US20020048136A1 - Vacuum variable capacitor device - Google Patents
Vacuum variable capacitor device Download PDFInfo
- Publication number
- US20020048136A1 US20020048136A1 US09/802,854 US80285401A US2002048136A1 US 20020048136 A1 US20020048136 A1 US 20020048136A1 US 80285401 A US80285401 A US 80285401A US 2002048136 A1 US2002048136 A1 US 2002048136A1
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- Prior art keywords
- shank
- nut
- variable capacitor
- cylindrical electrode
- capacitor device
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- 239000003990 capacitor Substances 0.000 title claims abstract description 54
- 239000011810 insulating material Substances 0.000 claims abstract description 14
- 239000004020 conductor Substances 0.000 claims description 15
- 229920002430 Fibre-reinforced plastic Polymers 0.000 claims description 6
- 239000011151 fibre-reinforced plastic Substances 0.000 claims description 6
- 239000004417 polycarbonate Substances 0.000 claims description 5
- 229920000515 polycarbonate Polymers 0.000 claims description 5
- 230000008878 coupling Effects 0.000 description 11
- 238000010168 coupling process Methods 0.000 description 11
- 238000005859 coupling reaction Methods 0.000 description 11
- 238000009413 insulation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/04—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
- H01G5/14—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to longitudinal movement of electrodes
Definitions
- the present invention relates to a vacuum variable capacitor device that is used for various applications such as an oscillator of a high power transmitter, a high frequency power source of a semiconductor manufacturing device, a tank circuit of an inductive heating device.
- FIG. 3 and FIG. 4 show, respectively, a longitudinal cross section and a partly enlarged section of a vacuum variable capacitor, according to Japanese Patent Unexamined Publication (refereed to as “Kokai Koho” in Japanese) No. 11(1999)-273998 which is an equivalent for Japanese Patent Application No. 10(1998)-0074755.
- an insulated cylinder 1 made of an insulating material such as ceramic and the like.
- the insulated cylinder 1 has first and second ends, which are respectively, joined with a first cylinder 2 a and a second cylinder 2 b , to thereby form a cylindrical shape.
- the first and second ends of the insulated cylinder 1 is made of copper, and is blocked by means of, respectively, an immovable end plate 3 and a movable end plate 4 , to thereby form a vacuum container 5 .
- Inside the immovable end plate 3 there are provided a plurality of first cylindrical electrode plates F that range from F 1 to F n having different diameters.
- the first cylindrical electrode plates F 1 to F n stand on the inside of the immovable end plate 3 , and are concentrically disposed at regular radial intervals, to thereby form an immovable electrode 6 .
- a conductor 7 for mounting a movable electrode 8 is so disposed in the vacuum container 5 as to oppose the immovable end plate 3 .
- On a first side of the conductor 7 facing the immovable end plate 3 there are provided a plurality of second cylindrical electrode plates M that range from M 1 to M n having different diameters.
- the second cylindrical electrode plates M 1 to M n stand on the first side of the conductor 7 , and are concentrically disposed at regular radial intervals, to thereby form the movable electrode 8 .
- Each of the second cylindrical electrode plates ranging from M 2 to M n is put and ousted from between adjacent two of the first cylindrical electrode plates F 1 to F n (interdigitation), while each of the first cylindrical electrode plates ranging from F 1 to F n ⁇ 1 is put and ousted from between adjacent two of the second cylindrical electrode plates M 1 to M n (interdigitation).
- a center pin 9 standing at an internal center of the immovable end plate 3 .
- a movable guide 10 which is cylindrical and functions as a guide.
- the movable guide 10 also functions as a lead.
- the movable guide 10 is so disposed as to penetrate through a center of the conductor 7 .
- the center pin 9 is inserted into the movable guide 10 in a slidable manner.
- a bellows 15 having a first end which is mounted to the movable guide 10 .
- the bellows 15 is cylindrical and retractable. Moreover, the bellows 15 is used for maintaining a vacuum condition and for energizing.
- the bellows 15 further has a second end mounted to an internal face of the movable end plate 4 .
- the opening 4 a is disposed on a radial inner side of the second end of the bellows 15 .
- a nut receptacle 11 which is cylindrical, and stands around the entire circumference of the opening 4 a on the internal face of the movable end plate 4 .
- a collar 11 a at an internal end of the nut receptacle 11 .
- a screw shaft 12 having a first end which is connected to the movable guide 10 .
- the screw shaft 12 also has a second end projecting into the nut receptacle 11 through the collar 11 a.
- an adjuster nut 13 having a first end which is so supported to the collar 11 a by way of a bearing 16 as to rotate arbitrarily.
- the first end of the adjuster nut 13 defines a screw shaft opening 13 a so that the adjuster nut 13 is screwed down on the screw shaft 12 .
- the second end of the screw shaft 12 defines a coaxial screw opening 12 a .
- the screw shaft 12 is screwed down on an adjuster screw 14 having a screw head 14 a.
- the adjuster nut 13 has a large opening 13 b adjacent to the screw shaft opening 13 a.
- the large diameter opening 13 b is larger in diameter than the screw shaft opening 13 a.
- the movable guide 10 is integrated with a movable lead. Contrary to this, however, the movable guide 10 can be separated from the movable lead. Moreover, the movable guide 10 is to be electrically insulated from the center pin 9 . The first end of the bellows 15 can be mounted to the conductor 7 , instead of the movable guide 10 .
- a vacuum variable capacitor 19 is mounted horizontally on a mounting base 17 by way of a pair of mounting plates 18 , and a driving portion 21 is also mounted horizontally on the mounting base 17 by way of a mounting plate 20 .
- a rotational shaft 22 of the driving portion 21 is coupled with the adjuster nut 13 by way of a coupling member 23 .
- Driving the driving portion 21 allows the adjuster nut 13 to turn clockwise and counterclockwise, to thereby vary the electrostatic capacity of the vacuum variable capacitor 19 .
- FIG. 6 shows a general matching circuit using the vacuum variable capacitor 19 shown in FIG. 5.
- the vacuum variable capacitor device shown in FIG. 5 has a constitution in which each of the mounting plate 18 and the coupling member 23 is made of insulating material. For such insulation purpose, the coupling member 23 is continuously provided even when the coupling member 23 is not necessary. This ends up complicating the constitution of the vacuum variable capacitor device, and causing a backlash and the like. Thereby, it is difficult to control the driving portion 21 .
- an adjuster nut rotatably supported to a vacuum container of a vacuum variable capacitor of a vacuum variable capacitor device.
- the adjuster nut comprises a nut portion, and a shank made of an insulating material.
- the shank has a first end integrated with the nut portion and a second end adapted to be directly coupled with a rotational shaft of a driving portion of the vacuum variable capacitor device.
- an adjuster nut rotatably supported to a vacuum container of a vacuum variable capacitor of a vacuum variable capacitor device.
- the adjuster nut comprises a deformable bellows, a nut portion, and a shank.
- the bellows has a first end, and a second end opposite to the first end.
- the nut portion has a first end, and a second end coupled with the first end of the bellows.
- the shank which is made of an insulating material has a first end coupled with the second end of the bellows, and a second end adapted to be directly coupled with a rotational shaft of a driving portion of the vacuum variable capacitor device.
- FIG. 1 is a longitudinal cross section of an adjuster nut 29 of a vacuum variable capacitor device, according to a first preferred embodiment of the present invention
- FIG. 2 is a longitudinal cross section of an adjuster nut 31 of the vacuum variable capacitor device, according to a second preferred embodiment of the present invention.
- FIG. 3 is a longitudinal cross section of a vacuum variable capacitor, according to a prior art
- FIG. 4 is a partly enlarged view of the vacuum variable capacitor shown in FIG. 3;
- FIG. 5 is a longitudinal cross section of the vacuum variable capacitor device, according to the prior art.
- FIG. 6 is a schematic of a matching circuit using the vacuum variable capacitor.
- FIG. 1 shows a longitudinal cross section of an adjuster nut 29 of the vacuum variable capacitor device.
- a nut portion 27 which is rotatably supported to a collar 11 a of a nut receptacle 11 by way of a bearing 16 , and defines a screw shaft opening 27 a . With the screw shaft opening 27 a , the nut portion 27 is screwed down on a screw shaft 12 .
- a shank 28 having a first end which is integrated with the nut portion 27 .
- the shank 28 is shaped into a cylinder, and is made of an insulating material such as an FRP (fiber reinforced plastic) or a polycarbonate.
- FRP fiber reinforced plastic
- the shank 28 has a flange 28 a at a second end thereof.
- a rotational shaft 22 of a driving portion 21 has a flange 22 a at a first end of the rotational shaft 22 .
- the flange 22 a is tightened and directly connected to the flange 28 a by means of a bolt 32 . It is the nut portion 27 and the shank 28 that constitute the adjuster nut 29 .
- the other parts of the constitution of the vacuum variable capacitor device according to the first preferred embodiment are the same as those of the prior art.
- the shank 28 is made of an insulating material.
- the rotational shaft 22 is directly connected to the shank 28 .
- a coupling member 23 (see FIG. 5) that is made of an insulating material.
- the absence of the coupling member 23 leads to preferable features such as; a simplified constitution, no backlash attributable to the coupling member 23 , and facilitating control of the driving portion 21 .
- a driving force by the driving portion 21 is directly transmitted to the adjuster nut 29 , to thereby improve efficiency.
- varying a length of the shank 28 allows an insulation distance to become arbitrarily variable between the driving portion 21 and the vacuum variable capacitor 19 .
- FIG. 2 shows a longitudinal cross section of an adjuster nut 31 of the vacuum variable capacitor device.
- a shank 28 connected to the nut portion 27 by way of a bellows 30 .
- the adjuster nut 31 is constituted of the nut portion 27 , the shank 28 and the bellows 30 .
- the other parts of the constitution of the vacuum variable capacitor device according to the second preferred embodiment are the same as those of the prior art.
- the coupling member 23 (see FIG. 5) that is made of the insulating material.
- the absence of the coupling member 23 leads to preferable features such as; a simplified constitution, no backlash attributable to the coupling member 23 , and facilitating control of the driving portion 21 .
- the bellows 30 is deformed so as to absorb the axial deviation. Thereby, a rotational torque of the adjuster nut 31 is prevented from increasing, and wears and deformations to the screw shaft 12 and the nut portion 27 are inhibited.
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
An adjuster nut is rotatably supported to a vacuum container of a vacuum variable capacitor of a vacuum variable capacitor device. The adjuster nut has a nut portion, and a shank made of an insulating material. The shank has a first end integrated with the nut portion and a second end adapted to be directly coupled with a rotational shaft of a driving portion of the vacuum variable capacitor device. Another type of the adjuster nut has a deformable bellows, a nut portion, and a shank made of an insulating material. A second end of the nut portion is coupled with a first end of the bellows. The shank has a first end coupled with a second end of a bellows, and a second end adapted to be directly coupled with the rotational shaft of the driving portion of the vacuum variable capacitor device.
Description
- The present invention relates to a vacuum variable capacitor device that is used for various applications such as an oscillator of a high power transmitter, a high frequency power source of a semiconductor manufacturing device, a tank circuit of an inductive heating device.
- FIG. 3 and FIG. 4 show, respectively, a longitudinal cross section and a partly enlarged section of a vacuum variable capacitor, according to Japanese Patent Unexamined Publication (refereed to as “Kokai Koho” in Japanese) No. 11(1999)-273998 which is an equivalent for Japanese Patent Application No. 10(1998)-0074755.
- There is provided an
insulated cylinder 1 made of an insulating material such as ceramic and the like. As is seen in FIG. 3, theinsulated cylinder 1 has first and second ends, which are respectively, joined with afirst cylinder 2 a and asecond cylinder 2 b, to thereby form a cylindrical shape. The first and second ends of theinsulated cylinder 1 is made of copper, and is blocked by means of, respectively, animmovable end plate 3 and amovable end plate 4, to thereby form avacuum container 5. Inside theimmovable end plate 3, there are provided a plurality of first cylindrical electrode plates F that range from F1 to Fn having different diameters. The first cylindrical electrode plates F1 to Fn stand on the inside of theimmovable end plate 3, and are concentrically disposed at regular radial intervals, to thereby form animmovable electrode 6. - There is provided a
conductor 7 for mounting amovable electrode 8. Theconductor 7 is so disposed in thevacuum container 5 as to oppose theimmovable end plate 3. On a first side of theconductor 7 facing theimmovable end plate 3, there are provided a plurality of second cylindrical electrode plates M that range from M1 to Mn having different diameters. The second cylindrical electrode plates M1 to Mn stand on the first side of theconductor 7, and are concentrically disposed at regular radial intervals, to thereby form themovable electrode 8. Each of the second cylindrical electrode plates ranging from M2 to Mn is put and ousted from between adjacent two of the first cylindrical electrode plates F1 to Fn (interdigitation), while each of the first cylindrical electrode plates ranging from F1 to Fn−1 is put and ousted from between adjacent two of the second cylindrical electrode plates M1 to Mn (interdigitation). There is provided acenter pin 9 standing at an internal center of theimmovable end plate 3. There is provided amovable guide 10 which is cylindrical and functions as a guide. Themovable guide 10 also functions as a lead. Themovable guide 10 is so disposed as to penetrate through a center of theconductor 7. Thecenter pin 9 is inserted into themovable guide 10 in a slidable manner. - There is provided a
bellows 15 having a first end which is mounted to themovable guide 10. The bellows 15 is cylindrical and retractable. Moreover, thebellows 15 is used for maintaining a vacuum condition and for energizing. The bellows 15 further has a second end mounted to an internal face of themovable end plate 4. There is defined anopening 4 a in themovable end plate 4. Theopening 4 a is disposed on a radial inner side of the second end of thebellows 15. There is provided anut receptacle 11 which is cylindrical, and stands around the entire circumference of theopening 4 a on the internal face of themovable end plate 4. There is formed acollar 11 a at an internal end of thenut receptacle 11. There is provided ascrew shaft 12 having a first end which is connected to themovable guide 10. Thescrew shaft 12 also has a second end projecting into thenut receptacle 11 through thecollar 11 a. There is provided anadjuster nut 13 having a first end which is so supported to thecollar 11 a by way of abearing 16 as to rotate arbitrarily. The first end of theadjuster nut 13 defines a screw shaft opening 13 a so that theadjuster nut 13 is screwed down on thescrew shaft 12. The second end of thescrew shaft 12 defines a coaxial screw opening 12 a. With the screw opening 12 a, thescrew shaft 12 is screwed down on anadjuster screw 14 having ascrew head 14 a. Moreover, theadjuster nut 13 has alarge opening 13 b adjacent to the screw shaft opening 13 a. Thelarge diameter opening 13 b is larger in diameter than the screw shaft opening 13 a. There is defined astage 13 c between the screw shaft opening 13 a and thelarge diameter opening 13 b. - Described below is how to assuredly maintain a maximum electrostatic capacity of the vacuum variable capacitor having the constitution as mentioned above, and to facilitate adjustment of the maximum electrostatic capacity:
- At first, turn the
adjuster nut 13 slightly clockwise (for right handed screw) so as to shift thescrew shaft 12 slightly lower than a position X (not shown) of the maximum electrostatic capacity (at the position X, a lower end of thecenter pin 9 abuts on an upper end of the screw shaft 12), to thereby adjust the maximum electrostatic capacity to its predetermined value. The slight adjustment depends on the variation of the electrostatic capacity of the vacuum variable capacitors. Then, screw theadjuster screw 14 into the screw opening 12 a to such an extent that thescrew head 14 a abuts on thestage 13 c. Thereafter, fix theadjuster screw 14 to thescrew shaft 12 by means of an adhesive and the like. Thereby, even if theadjuster nut 13 is likely to make a counterclockwise turn at the position X of the maximum electrostatic capacity, thescrew head 14 a of theadjuster screw 14 abuts on thestage 13 c. Consequently, this can prevent theadjuster nut 13 from making the counterclockwise turn. Therefore, thescrew shaft 12 cannot go up beyond the position X of the maximum electrostatic capacity. With this, the maximum electrostatic capacity can be assuredly maintained, and the adjustment of the maximum electrostatic capacity can be facilitated. - On the contrary, described below is how to arbitrarily variably adjust the electrostatic capacity of the vacuum variable capacitor having the constitution as mentioned above:
- At first, turn the
adjuster nut 13 so as to move themovable electrode 8 upward and downward by way of thescrew shaft 12 and themovable guide 10. With this, a total area of themovable electrode 8 opposed to theimmovable electrode 6 is varied, to thereby arbitrarily variably adjust the electrostatic capacity. With thecenter pin 9 and themovable guide 10 provided for constituting a guide mechanism, themovable electrode 8 can be moved stably, and a withstand voltage as well as the electrostatic capacity can show stabilized characteristics. - In the above mentioned related art, the
movable guide 10 is integrated with a movable lead. Contrary to this, however, themovable guide 10 can be separated from the movable lead. Moreover, themovable guide 10 is to be electrically insulated from thecenter pin 9. The first end of thebellows 15 can be mounted to theconductor 7, instead of themovable guide 10. - When using the above vacuum variable capacitor for matching impedance of the semiconductor thin film manufacturing device, an operator needs to use a constitution shown in FIG. 5 for the following reason: Since a load changes continuously, it is necessary to carry out the impedance matching of the vacuum variable capacitor following the load change. More specifically, as is seen in FIG. 5, a
vacuum variable capacitor 19 is mounted horizontally on a mountingbase 17 by way of a pair of mountingplates 18, and a drivingportion 21 is also mounted horizontally on the mountingbase 17 by way of a mountingplate 20. Arotational shaft 22 of the drivingportion 21 is coupled with theadjuster nut 13 by way of acoupling member 23. Driving the drivingportion 21 allows theadjuster nut 13 to turn clockwise and counterclockwise, to thereby vary the electrostatic capacity of thevacuum variable capacitor 19. - FIG. 6 shows a general matching circuit using the
vacuum variable capacitor 19 shown in FIG. 5. In the matching circuit, there are also provided a highfrequency power source 24, acoil 25, and aload 26. It is necessary to insulate the immovable side from the movable side of thevacuum variable capacitor 19. Therefore, the vacuum variable capacitor device shown in FIG. 5 has a constitution in which each of the mountingplate 18 and thecoupling member 23 is made of insulating material. For such insulation purpose, thecoupling member 23 is continuously provided even when thecoupling member 23 is not necessary. This ends up complicating the constitution of the vacuum variable capacitor device, and causing a backlash and the like. Thereby, it is difficult to control the drivingportion 21. - It is therefore an object of the present invention to provide a vacuum variable capacitor device that does not require a coupling member, to thereby simplify a constitution of the vacuum variable capacitor device.
- It is another object of the present invention to prevent any backlash from occurring, to thereby facilitate control of a driving portion of the vacuum variable capacitor device.
- According to a first aspect of the present invention, there is provided an adjuster nut rotatably supported to a vacuum container of a vacuum variable capacitor of a vacuum variable capacitor device. The adjuster nut comprises a nut portion, and a shank made of an insulating material. The shank has a first end integrated with the nut portion and a second end adapted to be directly coupled with a rotational shaft of a driving portion of the vacuum variable capacitor device.
- According to a second aspect of the present invention, there is provided an adjuster nut rotatably supported to a vacuum container of a vacuum variable capacitor of a vacuum variable capacitor device. The adjuster nut comprises a deformable bellows, a nut portion, and a shank. The bellows has a first end, and a second end opposite to the first end. The nut portion has a first end, and a second end coupled with the first end of the bellows. The shank which is made of an insulating material has a first end coupled with the second end of the bellows, and a second end adapted to be directly coupled with a rotational shaft of a driving portion of the vacuum variable capacitor device.
- FIG. 1 is a longitudinal cross section of an
adjuster nut 29 of a vacuum variable capacitor device, according to a first preferred embodiment of the present invention; - FIG. 2 is a longitudinal cross section of an
adjuster nut 31 of the vacuum variable capacitor device, according to a second preferred embodiment of the present invention; - FIG. 3 is a longitudinal cross section of a vacuum variable capacitor, according to a prior art;
- FIG. 4 is a partly enlarged view of the vacuum variable capacitor shown in FIG. 3;
- FIG. 5 is a longitudinal cross section of the vacuum variable capacitor device, according to the prior art; and
- FIG. 6 is a schematic of a matching circuit using the vacuum variable capacitor.
- There is provided a vacuum variable capacitor device, according to a first preferred embodiment of the present invention.
- FIG. 1 (also refer to FIGS. 3, 4 and5) shows a longitudinal cross section of an
adjuster nut 29 of the vacuum variable capacitor device. There is provided anut portion 27 which is rotatably supported to acollar 11 a of anut receptacle 11 by way of abearing 16, and defines a screw shaft opening 27 a. With the screw shaft opening 27 a, thenut portion 27 is screwed down on ascrew shaft 12. There is provided ashank 28 having a first end which is integrated with thenut portion 27. Theshank 28 is shaped into a cylinder, and is made of an insulating material such as an FRP (fiber reinforced plastic) or a polycarbonate. Theshank 28 has aflange 28 a at a second end thereof. Arotational shaft 22 of a drivingportion 21 has aflange 22 a at a first end of therotational shaft 22. Theflange 22 a is tightened and directly connected to theflange 28 a by means of abolt 32. It is thenut portion 27 and theshank 28 that constitute theadjuster nut 29. The other parts of the constitution of the vacuum variable capacitor device according to the first preferred embodiment are the same as those of the prior art. - According to the first preferred embodiment, the
shank 28 is made of an insulating material. Therotational shaft 22 is directly connected to theshank 28. Thereby, there is no need for a coupling member 23 (see FIG. 5) that is made of an insulating material. The absence of thecoupling member 23 leads to preferable features such as; a simplified constitution, no backlash attributable to thecoupling member 23, and facilitating control of the drivingportion 21. A driving force by the drivingportion 21 is directly transmitted to theadjuster nut 29, to thereby improve efficiency. Moreover, varying a length of theshank 28 allows an insulation distance to become arbitrarily variable between the drivingportion 21 and thevacuum variable capacitor 19. - There is provided a vacuum variable capacitor device, according to a second preferred embodiment of the present invention.
- FIG. 2 shows a longitudinal cross section of an
adjuster nut 31 of the vacuum variable capacitor device. There is provided ashank 28 connected to thenut portion 27 by way of a bellows 30. Theadjuster nut 31 is constituted of thenut portion 27, theshank 28 and thebellows 30. The other parts of the constitution of the vacuum variable capacitor device according to the second preferred embodiment are the same as those of the prior art. - According to the second preferred embodiment, there is no need for the coupling member23 (see FIG. 5) that is made of the insulating material. The absence of the
coupling member 23, like the first preferred embodiment, leads to preferable features such as; a simplified constitution, no backlash attributable to thecoupling member 23, and facilitating control of the drivingportion 21. In case there should occur an axial deviation to theadjuster nut 31 relative to therotational shaft 22, thebellows 30 is deformed so as to absorb the axial deviation. Thereby, a rotational torque of theadjuster nut 31 is prevented from increasing, and wears and deformations to thescrew shaft 12 and thenut portion 27 are inhibited.
Claims (18)
1. A vacuum variable capacitor device comprising:
a vacuum container comprising:
an insulated cylinder;
a first end plate mounted at a first end of the insulated cylinder;
and a second end plate mounted at a second end of the insulated cylinder opposite to the first end of the insulated cylinder;
a first electrode formed on an internal surface of the first end plate, and comprising a first cylindrical electrode plate;
a conductor disposed in the vacuum container in such a manner as to face the first end plate;
a second electrode mounted to the conductor, and comprising a second cylindrical electrode plate on a first side of the conductor facing the first end plate;
a guide mechanism disposed between the first end plate and the conductor in the vacuum container, so as to guide a movement of the conductor;
a bellows having a first end mounted to the conductor and a second end mounted to the second end plate;
a screw shaft having a first end mounted toward a second side of the conductor opposite to the first side of the conductor, and a second end adapted to be inserted in an opening defined in the second end plate, the opening being disposed on a radial inner side of the second end of the bellows;
an adjuster nut rotatably supported to the second end plate, being screwed down on the screw shaft, and being insulative; and
a driving portion having a rotational shaft which is directly coupled with the adjuster nut.
2. The vacuum variable capacitor device as claimed in claim 1 , in which the adjuster nut rotatably supported to the second end plate comprises:
a nut portion screwed down on the screw shaft; and
a shank integrated with the nut portion, made of an insulating material, and directly coupled with the rotational shaft of the driving portion.
3. The vacuum variable capacitor device as claimed in claim 1 , in which the adjuster nut rotatably supported to the second end plate comprises:
a nut portion screwed down on the screw shaft;
a shank made of an insulating material, and directly coupled with the rotational shaft of the driving portion; and
a bellows disposed between the nut portion and the shank for connecting the nut portion with the shank.
4. The vacuum variable capacitor device as claimed in claim 2 , in which the shank is made of one of a fiber reinforced plastic and a polycarbonate.
5. The vacuum variable capacitor device as claimed in claim 3 , in which the shank is made of one of a fiber reinforced plastic and a polycarbonate.
6. The vacuum variable capacitor device as claimed in claim 1 , in which the first cylindrical electrode plate of the first electrode comprises a plurality of first cylindrical electrode plates having different diameters and standing concentrically on the internal surface of the first end plate, the first cylindrical electrode plates ranging from an innermost first cylindrical electrode plate to an outermost first cylindrical electrode plate, and in which the second cylindrical electrode plate of the second electrode comprises a plurality of second cylindrical electrode plates having different diameters and standing concentrically on the first side of the conductor, the second cylindrical electrode plates ranging from an innermost second cylindrical electrode plate to an outermost second cylindrical electrode plate.
7. The vacuum variable capacitor device as claimed in claim 6 , in which each of the first cylindrical electrode plates ranging from the outermost to a second innermost is put and ousted from between adjacent two of the second cylindrical electrode plates in an interdigitating manner, and in which each of the second cylindrical electrode plates ranging from a second outermost to the innermost is put and ousted from between adjacent two of the first cylindrical electrode plates in an interdigitating manner.
8. The vacuum variable capacitor device as claimed in claim 1 , in which the bellows is substantially in a form of a cylinder.
9. An adjuster nut rotatably supported to a vacuum container of a vacuum variable capacitor of a vacuum variable capacitor device, the adjuster nut comprising:
a nut portion; and
a shank made of an insulating material, the shank having a first end integrated with the nut portion and a second end adapted to be directly coupled with a rotational shaft of a driving portion of the vacuum variable capacitor device.
10. The adjuster nut as claimed in claim 9 , in which the shank is made of one of a fiber reinforced plastic and a polycarbonate.
11. The adjuster nut as claimed in claim 10 , in which the second end of the shank is formed with a flange that is coupled with a flange of the rotational shaft by means of a bolt, and in which the shank defines an internal opening extending from the first end to the second end of the shank.
12. The adjuster nut as claimed in claim 11 , in which the nut portion defines an internal threaded opening extending from a first end to a second end integrated with the first end of the shank, the internal threaded opening of the nut portion being smaller in diameter than the internal opening of the shank in such a manner as to form a stage along a boundary therebetween.
13. The adjuster nut as claimed in claim 12 , in which the first end of the nut portion is fitted with a bearing.
14. An adjuster nut rotatably supported to a vacuum container of a vacuum variable capacitor of a vacuum variable capacitor device, the adjuster nut comprising:
a deformable bellows having a first end, and a second end opposite to the first end;
a nut portion having a first end, and a second end coupled with the first end of the bellows; and
a shank made of an insulating material, the shank having a first end coupled with the second end of the bellows, and a second end adapted to be directly coupled with a rotational shaft of a driving portion of the vacuum variable capacitor device.
15. The adjuster nut as claimed in claim 14 , in which the shank is made of one of a fiber reinforced plastic and a polycarbonate.
16. The adjuster nut as claimed in claim 15 , in which the second end of the shank is formed with a flange that is coupled with a flange of the rotational shaft by means of a bolt, and in which the shank defines an internal opening extending from the first end to the second end of the shank.
17. The adjuster nut as claimed in claim 16 , in which the nut portion defines an internal threaded opening extending from the first end to the second end of the nut portion, the internal threaded opening of the nut portion being smaller in diameter than the internal opening of the shank.
18. The adjuster nut as claimed in claim 17 , in which the first end of the nut portion is fitted with a bearing.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000081097A JP2001267179A (en) | 2000-03-23 | 2000-03-23 | Vacuum variable capacitor device |
JP2000-081097 | 2000-03-23 |
Publications (2)
Publication Number | Publication Date |
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US20020048136A1 true US20020048136A1 (en) | 2002-04-25 |
US6462930B1 US6462930B1 (en) | 2002-10-08 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US09/802,854 Expired - Lifetime US6462930B1 (en) | 2000-03-23 | 2001-03-12 | Vacuum variable capacitor device |
Country Status (4)
Country | Link |
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US (1) | US6462930B1 (en) |
JP (1) | JP2001267179A (en) |
KR (1) | KR100406011B1 (en) |
TW (1) | TWI254332B (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110228441A1 (en) * | 2008-12-02 | 2011-09-22 | Meidensha Corporation | Vacuum capacitor |
US20110235231A1 (en) * | 2008-12-02 | 2011-09-29 | Meidensha Corporation | Vacuum capacitor |
US20130038978A1 (en) * | 2010-04-19 | 2013-02-14 | Meidensha Corporation | Vacuum capacitor |
WO2014191041A1 (en) * | 2013-05-30 | 2014-12-04 | Comet Ag | Vacuum variable capacitor |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US7339298B2 (en) * | 2004-03-09 | 2008-03-04 | Superior Electric Holding Group Llc. | Compliant motor driven variable electrical device |
JP4710419B2 (en) * | 2005-05-30 | 2011-06-29 | 株式会社明電舎 | Vacuum capacitor and method of manufacturing vacuum capacitor |
JP5217382B2 (en) * | 2007-11-20 | 2013-06-19 | 株式会社明電舎 | Vacuum capacitor |
KR102360909B1 (en) | 2020-06-24 | 2022-02-10 | 주식회사 스페이스솔루션 | Vacuum capacitor |
KR102360910B1 (en) | 2020-06-24 | 2022-02-10 | 주식회사 스페이스솔루션 | Vacuum capacitor and manufacturing method of the same |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3447047A (en) * | 1968-03-20 | 1969-05-27 | Wesley Newton Lindsay | Motor driven variable capacitor |
US4002957A (en) * | 1975-06-18 | 1977-01-11 | International Telephone And Telegraph Corporation | Trimmable fixed hermetically sealed capacitor |
GB1555588A (en) * | 1976-08-25 | 1979-11-14 | Comet Elektron Roehren | Electric capacitor |
JPH05251269A (en) * | 1992-03-04 | 1993-09-28 | Meidensha Corp | Vacuum capacitor |
JP3713787B2 (en) * | 1996-02-09 | 2005-11-09 | 株式会社明電舎 | Vacuum capacitor |
JPH11273998A (en) | 1998-03-24 | 1999-10-08 | Meidensha Corp | Vacuum capacitor |
JP2000040640A (en) * | 1998-07-24 | 2000-02-08 | Meidensha Corp | Vacuum variable capacitor device |
JP2964248B1 (en) * | 1998-08-05 | 1999-10-18 | 株式会社 コムクラフト | Control method of capacitance in vacuum variable capacitor and vacuum variable capacitor using the same |
-
2000
- 2000-03-23 JP JP2000081097A patent/JP2001267179A/en active Pending
-
2001
- 2001-03-08 TW TW090105388A patent/TWI254332B/en not_active IP Right Cessation
- 2001-03-12 US US09/802,854 patent/US6462930B1/en not_active Expired - Lifetime
- 2001-03-13 KR KR10-2001-0012821A patent/KR100406011B1/en not_active IP Right Cessation
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110228441A1 (en) * | 2008-12-02 | 2011-09-22 | Meidensha Corporation | Vacuum capacitor |
US20110235231A1 (en) * | 2008-12-02 | 2011-09-29 | Meidensha Corporation | Vacuum capacitor |
US8749946B2 (en) * | 2008-12-02 | 2014-06-10 | Meidensha Corporation | Vacuum capacitor |
US8755166B2 (en) * | 2008-12-02 | 2014-06-17 | Meidensha Corporation | Vacuum capacitor |
US20130038978A1 (en) * | 2010-04-19 | 2013-02-14 | Meidensha Corporation | Vacuum capacitor |
US8749947B2 (en) * | 2010-04-19 | 2014-06-10 | Meidensha Corporation | Vacuum capacitor |
WO2014191041A1 (en) * | 2013-05-30 | 2014-12-04 | Comet Ag | Vacuum variable capacitor |
WO2014191510A1 (en) * | 2013-05-30 | 2014-12-04 | Comet Ag | Vacuum variable capacitor |
CN105531777A (en) * | 2013-05-30 | 2016-04-27 | 康姆艾德公司 | Vacuum variable capacitor |
US9721729B2 (en) | 2013-05-30 | 2017-08-01 | Comet Ag | Vacuum variable capacitor |
US9805873B2 (en) | 2013-05-30 | 2017-10-31 | Comet Ag | Vacuum variable capacitor |
KR101902301B1 (en) * | 2013-05-30 | 2018-09-28 | 코멧 아게 | Vacuum variable capacitor |
Also Published As
Publication number | Publication date |
---|---|
JP2001267179A (en) | 2001-09-28 |
TWI254332B (en) | 2006-05-01 |
KR100406011B1 (en) | 2003-11-17 |
KR20010092683A (en) | 2001-10-26 |
US6462930B1 (en) | 2002-10-08 |
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