US12521810B2 - Overvoltage protection for current braking switch - Google Patents
Overvoltage protection for current braking switchInfo
- Publication number
- US12521810B2 US12521810B2 US17/228,761 US202117228761A US12521810B2 US 12521810 B2 US12521810 B2 US 12521810B2 US 202117228761 A US202117228761 A US 202117228761A US 12521810 B2 US12521810 B2 US 12521810B2
- Authority
- US
- United States
- Prior art keywords
- current
- welding
- voltage
- switch
- braking switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active, expires
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K9/00—Arc welding or cutting
- B23K9/095—Monitoring or automatic control of welding parameters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K9/00—Arc welding or cutting
- B23K9/10—Other electric circuits therefor; Protective circuits; Remote controls
- B23K9/1006—Power supply
- B23K9/1012—Power supply characterised by parts of the process
- B23K9/1031—Reduction of the arc voltage beneath the arc striking value, e.g. to zero voltage, during non-welding periods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K9/00—Arc welding or cutting
- B23K9/10—Other electric circuits therefor; Protective circuits; Remote controls
- B23K9/1006—Power supply
- B23K9/1043—Power supply characterised by the electric circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/10—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material voltage responsive, i.e. varistors
- H01C7/12—Overvoltage protection resistors; Arresters
- H01C7/126—Means for protecting against excessive pressure or for disconnecting in case of failure
Definitions
- Metal Inert Gas (MIG)/Metal Active Gas (MAG) welding are welding processes where an electrode is continuously fed toward a workpiece.
- An electric power source generates a welding voltage and a welding current.
- the workpiece is heated primarily by an arc generated by the power source.
- the electrode is heated, partly by the power developed in the electrode as the weld current flows through an electrode stick out, and partly by the heat developed by the arc itself.
- the electrode stick out is a part of the welding wire between a free wire end and a contact tip, where the current transfer to the electrode takes place.
- An inert or active gas is fed through the torch and surrounds the weld pool and arc, thus keeping oxygen and any related by-products from contaminating the resulting weld.
- MIG/MAG-welding takes place in one of three basic metal transfer modes: short arc, mixed arc, and spray.
- short arc welding mode the material transport from the electrode to the workpiece takes place through short-circuiting droplets.
- the process passes into the mixed arc mode, where material transport takes place through a mixture of short-circuiting and non-short-circuiting droplets.
- the result is an unstable arc that is difficult to control with a risk for much weld spatter and weld smoke. Welding in this mode is normally avoided.
- the process enters the spray mode, where the material transport takes place through small finely dispersed droplets without short circuits.
- the spatter quantity is lower than in short arc welding.
- the heat supply to the base material in this mode is greater and the method is suitable primarily for thicker workpieces.
- portions of a welding cycle constituting a short circuit condition are followed by an arcing condition.
- a molten metal ball formed on the end of the advancing welding wire engages the molten metal pool on the workpiece causing a high current flow through the consumable welding wire and molten metal ball.
- This short circuit condition is terminated by an electrical pinch action causing the metal forming the molten ball on the wire to electrically constrict and then break away from the welding wire in an explosion type action often referred to as a “fuse” or “the fuse”.
- Controlling current flow during the short circuit portion of the welding cycle is accomplished by a power supply control circuit.
- a premonition circuit is usually provided so that a given increase in dv/dt (i.e., the change of voltage over time) signals the imminent formation of the fuse. Consequently, the welding current can be decreased to a background level, or lower, immediately before the fuse occurs. In this way, the energy of the fuse during each welding cycle is drastically reduced. This, in turn, reduces spatter at the termination of the short circuit condition.
- a switch disposed in the ordinary current path toward a welding zone, may be turned off thereby forcing the current to instead pass through a resistor which increases the voltage drop in the overall welding circuit thus causing the welding current to more quickly ramp down to a lower level.
- This switching approach may be referred to as “current braking.”
- a method includes supplying welding current to a welding zone, monitoring, during a welding current ramp down period of a given short arc welding process cycle, a voltage across a current braking switch that is in an open state and that causes a decrease in the welding current being supplied to the welding zone, and when the voltage across the current braking switch that is in the open state reaches a first predetermined voltage threshold, closing the current braking switch before a completion of the welding current ramp down period of the given short arc welding process cycle.
- the apparatus may include a power supply that is configured to supply welding current to a welding zone, and a brake switch voltage monitoring circuit configured to: monitor, during a welding current ramp down period of a given short arc welding process cycle, a voltage across a current braking switch that is in an open state and that causes a decrease in the welding current being supplied to the welding zone, and when the voltage across the current braking switch that is in the open state reaches a first predetermined voltage threshold, close the current braking switch before a completion of the welding current ramp down period of the given short arc welding process cycle.
- FIG. 1 is a schematic diagram of a welding power supply with a current braking switch controlled by a switch control circuit according to an example embodiment.
- FIG. 2 is a block diagram of the switch control circuit according to an example embodiment.
- FIG. 3 is a schematic diagram of the switch control circuit according to an example embodiment.
- FIGS. 4 A- 4 D are graphs showing various circuit parameters that do not cause the switch control circuit to close the current braking switch according to an example embodiment.
- FIGS. 5 A- 5 D are graphs showing various circuit parameters that do cause the switch control circuit to close the current braking switch according to an example embodiment.
- FIG. 6 is a flowchart depicting a series of operations for operating the switch control circuit according to an example embodiment.
- FIG. 1 is a schematic diagram of a welding power supply with a current braking switch controlled by a switch control circuit according to an example embodiment.
- the power supply 100 includes a power source 110 , a current brake, i.e., current braking switch 120 , or more simply switch 120 , and a welding zone 130 .
- Power source 110 may be inverter and/or transformer based.
- An output of the power source 110 may be rectified by a diode D 1 .
- Inductor L 1 represents internal inductance of the power supply 100 .
- Resistor R 1 and capacitor C 1 are connected in parallel with one another and in series with diode D 2 . That combination is connected in parallel with switch 120 .
- R 1 is used to discharge capacitor C 1 , but those skilled in the art will appreciate that another form of energy recovery circuit could replace resistor R 1 .
- Inductor L 2 represents inductance of welding cables 150 , 152 .
- Resistor R 2 represents the resistance of the welding zone 130 , i.e., the resistance between a consumable wire and the workpiece (not shown).
- Switch 120 may be a metal oxide semiconductor field-effect transistor (MOSFET) having drain (D), source (S) and gate (G) terminals. As shown in the figure, a switch control circuit 200 controls the gate G of switch 120 , and thus the operation (driven open or closed) of switch 120 .
- MOSFET metal oxide semiconductor field-effect transistor
- Switch 120 added in series with the welding current, and even when in an on state, adds a non-zero voltage drop, and therefore power loss to the power supply 100 . Therefore, it is advantageous that switch 120 have as low conduction loss as possible.
- the switch control circuit 200 described herein makes it possible to better optimize switch 120 in terms of both voltage rating and conduction loss. As will be apparent to those skilled in the art, implementing switch control circuit 200 along with its related advantages, may help to keep a heat sink associated with switch 120 relatively small, and may also help to keep the efficiency of the power supply 100 relatively high (as a result of less conduction loss).
- Adding extra margin in voltage rating for a semiconductor switch to handle worst case load conditions usually leads to higher voltage drop when the switch is in a conducting state, i.e., a higher voltage rating usually means higher conduction loss.
- a higher voltage rating usually means higher conduction loss.
- By using the switch control circuit 200 described herein it is possible to select a MOSFET-based transistor switch 120 with lower voltage rating, and thus better (lower) overall conduction loss. This is accomplished by protecting switch 120 from overvoltage at the worst case load conditions instead of selecting switch 120 for the highest peak voltage that might appear over the switch 120 without such overvoltage protection.
- switch control circuit 200 detects that the voltage over switch 120 has reached a trigger level or threshold voltage and, in turn, switch control circuit 200 operates to turn on switch 120 , during a given short arc current braking cycle, and thus protect switch 120 from an overvoltage condition.
- switch 120 conducts for a period of time as a result of the overvoltage protection provided by switch control circuit 200 (i.e., turning switch 120 on), and during this period of time capacitor C 1 , arranged in parallel with switch 120 , discharges whereupon switch control circuit 200 turns off switch 120 (within the same given short arc current braking cycle) until the current in the welding circuit has ramped down to a desired level.
- switch control circuit 200 i.e., turning switch 120 on
- Switch control signal generating circuit 230 receives outputs of brake switch voltage monitoring circuit 210 and capacitor voltage monitoring circuit 220 and, in turn, generates a control signal that is applied to the gate terminal of switch 120 .
- switch control circuit 200 may also be configured to be responsive to, e.g., the slope of dv/dt across R 2 in welding zone 130 to effect precisely when to initially open switch 120 to reduce spatter in the context of short arc welding. The technique described herein might be considered to therefore override the timing for opening and closing switch 120 for conventional current braking. That is, switch control circuit 200 is configured to acutely protect switch 120 from sporadic overvoltage conditions that may occur in the normal operation of the short arc welding mode, especially due to welding cable length/winding scenarios.
- FIG. 3 is a schematic diagram of one possible implementation for switch control circuit 200 according to an example embodiment.
- switch control circuit 200 can be implemented using other circuit topologies, including those that rely more on digital techniques, can be used to implement the switch control circuit 200 described herein.
- the component values identified in FIG. 3 might be selected differently to achieve a more robust output 250 , i.e., gate control signal, described below.
- brake switch voltage monitoring circuit 210 includes a first comparator U 2 whose inverting input is tied to the drain terminal D of switch 120 via several series-connected resistors R 2 , R 12 , R 13 , R 14 .
- the inverting input of comparator U 2 is also connected to the parallel connection of capacitor C 2 and resistor R 10 , which are tied to the source terminal S of switch 120 .
- the non-inverting input of comparator U 2 is connected to a voltage divider comprising resistors R 15 , R 16 , powered through pull-up resistor R 11 , which is connected to a voltage source, e.g., +15V.
- One terminal of resistor R 16 is connected to a reference voltage Vref, e.g., +5V.
- a capacitor C 3 filters the output of comparator U 2 .
- comparator U 2 is fed to the non-inverting input of comparator U 4 , and the reference voltage Vref (e.g., +5V) is supplied to the inverting input of comparator U 4 .
- Vref e.g. +5V
- the output 310 of comparator U 4 is the output of brake switch voltage monitoring circuit 210 .
- switch 120 with, e.g., a 200V maximum voltage rating, when Vds (drain to source voltage) reaches, e.g., about 180V when switch 120 is open, an output of switch control circuit 200 is configured to turn on switch 120 , thereby alleviating a potential overvoltage condition.
- Capacitor voltage monitoring circuit 220 is configured to monitor a voltage across capacitor C 1 by monitoring the voltage of the anode 190 of diode D 2 with respect to the source terminal S of switch 120 when it is conducting.
- Capacitor voltage monitoring circuit 220 includes several series-connected resistors R 5 , R 8 , R 9 connected between anode 190 and the non-inverting input of comparator U 1 .
- the reference voltage Vref (e.g., +5V) is also applied to the non-inverting input of comparator U 1 via resistor R 6 , with capacitor C 4 acting as a filter.
- Diode D 4 protects the non-inverting input of comparator U 1 from going too negative
- the inverting input of comparator U 1 is connected, via resistor R 21 , to the source terminal S of switch 120 and an output 320 of comparator U 1 , with capacitor C 5 acting as a filter at output 320 .
- Output 320 is the output of capacitor voltage monitoring circuit 220 .
- the combined signal 327 is supplied to the base of transistor Q 1 and the collector of transistor Q 2 , i.e., the base of transistor Q 1 and the collector of transistor Q 2 are tied together.
- A+15V supply is applied to the collector of transistor Q 1 via resistor R 17 and to node 325 via resistor R 18 .
- the emitters of transistor Q 1 and transistor Q 2 are tied together and fixed at ⁇ 5V.
- the base of transistor Q 2 is fed by the ordinary Brake Control Signal used to control current braking during a given short arc cycle. That is, V 4 in the brake switch control signal generating circuit 230 controls the ordinary Bake Control Signal.
- transistor Q 2 To brake (under ordinary conditions), transistor Q 2 is turned off (e.g., pulsed off), and transistor Q 1 will then receive its base current through resistor R 18 and turns on. Output 250 of switch control circuit will thus go low and turn off switch 120 , i.e., current braking is implemented. Output 250 of switch control signal generating circuit 230 is taken from the collector of transistor Q 1 and applied to the gate G of switch 120 .
- the voltage rails for the comparators U 1 , U 2 , U 4 are ⁇ 5V and +15V.
- the reference to “low” and “high” outputs of the comparators U 1 , U 2 , U 4 in the discussion below may correspond, respectively, to those voltage levels.
- the drain voltage of switch 120 is in an overvoltage state (i.e., at, or over, 180V in this example). This state forces the output of comparator U 2 low, which, in turn, forces the output of comparator U 4 low, which turns off transistor Q 1 , causing the output 250 of switch control circuit 200 to be high (in view of supply voltage +15V delivered via R 17 ), thereby turning on switch 120 and alleviating the overvoltage condition.
- the voltage on the anode 190 will be, at the time of detecting the overvoltage state, approximately ⁇ 180V.
- the output 320 of comparator U 1 is also low (just like the output 310 of comparator U 4 ), ensuring that the switch 120 will close (i.e., turn on) and alleviate the overvoltage condition.
- FIGS. 4 A- 4 D are graphs showing various circuit parameters that do not cause the switch control circuit to close the current brake switch according to an example embodiment. More specifically, and in connection with the example embodiment of FIG. 3 , at 0.3 ms, switch 120 opens and current through L 2 (i.e., welding current) decreases ( FIG. 4 A ) as a result of current braking. At the same time, voltage across capacitor C 1 (drain to anode 190 ) quickly rises ( FIG. 4 B ) as does the voltage across the switch 120 ( FIG. 4 C ). However, those voltages do not exceed the 180V threshold at which overvoltage protection of switch control circuit 200 is activated in this example.
- L 2 i.e., welding current
- switch 120 closes after the ramp down period, causing the voltage at anode 190 to quickly decrease and then ramp back up, as shown in the graph of FIG. 4 D .
- a part of a given short arc welding process cycle i.e., arc time+short circuit time, which is approximately 8-10 ms
- arc time+short circuit time which is approximately 8-10 ms
- a part of a given short arc welding process cycle may be considered to be the period from, e.g., 0.3 ms to 1.1 ms, which is a period of time between welding current delivery peaks, of about 440 A in the example of FIG. 4 A .
- a welding current ramp down period, caused by current braking, in the given short arc welding process cycle may be considered to be the period from, e.g., 0.3 ms to about 0.48 ms, i.e., the time the welding current reaches a predetermined level, such as 80 A in FIG. 4 A .
- FIGS. 5 A- 5 D are graphs showing various circuit parameters that do cause the switch control circuit 200 to close switch 120 according to an example embodiment. More specifically, and in connection with the example embodiment of FIG. 3 , at 0.3 ms, switch 120 opens for current braking, and current through L 2 (i.e., welding current) therefore decreases ( FIG. 5 A ). At the same time, voltage across capacitor C 1 (drain to anode 190 ) quickly rises ( FIG. 5 B ) as does the voltage across the switch 120 ( FIG. 5 C ). In this example, these voltages hit the 180V overprotection threshold or trigger, and thus switch control circuit 200 operates to close switch 120 and alleviate the overvoltage condition. Given the closure of switch 120 , FIGS.
- the switch control circuit 200 described herein is configured to monitor for an overvoltage condition across the current braking switch 120 and, during a current ramp down period of a given short arc welding process cycle, quickly toggle switch 120 to avoid damaging the switch 120 , yet still provide current braking functionality. Because overvoltage conditions may be rare, switch control circuit 200 can be used to help protect a lower voltage rated current braking switch than might otherwise be selected, resulting in improved efficiency for the power supply.
- FIG. 6 is a flowchart depicting a series of operations for operating the switch control circuit according to an example embodiment.
- a power supply supplies welding current to a welding zone.
- an operation monitors, during a welding current ramp down period of a given short arc welding process cycle, a voltage across a current braking switch that is in an open state and that causes a decrease in welding current being supplied to a welding zone. And, at 614 , when the voltage across the current braking switch that is in the open state reaches a first predetermined voltage threshold, an operation closes the current braking switch before a completion of the welding current ramp down period of the given short arc welding process cycle.
- a method includes supplying a welding current to a welding zone, monitoring, during a welding current ramp down period of a given short arc welding process cycle, a voltage across a current braking switch that is in an open state and that causes a decrease in the welding current being supplied to the welding zone, and when the voltage across the current braking switch that is in the open state reaches a first predetermined voltage threshold, closing the current braking switch before a completion of the welding current ramp down period of the given short arc welding process cycle.
- the first predetermined voltage threshold may be lower than a voltage rating of the current braking switch.
- the method may also include causing the current braking switch to again be in the open state before the completion of the welding current ramp down period of the given short arc welding process cycle.
- the method may also include monitoring a voltage across a clamping capacitor connected in parallel with the current braking switch, and causing the current braking switch to again be in the open state when the voltage across the clamping capacitor reaches a second predetermined voltage threshold.
- Closing and opening the current braking switch may include controlling a gate terminal of the current braking switch.
- the method may still also include determining whether a first output of a first comparator that represents the voltage across the current braking switch and a second output of a second comparator that represents the voltage across the clamping capacitor are both high, and when the first output and the second output are high generating a control signal for the gate terminal that causes the current braking switch to open.
- the method may also include closing and opening the current braking switch more than one time before the completion of the welding current ramp down period of the given short arc welding process cycle.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Arc Welding Control (AREA)
Abstract
Description
Claims (17)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17/228,761 US12521810B2 (en) | 2021-04-13 | 2021-04-13 | Overvoltage protection for current braking switch |
| EP22716526.3A EP4323140A1 (en) | 2021-04-13 | 2022-04-07 | Overvoltage protection for current braking switch |
| PCT/IB2022/053289 WO2022219471A1 (en) | 2021-04-13 | 2022-04-07 | Overvoltage protection for current braking switch |
| CN202280028483.9A CN117177832B (en) | 2021-04-13 | 2022-04-07 | Overvoltage protection of current braking switch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17/228,761 US12521810B2 (en) | 2021-04-13 | 2021-04-13 | Overvoltage protection for current braking switch |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| US20220324049A1 US20220324049A1 (en) | 2022-10-13 |
| US12521810B2 true US12521810B2 (en) | 2026-01-13 |
Family
ID=81308018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US17/228,761 Active 2043-03-24 US12521810B2 (en) | 2021-04-13 | 2021-04-13 | Overvoltage protection for current braking switch |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12521810B2 (en) |
| EP (1) | EP4323140A1 (en) |
| CN (1) | CN117177832B (en) |
| WO (1) | WO2022219471A1 (en) |
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|---|---|---|---|---|
| US4835360A (en) * | 1986-12-11 | 1989-05-30 | The Lincoln Electric Company | Method and device for controlling a short circuiting type welding system |
| US5991169A (en) | 1998-03-16 | 1999-11-23 | Lincoln Global, Inc. | Arc welding power supply |
| US7081598B2 (en) * | 2004-08-24 | 2006-07-25 | Advanced Energy Industries, Inc. | DC-DC converter with over-voltage protection circuit |
| US7265320B2 (en) | 2003-09-26 | 2007-09-04 | Tsinghua University | Method and system for reducing spatter in short-circuit transfer gas shielded arc welding |
| US7280331B2 (en) | 2005-03-01 | 2007-10-09 | Lincoln Global, Inc. | Power reconnect and voltage control |
| US20080203070A1 (en) * | 2007-02-22 | 2008-08-28 | Milan Ilic | Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch |
| US8395078B2 (en) | 2008-12-05 | 2013-03-12 | Advanced Energy Industries, Inc | Arc recovery with over-voltage protection for plasma-chamber power supplies |
| US8440936B2 (en) | 2007-05-11 | 2013-05-14 | Esab Ab | Welding power supply |
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| US20170317628A1 (en) | 2016-04-29 | 2017-11-02 | Illinois Tool Works Inc. | Systems and methods to control auxiliary power output voltage using a welding output voltage |
| US20190084073A1 (en) | 2016-12-12 | 2019-03-21 | South China University Of Technology | Sic inverted plasma cutting power supply |
| CN112091369A (en) * | 2020-09-21 | 2020-12-18 | 深圳市佳士科技股份有限公司 | Inverter welding machine protection circuit and electric welding machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4717807A (en) * | 1986-12-11 | 1988-01-05 | The Lincoln Electric Company | Method and device for controlling a short circuiting type welding system |
| BR112012030291B1 (en) * | 2010-05-28 | 2019-05-21 | Esab Ab | SHORT ARC WELDING SYSTEM |
| JP6089231B2 (en) * | 2012-06-18 | 2017-03-08 | パナソニックIpマネジメント株式会社 | Arc welding method and arc welding apparatus |
-
2021
- 2021-04-13 US US17/228,761 patent/US12521810B2/en active Active
-
2022
- 2022-04-07 WO PCT/IB2022/053289 patent/WO2022219471A1/en not_active Ceased
- 2022-04-07 CN CN202280028483.9A patent/CN117177832B/en active Active
- 2022-04-07 EP EP22716526.3A patent/EP4323140A1/en active Pending
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|---|---|---|---|---|
| US4835360A (en) * | 1986-12-11 | 1989-05-30 | The Lincoln Electric Company | Method and device for controlling a short circuiting type welding system |
| US5991169A (en) | 1998-03-16 | 1999-11-23 | Lincoln Global, Inc. | Arc welding power supply |
| US7265320B2 (en) | 2003-09-26 | 2007-09-04 | Tsinghua University | Method and system for reducing spatter in short-circuit transfer gas shielded arc welding |
| US7081598B2 (en) * | 2004-08-24 | 2006-07-25 | Advanced Energy Industries, Inc. | DC-DC converter with over-voltage protection circuit |
| US7280331B2 (en) | 2005-03-01 | 2007-10-09 | Lincoln Global, Inc. | Power reconnect and voltage control |
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| US8217299B2 (en) | 2007-02-22 | 2012-07-10 | Advanced Energy Industries, Inc. | Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch |
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| Notification of Transmittal of International Search Report and Written Opinion including International Search Report and Written Opinion for International Application No. PCT/IB2022/053289 dated Jul. 22, 2022, 14 pages. |
| Examination Report for European Patent Application No. 22716526.3 dated Feb. 2, 2025, 5 pages. |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2022219471A1 (en) | 2022-10-20 |
| US20220324049A1 (en) | 2022-10-13 |
| EP4323140A1 (en) | 2024-02-21 |
| CN117177832B (en) | 2026-06-26 |
| CN117177832A (en) | 2023-12-05 |
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