US20010030544A1

US20010030544A1 - Capacitance position transducer

Info

Publication number: US20010030544A1
Application number: US09/457,670
Authority: US
Inventors: Edward Wilson; Colin Moore
Original assignee: British Aerospace PLC
Current assignee: BAE Systems PLC
Priority date: 1998-07-22
Filing date: 1999-12-09
Publication date: 2001-10-18
Anticipated expiration: 2019-07-22
Also published as: EP1099096A1; JP2002521655A; US6346818B2; AU5055899A; GB9815826D0; WO2000005552A1

Abstract

A non-contacting capacitive position transducer comprises a stator substrate carrying two electrically conducting inverted wedge regions 14,16 whose width varies inversely in a sensing direction. A moveable pick-off 20 is capacitively coupled to both wedges. The wedges 14,16 are driven with respective distinguishable time varying periodic waveforms, e.g. a sine wave and a cosine wave, and the pick-off voltage at 20 processed to determine the position of the pick-off in the sensing direction. Various configurations of transducer are described, including those of linear, cylindrical and disc form. The pick-off voltage is preferably transferred from the pick-off 20 back to the stator by capacitively coupling the pick-off to a suitably screened pick-off track 36 on the stator.

Description

This invention relates to capacitive position transducers and associated methods for position detection. The invention is particulary concerned with linear and rotary position transducers but is not limited to such transducers.

There is frequently a requirement in modern control systems for a positional transducer which provides a high resolution, absolute output, that is one in which the output indication is a unique expression of position. In applications where the accuracy requirements do not preclude their use, e.g. positional servo systems, potentiometers have traditionally been used, providing a readily available, cost effective solution where applicable.

However potentiometers do have several shortcomings. There is an inherent wear-out mechanism between the wiper and the resistive element which will ultimately result in failure of the device. They are prone to creating wiper noise, particularly under high rates of movement, and noise performance tends to deteriorate with life; this is a particular problem in high gain servo systems where the noise can interfere with correct system operation. Frequently the need is to monitor a linear motion and, whilst some linear travel potentiometers are available, these are almost invariably commercial parts unsuitable for anything other than consumer type applications. The application of a rotary potentiometer to such a requirement would therefore necessitate some kind of motional translation—a rack and pinion for example.

There is therefore a need for a potentiometer which obviates at least some of the above shortcomings. We have therefore designed a new form of transducer which does not require electrical physical contact between the mover and the stator and which provides an absolute output with high resolution, with an accuracy at least comparable with that of conventional servo-grade potentiometers.

Accordingly, in one aspect, this invention provides a capacitive position transducer comprising:

a relatively fixed substrate including two spaced electrically conductive regions;

a mover element comprising a common electrical pick-off means capacitively coupled to both of said electrically conductive regions and mounted for movement relative to said substrate in a sensing direction, the transverse extent of at least one of said electrically conductive regions varying with the position of said mover element in the sensing direction,

drive means for supplying respective different periodic time varying voltages to said electrically conductive regions, and

processing means for processing the electrical signal received by said pick-off means to determine the position of said mover element,

wherein said drive means applies respective different sinusoidal voltages to said electrically conductive regions, said sinusoidal voltages having a relative phase difference.

Preferably, the processing means determines at least one of the phase and magnitude of the electrical signal received by the pick-off means, to determine the relative position of the mover element.

In another aspect, this invention provides a capacitive position transducer comprising:

a mover element comprising a common electrical pick-off means capacitively coupled to both of said electrically conductive regions, and mounted for movement in a sensing direction, the electrically conductive regions being arranged such that at least one of the respective capacitances between said pick-off means and the electrically conductive regions varies with the position of aid mover element in said sensing direction, and

drive means for applying respective voltages to each of said electrically conductive regions, and

position determining means for monitoring the position of said mover element relative to said substrate,

wherein said drive means supplies respective different sinusoidal voltages to said electrically conductive regions, said sinusoidal voltages having a relative phase difference.

In yet another aspect, this invention provides a method of position detection which comprises providing a relatively fixed substrate including two spaced electrically conducting regions and a pick-off means capacitively coupled to both of said regions, said pick-off being connected to a mover element for movement in a sensing direction, at least one of the respective capacitances between the pick-off and the electrically conductive regions varying with position in said sensing direction, the method further comprising monitoring at least one of said capacitances thereby to determine the position of said mover element, and

applying respective different sinusoidal voltages to said electrically conductive regions, said sinusoidal voltages having a relative phase difference.

Preferably, both of said electrically conducting regions vary in transverse extent in said sensing direction whereby the capacitance between each electrically conductive region and the pick-off means varies in said sensing direction.

Preferably, said electrically conductive regions vary linearly and inversely in transverse extent in said sensing direction. Thus, in one arrangement the electrically conductive regions may be arranged as two triangles in inverted relationship together defining a generally rectangular plan shape.

Alternatively, the electrically conductive regions may each vary in said sensing direction with a profile selected in accordance with the drive voltages to said electrically conducting regions, at least partially to compensate for non-linearities in the output signal.

The pick-off means may be connected directly to said processing means e.g. via an electrically conducting wire or the like. Alternatively, to avoid the need to provide a moveable electrically conducting element such as a wire or track, the pick-off means may be capacitively coupled to a track means which extends alongside the path of movement of said mover element, with suitable screening, so that the output signal may be taken from the track means.

The substrate may take any of a number of different forms. For example, the substrate may be generally flat or planar. Here the mover element may be mounted for linear movement in a straight line relative to said substrate, analogous to a conventional linear potentiometer. Alternatively, said mover element may be mounted for rotary movement about a rotary axis and the substrate may be of generally disc or annular form. In this instance the transducer is akin to a rotary potentiometer.

Alternatively, said substrate may comprise a cylindrical or part-cylindrical surface and said mover element may be disposed adjacent said cylindrical a part-cylindrical surface and mounted for movement about an axis generally coaxial with the principal axis of said cylindrical or part-cylindrical surface.

The drive means may apply various forms of drive voltages to the electrically conductive regions such that the combined signal at the electrical pick-off means may be processed to determine the position of the mover element. Thus the drive means may apply respective different sinusoidal voltages. The sinusoidal voltages are preferably of substantially equal amplitude. Conveniently, said sinusoidal voltages have a relative phase difference of 90°, effectively to provide respective sin and cosine waveforms. However other phase differences may also be used.

The processing means preferably determines at least one of the relative phase and magnitude of the electrical signal received by said pick-off means, to determine the position of said mover element relative to a fixed datum position.

Where the electrically conductive regions vary linearly and inversely in axial extent in said sensing direction, the drive means may apply respective sinusoidal waveforms of the form V.Sin(ωt) and V.Cos(ωt) and the relative position of the mover element may be determined from the signal V _oat said pick-off, wherein

V _o =K.V.Sin (ωt+θ);

θ=arctan (α/1−α);

K={square root}{square root over ( )}(α²+(1−α);

and α is the distance of the mover element from the highest capacitance part of the electrically conducting region driven by said V.Sin(ωt) waveform expressed as a proportion of the maximum range of sensing movement of said mover element.

It will be noted that α and ω vary non-linearly; this may be overcome by modifying the profiles of the electrically conductive regions to reduce or remove the non-linearity so that the phase difference (ω) varies linearly with the position (α) of the mover element.

Alternatively, the non linearity may be overcome by signal processing. Thus said processing means may be operable to multiply said output voltage V _oat said pick-off means with a D.C.-nulling periodic time varying voltage at the same frequency as said output voltage, and adjusting the relative phase of said D.C.-nulling periodic time varying voltage to null the D.C. term of said product, and thereby determine the position of said mover element relative to a fixed datum.

Preferably said D.C.-nulling periodic voltage is generated by multiplying the drive voltages applied to said electrically conducting regions. Thus said processing means may include generating means for producing said D.C.-nulling periodic voltage, said generating means including means for multiplying the time varying voltages (V.Sin(ωt); V.Cos(ωt)) supplied to said electrically conductive regions with respective inversely related voltages, (V _ref−V_con) and (V_con), means for summing the product of said multiplying means and phase shifting the sum to obtain said D.C.-nulling periodic voltage.

Preferably said processing means includes integrator means for receiving the product of said pick-off output voltage V _owith the D.C.-nulling voltage V′_o, and adjusting said inversely related voltages, (V_ref−V_con) and (V_con) to null said D.C. term.

In yet another aspect, there is provided a capacitive position transducer comprising:

a relatively fixed substrate including two spaced electrically conductive regions varying lineally and inversely in transverse extent;

drive means for supplying respective different periodic time varying voltages to said electrical conductive regions, and

processing means operable to multiply an output voltage at said pick-off means with a DC nulling periodic voltage at the same frequency as said output voltage and to adjust the relative phases of said DC nulling periodic time varying voltage to null the DC term of said product, and thereby to determine the relative position of said mover element.

Whilst the invention has been described above, it extends to any inventive combination of the features set out above or in the following description.

The invention may be performed in various ways and, by way of example only a specific embodiment and various modifications thereof now will be described in detail, reference being made to the accompanying drawings in which: [0040]
FIG. 1 is a schematic view of a first non-contacting capacitive transducer in accordance with the invention; [0041]
FIG. 2 shows an equivalent electrical circuit of the embodiment of FIG. 1 and its output circuit, and FIG. 3 is a diagram of an electrical circuit for processing the output received by the pick-off to provide an output signal which varies substantially linearly with the position of the mover element.[0042]
Referring initially to FIG. 1, a first embodiment of [0043] position transducer 10 comprises a stator substrate 12 of flat planar form on which are deposited two triangular sections or tracks 14, 16 of copper, spaced by an insulating gap 18. A mover element carrying a pick-off 20 extends across the width of the substrate and is spaced above the surface thereof by a small air gap such that the pick-off is capacitively coupled to both the triangular sections 14 and 16. The two triangular sections of copper 14, 16 are driven with alternating voltage waveforms, one (14) with V.Sin(ωt) and the other (16) with V.Cos(ωt).
Referring to FIG. 2, the output from the pick-off [0044] 20 is fed to a high input impedance voltage buffer 22. The values of C1 and C2 are proportional to the areas of the tracks 14, 16 under the pick-off 20, so that with the pick-off at either end, one capacitor will be maximised whilst the other is reduced to zero. Thus at the Sin end,
C1=Cmax, C2=0, and V[0045] _o=V.Sin(ωt)
and at the Cos end, [0046]
C1=0, C2=Cmax and V[0047] _o=V.Cos(ωt)
At some point in between the output voltage, V[0048] _o, is given by:
V _o =V.Sin (ωt)/(1+C1/C2)+V.Cos(ωt)/(1+C2/C1)
Now C1=Cmax. (1−α) and C2=Cmax.α, (where α is the ratio of the pick-off's distance from the sin end divided by the overall length of the tracks ([0049] 14, 16), and substituting for C1 and C2 gives:
V _o =V.Sin(ωt).(1−α)+V.Cos(ωt).α (Equation 1)
Now V.Sin(ωt+θ)=V.Sin(ωt).Cos(θ)+V.Cos(ωt).Sin(θ) [0050]
If (1−α)≡Cos (θ) and α≡Sin(θ), then: [0051]
V _o =K.V.Sin(ω+θ) (Equation 2)
where [0052]
θ=arcrtan (α/(1−α)) (Equation 3)
K=(1−α)/Cos(θ)=α/Sin(θ) (Equation 4)
and, by vector analysis [0053]
K={square root}{square root over ( )}(α²+(1−α)²)
It can be seen from Equations 2, 3, and 4 that the output voltage, V[0054] _o, will be a Sin wave of varying phase and amplitude. At the mid point, (α=0.5), V_owill be 1/{square root}2 of the value at either end, and θ will be 45°. Between the mid point and either end however the relationship between θ and α becomes non-linear. Thus, at a quarter distance from the Sin end, (α=0.25), θ=arctan (⅓)=18.435°, and not 22.5° as would be the case were the relationship linear.
This non-linearity may be removed by modifying the profile of the facing edges of [0055] tracks 14 and 16 but we describe below an alternative approach which multiplies the output voltage, V_oby a cosine term at the same frequency to obtain a D.C. term. Thus:
2.Sin(A).Cos(B)=Sin(A+B)+SIN (A−B),
substituting A=(ω[0056] t+θ) and B=(ωt+φ), the following expression results:
2.sin (ωt+θ).Cos(ωt+φ)=Sin(2ωt+θ+φ)+Sin(θ−φ) (Equation 5)
Sin(2ωt+θ+φ) is an alternating term at twice the modulation frequency (2ωt) and can be removed with a low-pass filter. The remaining term Sin(θ−φ) is a D.C. term which becomes zero when θ=φ. [0057]
Therefore, if we multiply the Sin(ωt+θ) term from the output voltage of Equation (2) by Cos(ωt+θ) and adjust the result for zero D.C., then θ=φ. Knowing this, a value for φ can be obtained so that θ can be determined; a (the proportional distance of the slider along the track) is determined from Equation (3), to give a read out of the position of the slider. [0058]
Referring to FIG. 3, the terms Cos(ωt+φ) may be derived as follows: [0059]
Two [0060] multipliers 24, 26 are used to multiply the V.Sin(ωt) and V.Cos(ωt) waveforms by (V_ref−V_con) and (V_con) respectively, where V_refis a reference voltage and V_conis a control voltage derived from the output of an integrator 28 with the range 0→V_ref. The outputs of the multipliers 24, 26, are added in a summing amplifier 30 and the output is phase-shifted by a feedback capacitor 32.
Were it not for the phase shift, the output of the summing [0061] amplifier 20 would be of the form:
V _o ′=K′.((V _ref −V _con).V.Sin(ωt))+(V _con .V.Cos(ωt))
Where K′ is the gain through the summing amplifier. This reduces to [0062]
V _o ′=K″.(V.Sin(ωt).(1−β)+Cos (ωt).β) (Equation 6)
where β=V[0063] _con/V_refand K″ =K′.V_ref
The similarity to Equation (1) will be noted. [0064]
This in turn reduces to [0065]
V _o =K′″.V.Sin(ωt+φ) (Equation 7)
where [0066]
φ=arctan (β/(1−β)) (Equation 8)
K′″=K″.{square root}{square root over ( )}(β ²+(1−β)²)
By introducing the 90° phase shift in the summing amplifier Equation (7) becomes: [0067]
V _o ′=K′″.V.Cos(ωt+φ) (Equation 9)
which is the required term for Equation (5). [0068]
A [0069] third multiplier 33 takes these two terms and multiplies them to generate the terms to the right of the equality in Equation (5) and the output of this multiplier consists of an A.C. term at 2.ω plus a D.C. term. The alternating component is removed by a low-pass filter 34 and the integrator 28 adjusts V_conuntil the D.C. term becomes zero.
Because the forms of Equations (1) and (6) are the same, the non-linearity that exists in the relationship between α and θ is exactly cancelled by the same relationship between β and φ and β is therefore linearly related to α. [0070]
Furthermore, since it is β and not V[0071] _conwhich is important, V_conwill be scaled by V_ref, thereby giving an output which is potentiometric in nature. Throughout the circuit actual signal values are unimportant, so long as signal levels are sufficient to maintain adequate signal to noise, and it is purely the relative phases of the signal which matters.
Furthermore it can be shown that, as opposed to excitation waveforms of Sin(ωt) and Cos(ωt), (which is actually the same as Sin(ωt+90°)), Sin(ωt) and Sin(ωt+ε) could be used, where E is some phase angle other than 90°, with no change in performance other than, in the limit, a degradation of signal to noise. (E tending to zero for example). [0072]
This means that the circuit will be tolerant of variations in the phase/frequency of the drive waveforms and variations of pick-off voltage due to discrepancies in the size of the air gap. Likewise, so long as the relative amplitudes of the two drive waveforms remain constant, the actual levels are not important. [0073]
In the embodiment described above with reference to FIGS. 1, 2, and [0074] 3, the voltage from the pick-off 20 is passed by a trailing wire to the voltage buffer amplifier 22. In particular applications this may not be desirable and so in an alternative arrangement shown in dotted lines in FIG. 1, a third track or rail 36 is provided alongside the substrate 12 and the pick-off 20 is extended at 38 so that it is capacitively coupled to the track 36, thus allowing the signal to be picked off from a static position. To prevent the track 36 “seeing” the signal on the adjacent track section 14, suitable screening is provided including the provision of an electrical barrier 40 between the track 36 and the track 14.
As a further modification, instead of being flat planar, the copper tracks, [0075] 14, 16 can be made circular, either in the form of a cylinder or a disc, of proportions suitable for embodiment in a traditional potentiometer housing. It should be noted that the tracks need not be separated by a straight diagonal gap but instead the gap may be of sinusoidal form, so that the output voltage from the buffer amplifier 22 is linearly related to the position of the pick-off. In this instance, the position is determined by observing the value of V_conrelative to V_refin a similar way in which the position indicated in a conventional contacting potentiometer is measured by the wiper voltage relative to the voltage across the whole of the track.
It should also be appreciated that several similar transducers may be stacked together one above the other with a common actuator, e.g. a common axle or rotor shaft to which an appropriate number of pick-off rotors are attached. [0076]
In each of these embodiments, the excitation voltage for the potentiometer would be used to power the electronics, incorporated inside a housing in the form of a low-power analogue ASIC (application specific integrated circuit), and the output would be a D.C. voltage which behaved exactly like a wiper voltage, ranging from zero to reference voltage, but without the attendant potentiometer problems outlined at the start. [0077]
Alternatively, a 5-terminal approach could be adopted whereby two additional terminals provide power to the electronics whilst the other three terminals simulate a potentiometer, two of the three being used for the potentiometer reference and the third being the wiper output voltage. [0078]
Whilst in the above embodiment the drive waveforms have been sine waves, tests have shown that triangular waveforms give results comparable to those using sine waves. Also waveforms which are not pure sine waves, i.e. those containing some harmonic content or distortion do not within quite wide limits, appear to make any significant difference to the results obtained, provided they contain incremental phase information, from which a position dependent phase difference may be obtained. [0079]
Referring now to FIGS. [0080] 4 to 7, a further embodiment of non-contacting capacitative transducer will now described. In this embodiment, a pattern of copper tracks making up the wedges 14,16 and the pick-off strip 40 are provided on a thin, flexible, insulating substrate 42, for example by etching, plating, deposition, or other suitable accurate photographic method or the like. The substrate 42 is then folded round to form a cylinder as shown in FIG. 5. A centre shaft 44 carrying a first wedge pick-off 46 and a second cylindrical pick-off 48 electrically connected thereto, is mounted coaxially within the cylinder for rotation about the cylindrical or sensing axis. As seen more clearly in FIGS. 6 and 7, the wedge pick-off 46 is of axial length equivalent to the maximum width of each wedge 14,16. The cylindrical pick-off 48 is capacitively coupled to the pick-off strip 40. The substrate 42 is housed within a metal cylindrical housing 50 which includes a disc-shaped screen 52 which screens the upper and lower sections of the substrate. The electric connections to the wedges 14, 16 and the pick-off strip 40 are made through the housing walls, with suitable layers of screening to prevent coupling between the wedges and the pick-off strip 40.
Referring now to FIGS. 8 and 9, in this embodiment the [0081] wedges 14 and 16 are formed on a first substrate disc 54 with the gap 18 therebetween describing a spiral, and a radial insulating gap 55.
The [0082] first substrate disc 54 is mounted on one side of a support disc 56 which includes a metallic screen element 58 in its mid region. The lower surface of the support disc 56 carries a second substrate 60 which is a plane pick-off disc. A pick-off shaft 52 is coaxially mounted with respect to the support disc 56 and carries a radially extending phase pick-off 64 and a coupling disc 66 electrically connected to the pick-off 64 through the shaft 62.
Electrical connections are made to the [0083] wedges 16, 18 and the pick-off substrate 60 via the support disc 56. As previously, the rotary position of the shaft 62 determines the proportions of the widths of the wedges 16 and 18 capacitively coupled to the phase pick-off 64. The wedges 16 and 18 are driven by respective sinusoidal voltages or other suitable periodic time-varying waveforms, and the resultant voltage picked up by the pick-off 64 processed to determine the angular position of the shaft.

Claims

1. A capacitive position transducer comprising:

a mover element comprising a common electrical pick-off means capacitively coupled to both of said electrically conductive regions and mounted for movement relative to said substrate in a sensing direction,

the transverse extent of at least one of said electrically conductive regions varying with the position of said mover element in the sensing direction,

2. A capacitive position transducer according to

claim 1

, wherein said processing means determines at least one of the phase and magnitude of the electrical signal received by said pick-off means, to determine the relative position of said mover element.

3. A capacitive position transducer according to

claim 1

or

claim 2

, wherein both of said electrically conductive regions vary in transverse extent in said sensing direction.

4. A capacitive position transducer according to

claim 3

, wherein said electrically conductive regions vary linearly and inversely in transverse extent in said sensing direction.

5. A capacitive position transducer according to

claim 3

, wherein said electrically conductive regions each vary with a profile selected in accordance with said periodic time-varying voltages at least partially to compensate for non-linearities in the signal processed by said processing means.

6. A capacitive position transducer according to any of the preceding claims, wherein said pick-off means is connected directly to said processing means.

7. A capacitive position transducer according to any of

claims 1

to

5

, wherein said pick-off means is capacitively coupled to a rail means or track means extending adjacent the path of movement of said mover element.

8. A capacitive position transducer according to any of the preceding claims wherein said substrate is generally flat planar.

9. A capacitive position transducer according to any of the preceding claims, wherein said mover element is mounted for linear movement in a straight line relative to said substrate.

10. A capacitive position transducer according to any of

claims 1

to

8

, wherein said mover element is mounted for rotary movement about a rotary axis.

11. A capacitive position transducer according to any of the preceding claims, wherein said electrically conductive regions are disposed side by side on one face of said substrate together to define a shape of generally constant combined width in the direction transverse to the sensing direction.

12. A capacitive position transducer according to any of

claims 1

to

7

, wherein said substrate comprises a cylindrical or part cylindrical surface and said mover element is disposed adjacent said cylindrical or part-cylindrical surface and mounted for movement about an axis generally coaxial with the principal axis of said cylindrical or part-cylindrical surface.

13. A capacitive position transducer according to any of the preceding claims, wherein said sinusoidal voltages are of substantially equal amplitude.

14. A capacitive position transducer according to

claim 13

, wherein said sinusoidal voltages have a relative phase difference of 90°, to provide respective sine and cosine drive waveforms.

15. A capacitive position transducer according to

claim 1

, wherein said drive means applies to the electrically conductive regions respective sinusoidal waveforms of the form V.sin(ωt) and V.cos(ωt), and the relative position of the mover element is determined from the signal V_oat said pick-off, wherein

V _o =K.V.Sin (ωt+θ); θ=arctan (α/1−α); K={square root}{square root over ( )}(α²+(1−α)²)

16. A capacitive position transducer according to

claim 15

, wherein said processing means is operable to multiply said output voltage V_oat said pick-off means with a D.C.-nulling periodic voltage at the same frequency as said output voltage and to adjust the relative phase of said D.C.-nulling periodic time varying voltage to null the D.C. term of said product, and thereby to determine the relative position of said mover element.

17. A capacitive position transducer according to

claim 16

, wherein said processing means includes generating means for producing said D.C.-nulling periodic voltage, said generating means including means for multiplying the time varying voltages (V.sin(ωt); V.cos (ωt)) supplied to said electrically conductive regions with respective inversely related voltages ((V_ref−V_con) and V_con), means for summing the products of said multiplying means and phase-shifting the sum to obtain said D.C.-nulling periodic voltage.

18. A capacitive position transducer according to

claim 17

, wherein said processing means includes integrator means for receiving the product of said pick-off output voltage V_owith the D.C.-nulling voltage, and adjusting said inversely related voltages ((V_ref−V_con) and V_con) to null said D.C. term.

19. A capacitive position transducer comprising:

a mover element comprising a common electrical pick-off means capacitively coupled to both of said electrically conductive regions, and mounted for movement in a sensing direction, the electrically conductive regions being arranged such that at least one of the respective capacitances between said pick-off means and the electrically conductive regions varies with the position of aid mover element in said sensing direction,

20. A method of position detection which comprises providing a relatively fixed substrate including two spaced electrically conducting regions and a pick-off means capacitively coupled to both of said regions, said pick-off means being connected to a mover element for movement in a sensing direction, at least one of respective capacitances between the pick-off and the electrically conductive regions varying with position in said sensing direction, the method further comprising applying respective different sinusoidal voltages to said electrically conductive regions, said sinusoidal voltages having a relative phase difference, and

monitoring at least one of said capacitances thereby to determine the position of said mover element.

21. A capacitive position transducer comprising:

a relatively fixed substrate including two spaced electrically conductive regions varying linearly and inversely in transverse extent;

22. A capacitive position transducer according to

claim 21

and a is the distance of the mover element from the highest capacitance part of the electrically conducting region driven by said V.Sin(ωt) waveform expressed as a proportion of the maximum range of sensing movement of said mover element.

23. A capacitive transducer according to

claim 21

or

claim 22

24. A capacitive transducer according to

claim 23

25. A capacitive position transducer substantially as hereinbefore described with reference to, and as illustrated in, any of the accompanying drawings.

26. A method of position detection substantially as hereinbefore described with reference to any of the accompanying drawings.