US20060130595A1 - Multi axis load cell body - Google Patents

Multi axis load cell body Download PDF

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Publication number
US20060130595A1
US20060130595A1 US11/286,697 US28669705A US2006130595A1 US 20060130595 A1 US20060130595 A1 US 20060130595A1 US 28669705 A US28669705 A US 28669705A US 2006130595 A1 US2006130595 A1 US 2006130595A1
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United States
Prior art keywords
flexure
assembly
assemblies
load cell
ring member
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Abandoned
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US11/286,697
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English (en)
Inventor
Richard Meyer
Alan Kempainen
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MTS Systems Corp
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MTS Systems Corp
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Priority to US11/286,697 priority Critical patent/US20060130595A1/en
Assigned to MTS SYSTEMS CORPORATION reassignment MTS SYSTEMS CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KEMPAINEN, ALAN J., MEYER, RICHARD A.
Publication of US20060130595A1 publication Critical patent/US20060130595A1/en
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/1627—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/18—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying effective impedance of discharge tubes or semiconductor devices
    • G01D5/183—Sensing rotation or linear movement using strain, force or pressure sensors

Definitions

  • the present disclosure relates to a load cell that transmits and measures linear forces along and moments about three orthogonal axes. More particularly, a compact load cell body that can be used, for instance, as a wheel force transducer among other applications is disclosed.
  • Wheel force transducer or load cells for measuring forces along or moments about three orthogonal axes are known.
  • the wheel force transducer typically is mounted between and to a vehicle spindle and a portion of a vehicle rim.
  • the transducer measures forces and moments reacted through a wheel assembly at the spindle as the vehicle is operated.
  • Wheel force transducers that have enjoyed substantial success and critical acclaim are sold under the trade designation Swift® and Swift® 50 transducers by MTS Systems Corporation of Eden Prairie, Minn. and are described in detail in U.S. Pat. Nos. 5,969,268, 6,038,933, and 6,769,312.
  • these transducers include a load cell body having a plurality of tubular members. A plurality of sensing circuits are mounted to the plurality of tubular members. The load cell body is attached to a vehicle wheel. An encoder measures the angular position of the load cell body allowing the forces transmitted through the radial tubular members to be resolved with respect to an orthogonal stationary coordinate system.
  • a load cell is provided that is suitable for transmitting forces and moments in a plurality of directions.
  • the load cell is an integral assembly being formed from a single unitary body and includes a first ring member and a second ring member, each ring member having a central aperture centered on a reference axis.
  • At least three sensor assemblies are included.
  • Each sensor assembly comprises a stiff member attached to one of the rings and extending therefrom to the other radially from the reference axis, and a flexure assembly joining a remote end of each member to the other ring member.
  • Sensing devices are disposed on each of the flexure assemblies configured to sense strain therein.
  • FIG. 1 is a top plan view of a load cell body with portions removed in accordance with the present disclosure.
  • FIG. 2 is a side elevational view of the load cell body illustrated in FIG. 1 .
  • FIG. 3A is an illustration showing location of sensing devices referenced to various portions of the load cell body.
  • FIG. 3B is a sectional view taken along lines A-A in FIG. 3A .
  • FIG. 3C is a sectional view taken along lines B-B in FIG. 3A .
  • FIG. 4 is a schematic drawing of electrical circuits used to measure forces and moments about an orthogonal coordinate system.
  • FIG. 5 is a side sectional view of the load cell mounted to a tire rim.
  • FIG. 6 is a front elevational view of the load cell mounted to the tire rim of FIG. 5 .
  • FIG. 7 is a general block diagram of a controller.
  • FIG. 8 is a block diagram of a scaling and geometric transformation circuit.
  • FIG. 9 is a circuit diagram of a portion of a cross coupling matrix circuit.
  • FIG. 10 is a block diagram of a coordinate transformation circuit.
  • FIG. 11 is a side sectional view of the load cell mounted to a dual-wheel assembly.
  • FIG. 12 is a front elevational view of the load cell mounted to the dual-wheel assembly of FIG. 11 .
  • FIG. 13 is a top plan view of a second embodiment of a load cell body with portions removed in accordance with the present disclosure.
  • FIG. 14 is a side elevational view of the load cell body illustrated in FIG. 1 .
  • FIGS. 15A, 15B and 15 C illustrate sensing devices referenced to various portions of the load cell body.
  • FIGS. 16A, 16B and 16 C illustrate a second embodiment of sensing devices referenced to various portions of the load cell body.
  • FIG. 17 is a schematic drawing of electrical circuits used for the sensing devices of FIGS. 15A, 15B and 15 C, or FIGS. 16A, 16B or 16 C.
  • FIGS. 1 and 2 illustrate an embodiment of a load cell 10 of the present disclosure.
  • the load cell 10 preferably includes an integral body 12 fabricated from a single block of material.
  • the load cell body 12 can be manufactured from aluminum, titanium, 4340 steel, 17-4, 15-5 pH stainless steel or other high-strength materials and combinations thereof.
  • the body 12 includes a first rigid annular ring 14 and a second annular ring 16 that is concentric and aligned with the first annular ring 14 so as to be centered about a common axis 15 .
  • a plurality of sensor assemblies 20 join the first annular ring 14 to the second annular ring 16 .
  • the plurality of sensor assemblies 20 include four assemblies 21 , 22 , 23 and 24 .
  • Each of the assemblies 21 - 24 extends from the first annular ring 14 to the second annular ring 16 .
  • assemblies 25 , 26 , 27 and 28 (collectively indicated as 29 ) are constructed similar to assemblies 21 , 22 , 23 and 24 and help distribute the load between rings 14 and 16 .
  • the plurality of sensor assemblies 20 and assemblies 29 equals eight, it should be understood that any number of sensor assemblies 20 three or more can be used between the first annular ring 14 to the second annular ring 16 with or without any number of additional load carrying assemblies 29 .
  • the plurality of sensor assemblies 20 and 29 are spaced at substantially equal angular intervals about the axis 15 .
  • a plurality of sensors 30 are mounted on the plurality sensor assemblies 20 to sense stresses or strain.
  • the sensors 30 are strain gauges and are incorporated in a plurality of Wheatstone bridges. Eight Wheatstone bridges are shown in the present example, the configuration of which is but one exemplary configuration in that other configurations can be used as appreciated by those skilled in the art. The Wheatstone bridges are combined so as to provide sensor signals that are provided as outputs from the load cell 10 .
  • Assemblies 25 , 26 , 27 and 28 although constructed similar to assemblies 21 , 22 , 23 and 24 and help distribute the load between rings 14 and 16 in the embodiment illustrated do not include sensors, but could be so equipped if desired, particularly if signal modulation due to rotation of the load cell 10 while in use is of a concern.
  • the eight Wheatstone bridges provide eight sensor signals.
  • an orthogonal coordinate system can be defined wherein an X-axis is indicated at 17 , a Z-axis is indicated at 19 , and a Y-axis corresponds to the central axis 15 ( FIGS. 1 and 2 ).
  • the sensor signals from the load cell 10 are used to calculate forces along and moments about the X-axis 17 , the Y-axis 15 and the Z-axis 19 .
  • Each of the sensor assemblies 20 includes the same general construction.
  • a plurality of radial members 21 B, 22 B, 23 B and 24 B join the central hub 14 to the annular ring 16 .
  • the radial members 21 B- 24 B of sensor assemblies 20 , and assemblies 29 if present, are stiff, i.e., non-compliant in order to transfer all loads to the between the rings 14 and 16 .
  • the plurality of radial members 21 B, 22 B, 23 B and 24 B are solid and generally rectangular in cross-section at least in part (although the shape may not be that important) and extend radially from the central hub 14 toward the annular ring 16 along a corresponding longitudinal axis 21 A, 22 A, 23 A and 24 A.
  • axis 21 A is aligned with axis 23 A
  • axis 22 A is aligned with axis 24 A.
  • axes 21 A and 23 A are perpendicular to axes 22 A and 24 A.
  • Flexure members 31 , 32 , 33 and 34 join an end of each radial member 21 B, 22 B, 23 B and 24 B, respectively, to the annular ring 16 .
  • the flexure members 31 - 34 are compliant for displacements of each corresponding radial member 21 B- 24 B along the corresponding longitudinal axes 21 A- 24 A.
  • the flexure members 31 - 34 are identical and include integrally formed flexure straps 36 and 38 (herein a pair each), formed by apertures 36 A and 36 B.
  • the flexure straps 36 and 38 can be considered substantially planar.
  • the flexure straps 36 and 38 are located on opposite sides of each longitudinal axis 21 A- 24 A and join the corresponding radial member 21 B- 24 B to the annular ring 16 . As illustrated recesses 47 can be provided to make the flexure straps 36 and 38 more compliant.
  • apertures 36 A and 38 A are depicted as being circular other shapes (diamond, square, rectangular, oval, etc.) can be used.
  • the radial members 21 B- 24 B and flexure members 31 - 34 are formed in part by isolation apertures 37 provided on either side of axes 21 A- 24 A that extend generally parallel to the axis 15 .
  • an isolation slot 39 is disposed radially outward from apertures 37 to further define the surfaces of the radial members 21 B- 24 B and flexure members 31 - 34 furthest from axis 15 .
  • Apertures 41 A and 41 B provided in ring 16 are aligned with apertures 36 A and 38 B, respectively, due to the machining process for forming apertures 36 A and 38 A.
  • flexure straps 36 and 38 are conveniently formed by machining ring 16 to form apertures 41 A and 41 B and then apertures 36 A and 36 B.
  • Apertures 41 A and 41 B also provide access for mounting sensors such as strain gauges on the flexure straps 36 and 38 , if desired.
  • each aperture 37 is connected by an isolation slot 41 to an adjacent sensor assembly 20 , or as illustrated to a similar aperture of an adjacent load carrying assembly 29 if present, in order to isolate ring 14 from ring 16 , but for the presence of radial members and flexure members in sensor assemblies 20 , and assemblies 29 if provided.
  • the sensor assemblies 20 are adapted to receive sensors of any known type for detecting stress and/or strain therein.
  • sensors 30 comprise strain gauges disposed on or operably coupled to the flexure straps 36 and 38 .
  • the sensors 30 can be mounted on or operably coupled to the inner surfaces of the apertures 36 A and 38 A, which generally protect the sensors 30 (although mounting or operably coupled to the outer surfaces of straps 36 and 38 could also be feasible).
  • Each sensor assembly 20 is generally sensitive in 2 orthogonal axes.
  • each sensor assembly 21 - 24 is configured so as to be sensitive for loads applied along the Y or central axis 15 .
  • sensor assemblies 21 and 23 are sensitive for loads applied along the Z-axis 19
  • sensor assemblies 22 and 24 are sensitive for loads applied along the X-axis 17 .
  • FIGS. 3A, 3B , 3 C and 4 illustrate location and connection of the strain gauges into eight Wheatstone bridges.
  • FIG. 3A illustrates portions of ring 16 for each of the sensor assemblies 21 - 24 in order to show location of the strain gauges attached thereto. However, it should be noted that two views of each ring portion are shown for purposes of understanding the mounting location of the strain gauges. One view is provided to illustrate a first set of strain gauges 50 that form a first sensing circuit, while a second view is provided to illustrate a second set of strain gauges 60 that form a second sensing circuit.
  • each aperture 36 A and 38 A includes six gauges mounted therein, but two views are provided in order to clearly depict their location for each sensing circuit.
  • Wheatstone bridge 50 A illustrates connection of the strain gauges 50 in the first sensing circuit to sense loads along the Y-axis 15 for sensor assembly 22 .
  • Eight strain gauges identified as “C 1 ”, “C 2 ”, “C 3 ”, “C 4 ”, “T 1 ”, “T 2 ”, “T 3 ” and “T 4 ” are connected as a single Wheatstone bridge.
  • strain gauges C 1 , C 2 , T 1 and T 2 can be connected in one Wheatstone bridge, while strain gauges C 3 , C 4 , T 3 and T 4 can be connected in another Wheatstone bridge, wherein output signals therefrom are electrically combined or processed so as to realize a signal indicative of loads at sensor assembly 22 with respect to the Y-axis 15 .
  • Strain gauges 50 at sensor assemblies 21 , 23 and 24 are similarly connected as described with respect to sensor assembly 22 .
  • strain gauges 60 are connected in a Wheatstone bridge 60 A to form the second sensing circuit that provides a signal indicative of loads along the X-axis 17 .
  • the strain gauges 60 of sensor assembly 24 are similarly connected to provide a signal indicative of loads along the X-axis 17 .
  • the strain gauges 60 of sensor assemblies 21 and 23 are similarly connected but each provide a signal indicative of loads along the Z-axis 19 .
  • FIGS. 3B and 3C illustratively show location of the strain gauges for set 50 or set 60 on the flexure straps 36 or 38 in that the strain gauges are mounted on the neutral axis thereof.
  • Location of the strain gauges on the neutral axis and as illustrated in FIG. 3A minimizes cross-talk for the two-axis sensitivity of each sensor assembly 21 - 24 . In other words, for loads along the Y-axis 15 the stress at each of the locations of strain gauges 50 is concentrated or high, while the stress at each of the locations of strain gauges 60 is low.
  • the stress at the each of the locations of strain gauges 50 is low, while the stress at each of the locations of strain gauges 60 is concentrated or high.
  • the behavior of the flexure straps 36 and 38 and the location of the sensors provide a two-axis sensor assembly or load cell with favorable cross-talk characteristics.
  • Both the load cell body (a single flexure element having at least two flexure straps joined to two members) and also the load cell body with suitable sensing devices, each comprise further aspects of the present invention.
  • sensors 30 are mounted conventionally to provide an output signal indicative of stresses in the flexure members 31 - 34 , and in particular straps 36 and 38 , such as compression and tension in the form of a change in resistance
  • other forms of sensing devices such as optically based sensors or capacitively based sensors can also be used to sense changes in stress or any other characteristic that exhibits a change, such as displacement, due to loading of the sensor assemblies 21 - 24 .
  • the load cell 10 provides eight signals as described above.
  • the eight signals are then transformed to provide forces and moments about the axis of the coordinate system 15 .
  • force along the X-axis 17 is measured stresses created in sensor assemblies 22 and 24 .
  • force along the Z-axis 19 is measured as stresses created in the sensor assemblies 21 and 23 .
  • Force along the Y-axis 15 is measured as axial tension/compression created in sensor assemblies 21 - 24 .
  • the number of sensors 30 and the number of sensing circuits can be reduced if measured forces and moments of less than six degrees of freedom is desired.
  • the load cell 10 is particularly well-suited, although not limited to, measuring the force and moment components of a rolling wheel. Referring to FIGS. 5 and 6 , the load cell 10 is illustrated as being connected in the load path from a vehicle spindle 80 to a wheel rim 70 . In effect, the load cell 10 replaces a center portion of the rim 70 connecting the spindle 80 to the tire interface.
  • the ring 14 is secured to the vehicle spindle 80 .
  • the vehicle spindle 80 includes a set of mounting bolts 85 that are generally adapted to receive a typical rim or wheel.
  • the ring 14 includes a set of mounting apertures 87 extending parallel to the axis 15 that are adapted to mate with the mounting bolts 85 .
  • the ring 14 is connected to the spindle 80 with fasteners 79 that mate onto the bolts 85 .
  • the fasteners 79 comprise nuts that include internal screw threads that mate with the bolts 85 .
  • a thermal isolator 81 can be provided between the rim 80 and the load cell 10 to minimize heat transfer from the spindle 80 .
  • the ring 16 is secured to the vehicle rim 70 with an extending rim flange 72 joined to the rim 70 or formed integral therewith from a single unitary body.
  • the load cell 10 mounts to rim flange 72 .
  • the rim flange 72 includes a set of mounting apertures 91 adapted to align with mounting apertures 93 on the ring 16 .
  • the rim flange 72 is adapted to be attached to the second annular ring 16 with fasteners, such as bolts 95 that extend through the mounting apertures 91 and into aligned threaded mounting apertures 93 of the ring 16 .
  • the rim flange 72 is connected to the ring 16 with 16 bolts 95 in eight groups of two bolts.
  • the load cell 10 can also include raised portions (not explicitly shown) that extend slightly above the surface of the ring 14 to concentrate stresses proximate to each mounting aperture 87 . Similar raised portions can be provided on the ring 16 proximate to mounting apertures 93 for mounting the load cell 10 to rim flange 72 .
  • FIGS. 11 and 12 illustrate an embodiment where load cell 10 is mounted in a manner similar to that described above in the load path from spindle 80 and two vehicle rims 70 A and 70 B joined together with flanges 72 A and 72 B.
  • the flanges 72 A and 72 B can be formed integral from a single unitary body with or without rims 70 A and/or 70 B.
  • a controller 82 provides power to and receives outputs from the sensors 30 through a slip ring assembly 84 if the tire rim 70 rotates or partially rotates.
  • the controller 82 calculates, records and/or displays the force and moment components measured by the load cell 10 .
  • the slip ring assembly 84 includes a slip ring bracket 84 A that attaches to ring 16 .
  • the slip ring assembly 84 also includes an anti-rotate assembly 86 and an encoder 89 .
  • the anti-rotate assembly 86 prevents the encoder 89 from rotating about the axis 15 .
  • Sensors 30 are connected to conductors that are carried in passageways in the slip ring bracket 84 A to the encoder 89 .
  • the encoder 89 provides an angular output signal to the controller 82 indicative of the angular position of the load cell 10 .
  • An power/amplifier circuit 84 B provides power to each of the Wheatstone bridge circuits through the slip ring assembly 84 and receives the output signals 88 ( FIG.
  • Covers 97 can be provided on both sides of the load cell 10 proximate each of the sensor assemblies 20 , and assemblies 29 if present, in order to protect the components thereof and sensors 30 .
  • FIG. 7 illustrates generally operation performed by the controller 82 to transform the output signals 88 received from the individual sensing circuits on the sensor assemblies 21 - 24 to obtain output signals 108 indicative of force and moment components with respect to six degrees of freedom in a static orthogonal coordinate system.
  • output signals 88 from the sensing circuits are received by a scaling and geometric transformation circuit 90 .
  • the scaling and geometric transformation circuit 90 adjusts the output signals 88 to compensate for any imbalance between the sensing circuits.
  • Circuit 90 also combines the output signals 88 according to the equations given above to provide output signals 94 indicative of force and moment components for the orthogonal coordinate system.
  • a cross-coupling matrix circuit 96 receives the output signals 94 and adjusts the output signals so as to compensate for any cross-coupling effects.
  • a coordinate transformation circuit 102 receives output signals 100 from the cross-coupling matrix circuit 96 and an angular input 104 from an encoder or the like. The coordinate transformation circuit 102 adjusts the output signals 100 and provides output signals 108 that are a function of a position of the load cell 10 so as to provide force and moment components with respect to a static orthogonal coordinate system.
  • FIG. 8 illustrates the scaling and geometric transformation circuit 90 in detail.
  • High impedance buffer amplifiers 110 A to 110 H receive the output signals 88 from the slip ring assembly 84 .
  • adders 112 A to 112 H provide a zero adjustment while, preferably, adjustable amplifiers 114 A to 114 H individually adjust the output signals 88 so that any imbalance associated with physical differences such as variances in the wall thickness of the location of the sensors 30 on the sensor assemblies 21 - 24 or variances in the placement of the sensors 30 from assembly to assembly can be easily compensated.
  • Adders 116 A to 116 H combine the output signals from the amplifiers 114 A to 114 H in accordance with the equations above.
  • Adjustable amplifiers 118 A to 118 D are provided to ensure that output signals from adders 116 A to 116 D have the proper amplitude.
  • FIG. 9 illustrates cross-coupling compensation for signal F x .
  • Each of the other output signals F y , F z , M x , M y , and M z are similarly compensated for cross-coupling effects.
  • FIG. 10 illustrates in detail the coordinate transformation circuit 102 .
  • the encoder 89 provides an index for sine and cosine digital values stored in suitable memory 120 and 122 such as RAM (Random Access Memory).
  • Digital to analog converters 124 and 126 received the appropriate digital values and generate corresponding analog signals indicative of the angular position of the load cell 10 .
  • Multipliers 128 A to 128 H and adders 130 A to 130 D combine force and moment output signals along and about the X-axis and the Z-axis so as to provide force and moment output signals 108 with respect to a static orthogonal coordinate system.
  • FIGS. 13 and 14 illustrate a second embodiment of a load cell 10 ′.
  • Load cell 10 ′ includes a body 12 ′ that is integral formed from a single unitary body. Many of the structures of body 12 ′ are similar to body 12 above and accordingly the same numbers have been used. However, as further illustrated in FIGS. 15B and 15C flexure elements 36 ′ and 38 ′ are planar structures lacking the apertures of the previous embodiment.
  • load cell 10 ′ have identical two-axis, sensor assemblies one of which is illustrated in FIG. 15A .
  • Sensing devices such as strain gauges(although other types can be used) are used to measure stress and/or strain in the flexure members 36 ′, 38 ′.
  • FIGS. 15A, 15B , 15 C and 17 illustrated location on the sensor assembly and the corresponding Wheatstone bridges, where “FX” represents sensing forces in the X-direction (force in the z-direction is similarly achieved on other sensor assemblies), “FY” represents sensing forces in the Y-direction, “T” represents “tension”, “C” represents “compression”, and “1”, “2”, “3” and “4.
  • FIGS. 16A, 16B and 16 C illustrate an alternative configuration and also corresponds to FIG. 17 . As with the previous embodiment, eight bridges can be used on four sensor assemblies.

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  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
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US20060107761A1 (en) * 2004-11-16 2006-05-25 Meyer Richard A Multi-axis load cell body
US20100170722A1 (en) * 2009-01-08 2010-07-08 Alps Electric Co., Ltd. Load detecting device, seat, and load sensor
US20160220319A1 (en) * 2015-02-03 2016-08-04 Stryker Corporation Force/torque transducer and method of operating the same
US10209151B2 (en) * 2015-07-29 2019-02-19 Tri-Force Management Corporation Torque sensor
US11035746B2 (en) * 2018-12-20 2021-06-15 Industrial Technology Research Institute Multi-axis force sensor capable of reducing influence on the other when measuring one of the axial force and torque
US11187600B2 (en) * 2016-12-27 2021-11-30 Dai-Ichi Seiko Co., Ltd. Torque sensor
US20220011184A1 (en) * 2018-11-26 2022-01-13 The University Of Tokyo Multi-axial tactile sensor
JP2022010551A (ja) * 2020-06-29 2022-01-17 トヨタ自動車株式会社 力覚センサ
US20220205856A1 (en) * 2020-12-24 2022-06-30 Minebea Mitsumi Inc. Sensor chip and force sensor device
US20220205854A1 (en) * 2020-12-24 2022-06-30 Minebea Mitsumi Inc. Strain inducing body and force sensor device
JP2022122340A (ja) * 2021-02-10 2022-08-23 株式会社レプトリノ 力覚センサ
US20220299383A1 (en) * 2021-03-16 2022-09-22 Minebea Mitsumi Inc. Sensor chip and force sensor apparatus
WO2022209210A1 (fr) * 2021-03-31 2022-10-06 日本電産コパル電子株式会社 Capteur de force

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JP2022010551A (ja) * 2020-06-29 2022-01-17 トヨタ自動車株式会社 力覚センサ
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JP2022122340A (ja) * 2021-02-10 2022-08-23 株式会社レプトリノ 力覚センサ
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WO2022209210A1 (fr) * 2021-03-31 2022-10-06 日本電産コパル電子株式会社 Capteur de force

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