US20070056624A1 - Thin film ceramic thermocouples - Google Patents

Thin film ceramic thermocouples Download PDF

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Publication number
US20070056624A1
US20070056624A1 US11/529,127 US52912706A US2007056624A1 US 20070056624 A1 US20070056624 A1 US 20070056624A1 US 52912706 A US52912706 A US 52912706A US 2007056624 A1 US2007056624 A1 US 2007056624A1
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Prior art keywords
ceramic
thermocouple
nitrogen
oxygen
thermoelement
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Abandoned
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US11/529,127
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English (en)
Inventor
Otto Gregory
Gustave Fralick
John Wrbanek
Tao You
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BOARD OFGOVERNORS FOR HIGHER EDUCATION STATE OF RHODE ISLAND AND PROVIDENCE PLANTATIONS
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BOARD OFGOVERNORS FOR HIGHER EDUCATION STATE OF RHODE ISLAND AND PROVIDENCE PLANTATIONS
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Priority to US11/529,127 priority Critical patent/US20070056624A1/en
Assigned to BOARD OFGOVERNORS FOR HIGHER EDUCATION, STATE OF RHODE ISLAND AND PROVIDENCE PLANTATIONS reassignment BOARD OFGOVERNORS FOR HIGHER EDUCATION, STATE OF RHODE ISLAND AND PROVIDENCE PLANTATIONS ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FRALICK, GUSTAVE, WRBANEK, JOHN, YOU, TAO, GREGORY, OTTO
Assigned to NASA reassignment NASA CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). Assignors: BOARD OF GOVERNORS FOR HIGHER EDUCATION STATE OF RHODE ISLAND, THE
Publication of US20070056624A1 publication Critical patent/US20070056624A1/en
Priority to US12/700,287 priority patent/US8052324B2/en
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G01K7/04—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples the object to be measured not forming one of the thermoelectric materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G01K7/028—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples using microstructures, e.g. made of silicon

Definitions

  • thermocouples are frequently used for temperature measurement in the gas turbine engine environment but as the blades get thinner, structural integrity can be compromised.
  • a thin film ceramic thermocouple based on indium-tin-oxide (ITO) alloys may be used to measure the surface temperature of both static and rotating engine components employed in propulsion systems that operate at temperatures in excess of 1300° C. By fabricating two different ITO elements, each having substantially different charge carrier concentrations, it is possible to construct a robust ceramic thermocouple.
  • a thermoelectric power of 6.0 ⁇ V/° C., over the temperature range 25-1250° C. has been measured for an unoptimized thin film ceramic thermocouple.
  • thermocouples exhibited a linear voltage-temperature response over the temperature range 25-1250° C. Not only was the thermoelectric power a critical measure of performance of thermocouples in these applications but the electrical and chemical stability was equally important in these harsh conditions, since these temperature sensors must survive tens of hours of testing at elevated temperatures.
  • ITO thin films were deposited by r.f. sputtering in different oxygen, nitrogen, and argon plasmas. ITO thin films prepared in nitrogen rich plasmas have survived temperatures in excess of 1575° C. for tens of hours.
  • FIGS. 2A and B are photographs of a high-temperature test of a ceramic thermocouple on a quartz substrate and a ceramic thermocouple fabricated on an alumina rod;
  • FIG. 3 is a graph of electrical resistivity of ITO in low oxygen partial pressure wherein the films are sputtered in an oxygen and argon plasma;
  • FIG. 4 is a of graph electrical resistivity of ITO in high oxygen partial pressures wherein the films are sputtered in an oxygen and argon plasma;
  • FIG. 5 is a of graph electrical resistivity of ITO in low oxygen partial pressure wherein the films are sputtered in a nitrogen rich plasma;
  • FIG. 6 is a of graph electrical resistivity of ITO in high oxygen partial pressures wherein the films are sputtered in a nitrogen plasma;
  • FIG. 7 is SEM micrograph of an ITO sensor prepared in an oxygen/argon plasma and an ITO sensor prepared in a nitrogen rich plasma;
  • FIG. 8 is a graph of resistivity of ITO sensors in various nitrogen partial pressure
  • FIG. 9 is a graph of response of ceramic thermocouple during thermal cycling to 1200° C.
  • FIG. 10 is a graph of response of ceramic thermocouple during thermal cycling to 1000° C.
  • thermocouple 10 including a first and second element 12 , 14 positioned on a substrate 16 .
  • Thin film metallic leads are indicated at 18 .
  • Thin film thermocouples deposited on the blades and vanes of gas turbine engines can serve as an ideal means of measuring the surface temperature of engine components during operation. The sensitivity and response of thermocouples are based on the development of an electromotive force (emf), which is dependent on the electrical resistivity of the individual metals used to form the couple. Thin film thermocouples can accurately measure the surface temperature of engine components because they have low thermal mass and thus, provide a more accurate measurement of the temperature at a specific point. The small inertial mass of thin films also translates into a negligible impact on vibration patterns.
  • emf electromotive force
  • thermocouples based on reactively sputtered indium-tin-oxide (ITO) thin films can measure the surface temperature of both stationary and rotating engine components employed in propulsion systems that operate at temperatures in excess of 1500° C.
  • ITO solid solutions dissociate in pure nitrogen at temperatures above 1100° C., but are stable in pure oxygen atmosphere at temperature up to 1600° C.
  • the sensor elements are oxidation resistant and do not undergo any phase change when thermally cycled between room temperature and 1500° C.
  • thermocouples are expensive, have a limited temperature range, are prone to yield errors due to catalytic effects and can give results that can deviate by as much as 50 degree C. from the actual temperature. Platinum and rhodium thermocouples are prone to creep and other metallurgical effects at elevated termperature.
  • the sensitivity and response of thermocouples are based on the development of an electromotive force (emf), which is dependent on the electrical properties of the individual thermoelements, namely the density of free carriers.
  • High purity aluminum oxide substrates were used for all high temperature electrical tests, since they provide excellent electrical isolation and stability at high temperature. These substrates were cleaned by rinsing in acetone, methanol and deionized water, followed by a dry nitrogen blow dry. Shadow masking techniques were used to fabricate all thin film thermocouples. The ITO films were deposited by rf sputtering whereas the platinum/rhodium (10%) films were deposited by rf sputtering.
  • a high density ITO target (12.7 cm in diameter) with a nominal composition of 90 wt % In 2 O 3 and 10 wt % SnO 2 was used to deposit ITO thermoelements and high purity (99.9999%) platinum and platinum/rhodium targets (10.7 cm in diameter) were used for all platinum depositions.
  • the sputtering chamber was evacuated to a background pressure ⁇ 1 ⁇ 10 ⁇ 6 torr prior to sputtering and semiconductor grade argon, oxygen and nitrogen were leaked into the chamber to establish a total gas pressure of 9 mtorr.
  • the oxygen, argon and nitrogen partial pressures were maintained in the deposition chamber using MKS mass flow controllers and rf power density of 2.4 W/cm 2 was used for all ITO sputtering runs.
  • Platinum films (3 ⁇ m thick) were used to form ohmic contacts to the active ITO thermoelements and thin film leads to make electrical connection.
  • a computer controlled burner rig and a Deltech tube furnace with a 7-inch hot zone was used for high temperature experiments ( FIG. 2 ). The furnace was ramped at 3° C./min to the desired temperature in 50° C. increments and held for at least 1 hour to establish thermal equilibrium.
  • the corresponding resistance changes were monitored with a 6-digit multimeter (Hewlett-Packard 34401A) and a programmable constant current source (Keithley 224).
  • a Hewlett-Packard multimeter and Keithley constant current source were interfaced to an I/O board and an IBM 488 GPIB card for continuous data acquisition using Lab windows software.
  • a type S thermocouple connected to a second multimeter was used to measure the temperature inside the Deltech furnace.
  • TCR temperature coefficient of resistance
  • thermocouple was fabricated by depositing two different ITO films ( FIGS. 2A and 2B ), each prepared with a very different charge carrier concentration. To insure a reasonable the charge carrier concentration difference in the different elements of the thermocouple, ITO films were prepared by r.f. sputtering in different oxygen/argon and oxygen/nitrogen/argon plasmas. The high temperature stability of thin films prepared in nitrogen-rich plasmas is shown in FIGS. 5 and 6 . After the first thermal cycle, sintering of these nitrogen doped films had occurred and thereafter resulted in excellent stability at elevated temperature (almost independent of oxygen partial pressure in the test environment).
  • the different electrical conductivity in each thermoelement is controlled by the amount of nitrogen in the plasma. It has been determined that by utilizing nitrogen in the plasma, the thermoelements are unexpectedly able to withstand much higher temperatures.
  • the plasma should include at least some and up to 10 mtorr of nitrogen, 0-10 mtorr of oxygen and 0-10 mtorr of argon.
  • One preferred combination of plasma components includes 6 mtorr of argon, 3 mtorr of nitrogen and 1 mtorr of oxygen.
  • TCR temperature coefficient of resistance
  • ITO temperature sensors were examined by SEM after high temperature exposure. SEM micrographs indicated that a marked change in microstructure had occurred in the ITO films after the first thermal cycle.
  • the SEM micrograph of an ITO sensor subjected to a post-deposition heat treatment in air ( FIG. 7 ) showed a partially sintered microstructure with interconnected nanopores. ITO films prepared in a nitrogen-rich plasma retained more metastable nitrogen in the structure and thus, lead to a much finer microstructure.
  • the average ITO particle size was considerably smaller in the nitrogen sputtered ITO films compared to the oxygen sputtered films and the ITO particles exhibited a more angular and faceted morphology.
  • the ITO thermocouples were tested from room temperature to 1250° C., and a linear relationship between emf and temperature was observed. As shown in FIG. 9 , a thermoelectric power of 6 ⁇ V/° C. was determined over this temperature range.
  • Other ceramic thermocouples prepared with higher nitrogen partial pressure (1.853 ⁇ 10 ⁇ 3 torr and 2.43 ⁇ 10 ⁇ 3 torr) lost their linear response during high temperature testing.
  • transparent conducting oxides include aluminum doped zinc oxide, tin oxide, antimony oxide and antimony tin oxide.
  • ITO ceramic thermal sensor To simulate the real engine operation environment, a oxy-propane open flame burner rig was used to test the performance of ITO ceramic thermal sensor ( FIG. 10 ). ITO ceramic thermal sensor successfully survived through this severe testing with almost same thermoelectric power of 6 ⁇ V/° C. The burner rig test further confirmed that ITO ceramic thermocouples were good candidates for the gas turbine engine applications.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
US11/529,127 2004-04-12 2006-09-28 Thin film ceramic thermocouples Abandoned US20070056624A1 (en)

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US11/529,127 US20070056624A1 (en) 2004-04-12 2006-09-28 Thin film ceramic thermocouples
US12/700,287 US8052324B2 (en) 2004-04-12 2010-02-04 Thin film ceramic thermocouples

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US56139304P 2004-04-12 2004-04-12
PCT/US2005/012004 WO2005112140A2 (fr) 2004-04-12 2005-04-12 Thermocouples ceramiques en couche mince
US11/529,127 US20070056624A1 (en) 2004-04-12 2006-09-28 Thin film ceramic thermocouples

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070227576A1 (en) * 2006-03-31 2007-10-04 Gambino Richard J Thermocouples
US20080178603A1 (en) * 2006-10-25 2008-07-31 Snecma Method and device for reducing the speed in the event of breakage of a gas turbine engine turbine shaft
US20090290614A1 (en) * 2006-10-18 2009-11-26 Board Of Governors For Higher Education, State Of Rhode Island Nad Providence Nano-composites for thermal barrier coatings and thermo-electric energy generators
US20100051080A1 (en) * 2008-07-18 2010-03-04 Samsung Electronics Co., Ltd. Thermoelectric materials and chalcogenide compounds
US20100206720A1 (en) * 2009-02-17 2010-08-19 Kuan-Jiuh Lin Method of producing inorganic nanoparticles
US8348504B2 (en) 2010-05-12 2013-01-08 Wireless Sensor Technologies, Llc Wireless temperature measurement system and methods of making and using same
CN106595894A (zh) * 2016-12-19 2017-04-26 美的集团股份有限公司 薄膜热电偶及含有其的温度传感器件
US9972762B2 (en) 2012-08-31 2018-05-15 Te Wire & Cable Llc Thermocouple ribbon and assembly
US10161807B2 (en) 2016-09-23 2018-12-25 Rolls-Royce Corporation Thin-film thermocouple for measuring the temperature of a ceramic matrix composite (CMC) component
US10371588B2 (en) 2016-07-01 2019-08-06 Rhode Island Council On Postsecondary Education High resolution strain gages for ceramic matrix composites and methods of manufacture thereof
US10690551B2 (en) 2016-02-12 2020-06-23 Rhode Island Council On Postsecondary Education Temperature and thermal gradient sensor for ceramic matrix composites and methods of preparation thereof
US10782190B1 (en) 2017-12-14 2020-09-22 University Of Rhode Island Board Of Trustees Resistance temperature detector (RTD) for ceramic matrix composites
CN114107924A (zh) * 2021-11-11 2022-03-01 淮阴工学院 一种非制冷红外微测辐射热计用热敏薄膜
US11703471B1 (en) 2018-12-20 2023-07-18 University Of Rhode Island Board Of Trustees Trace detection of chemical compounds via catalytic decomposition and redox reactions

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US8742944B2 (en) 2004-06-21 2014-06-03 Siemens Energy, Inc. Apparatus and method of monitoring operating parameters of a gas turbine
US8033722B2 (en) 2008-08-01 2011-10-11 Siemens Energy, Inc. Thermocouple for gas turbine environments
US8662746B2 (en) 2008-08-01 2014-03-04 Siemens, Energy Inc. Turbine component instrumented to provide thermal measurements
US8568027B2 (en) 2009-08-26 2013-10-29 Ut-Battelle, Llc Carbon nanotube temperature and pressure sensors
US9350319B2 (en) 2014-02-24 2016-05-24 Siemens Energy, Inc. Self-powered sensing and transmitting device and method of fabricating the same
CN103900728B (zh) * 2014-04-23 2017-06-06 大连交通大学 一种陶瓷薄膜热电偶及其制备方法
CN110042355B (zh) * 2019-05-08 2021-08-03 中国航发北京航空材料研究院 一种具有一维纳米阵列结构的薄膜热电偶及其制造方法

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US5338566A (en) * 1990-01-05 1994-08-16 Avco Corporation Method utilizing a ceramic for temperature measurement
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Cited By (19)

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US20070227576A1 (en) * 2006-03-31 2007-10-04 Gambino Richard J Thermocouples
US7753584B2 (en) * 2006-03-31 2010-07-13 Mesoscribe Technologies, Inc. Thermocouples
US20090290614A1 (en) * 2006-10-18 2009-11-26 Board Of Governors For Higher Education, State Of Rhode Island Nad Providence Nano-composites for thermal barrier coatings and thermo-electric energy generators
US20080178603A1 (en) * 2006-10-25 2008-07-31 Snecma Method and device for reducing the speed in the event of breakage of a gas turbine engine turbine shaft
US7934367B2 (en) * 2006-10-25 2011-05-03 Snecma Method and device for reducing the speed in the event of breakage of a gas turbine engine turbine shaft
US20100051080A1 (en) * 2008-07-18 2010-03-04 Samsung Electronics Co., Ltd. Thermoelectric materials and chalcogenide compounds
US8299349B2 (en) * 2008-07-18 2012-10-30 Samsung Electronics Co., Ltd. Thermoelectric materials and chalcogenide compounds
US20100206720A1 (en) * 2009-02-17 2010-08-19 Kuan-Jiuh Lin Method of producing inorganic nanoparticles
US8348504B2 (en) 2010-05-12 2013-01-08 Wireless Sensor Technologies, Llc Wireless temperature measurement system and methods of making and using same
US8568026B2 (en) 2010-05-12 2013-10-29 Wireless Sensor Technologies, Llc Wireless temperature measurement system and methods of making and using same
US9972762B2 (en) 2012-08-31 2018-05-15 Te Wire & Cable Llc Thermocouple ribbon and assembly
US10396266B2 (en) 2012-08-31 2019-08-27 Te Wire & Cable Llc Thermocouple ribbon and assembly
US10690551B2 (en) 2016-02-12 2020-06-23 Rhode Island Council On Postsecondary Education Temperature and thermal gradient sensor for ceramic matrix composites and methods of preparation thereof
US10371588B2 (en) 2016-07-01 2019-08-06 Rhode Island Council On Postsecondary Education High resolution strain gages for ceramic matrix composites and methods of manufacture thereof
US10161807B2 (en) 2016-09-23 2018-12-25 Rolls-Royce Corporation Thin-film thermocouple for measuring the temperature of a ceramic matrix composite (CMC) component
CN106595894A (zh) * 2016-12-19 2017-04-26 美的集团股份有限公司 薄膜热电偶及含有其的温度传感器件
US10782190B1 (en) 2017-12-14 2020-09-22 University Of Rhode Island Board Of Trustees Resistance temperature detector (RTD) for ceramic matrix composites
US11703471B1 (en) 2018-12-20 2023-07-18 University Of Rhode Island Board Of Trustees Trace detection of chemical compounds via catalytic decomposition and redox reactions
CN114107924A (zh) * 2021-11-11 2022-03-01 淮阴工学院 一种非制冷红外微测辐射热计用热敏薄膜

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WO2005112140A3 (fr) 2006-02-02
WO2005112140A2 (fr) 2005-11-24
US8052324B2 (en) 2011-11-08
US20110023619A1 (en) 2011-02-03

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