US20070230073A1 - High-voltage tolerant power-rail esd clamp circuit - Google Patents
High-voltage tolerant power-rail esd clamp circuit Download PDFInfo
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- US20070230073A1 US20070230073A1 US11/428,571 US42857106A US2007230073A1 US 20070230073 A1 US20070230073 A1 US 20070230073A1 US 42857106 A US42857106 A US 42857106A US 2007230073 A1 US2007230073 A1 US 2007230073A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0266—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using field effect transistors as protective elements
- H01L27/0285—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using field effect transistors as protective elements bias arrangements for gate electrode of field effect transistors, e.g. RC networks, voltage partitioning circuits
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H3/00—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection
- H02H3/20—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to excess voltage
- H02H3/22—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to excess voltage of short duration, e.g. lightning
Definitions
- the present invention relates to an ESD clamp circuit and, more particularly, to a high-voltage tolerant power-rail ESD clamp circuit.
- ESD protection is used to protect ICs from damage due to ESD events.
- both thin and thick gate oxide devices are usually simultaneously used with the considerations on product reliability, operating frequency, chip area, and so on.
- ICs with mixed-voltage circuits can be manufactured with both thin and thick gate-oxide devices by using extra process steps and additional mask layers, but they will increase the product cost and lower the production yield.
- a thick-gate-oxide device has inferior device characteristics than that of the thin one, so that the operating frequency of chips will be limited. Therefore, if thin-gate-oxide devices can be applied under high operating voltages without reliability issue, the steps of manufacturing thick-gate-oxide devices can be saved.
- the first kind is an ESD protection element without gate-oxide structure. Because this kind of devices has no gate oxide, the gate oxide issue won't arise even if the operating voltage exceeds process limitation. But if this kind of device is used alone as the ESD protection element, the turn-on speed will be slower and the turn-on voltage will be higher during ESD, hence being unable to effectively protect internal circuits with thin gate oxides. If a forward-biased diode string is used as the ESD protection element, although a faster turn-on speed can be achieved, there will be a very large leakage current during operation under high temperatures because of parasitic pnp BJTs and Darlington beta gain.
- the second kind has a trigger circuit and an ESD clamp circuit of the primary ESD protection element. But this kind of devices can only tolerate a maximum power supply voltage, no more than two times of their device limitation. Most of the prior arts belong to this kind, e.g., an ESD protection element manufactured with 1.2-V devices but operated under 2.5-V power supply voltage. If the power supply voltage exceeds two times of their device limitation, the gate-oxide reliability issue of device will arise. Similar to the second kind, the third kind has a trigger circuit and an ESD architecture of the primary ESD protection element, but can tolerate a power supply voltage three times of their device limitation.
- ESD electrostatic discharge
- U.S. Pat. No. 5,956,219 has a complicated circuit, and utilizes three stacked PMOS elements as the primary ESD path, hence having a larger turn-on resistance.
- a larger chip area is required, and different ESD elements cannot be matched for use, hence being less flexible.
- other ESD protection elements without gate oxide such as silicon-controlled rectifiers (SCRs) can operate under high power supply voltages without oxide gate reliability issue, these elements usually have a very slow turn-on speed and a too high turn-on voltage, and cannot effectively protect the chip circuits when used alone without being triggered by external circuits.
- existing trigger circuits cannot operate under a power supply voltage three times of their device limitation.
- the present invention aims to propose a high-voltage tolerant power-rail ESD clamp circuit to solve the above problems in the prior art.
- An object of the present invention is to provide a high-voltage tolerant power-rail ESD clamp circuit, in which an ESD detection circuit is used to provide a substrate-triggered current to an ESD protection element when an ESD event occurs so as to enhance the turn-on speed and turn-on uniformity.
- Another object of the present invention is to provide a high-voltage tolerant power-rail ESD clamp circuit, in which the ESD detection circuit can match different ESD protection elements for use to meet different applications or specifications.
- Another object of the present invention is to provide a high-voltage tolerant power-rail ESD clamp circuit, in which there won't be any gate-oxide reliability issue when applying the ESD detection circuit to mixed-voltage IO interfaces.
- the present invention provides a high-voltage tolerant power-rail ESD clamp circuit, which comprises an ESD detection circuit and an ESD protection element.
- the ESD detection circuit is connected to at least a voltage source and a ground terminal and used to detect whether there is ESD between the voltage source and the ground terminal.
- the ESD detection circuit further comprises a voltage divider for splitting an input voltage of the voltage source into two divided voltages, a substrate driver for driving a substrate to produce a trigger current, an RC distinguisher, a fourth transistor and a second resistor.
- the ESD protection element is triggered on via the trigger current of the trigger node by the ESD detection circuit to quickly and uniformly discharge an ESD current in an ESD situation, hence having no gate-oxide reliability issue.
- FIGS. 1 and 2 are circuit diagrams of the high-voltage tolerant power-rail ESD clamp circuit of the present invention
- FIG. 3 is a cross sectional view with the Hspice simulated voltages for nodes of the ESD detection circuit under the normal circuit operation of the present invention when the high power supply voltage is 3.3V;
- FIG. 4 is a diagram showing the Hspice simulation for nodes of the ESD detection circuit under normal power-on transition with a signal rise time of 1 ms;
- FIG. 5 is a diagram showing the Hspice simulation for nodes of the ESD detection circuit under 0-to-5.5V ESD-like voltage pulse on the high power supply with a rise time of 10 ns;
- FIG. 6 is a diagram showing the driving capability of the new proposed ESD detection circuit under 0-to-5.5V ESD-like transition with a rise time of 10 ns (same conditions as those in FIG. 5 );
- FIGS. 7 ( a ) to 7 ( e ) are diagrams of the primary ESD protection element according to different embodiments of the present invention: (a) Field-oxide device (FOD), (b) SCR device, (c) stacked SCR devices, (d) SCR device with diodes in series, and (e) triple stacked NMOS structure.
- FOD Field-oxide device
- SCR device SCR device
- stacked SCR devices stacked SCR devices
- SCR device with diodes in series stacked SCR devices
- e triple stacked NMOS structure
- the present invention provides a high-voltage tolerant power-rail ESD clamp circuit, in which a substrate-triggered current is provided to drive different ESD protection elements under ESD stress.
- the substrate-triggered current has been reported to be beneficial to many ESD protection devices, such as the STNMOS (substrate-triggered NMOS) device, the SCR device, and the FOD (field oxide) device.
- the substrate-triggered current can improve ESD robustness of these ESD protection devices by increasing their turn-on speed and turn-on uniformity under ESD stress.
- a power-rail ESD clamp circuit of the present invention comprises two voltage sources VDDh and VDDl, an ESD detection circuit 10 and an ESD protection element 30 .
- the ESD detection circuit 10 is composed of a voltage divider 12 , a substrate driver 14 , an RC distinguisher 16 , a fourth transistor 18 , a fifth transistor 20 and a second resistor 22 .
- the voltage divider 12 includes three p-type transistors 122 , 124 and 126 for splitting an input voltage of the high voltage source VDDh into two divided voltages.
- the substrate driver includes a first transistor 142 , a second transistor 144 and a third transistor 146 .
- the RC distinguisher includes a first resistor 162 and a capacitor 164 .
- the first, second and third transistors 142 , 144 and 146 are an NMOS and two PMOS, respectively.
- the first transistor 142 is a deep N-well MOS transistor.
- the fourth transistor 18 is an NMOS and capable of enhancing the noise margin of the ESD detection circuit 10 to ensure that the ESD protection element 30 won't be improperly triggered.
- the fifth transistor 20 can enhance the efficiency and stability of the ESD detection circuit 10 .
- the fifth transistor 20 is a PMOS.
- the second resistor 22 is connected to the low voltage source VDDl. All the devices in the ESD detection circuit 10 are 1.2-V low-voltage devices.
- the VDDh is a 3.3-V high voltage power supply
- the VDDl is a 1.2-V low voltage power supply. There exists a trigger node t between the ESD detection circuit 10 and the ESD protection element 30 .
- the voltage divider 12 can also include six PMOS. Two of the six PMOS are viewed as a pair, and there are totally three PMOS pairs 121 , 123 and 125 that make up the voltage divider 12 . A node a exists between the PMOS pair 121 and the PMOS pair 123 , and a node b exists between the PMOS pair 123 and the PMOS pair 125 . The node a and node b are output nodes of the voltage divider 12 .
- the gate of the first transistor 142 When the high voltage source VDDh and the low voltage source VDDl are powered on, the gate of the first transistor 142 will get a 2.2-V bias (2 ⁇ 3*VDDh) from the node a of the voltage divider 12 , and the bias of the second transistor 144 is 2.2-V minus the threshold voltage of the first transistor 142 . With a gate-to-source bias of 0V, the second transistor 144 should be kept off.
- the source voltage of the third transistor 146 which is the same as the voltage on node b is biased at 1.1V (1 ⁇ 3*VDDh) through the voltage divider, while its gate (node e in FIG. 3 ) is biased at VDDl of 1.2V the same as node e. Therefore, with a negative source-to-gate bias, the third transistor 146 is also kept off during the normal circuit operation. As a result, the substrate driver 14 works in off state after the normal power-on transition, providing no trigger current into the trigger node t
- the drain-to-gate voltage of the first transistor 142 is (3.3-2.2)V, which means the first transistor 142 is working at inversion region under the normal circuit operating conditions. Therefore, the induced channel region of the first transistor 142 could be insufficient to shade the strength of the electric field across the gate/bulk junctions if its bulk region is grounded. In other words, there could be gate-oxide reliability issue on the gate of the first transistor 142 if its bulk is grounded. Therefore, to avoid this possible issue, bulk of the first transistor 142 is connected to the source node of its own.
- the bulk of the first transistor 142 is isolated by the deep N-well with 3.3-V bias from the common p-substrate, as the diagram in FIG. 3 shows.
- voltages on nodes of the ESD detection circuit 10 during normal circuit operating condition are also labeled on the diagram in FIG. 4 .
- the first transistor 142 has a source voltage close to its gate voltage. From these simulated voltages, it can be clearly seen that voltages between every two adjacent nodes of devices do no exceed their voltage extreme (1.32V for 1.2-V devices). Therefore, though the power-rail ESD clamp circuit has high power supply voltage of 3.3V, it is free from the gate-oxide reliability issue.
- the ESD detection circuit 10 should be kept off so that the ESD detection circuit 10 does not improperly trigger on the ESD protection element 30 or result in unwished leakage current from the substrate driver 14 .
- This can be achieved through taking advantage of the rise time of normal power-on signals, which are in the order of several milliseconds (ms). Therefore, as long as the RC time delay of the RC distinguisher 16 is much smaller than several milliseconds (several microseconds for example), the voltage on node d can follow up the voltage transition on node c to turn off the second transistor 144 during normal power-on transition.
- VDDh and VDDl have the same signal rise time of 1 ms in this simulation.
- Simulation result shows that the gate voltage of the second transistor 144 (node d) can follow up its source voltage (node c) to turn off the substrate driver 14 . Therefore, the substrate driver 14 is therefore safely kept at off state during the normal power-on transition.
- the substrate driver 14 has to provide the substrate-triggered current into the trigger node as fast as possible, so that the primary ESD protection element 30 can be quickly triggered on to protect the internal circuits from ESD damage. Since the ESD transient voltages have characteristics of the fast pulse rise time (several nanoseconds) and short duration (several hundreds of nanoseconds), the voltage divider 10 is not fast enough to pull up the gate voltage of the first transistor 142 during ESD transition. Therefore, the fifth transistor 20 as a capacitor is needed to enhance the turn-on speed of the first transistor 142 under ESD transition.
- the floating VDD 1 has an initial voltage level around ⁇ 0V; the large parasitic capacitance of internal circuits on VDD 1 power line and the 1 k ⁇ resistor will keep VDD 1 at low voltage level during ESD transition for a long while. Therefore, because the second transistor 144 and the third transistor 146 work at on state during the ESD transition, the substrate driver 14 can be quickly turned on by the ESD energy to generate the trigger current into the primary ESD protection element 30 .
- FIG. 5 shows the Hspice-simulated voltages of the ESD detection circuit 10 under ESD transition.
- a 0-to-5.5V ESD-like voltage pulse with rise time of 10 ns is applied to the VDDh to simulate the ESD transient voltage.
- the Hspice-simulated results show that the gate voltage of the first transistor 142 (node a) is quickly pulled high through the capacity coupling of the fifth transistor 20 and the gate voltage of the second transistor 144 (node d) is kept low due to the time delay of the RC distinguisher 16 .
- the substrate driver 14 can provide the substrate-triggered current around ⁇ 35 mA within 10 ns, as shown in FIG. 6 . By adjusting the device dimensions of the substrate driver 14 , magnitude of the triggered current can be designed to meet different applications or specifications.
- FIGS. 7 ( a ) to 7 ( e ) show some embodiments of the primary ESD protection element 30 .
- Devices with inherent n-p-n bipolar junction transistor can be driven by the proposed ESD detection circuit to protect the ICs against ESD damage.
- the FOD (field oxide) device that has no gate oxide structure is a choice for the primary ESD protection element, as shown in FIG. 7 ( a ).
- Another embodiment of the primary ESD protection element is the SCR device, as shown in FIG. 7 ( b ).
- SCR devices can be stacked together, as shown in FIG. 7 ( c ). The number of stacked SCR devices can be increased for higher holding voltage.
- Diodes between the trigger node and the p + node of SCR in FIG. 7 ( c ) can prevent ESD current flowing out of the SCR device from the p + node of the first SCR into the p + node of the last SCR through the metal connection.
- the overall holding voltage of SCR device can also be increased by being stacked with different number of diodes under SCR device, as shown in FIG. 7 ( d ).
- a parasitic n-p-n transistor composed of a triple stacked NMOS structure is another embodiment for the ESD protection element, as shown in FIG. 7 ( e ).
- gate voltages of the top and the middle NMOS have to be properly biased under VDDh. Gate of the top NMOS is connected to node a of the ESD detection circuit, and gate of the middle NMOS is biased at VDD 1 in this embodiment.
- the present invention provides a three-voltage tolerant power-rail ESD clamp circuit realized with only 1.2-V low-voltage devices for 1.2-V/3.3-V mixed-voltage I/O interface.
- the proposed power-rail ESD clamp circuit is free from the gate-oxide reliability issue and the ESD detection circuit can be quickly turned on to provide the substrate-triggered current so as to drive the ESD protection element to discharge ESD current during the ESD transition.
- FIGS. 1 and 2 are identical to FIGS. 1 and 2
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Abstract
Description
- 1. Field of the Invention
- The present invention relates to an ESD clamp circuit and, more particularly, to a high-voltage tolerant power-rail ESD clamp circuit.
- 2. Description of Related Art
- ESD protection is used to protect ICs from damage due to ESD events. When applied to a mixed-voltage IO interface, because there simultaneously exists more than two power supply voltages on this interface, both thin and thick gate oxide devices are usually simultaneously used with the considerations on product reliability, operating frequency, chip area, and so on. Though ICs with mixed-voltage circuits can be manufactured with both thin and thick gate-oxide devices by using extra process steps and additional mask layers, but they will increase the product cost and lower the production yield. Moreover, a thick-gate-oxide device has inferior device characteristics than that of the thin one, so that the operating frequency of chips will be limited. Therefore, if thin-gate-oxide devices can be applied under high operating voltages without reliability issue, the steps of manufacturing thick-gate-oxide devices can be saved.
- Existing technologies relating to high-voltage-tolerant ESD protection can generally be categorized into three kinds. The first kind is an ESD protection element without gate-oxide structure. Because this kind of devices has no gate oxide, the gate oxide issue won't arise even if the operating voltage exceeds process limitation. But if this kind of device is used alone as the ESD protection element, the turn-on speed will be slower and the turn-on voltage will be higher during ESD, hence being unable to effectively protect internal circuits with thin gate oxides. If a forward-biased diode string is used as the ESD protection element, although a faster turn-on speed can be achieved, there will be a very large leakage current during operation under high temperatures because of parasitic pnp BJTs and Darlington beta gain. The second kind has a trigger circuit and an ESD clamp circuit of the primary ESD protection element. But this kind of devices can only tolerate a maximum power supply voltage, no more than two times of their device limitation. Most of the prior arts belong to this kind, e.g., an ESD protection element manufactured with 1.2-V devices but operated under 2.5-V power supply voltage. If the power supply voltage exceeds two times of their device limitation, the gate-oxide reliability issue of device will arise. Similar to the second kind, the third kind has a trigger circuit and an ESD architecture of the primary ESD protection element, but can tolerate a power supply voltage three times of their device limitation.
- The above third kind of ESD (e.g., “High voltage power supply clamp circuitry for electrostatic discharge (ESD) protection” disclosed in U.S. Pat. No. 5,956,219) has a complicated circuit, and utilizes three stacked PMOS elements as the primary ESD path, hence having a larger turn-on resistance. In order to acquire a better ESD protection capability, a larger chip area is required, and different ESD elements cannot be matched for use, hence being less flexible. Although other ESD protection elements without gate oxide such as silicon-controlled rectifiers (SCRs) can operate under high power supply voltages without oxide gate reliability issue, these elements usually have a very slow turn-on speed and a too high turn-on voltage, and cannot effectively protect the chip circuits when used alone without being triggered by external circuits. Moreover, existing trigger circuits cannot operate under a power supply voltage three times of their device limitation.
- The present invention aims to propose a high-voltage tolerant power-rail ESD clamp circuit to solve the above problems in the prior art.
- An object of the present invention is to provide a high-voltage tolerant power-rail ESD clamp circuit, in which an ESD detection circuit is used to provide a substrate-triggered current to an ESD protection element when an ESD event occurs so as to enhance the turn-on speed and turn-on uniformity.
- Another object of the present invention is to provide a high-voltage tolerant power-rail ESD clamp circuit, in which the ESD detection circuit can match different ESD protection elements for use to meet different applications or specifications.
- Another object of the present invention is to provide a high-voltage tolerant power-rail ESD clamp circuit, in which there won't be any gate-oxide reliability issue when applying the ESD detection circuit to mixed-voltage IO interfaces.
- To achieve the above objects, the present invention provides a high-voltage tolerant power-rail ESD clamp circuit, which comprises an ESD detection circuit and an ESD protection element. The ESD detection circuit is connected to at least a voltage source and a ground terminal and used to detect whether there is ESD between the voltage source and the ground terminal. The ESD detection circuit further comprises a voltage divider for splitting an input voltage of the voltage source into two divided voltages, a substrate driver for driving a substrate to produce a trigger current, an RC distinguisher, a fourth transistor and a second resistor. The ESD protection element is triggered on via the trigger current of the trigger node by the ESD detection circuit to quickly and uniformly discharge an ESD current in an ESD situation, hence having no gate-oxide reliability issue.
- The various objects and advantages of the present invention will be more readily understood from the following detailed description when read in conjunction with the appended drawing, in which:
-
FIGS. 1 and 2 are circuit diagrams of the high-voltage tolerant power-rail ESD clamp circuit of the present invention; -
FIG. 3 is a cross sectional view with the Hspice simulated voltages for nodes of the ESD detection circuit under the normal circuit operation of the present invention when the high power supply voltage is 3.3V; -
FIG. 4 is a diagram showing the Hspice simulation for nodes of the ESD detection circuit under normal power-on transition with a signal rise time of 1 ms; -
FIG. 5 is a diagram showing the Hspice simulation for nodes of the ESD detection circuit under 0-to-5.5V ESD-like voltage pulse on the high power supply with a rise time of 10 ns; -
FIG. 6 is a diagram showing the driving capability of the new proposed ESD detection circuit under 0-to-5.5V ESD-like transition with a rise time of 10 ns (same conditions as those inFIG. 5 ); and - FIGS. 7(a) to 7(e) are diagrams of the primary ESD protection element according to different embodiments of the present invention: (a) Field-oxide device (FOD), (b) SCR device, (c) stacked SCR devices, (d) SCR device with diodes in series, and (e) triple stacked NMOS structure.
- The present invention provides a high-voltage tolerant power-rail ESD clamp circuit, in which a substrate-triggered current is provided to drive different ESD protection elements under ESD stress. The substrate-triggered current has been reported to be beneficial to many ESD protection devices, such as the STNMOS (substrate-triggered NMOS) device, the SCR device, and the FOD (field oxide) device. The substrate-triggered current can improve ESD robustness of these ESD protection devices by increasing their turn-on speed and turn-on uniformity under ESD stress.
- As shown in
FIG. 1 , a power-rail ESD clamp circuit of the present invention comprises two voltage sources VDDh and VDDl, anESD detection circuit 10 and anESD protection element 30. TheESD detection circuit 10 is composed of avoltage divider 12, asubstrate driver 14, anRC distinguisher 16, afourth transistor 18, afifth transistor 20 and asecond resistor 22. Thevoltage divider 12 includes three p-type transistors first transistor 142, asecond transistor 144 and athird transistor 146. The RC distinguisher includes afirst resistor 162 and acapacitor 164. The first, second andthird transistors first transistor 142 is a deep N-well MOS transistor. Thefourth transistor 18 is an NMOS and capable of enhancing the noise margin of theESD detection circuit 10 to ensure that theESD protection element 30 won't be improperly triggered. Thefifth transistor 20 can enhance the efficiency and stability of theESD detection circuit 10. Thefifth transistor 20 is a PMOS. Thesecond resistor 22 is connected to the low voltage source VDDl. All the devices in theESD detection circuit 10 are 1.2-V low-voltage devices. The VDDh is a 3.3-V high voltage power supply, and the VDDl is a 1.2-V low voltage power supply. There exists a trigger node t between theESD detection circuit 10 and theESD protection element 30. - As shown in
FIG. 2 , thevoltage divider 12 can also include six PMOS. Two of the six PMOS are viewed as a pair, and there are totally threePMOS pairs voltage divider 12. A node a exists between thePMOS pair 121 and thePMOS pair 123, and a node b exists between thePMOS pair 123 and thePMOS pair 125. The node a and node b are output nodes of thevoltage divider 12. - When the high voltage source VDDh and the low voltage source VDDl are powered on, the gate of the
first transistor 142 will get a 2.2-V bias (⅔*VDDh) from the node a of thevoltage divider 12, and the bias of thesecond transistor 144 is 2.2-V minus the threshold voltage of thefirst transistor 142. With a gate-to-source bias of 0V, thesecond transistor 144 should be kept off. The source voltage of thethird transistor 146 which is the same as the voltage on node b is biased at 1.1V (⅓*VDDh) through the voltage divider, while its gate (node e inFIG. 3 ) is biased at VDDl of 1.2V the same as node e. Therefore, with a negative source-to-gate bias, thethird transistor 146 is also kept off during the normal circuit operation. As a result, thesubstrate driver 14 works in off state after the normal power-on transition, providing no trigger current into the trigger node t. - In this
ESD detection circuit 10, the drain-to-gate voltage of thefirst transistor 142 is (3.3-2.2)V, which means thefirst transistor 142 is working at inversion region under the normal circuit operating conditions. Therefore, the induced channel region of thefirst transistor 142 could be insufficient to shade the strength of the electric field across the gate/bulk junctions if its bulk region is grounded. In other words, there could be gate-oxide reliability issue on the gate of thefirst transistor 142 if its bulk is grounded. Therefore, to avoid this possible issue, bulk of thefirst transistor 142 is connected to the source node of its own. To avoid the leakage current path through the p-type bulk of thefirst transistor 142 to the grounded p-substrate, the bulk of thefirst transistor 142 is isolated by the deep N-well with 3.3-V bias from the common p-substrate, as the diagram inFIG. 3 shows. Deriving from the analysis of Hspice, voltages on nodes of theESD detection circuit 10 during normal circuit operating condition are also labeled on the diagram inFIG. 4 . Thefirst transistor 142 has a source voltage close to its gate voltage. From these simulated voltages, it can be clearly seen that voltages between every two adjacent nodes of devices do no exceed their voltage extreme (1.32V for 1.2-V devices). Therefore, though the power-rail ESD clamp circuit has high power supply voltage of 3.3V, it is free from the gate-oxide reliability issue. - During the power-on transition, the
ESD detection circuit 10 should be kept off so that theESD detection circuit 10 does not improperly trigger on theESD protection element 30 or result in unwished leakage current from thesubstrate driver 14. This can be achieved through taking advantage of the rise time of normal power-on signals, which are in the order of several milliseconds (ms). Therefore, as long as the RC time delay of theRC distinguisher 16 is much smaller than several milliseconds (several microseconds for example), the voltage on node d can follow up the voltage transition on node c to turn off thesecond transistor 144 during normal power-on transition.FIG. 4 shows the Hspice simulated voltages on nodes of the ESD detection circuit when VDDh and VDDl are powered on to 3.3V and 1.2V, respectively. VDDh and VDDl have the same signal rise time of 1 ms in this simulation. Simulation result shows that the gate voltage of the second transistor 144 (node d) can follow up its source voltage (node c) to turn off thesubstrate driver 14. Therefore, thesubstrate driver 14 is therefore safely kept at off state during the normal power-on transition. - As shown in
FIG. 1 , when ESD transient voltage is applied access VDDh and the ground terminal, thesubstrate driver 14 has to provide the substrate-triggered current into the trigger node as fast as possible, so that the primaryESD protection element 30 can be quickly triggered on to protect the internal circuits from ESD damage. Since the ESD transient voltages have characteristics of the fast pulse rise time (several nanoseconds) and short duration (several hundreds of nanoseconds), thevoltage divider 10 is not fast enough to pull up the gate voltage of thefirst transistor 142 during ESD transition. Therefore, thefifth transistor 20 as a capacitor is needed to enhance the turn-on speed of thefirst transistor 142 under ESD transition. - After the
first transistor 142 is turned on, voltage on node c is pulled high while voltage on node d is kept low due to the RC time delay of theRC distinguisher 16. During ESD transient events, the floating VDD1 has an initial voltage level around ˜0V; the large parasitic capacitance of internal circuits on VDD1 power line and the 1 kΩ resistor will keep VDD1 at low voltage level during ESD transition for a long while. Therefore, because thesecond transistor 144 and thethird transistor 146 work at on state during the ESD transition, thesubstrate driver 14 can be quickly turned on by the ESD energy to generate the trigger current into the primaryESD protection element 30. -
FIG. 5 shows the Hspice-simulated voltages of theESD detection circuit 10 under ESD transition. A 0-to-5.5V ESD-like voltage pulse with rise time of 10 ns is applied to the VDDh to simulate the ESD transient voltage. The Hspice-simulated results show that the gate voltage of the first transistor 142 (node a) is quickly pulled high through the capacity coupling of thefifth transistor 20 and the gate voltage of the second transistor 144 (node d) is kept low due to the time delay of theRC distinguisher 16. Thesubstrate driver 14 can provide the substrate-triggered current around ˜35 mA within 10 ns, as shown inFIG. 6 . By adjusting the device dimensions of thesubstrate driver 14, magnitude of the triggered current can be designed to meet different applications or specifications. - FIGS. 7(a) to 7(e) show some embodiments of the primary
ESD protection element 30. Devices with inherent n-p-n bipolar junction transistor can be driven by the proposed ESD detection circuit to protect the ICs against ESD damage. For example, the FOD (field oxide) device that has no gate oxide structure is a choice for the primary ESD protection element, as shown inFIG. 7 (a). Another embodiment of the primary ESD protection element is the SCR device, as shown inFIG. 7 (b). To increase the overall holding voltage for latch up issue, SCR devices can be stacked together, as shown inFIG. 7 (c). The number of stacked SCR devices can be increased for higher holding voltage. Diodes between the trigger node and the p+ node of SCR inFIG. 7 (c) can prevent ESD current flowing out of the SCR device from the p+ node of the first SCR into the p+ node of the last SCR through the metal connection. The overall holding voltage of SCR device can also be increased by being stacked with different number of diodes under SCR device, as shown inFIG. 7 (d). A parasitic n-p-n transistor composed of a triple stacked NMOS structure is another embodiment for the ESD protection element, as shown inFIG. 7 (e). To lower the strength of electric field on each NMOS device, gate voltages of the top and the middle NMOS have to be properly biased under VDDh. Gate of the top NMOS is connected to node a of the ESD detection circuit, and gate of the middle NMOS is biased at VDD1 in this embodiment. - To sum up, the present invention provides a three-voltage tolerant power-rail ESD clamp circuit realized with only 1.2-V low-voltage devices for 1.2-V/3.3-V mixed-voltage I/O interface. The proposed power-rail ESD clamp circuit is free from the gate-oxide reliability issue and the ESD detection circuit can be quickly turned on to provide the substrate-triggered current so as to drive the ESD protection element to discharge ESD current during the ESD transition.
- Although the present invention has been described with reference to the preferred embodiment thereof, it will be understood that the invention is not limited to the details thereof. Various substitutions and modifications have been suggested in the foregoing description, and other will occur to those of ordinary skill in the art. Therefore, all such substitutions and modifications are intended to be embraced within the scope of the invention as defined in the appended claims.
-
- 10: ESD detection circuit
- 12: voltage divider
- 121, 122, 123, 124, 125, 126: PMOS
- 14: substrate driver
- 142: first transistor
- 144: second transistor
- 146: third transistor
- 16: R-C distinguisher
- 162: first resistor
- 164: capacitor
- 18: fourth transistor
- 20: fifth transistor
- 22: second resistor
- 30: ESD protection element
-
FIGS. 1 and 2 -
- 30: ESD protection element
FIG. 3 - P : p-type substrate
FIGS. 4 and 5 - : voltage
- : time
- : node
FIG. 6 - : current
- : time
- : substrate-triggered current
FIG. 7 - : ESD detection circuit
- : connected to node a
Claims (18)
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TW95111927 | 2006-04-04 | ||
TW095111927A TW200739872A (en) | 2006-04-04 | 2006-04-04 | Power line electrostatic discharge protection circuit featuring triple voltage tolerance |
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US20070230073A1 true US20070230073A1 (en) | 2007-10-04 |
US7283342B1 US7283342B1 (en) | 2007-10-16 |
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US11/428,571 Active US7283342B1 (en) | 2006-04-04 | 2006-07-05 | High-voltage tolerant power rail electrostatic discharge clamp circuit |
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US (1) | US7283342B1 (en) |
KR (1) | KR100852575B1 (en) |
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Also Published As
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US7283342B1 (en) | 2007-10-16 |
TWI297207B (en) | 2008-05-21 |
KR20070099395A (en) | 2007-10-09 |
KR100852575B1 (en) | 2008-08-18 |
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