductor structure includes (a) a semiconductor layer, (b) a gate dielectric region, and (c) a gate electrode region. The gate electrode region is electrically insulated from the semiconductor layer. The semiconductor layer comprises a channel region, a first and a second source/drain regions. The channel region is disposed between the first and second source/drain regions and directly beneath and electrically insulated from the gate electrode region. The semiconductor structure further includes (d) a first and a second electrically conducting regions, and (e) a first and a second contact regions. The first electrically conducting region and the first source/drain region are in direct physical contact with each other at a first and a second common surfaces. The first and second common surfaces are not coplanar. The first contact region overlaps both the first and second common surfaces.

Description

This application is a continuation application claiming priority to Ser. No. 11/380,097, filed Apr. 25, 2006.

BACKGROUND OF THE INVENTION

1. Technical Field
The present invention relates to semiconductor transistor, and more specifically, to semiconductor transistor having V-shape source/drain metal contact.
2. Related Art
In a conventional semiconductor transistor, contact regions are formed on the source/drain regions of the transistor to provide electrical access to the transistor. Therefore, there is a need to reduce the resistance between the contact regions and the source/drain regions of the transistor.

SUMMARY OF THE INVENTION

The present invention provides a semiconductor structure, comprising (a) a semiconductor layer; (b) a gate dielectric region on top of the semiconductor layer; (c) a gate electrode region on top of the gate dielectric region, wherein the gate electrode region is electrically insulated from the semiconductor layer by the gate dielectric region, wherein the semiconductor layer comprises a channel region, a first source/drain region, and a second source/drain region, and wherein the channel region is disposed between the first and second source/drain regions and directly beneath and electrically insulated from the gate electrode region by the gate dielectric region; (d) a first electrically conducting region and a second electrically conducting region on top of the first and second source/drain regions, respectively; and (e) a first contact region and a second contact region on top of and electrically coupled to the first and second electrically conducting regions, respectively; wherein the first electrically conducting region and the first source/drain region are in direct physical contact with each other at a first common surface and a second common surface, wherein the first and second common surfaces are not coplanar, and wherein the first contact region overlaps both the first and second common surfaces.
The present invention provides a semiconductor fabrication method, comprising providing a semiconductor structure which includes (a) a semiconductor layer, (b) a gate dielectric region on top of the semiconductor layer, (c) a gate electrode region on top of the gate dielectric region, wherein the gate electrode region is electrically insulated from the semiconductor layer by the gate dielectric region; removing a first portion and a second portion of the semiconductor layer; after said removing the first and second portions of the semiconductor layer, forming a first source/drain region and a second source/drain region in the semiconductor layer directly beneath the removed first and second portions, respectively, wherein the semiconductor layer comprises a channel region, and wherein the channel region is disposed between the first and second source/drain regions and directly beneath and electrically insulated from the gate electrode region by the gate dielectric region; after said forming the first and second source/drain regions is performed, forming a first electrically conducting region and a second electrically conducting region on top of the first source/drain region and the second source/drain region, respectively, wherein the first electrically conducting region and the first source/drain region are in direct physical contact with each other at a first common surface and a second common surface, and wherein the first and second common surfaces are not coplanar; and after said forming the first and second electrically conducting regions is performed, forming a first contact region and a second contact region on top of and electrically coupled to the first and second electrically conducting regions, respectively, wherein the first contact region overlaps both the first and second common surfaces.
The present invention provides a semiconductor structure, comprising (a) a semiconductor layer; (b) a first gate dielectric region and a second gate dielectric region on top of the semiconductor layer; (c) a first gate electrode region on top of the first gate dielectric region, wherein the first gate electrode region is electrically insulated from the semiconductor layer by the first gate dielectric region, wherein the semiconductor layer comprises a first channel region, a first source/drain region, and a second source/drain region, and wherein the first channel region is disposed between the first and second source/drain regions and directly beneath and electrically insulated from the first gate electrode region by the first gate dielectric region; (d) a second gate electrode region on top of the second gate dielectric region, wherein the second gate electrode region is electrically insulated from the semiconductor layer by the second gate dielectric region, wherein the semiconductor layer further comprises a second channel region and a third source/drain region, and wherein the second channel region is disposed between the second and third source/drain regions and directly beneath and electrically insulated from the second gate electrode region by the second gate dielectric region; (e) a first electrically conducting region, a second electrically conducting region and a third electrically conducting region on top of the first, second, and third source/drain regions, respectively; and (f) a first contact region, a second contact region and a third contact region on top of and electrically coupled to the first, second and third electrically conducting regions, respectively; wherein the second electrically conducting region and the second source/drain region are in direct physical contact with each other at a first common surface and a second common surface, wherein the first and second common surfaces are not coplanar, and wherein the second contact region overlaps both the first and second common surfaces.
The present invention provides a semiconductor transistor structure (and a method for forming the same) in which the resistance between the contact regions and the source/drain regions of the semiconductor transistor structure is reduced.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A-11B show cross-section views used to illustrate a first fabrication process for forming a semiconductor structure, in accordance with embodiments of the present invention.

FIGS. 12-23 show cross-section views used to illustrate a second fabrication process for forming a semiconductor structure, in accordance with embodiments of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

FIGS. 1A-11B show cross-section views used to illustrate a first fabrication process for forming a semiconductor structure 100, in accordance with embodiments of the present invention. More specifically, with reference to FIG. 1A, in one embodiment, the first fabrication process starts with an SOI (Silicon On Insulator) substrate 105+110+120. Illustratively, the SOI substrate 105+110+120 comprises a silicon layer 105, a silicon dioxide layer 110 (BOX layer) on top of the silicon layer 105, and a silicon layer 120 on top of the silicon dioxide layer 110. In one embodiment, the SOI substrate 105+110+120 can be formed by a conventional method.
Next, with reference to FIG. 1B, in one embodiment, shallow trench isolation (STI) regions 130 are formed in the silicon layer 120. Illustratively, the STI regions 130 comprise silicon dioxide. In one embodiment, the STI regions 130 can be formed by a conventional method.
Next, with reference to FIG. 1C, in one embodiment, a gate dielectric layer 140 is formed on top of the structure 100 of FIG. 1B. Illustratively, the gate dielectric layer 140 comprises silicon dioxide. In one embodiment, the gate dielectric layer 140 can be formed by CVD (Chemical Vapor Deposition) or thermal oxidation.
Next, in one embodiment, a gate electrode layer 150 is formed on top of the gate dielectric layer 140. Illustratively, the gate electrode layer 150 comprises poly-silicon. In one embodiment, the gate electrode layer 150 can be formed by CVD.
Next, in one embodiment, a nitride layer 160 is formed on top of the gate electrode layer 150. Illustratively, the nitride layer 160 comprises silicon nitride. In one embodiment, the nitride layer 160 can be formed by CVD.
Next, in one embodiment, a patterned photoresist layer 170 is formed on top of the nitride layer 160 using a conventional method.
Next, in one embodiment, the patterned photoresist layer 170 is used as a mask for anisotropically etching the nitride layer 160 and then the poly-silicon gate electrode layer 150 stopping at the gate dielectric layer 140, resulting in a nitride region 160′ and a gate electrode region 150′ as shown in FIG. 2.
Next, with reference to FIG. 2, in one embodiment, the patterned photoresist layer 170 is removed by, illustratively, wet etching. It should be noted that the nitride region 160′ and the gate electrode region 150′ can be collectively referred to as a gate stack 160′+150′. Next, with reference to FIG. 3, in one embodiment, the gate stack 160′+150′ is used as a blocking mask for forming extension regions 310 a and 310 b and the halo regions 320 a and 320 b in the layer 120 by ion implantation. In one embodiment, the extension regions 310 a and 310 b define a channel region 122 disposed between the extension regions 310 a and 310 b and directly beneath and electrically isolated from the gate electrode region 150′ by the gate dielectric layer 140.
Next, with reference to FIG. 4A, in one embodiment, a nitride spacer layer 410 is formed on top of the structure 100 of FIG. 3. Illustratively, the nitride spacer layer 410 can be formed by CVD of a nitride material (silicon nitride) on top of the structure 100 of FIG. 3. This deposited nitride material combines with the nitride region 160′ (FIG. 3) resulting in the nitride spacer layer 410 of FIG. 4A.
Next, in one embodiment, the nitride spacer layer 410 and the gate dielectric layer 140 are anisotropically etched stopping at the silicon layer 120 resulting in structure 100 of FIG. 4B. As a result of the etching of the nitride spacer 410 and the gate dielectric layer 140 of FIG. 4A, what remains of the gate dielectric layer 140 is the gate dielectric region 140′ of FIG. 4B and what remains of the nitride spacer layer 410 is the nitride spacer region 410′. It should be noted that the nitride spacer region 410′ and the gate electrode region 150′ can be collectively referred to as a gate stack 410′+150′.
Next, in one embodiment, the gate stack 410′+150′ is used as a mask for etching the silicon layer 120 resulting in two surfaces 500 and 510 as shown in FIG. 5. In one embodiment, the etching of the silicon layer 120 uses dilute ammonia (wet etching). It should be noted that other etchants can be used for the etching of the silicon layer 120. For example, possible etchants are (a) TMAH Tetramethylammonium hydroxide, (b) KOH Potassium hydroxide (Note: slots in the STI 130 and spacers 410′ were translated into V-grooves in the underlying silicon 120 using 40% weight KOH solution at 70° C. with 5% IPA added and mechanical agitation), and (c) EDP Ethylene diamine pyrocatechol.
Illustratively, the surfaces 500 and 510 form a V-shape. In one embodiment, the surfaces 500 and 510 are in (100) and (111) crystalline planes, respectively, and the angle between the surfaces 500 and 510 is about 125°. This occurs if (a) the top surface of the Si layer 120 (FIG. 1A) is in (100) crystalline plane and (b) the gate direction (which is perpendicular to the page) is <110>. As a result, the wet etching of the Si layer 120 results in (100) planes being etched much faster than (111) planes. Therefore, the surface 500 is etched and recessed, whereas the surface 510 remains as shown in FIG. 5.
In an alternative embodiment, the surfaces 500 and 510 are in (100) and (110) crystalline planes, respectively, and the angle between the surfaces 500 and 510 is about 135°. This occurs if (a) the top surface of the Si layer 120 (FIG. 1A) is in (110) crystalline plane and (b) the gate direction (which is perpendicular to the page) is <111>.
In yet another alternative embodiment, the surfaces 500 and 510 are in (110) and (111) crystalline planes, respectively, and the angle between the surfaces 500 and 510 is about 145°. This occurs if (a) the top surface of the Si layer 120 (FIG. 1A) is in (110) crystalline plane and (b) the gate direction (which is perpendicular to the page) is <110>.
Next, in one embodiment, the nitride spacer region 410′ is anisotropically etched until a top surface 152 of the gate electrode region 150′ is exposed to the surrounding ambient resulting in the structure 100 of FIG. 6. As a result of the etching of the nitride spacer region 410′ of FIG. 5, what remain of the nitride spacer region 410′ are nitride spacer regions 410 a and 410 b of FIG. 6. It should be noted that the nitride spacer regions 410 a and 410 b, the gate electrode region 150′, and the gate dielectric region 140′ can be collectively referred to as a gate stack 410 a+410 b+150′+140′.
Next, with reference to FIG. 7, in one embodiment, the gate stack 410 a+410 b+150′+140′ is used as a blocking mask for ion implanting the layer 120 resulting in source/ drain regions 710 a and 710 b in the silicon layer 120.
Next, with reference to FIG. 8, in one embodiment, silicide regions 810 a, 810 b, and 810 c are formed on top of the source/ drain regions 710 a and 710 b and the gate electrode region 150′, respectively. Illustratively, the silicide regions 810 a, 810 b, and 810 c comprise nickel silicide (NiSi). In one embodiment, the silicide regions 810 a, 810 b, and 810 c can be formed by (i) depositing metal Ni on top of the structure 100 of FIG. 7, then (ii) annealing the structure 100 at high temperature (300° C.-450° C.) to cause the deposited Ni to chemically react with Si of the source/ drain regions 710 a, 710 b and the gate electrode region 150′, and then (iii) removing the unreacted metal by wet etching, resulting in the silicide regions 810 a, 810 b, and 810 c of FIG. 8.
Next, with reference to FIG. 9, in one embodiment, a nitride liner layer 910 is formed on top of the structure 100 of FIG. 8. Illustratively, the nitride liner layer 910 comprises silicon nitride. In one embodiment, the nitride liner layer 910 can be formed by CVD.
Next, in one embodiment, an oxide layer 920 is formed on top of the nitride liner layer 910. Illustratively, the oxide layer 920 comprises silicon dioxide. In one embodiment, the oxide layer 920 can be formed by CVD of silicon dioxide followed by a CMP (chemical mechanical polishing) so as to form a planar surface 922 on top.
Next, with reference to FIG. 10, in one embodiment, contact holes 1010 a, 1010 b, and 1010 c are created in the oxide layer 920, the nitride liner layer 910 by, illustratively, lithography and etching process such that the top surfaces 812 a, 812 b, and 812 c of the silicide regions 810 a, 810 b, and 810 c, respectively, are exposed to the surrounding ambient through the contact holes 1010 a, 1010 b, and 1010 c.
Next, with reference to FIG. 11A, in one embodiment, an electric conductive layer 1110 is formed on top of the structure 100 of FIG. 10. Illustratively, the electric conduction layer 1110 comprises titanium nitride (TiN). In one embodiment, the electric conductive layer 1110 can be formed by CVD.
Next, in one embodiment, contact regions 1120 a, 1120 b, and 1120 c are formed in the contact holes 1010 a, 1010 b, and 1010 c, respectively. Illustratively, the regions 1120 a, 1120 b, and 1120 c comprise tungsten (W). In one embodiment, the contact regions 1120 a, 1120 b, and 1120 c can be formed by CVD and then etching the W outside the contact holes 1010 a, 1010 b, and 1010 c.
Next, in one embodiment, exposed regions of the electric conductive layer 1110 are etched by, illustratively, wet etching resulting in electric conductive regions 1110 a, 1110 b, and 1110 c as shown in FIG. 11B.
In summary, contact interfacing surfaces between the silicide regions 810 a and 810 b and the source/ drain regions 710 a and 710 b, respectively, are V-shape. As a result, the contact interfacing surfaces are larger than planar contact interfacing surfaces, resulting in lower contact resistance than in the prior art.
FIGS. 12-23 show cross-section views used to illustrate a second fabrication process for forming a semiconductor structure 200, in accordance with embodiments of the present invention. More specifically, with reference to FIG. 12, in one embodiment, the second fabrication process starts with a structure 200 of FIG. 12. In one embodiment, the structure 200 of FIG. 12 is similar to the structure 100 of FIG. 1C except that the structure 200 has three photoresist regions 270 a, 270 b, and 270 c and the STI regions 130 in FIG. 1C are not formed in the structure 200 of FIG. 12.
Next, with reference to FIG. 13, in one embodiment, nitride regions 260 a, 260 b, and 260 c and gate electrode regions 250 a, 250 b, and 250 c are formed using a process similar to the process to the formation of the nitride region 160′ and the gate electrode region 150′ of FIG. 2.
Next, in one embodiment, patterned photoresist layers 270 a, 270 b, and 270 c are removed by, illustratively wet etching. Next, with reference to FIG. 14, in one embodiment, extension regions 280 a, 280 b, 280 c, and 280 d and halo regions 290 a, 290 b, 290 c, and 290 d are formed in silicon layer 220 using a method similar to the method for forming the extension regions 310 a, 310 b and the halo regions 320 a, 320 b of FIG. 3.
Next, with reference to FIG. 15A, in one embodiment, a nitride spacer layer 1510 is formed on top of the structure 200 of FIG. 14 using a method similar to the method for forming the nitride spacer layer 410 of FIG. 4A.
Next, with reference to FIG. 15B, in one embodiment, nitride spacer regions 1510 a, 1510 b, and 1510 c and gate dielectric regions 240 a, 240 b, and 240 c are created using a method similar to the method for forming the nitride spacer region 410′ and the gate dielectric region 140′ of FIG. 4B.
Next, with reference to FIG. 16, in one embodiment, surfaces 1610 a, 1610 b, 1610 c and 1610 d are created using a process similar to the process of forming the surfaces 500 and 510 of FIG. 5. More specifically, in one embodiment, the etching of the silicon layer 220 uses dilute ammonia. Illustratively, the surfaces 1610 a and 1610 b form a V-shape.
In one embodiment, the surfaces 1610 a and 1610 b are in (111) and (111) crystalline planes, respectively, and the angle between the surfaces 500 and 510 is about 70°. This occurs if (a) the top surface of the Si layer 220 (FIG. 12) is in (100) or (110) crystalline plane and (b) the gate direction (which is perpendicular to the page) is <110>. As a result, (100) surfaces are etched faster than (111) surfaces until the (111) surfaces 1610 a and 1610 b meets. Then, the etch is stopped resulting in the structure 200 of FIG. 16.
In an alternative embodiment, the surfaces 1610 a and 1610 b are in (110) and (110) crystalline planes, respectively, and the angle between the surfaces 500 and 510 is about 90°. This occurs if (a) the top surface of the Si layer 220 (FIG. 12) is in (100) crystalline plane and (b) the gate direction (which is perpendicular to the page) is <100>.
Next, in one embodiment, the nitride spacer regions 1510 a, 1510 b, and 1510 c are anisotropically etched until top surfaces of the gate electrode regions 250 a, 250 b, and 250 c are exposed to the surrounding ambient resulting in the structure 200 of FIG. 17. As a result of the etching of the nitride spacer regions 1510 a, 1510 b, and 1510 c of FIG. 16, what remain of the nitride spacer regions 1510 a, 1510 b, and 1510 c are nitride spacer regions 1510 a′, 1510 b′, and 1510 c′ of FIG. 17.
Next, with reference to FIG. 18, in one embodiment, source/ drain regions 1810 a, 1810 b, 1810 c, and 1810 d are formed in the silicon layer 220 using a method similar to the method for forming source/ drain regions 710 a and 710 b of FIG. 7.
Next, with reference to FIG. 19, in one embodiment, silicide regions 1910 a, 1910 b, 1910 c, 1910 d, 1910 e, 1910 f, and 1910 g are formed on top of the source/ drain regions 1810 a, 1810 b, 1810 c, and 1810 d and the gate electrode regions 250 a, 250 b, and 250 c, respectively. Illustratively, the silicide regions 1910 a, 1910 b, 1910 c, 1910 d, 1910 e, 1910 f, and 1910 g can be formed by a method similar to the method for forming silicide regions 810 a, 810 b, and 810 c of FIG. 8.
Next, with reference to FIG. 20, in one embodiment, a nitride liner layer 2010 and an oxide layer 2020 are formed on top of the structure 200 of FIG. 19 using a method similar to the method for forming the nitride liner layer 910 and the oxide layer 920 of FIG. 9.
Next, with reference to FIG. 21, in one embodiment, contact holes 2110 a, 2110 b, 2110 c, 2110 d and 2110 e are created in the oxide layer 2020, the nitride liner layer 2010 using a method similar to the method for creating the contact holes 1010 a, 1010 b, and 1010 c of FIG. 10. Next, in one embodiment, the patterned photoresist layer 2030 can be removed by wet etching.
Next, with reference to FIG. 22, in one embodiment, an electric conductive layer 2210 and contact regions 2220 a, 2220 b, 2220 c, 2220 d, and 2220 e are formed using a method similar to the method for forming the electric conductive layer 1010 and contact regions 1120 a, 1120 b, and 1120 c of FIG. 11A.
Next, in one embodiment, exposed regions of the electric conductive layer 2210 are etched by, illustratively wet etching resulting in electric conductive regions 2210 a, 2210 b, 2210 c, 2210 d and 2210 e as shown in FIG. 23.
In summary, a first contact interfacing surface between the silicide region 1910 b and the source/drain region 1810 b has a V-shape. Similarly, a second contact interfacing surface between the silicide region 1910 c and the source/drain region 1810 c has a V-shape. As a result, the V-shape contact interfacing surfaces are larger than prior art planar contact interfacing surfaces, resulting in lower contact resistance than in the prior art.
While particular embodiments of the present invention have been described herein for purposes of illustration, many modifications and changes will become apparent to those skilled in the art. Accordingly, the appended claims are intended to encompass all such modifications and changes as fall within the true spirit and scope of this invention.

Claims

1. A semiconductor structure, comprising:

a semiconductor layer;

a gate dielectric region on top of the semiconductor layer;

a gate electrode region on top of the gate dielectric region,

wherein the gate electrode region is electrically insulated from the semiconductor layer by the gate dielectric region,

wherein the semiconductor layer comprises a channel region, a first source/drain region, and a second source/drain region, and

wherein the channel region is disposed between the first and second source/drain regions and directly beneath and electrically insulated from the gate electrode region by the gate dielectric region;

a first electrically conducting region and a second electrically conducting region on top of the first and second source/drain regions, respectively; and

a first contact region and a second contact region on top of and electrically coupled to the first and second electrically conducting regions, respectively;

wherein the first electrically conducting region and the first source/drain region are in direct physical contact with each other at a first common surface and a second common surface,

wherein the first and second common surfaces are not coplanar, and

wherein the first contact region overlaps both the first and second common surfaces.

2. The semiconductor structure of claim 1,

wherein the second electrically conducting region and the second source/drain region are in direct physical contact with each other at a third common surface and a fourth common surface,

wherein the third and fourth common surfaces are not coplanar, and

wherein the second contact region overlaps both the third and fourth common surfaces.

3. The semiconductor structure of claim 1, wherein the first and the second contact regions comprise a metal.

4. The semiconductor structure of claim 1, further comprising a first liner region and a second liner region,

wherein the first liner region is sandwiched between and in direct physical contact with the first electrically conducting region and the first contact region, and

wherein the second liner region is sandwiched between and in direct physical contact with the second electrically conducting region and the second contact region.

5. The semiconductor structure of claim 4, wherein the first and second liner regions comprise titanium nitride.

6. The semiconductor structure of claim 1, wherein the first common surface makes an angle of about 70°, 90°, 125°, 135°, or 145° with the second common surface.