US20050230349A1 - Trimming of embedded structures - Google Patents

Trimming of embedded structures Download PDF

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Publication number
US20050230349A1
US20050230349A1 US11/155,572 US15557205A US2005230349A1 US 20050230349 A1 US20050230349 A1 US 20050230349A1 US 15557205 A US15557205 A US 15557205A US 2005230349 A1 US2005230349 A1 US 2005230349A1
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Prior art keywords
conductive element
cavity
substrate
trimming
extension
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Granted
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US11/155,572
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US7531755B2 (en
Inventor
Olli Salmela
IIpo Kokkonen
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Nokia Oyj
Broadcom Corp
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Nokia Oyj
Broadcom Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/255—Means for correcting the capacitance value
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/351—Working by laser beam, e.g. welding, cutting or boring for trimming or tuning of electrical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/242—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H01F41/0286—Trimming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00—Waveguides; Transmission lines of the waveguide type
    • H01P3/02—Waveguides; Transmission lines of the waveguide type with two longitudinal conductors
    • H01P3/06—Coaxial lines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P7/00—Resonators of the waveguide type
    • H01P7/08—Strip line resonators
    • H01P7/084—Triplate line resonators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0213—Electrical arrangements not otherwise provided for
    • H05K1/0237—High frequency adaptations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base

Definitions

  • This invention relates to trimming of structures and components in electric circuits.
  • the invention can, for example, be utilized in multilayer ceramics technologies, in organic printed circuit boards, and in micro-electro-mechanical systems.
  • the trimming of electrical structures is required in order to get the system to work in the designed way. This is due to the fact that manufacturing processes may lack the required accuracy that is needed to gain the nominal values used in the design phase. Also, statistical variation within the manufacturing process of printed circuit boards, discrete components, or integrated circuits may create the need for trimming some critical parts or points. In this content trimming means cutting a structure or a component, for example by laser, until the desired electrical characteristics are achieved.
  • trimming has been possible only if the component or the structure has been located on the surface of the whole structure. In other words, trimming has been possible on the surface layer.
  • the apparatus used for trimming such as lasers, can not penetrate through printed circuit boards. Due to this all tolerance critical parts have been placed on the top layer, which causes large circuit modules that are expensive. Structures on the surface must also be covered with a protection layer, such as an over-glaze material. This is an additional process step, increasing the cost of the structure.
  • top layers must be resistive to electro-migration.
  • Surface layers are sensitive to electro-migration, which causes changes in electrical behavior.
  • Ag—Pd paste material has to be used on a top layer instead of pure Ag paste for preventing unwanted migration effects.
  • Using Ag—Pd paste instead of Ag paste results in higher conductor losses. That degrades, for example, the Q values of resonators and increases insertion loss in filter structures.
  • the objective of the invention is to eliminate the above-mentioned drawbacks of known solutions. This is achieved in a way described in the claims.
  • the idea of the invention is to form a cavity in a multilayer substrate at the point of the structure to be trimmed. This enables the embedding of tolerance critical components inside substrates, such as printed circuit boards, modules, and sub-systems. Trimming is done through the cavity using, for example, a laser. After trimming the cavity is easy to fill in with a suitable dielectric material, or to cover otherwise, e.g. by using a lid, or to leave the cavity uncovered.
  • the invention makes it possible to insert tolerance critical structures and components into a substrate.
  • FIG. 1 illustrates an example of the top view of an embedded resonator
  • FIG. 2 is a cross-sectional view of the resonator in FIG. 1 taken along line I-I,
  • FIG. 3 illustrates an example of an embedded multiband module resonator
  • FIG. 4 illustrates an example of an embedded coaxial resonator.
  • FIG. 1 depicts the top view of an example of an embedded resonator inside a multilayer circuit board ( 10 ) and FIG. 2 a cross section of FIG. 1 .
  • the surface of the resonator, forming a ground line is fabricated from conductive materials, for example, so that the bottom ( 1 ) and the top ( 2 ) edges are conductive strip lines, and the sides are conductive via posts ( 3 ).
  • a conductive strip line ( 4 ) forming a signal line, which is connected to the surface of the resonator via an extension ( 5 ) forming a short circuit between the signal line and the ground line.
  • the structure includes also a cavity ( 6 ) that partially discloses the short circuit between the signal and ground lines.
  • the resonator length i.e. the location of the short circuit
  • FIG. 3 depicts an example of an embedded module multiband resonator ( 7 ), which can be used in a desired frequency area (DCS, WCDMA, or GSM).
  • DCS desired frequency area
  • WCDMA desired frequency area
  • GSM desired frequency area
  • DCS, WCDMA, GSM trimming cavities
  • the fine tuning is done through the DCS cavity by cutting a suitable length of the extension away until the desired value is achieved.
  • the resonator is planned to be used in a WCDMA (wideband code-division multiple access) area, the fine tuning is done through the WCDMA cavity, and if the resonator is planned to be used in a GSM area, the fine tuning is done through the GSM (Global System for Mobile Communication) cavity.
  • WCDMA wideband code-division multiple access
  • the resonator ( 7 ) can be trimmed to the WCDMA area when the short circuit extension ( 8 ) in the DCS area is cut totally open by a laser through the first cavity (DCS) and the fine tuning is done by cutting the desired length of the short circuit extension ( 9 ) open through the second cavity (WCDMA).
  • the short circuit extensions ( 8 , 9 ) are cut totally open through the first and the second cavity, and the fine tuning is done through the third cavity. So it is possible to use one module structure in different frequency areas. The number of trimming cavities depends on the case.
  • Similar structures can be used in order to suppress spurious harmonics. Both before-mentioned structures can be used, for example, in voltage-controlled oscillators.
  • the transmission line used is a multilayer coaxial line. From the figure it can be clearly noted that a large amount of surface area can be saved, and discrete components can be placed on the top of the resonator structure.
  • the invention enables the trimming of tolerance critical components inside printed circuit boards, modules, and subsystems. This means savings of printed circuit board area and costs. Enhanced electrical performance can also be reached because higher conductive conductor materials can be used. Embedded structures are well EMC shielded and isolation is better than in conventionally trimmed structures.
  • the structure to be trimmed can be, instead of a simple transmission line, a passive component, such as a resistor, a capacitor, or an inductor.
  • the purpose of transmission line trimming can be different than to remove or move the termination of the line. It can, for example, be used to change transmission line properties of the signal line by changing the width of the conductors. So it is evident that the invention is not restricted to the before-mentioned examples, but it can be used in other solutions within the scope of the inventive idea.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)

Abstract

The idea of the invention is to form a cavity in a multilayer substrate at the point of the structure to be trimmed. This enables the embedding of tolerance critical components inside substrates, such as printed circuit boards, modules, and sub-systems. Trimming is done through the cavity using, for example, a laser. After trimming the cavity is easy to fill in with a suitable dielectric material, or to cover otherwise, e.g. by using a lid, or to leave the cavity uncovered.

Description

    FIELD OF THE INVENTION
  • This invention relates to trimming of structures and components in electric circuits. The invention can, for example, be utilized in multilayer ceramics technologies, in organic printed circuit boards, and in micro-electro-mechanical systems.
    • BACKGROUND OF THE INVENTION
  • The trimming of electrical structures, such as filters, resonators, and passive components, is required in order to get the system to work in the designed way. This is due to the fact that manufacturing processes may lack the required accuracy that is needed to gain the nominal values used in the design phase. Also, statistical variation within the manufacturing process of printed circuit boards, discrete components, or integrated circuits may create the need for trimming some critical parts or points. In this content trimming means cutting a structure or a component, for example by laser, until the desired electrical characteristics are achieved.
  • The problem so far, has been that trimming has been possible only if the component or the structure has been located on the surface of the whole structure. In other words, trimming has been possible on the surface layer. The apparatus used for trimming, such as lasers, can not penetrate through printed circuit boards. Due to this all tolerance critical parts have been placed on the top layer, which causes large circuit modules that are expensive. Structures on the surface must also be covered with a protection layer, such as an over-glaze material. This is an additional process step, increasing the cost of the structure.
  • Furthermore, conductor materials used on top layers must be resistive to electro-migration. (Surface layers are sensitive to electro-migration, which causes changes in electrical behavior.) For example, in multilayer ceramics technologies Ag—Pd paste material has to be used on a top layer instead of pure Ag paste for preventing unwanted migration effects. Using Ag—Pd paste instead of Ag paste results in higher conductor losses. That degrades, for example, the Q values of resonators and increases insertion loss in filter structures.
  • The objective of the invention is to eliminate the above-mentioned drawbacks of known solutions. This is achieved in a way described in the claims.
    • SUMMARY OF THE INVENTION
  • The idea of the invention is to form a cavity in a multilayer substrate at the point of the structure to be trimmed. This enables the embedding of tolerance critical components inside substrates, such as printed circuit boards, modules, and sub-systems. Trimming is done through the cavity using, for example, a laser. After trimming the cavity is easy to fill in with a suitable dielectric material, or to cover otherwise, e.g. by using a lid, or to leave the cavity uncovered. The invention makes it possible to insert tolerance critical structures and components into a substrate.
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • In the following the invention is described in more detail by means of the attached figures, of which
  • FIG. 1 illustrates an example of the the top view of an embedded resonator,
  • FIG. 2 is a cross-sectional view of the resonator in FIG. 1 taken along line I-I,
  • FIG. 3 illustrates an example of an embedded multiband module resonator,
  • FIG. 4 illustrates an example of an embedded coaxial resonator.
    • DETAILED DESCRIPTION OF THE INVENTION
  • FIG. 1 depicts the top view of an example of an embedded resonator inside a multilayer circuit board (10) and FIG. 2 a cross section of FIG. 1. The surface of the resonator, forming a ground line, is fabricated from conductive materials, for example, so that the bottom (1) and the top (2) edges are conductive strip lines, and the sides are conductive via posts (3). In the center of the resonator there is a conductive strip line (4) forming a signal line, which is connected to the surface of the resonator via an extension (5) forming a short circuit between the signal line and the ground line. The structure includes also a cavity (6) that partially discloses the short circuit between the signal and ground lines.
  • It can be seen that the resonator length, i.e. the location of the short circuit, can be easily trimmed, for example, with a laser by pointing the laser through the cavity towards the printed circuit board and by cutting the short circuit extension between the signal line and the ground line until the desired length is reached.
  • FIG. 3 depicts an example of an embedded module multiband resonator (7), which can be used in a desired frequency area (DCS, WCDMA, or GSM). In this case it is possible to separate the signal and the ground line totally from each other at the points of the cavities. In other words, it is possible to separate parts of the circuitry. There are several trimming cavities (DCS, WCDMA, GSM) in the printed circuit board. Trimming is done so that the choice of the frequency area is done by cutting short circuit extensions open through cavities in higher frequency areas and fine tuning is done through the cavity in the desired frequency area. If the resonator is planned to be used in a DCS (Digital Cellular System) area, the fine tuning is done through the DCS cavity by cutting a suitable length of the extension away until the desired value is achieved. If the resonator is planned to be used in a WCDMA (wideband code-division multiple access) area, the fine tuning is done through the WCDMA cavity, and if the resonator is planned to be used in a GSM area, the fine tuning is done through the GSM (Global System for Mobile Communication) cavity.
  • For example, the resonator (7) can be trimmed to the WCDMA area when the short circuit extension (8) in the DCS area is cut totally open by a laser through the first cavity (DCS) and the fine tuning is done by cutting the desired length of the short circuit extension (9) open through the second cavity (WCDMA). In this case there is no need to use the third cavity (GSM) but in the case of using the resonator in a GSM area, the short circuit extensions (8,9) are cut totally open through the first and the second cavity, and the fine tuning is done through the third cavity. So it is possible to use one module structure in different frequency areas. The number of trimming cavities depends on the case.
  • Similar structures can be used in order to suppress spurious harmonics. Both before-mentioned structures can be used, for example, in voltage-controlled oscillators.
  • In the example of FIG. 4 the transmission line used is a multilayer coaxial line. From the figure it can be clearly noted that a large amount of surface area can be saved, and discrete components can be placed on the top of the resonator structure.
  • The invention enables the trimming of tolerance critical components inside printed circuit boards, modules, and subsystems. This means savings of printed circuit board area and costs. Enhanced electrical performance can also be reached because higher conductive conductor materials can be used. Embedded structures are well EMC shielded and isolation is better than in conventionally trimmed structures.
  • There exist several other options than above-mentioned to use the invention as well. The structure to be trimmed can be, instead of a simple transmission line, a passive component, such as a resistor, a capacitor, or an inductor. Also, the purpose of transmission line trimming can be different than to remove or move the termination of the line. It can, for example, be used to change transmission line properties of the signal line by changing the width of the conductors. So it is evident that the invention is not restricted to the before-mentioned examples, but it can be used in other solutions within the scope of the inventive idea.

Claims (14)

1-11. (canceled)
12. An arrangement for trimming an embedded conductive element, the arrangement comprising:
a substrate including a cavity disposed therein; and
a conductive element embedded inside the substrate, said conductive element having at least one extension connecting said conductive element to a further conductive element traverse to said conductive element;
wherein the cavity extends between a surface of the substrate and one of said at least one extension of said conductive element, and wherein the substrate is configured whereby the conductive element is trimmed through the cavity by cutting at least part of said one of said at least one extension by a trimming element.
13. The arrangement according to claim 12, wherein said substrate includes a plurality of conductive elements to be trimmed and a plurality of cavities.
14. The arrangement according to claim 12, wherein the element to be trimmed is included in a transmission line.
15. The arrangement according to claim 12, wherein the element to be trimmed is included in a resonator.
16. The arrangement according to claim 12, wherein the element to be trimmed is included in a filter.
17. The arrangement according to claim 12, wherein the element to be trimmed is included in a multiband resonator.
18. The arrangement according to claim 12, wherein the element to be trimmed is included in a multiband resonator, and said substrate comprises at least two cavities for cutting extensions of said conductive element.
19. A method of trimming an embedded conductive element, the method comprising the steps of:
(a) embedding a conductive element within a substrate, said conductive element having at least one extension connecting said conductive element to a further conductive element transverse to said conductive element;
(b) forming at least one cavity in the substrate from a surface of the substrate to at least one of said at least one extension of the conductive element therein;
(c) providing a trimming device;
(d) inserting the trimming device through the at least one cavity toward the embedded conductive element; and
(e) trimming the element through at least one cavity by cutting at least part of at least one of said at least one extension.
20. The method according to claim 19, wherein the step of trimming the element through the at least one cavity comprises trimming the element with a laser.
21. The method according to claim 19, further comprising the step of filling the at least one cavity after trimming with at least one of a resistive material and a dielectric material.
22. The method according to claim 19, wherein the step of forming at least one cavity in the substrate comprises forming the at least one cavity in a multiple layer substrate.
23. A substrate comprising:
a conductive element and a further conductive element embedded inside the substrate, said conductive element having at least one extension connecting said conductive element to said further conductive element, said further conductive element being transverse to said conductive element; and
a cavity which extends between a surface of the substrate and one of said at least one extension of said conductive element for cutting at least part of said one of said at least one extension.
24. A substrate comprising:
a conductive element embedded inside the substrate; and
a filled cavity, said cavity having extended between a surface of the substrate and one of at least one extension of said conductive element and having been filled with at least one of a resistive material and a dielectric material;
wherein said substrate is configured by cutting at least part of said one of at least one extension connecting the conductive element to a further part of a circuitry by a trimming element through said cavity before filling said cavity.
US11/155,572 2000-06-09 2005-06-20 Trimming of embedded structures Expired - Fee Related US7531755B2 (en)

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FI20001384A FI20001384A (en) 2000-06-09 2000-06-09 Trimming embedded structures
FI20001384 2000-06-09
US10/297,762 US6921868B2 (en) 2000-06-09 2001-04-27 Trimming of embedded structures
PCT/FI2001/000411 WO2001095684A1 (en) 2000-06-09 2001-04-27 Trimming of embedded structures
US11/155,572 US7531755B2 (en) 2000-06-09 2005-06-20 Trimming of embedded structures

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EP (1) EP1287725A1 (en)
AU (1) AU2001258446A1 (en)
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US8138588B2 (en) * 2006-12-21 2012-03-20 Texas Instruments Incorporated Package stiffener and a packaged device using the same

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US6921868B2 (en) 2005-07-26
WO2001095684A1 (en) 2001-12-13
AU2001258446A1 (en) 2001-12-17
FI20001384A (en) 2001-12-10
US20030161121A1 (en) 2003-08-28
US7531755B2 (en) 2009-05-12
FI20001384A0 (en) 2000-06-09
EP1287725A1 (en) 2003-03-05

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