US11199363B2 - Method for removing a contamination layer by an atomic layer etching process - Google Patents
Method for removing a contamination layer by an atomic layer etching process Download PDFInfo
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- US11199363B2 US11199363B2 US16/734,650 US202016734650A US11199363B2 US 11199363 B2 US11199363 B2 US 11199363B2 US 202016734650 A US202016734650 A US 202016734650A US 11199363 B2 US11199363 B2 US 11199363B2
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D9/00—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
- F28D1/02—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid
- F28D1/03—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with plate-like or laminated conduits
- F28D1/0366—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with plate-like or laminated conduits the conduits being formed by spaced plates with inserted elements
- F28D1/0375—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with plate-like or laminated conduits the conduits being formed by spaced plates with inserted elements the plates having lateral openings therein for circulation of the heat-exchange medium from one conduit to another
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
- F28F9/02—Header boxes; End plates
- F28F9/0246—Arrangements for connecting header boxes with flow lines
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- F28F9/02—Header boxes; End plates
- F28F9/026—Header boxes; End plates with static flow control means, e.g. with means for uniformly distributing heat exchange media into conduits
- F28F9/0265—Header boxes; End plates with static flow control means, e.g. with means for uniformly distributing heat exchange media into conduits by using guiding means or impingement means inside the header box
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- F28F9/026—Header boxes; End plates with static flow control means, e.g. with means for uniformly distributing heat exchange media into conduits
- F28F9/0278—Header boxes; End plates with static flow control means, e.g. with means for uniformly distributing heat exchange media into conduits in the form of stacked distribution plates or perforated plates arranged over end plates
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
- F28F9/02—Header boxes; End plates
- F28F9/026—Header boxes; End plates with static flow control means, e.g. with means for uniformly distributing heat exchange media into conduits
- F28F9/028—Header boxes; End plates with static flow control means, e.g. with means for uniformly distributing heat exchange media into conduits by using inserts for modifying the pattern of flow inside the header box, e.g. by using flow restrictors or permeable bodies or blocks with channels
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
- F28D1/02—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid
- F28D1/03—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with plate-like or laminated conduits
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
- F28D2021/0028—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for cooling heat generating elements, e.g. for cooling electronic components or electric devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
- F28D2021/0043—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for fuel cells
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
- F28D2021/008—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for vehicles
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
- F28F9/22—Arrangements for directing heat-exchange media into successive compartments, e.g. arrangements of guide plates
- F28F2009/222—Particular guide plates, baffles or deflectors, e.g. having particular orientation relative to an elongated casing or conduit
- F28F2009/224—Longitudinal partitions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/60—Heating or cooling; Temperature control
- H01M10/62—Heating or cooling; Temperature control specially adapted for specific applications
- H01M10/625—Vehicles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/60—Heating or cooling; Temperature control
- H01M10/65—Means for temperature control structurally associated with the cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/60—Heating or cooling; Temperature control
- H01M10/66—Heat-exchange relationships between the cells and other systems, e.g. central heating systems or fuel cells
- H01M10/663—Heat-exchange relationships between the cells and other systems, e.g. central heating systems or fuel cells the system being an air-conditioner or an engine
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M2220/00—Batteries for particular applications
- H01M2220/20—Batteries in motive systems, e.g. vehicle, ship, plane
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M2250/00—Fuel cells for particular applications; Specific features of fuel cell system
- H01M2250/20—Fuel cells in motive systems, e.g. vehicle, ship, plane
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04007—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids related to heat exchange
- H01M8/04067—Heat exchange or temperature measuring elements, thermal insulation, e.g. heat pipes, heat pumps, fins
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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- Y02E60/30—Hydrogen technology
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02T90/40—Application of hydrogen technology to transportation, e.g. using fuel cells
Definitions
- the invention relates to a method for at least partially removing a contamination layer from an optical surface of an optical element that reflects EUV radiation.
- projection exposure apparatuses include an illumination system for illuminating a photomask (reticle) with light of a narrow spectral range around an operating wavelength.
- Said apparatuses furthermore include a projection-optical system for projecting a structure of the reticle onto a light-sensitive layer of a wafer using the light.
- state-of-the-art projection exposure apparatuses also known as EUV lithography apparatuses
- EUV lithography apparatuses are designed for an operating wavelength in the extreme ultraviolet (EUV) wavelength range, i.e. in a range from approx. 5 nm to approx. 20 nm. Since wavelengths in this range are strongly absorbed by just about all materials, no transmissive optical elements can typically be used, and reflective optical elements must be used instead.
- Such optical elements that reflect EUV radiation can be, for example, mirrors, reflectively operating monochromators, collimators or photomasks. Since EUV radiation is also strongly absorbed by air molecules, the beam path of the EUV radiation is arranged within a vacuum chamber.
- Optical elements that reflect EUV radiation can also be used in other optical arrangements (EUV lithography systems) that are used in connection with EUV lithography. Examples of these are metrology systems for examining exposed wafers or wafers that are to be exposed, for examining reticles, and for examining further components of EUV lithography apparatuses, such as mirrors.
- EUV lithography systems optical arrangements
- metrology systems for examining exposed wafers or wafers that are to be exposed, for examining reticles, and for examining further components of EUV lithography apparatuses, such as mirrors.
- Hydrogen is frequently used in the vacuum chambers of EUV lithography systems as a purge gas and for cleaning. Under the vacuum conditions that prevail there, a hydrogen plasma is produced in the respective vacuum chamber under the action of the EUV radiation. If hydrogen ions and/or hydrogen radicals of the plasma react with materials that are present in the vacuum environment and contain chemical elements that form volatile hydrides under vacuum conditions, so-called hydrogen-plasma-induced outgassing products are formed.
- outgassing products or the chemical elements of said outgassing products, can deposit on the optical surfaces of EUV mirrors in typically very thin contamination layers, which results in transmittance losses of the respective EUV lithography system and may even lead to imaging errors.
- the uppermost layer of a reflective coating is typically a capping layer, which serves to protect the layer(s) of the reflective coating underneath it against oxidation.
- the capping layer can be formed, for example, from ruthenium. This is critical in particular if chemical elements such as Zn, Sn, P and Si deposit on the surface of such a capping layer in the form of contamination layers, because said chemical elements cannot typically be removed again from the optical surface under the regular environment or operating conditions of an EUV lithography system, i.e. in the presence of hydrogen radicals and hydrogen ions in the environment.
- atomic hydrogen i.e. with hydrogen radicals, hydrogen ions and/or with molecular hydrogen in an excited electron state.
- the atomic hydrogen can be obtained using EUV radiation by way of dissociation from molecular hydrogen.
- a dissociation device for example a filament, can be arranged in the vacuum chamber of the EUV lithography system for splitting molecular hydrogen into atomic hydrogen.
- oxidic materials e.g. ZrO 2
- the use of oxidic materials for the capping layer generally results in a loss of reflectance of the optical element.
- no stable material for the capping layer is currently known which prevents the adhesion of Si as a contaminating material.
- WO 2009/059614 A1 describes a method for at least partially removing a contamination layer from an optical surface of an optical element that reflects EUV radiation.
- a cleaning gas which preferably contains atomic hydrogen is brought into contact with the contamination layer.
- a signal that is indicative of the thickness of the contamination layer is also used as a feedback signal for cleaning.
- an atomic layer etching process (ALE process or ALEt process) is performed to remove the contamination layer at least partially, preferably completely, wherein performing the atomic layer etching process comprises: exposing the contamination layer to at least one surface-modifying reactant in a surface modification step, and, exposing the contamination layer to at least one material-detaching reactant in a material detachment step.
- an atomic layer etching process to remove contamination layers that are at least partially formed from a chemical element that cannot be removed from an optical surface of a reflective optical element by conventional cleaning methods, e.g. by cleaning with atomic hydrogen.
- an alternating sequence or a cycle of two process steps (A/B/A/B/ . . . ), of three process steps (A/B/C/A/B/C/ . . . ) or of more process steps is typically performed, wherein in the case of two process steps, a first step represents a surface modification step and a temporally subsequent second step represents an etching or material detachment step.
- the two or possibly more successive steps can be performed one after another in one and the same process reactor (conventional ALE method).
- the reflective optical element or specifically at least the surface of the contamination layer, is exposed to a/at least one surface-modifying reactant, also referred to as a chemical precursor, which changes the surface of the contamination layer.
- a chemical precursor also referred to as a chemical precursor
- the change can be effected for example by chemosorption, i.e. by dissolving chemical bonds in the contamination layer or in sublayers of the contamination layer or by a (pre-) oxidation of chemical elements such as Sn, etc., which has a lower surface energy in the oxidized state than does metallic Sn.
- SnO x is easier to detach than is metallic Sn.
- the contamination layer or the surface thereof is typically exposed to a/at least one material-detaching reactant in the form of a high-energetic species (free radicals, ions, photons) that detaches the chemically weakened uppermost layer(s) of the contamination layer.
- a high-energetic species free radicals, ions, photons
- hydrogen radicals or hydrogen ions as reducing species, can effect a reduction of the surface that was (pre-) oxidized in the previous, first step or of the materials present there. In this way, the (pre-)oxidized material is detached and can pass into the chamber of the process reactor.
- the waste products formed here are removed from the chamber of the process reactor after the second step is complete, typically by extracting them by suction or by purging the chamber.
- the optical element is taken, before the atomic layer etching process is performed, from an optical arrangement, in particular from an EUV lithography system, for example an EUV lithography apparatus or an EUV metrology system, in which the optical surface of the reflective optical element is exposed to EUV radiation.
- the atomic layer etching process can generally not be performed in-situ, i.e. not within the optical arrangement in which the optical element is impinged upon by EUV radiation or is exposed to EUV radiation. However, in a spatial atomic layer etching process, this may be possible nevertheless.
- the atomic layer etching process can be effected for example using two or more nozzles or cleaning heads which are arranged for example in a (main) housing of the EUV lithography system.
- the two or more cleaning heads can supply pulsed streams of gas, containing hydrogen and oxygen or other oxidizing or reducing gases, in alternating fashion to the optical surface of the reflective optical element. It is advantageous if the (local) streams of O 2 and H 2 gas are supplied to the optical surface substantially under atmospheric pressure. It is likewise advantageous if a laminar gas flow is formed at the optical surface of the reflective optical element.
- an atomic layer etching process may also be performed during the operation of the EUV lithography system. When performing the atomic layer etching process in-situ, it is, however, typically necessary to isolate the region in which the atomic layer etching process is performed from the environment with respect to gas pressure and gas hydrodynamics. It is also possible for the gas flow and the electrical and/or thermal conductivity of the plasma that is prevailing in the vacuum environment to be disturbed by the local streams of gas.
- the reflective optical element is replaceable, i.e. such that it can be taken from the optical arrangement and replaced by a new reflective optical element without great structural complexity.
- Removal of the reflective optical element is typically performed when the thickness of the contamination layer has become so great that the transmittance or possibly the imaging properties of the optical arrangement has/have significantly deteriorated so as to make replacing the reflective optical element by a “new” reflective optical element (without contamination layer) necessary.
- the reflective optical element taken from the optical arrangement is “refurbished” using the atomic layer etching process and can be reused in the same optical arrangement or in a different optical arrangement after the generally complete removal of the contamination layer. With the atomic layer etching it is also possible to remove from the optical surface of a reflective optical element contaminants which are “non-cleanable” per se and which were formed in the vacuum atmosphere of the optical arrangement.
- the atomic layer etching process is performed in an atomic layer etching apparatus.
- the atomic layer etching apparatus can be, for example, a conventional apparatus for atomic layer etching or for reactive ion etching, which includes a process reactor or a process chamber in which the atomic layer etching process is performed.
- the two process steps which were described further above are repeated multiple times in such a process chamber until the contamination layer is at least partially, generally completely stripped away.
- the atomic layer etching process in the process chamber makes possible a gentle treatment of the optical element, because in one cycle, i.e. in two process steps, only a very small number of layers of the contamination layer are stripped away.
- one or more sensors can be provided in the atomic layer etching apparatus.
- a residual gas analyser or a mass spectrometer can be used to detect which chemical elements have been released during the atomic layer etching process. Since the mass spectrometer, or the detector thereof, is generally operated under vacuum conditions, the use of a mass spectrometer is simpler for a conventional atomic layer etching process, which is performed under vacuum conditions, than for a spatial atomic layer etching process, which is generally performed at atmospheric pressure.
- suitable pressure conditions can be set at the mass spectrometer, or the detector thereof, e.g. by differential pumping.
- the atomic layer etching process can typically be terminated because the contamination layer has been substantially completely removed from the surface. It is to be understood that the atomic layer etching process can also be monitored in different ways, for example using optical sensors, for example to identify when the atomic layer etching process is to be terminated. Moreover, the effective thickness of the residual contamination layer (either island-like(non-close, or continuous/closed) can be monitored by optical detection, e.g. by spectrometric ellipsometry ex situ in an ALE compartment or—ideally in-situ, real-time as an endpoint detection method.
- optical detection e.g. by spectrometric ellipsometry ex situ in an ALE compartment or—ideally in-situ, real-time as an endpoint detection method.
- the specific chemical affinity between the etching (evaporating) reactant and the contamination offers an intrinsic type of material-dependent etching selectivity. For this reason, in the case of a contamination layer having a thickness which varies in a locally dependent manner, the material located underneath the contamination layer is not stripped away, possibly not even in partial regions of the contamination layer of a lower thickness, which are stripped away completely.
- the atomic layer etching process may be controlled or regulated such that a greater etching removal is effected in partial regions of the contamination layer that have a greater thickness than in partial regions of the contamination layer that have a lower thickness, in particular in a spatial atomic layer etching process (see below).
- flattening of the thickness profile of the contamination layer typically occurs in any case, for the following reasons: First, a portion of the contaminating material (e.g.
- a thermal atomic layer etching process in which e.g. hydrogen radicals form the active species therefore produces an isotropic etching profile.
- An atomic layer etching process with an anisotropic etching profile can be produced for example by producing a plasma in the environment of the optical element, for example by “biasing” the substrate or the optical element using a high-frequency alternating electromagnetic field, which also results, in addition to many randomly propagating free radicals, in the production and acceleration of a small portion of ions in the direction of the optical surface. Due to the ions, the process cycle is given a directionality, with the consequence that horizontal portions of the contamination layer are typically etched slightly more strongly than vertical portions of the contamination layer.
- the atomic layer etching process is performed as a spatial atomic layer etching process.
- spatial atomic layer etching (“spatial ALE”), which is also known as “fast” ALE, the two process steps or rather the process gases of the two process steps are conducted/guided over and in close proximity of the surface of the contamination layer or of the reflective optical element in zones or regions which are spatially separated from one another.
- an atomic layer etching head can be used, which is moved relative to the surface, as is described by way of example in US 2013/0118895 A1 or in DE 10 2014 222 534 A1, the entire disclosure of which is incorporated by reference in the content of this application.
- the contamination layer contains at least one chemical element selected from the group comprising: Zn, Sn, P, As, B, Si, In, Pb, Mg, Na, Ge, (semi-) noble metals, in particular Cu, Ag, and Au.
- these materials can form highly volatile hydrides with H 2 and CH 4 based plasmas, which means that these materials transition into the gas phase in the presence of atomic hydrogen.
- said materials generally form low-volatility chemical compounds (e.g. alloys) with the material of the optical surface, which means that these materials cannot be removed or cannot be removed without difficulty from the optical surface using in-situ hydrogen cleaning.
- Highly volatile hydrides are formed e.g.
- metals e.g. (semi-)noble metals like Cu, Ag, and Au, may be removed/evaporated in a reducing-oxidizing cycle.
- Some metals form volatile complexes with specific organic compounds such as acetylacetone, being used as a surface-modifying reactant, in combination with a surface-modifying reactant such as oxygen or another high-energetic species in an ALE process (see below).
- the contamination layer is at least partially removed from a capping layer of a reflective coating of the reflective optical element.
- the capping layer of the reflective coating can contain in particular Ru or consist of Ru, in particular if the reflective coating is a multilayer coating which is to be protected by the capping layer against oxidation.
- cleaning can also be effected on a reflective coating of what is known as a “grazing-incidence” mirror, in which the reflective coating does not necessarily have a plurality of alternating layers with different refractive indices.
- a surface modification step using oxygen as the surface-modifying reactant and preferably a material detachment step using hydrogen as the material-detaching reactant are performed in the atomic layer etching process.
- Such a surface modification step, in which the material on the surface of the contamination layer is at least partially oxidized, is typically followed by a reduction step, in which the material, which was oxidized in the previous step, is reduced in the second step for example using hydrogen as the process gas for detaching the material from the surface.
- Such a redox reaction can be used advantageously in particular in an atomic layer etching process in which the contamination layer contains tin (Sn) as the contaminating material: It has been found in the case of the (continuous) cleaning with hydrogen radicals that the cleaning rate is significantly higher for Sn that is present on the surface in oxidized form than in the case of cleaning of Sn that is present on the surface in metallic form, i.e. oxidized tin was removed significantly faster from the surface than metallic tin.
- the redox reduction can be performed in particular using a spatial ALE process (not only in the case of tin as the contaminating substance) to maximize the process speed.
- extra process steps “C” may be included into the sequence (A/B/A/B/ . . . ), leading to a sequence of three process steps A/B/C/A/B/C/ . . . .
- the third step “C” may be an extra volatilizing or an extra surface-modification step, making the removal of contaminants even more effective by a triple (or quadruple, . . . ) ALE sequence.
- a surface modification step is performed with a hydrocarbon, for example with methane, and/or with a halogen, in particular with chlorine, and a material detachment step is preferably performed with hydrogen as the material-detaching reactant.
- a hydrocarbon for example with methane
- a halogen in particular with chlorine
- a material detachment step is preferably performed with hydrogen as the material-detaching reactant.
- a (mild) chlorination of Cu in CuCl 2 is performed.
- a second step for example in an argon-hydrogen plasma, is the reduction and ion-assisted evaporation of Cu II Cl 2 to Cu 3 I Cl 3 .
- a chlorination it is also possible (maybe preferred) to perform a methylation in the first step.
- a surface modification step using an organic compound, preferably using a ⁇ -diketone, in particular acetylacetone, as the surface-modifying reactant and preferably a material detachment step using oxygen as the material-detaching reactant are performed in the atomic layer etching.
- a surface modification step using acetylacetone i.e. a ⁇ -diketone
- a material detachment step using oxygen on ZnO is presented in the article “New physico-chemical approaches in Area-selective Atomic Layer Deposition and Atomic Layer Etching: the case of ZnO”, A.
- ⁇ -diketones to form metal ⁇ -diketonates
- the atomic layer etching process described in the article cited above may be applied for removing other metal contaminants as well.
- Other organic compounds may also be used as metal-detaching reactants, e.g. forming volatile metal complexes such as ⁇ -diketiminates, carboxylates, amidinates, alkoxides or amides.
- the surface modification step and/or the material detachment step of the atomic layer etching processes are preferably performed in plasma-assisted fashion, but can alternatively or additionally also be performed in temperature-assisted fashion. However, good etching selectivity may already be attained at room temperature.
- the plasma is generated in an atomic layer etching head, preferably at a pressure between 100 mbar and 2000 mbar.
- a pressure between 100 mbar and 2000 mbar.
- high gas pressures are used, typically in the range specified above, i.e. near atmospheric gas pressure, as high gas pressures are advantageous for effectively separating the surface modification (e.g. oxidative) step and the spatially separated material-detaching (e.g. reductive) step.
- the plasma radicals recombine extremely fast on the surrounding surface(s) and in the gas phase. Therefore, it is advantageous to generate the plasma as close as possible from the contamination layer, resp., from the substrate/optical surface of the optical element, e.g. in the atomic layer etching head.
- the plasma is generated in a dielectric barrier discharge plasma source of the atomic layer etching head.
- a dielectric barrier discharge plasma source of the atomic layer etching head Given the high pressures indicated above, vacuum based plasma sources commonly used in semiconductor processing cannot be used, so that atmospheric pressure plasma technology is needed, e.g. based on microwave technology or Dielectric Barrier Discharges (DBD).
- DBD Dielectric Barrier Discharges
- Using a DBD plasma is advantageous, as it can be generated very close to the surface of the contamination layer, thus increasing the radical yield, i.e. the etch rate.
- Typical distances in the range between 0.02 mm to 0.2 mm are preferred, corresponding to the preferred distance between the atomic layer etching head and the surface of the contamination layer to guarantee proper gas separation.
- the DBD plasma is advantageously generated very proximate to the optical surface without electrically interacting with the optical surface.
- the substrate, resp., the optical element should not be used as an electrode or as an electrical capacitive element (dielectric barrier) in the plasma generating process.
- both the electrodes and the dielectric barrier should be integrated into the DBD plasma source of the atomic layer etching head.
- two cylindrical electrodes with a cylindrical dielectric barrier arranged in-between may be used as a DBD plasma source integrated in a first/second supply device of the atomic layer etching head.
- the surface-modifying reactant, resp., the layer-detaching reactant may pass through the space between the electrodes of the first/second supply device.
- the (relative) distance between the optical surface of the optical element and the dielectric barrier of the DBD plasma can be kept in the range of between 0.02 mm and 0.2 mm indicated above.
- Implementation details of DPD plasma sources suitable for use in ALE are described in the article “Developments in plasma enhanced spatial ALD for high throughput applications”, Y. Creyghton et al., Proc. Int. Conf. on Coatings on Glass and Plastics (ICCG 2016), Braunschweig, Germany, Jun. 12-16, 2016, pp. 93-97, which is incorporated herein by reference in its entirety.
- the surface modification step uses oxygen as the surface-modifying reactant, which is supplied to the contamination layer in the form of a gas composition comprising at least one of O 2 , N 2 O, H 2 O, H 2 O 2 added to a carrier gas.
- the gas composition/mixture comprises a fraction of 0.5% (vol.) to 5% (vol.) of O 2 , resp., of the O 2 -containing species in a (plasma) carrier gas, e.g. N 2 , Ar, He, Xe, . . . to form OH radicals.
- the material detachment step uses hydrogen as the material-detaching reactant, being supplied to the contamination layer in the form of a gas composition comprising at least one of H 2 , NH 3 or hydrocarbons added to a carrier gas.
- the gas composition/mixture comprises a fraction of 5% (vol.) to 50% (vol.) of H 2 , resp., of the H 2 -containing species in a (plasma) carrier gas, e.g. N 2 , Ar, He, Xe, . . . to form H radicals.
- a temperature change is preferably performed at a rate of more than +/ ⁇ 50 K/s, in particular more than +/ ⁇ 100 K/s. If the temperature can be modulated quickly enough, for example at a rate of increase of several +100 K/s and a rate of decrease of several ⁇ 50 K/s starting from a nominal base or plateau temperature of the atomic layer etching process, which is typically between room temperature and +200° C., as is used in conventional atomic layer processes, the temperature change can be synchronized with the switch-on and the switch-off rate of the oxidizing agent and of the reducing agent or of the removing agent.
- Atomic layer processes in general, i.e. not just atomic layer etching processes but also atomic layer deposition processes, can be provided with the above-described fast temperature modulation so as to be able to use the process windows of conventional atomic layer processes (without temperature change).
- heating devices e.g. in the form of radiant heaters and cooling devices, e.g. in the form of Peltier elements can be used to rapidly change the temperature on the relevant surface.
- the streams of gas contain He or H 2 , because these are gases having the highest heat capacity.
- the gases or the streams of gas can be heated for example using heating devices in the form of metallic heating coils, which are mounted at the gas inlets or the supply devices of an atomic layer etching head for spatial atomic layer etching or surround the inlets.
- FIG. 1 shows a schematic illustration of an EUV lithography apparatus having a plurality of reflective optical elements, of which one is taken from the EUV lithography apparatus,
- FIG. 2 shows a schematic illustration of an atomic layer etching apparatus with a process chamber in which the optical element is arranged for removing a contamination layer
- FIG. 3 shows a schematic illustration of an atomic layer etching apparatus in the form of an atomic layer etching head for performing a spatial atomic layer etching process
- FIG. 4 shows a schematic illustration of an exemplary temperature profile of the spatial atomic layer etching process of FIG. 3 .
- FIG. 1 schematically shows an EUV lithography apparatus 1 , which has a beam-shaping system 2 , an illumination system 3 and a projection system 4 , which are accommodated in separate vacuum housings 2 a , 3 a , 4 a and are arranged successively in the beam path of EUV radiation 6 , which emanates from an EUV light source 5 of the beam-shaping system 2 .
- a plasma source or a synchrotron can serve for example as the EUV light source 5 .
- the radiation emerging in the wavelength range between about 5 nm and about 20 nm is first concentrated in a collimator 7 .
- the desired operating wavelength is filtered out by variation of the angle of incidence, as is indicated by a double-headed arrow.
- the collimator 7 and the monochromator 8 are usually embodied as reflective optical elements, wherein at least the monochromator 8 , on its optical surface 8 a , has no multilayer system, in order to reflect a wavelength range having the greatest possible bandwidth.
- the EUV radiation 6 manipulated in the beam-shaping system 2 with regard to wavelength and spatial distribution is introduced into the illumination system 3 , which has a first and a second reflective optical element 9 , 10 .
- the two reflective optical elements 9 , 10 guide the EUV radiation 6 to a photomask 11 as a further reflective optical element.
- the photomask 11 has a structure which is imaged onto a wafer 12 at a reduced scale by the projection system 4 .
- a first and a second reflective optical element 13 , 14 are also provided in the projection system 4 .
- the reflective optical elements 9 , 10 , 11 , 13 , 14 each have an optical surface 9 a , 10 a , 11 a , 13 a , 14 a . These optical surfaces are arranged in the beam path of the EUV lithography apparatus 1 and are thus exposed to the EUV radiation 6 .
- a cleaning unit in the form of two cleaning heads 18 a,b for directing two cleaning gas jets 19 a,b containing atomic hydrogen e.g. in the form of hydrogen radicals, ions and/or molecular hydrogen in an excited electron state onto the optical surface 14 a of the optical element 14 .
- atomic hydrogen e.g. in the form of hydrogen radicals, ions and/or molecular hydrogen in an excited electron state
- the atomic hydrogen also comes into contact with components (not illustrated in the figure) that are arranged in the respective vacuum housing 2 a , 3 a , 4 a and have chemical elements that, in the presence of atomic hydrogen, form highly volatile hydrides.
- components not illustrated in the figure
- such elements are tin (Sn), zinc (Zn), phosphorus (P), arsenic (As), boron (B), silicon (Si), lead (Pb), indium (In), magnesium (Mg), sodium (Na) and fluorine (F).
- the volatile hydrides of these and possibly other chemical elements such as germanium (Ge), and (semi-)noble metals, in particular copper (Cu), silver (Ag), and gold (Au), gas out of the components, e.g. sensors or the like, which is also referred to as hydrogen-induced outgassing.
- the corresponding outgassing products which are passed to the vacuum environment deposit on the reflective optical elements 9 , 10 , 11 , 13 , 14 , more specifically on the optical surfaces 9 a , 10 a 11 a , 13 a , 14 a thereof, and form a (thin) contamination layer, which cannot be easily removed from the respective optical surface 9 a , 10 a , 11 a , 13 a , 14 a by atomic hydrogen cleaning.
- the two cleaning heads 18 a,b of the optical surface 14 a shown in FIG. 1 can supply, in alternating fashion, in each case a pulsed gas jet 19 a,b containing H 2 and O 2 , respectively, or other oxidizing or reducing gases. It is favourable if the (local) streams of O 2 and H 2 gas 19 a,b are supplied to the optical surface 14 substantially at atmospheric pressure, as is typically the case during a break in operation of the EUV lithography apparatus 1 , during which the respective housings 2 a , 3 a , 4 a are typically not evacuated. It is likewise advantageous if a laminar gas flow is formed at the optical surface 14 a of the reflective optical element 14 .
- an in-situ atomic layer etching process such as this, it is, however, typically necessary to isolate the region in which the atomic layer etching process is performed from the remaining (vacuum) environment with respect to gas pressure and gas hydrodynamics. It is also possible for the gas flow(s) and the conductivity of the plasma that is prevailing in the vacuum environment to be disturbed by the local streams of gas 19 a,b . Assuming that the cleaning heads 18 a,b are appropriately arranged, it is, however, also possible to perform an atomic layer etching process during the operation of the EUV lithography apparatus 1 . However, due to the problems which were described further above, it is generally more advantageous if the atomic layer etching process is performed ex-situ, i.e. in an atomic layer etching apparatus 21 which is provided specifically for this purpose and will be described in detail below.
- the EUV lithography apparatus 1 shown in FIG. 1 is embodied to allow removal of the reflective optical elements 13 , 14 of, at least, the projection system 4 .
- a respective reflective optical element 14 which has a contamination layer, can be removed from the EUV lithography apparatus 1 and be replaced by a “new” reflective optical element 14 ′, which does not have a contamination layer, as is shown in FIG. 1 by way of example for the second reflective optical element 14 of the projection system 4 .
- an opening 20 that is closable in a vacuum-tight manner is provided in the vacuum housing 4 a of the projection system 4 .
- the reflective optical element 14 is accessible from outside the vacuum housing 4 a of the projection system 4 through the opening 20 and can be detached from a holder to which the reflective optical element 14 is releasably attached in the vacuum housing 4 a , for example by way of a screw connection. After the reflective optical element 14 is detached from the holder, it is taken from the vacuum housing 4 a and replaced by the “new” reflective optical element 14 ′, as is indicated in FIG. 1 by way of a double-headed arrow.
- the replacement it is generally required to break the vacuum in the corresponding vacuum housings 2 , 3 , 4 .
- the replacement can possibly also be performed by way of a vacuum lock.
- the reflective optical element 14 is typically detached from the holder and transported into the vacuum lock using a transport device in automated fashion, from which the reflective optical element 14 can be taken out in automated fashion using a further transport device or possibly be taken out manually and be replaced by the “new” reflective optical element 14 ′.
- the reflective optical element 14 that has been removed from the EUV lithography apparatus 1 is transported manually or possibly likewise in automated fashion into an atomic layer etching apparatus 21 , which is shown in FIG. 2 , to remove as completely as possible the contamination layer 24 , which is illustrated in FIG. 2 .
- the optical element 14 which is shown in detail in FIG. 2 , has a substrate 22 , on which a reflective multilayer coating 23 is arranged, which has layers of molybdenum and silicon in alternation, the thicknesses of which are matched to one another such that, at the operating wavelength of the EUV lithography apparatus 1 of approximately 13.5 nm, as high a reflectance as possible is achieved.
- the optical surface 14 a is formed on the top side of a capping layer 25 of the reflective coating 23 , which in the example shown is made from Ru.
- the contamination layer 24 has formed on the capping layer 25 , wherein the contamination layer 24 includes Sn in the example shown, but can also include other chemical elements, e.g. Zn, P, As, B, Si, Pb, In, Mg, Na, F, Ge, metals such as Cu, Ag, Au, etc., which cannot be removed, or can be removed only with great difficulty, in the case of in-situ cleaning in the EUV lithography apparatus 1 .
- the atomic layer etching apparatus 21 shown in FIG. 2 has a process chamber 26 , in the interior space 27 of which a holder 28 is arranged on which the reflective optical element 14 is stored during the etching process. Both the holder 28 and the walls of the process chamber 26 can be heated to (possibly different) temperatures.
- the holder 28 can be connected to a motor so as to cause the reflective optical element 14 to perform a rotational movement during the atomic layer etching process.
- the atomic layer etching apparatus 21 also comprises a container 30 , which contains what is known as a precursor or reactant, which is gaseous oxygen O 2 in the present example.
- a further container 31 serves for providing gaseous hydrogen H 2 , which likewise serves as a reactant in the atomic layer etching process.
- Both the oxygen O 2 and the hydrogen H 2 can be introduced into the process chamber 26 in each case by a controllable inlet in the form of a controllable valve 32 a , 32 b .
- a distribution manifold 33 for distributing the incoming gas as homogeneously as possible in the direction of the reflective optical element 14 .
- a purge gas e.g. argon
- Another controllable valve 34 which forms a gas outlet, is connected to a vacuum pump 35 for removing the respective gases from the process chamber 26 .
- a first process gas analyser 36 a is flange-mounted to the process chamber 26 .
- a second process gas analyser 36 b for monitoring the residual gas is arranged in an extracting line behind the outlet valve 34 . Both the first and the second process gas analysers 36 a , 36 b serve for the detection or the determination of the amount or of the partial pressure of at least one gaseous component that is contained in the residual gas atmosphere of the process chamber 26 (or, in the case of the process gas analyser 36 b , was contained in the process chamber 26 ).
- the following procedure is performed: First, in a surface modification step, the precursor or the surface-modifying reactant in the form of oxygen O 2 is supplied to the process chamber 26 via the first valve 32 a . At the same time, a plasma is generated in the process chamber 26 by way of a plasma generating device (not illustrated in more detail), for example in the form of a microwave plasma generating device, to amplify the reaction of the oxygen O 2 with the Sn on the surface of the contamination layer 24 .
- a plasma generating device not illustrated in more detail
- the optical element 14 or the holder 28 can be electrically isolated from the rest of the process chamber 26 , and a high-frequency alternating electromagnetic field (“HF bias”) can be applied to the holder 28 .
- HF bias high-frequency alternating electromagnetic field
- Ions are formed in the plasma which are incident on the contamination layer 24 and in this way amplify the reaction of the oxygen O 2 with the Sn on the surface of the contamination layer 24 . Due to the oxygen O 2 , the metallic Sn is converted to SnO x .
- the first valve 32 a is switched over, and an (inert) purge gas is supplied to the process chamber 26 via the first valve 32 a .
- the latter is extracted together with the residual oxygen O 2 and any other gaseous components using the vacuum pumps 35 via the opened exit valve 34 .
- the exit valve 34 is closed and, in a material detachment step, hydrogen H 2 is introduced into the process chamber 26 via the second valve 32 b .
- the (molecular) hydrogen H 2 is converted, by way of the plasma generating device, to hydrogen radicals or hydrogen ions, which react at the exposed surface of the contamination layer 24 with the SnO x to form a hydride (e.g. SnH 4 ), which detaches from the contamination layer 24 and transitions to the gas phase.
- a hydride e.g. SnH 4
- the hydrogen H 2 may be introduced into the process chamber 26 already in activated form, for example by guiding it past a hot filament.
- Such a filament or activation device for the hydrogen H 2 may also be provided in the process chamber 26 itself.
- an inert gas e.g. argon
- the process chamber 26 is once again purged using the purge gas, which is supplied to the process chamber 26 via the second valve 32 b and is extracted together with the residual hydrogen and with the reaction products that formed during the detachment using the vacuum pump 35 when the exit valve 34 is opened.
- the purge gas supplied to the process chamber 26 via the second valve 32 b and is extracted together with the residual hydrogen and with the reaction products that formed during the detachment using the vacuum pump 35 when the exit valve 34 is opened.
- a control device 37 serves for actuating the valves 32 a , 32 b , 34 to switch between the above-described steps of the atomic layer etching process.
- the control device 37 additionally serves for actuating a further valve 38 , which connects the first process gas analyser 36 a to the process chamber 26 .
- control device 37 can switch the valves 32 a , 32 b , 34 , 38 between an open position and a closed position, but also that the mass flow through the respective valves 32 a , 32 b , 34 , 38 can be controlled using the electronic control device 37 .
- the redox reaction of Sn described in connection with FIG. 2 is particularly advantageous for the removal of the contamination layer 24 , because it has been shown that it is significantly easier to detach SnO x from the contamination layer 24 using hydrogen ions or using hydrogen radicals than is the case with metallic Sn.
- Complete removal of the contamination layer 24 and thus termination of the atomic layer etching process can be detected by way of the two process gas analysers 36 a , 36 b , for example when the detected Sn concentration strongly decreases or when the Ru material of the capping layer 25 is detected.
- the process gas analysers 36 a , 36 b reference is made to WO 2009/059614 A1, which was cited in the introductory part and the entirety of which is incorporated into the content of this application by reference.
- FIG. 2 shows a conventional atomic layer etching apparatus 21 , in which the surface modification step and the material detachment step are performed successively in time
- the atomic layer etching apparatus 21 shown in FIG. 3 which has an atomic layer etching head 41 , spatial atomic layer etching of the contamination layer 24 is performed.
- the atomic layer etching head 41 is arranged in a process chamber which is not illustrated in FIG. 3 .
- the atomic layer etching head 41 in the example shown has a first supply device 42 for supplying a surface-modifying reactant 44 to the contamination layer 24 and a second supply device 43 for supplying a layer-detaching reactant 45 to the contamination layer 24 .
- the atomic layer etching head 41 also has purge gas supply devices 46 for supplying an inert purge gas 47 into the intermediate space between the atomic layer etching head 41 and the first and second supply devices 42 , 43 .
- the purge gas supply devices 46 can be used to laterally delimit the region in which the surface-modifying reactant 44 is incident on the contamination layer 24 and also the region in which the layer-detaching reactant 45 is incident on the contamination layer 24 . Thereafter, the purge gas 47 together with the respective reactants 44 , 45 are extracted from the intermediate space between the atomic layer etching head 41 and the contamination layer 24 by way of extraction devices 48 .
- the purge gas 47 can also serve for producing a floating, i.e. frictionless air bearing facilitated movement of the atomic layer etching head 41 in the manner of an air cushion, such that the atomic layer etching head 41 can be positioned at a desired distance from the optical surface 14 a or the contamination layer 24 .
- the desired distance may be in a range from e.g. 0.02 mm to 0.2 mm.
- the atomic layer etching head 41 can be moved over the surface 14 a of the reflective optical element 14 by way of movement devices (not illustrated in more detail), as is indicated by way of a double-headed arrow in FIG. 3 .
- the optical element 14 can also be moved, in particular displaced, by way of suitable movement devices.
- the surface modification step by way of the surface-modifying reactant 44 and the layer detachment step by way of the layer-detaching reactant 45 are performed in the example shown in FIG. 3 at the same time at different locations or regions of the contamination layer 24 .
- the surface modification step and the layer detachment step take place in one and the same location of the optical surface 14 a in a temporally successive fashion. Since purging by way of the purge gas 47 is also performed at the same time, the time interval between the two successive steps of the atomic layer etching process is also short.
- the surface-modifying reactant 44 used in the first surface modification step can be, for example, oxygen or a halogen, in particular chlorine, more specifically chlorine gas.
- the chlorine gas makes it possible to chlorinate chemical elements present in the contamination layer 24 , such as for example Sn, i.e. convert them into a chloride.
- the surface-modifying reactant 44 can also be a hydrocarbon, e.g. methane, or a mixture of hydrocarbons so as to effect a methylation of the contaminating substances, e.g. of Sn contained in the contamination layer 24 .
- the surface-modifying reactant 44 can also be an organic compound, more specifically a ⁇ -diketone, for example acetylacetone, reacting with the Sn (or other metals) to form a volatile metal complex by chelation.
- both the first and the second step can be assisted by plasma, e.g. by using a high-frequency electromagnetic alternating field (“HF bias”), a microwave plasma, or a Dielectric Barrier Discharge (DBD).
- HF bias high-frequency electromagnetic alternating field
- DBD Dielectric Barrier Discharge
- the plasma can be generated in a plasma source which is integrated into the atomic layer etching head 41 .
- the plasma is generated at a very proximate distance to the contamination layer 24 , thus enhancing the radical yield and thus the etch rate, in particular when the pressure in the gap between the atomic layer etching head 41 and the contamination layer 24 is close to atmospheric pressure, e.g. in a range from 100 mbar to 2000 mbar, which allows to effectively separate the reductive and oxidative treatment steps.
- the atomic layer etching head 41 are both embodied as a Dielectric Barrier Discharge (DBD) plasma source:
- the supply devices 42 , 43 each have two cylindrical electrodes with a cylindrical dielectric barrier arranged in-between, the surface-modifying reactant 44 , resp., the layer-detaching reactant 45 passing through the cylindrical space between the electrodes of the first/second supply device 42 , 43 when they are supplied to the contamination layer 24 .
- inert gases such as e.g. N 2 , Ar, He, Xe, . . . can be added to the plasma as a carrier gas in order to increase the energy of the ions or free radicals in the plasma and, consequently, their momentum transfer to the material of the contamination layer 24 .
- the oxygen may be supplied to the contamination layer 24 via the first supply device 42 as a gas composition comprising at least one of O 2 , N 2 O, H 2 O, H 2 O 2 added to the carrier gas.
- the gas composition/mixture can comprise a fraction of 0.5% (vol.) to 5% (vol.) of O 2 , resp., of the O 2 -containing species in a (plasma) carrier gas, e.g. N 2 or Ar, He, Xe, . . . to form OH radicals.
- a carrier gas e.g. N 2 or Ar, He, Xe, . . . to form OH radicals.
- the hydrogen may be supplied to the contamination layer 24 via the second supply device 43 as a gas composition comprising at least one of H 2 , NH 3 or hydrocarbons added to the carrier gas.
- the gas composition/mixture may comprise a fraction of 5% (vol.) to 50% (vol.) of H 2 , resp., of the H 2 -containing species in a (plasma) carrier gas, e.g. N 2 or Ar, He, Xe, . . . to form H radicals.
- a carrier gas e.g. N 2 or Ar, He, Xe, . . . to form H radicals.
- an Ar—H 2 plasma or a N 2 —H 2 plasma can be used to detach the contaminating materials of the contamination layer 24 .
- oxygen O 2 may be used as the reactant 45 in the layer detachment step, in particular when an organic compound is used as the surface-modifying reactant in the surface-modifying step.
- the temperature T can be, for example, the formation or the evaporation of a volatile hydride
- the undesired reaction can be e.g. an undesired secondary reaction such as the diffusion of hydrogen into the Mo and Si layers of the multilayer coating 23 , which can here result in the formation of blisters which may cause a layer detachment of individual layers of the multilayer coating 23 .
- the surface energy of metallic tin (Sn) is approximately 0.6-0.7 J/m 2 , cf. e.g. L. Vitos et al., “The surface energy of metals”, Surface Science 411 (1998), 186. It is more difficult to find a value in literature for the surface energy of metal oxides, specifically of tin oxide, because typically indicated is the surface energy of indium tin oxide (ITO), which is between approximately 46 mJ/m 2 and 64 mJ/m 2 , cf. J. S. Kim, et al., “Surface energy and polarity of treated indium-tin-oxide anodes for polymer light-emitting diodes studied by contact-angle measurements”, J. Appl. Phys. 86, (1999) 2774.
- ITO indium tin oxide
- FIG. 4 shows the time profile of the temperature T, which is comparatively great in the first step S 1 , i.e. the surface modification step (shown here to be approximately 150° C.), while the temperature T in the second step S 2 , i.e. the material detachment step, is comparatively low (shown here to be approximately 100° C., preferably lower than approximately 100° C.).
- the temperature T very rapidly increases and decreases between the two steps S 1 , S 2 , i.e. a temperature change ⁇ T u takes place at a rate that is more than approximately +100 K/s during the transition from the second step S 2 to a subsequent first step S 1 , while the temperature change ⁇ T d during the transition from the first step S 1 to the subsequent second step S 2 is more than approximately ⁇ 50 K/s.
- the temperature change ⁇ T u , ⁇ T d ideally takes place synchronously with the supply of the surface-modifying reactant 44 and the material-detaching reactant 45 , respectively, i.e. directly before and after the supply.
- the temperature change ⁇ T u , ⁇ T d can be effected by way of suitable heating and/or cooling apparatuses which are mounted on the atomic layer etching head 41 , as is described for example in DE 10 2014 222 534 A1, which is described further above.
- the heating apparatus can be, for example, a radiant heater, while the cooling apparatus can be, for example, a Peltier element.
- the quick temperature change described further above is not limited to the atomic layer etching head 41 , described in FIG. 3 , for spatial atomic layer etching, but can also be performed in the conventional atomic layer etching process described in connection with FIG. 2 . It is likewise to be understood that the reactants oxygen (O 2 ) and hydrogen (H 2 ) described in connection with FIG. 2 or other reactants 44 , 45 can also be used in the atomic layer etching head 41 illustrated in FIG. 3 . Instead of the reflective optical element 14 , illustrated in FIG. 2 and FIG.
- a respective contamination layer 24 from other reflective optical elements, for example from what are known as “grazing-incidence” mirrors, which have a reflective coating that may consist only of a single layer.
- the atomic layer etching process is preferably performed as a spatial atomic layer etching process, since the latter makes possible short process times and low process costs.
- the cyclic atomic layer etching process can also be performed as a conventional atomic layer etching process, i.e. using the temporal separation of the surface modification step and the material detachment step described in connection with FIG. 2 (between which a purging or cleaning step is typically performed).
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Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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DE102017211539.4 | 2017-07-06 | ||
DE102017211539.4A DE102017211539A1 (en) | 2017-07-06 | 2017-07-06 | A method for removing a contamination layer by an atomic layer etching process |
DE102017211529.3 | 2017-07-06 | ||
PCT/EP2018/067878 WO2019007927A1 (en) | 2017-07-06 | 2018-07-03 | Method for removing a contamination layer by an atomic layer etching process |
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NL2022644A (en) | 2018-03-05 | 2019-09-10 | Asml Netherlands Bv | Prolonging optical element lifetime in an euv lithography system |
DE102019124781B4 (en) | 2018-09-28 | 2024-06-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | METHOD FOR PRODUCING AND TREATING A PHOTOMASK |
US11360384B2 (en) | 2018-09-28 | 2022-06-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of fabricating and servicing a photomask |
EP3933882A1 (en) | 2020-07-01 | 2022-01-05 | Carl Zeiss SMT GmbH | Apparatus and method for atomic layer processing |
CN111994868B (en) | 2020-08-12 | 2022-05-17 | 天津大学 | Extreme ultraviolet light and plasma composite atomic scale processing method |
KR20220022502A (en) * | 2020-08-18 | 2022-02-28 | 주식회사 원익아이피에스 | Method and Apparatus for Atomic Layer Etching |
US20230298869A1 (en) * | 2020-08-27 | 2023-09-21 | Lam Research Corporation | Subtractive copper etch |
DE102021200130A1 (en) | 2021-01-09 | 2022-07-14 | Carl Zeiss Smt Gmbh | Method for cleaning a surface of a component for an EUV lithography system |
DE102021202848A1 (en) | 2021-03-24 | 2022-09-29 | Carl Zeiss Smt Gmbh | Optical arrangement for the FUV/VUV wavelength range |
DE102021206168A1 (en) | 2021-06-16 | 2022-12-22 | Carl Zeiss Smt Gmbh | Process for depositing a cover layer, reflective optical element for the EUV wavelength range and EUV lithography system |
US20230108117A1 (en) * | 2021-10-06 | 2023-04-06 | Tokyo Electron Limited | Method for Etching of Metal |
DE102021214362A1 (en) | 2021-12-15 | 2023-06-15 | Carl Zeiss Smt Gmbh | Method of manufacturing a protective cover and EUV lithography system |
DE102022203644A1 (en) | 2022-04-12 | 2023-04-20 | Carl Zeiss Smt Gmbh | Process for producing a substrate and a reflective optical element for EUV lithography |
DE102022206124A1 (en) | 2022-06-20 | 2023-12-21 | Carl Zeiss Smt Gmbh | DEVICE AND METHOD FOR PROCESSING A SURFACE OF AN OPTICAL ELEMENT OF A LITHOGRAPHY SYSTEM |
DE102022210037A1 (en) * | 2022-09-23 | 2024-03-28 | Carl Zeiss Smt Gmbh | Arrangement for tempering at least a partial area of an optical element |
WO2024104855A1 (en) * | 2022-11-17 | 2024-05-23 | Asml Netherlands B.V. | Cleaning device and method for removing contamination particles from a surface to be cleaned |
Citations (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060175558A1 (en) * | 2005-02-07 | 2006-08-10 | Asml Netherlands B.V. | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby |
WO2006137014A1 (en) | 2005-06-21 | 2006-12-28 | Philips Intellectual Property & Standards Gmbh | Method of cleaning and after treatment of optical surfaces in an irradiation unit |
US20070069162A1 (en) * | 2005-09-27 | 2007-03-29 | Asml Netherlands B.V. | Ex-situ removal of deposition on an optical element |
US20070145297A1 (en) * | 2005-12-22 | 2007-06-28 | Asml Netherlands B.V. | Method for cleaning a lithographic apparatus module, cleaning arrangement for a lithographic apparatus module and lithographic apparatus comprising the cleaning arrangement |
US20090061327A1 (en) | 2007-08-31 | 2009-03-05 | Archita Sengupta | Removal of ionic residues or oxides and prevention of photo-induced defects, ionic crystal or oxide growth on photolithographic surfaces |
WO2009059614A1 (en) | 2007-11-06 | 2009-05-14 | Carl Zeiss Smt Ag | Method for removing a contamination layer from an optical surface, method for generating a cleaning gas, and corresponding cleaning and cleaning... |
US20090260654A1 (en) * | 2006-10-27 | 2009-10-22 | Carl Zeiss Smt Ag | Method and device for replacing objective parts |
DE102009001488A1 (en) | 2008-05-21 | 2009-11-26 | Asml Netherlands B.V. | Optical surface's contamination removing method for extreme ultraviolet lithography, involves removing contaminations from optical surfaces to form polymerized protective layer, which protects optical surface against metallic compounds |
US20090309045A1 (en) * | 2006-09-04 | 2009-12-17 | Koninklijke Philips Electronics N.V. | Method of cleaning a surface region covered with contaminant or undesirable material |
WO2010088194A2 (en) | 2009-01-28 | 2010-08-05 | Advanced Technology Materials, Inc. | Lithographic tool in situ clean formulations |
US20110048452A1 (en) | 2003-05-22 | 2011-03-03 | Peter Zink | Method and device for cleaning at least one optical component |
US20110192820A1 (en) * | 2010-02-09 | 2011-08-11 | Sungkyunkwan University Foundation For Corporate Collaboration | Atomic layer etching apparatus and etching method using the same |
US20110279799A1 (en) | 2008-10-15 | 2011-11-17 | Carl Zeiss Smt Gmbh | EUV Lithography Device and Method For Processing An Optical Element |
WO2012143446A1 (en) | 2011-04-22 | 2012-10-26 | University College Cork - National University Of Ireland, Cork | Methods and materials for lithography of a high resolution hsq resist |
DE102011083461A1 (en) | 2011-09-27 | 2013-03-28 | Carl Zeiss Smt Gmbh | A method of forming a top layer of silicon oxide on an EUV mirror |
US20130118895A1 (en) | 2010-02-26 | 2013-05-16 | Nederlandse Organisatie Voor Toegepast- Natuurwetenschappelijk Onderzoek Tno | Apparatus and method for reactive ion etching |
DE102014222534A1 (en) | 2014-11-05 | 2015-11-12 | Carl Zeiss Smt Gmbh | Method for producing a reflective optical element, and reflective optical element |
US20160203995A1 (en) | 2015-01-12 | 2016-07-14 | Lam Research Corporation | Integrating atomic scale processes: ald (atomic layer deposition) and ale (atomic layer etch) |
US20180182597A1 (en) * | 2016-12-22 | 2018-06-28 | Asm Ip Holding B.V. | Atomic layer etching processes |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7372049B2 (en) * | 2005-12-02 | 2008-05-13 | Asml Netherlands B.V. | Lithographic apparatus including a cleaning device and method for cleaning an optical element |
-
2017
- 2017-07-06 DE DE102017211539.4A patent/DE102017211539A1/en active Pending
-
2018
- 2018-07-03 WO PCT/EP2018/067878 patent/WO2019007927A1/en unknown
- 2018-07-03 EP EP18737868.2A patent/EP3649510A1/en active Pending
- 2018-07-03 KR KR1020197038800A patent/KR20200019635A/en not_active Application Discontinuation
- 2018-07-06 TW TW107123530A patent/TWI765067B/en active
-
2020
- 2020-01-06 US US16/734,650 patent/US11199363B2/en active Active
Patent Citations (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110048452A1 (en) | 2003-05-22 | 2011-03-03 | Peter Zink | Method and device for cleaning at least one optical component |
US20060175558A1 (en) * | 2005-02-07 | 2006-08-10 | Asml Netherlands B.V. | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby |
WO2006137014A1 (en) | 2005-06-21 | 2006-12-28 | Philips Intellectual Property & Standards Gmbh | Method of cleaning and after treatment of optical surfaces in an irradiation unit |
US20070069162A1 (en) * | 2005-09-27 | 2007-03-29 | Asml Netherlands B.V. | Ex-situ removal of deposition on an optical element |
US20070145297A1 (en) * | 2005-12-22 | 2007-06-28 | Asml Netherlands B.V. | Method for cleaning a lithographic apparatus module, cleaning arrangement for a lithographic apparatus module and lithographic apparatus comprising the cleaning arrangement |
US20090309045A1 (en) * | 2006-09-04 | 2009-12-17 | Koninklijke Philips Electronics N.V. | Method of cleaning a surface region covered with contaminant or undesirable material |
US20090260654A1 (en) * | 2006-10-27 | 2009-10-22 | Carl Zeiss Smt Ag | Method and device for replacing objective parts |
US20090061327A1 (en) | 2007-08-31 | 2009-03-05 | Archita Sengupta | Removal of ionic residues or oxides and prevention of photo-induced defects, ionic crystal or oxide growth on photolithographic surfaces |
WO2009059614A1 (en) | 2007-11-06 | 2009-05-14 | Carl Zeiss Smt Ag | Method for removing a contamination layer from an optical surface, method for generating a cleaning gas, and corresponding cleaning and cleaning... |
US20130186430A1 (en) | 2007-11-06 | 2013-07-25 | Asml Netherlands B.V. | Method for removing a contamination layer from an optical surface and arrangement therefor |
DE102009001488A1 (en) | 2008-05-21 | 2009-11-26 | Asml Netherlands B.V. | Optical surface's contamination removing method for extreme ultraviolet lithography, involves removing contaminations from optical surfaces to form polymerized protective layer, which protects optical surface against metallic compounds |
US20110279799A1 (en) | 2008-10-15 | 2011-11-17 | Carl Zeiss Smt Gmbh | EUV Lithography Device and Method For Processing An Optical Element |
WO2010088194A2 (en) | 2009-01-28 | 2010-08-05 | Advanced Technology Materials, Inc. | Lithographic tool in situ clean formulations |
US20110192820A1 (en) * | 2010-02-09 | 2011-08-11 | Sungkyunkwan University Foundation For Corporate Collaboration | Atomic layer etching apparatus and etching method using the same |
US20130118895A1 (en) | 2010-02-26 | 2013-05-16 | Nederlandse Organisatie Voor Toegepast- Natuurwetenschappelijk Onderzoek Tno | Apparatus and method for reactive ion etching |
WO2012143446A1 (en) | 2011-04-22 | 2012-10-26 | University College Cork - National University Of Ireland, Cork | Methods and materials for lithography of a high resolution hsq resist |
DE102011083461A1 (en) | 2011-09-27 | 2013-03-28 | Carl Zeiss Smt Gmbh | A method of forming a top layer of silicon oxide on an EUV mirror |
US20140211178A1 (en) | 2011-09-27 | 2014-07-31 | Carl Zeiss Smt Gmbh | Method for producing a capping layer composed of silicon oxide on an euv mirror, euv mirror, and euv lithography apparatus |
DE102014222534A1 (en) | 2014-11-05 | 2015-11-12 | Carl Zeiss Smt Gmbh | Method for producing a reflective optical element, and reflective optical element |
US20160203995A1 (en) | 2015-01-12 | 2016-07-14 | Lam Research Corporation | Integrating atomic scale processes: ald (atomic layer deposition) and ale (atomic layer etch) |
US20180182597A1 (en) * | 2016-12-22 | 2018-06-28 | Asm Ip Holding B.V. | Atomic layer etching processes |
Non-Patent Citations (9)
Title |
---|
Choi et al., "Chemical Etching and Patterning of Copper, Silver, and Gold Films at Low Temperatures", ESC Journal of Solid State Science and Technology, 4 (1), (2015), 10 pages. |
Creyghton et al., "Developments in plasma enhanced spatial ALD for high throughput applications [3.04]", Session 3-ADL, CVD, and Atmospheric Plasma Processes, 2016, 5 pages. |
German Office Action, Application 10 2017 211 539.4, with English Translation, dated Feb. 1, 2018, 6 pages. |
Granneman et al., "3D Pattern Effects in RTA Radiative vs Conductive Heating", ASM, 2006, 29 pages. |
International Search Report and the Written Opinion, PCT/EP2018/067878, dated Sep. 17, 2018, 12 pages. |
Kim et al., "Surface energy and polarity of treated indium-tin-oxide anodes for polymer light-emitting diodes studies by contact-angle measurements", Journal of Applied Physics, 86, (1999), 2 pages. |
Mameli et al., "New physico-chemical approaches in Area-selective Atomic Layer Deposition and Atomic Layer Etching: the case of ZnO", 2018, 2 pages. |
Vitos et al., "The surface energy of metals" Surface Science, vol. 411, Issues 1-2, Aug. 11, 1998, 2 pages. |
Wu et al., "Low-Temperature Etching of Cu by Hydrogen-Based Plasmas", Applied Materials & Interfaces, vol. 2, No. 8, 2010, 5 pages. |
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US20200142327A1 (en) | 2020-05-07 |
TW201907241A (en) | 2019-02-16 |
WO2019007927A1 (en) | 2019-01-10 |
TWI765067B (en) | 2022-05-21 |
DE102017211539A1 (en) | 2019-01-10 |
KR20200019635A (en) | 2020-02-24 |
EP3649510A1 (en) | 2020-05-13 |
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