US20010011860A1 - Piezoelectric motor - Google Patents
Piezoelectric motor Download PDFInfo
- Publication number
- US20010011860A1 US20010011860A1 US09/291,555 US29155599A US2001011860A1 US 20010011860 A1 US20010011860 A1 US 20010011860A1 US 29155599 A US29155599 A US 29155599A US 2001011860 A1 US2001011860 A1 US 2001011860A1
- Authority
- US
- United States
- Prior art keywords
- piezoelectric element
- motor
- plane
- vibration
- restraining elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000452 restraining effect Effects 0.000 claims abstract description 40
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000004020 conductor Substances 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 238000003325 tomography Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
- H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
Definitions
- the invention relates to a motor including a cuboid piezoelectric element as defined in the opening part of claim 1 .
- Such a motor is known from, for example, EP-A 755 054.
- Such a motor is used in, for example, CD drives for driving a shaft on which an arm carrying a read/write head is mounted, which arm should be moved over the CD in a radial direction.
- the piezoelectric element which takes the form of a rectangular plate, has an actuating member by means of which a force can be transmitted to the shaft in an actuating direction, as a result of which the shaft is driven.
- the piezoelectric element is constructed in such a manner and is energized in such a way that it vibrates in a plane of vibration in which also the actuating direction lies and that the actuating member moves in accordance with an elliptical curve.
- the piezoelectric element is mounted by means of four restraining elements, two rigid restraining elements acting upon a first bounding surface of the piezoelectric element, which surface extends perpendicularly to the plane of vibration and parallel to the actuating direction, and two resilient restraining elements acting on the opposite bounding surface.
- the resilient restraining elements provide a preload between the piezoelectric element and a motor housing in order to ensure that the piezoelectric element, which is comparatively thin in a direction perpendicular to the plane of vibration, cannot perform a rotation about an axis perpendicular or parallel to the actuating direction and thereby change its position.
- the resilient restraining elements also give rise to a frictional force between all the restraining elements and the piezoelectric element, which force reduces the quality factor and hence the power of the motor.
- restraining elements can be disposed in the plane of vibration, also outside the plane of vibration (for example in a plane perpendicular to the plane of vibration or in a plane which is inclined with respect to the plane of vibration), or also in a plurality of such planes.
- Essential is the property of the restraining elements that restraining is effected with a maximal slidability and without a preloading force being applied in a direction perpendicular to the actuating direction.
- restraining elements are defined in the claims 2 to 5 , a particularly advantageous form being defined in claim 2 .
- the restraining elements used in the known motor have been dispensed with completely and instead of these restraining elements are arranged on the bounding surfaces of the piezoelectric element which extend parallel to the plane of vibration, which restraining elements specifically prevent the piezoelectric element from being rotated about an axis which extends perpendicularly or parallel to the actuating direction in the plane of vibration.
- Such a motor can be used for the purpose of moving a movable element in a direction perpendicular to the actuating direction or to drive an element which is rotatable about an axis of rotation which is oriented perpendicularly to the plane of vibration.
- Possible uses are for example in drive mechanisms for the read and/or write unit, particularly in optical drives such as CD or DVD drives, in which the optical unit should be moved over the optical data carrier in a radial direction with a maximal speed and with a minimal amount of space and power being required for this.
- Other possible uses are all situations where magnetic fields produced by conventional electric motors may affect the correct operation of an apparatus, as for example in medical uses (for example in nuclear spin tomography), or where such magnetic fields are undesirable for other reasons, as for example in shavers.
- FIG. 1A shows a known motor
- FIG. 1B shows a motor in accordance with the invention
- FIGS. 1C, 1D show the waveforms of the waves occurring in a motor in accordance with the invention
- FIG. 2 shows an embodiment of the motor in accordance with the invention
- FIG. 3 shows a CD drive including a motor in accordance with the invention
- FIG. 4 shows another CD drive including a motor in accordance with the invention.
- FIG. 5 shows a third CD drive including a motor in accordance with the invention.
- Two resilient restraining elements 4 , 5 are interposed between the housing 8 and the bounding surface 15 of the piezoelectric element 1 and produce a preloading force in the y direction.
- Two rigid restraining elements 6 , 7 are interposed between the housing 8 and the opposite bounding surface 16 .
- the upper surface 17 of the piezoelectric element 1 carries four planar control electrodes 11 , 12 , 13 , 14 and the opposite lower surface of the piezoelectric element 1 carries a common reference electrode (not shown).
- the direction of polarization of the piezoelectric element 1 underneath the control electrodes 11 , 12 , 13 , 14 is the same all over.
- the piezo electric element 1 is driven via the control electrodes 11 , 12 , 13 , 14 in such a manner that the piezoelectric element 1 vibrates in the plane of vibration (x/y plane), the vibration being a superposition of two orthogonal waves (in the x and the y direction, respectively).
- the resonant frequencies of the two orthogonal waves can be adjusted in such a manner that both waves are excited with adequate amplitudes and with the desired phase relationship and that the actuating member 2 moves for example in accordance with a curve in the x/y plane, particularly in accordance with an elliptical curve E whose major axis forms an angle of, for example, 30° relative to the x axis, and thus moves the element 19 in the y direction by abutment against the element 19 .
- FIG. 1B shows a motor in accordance with the invention which, instead of the restraining elements 4 , 5 , 6 , 7 , comprises rigid restraining elements 20 , 21 , 22 , 23 which extend in a z direction. These elements merely restrain the piezoelectric element 1 in the z direction but without preloading forces being applied to this piezoelectric element. However, a rotation of the piezoelectric element 1 about an axis oriented in the y direction and about an axis oriented in the x direction is inhibited, which in the known arrangement shown in FIG. 1 a was solved by preloading with the aid of the restraining elements 4 , 5 .
- FIGS. 1C and 1D represent the amplitude waveforms of the two orthogonal waves in the x and the y direction, respectively, in the case that the motor operates in the longitudinal direction x of the piezoelectric element 1 .
- FIG. 1C shows the waveform of the transverse wave
- FIG. 1D shows the waveform of the longitudinal wave.
- Superposition of the two waves yields the elliptical curve along which the actuating member 2 moves, as described above.
- the restraining elements are arranged in the vibration nodes A, i.e. at locations in the x direction where the wave has a zero point in the y direction.
- one or more additional stop elements may be provided, which limit the excursion of the piezoelectric element 1 in the y direction.
- an embodiment of the invention is possible having four restraining elements which are rigid in the y direction instead of the four restraining elements 20 , 21 , 22 , 23 which are rigid in the z direction, in which case preferably one or more stop elements are provided which limit the excursion of the piezoelectric element in the y direction.
- FIG. 2 shows a possible embodiment of the motor in accordance with the invention.
- the restraining elements 20 to 23 (of which only the elements 22 , 23 are shown) have been integrated in the housing, which comprises two housing sections 81 , 82 .
- the preloading element 3 takes the form of a rubber part inserted in the housing section 82 .
- the bounding surfaces 17 and 18 of the piezoelectric element 1 are each covered with a conductor track foil, 32 and 33 respectively, which carries the contact means 34 , 35 for establishing electrical contact with the control electrodes 11 to 14 and the reference electrode (not shown), and corresponding leads to the contact means 34 , 35 .
- the contacts 34 are also arranged in the proximity of the vibration nodes, which enables the highest values for the resonant quality to be attained.
- the contact points 34 may also be arranged substantially in the center of the piezoelectric element 1 , where the contact point 35 is also situated.
- the use of such conductor track foils 32 , 33 is simpler and cheaper than the use of wires bonded or soldered to the electrodes, which is basically also possible.
- further pressure elements 30 , 31 may be provided, which apply an adequate pressure to press the conductor track foils 32 , 33 against the piezoelectric element 1 , in order to establish stable contact.
- FIG. 3 shows the use of a motor in accordance with the invention in a CD drive.
- an arm 42 carrying a read/write head 43 , 44 should be moved over a CD 41 in a radial direction, which CD is driven by a motor 40 .
- the arm 42 is mounted on a shaft 45 which is rotatable about an axis of rotation 46 and which can be driven by a motor in accordance with the invention.
- a piezoelectric element 1 is arranged in a housing section 8 and is restrained by rigid restraining elements 20 , 21 , 22 , 23 and urged against the shaft 45 by a preloading element 3 .
- the actuating member 2 transmits a force to the shaft 45 , which is rotatable in both directions of rotation in dependence on the drive applied to the piezoelectric element 1 , as a result of which the arm is moved over the CD 41 in the desired direction.
- FIG. 4 shows a further embodiment of a CD drive including a motor 55 in accordance with the invention.
- the read/write head is situated behind a lens 50 .
- the entire read/write unit is accommodated on a slide 51 and by means of the motor 55 in accordance with the invention it is linearly moved in the radial direction of the CD 41 along two guides 52 , 53 .
- the motor 55 can be fixedly mounted in the housing of the CD drive and act on the slide 51 via the actuating member 2 and thereby move this slide.
- FIG. 5 shows a further embodiment in which the motor 55 is arranged on the slide 51 .
- the actuating member 2 acts upon a part of the housing 54 of the drive and the motor 55 and the slide 51 are moved jointly.
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
- The invention relates to a motor including a cuboid piezoelectric element as defined in the opening part of
claim 1. - Such a motor is known from, for example, EP-A 755 054. Such a motor is used in, for example, CD drives for driving a shaft on which an arm carrying a read/write head is mounted, which arm should be moved over the CD in a radial direction. The piezoelectric element, which takes the form of a rectangular plate, has an actuating member by means of which a force can be transmitted to the shaft in an actuating direction, as a result of which the shaft is driven. The piezoelectric element is constructed in such a manner and is energized in such a way that it vibrates in a plane of vibration in which also the actuating direction lies and that the actuating member moves in accordance with an elliptical curve.
- In the known motor the piezoelectric element is mounted by means of four restraining elements, two rigid restraining elements acting upon a first bounding surface of the piezoelectric element, which surface extends perpendicularly to the plane of vibration and parallel to the actuating direction, and two resilient restraining elements acting on the opposite bounding surface. The resilient restraining elements provide a preload between the piezoelectric element and a motor housing in order to ensure that the piezoelectric element, which is comparatively thin in a direction perpendicular to the plane of vibration, cannot perform a rotation about an axis perpendicular or parallel to the actuating direction and thereby change its position. However, the resilient restraining elements also give rise to a frictional force between all the restraining elements and the piezoelectric element, which force reduces the quality factor and hence the power of the motor.
- It is an object of the present invention to improve the known motor with respect to the afore-mentioned drawbacks and, particularly, to increase the efficiency.
- This object is achieved by the motor defined in
claim 1. It was recognized that the vibration quality of the piezoelectric element and, consequently, the power of such a motor can be increased in that, although the piezoelectric element is restrained, this restraint can be achieved with maximal slidability and without a preloading force being applied to the piezoelectric element in the directions perpendicular to the actuating direction. In the case of restraining with maximal slidability no frictional forces that could affect the vibration quality can occur between the piezoelectric element and the restraining elements. Thus, in accordance with the invention, restraining elements can be disposed in the plane of vibration, also outside the plane of vibration (for example in a plane perpendicular to the plane of vibration or in a plane which is inclined with respect to the plane of vibration), or also in a plurality of such planes. Essential is the property of the restraining elements that restraining is effected with a maximal slidability and without a preloading force being applied in a direction perpendicular to the actuating direction. - Advantageous forms of the restraining elements are defined in the
claims 2 to 5, a particularly advantageous form being defined inclaim 2. In the embodiment defined in the last-mentioned Claim the restraining elements used in the known motor have been dispensed with completely and instead of these restraining elements are arranged on the bounding surfaces of the piezoelectric element which extend parallel to the plane of vibration, which restraining elements specifically prevent the piezoelectric element from being rotated about an axis which extends perpendicularly or parallel to the actuating direction in the plane of vibration. - Further variants of the motor defined in
claims 6 to 8 enable the motor to be manufactured in a simpler and cheaper manner by the use of fewer and simpler-to-manufacture parts. Mounting the electrical connections on the control electrodes of the piezoelectric element can then also be simplified. - Such a motor can be used for the purpose of moving a movable element in a direction perpendicular to the actuating direction or to drive an element which is rotatable about an axis of rotation which is oriented perpendicularly to the plane of vibration. Possible uses are for example in drive mechanisms for the read and/or write unit, particularly in optical drives such as CD or DVD drives, in which the optical unit should be moved over the optical data carrier in a radial direction with a maximal speed and with a minimal amount of space and power being required for this. Other possible uses are all situations where magnetic fields produced by conventional electric motors may affect the correct operation of an apparatus, as for example in medical uses (for example in nuclear spin tomography), or where such magnetic fields are undesirable for other reasons, as for example in shavers.
- The invention will now be described in more detail with reference to the drawings. In the drawings:
- FIG. 1A shows a known motor,
- FIG. 1B shows a motor in accordance with the invention,
- FIGS. 1C, 1D show the waveforms of the waves occurring in a motor in accordance with the invention,
- FIG. 2 shows an embodiment of the motor in accordance with the invention,
- FIG. 3 shows a CD drive including a motor in accordance with the invention,
- FIG. 4 shows another CD drive including a motor in accordance with the invention, and
- FIG. 5 shows a third CD drive including a motor in accordance with the invention.
- FIG. 1A shows a known motor having a
piezoelectric element 1 which on a first boundingsurface 10 carries an actuatingmember 2 and on a second boundingsurface 9, opposite the first boundingsurface 10, carries a preloadingelement 3, for example a spring, which urges thepiezoelectric element 1 against themotor housing 8 in the actuating direction (=x direction). Tworesilient restraining elements housing 8 and the boundingsurface 15 of thepiezoelectric element 1 and produce a preloading force in the y direction. Tworigid restraining elements 6, 7 are interposed between thehousing 8 and theopposite bounding surface 16. Theupper surface 17 of thepiezoelectric element 1 carries fourplanar control electrodes piezoelectric element 1 carries a common reference electrode (not shown). The direction of polarization of thepiezoelectric element 1 underneath thecontrol electrodes electric element 1 is driven via thecontrol electrodes piezoelectric element 1 vibrates in the plane of vibration (x/y plane), the vibration being a superposition of two orthogonal waves (in the x and the y direction, respectively). By an appropriate control and by an appropriate choice of the geometry of the piezoelectric element 1 the resonant frequencies of the two orthogonal waves can be adjusted in such a manner that both waves are excited with adequate amplitudes and with the desired phase relationship and that the actuatingmember 2 moves for example in accordance with a curve in the x/y plane, particularly in accordance with an elliptical curve E whose major axis forms an angle of, for example, 30° relative to the x axis, and thus moves theelement 19 in the y direction by abutment against theelement 19. - FIG. 1B shows a motor in accordance with the invention which, instead of the
restraining elements rigid restraining elements piezoelectric element 1 in the z direction but without preloading forces being applied to this piezoelectric element. However, a rotation of thepiezoelectric element 1 about an axis oriented in the y direction and about an axis oriented in the x direction is inhibited, which in the known arrangement shown in FIG. 1a was solved by preloading with the aid of therestraining elements restraining elements restraining elements respective bounding surfaces piezoelectric element 1, because restraining is effected in a slidable fashion. As a result of this, a higher resonance quality can be achieved, so that the efficiency of the motor in accordance with the invention is distinctly higher and, if desired, the voltage required for the operation of the motor can be reduced. - FIGS. 1C and 1D represent the amplitude waveforms of the two orthogonal waves in the x and the y direction, respectively, in the case that the motor operates in the longitudinal direction x of the
piezoelectric element 1. FIG. 1C shows the waveform of the transverse wave and FIG. 1D shows the waveform of the longitudinal wave. Superposition of the two waves yields the elliptical curve along which the actuatingmember 2 moves, as described above. Both in the known motor and in the motor in accordance with the invention the restraining elements are arranged in the vibration nodes A, i.e. at locations in the x direction where the wave has a zero point in the y direction. However, during operation of the motor the position of the node in the x direction varies. In the known arrangement this movement is impeded as a result of the resilient restraint by means of therestraining elements restraining elements - In the embodiment shown in FIG. 1B, having
restraining elements piezoelectric element 1 in the y direction. As an alternative for the embodiment shown in FIG. 1B, an embodiment of the invention is possible having four restraining elements which are rigid in the y direction instead of the fourrestraining elements - FIG. 2 shows a possible embodiment of the motor in accordance with the invention. The
restraining elements 20 to 23 (of which only theelements housing sections element 3 takes the form of a rubber part inserted in thehousing section 82. The boundingsurfaces piezoelectric element 1 are each covered with a conductor track foil, 32 and 33 respectively, which carries the contact means 34, 35 for establishing electrical contact with thecontrol electrodes 11 to 14 and the reference electrode (not shown), and corresponding leads to the contact means 34, 35. Preferably, thecontacts 34 are also arranged in the proximity of the vibration nodes, which enables the highest values for the resonant quality to be attained. However, as is shown, the contact points 34 may also be arranged substantially in the center of thepiezoelectric element 1, where thecontact point 35 is also situated. The use of such conductor track foils 32, 33 is simpler and cheaper than the use of wires bonded or soldered to the electrodes, which is basically also possible. In addition,further pressure elements piezoelectric element 1, in order to establish stable contact. - FIG. 3 shows the use of a motor in accordance with the invention in a CD drive. In such drives an
arm 42 carrying a read/write head CD 41 in a radial direction, which CD is driven by amotor 40. Thearm 42 is mounted on ashaft 45 which is rotatable about an axis ofrotation 46 and which can be driven by a motor in accordance with the invention. For this purpose, apiezoelectric element 1 is arranged in ahousing section 8 and is restrained byrigid restraining elements shaft 45 by apreloading element 3. The actuatingmember 2 transmits a force to theshaft 45, which is rotatable in both directions of rotation in dependence on the drive applied to thepiezoelectric element 1, as a result of which the arm is moved over theCD 41 in the desired direction. - FIG. 4 shows a further embodiment of a CD drive including a
motor 55 in accordance with the invention. The read/write head is situated behind alens 50. The entire read/write unit is accommodated on aslide 51 and by means of themotor 55 in accordance with the invention it is linearly moved in the radial direction of theCD 41 along twoguides motor 55 can be fixedly mounted in the housing of the CD drive and act on theslide 51 via the actuatingmember 2 and thereby move this slide. - FIG. 5 shows a further embodiment in which the
motor 55 is arranged on theslide 51. The actuatingmember 2 acts upon a part of thehousing 54 of the drive and themotor 55 and theslide 51 are moved jointly.
Claims (10)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19817038 | 1998-04-17 | ||
DE19817038.6 | 1998-04-17 | ||
DE19817038A DE19817038A1 (en) | 1998-04-17 | 1998-04-17 | Piezomotor |
Publications (2)
Publication Number | Publication Date |
---|---|
US20010011860A1 true US20010011860A1 (en) | 2001-08-09 |
US6455983B2 US6455983B2 (en) | 2002-09-24 |
Family
ID=7864826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/291,555 Expired - Fee Related US6455983B2 (en) | 1998-04-17 | 1999-04-14 | Piezoelectric motor |
Country Status (4)
Country | Link |
---|---|
US (1) | US6455983B2 (en) |
EP (1) | EP0951078B1 (en) |
JP (1) | JPH11332265A (en) |
DE (2) | DE19817038A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009106412A1 (en) * | 2008-02-28 | 2009-09-03 | Physik Instrumente (Pi) Gmbh & Co. Kg | High-precision ultrasonic motor |
US20090251026A1 (en) * | 2006-10-24 | 2009-10-08 | Korea Institute Of Science And Technology | Piezo Electric Linear Motor |
US9118263B2 (en) | 2010-08-20 | 2015-08-25 | Aspre Ag | Piezo motor |
US20170141290A1 (en) * | 2015-11-13 | 2017-05-18 | Seiko Epson Corporation | Piezoelectric actuator, stacked actuator, piezoelectric motor, robot, hand, and liquid transport pump |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19961684A1 (en) * | 1999-12-21 | 2001-06-28 | Philips Corp Intellectual Pty | Actuator with a ball and piezo-electric drives |
DE10010707C2 (en) * | 2000-03-04 | 2002-01-10 | Philips Corp Intellectual Pty | Piezoelectric actuator |
CN100492693C (en) * | 2000-03-23 | 2009-05-27 | 伊利普特克谐振调节器股份公司 | Vibratory motors and methods of making and using same |
US6690101B2 (en) | 2000-03-23 | 2004-02-10 | Elliptec Resonant Actuator Ag | Vibratory motors and methods of making and using same |
FR2825680B1 (en) * | 2001-06-07 | 2003-09-26 | Sagem | PRIMARY FLIGHT CONTROL ACTUATOR WITH VIBRATION MOTOR |
DE10146703A1 (en) | 2001-09-21 | 2003-04-10 | Elliptec Resonant Actuator Ag | Piezomotor with guide |
DE10158584A1 (en) | 2001-11-29 | 2003-07-03 | Philips Intellectual Property | Piezoelectric drive device for electric shaver, has drive circuit that specifies stimulation voltage amplitude so that effective electrical power taken up does not decrease with increasing load |
NZ534848A (en) | 2002-02-06 | 2005-10-28 | Elliptec Resonant Actuator Ag | Piezoelectric motor control |
US7368853B2 (en) | 2002-04-22 | 2008-05-06 | Elliptec Resonant Actuator Aktiengesellschaft | Piezoelectric motors and methods for the production and operation thereof |
DE60307514T2 (en) * | 2002-12-10 | 2007-04-05 | Philips Intellectual Property & Standards Gmbh | Insertion and extraction device for rotatable data carrier plates |
JP2007221865A (en) | 2006-02-14 | 2007-08-30 | Seiko Epson Corp | Piezoelectric vibrator, adjusting method for natural frequency of piezoelectric vibrator, piezoelectric actuator, and electronic apparatus |
KR101542814B1 (en) * | 2011-07-19 | 2015-08-07 | 마우저-베르케 오베른도르프 마쉬넨바우 게엠베하 | Adjustment system |
JP6008077B2 (en) | 2011-12-06 | 2016-10-19 | セイコーエプソン株式会社 | Actuators, robots, electronic component transfer devices, and electronic component inspection devices |
US8796906B2 (en) | 2011-12-06 | 2014-08-05 | Seiko Epson Corporation | Piezoelectric motor, driving device, electronic component conveying device, electronic component inspection device, printing device, robot hand, and robot |
JP5849662B2 (en) * | 2011-12-06 | 2016-02-03 | セイコーエプソン株式会社 | Piezoelectric motor, drive device, electronic component inspection device, electronic component transport device, printing device, robot hand, and robot |
JP5929139B2 (en) | 2011-12-06 | 2016-06-01 | セイコーエプソン株式会社 | Actuator, robot hand, robot, electronic component transport device, electronic component inspection device, and printer |
DE102011089202B4 (en) | 2011-12-20 | 2019-03-21 | Aspre Ag | piezo drive |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3285074A (en) * | 1964-09-08 | 1966-11-15 | Cons Electrodynamics Corp | Amplitude damped transducer |
EP0511704B1 (en) * | 1991-04-29 | 1995-07-05 | Koninklijke Philips Electronics N.V. | Translation device |
IL114656A0 (en) * | 1995-07-18 | 1995-11-27 | Nanomotion Ltd | Ceramic motor |
IL113291A0 (en) * | 1995-04-06 | 1995-07-31 | Nanomotion Ltd | A multi-axis rotation device |
-
1998
- 1998-04-17 DE DE19817038A patent/DE19817038A1/en not_active Withdrawn
-
1999
- 1999-04-08 DE DE59910372T patent/DE59910372D1/en not_active Expired - Fee Related
- 1999-04-08 EP EP99201104A patent/EP0951078B1/en not_active Expired - Lifetime
- 1999-04-14 US US09/291,555 patent/US6455983B2/en not_active Expired - Fee Related
- 1999-04-14 JP JP11106393A patent/JPH11332265A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090251026A1 (en) * | 2006-10-24 | 2009-10-08 | Korea Institute Of Science And Technology | Piezo Electric Linear Motor |
US8013496B2 (en) * | 2006-10-24 | 2011-09-06 | Korea Institute Of Science And Technology | Piezo electric linear motor |
WO2009106412A1 (en) * | 2008-02-28 | 2009-09-03 | Physik Instrumente (Pi) Gmbh & Co. Kg | High-precision ultrasonic motor |
US9118263B2 (en) | 2010-08-20 | 2015-08-25 | Aspre Ag | Piezo motor |
US20170141290A1 (en) * | 2015-11-13 | 2017-05-18 | Seiko Epson Corporation | Piezoelectric actuator, stacked actuator, piezoelectric motor, robot, hand, and liquid transport pump |
CN106849741A (en) * | 2015-11-13 | 2017-06-13 | 精工爱普生株式会社 | Piezo-activator, laminated actuator, piezo-electric motor, robot and manipulator |
EP3176842A3 (en) * | 2015-11-13 | 2017-08-23 | Seiko Epson Corporation | Piezoelectric actuator, stacked actuator, piezoelectric motor, robot, hand, and liquid transport pump |
US10497854B2 (en) * | 2015-11-13 | 2019-12-03 | Seiko Epson Corporation | Piezoelectric actuator, stacked actuator, piezoelectric motor, robot, hand, and liquid transport pump |
Also Published As
Publication number | Publication date |
---|---|
EP0951078A1 (en) | 1999-10-20 |
JPH11332265A (en) | 1999-11-30 |
US6455983B2 (en) | 2002-09-24 |
DE59910372D1 (en) | 2004-10-07 |
DE19817038A1 (en) | 1999-10-21 |
EP0951078B1 (en) | 2004-09-01 |
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