US20080193307A1 - Motion Imparting Device - Google Patents

Motion Imparting Device Download PDF

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Publication number
US20080193307A1
US20080193307A1 US10/562,463 US56246304A US2008193307A1 US 20080193307 A1 US20080193307 A1 US 20080193307A1 US 56246304 A US56246304 A US 56246304A US 2008193307 A1 US2008193307 A1 US 2008193307A1
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US
United States
Prior art keywords
deformable sheet
wall
conduit
deformable
structural
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/562,463
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English (en)
Inventor
David Elata
Samy Abu-Salih
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technion Research and Development Foundation Ltd
Original Assignee
Technion Research and Development Foundation Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technion Research and Development Foundation Ltd filed Critical Technion Research and Development Foundation Ltd
Priority to US10/562,463 priority Critical patent/US20080193307A1/en
Assigned to TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD. reassignment TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ABU-SALIH, SAMY, ELATA, DAVID
Publication of US20080193307A1 publication Critical patent/US20080193307A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/1223—Machines, pumps, or pumping installations having flexible working members having peristaltic action the actuating elements, e.g. rollers, moving in a straight line during squeezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps

Definitions

  • the invention relates to a novel method and device for imparting motion to fluids and solids at arbitrary rates with high efficiency.
  • Micro-pump devices are essential building blocks in MEMS and BIO-MEMS technology. Many state-of-the-art micro-pump devices are based on a deformable element (e.g., plate or membrane) that vibrates periodically. The deflections of the deformable element are utilized to induce motion in confined fluids, often with the assistance of valves. To ensure sufficiently large deflections, these devices are operated at the resonance frequency of the system. In other operation frequencies, the achievable deformation is much lower, and much of the supplied power is invested in deforming the structure.
  • a deformable element e.g., plate or membrane
  • a device for inducing motion on fluids or solids comprising:
  • a structure with a deformable sheet compressed to form a structural wave a structure with a deformable sheet compressed to form a structural wave; and a actuator for actuating the deformable sheet and driving the structural wave in a predetermined manner.
  • the deformable sheet is a deformable plate, peripherally supported by a frame.
  • the deformable sheet is a beam.
  • the beam is coupled to an elastic foundation.
  • a first wall is provided against the deformable sheet so as to define a first conduit between the first wall and the deformable sheet.
  • the first conduit is provided with an inlet and an outlet.
  • the device is further provided with a second wall positioned opposite the first wall, with the deformable sheet between the walls, the second wall defining a second conduit between the second wall and the deformable sheet.
  • the second conduit is provided with an inlet and an outlet.
  • the actuator is selected from the group including: electrostatic actuators, piezoelectric actuators, thermoelastic actuators and magnetic actuators.
  • some or all of the device is made from silicon.
  • a method for inducing motion on fluids or solids comprising:
  • the actuator is operated to continuously displace the structural waves.
  • the deformable sheet is a deformed using a peripherally supporting frame.
  • actuation of the deformable sheet is selected from the group containing: electrostatic actuation, piezoelectric actuation, thermoelastic actuation and magnetic actuation.
  • FIG. 1 a illustrates a structural wave formed on a clamped plate of a micro-device, in accordance with a unilateral preferred embodiment of the present invention.
  • FIG. 1 b is a cross-sectional view of a unilateral micro-pump device, in accordance with a preferred embodiment of the present invention, illustrating an induced traveling structural wave.
  • FIG. 1 c is a cross-sectional view of a bilateral micro-pump device, in accordance with a preferred embodiment of the present invention, illustrating an induced traveling structural wave.
  • FIG. 2 a illustrates a structural wave bonded to an elastic foundation.
  • FIG. 2 b is cross-sectional view of a micro-pump device in accordance with another preferred embodiment of the present invention, incorporating an elastic foundation.
  • FIG. 3 is a cross-sectional view of a micro-pump device in accordance with another preferred embodiment of the present invention, incorporating electrostatic actuation.
  • FIG. 4 illustrates a pre-buckled circular plate suitable for incorporation with a micro-pump device in accordance with another preferred embodiment of the present invention.
  • FIG. 5 is a micro-pump device in accordance with another preferred embodiment of the present invention, used for inducing motion in solids.
  • An aspect of the present invention is the provision of a micro-device, which employs buckling of a deformable structure in the form of a sheet, so as to induce a traveling wave on the sheet.
  • Another aspect of the present invention is the utilization of the traveling wave induced on the deformable sheet to impart motion to fluids or solids.
  • deflection waves are generated in the deformable structure.
  • these deflection waves can be continuously displaced. This displacement requires minimal power because the waves are already formed and only need to be relocated along the structure.
  • the displacement of the structural waves can be achieved using various actuation methods (e.g., electrostatic, piezoelectric, magnetic and other).
  • the displacement of these structural waves can be used to induce motion in surrounding or confined fluids, to increase the pressure of confined fluids, and to displace solids that are in contact with the structural waves.
  • most of the power is directly invested to induce the flow, increase the pressure, or to accelerate solids, respectively.
  • the device can be operated at any frequency without significantly affecting its efficiency. Accordingly, the device is not restricted to operate in any resonance frequency. Most of the power consumed by the device is directly invested in overcoming the drag forces in the pumped fluid, in increasing the fluid pressure, or in accelerating solids (depending on application).
  • FIG. 1 a illustrates a structural wave formed on a clamped plate of a micro-device, in accordance with a unilateral preferred embodiment of the present invention.
  • FIG. 1 b is a cross-sectional view of a unilateral micro-pump device, in accordance with a preferred embodiment of the present invention, illustrating an induced traveling structural wave.
  • a micro-pump device generally denoted by numeral 10 comprises a deformable plate 12 , which is subjected to peripheral compressing forces inflicted by frame 14 , thus producing a wave structure on the deformable plate.
  • a wall 16 is provided, defining a conduit between the plate and the wall, leaving two opposite openings (outlet and inlet).
  • FIG. 1 c is a cross-sectional view of a bilateral micro-pump device, in accordance with a preferred embodiment of the present invention, illustrating an induced traveling structural wave
  • an additional wall 17 is provided opposite the wall 16 , encasing the deformable plate 12 . In this way fluids are pumped via twin inlets and through to twin outlets.
  • FIG. 2 a illustrates a structural wave bonded to an elastic foundation.
  • FIG. 2 b is cross-sectional view of a micro-pump device in accordance with another preferred embodiment of the present invention, incorporating an elastic foundation.
  • an elastic deformable foundation 22 with a thin deformable beam 24 coupled to the surface of the elastic foundation, is held by frame 26 .
  • An opposite wall 28 is provided, defining a conduit between the thin beam 24 and the wall 28 .
  • a traveling wave is induced producing pumping forces through the inlet through to the outlet.
  • FIG. 4 illustrates a pre-buckled circular plate suitable for incorporation with a micro-pump device in accordance with another preferred embodiment of the present invention.
  • FIG. 5 is a micro-pump device in accordance with another preferred embodiment of the present invention, used for inducing motion in solids.
  • a pre-buckled elastic structure that includes many structural waves.
  • This may be for example an elastic plate that is clamped along its circumference or a thin beam bonded to an elastic foundation. Internal stress induces structural deformation waves in the plate or beam.
  • Another possible embodiment of the present invention is using a flexible corrugated membrane in place of the pre-buckled plate.
  • a flexible corrugated membrane in place of the pre-buckled plate.
  • Such a membrane is shaped with waves occurring naturally in preferred regions.
  • the structural waves may be displaced with little effort by means of various methods of actuation (e.g., electrostatic, piezoelectric, thermoelastic, magnetic, and other actuation methods).
  • actuation e.g., electrostatic, piezoelectric, thermoelastic, magnetic, and other actuation methods.
  • the elastic element in FIG. 3 is driven by electrodes 30 from above and below the pre-buckled plate. This may be achieved, for example, by electrically grounding the plate and applying selected voltages to the electrodes that are coated by an isolating layer.
  • the effort required to displace the structural waves depends on the geometry of the system. For example, the displacement of the structural waves in the pre-buckled circular plate shown in FIG. 4 , require virtually no power (due to the axi-symmetry of the system).
  • the traveling structural wave obtained by continuously displacing the structural waves may be used to: induce flow in a surrounding fluid; induce a pressure increase in a confined surrounding fluid; and may be used to displace solids that are in contact with the traveling structural wave. Since the power required to displace the structural waves is small, most of the power invested in these applications is used to induce the flow, increase the pressure, or displace a solid in contact, respectively.
  • the devices described in FIG. 1 b , FIG. 1 c and FIG. 2 b can be used to induce flow in a fluid, thus pumping it from the inlet towards the outlet.
  • the device described in FIG. 1 c can be used to induce a pressure increase in a fluid.
  • the device in FIG. 5 may be used to displace solid particles.
  • the device of the present invention can be made in any dimension. It has a particular appeal in MEMS applications. It therefore may be produced using MEMS manufacturing techniques, using, for example silicon for some or all of the device.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Actuator (AREA)
US10/562,463 2003-06-25 2004-06-24 Motion Imparting Device Abandoned US20080193307A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/562,463 US20080193307A1 (en) 2003-06-25 2004-06-24 Motion Imparting Device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US48229603P 2003-06-25 2003-06-25
US10/562,463 US20080193307A1 (en) 2003-06-25 2004-06-24 Motion Imparting Device
PCT/IL2004/000562 WO2004114520A2 (fr) 2003-06-25 2004-06-24 Dispositif de mise en mouvement

Publications (1)

Publication Number Publication Date
US20080193307A1 true US20080193307A1 (en) 2008-08-14

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US10/562,463 Abandoned US20080193307A1 (en) 2003-06-25 2004-06-24 Motion Imparting Device

Country Status (2)

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US (1) US20080193307A1 (fr)
WO (1) WO2004114520A2 (fr)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080128027A1 (en) * 2006-12-01 2008-06-05 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Active control of surface drag
US20080128561A1 (en) * 2006-12-01 2008-06-05 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Active control of a body by altering surface drag
US20100150747A1 (en) * 2008-12-12 2010-06-17 Caterpillar Inc. Pump having pulsation-reducing engagement surface
US8729774B2 (en) 2010-12-09 2014-05-20 Viking At, Llc Multiple arm smart material actuator with second stage
US8783337B2 (en) 2006-12-01 2014-07-22 The Invention Science Fund I Llc System for changing the convective heat transfer coefficient for a surface
US8850892B2 (en) 2010-02-17 2014-10-07 Viking At, Llc Smart material actuator with enclosed compensator
US9002484B2 (en) 2006-12-01 2015-04-07 The Invention Science Fund I Llc System and method for deforming surfaces
WO2016165028A1 (fr) 2015-04-15 2016-10-20 Genesis Advanced Technology Inc. Actionneur d'onde
US10094367B2 (en) 2012-02-22 2018-10-09 Technion Research & Development Foundation Limited Method and system for generating mechanical waves
US20180317017A1 (en) * 2015-10-21 2018-11-01 Goertek Inc. Micro-speaker, speaker device and electronic apparatus
US10276776B2 (en) 2013-12-24 2019-04-30 Viking At, Llc Mechanically amplified smart material actuator utilizing layered web assembly
FR3100846A1 (fr) * 2019-09-17 2021-03-19 Institut Polytechnique De Grenoble Système de pompage dans le domaine des laboratoires sur puce
US11299260B2 (en) 2018-07-24 2022-04-12 Deep Science, Llc Systems and methods for active control of surface drag
US11466709B2 (en) 2021-02-17 2022-10-11 Deep Science, Llc In-plane transverse momentum injection to disrupt large-scale eddies in a turbulent boundary layer
US11519433B2 (en) 2018-11-06 2022-12-06 Deep Science, Llc Systems and methods for active control of surface drag using wall coupling
US20230012961A1 (en) * 2020-01-23 2023-01-19 Deep Science, Llc Systems and methods for active control of surface drag using intermittent or variable actuation
US11744157B2 (en) 2018-11-30 2023-08-29 Deep Science, Llc Systems and methods of active control of surface drag using selective wave generation
US11905983B2 (en) 2020-01-23 2024-02-20 Deep Science, Llc Systems and methods for active control of surface drag using electrodes

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2903146B1 (fr) * 2006-06-30 2011-02-11 Valeo Systemes Thermiques Dispositif pour augmenter le debit massique d'air admis a l'interieur d'une chambre d'admission d'air d'un moteur thermique, et circuit d'alimentation en air integrant un tel dispositif
FR2935469B1 (fr) * 2008-08-26 2011-02-18 Cooltech Applications Generateur thermique a materiau magnetocalorique

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US4498850A (en) * 1980-04-28 1985-02-12 Gena Perlov Method and device for fluid transfer
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US5525041A (en) * 1994-07-14 1996-06-11 Deak; David Momemtum transfer pump
US5906481A (en) * 1995-05-23 1999-05-25 Fujitsu Limited Piezoelectric fluid pump
US5921757A (en) * 1996-05-27 1999-07-13 Honda Giken Kogyo Kabushiki Kaisha Piezoelectric fan
US6106245A (en) * 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump
US6361284B2 (en) * 1996-02-12 2002-03-26 Jean-Baptiste Drevet Vibrating membrane fluid circulator
US6450773B1 (en) * 2001-03-13 2002-09-17 Terabeam Corporation Piezoelectric vacuum pump and method
US6659740B2 (en) * 1998-08-11 2003-12-09 Jean-Baptiste Drevet Vibrating membrane fluid circulator

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US3743446A (en) * 1971-07-12 1973-07-03 Atek Ind Inc Standing wave pump
US4498850A (en) * 1980-04-28 1985-02-12 Gena Perlov Method and device for fluid transfer
US4697989A (en) * 1980-04-28 1987-10-06 Gena Perlov Electrodynamic peristaltic fluid transfer device and method
US5096388A (en) * 1990-03-22 1992-03-17 The Charles Stark Draper Laboratory, Inc. Microfabricated pump
US5267841A (en) * 1992-10-19 1993-12-07 Rockwell International Corporation Peristaltic injector
US5525041A (en) * 1994-07-14 1996-06-11 Deak; David Momemtum transfer pump
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US6361284B2 (en) * 1996-02-12 2002-03-26 Jean-Baptiste Drevet Vibrating membrane fluid circulator
US5921757A (en) * 1996-05-27 1999-07-13 Honda Giken Kogyo Kabushiki Kaisha Piezoelectric fan
US6106245A (en) * 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump
US6659740B2 (en) * 1998-08-11 2003-12-09 Jean-Baptiste Drevet Vibrating membrane fluid circulator
US6450773B1 (en) * 2001-03-13 2002-09-17 Terabeam Corporation Piezoelectric vacuum pump and method

Cited By (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9002484B2 (en) 2006-12-01 2015-04-07 The Invention Science Fund I Llc System and method for deforming surfaces
US20080128561A1 (en) * 2006-12-01 2008-06-05 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Active control of a body by altering surface drag
US8074938B2 (en) * 2006-12-01 2011-12-13 The Invention Science Fund I, Llc Active control of a body by altering surface drag
US8074939B2 (en) * 2006-12-01 2011-12-13 The Invention Science Fund I, Llc Active control of surface drag
US20080128027A1 (en) * 2006-12-01 2008-06-05 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Active control of surface drag
US8783337B2 (en) 2006-12-01 2014-07-22 The Invention Science Fund I Llc System for changing the convective heat transfer coefficient for a surface
US20100150747A1 (en) * 2008-12-12 2010-06-17 Caterpillar Inc. Pump having pulsation-reducing engagement surface
US8333571B2 (en) * 2008-12-12 2012-12-18 Caterpillar Inc. Pump having pulsation-reducing engagement surface
US8879775B2 (en) 2010-02-17 2014-11-04 Viking At, Llc Smart material actuator capable of operating in three dimensions
US8850892B2 (en) 2010-02-17 2014-10-07 Viking At, Llc Smart material actuator with enclosed compensator
US8729774B2 (en) 2010-12-09 2014-05-20 Viking At, Llc Multiple arm smart material actuator with second stage
US10094367B2 (en) 2012-02-22 2018-10-09 Technion Research & Development Foundation Limited Method and system for generating mechanical waves
US10276776B2 (en) 2013-12-24 2019-04-30 Viking At, Llc Mechanically amplified smart material actuator utilizing layered web assembly
US10145424B2 (en) 2015-04-15 2018-12-04 Genesis Advanced Technology Holdings Inc. Wave actuator
CN107709837A (zh) * 2015-04-15 2018-02-16 詹尼斯机器人技术有限公司 波致动器
JP2018513325A (ja) * 2015-04-15 2018-05-24 ジェネシス ロボティクス エルエルピー ウェーブアクチュエータ
US9759270B2 (en) 2015-04-15 2017-09-12 Genesis Robotics Llp Wave actuator
JP7273103B2 (ja) 2015-04-15 2023-05-12 ジェネシス ロボティクス エルエルピー ウェーブアクチュエータ
US9683612B2 (en) 2015-04-15 2017-06-20 Genesis Robotics Llp Wave actuator
EP3283790A4 (fr) * 2015-04-15 2018-12-05 Genesis Robotics LLP Actionneur d'onde
WO2016165028A1 (fr) 2015-04-15 2016-10-20 Genesis Advanced Technology Inc. Actionneur d'onde
AU2016250310B2 (en) * 2015-04-15 2020-09-24 Genesis Advanced Technology Inc. Wave actuator
JP2021181087A (ja) * 2015-04-15 2021-11-25 ジェネシス ロボティクス エルエルピー ウェーブアクチュエータ
US11128957B2 (en) * 2015-10-21 2021-09-21 Goertek Inc. Micro-speaker, speaker device and electronic apparatus
US20180317017A1 (en) * 2015-10-21 2018-11-01 Goertek Inc. Micro-speaker, speaker device and electronic apparatus
US11299260B2 (en) 2018-07-24 2022-04-12 Deep Science, Llc Systems and methods for active control of surface drag
US11519433B2 (en) 2018-11-06 2022-12-06 Deep Science, Llc Systems and methods for active control of surface drag using wall coupling
US11744157B2 (en) 2018-11-30 2023-08-29 Deep Science, Llc Systems and methods of active control of surface drag using selective wave generation
WO2021052865A1 (fr) * 2019-09-17 2021-03-25 Institut Polytechnique De Grenoble Système de pompage dans le domaine des laboratoires sur puce
FR3100846A1 (fr) * 2019-09-17 2021-03-19 Institut Polytechnique De Grenoble Système de pompage dans le domaine des laboratoires sur puce
CN114341494A (zh) * 2019-09-17 2022-04-12 格勒诺布尔综合理工学院 片上实验室领域的泵送系统
US20230012961A1 (en) * 2020-01-23 2023-01-19 Deep Science, Llc Systems and methods for active control of surface drag using intermittent or variable actuation
US11905983B2 (en) 2020-01-23 2024-02-20 Deep Science, Llc Systems and methods for active control of surface drag using electrodes
US11466709B2 (en) 2021-02-17 2022-10-11 Deep Science, Llc In-plane transverse momentum injection to disrupt large-scale eddies in a turbulent boundary layer
US11692566B2 (en) 2021-02-17 2023-07-04 Deep Science, Llc In-plane transverse momentum injection to disrupt large-scale eddies in a turbulent boundary layer
US11933334B2 (en) 2021-02-17 2024-03-19 Enterprise Science Fund, Llc In-plane transverse momentum injection to disrupt large-scale eddies in a turbulent boundary layer

Also Published As

Publication number Publication date
WO2004114520A3 (fr) 2005-04-14
WO2004114520A2 (fr) 2004-12-29

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Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ELATA, DAVID;ABU-SALIH, SAMY;REEL/FRAME:021209/0436;SIGNING DATES FROM 20080104 TO 20080107

Owner name: TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD.,

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ELATA, DAVID;ABU-SALIH, SAMY;SIGNING DATES FROM 20080104 TO 20080107;REEL/FRAME:021209/0436

STCB Information on status: application discontinuation

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