US20050067745A1 - Method and apparatus for deposition & formation of metal silicides - Google Patents
Method and apparatus for deposition & formation of metal silicides Download PDFInfo
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- US20050067745A1 US20050067745A1 US10/674,302 US67430203A US2005067745A1 US 20050067745 A1 US20050067745 A1 US 20050067745A1 US 67430203 A US67430203 A US 67430203A US 2005067745 A1 US2005067745 A1 US 2005067745A1
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- metal
- silicon material
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- vacuum chamber
- silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
Definitions
- the present invention generally relates to silicide formation and more particularly to an improved method and system that deposit metal and heats the silicon and metal without breaking vacuum.
- the invention described below eliminates the need for this protective layer (and its removal) by forming the metal and heating the structure without breaking vacuum. Therefore, with the invention described below, oxygen and other ambients are prevented from affecting the metal used in the silicide process.
- the invention provides methods and structures for forming a silicide on a silicon material.
- the invention places the silicon material in a vacuum environment, forms metal on the silicon material, and then heats the silicon surface and the metal without breaking the vacuum environment.
- the processes of forming the metal and heating the silicon can be performed simultaneously without breaking the vacuum environment to form the silicide as the metal is being deposited.
- the invention can remove the silicon surface from the vacuum environment and perform additional heating of the silicon surface.
- the first heating process forms a monosilicide and the additional heating forms a disilicide. More specifically, the first heating process is performed at temperatures between 300° C. and 400° C. to form a metal rich silicide or between temperatures of 450° C. and 550° C. to form a monosilicide, and the additional heating is performed at temperatures above 600° C. to form a disilicide.
- the metal can comprise Cobalt, Nickel, etc.
- the invention provides a system that includes a vacuum chamber adapted to hold the silicon material under a vacuum environment.
- a metal formation tool is connected to the vacuum chamber and is adapted to form metal on the silicon material while the silicon material is under the vacuum environment within the vacuum chamber.
- a heating tool is connected to the vacuum chamber and adapted to heat the silicon while the silicon material is under the vacuum environment within the vacuum chamber.
- the heating tool heats the silicon simultaneously while the metal formation tool deposits the metal on the silicon material, so that a silicide material is formed as the metal is deposited on the silicon material.
- the heating tool comprises a heated chuck having, for example, a resistive heater.
- the system can also include an etch tool (e.g., wet etch, etc.) external to the vacuum chamber that performs wet etching of the unreacted metal after the silicon material is removed from the vacuum chamber.
- the system can further include a second heating tool (possibly external to the vacuum chamber) that is adapted to heat the silicon material after the silicon material is removed from the vacuum chamber and after it undergoes the etching process. This second heating tool is adapted to heat the silicon material to temperatures above 600° C. to form a disilicide.
- FIG. 1 is a flow diagram illustrating a preferred method of the invention
- FIG. 2 is a schematic diagram of a system according to the invention.
- FIG. 3 is a flow diagram illustrating a preferred method of the invention.
- FIG. 4 is a schematic diagram of a system according to the invention.
- the invention provides a method for forming a silicide on a silicon material. More specifically, in item 100 , the invention places the silicon material in a vacuum environment. Then, in item 102 , the invention forms (e.g., deposits) metal on the silicon material without breaking vacuum. Next, in item 104 , the invention heats the silicon surface and the metal without breaking the vacuum environment.
- the inventive system shown in FIG. 2 includes a vacuum chamber system 200 adapted to hold the silicon material 210 under a vacuum environment, using, for example chucks 216 , 218 .
- the vacuum chamber system 200 can include a plurality of connected vacuum chambers 202 - 204 adapted to maintain the silicon material 210 in a continuous vacuum environment while the metal formation tool forms the metal 212 and while the heating tool heats the silicon material 210 and the metal 212 to form a silicide 214 .
- the vacuum system 200 is operated under a vacuum or with an inert gas, so the substrate is not exposed to harmful ambients (e.g., air or O 2 ).
- the vacuum chambers can comprise a first vacuum chamber 202 containing the metal formation tool 206 , a second vacuum chamber 204 containing the heating tool 208 , and a third vacuum chamber 203 adapted to maintain the vacuum environment while transporting the silicon material 210 from the first vacuum tool to the second vacuum tool.
- This vacuum chamber system 200 is merely exemplary and one ordinarily skilled in the art would understand that any number of different vacuum system could be used to maintain the silicon material 210 in a continuous vacuum environment while the metal formation tool forms the metal 212 and while the heating tool heats the silicon material 210 .
- Item 206 is an exemplary metal formation tool that is connected to (within) the vacuum chamber 202 and that is adapted to form metal 212 on the silicon material 210 while the silicon material 210 is under the vacuum environment within the vacuum chamber system 200 .
- Item 208 illustrates the heating tool that is within the vacuum chamber 204 and that is adapted to heat the silicon while the silicon material 210 is under the vacuum environment within the vacuum chamber system 200 .
- the inventive system also includes an etch tool 220 external to the vacuum chamber system 200 that performs (wet) etching 108 of the unreacted metal 214 after the silicon material 210 is removed from the vacuum chamber system 200 (after vacuum is broken).
- a second heating tool 222 which can be internal or external to the vacuum chamber system 200 , is adapted to heat the silicon material 210 after the etching process 108 . This second heating tool is adapted to heat the silicon material to temperatures above 600° C. to form a disilicide.
- the present invention forms, for example, Cobalt, Nickel, etc. silicide on a silicon substrate.
- the invention deposits the metal 212 on the silicon in a vacuum process chamber 200 at a low temperature ( ⁇ 300° C.).
- the metal 212 can be, for example, Co, Ni, or other.
- the metal 212 can be deposited as pure metal or a metal containing a small amount (e.g., 20%) of Si, or the metal may have an overlying or underlying layer of another metal (e.g., Ti, W, TiW) or metal nitride (e.g., TiN).
- the processes of forming the metal and heating the silicon are performed simultaneously without breaking the vacuum environment to form the silicide as the metal is being deposited. More specifically, in item 300 , the invention places the silicon material in a vacuum environment. Then, in item 302 , the invention forms (e.g., deposits) metal on the silicon material without breaking vacuum and simultaneously heats the silicon surface 210 and the metal 212 without breaking the vacuum environment.
- the metal deposition and heating processes 302 are substantially similar to those discussed above 102 , 104 and reference is made to that previous discussion for the details of this step.
- the invention again removes the silicon surface from the vacuum environment ( 304 ) and performs a wet etching process 306 and an additional heating process 308 .
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Disclosed is a method and structure for forming a silicide on a silicon material. The invention places the silicon material in a vacuum environment, forms metal on the silicon material, and then heats the silicon surface and the metal without breaking the vacuum environment. The processes of forming the metal and heating the silicon can be performed simultaneously without breaking the vacuum environment to form the silicide as the metal is being deposited. After the foregoing processing, the invention can remove the silicon surface from the vacuum environment and perform additional heating of the silicon surface. The first heating process forms a monosilicide and the additional heating forms a disilicide.
Description
- 1. Field of the Invention
- The present invention generally relates to silicide formation and more particularly to an improved method and system that deposit metal and heats the silicon and metal without breaking vacuum.
- 2. Description of the Related Art
- A silicide is often formed on silicon surfaces to decrease resistivity of the silicon. More specifically, a metal is deposited on the silicon surface and the structure is heated. This produces a silicide on the silicon surface. Conventional systems first form the metal and then move the structure to a heating tool to perform the heating process. However, this allows ambient materials, such as oxygen, to have a detrimental effect upon the metal that is used in the silicide process. Therefore, conventional systems often form a protective layer over the silicide metal. This protective layer must eventually be removed.
- The invention described below eliminates the need for this protective layer (and its removal) by forming the metal and heating the structure without breaking vacuum. Therefore, with the invention described below, oxygen and other ambients are prevented from affecting the metal used in the silicide process.
- The invention provides methods and structures for forming a silicide on a silicon material. The invention places the silicon material in a vacuum environment, forms metal on the silicon material, and then heats the silicon surface and the metal without breaking the vacuum environment. The processes of forming the metal and heating the silicon can be performed simultaneously without breaking the vacuum environment to form the silicide as the metal is being deposited. After the foregoing processing, the invention can remove the silicon surface from the vacuum environment and perform additional heating of the silicon surface. The first heating process forms a monosilicide and the additional heating forms a disilicide. More specifically, the first heating process is performed at temperatures between 300° C. and 400° C. to form a metal rich silicide or between temperatures of 450° C. and 550° C. to form a monosilicide, and the additional heating is performed at temperatures above 600° C. to form a disilicide. The metal can comprise Cobalt, Nickel, etc.
- To perform the foregoing processing, the invention provides a system that includes a vacuum chamber adapted to hold the silicon material under a vacuum environment. A metal formation tool is connected to the vacuum chamber and is adapted to form metal on the silicon material while the silicon material is under the vacuum environment within the vacuum chamber. Additionally, a heating tool is connected to the vacuum chamber and adapted to heat the silicon while the silicon material is under the vacuum environment within the vacuum chamber.
- In one embodiment, the heating tool heats the silicon simultaneously while the metal formation tool deposits the metal on the silicon material, so that a silicide material is formed as the metal is deposited on the silicon material. In this embodiment, the heating tool comprises a heated chuck having, for example, a resistive heater.
- The system can also include an etch tool (e.g., wet etch, etc.) external to the vacuum chamber that performs wet etching of the unreacted metal after the silicon material is removed from the vacuum chamber. The system can further include a second heating tool (possibly external to the vacuum chamber) that is adapted to heat the silicon material after the silicon material is removed from the vacuum chamber and after it undergoes the etching process. This second heating tool is adapted to heat the silicon material to temperatures above 600° C. to form a disilicide.
- The vacuum chamber can comprise a plurality of connected vacuum chambers adapted to maintain the silicon material in a continuous vacuum environment while the metal formation tool forms the metal and while the heating tool heats the silicon material. Thus, for example, the vacuum chambers can comprise a first vacuum chamber to which the metal formation tool is attached, a second vacuum chamber to which the heating tool is attached, and a third vacuum chamber adapted to maintain the vacuum environment while transporting the silicon material from the first vacuum tool to the second vacuum tool.
- These, and other, aspects and objects of the present invention will be better appreciated and understood when considered in conjunction with the following description and the accompanying drawings. It should be understood, however, that the following description, while indicating preferred embodiments of the present invention and numerous specific details thereof, is given by way of illustration and not of limitation. Many changes and modifications may be made within the scope of the present invention without departing from the spirit thereof, and the invention includes all such modifications.
- The invention will be better understood from the following detailed description with reference to the drawings, in which:
-
FIG. 1 is a flow diagram illustrating a preferred method of the invention; -
FIG. 2 is a schematic diagram of a system according to the invention; -
FIG. 3 is a flow diagram illustrating a preferred method of the invention; and -
FIG. 4 is a schematic diagram of a system according to the invention. - The present invention and the various features and advantageous details thereof are explained more fully with reference to the non-limiting embodiments that are illustrated in the accompanying drawings and detailed in the following description. It should be noted that the features illustrated in the drawings are not necessarily drawn to scale. Descriptions of well-known components and processing techniques are omitted so as to not unnecessarily obscure the present invention in detail.
- As shown in the flowchart in
FIG. 1 , the invention provides a method for forming a silicide on a silicon material. More specifically, initem 100, the invention places the silicon material in a vacuum environment. Then, initem 102, the invention forms (e.g., deposits) metal on the silicon material without breaking vacuum. Next, initem 104, the invention heats the silicon surface and the metal without breaking the vacuum environment. - After the foregoing processing, the invention removes the silicon surface from the vacuum environment (106) and performs a an etching process 108 (e.g., wet etching, etc.) to clean off unreacted metal and an
additional heating process 110. Thefirst heating process 104 forms a monosilicide or metal rich silicide and the additional heating forms a disilicide. More specifically, the first heating process is performed at temperatures between 300° C. and 400° C. to form a metal rich silicide or between temperatures of 450° C. and 550° C. to form a monosilicide, and theadditional heating 110 is performed at temperatures above 600° C. to form a disilicide. The metal can comprise Cobalt, Nickel, etc. - The inventive system shown in
FIG. 2 includes avacuum chamber system 200 adapted to hold thesilicon material 210 under a vacuum environment, using, for example chucks 216, 218. Thevacuum chamber system 200 can include a plurality of connected vacuum chambers 202-204 adapted to maintain thesilicon material 210 in a continuous vacuum environment while the metal formation tool forms themetal 212 and while the heating tool heats thesilicon material 210 and themetal 212 to form asilicide 214. Thevacuum system 200 is operated under a vacuum or with an inert gas, so the substrate is not exposed to harmful ambients (e.g., air or O2). - Thus, for example, the vacuum chambers can comprise a
first vacuum chamber 202 containing themetal formation tool 206, asecond vacuum chamber 204 containing theheating tool 208, and athird vacuum chamber 203 adapted to maintain the vacuum environment while transporting thesilicon material 210 from the first vacuum tool to the second vacuum tool. Thisvacuum chamber system 200 is merely exemplary and one ordinarily skilled in the art would understand that any number of different vacuum system could be used to maintain thesilicon material 210 in a continuous vacuum environment while the metal formation tool forms themetal 212 and while the heating tool heats thesilicon material 210. -
Item 206 is an exemplary metal formation tool that is connected to (within) thevacuum chamber 202 and that is adapted to formmetal 212 on thesilicon material 210 while thesilicon material 210 is under the vacuum environment within thevacuum chamber system 200.Item 208 illustrates the heating tool that is within thevacuum chamber 204 and that is adapted to heat the silicon while thesilicon material 210 is under the vacuum environment within thevacuum chamber system 200. - The inventive system also includes an
etch tool 220 external to thevacuum chamber system 200 that performs (wet)etching 108 of theunreacted metal 214 after thesilicon material 210 is removed from the vacuum chamber system 200 (after vacuum is broken). Asecond heating tool 222, which can be internal or external to thevacuum chamber system 200, is adapted to heat thesilicon material 210 after theetching process 108. This second heating tool is adapted to heat the silicon material to temperatures above 600° C. to form a disilicide. - Thus, the present invention forms, for example, Cobalt, Nickel, etc. silicide on a silicon substrate. In
item 102, the invention deposits themetal 212 on the silicon in avacuum process chamber 200 at a low temperature (<300° C.). Themetal 212 can be, for example, Co, Ni, or other. Themetal 212 can be deposited as pure metal or a metal containing a small amount (e.g., 20%) of Si, or the metal may have an overlying or underlying layer of another metal (e.g., Ti, W, TiW) or metal nitride (e.g., TiN). - As shown above, the invention anneals the
metal 104 to form ametal silicide 214. Theannealing chamber 202 is within thesame vacuum system 200 as the metal deposition chamber(s) 204, so thewafer 210 is not exposed to the air between themetal deposition 104 andanneal 106. Theanneal 106 may be at a low temperature (300-450° C.) that forms metal rich silicide (e.g., Co2Si) or medium temperature (450-550° C.) that forms monosilicide (CoSi). This process may be supplemented by the conventional known process of removing unreacted metal (and cap/underlayer, if used) from non-reactive portions (e.g., oxide) of a patterned substrate during thewet etching 108. Thesecond annealing 110 is performed at a high temperature (>600° C.) to form disilicide (e.g., CoSi2). - In another embodiment, shown in the flowchart in
FIG. 3 , the processes of forming the metal and heating the silicon are performed simultaneously without breaking the vacuum environment to form the silicide as the metal is being deposited. More specifically, initem 300, the invention places the silicon material in a vacuum environment. Then, initem 302, the invention forms (e.g., deposits) metal on the silicon material without breaking vacuum and simultaneously heats thesilicon surface 210 and themetal 212 without breaking the vacuum environment. The metal deposition andheating processes 302 are substantially similar to those discussed above 102, 104 and reference is made to that previous discussion for the details of this step. After the foregoing processing, the invention again removes the silicon surface from the vacuum environment (304) and performs awet etching process 306 and anadditional heating process 308. - Thus, in this embodiment, the heating tool heats the silicon simultaneously while the metal formation tool deposits the
metal 212 on thesilicon material 210, so that asilicide 214 material is formed as themetal 212 is deposited on thesilicon material 210. As shown inFIG. 4 , in this embodiment, the heating tool can comprise aheated chuck 402 having, for example, a resistive heater, within avacuum chamber 400. Alternatively, anyother heating system 208 could be used with thevacuum chamber 400 to perform the simultaneous heating and metal deposition. - As shown above, the invention provides a method and system that deposits metal and heats silicon in a vacuum to avoid having oxygen and other harmful ambients present when siliciding. This eliminates the need to form protective barriers, thereby eliminating many processing steps. This reduces costs, decreases manufacturing processing time, and also increases yield as removing processes decreases the chance that a defective process may occur.
- While the invention has been described in terms of preferred embodiments, those skilled in the art will recognize that the invention can be practiced with modification within the spirit and scope of the appended claims.
Claims (20)
1. A system for forming a silicide on a silicon material, said system comprising:
a vacuum chamber adapted to hold said silicon material under a vacuum environment;
a metal formation tool connected to said vacuum chamber and being adapted to form metal on said silicon material while said silicon material is under said vacuum environment within said vacuum chamber; and
a heating tool connected to said vacuum chamber and being adapted to heat said silicon while said silicon material is under said vacuum environment within said vacuum chamber.
2. The system in claim 1 , further comprising a etch tool external to said vacuum chamber and being adapted to perform etching of said metal after said silicon material is removed from said vacuum chamber.
3. The system in claim 1 , wherein said vacuum chamber comprises a plurality of connected vacuum chambers adapted to maintain said silicon material in a continuous vacuum environment while said metal formation tool forms said metal and while said heating tool heats said silicon material.
4. The system in claim 3 , wherein said vacuum chambers comprise:
a first vacuum chamber to which said metal formation tool is attached;
a second vacuum chamber to which said heating tool is attached; and
a third vacuum chamber adapted to maintain said vacuum environment while transporting said silicon material from said first vacuum tool to said second vacuum tool.
5. The system in claim 1 , wherein said heating tool is adapted to heat said silicon material to temperatures between 300° C. and 400° C. to form a metal rich silicide or between temperatures of 450° C. and 550° C. to form a monosilicide.
6. The system in claim 1 , further comprising a second heating tool.
7. The system in claim 6 , wherein said second heating tool is adapted to heat said silicon material to temperatures above 600° C. to form a disilicide.
8. A system for forming a silicide on a silicon material, said system comprising:
a vacuum chamber adapted to hold said silicon material under a vacuum environment;
a metal formation tool connected to said vacuum chamber and being adapted to deposit metal on said silicon material while said silicon material is under said vacuum environment within said vacuum chamber; and
a heating tool connected to said vacuum chamber and being adapted to heat said silicon simultaneously while said metal formation tool forms said metal on said silicon material such that a silicide material is formed as said metal is deposited on said silicon materal.
9. The system in claim 8 , wherein said heating tool comprises a heated chuck within said vacuum chamber and is adapted to hold said silicon materal.
10. The system in claim 9 , wherein said heated chuck comprises a resistive heater.
11. The system in claim 8 , further comprising a etch tool external to said vacuum chamber and being adapted to perform etching of said metal after said silicon material is removed from said vacuum chamber.
12. The system in claim 8 , wherein said heating tool is adapted to heat said silicon material to temperatures between 300° C. and 400° C. to form a metal rich silicide or between temperatures of 450° C. and 550° C. to form a monosilicide.
13. The system in claim 8 , further comprising a second heating tool.
14. The system in claim 13 , wherein said second heating tool is adapted to heat said silicon material to temperatures above 600° C. to form a disilicide.
15. A method of forming a silicide on a silicon material comprising:
placing said silicon material in vacuum environment;
forming metal on said silicon material without breaking said vacuum environment; and
heating said silicon surface and said metal without breaking said vacuum environment.
16. The method in claim 15 , further comprising performing additional heating of said silicon surface.
17. The method in claim 16 , wherein said heating forms a monosilicide and said additional heating forms a disilicide.
18. The method in claim 16 , wherein said heating is performed at temperatures between 300° C. and 400° C. to form a metal rich silicide or between temperatures of 450° C. and 550° C. to form a monosilicide, and said additional heating is performed at temperatures above 600° C. to form a disilicide.
19. The method in claim 15 , wherein said processes of forming said metal and said heating of said silicon are performed simultaneously without breaking said vacuum environment.
20. The method in claim 15 , wherein said metal comprises one of Cobalt and Nickel.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/674,302 US20050067745A1 (en) | 2003-09-30 | 2003-09-30 | Method and apparatus for deposition & formation of metal silicides |
US11/557,259 US20070087541A1 (en) | 2003-09-30 | 2006-11-07 | Method and apparatus for deposition & formation of metal silicides |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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US10/674,302 US20050067745A1 (en) | 2003-09-30 | 2003-09-30 | Method and apparatus for deposition & formation of metal silicides |
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US11/557,259 Division US20070087541A1 (en) | 2003-09-30 | 2006-11-07 | Method and apparatus for deposition & formation of metal silicides |
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US20050067745A1 true US20050067745A1 (en) | 2005-03-31 |
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US10/674,302 Abandoned US20050067745A1 (en) | 2003-09-30 | 2003-09-30 | Method and apparatus for deposition & formation of metal silicides |
US11/557,259 Abandoned US20070087541A1 (en) | 2003-09-30 | 2006-11-07 | Method and apparatus for deposition & formation of metal silicides |
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US11/557,259 Abandoned US20070087541A1 (en) | 2003-09-30 | 2006-11-07 | Method and apparatus for deposition & formation of metal silicides |
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CN110942984B (en) * | 2018-09-25 | 2022-04-01 | 长鑫存储技术有限公司 | Preparation method of cobalt silicide film |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5047367A (en) * | 1990-06-08 | 1991-09-10 | Intel Corporation | Process for formation of a self aligned titanium nitride/cobalt silicide bilayer |
US5536676A (en) * | 1995-04-03 | 1996-07-16 | National Science Council | Low temperature formation of silicided shallow junctions by ion implantation into thin silicon films |
US5990005A (en) * | 1997-02-10 | 1999-11-23 | Nec Corporation | Method of burying a contact hole with a metal for forming multilevel interconnections |
US6184132B1 (en) * | 1999-08-03 | 2001-02-06 | International Business Machines Corporation | Integrated cobalt silicide process for semiconductor devices |
US6221764B1 (en) * | 1998-03-30 | 2001-04-24 | Nec Corporation | Manufacturing method of semiconductor device |
US6323130B1 (en) * | 2000-03-06 | 2001-11-27 | International Business Machines Corporation | Method for self-aligned formation of silicide contacts using metal silicon alloys for limited silicon consumption and for reduction of bridging |
US6451693B1 (en) * | 2000-10-05 | 2002-09-17 | Advanced Micro Device, Inc. | Double silicide formation in polysicon gate without silicide in source/drain extensions |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020151170A1 (en) * | 1996-06-04 | 2002-10-17 | Karen Maex | Method of forming polycrystalline CoSi2 salicide and products obtained thereof |
-
2003
- 2003-09-30 US US10/674,302 patent/US20050067745A1/en not_active Abandoned
-
2006
- 2006-11-07 US US11/557,259 patent/US20070087541A1/en not_active Abandoned
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5047367A (en) * | 1990-06-08 | 1991-09-10 | Intel Corporation | Process for formation of a self aligned titanium nitride/cobalt silicide bilayer |
US5536676A (en) * | 1995-04-03 | 1996-07-16 | National Science Council | Low temperature formation of silicided shallow junctions by ion implantation into thin silicon films |
US5990005A (en) * | 1997-02-10 | 1999-11-23 | Nec Corporation | Method of burying a contact hole with a metal for forming multilevel interconnections |
US6221764B1 (en) * | 1998-03-30 | 2001-04-24 | Nec Corporation | Manufacturing method of semiconductor device |
US6184132B1 (en) * | 1999-08-03 | 2001-02-06 | International Business Machines Corporation | Integrated cobalt silicide process for semiconductor devices |
US6323130B1 (en) * | 2000-03-06 | 2001-11-27 | International Business Machines Corporation | Method for self-aligned formation of silicide contacts using metal silicon alloys for limited silicon consumption and for reduction of bridging |
US6451693B1 (en) * | 2000-10-05 | 2002-09-17 | Advanced Micro Device, Inc. | Double silicide formation in polysicon gate without silicide in source/drain extensions |
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US20070087541A1 (en) | 2007-04-19 |
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