JP2001028321A - Vacuum capacitor - Google Patents
Vacuum capacitorInfo
- Publication number
- JP2001028321A JP2001028321A JP11201091A JP20109199A JP2001028321A JP 2001028321 A JP2001028321 A JP 2001028321A JP 11201091 A JP11201091 A JP 11201091A JP 20109199 A JP20109199 A JP 20109199A JP 2001028321 A JP2001028321 A JP 2001028321A
- Authority
- JP
- Japan
- Prior art keywords
- movable
- electrode
- guide
- guide pin
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、大電力送信機の発
振回路、半導体製造装置用の高周波電源、あるいは誘導
加熱装置のタンク回路等に用いられる容量可変形の真空
コンデンサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a variable-capacity vacuum capacitor used for an oscillation circuit of a high-power transmitter, a high-frequency power supply for a semiconductor manufacturing apparatus, or a tank circuit of an induction heating apparatus.
【０００２】[0002]
【従来の技術】図３は、従来の真空コンデンサの断面図
である。セラミック等の絶縁円筒１の両端側に銅製の円
筒管２ａ，２ｂを接合して円筒部を形成し、この円筒部
を固定側端板を兼ねた固定電極取付導体３と可動側端板
４とで閉塞して、コンデンサ部を収容する真空容器５を
形成している。FIG. 3 is a sectional view of a conventional vacuum capacitor. A cylindrical portion is formed by joining copper cylindrical tubes 2a and 2b to both ends of an insulating cylinder 1 made of ceramic or the like, and this cylindrical portion is connected to a fixed electrode mounting conductor 3 also serving as a fixed end plate and a movable end plate 4. To form a vacuum vessel 5 for accommodating the condenser section.
【０００３】固定電極取付導体３の内側には、径（半
径）の異なる複数の円筒状電極板Ｆ1，Ｆ2…Ｆnを同心
円状に一定間隔をもって取り付けて固定電極６を形成し
ており、また、この固定電極６の各電極板間の間隙内
に、非接触状態で挿出入できるように、内径の異なる複
数の円筒状電極板Ｍ1，Ｎ2…Ｍnを可動電極取付導体７
に設けて可動電極８を形成している。Inside the fixed electrode mounting conductor 3, a plurality of cylindrical electrode plates F 1 , F 2 ... F n having different diameters (radius) are mounted concentrically at regular intervals to form a fixed electrode 6. A plurality of cylindrical electrode plates M 1 , N 2 ... Mn having different inner diameters are inserted into the gaps between the electrode plates of the fixed electrode 6 in a non-contact state.
And the movable electrode 8 is formed.
【０００４】固定電極取付導体３には、その内側で円筒
状電極板Ｆ1〜Ｆnの同心部に、円筒状電極板の軸線に沿
ってガイドピン９が設けられる。可動電極取付導体８に
は、円筒状電極板Ｍ1〜Ｍnの同心部に、ガイドピン９を
挿入するガイド部１０ａをもつ可動リード部１０が設け
られる。[0004] the fixed electrode mounting conductor 3, the concentric portions of the cylindrical electrode plate F 1 to F n at the inside, the guide pin 9 is provided along the axis of the cylindrical electrode plates. The movable electrode mounting conductor 8, the concentric portions of the cylindrical electrode plates M 1 ~M n, the movable lead portion 10 with the guide portion 10a for inserting the guide pins 9 are provided.
【０００５】可動リード部１０と可動側端板４の間には
ベローズ１１がロー付けされ、電極側に真空空間を形成
しながら可動リード部１０の上下動が可能にされる。A bellows 11 is brazed between the movable lead portion 10 and the movable side end plate 4 so that the movable lead portion 10 can move up and down while forming a vacuum space on the electrode side.
【０００６】ねじ受部１２は可動側端４の内側に立設さ
れ、内端部に鍔部１２ａが設けてある。１３は外周にね
じが螺設された可動リードボルトで、一端は可動リード
部１０の先端部に固定され、他端側は軸線に沿って鍔部
１２ａ内の空隙を遊貫してねじ受部１２内に突設されて
いる。１４は容量調整ナットで、可動リードボルト１３
が螺合するねじ孔を有し、その一端側はねじ受部１２内
に突出した可動リードボルト１３の端部に螺合し、ベア
リング等の軸受１５を介して鍔部１２ａの内底に回転自
在に取付けられている。１６は最大容量を調節するネジ
である。The screw receiving portion 12 is provided upright on the inside of the movable end 4 and has a flange portion 12a at the inner end. Reference numeral 13 denotes a movable lead bolt having a screw threaded on its outer periphery, one end of which is fixed to the distal end of the movable lead portion 10, and the other end side of which passes through a gap in the flange portion 12 a along the axis and receives a screw receiving portion. 12 protrudes. Reference numeral 14 denotes a capacity adjusting nut, and the movable lead bolt 13
Has a screw hole into which is screwed. One end of the screw hole is screwed with an end of a movable lead bolt 13 protruding into the screw receiving portion 12, and is rotated to the inner bottom of the flange portion 12a via a bearing 15 such as a bearing. Mounted freely. Reference numeral 16 denotes a screw for adjusting the maximum capacity.
【０００７】なお、真空容器５の円筒部は、全体をセラ
ミック等による絶縁円筒で形成してもよい。要は、固定
電極と可動電極とが電気的に絶縁されればよい。[0007] The cylindrical portion of the vacuum vessel 5 may be formed entirely of an insulating cylinder made of ceramic or the like. The point is that the fixed electrode and the movable electrode may be electrically insulated.
【０００８】このように構成した真空コンデンサで、そ
の静電容量の調整を行う場合は、可動電極と固定電極に
課電し、調整ナット１４を回動させることにより、可動
リード部１０を軸線方向に移動させて固定電極６の電極
板と可動電極８の電極板との対向面積を変え、両電極６
と８間に生ずる静電容量の値を連続的に変化させる。In the case of adjusting the capacitance of the vacuum capacitor thus configured, the movable lead and the fixed electrode are energized and the adjustment nut 14 is rotated to move the movable lead 10 in the axial direction. To change the facing area between the electrode plate of the fixed electrode 6 and the electrode plate of the movable electrode 8,
And the value of the capacitance generated between 8 and 8 is continuously changed.
【０００９】なお、固定電極６と可動電極８とは電気的
に絶縁されなければならないので、ガイドピン９と可動
リード部１０とは電気的に絶縁されなければならない
が、この絶縁手段は、摺動の円滑性を阻害しないように
行う必要がある。それにはガイドピン９および可動リー
ド部１０のいずれか一方を絶縁材料で構成する必要があ
る。摺動性の円滑を保つためにガイドピン９をセラミッ
ク、特にアルミナによるセラミックで形成し、可動リー
ド部１０をリン青銅で形成することを好適とし、また、
ガイドピン９を金属性にし、その表面に滑性の優れたナ
イロン樹脂をコーティングしても絶縁を保ちながら円滑
な摺動を確保することができる。Since the fixed electrode 6 and the movable electrode 8 must be electrically insulated, the guide pin 9 and the movable lead 10 must be electrically insulated. It is necessary to do so as not to hinder the smoothness of movement. To do so, one of the guide pin 9 and the movable lead 10 must be made of an insulating material. It is preferable that the guide pins 9 are formed of ceramic, particularly ceramics made of alumina, and that the movable lead portions 10 are formed of phosphor bronze in order to keep the slidability smooth.
Even if the guide pin 9 is made of metal and its surface is coated with a highly slippery nylon resin, smooth sliding can be ensured while maintaining insulation.
【００１０】[0010]
【発明が解決しようとする課題】従来の真空コンデンサ
では、固定電極６の電極板と可動電極８の電極板との空
隙を精度よく保持して可動電極８を移動させるため、ガ
イドピン９が設けられているが、このガイドピン９は固
定側端板３の中心にロー付け接合で固定されている。こ
こで、ガイドピン９がセラミック製の場合、ロー付け接
合するためには固定側端板３はメタライズ処理される。In the conventional vacuum capacitor, guide pins 9 are provided to move the movable electrode 8 while accurately maintaining the gap between the electrode plate of the fixed electrode 6 and the electrode plate of the movable electrode 8. However, the guide pin 9 is fixed to the center of the fixed end plate 3 by brazing. Here, when the guide pin 9 is made of ceramic, the fixed side end plate 3 is subjected to metallizing processing in order to perform brazing.
【００１１】このような構造において、真空コンデンサ
の容量を多数回変化させると、ガイドピン９と可動リー
ド部１０のガイド部１０ａの間に横方向の応力が発生
し、この応力のためガイドピン９（セラミック製）にそ
の端面でクラックが発生し、固定電極６との接合部が破
損することがある。In such a structure, when the capacity of the vacuum capacitor is changed many times, a lateral stress is generated between the guide pin 9 and the guide portion 10a of the movable lead portion 10. Cracks may occur on the end face of the (ceramic), and the joint with the fixed electrode 6 may be damaged.
【００１２】本発明の目的は、ガイドピン９のクラック
発生を防止し、しかも軸寸法を最小にしながらガイドピ
ン部分での閃絡を防止した真空コンデンサを提供するこ
とにある。An object of the present invention is to provide a vacuum capacitor in which cracks in the guide pins 9 are prevented, and furthermore, flashover is prevented at the guide pin portions while minimizing the shaft dimension.
【００１３】[0013]
【課題を解決するための手段】本発明は、前記課題を解
決するため、固定側端板にはガイドピンを摺動自在に支
持できるガイド部を設けることで固定側端板と該ガイド
部の間を機械強度を高めて固定し、このガイド部にガイ
ドピンを摺動自在に挿入することで端板のメタライズ処
理及びガイドピンのロー付けを不要にしながらガイド機
能を確保し、さらにガイドピンの材質をアルミナセラミ
ックとすること、さらにはアルミナセラミックのアルミ
ナ成分を９２％以上とすることにより軸寸法を最小にし
ながらガイドピン部分での閃絡を防止できるようにした
もので、以下の構成を特徴とする。According to the present invention, in order to solve the above-mentioned problems, the fixed end plate is provided with a guide portion capable of slidably supporting a guide pin. The mechanical strength is increased to secure the gap, and the guide pin is slidably inserted into this guide section to secure the guide function while eliminating the need for metallizing the end plate and brazing the guide pin. The material is made of alumina ceramic, and the alumina component of alumina ceramic is set to 92% or more to minimize the shaft size and prevent flashover at the guide pin part. And
【００１４】円筒部の一端側に固定側端板、他端側に可
動側端板を有する真空容器と、前記固定側端板に複数の
円筒状電極板を同心状に取り付けて形成した固定電極
と、前記固定電極の各円筒状電極板間に非接触状態で挿
出入できるように複数の円筒状電極板を同心状に取り付
けて形成した可動電極と、前記可動電極の取付導体と前
記可動側端板との間に設けられ、真空状態を保持した状
態で前記可動電極の移動を可能とするベローズと、前記
固定側端板の中心部に一体的に設けられるガイド部と、
このガイド部に対向して前記可動電極の取付導体の中心
部に設けられる可動リード部と、前記ガイド部と可動リ
ード部とにそれぞれ摺動自在に挿入されるガイドピンと
を有して前記可動電極を前記固定電極側に摺動自在にガ
イドするガイド手段とを備え、前記ガイドピンは、アル
ミナセラミック製とすることを特徴とする。A vacuum vessel having a fixed end plate at one end of the cylindrical portion and a movable end plate at the other end, and a fixed electrode formed by concentrically attaching a plurality of cylindrical electrode plates to the fixed end plate. A movable electrode formed by concentrically attaching a plurality of cylindrical electrode plates so as to be able to be inserted and removed in a non-contact state between the respective cylindrical electrode plates of the fixed electrode; and a mounting conductor of the movable electrode and the movable side. A bellows provided between the end plate and the movable electrode to allow movement of the movable electrode while maintaining a vacuum state, and a guide unit integrally provided at the center of the fixed end plate.
The movable electrode includes a movable lead portion provided at the center of the mounting conductor of the movable electrode facing the guide portion, and guide pins slidably inserted into the guide portion and the movable lead portion, respectively. And a guide means for slidably guiding to the fixed electrode side, wherein the guide pin is made of alumina ceramic.
【００１５】また、前記ガイドピンは、アルミナ含有率
を９２％以上とすることを特徴とする。Further, the guide pin has an alumina content of 92% or more.
【００１６】[0016]
【発明の実施の形態】図１は、本発明の一実施形態の構
成図で、縦断正面図を示している。同図が図２と異なる
部分は、固定側端板３にはガイドピン９の取り付け位置
に円筒状のガイド部１７を設けた点にある。FIG. 1 is a block diagram of an embodiment of the present invention, and shows a longitudinal sectional front view. 2 differs from FIG. 2 in that a cylindrical guide portion 17 is provided on the fixed end plate 3 at a position where the guide pin 9 is attached.
【００１７】ガイド部１７は、固定側端板３と同じ部材
または同等の部材で作成され、固定側端板３にロー付け
される。ガイドピン９は、固定側端板３にロー付けされ
ることなく、摺動自在でガイド部１７に挿入される。ま
た、ガイドピン９は、可動リード部１０に対しても固定
されることなく、摺動自在にされる。The guide portion 17 is made of the same member as or a member equivalent to the fixed side end plate 3 and brazed to the fixed side end plate 3. The guide pin 9 is slidably inserted into the guide portion 17 without being brazed to the fixed end plate 3. Further, the guide pin 9 is slidable without being fixed to the movable lead portion 10.
【００１８】ガイド部１７の長さ寸法Ｌ1及び可動リー
ド部１０の長さ寸法Ｌ2は、可動電極８の最大移動長さ
Ｌ0よりも大きくされ、可動電極８が最小容量位置にさ
れた場合にもガイドピン９がガイド部１７及び可動リー
ド部１０から外れないようにする。The guide unit length dimension L 2 of the length dimension L 1 and the movable lead portions 10 of the 17 is greater than the maximum movement length L 0 of the movable electrode 8, the movable electrode 8 is in the minimum capacity position Also in this case, the guide pin 9 is prevented from coming off the guide portion 17 and the movable lead portion 10.
【００１９】したがって、上記の構成によれば、ガイド
ピン９は、固定側端板３にロー付けされることなく、ガ
イド部１７に挿入される構造にし、ガイド部１７を固定
側端板３にロー付けするため、ガイド部１７と固定側端
板３との間のロー付けはこれらが同一部材又は同等部材
にされて強固な構造を得ることができる。この構造によ
り、ガイドピン９がセラミック製にされる場合で、多数
回の容量変更操作がなされたときにもガイドピン９にク
ラックが発生するのを防止できる。また、固定側端板３
にはメタライズ処理が不要になる。Therefore, according to the above configuration, the guide pin 9 is inserted into the guide portion 17 without being brazed to the fixed end plate 3, and the guide portion 17 is attached to the fixed end plate 3. Because of the brazing, the brazing between the guide portion 17 and the fixed side end plate 3 is made of the same member or an equivalent member, so that a strong structure can be obtained. With this structure, when the guide pin 9 is made of ceramic, it is possible to prevent the guide pin 9 from being cracked even when the capacity change operation is performed many times. Also, the fixed side end plate 3
Does not require metallization processing.
【００２０】本実施形態は、上記の構成に加えて、ガイ
ドピン９の材質をアルミナセラミックとし、さらにはア
ルミナセラミックのアルミナ成分を９２％以上とする。
この理由を以下に詳細に説明する。In this embodiment, in addition to the above configuration, the material of the guide pin 9 is alumina ceramic, and the alumina component of the alumina ceramic is 92% or more.
The reason will be described in detail below.
【００２１】真空コンデンサは、主に数百ＫＨZの高周
波で使用されるが、固定電極側のガイド及び可動電極側
のガイドの先端間で高い電圧が印加される。この高い電
圧に対して両ガイド間に設けるガイドピンの材質によ
り、閃絡電圧が変化する。The vacuum capacitor is mainly used in a high frequency of a few hundred KH Z, high voltage is applied between the tip of the guide and the movable electrode side guides of the fixed electrode side. For this high voltage, the flash voltage changes depending on the material of the guide pin provided between both guides.
【００２２】下記の表は、図１の構造の真空コンデンサ
で、ガイド部１７の先端と可動リード部１０の先端との
距離Ｌ3を１ｍｍ、印加電圧の周波数を５００ＭＨZと
し、セラミック製とするガイドピン９の材質をアルミ
ナ、ジルコニア、マグネシアとした場合のそれぞれの閃
絡電圧の測定結果を示す。[0022] The following table is a vacuum capacitor of the structure of FIG. 1, the distance L 3 between the tip of the tip and the movable lead portion 10 of the guide portion 17 1 mm, the frequency of the applied voltage is 500 mH Z, the ceramic The measurement results of the flash voltage when the material of the guide pin 9 is alumina, zirconia, and magnesia are shown.
【００２３】[0023]
【表１】 [Table 1]
【００２４】この表からも明らかなように、ガイドピン
９としてアルミナセラミックを使用した場合が閃絡電圧
が最も高くなる。換言すれば、ガイドピン９としてアル
ミナセラミックを使用することで、同じ閃絡電圧を得る
のに他の材質のものに比べて距離Ｌ3を短くすることが
でき、真空コンデンサの軸寸法を最小にしながら、可動
電極の確実なガイドが可能になる。As is apparent from this table, the flash voltage is highest when alumina ceramic is used as the guide pin 9. In other words, the use of alumina ceramic as the guide pin 9, to obtain the same flashover voltage it is possible to shorten the distance L 3 in comparison with the other materials, and the axial dimension of the vacuum capacitor minimizes However, reliable guidance of the movable electrode becomes possible.
【００２５】図２は、ガイドピン９をアルミナセラミッ
クとする場合で、そのアルミナ（Ａｌ2Ｏ3）含有率を横
軸とした閃絡電圧特性を示す。なお、計測条件は、周波
数を５００ＭＨZ、距離Ｌ3を１ｍｍとした場合である。
同図から明らかなように、アルミナの含有率を９２％以
上とすることで高い閃絡電圧を得ることができる。FIG. 2 shows the flash voltage characteristics with the alumina (Al 2 O 3 ) content on the horizontal axis when the guide pin 9 is made of alumina ceramic. The measurement conditions is when 500MH frequency Z, the distance L 3 was 1 mm.
As is clear from the figure, a high flash voltage can be obtained by setting the content of alumina to 92% or more.
【００２６】したがって、本実施形態では、図１の構造
において、ガイドピン９をアルミナセラミックとし、さ
らにはアルミナ含有率を９２％以上とする。これによ
り、ガイドピン部分で閃絡を起こすことなく最小距離に
することにより、真空コンデンサの軸寸法を最小にしな
がら、可動電極の確実なガイドが可能になる。Therefore, in this embodiment, in the structure of FIG. 1, the guide pin 9 is made of alumina ceramic, and the alumina content is set to 92% or more. Thus, by setting the minimum distance without causing flashing at the guide pin portion, it is possible to reliably guide the movable electrode while minimizing the axial dimension of the vacuum capacitor.
【００２７】以上までの実施形態において、ガイド部１
７は、固定側端板３と一体構造のものにした切り出し構
造とすることができる。この場合、ガイド部１７と固定
側端板３とのロー付けも不要になる。In the above embodiment, the guide 1
Reference numeral 7 may be a cut-out structure formed integrally with the fixed side end plate 3. In this case, there is no need to braze the guide portion 17 and the fixed side end plate 3.
【００２８】また、図１の実施形態はベローズ１１を可
動リード部１０に取付けた場合であるが、可動電極取付
導体７に取付けてもよく、また、可動リード部１０を可
動電極取付導体と一体又は別個に設けた構造など、適宜
設計変更できる。In the embodiment of FIG. 1, the bellows 11 is attached to the movable lead portion 10. However, the bellows 11 may be attached to the movable electrode attaching conductor 7, or the movable lead portion 10 may be integrated with the movable electrode attaching conductor. Alternatively, the design can be changed as appropriate, such as a separately provided structure.
【００２９】[0029]
【発明の効果】以上のように、本発明はガイドピンを固
定側端板に摺動自在に支持するガイド部を設けたため、
固定側端板とガイド部とを機械的強度を高めて固定又は
一体構造のものにでき、固定側端板をメタライズ処理す
ること及び固定側端板にガイドピンを直接にロー付けす
る必要性がなくなるし、ガイドピンのクラック発生を防
止できる。As described above, according to the present invention, the guide pin for slidably supporting the guide pin on the fixed end plate is provided.
The fixed end plate and the guide part can be fixed or integrated by increasing the mechanical strength, and it is necessary to metallize the fixed end plate and braze the guide pins directly to the fixed end plate. And the occurrence of cracks in the guide pins can be prevented.
【００３０】これに加えて、ガイドピンの材質をアルミ
ナセラミックとすること、さらにはアルミナセラミック
のアルミナ成分を９２％以上とすることにより軸寸法を
最小にしながらガイドピン部分での閃絡を防止できる。In addition to this, the guide pin is made of alumina ceramic, and the alumina component of the alumina ceramic is set to 92% or more, so that flashing at the guide pin portion can be prevented while minimizing the axial dimension. .
【図１】本発明の実施形態の構成図。FIG. 1 is a configuration diagram of an embodiment of the present invention.
【図２】ガイドピンのアルミナ含有率と閃絡電圧特性
図。FIG. 2 is a graph showing the alumina content of a guide pin and the flashover voltage characteristic.
【図３】従来の真空コンデンサの構成図。FIG. 3 is a configuration diagram of a conventional vacuum capacitor.
１…絶縁円筒 ２ａ，２ｂ…円筒 ３…固定側端板 ４…可動側端板 ５…真空容器 ６…固定電極 ７…可動電極取付導体 ８…可動電極 ９…ガイドピン １０…可動リード部 １１…ベローズ １３…ねじ軸 １４…調整ナット １７…ガイド部 Ｆ1〜Ｆn，Ｍ1〜Ｍn…円筒状電極板DESCRIPTION OF SYMBOLS 1 ... Insulating cylinder 2a, 2b ... Cylinder 3 ... Fixed side end plate 4 ... Movable side end plate 5 ... Vacuum container 6 ... Fixed electrode 7 ... Movable electrode mounting conductor 8 ... Movable electrode 9 ... Guide pin 10 ... Movable lead part 11 ... bellows 13 ... screw shaft 14 ... adjustment nut 17 ... guide portion F 1 ~F n, M 1 ~M n ... cylindrical electrode plate
Claims (2)
可動側端板を有する真空容器と、 前記固定側端板に複数の円筒状電極板を同心状に取り付
けて形成した固定電極と、 前記固定電極の各円筒状電極板間に非接触状態で挿出入
できるように複数の円筒状電極板を同心状に取り付けて
形成した可動電極と、 前記可動電極の取付導体と前記可動側端板との間に設け
られ、真空状態を保持した状態で前記可動電極の移動を
可能とするベローズと、 前記固定側端板の中心部に一体的に設けられるガイド部
と、このガイド部に対向して前記可動電極の取付導体の
中心部に設けられる可動リード部と、前記ガイド部と可
動リード部とにそれぞれ摺動自在に挿入されるガイドピ
ンとを有して前記可動電極を前記固定電極側に摺動自在
にガイドするガイド手段とを備え、 前記ガイドピンは、アルミナセラミック製とすることを
特徴とする真空コンデンサ。1. A vacuum vessel having a fixed end plate at one end of a cylindrical portion and a movable end plate at the other end, and a plurality of cylindrical electrode plates concentrically attached to the fixed end plate. A fixed electrode, a movable electrode formed by concentrically attaching a plurality of cylindrical electrode plates so as to be able to be inserted and removed in a non-contact state between the respective cylindrical electrode plates of the fixed electrode; A bellows provided between the movable-side end plate and capable of moving the movable electrode while maintaining a vacuum state; a guide unit integrally provided at a central portion of the fixed-side end plate; A movable lead portion provided at the center of the mounting conductor of the movable electrode facing the portion, and a guide pin slidably inserted into the guide portion and the movable lead portion, respectively, and the movable electrode is Guide slidably guides to fixed electrode side And a stage, wherein the guide pins, vacuum capacitor, characterized in that the alumina ceramic.
２％以上とすることを特徴とする請求項１に記載の真空
コンデンサ。2. The guide pin has an alumina content of 9%.
The vacuum capacitor according to claim 1, wherein the content is 2% or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20109199A JP3882408B2 (en) | 1999-07-15 | 1999-07-15 | Vacuum capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20109199A JP3882408B2 (en) | 1999-07-15 | 1999-07-15 | Vacuum capacitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001028321A true JP2001028321A (en) | 2001-01-30 |
| JP3882408B2 JP3882408B2 (en) | 2007-02-14 |
Family
ID=16435256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20109199A Expired - Lifetime JP3882408B2 (en) | 1999-07-15 | 1999-07-15 | Vacuum capacitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3882408B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010064543A1 (en) * | 2008-12-02 | 2010-06-10 | 株式会社明電舎 | Vacuum capacitor |
| JP2010147373A (en) * | 2008-12-22 | 2010-07-01 | Meidensha Corp | Vacuum capacitor |
| WO2011027797A1 (en) * | 2009-09-02 | 2011-03-10 | 株式会社明電舎 | Vacuum capacitor-voltage-transformer |
| US8749947B2 (en) | 2010-04-19 | 2014-06-10 | Meidensha Corporation | Vacuum capacitor |
| US8749946B2 (en) | 2008-12-02 | 2014-06-10 | Meidensha Corporation | Vacuum capacitor |
-
1999
- 1999-07-15 JP JP20109199A patent/JP3882408B2/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010064543A1 (en) * | 2008-12-02 | 2010-06-10 | 株式会社明電舎 | Vacuum capacitor |
| US8749946B2 (en) | 2008-12-02 | 2014-06-10 | Meidensha Corporation | Vacuum capacitor |
| US8755166B2 (en) | 2008-12-02 | 2014-06-17 | Meidensha Corporation | Vacuum capacitor |
| TWI479524B (en) * | 2008-12-02 | 2015-04-01 | Meidensha Electric Mfg Co Ltd | Vacuum capacitors |
| JP2010147373A (en) * | 2008-12-22 | 2010-07-01 | Meidensha Corp | Vacuum capacitor |
| WO2011027797A1 (en) * | 2009-09-02 | 2011-03-10 | 株式会社明電舎 | Vacuum capacitor-voltage-transformer |
| JP2011054796A (en) * | 2009-09-02 | 2011-03-17 | Meidensha Corp | Transformer for vacuum capacitor instrumentation |
| CN102483990A (en) * | 2009-09-02 | 2012-05-30 | 株式会社明电舍 | Vacuum capacitor-voltage-transformer |
| US9159488B2 (en) | 2009-09-02 | 2015-10-13 | Meidensha Corporation | Vacuum capacitor-voltage-transformer |
| US8749947B2 (en) | 2010-04-19 | 2014-06-10 | Meidensha Corporation | Vacuum capacitor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3882408B2 (en) | 2007-02-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101811412B1 (en) | Fast vacuum variable capacitor | |
| EP0399770A1 (en) | Dielectric resonator device | |
| CN107731646B (en) | Surface wave plasma process equipment | |
| US20210398746A1 (en) | Electrode unit for a vacuum capacitor and a vacuum capacitor | |
| EP1084508A2 (en) | High frequency inductive lamp and power oscillator | |
| JP4782833B2 (en) | Coaxial automatic impedance adapter | |
| FI97091B (en) | Dielectric resonator | |
| JP2001028321A (en) | Vacuum capacitor | |
| JP2002542695A (en) | High frequency filter | |
| US20030141282A1 (en) | Vacuum switch tubes | |
| US7394642B2 (en) | Tubular capacitor with variable capacitance and dielectrically elongated inner electrode for NMR applications | |
| EP0357451B1 (en) | A discharge tube arrangement | |
| US5319313A (en) | Power coupler with adjustable coupling factor for accelerator cavities | |
| CN110832634A (en) | Wafer supporting table | |
| JP2001028319A (en) | Vacuum capacitor | |
| JP2001028320A (en) | Vacuum capacitor | |
| US5164952A (en) | Electrically pumped gas laser suitable for high input power | |
| JP3365082B2 (en) | Vacuum condenser | |
| CN207642566U (en) | A kind of weld mold for anode decoupling column | |
| JPH1167590A (en) | Vacuum capacitor | |
| JP3885343B2 (en) | Vacuum capacitor | |
| CN219085824U (en) | External voice coil motor telescopic driving variable capacitance device and radio frequency source matcher | |
| US20230360858A1 (en) | Variable capacitor with linear impedance and high voltage breakdown | |
| JPH0251244B2 (en) | ||
| US4472759A (en) | Air trimmer capacitor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20041117 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20061017 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20061024 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20061106 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 3882408 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101124 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101124 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111124 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111124 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121124 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131124 Year of fee payment: 7 |
|
| EXPY | Cancellation because of completion of term |