US20010036700A1

US20010036700A1 - Method of fabricating cup-shape cylindrical capacitor of high density DRAMS

Info

Publication number: US20010036700A1
Application number: US09/551,535
Authority: US
Inventors: Shiou-Yu Wang; Jia-Shyong Cheng; Tean-Sen Jen; Ming-Teng Hsieh
Original assignee: Nanya Technology Corp
Current assignee: Nanya Technology Corp
Priority date: 1997-05-20
Filing date: 2000-04-18
Publication date: 2001-11-01
Anticipated expiration: 2018-01-14
Also published as: TW463288B; US6403418B2

Abstract

A method of fabricating cup shape cylindrical capacitor of high density Dynamic Random Access Memory (DRAM) cells is disclosed. The cup shape capacitor shape is achieved by first depositing a first polysilicon layer on a silicon substrate; a third dielectric layer is then formed overlaying the first polysilicon layer, and defined third dielectric crowns by the conventional lithography and etching techniques; a second polysilicon layer is deposited overlaying the third dielectric crowns and first polysilicon layer; the first polysilicon and second polysilicon layers are then vertically anisotropically etchback to define storage nodes of the cylindrical capacitors; the third dielectric crowns are removed; finally, the capacitor dielectric layer and the polysilicon top plate of the capacitor are formed to complete the cup shape cylindrical capacitor formation for high density DRAM applications.

Description

BACKGROUND OF THE INVENTION

(1) Field of the Invention

The present invention relates to a method of fabricating the capacitors of dynamic random access memory (DRAM) cells, and more particularly to the cup-shape cylindrical capacitor structure of high density DRAMs.

(2) Description of the Related Art

A DRAM cell comprises a metal-oxide-semiconductor field effect transistor (MOSFET) and capacitors which are built in a semiconductor silicon substrate. There is an electrical contact between the source of a MOSFET and the storage node of the adjacent capacitor, forming a memory cell of the DRAM device. A large number of memory cells make up the cell arrays which combine with the peripheral circuit to produce DRAMs.

In recent years, the sizes of the MOSFETs and capacitors have become continuously smaller so that the packing densities of these DRAM devices have increased considerable. For example, a number of semiconductor manufacturing companies in the world have already begun mass production of 16 M bit or even 64 M bit DRAMs.

As the sizes of the capacitors become smaller, so that the capacitance values of the capacitors are decreasing, that reduces the signal to noise ratio of the DRAM circuits, causing the performance problem. The issue of maintaining or even increasing the surface area of the storage nodes or reducing the thickness of the dielectric layer is particularly important as the density of the DRAM arrays continues to increase for future generations of memory devices.

When the capacitor is used to fabricate 16 Mbit DRAMs and beyond, increasing the capacitor surface area becomes a top priority. Various shapes of capacitor structures have been used to address this issue. U.S. Pat. No. 5,185,282 to Lee et al. (the entire disclosure of which is herein incorporated by reference) provides a method of fabricating cup-shaped capacitor storage node. Another U.S. Pat. No. 5,021,357 to Taguchi et al. (the entire disclosure of which is herein incorporated by reference) discloses a method of fabricating fin structure capacitor electrode. These capacitor structures can effectively increase the capacitance values of the capacitors, however, these processes are too complicated and highly fastidious. They are difficult to be practically employed for DRAM mass-production.

SUMMARY OF THE INVENTION

Accordingly, it is a primary object of the present invention to provide a method for fabricating a DRAM cell fabrication with greater capacitance per unit area.

It is another object of the present invention to provide a method of fabricating the stack capacitor structure of the high density DRAMs.

It is a further object of the present invention to provide an easy and manufacturable process for high density DRAMs that can reduce the processing steps and fabrication cost.

These objects are accomplished by the fabrication process described below.

First, a field oxide layer for isolation is grown on the semiconductor silicon substrate by standard integrated circuit fabrication process. Then, bitlines and MOSFET regions which include gate oxides, gate electrodes and source/drain regions are formed on the semiconductor silicon substrate.

Next, a first dielectric and a second dielectric layers are sequentially deposited. The first dielectric layer is planarized and the first and second dielectric layers are then etched by plasma-etching to expose the source regions of the MOSFET in order to form cell contact windows of the DRAMs.

Then, the first polysilicon layer which is overlaying the second dielectric layer and filling into the cell contacts is formed. The next step is the key point of the present invention, a third dielectric layer is formed overlaying the first polysilicon layer, and defined into third dielectric crowns by the conventional lithography and etching techniques.

Next, a second polysilicon layer is deposited overlaying the third dielectric crowns and first polysilicon layer. The first polysilicon and second polysilicon layers are then vertically anisotropically etchback to define storage nodes of the cylindrical capacitors. Therefore, the third dielectric crowns are removed by hydrofluoric acid (HF).

Finally, the capacitor dielectric layer and the polysilicon top plate of the capacitor are formed by standard integrated circuit technologies. Therefore, the cup shape cylindrical capacitor for high density DRAM applications is accomplished.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings forming a material part of this description, in which: [0017]
FIGS. 1 through 7 schematically illustrate the cross sectional view of a DRAM cell fabrication according to the present invention. [0018]
FIG. 1 is a cross sectional representation of the DRAM cell after the second dielectric layer is formed. [0019]
FIG. 2 is a cross sectional representation of the DRAM cell of FIG. 1 after the sidewall spacers are formed in the contact window. [0020]
FIG. 3 is a cross sectional representation of the DRAM cell of FIG. 2 after the third dielectric layer is formed. [0021]
FIG. 4 is a cross sectional representation of the DRAM cell of FIG. 3 after the third dielectric crown and second polysilicon layer are formed. [0022]
FIG. 5 is a cross sectional representation of the DRAM cell of FIG. 4 after the cup-shape capacitor storage node is formed. [0023]
FIG. 6 is a cross sectional representation of the DRAM cell of FIG. 5 after the third dielectric crown is removed. [0024]
FIG. 7 is a cross sectional representation of the DRAM cell after the final capacitor structure is completed.[0025]

DESCRIPTION OF THE PREFERRED EMBODIMENT

The invention disclosed herein is directed to a method of fabricating the cup-shape cylindrical capacitor of high density DRAMs. The drawing figures are illustrated a partially completed integrated circuit device. In the following description, numerous details are set forth in order to provide a thorough understanding of the present invention. It will be appreciated by one skilled in the art that variations of these specific details are while still achieving the results of the present invention. In other instance, well-known processing steps are not described in detail in order not unnecessarily to obscure the present invention. [0026]
Referring now more particularly to FIG. 1, there is shown a portion of partially completed Metal-Oxide-Semiconductor Field Effect Transistor (MOSFET). First, filed [0027] oxide regions 12 served for isolation are formed on a single crystalline semiconductor silicon substrates 10 to a thickness of about 3000 to 6000 Angstroms by the conventional localized oxidation of silicon (LOCOS) or shallow trench isolation (STI) techniques. Bitlines and MOSFET regions which are usually consist of gate oxides, gates 14, pad oxides 16, lightly doped regions, spacers, and source/drain regions 18 are then formed.
The [0028] gate 14 of the MOSFET is usually composed of polysilicon or polycide formed by low pressure chemical vapor deposition (LPCVD) to a thickness of about 2000 to 3500 Angstroms. The source/drain region 18 of the MOSFET which is formed by ion implantation technique, is preferably doped with arsenic (As⁷⁵) or phosphorus (p³¹) ions, with an implantation dose of 2E15 to 5E16 cm⁻², and an implantation energy of 30 to 80 keV.
Referring to FIG. 1 again, the first dielectric [0029] 20 and second dielectric 22 layers are continuously deposited on the silicon substrate 10. The first dielectric layer 20 is usually using boronphosphosilicate glass (BPSG) which is formed by atmosphere CVD (APCVD) technique under the following conditions: a temperature is about 400° C., and a pressure is about 1.0 torr, with reactant gases of Si(C₂H₅O)₄, N₂and TMB (Tri-Methyl-Borate). The thickness of the first dielectric layer 20 is about 3000 to 8000 Angstroms. Thereafter, the first dielectric layer 20 is planarized by thermal reflow, etchback or chemical mechanical polishing (CMP) techniques. Alternatively, The first dielectric layer 20 can be natural silicate glass (NSG) formed by LPCVD under a temperature about 720° C., a pressure about 0.25 torr, with reactant gases of Si(C₂H₅O)₄, N₂O and O₂. Even Tetra-Ethyl-Ortho Silicate (TEOS) or BPSG/NSG multilayers can also work. The second dielectric layer 22 which serves as polysilicon etch stopper is usually using nitride (SiN_x) formed by LPCVD technique under the following conditions: a pressure is between 200 to 400 mTorr, with a temperature of about 720° C., and reactant gases SiH₂Cl₂and NH₃flowing to a thickness of 200 to 1000 Angstroms. Alternatively, the materials with high etch selectivity respect to polysilicon can also be used such as oxynitride (SiON).
Referring now to FIG. 2, the first dielectric and second dielectric layers are partially etched to open [0030] cell contact windows 25 for the sources/drains 18 of the MOSFET by the conventional lithography and plasma-etching techniques. In order to ensure there is no electrically-short problem due to misalignment, sidewall spacers 28 may be formed inside the cell contact windows.
The plasma etching process can use magnetic enhanced reactive ion etching (MERIE), electron cyclotron etching (ECR) or reactive ion etching (RIE) methods with reactant gases such as CF[0031] ₄, CHF₃and Ar. The sidewall spacers 28 are usually composed of silicon dioxide such as TEOS by the LPCVD technique, followed by vertically anisotropically etching to complete the spacer formation.
Referring now to FIG. 3, the [0032] first polysilicon layer 30 which is overlaying the second dielectric layer 22 and filling into the cell contact window 25 is deposited. Next, a third dielectric layer 32 is formed overlaying the first polysilicon layer 30 as shown in FIG. 3.
The [0033] first polysilicon layer 30 is usually formed by in-situ phosphorus doped LPCVD method under a mixture of 15% PH₃+85% SiH₄and 5% PH₃+95% N₂, at a temperature about 550° C. to obtain a thickness of between 500 to 1500 Angstroms. The third dielectric layer 32 is usually using BPSG which is formed by APCVD technique as described above. The thickness of the third dielectric layer 32 is about 4000 to 10000 Angstroms. Thereafter, the third dielectric layer 32 is subjected to planarize. Alternatively, The third dielectric layer 32 can be NSG, phosphosilicate glass PSG), spin on glass (SOG) or the like.
Referring now to FIG. 4. the [0034] third dielectric layer 32 is vertically etched to form third dielectric crowns 32A by the conventional lithography and plasma-etching techniques. Next, a second polysilicon layer 34 is deposited overlaying the third dielectric crowns 32A and first polysilicon layer 30 as shown in FIG. 4.
The [0035] third dielectric layer 32 plasma-etching process can still use MERIE, ECR or RIE methods with reactant gases such as CF₄, CHF₃and Ar as described before. The second polysilicon layer 34 is also formed by in-situ phosphorus doped LPCVD method to a thickness of between 1000 to 2000 Angstroms. Alternatively, the second polysilicon 34 may be doped by ion implant technique.
Referring now to FIG. 5. the [0036] first polysilicon 30 and second polysilicon 34 layers are vertically anisotropically etchback to define storage nodes of the cylindrical capacitors. The etchback process which is automatically stopped at the second dielectric layer 22 without damaging underlayers is usually employed MERIE method with reactant gases of Cl₂, SF₆and HBr.
Referring now to FIG. 6, the third [0037] dielectric crowns 32A are removed by wet etching such as the mixture of hydrofluoric acid (HF) and ammonium fluoride (NH₄F) or buffer oxide etch (BOE). The remaining of the second dielectric layer 22 can be removed or left as it was. Thereafter, the cup shape storage nodes which are consist of the remaining of first polysilicon 30A and second polysilicon 34A layers according to the present invention are created as shown in FIG. 6.
Referring now to FIG. 7, a [0038] capacitor dielectric layer 36 and a third polysilicon layer 38 as top plate of the capacitor are sequentially formed by standard integrated circuit processing procedure. The cup shape cylindrical capacitor for high density DRAM applications is finally accomplished. The capacitor dielectric layer 36 is usually using nitride/oxide (NO) doublelayer or oxide/nitride/oxide (ONO) triplelayer or even tantalum oxide (Ta₂O₅) material. The thickness of the capacitor dielectric layer 36 is about 20 to 150 Angstroms. The third polysilicon layer is deposited by the same method of the first polysilicon as described before. The thickness of the third polysilicon layer 38 is about 1000 to 2000 Angstroms.
While the invention has been particularly shown and described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the present invention. [0039]

Claims

What we claimed is:

1. A method of fabricating at least one cup-shape capacitor of a DRAM cell, said method comprising the steps of:

(a) forming isolation regions and MOSFET structures on a silicon substrate, wherein said MOSFET comprises of gate oxide, gate electrode and drain/source regions;

(b) continuously forming a first dielectric and a second dielectric layers overlaying the surface of said silicon substrate;

(c) partially etching said first dielectric and said second dielectric layers to open cell contact windows for said source regions of said MOSFET;

(d) forming a first polysilicon layer overlaying said second dielectric layer and filling into said cell contact windows;

(e) forming a third dielectric layer overlaying said first polysilicon layer, and defining third dielectric crowns;

(f) depositing a second polysilicon layer overlaying said first polysilicon layer and said third dielectric crowns;

(g) anisotropically etching said second polysilicon layer to construct the storage node of said capacitor which consists of the remaining said first polysilicon and said second polysilicon;

(h) removing said third dielectric crowns.

(i) forming a capacitor dielectric layer overlaying said storage node of said capacitor; and

(j) forming a third polysilicon layer overlaying said capacitor dielectric layer as top electrode of said capacitor.

2. The method of

claim 1

, further comprising a step of removing the remaining of said second dielectric layer prior to the step (i) of forming a capacitor dielectric layer overlaying said storage node of said capacitor.

3. The method of

claim 1

, wherein said first dielectric layer is a material selecting from the group consisting of boronphosphosilicate glass (BPSG), natural silicate glass (NSG) and Tetra-Ethyl-Ortho Silicate (TEOS).

4. The method of

claim 1

, wherein said second dielectric layer is a material selecting from the group consisting of nitride (SiN_x) and oxynitride (SiON).

5. The method of

claim 1

, wherein said second dielectric layer has a thickness of 200 to 1000 Angstroms.

6. The method of

claim 1

, wherein said third dielectric layer is a material selecting from the group consisting of BPSG, NSG, phosphosilicate glass (PSG) and spin on glass (SOG).

7. The method of

claim 1

, wherein said third dielectric layer has a thickness of 4000 to 10000 Angstroms.

8. The method of

claim 1

, wherein said capacitor dielectric layer is a material selecting from the group consisting of nitride/oxide (NO) doublelayer, oxide/nitride/oxide (ONO) triplelayer and tantalum oxide (Ta₂O₅).

9. The method of

claim 1

, wherein said capacitor dielectric layer has a thickness of 20 to 150 Angstroms.

10. The method of

claim 1

, wherein said third polysilicon layer has a thickness of 1000 to 2000 Angstroms.

11. A method of forming cup shape capacitor structure, said method comprising the steps of:

(a) continuously forming a first dielectric and a second dielectric layers on a silicon substrate;

(b) partially etching said first dielectric and said second dielectric layers to open contact windows;

(c) forming a first polysilicon layer overlaying said second dielectric layer and filling into said contact windows;

(d) forming a third dielectric layer overlaying said first polysilicon layer, and defining third dielectric crowns;

(e) depositing a second polysilicon layer overlaying said first polysilicon layer and said third dielectric crowns;

(f) anisotropically etching said second polysilicon layer, the storage node of said capacitor which is consist of the remaining said first polysilicon and said second polysilicon is constructed;

(g) removing said third dielectric crowns;

(h) forming a capacitor dielectric layer overlaying said storage node of said capacitor; and

(i) forming a third polysilicon layer overlaying said capacitor dielectric layer as top electrode of said capacitor.

12. The method of

claim 11

, further comprising a step of removing the remaining of said second dielectric layer prior to the step (h) of forming a capacitor dielectric layer overlaying said storage node of said capacitor.

13. The method of

claim 11

, wherein said first dielectric layer is a material selecting from the group consisting of BPSG, NSG and TEOS.

14. The method of

claim 11

, wherein said second dielectric layer is a material selecting from the group consisting of nitride and oxynitride.

15. The method of

claim 11

16. The method of

claim 11

, wherein said third dielectric layer is a material selecting from the group consisting of BPSG, NSG, PSG and SOG.

17. The method of

claim 11

18. The method of

claim 1

, wherein said capacitor dielectric layer is a material selecting from the group consisting of NO, ONO and tantalum oxide (Ta₂O₅).

19. The method of

claim 11

20. The method of

claim 11