US10648798B2 - Apparatus for projecting a time-variable optical pattern onto an object to be measured in three dimensions - Google Patents
Apparatus for projecting a time-variable optical pattern onto an object to be measured in three dimensions Download PDFInfo
- Publication number
- US10648798B2 US10648798B2 US16/221,539 US201816221539A US10648798B2 US 10648798 B2 US10648798 B2 US 10648798B2 US 201816221539 A US201816221539 A US 201816221539A US 10648798 B2 US10648798 B2 US 10648798B2
- Authority
- US
- United States
- Prior art keywords
- frame
- optical pattern
- movement mechanism
- movement
- fixed optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 45
- 238000003384 imaging method Methods 0.000 claims abstract description 26
- 238000005286 illumination Methods 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2536—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object using several gratings with variable grating pitch, projected on the object with the same angle of incidence
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
- G02B26/023—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light comprising movable attenuating elements, e.g. neutral density filters
-
- G02B27/2214—
-
- G02B27/2221—
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
- G02B30/20—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
- G02B30/26—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type
- G02B30/27—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type involving lenticular arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
- G02B30/40—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images giving the observer of a single two-dimensional [2D] image a perception of depth
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/54—Accessories
- G03B21/56—Projection screens
- G03B21/60—Projection screens characterised by the nature of the surface
- G03B21/606—Projection screens characterised by the nature of the surface for relief projection
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B35/00—Stereoscopic photography
- G03B35/18—Stereoscopic photography by simultaneous viewing
- G03B35/24—Stereoscopic photography by simultaneous viewing using apertured or refractive resolving means on screens or between screen and eye
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
Definitions
- the invention relates to a device for projecting a time-variable optical pattern onto an object to be measured in three dimensions
- the wobbling mirror is arranged between the imaging optics of the slide projector and the object to be measured, the mirror has to be comparatively large in order not to limit the illuminated portion. This requires a large amount of installation space. Furthermore a rather complex engineering design is required due to the comparatively large mass of the mirror in order to prevent imbalances during rotation of the mirror.
- the wobbling motion of the mirror does not only move the projected pattern but also the illuminated portion.
- the effectively useable measuring field that is illuminated in each position of the wobbling mirror by a pattern is therefore significantly smaller than the portion that is illuminated in a single position of the mirror. Therefore a large portion of the illumination power is not used for illuminating the measuring field.
- the object is achieved by a device for projecting a time variable optical pattern onto an object that is to be measured in three dimensions, the device comprising a frame for an optical pattern; a light source with optional illumination optics; and imaging optics, wherein the optical pattern is on slide that is attached to a movement mechanism that moves the optical pattern relative to the optional illumination optics and/or relative to the imaging optics, wherein the movement mechanism causes a movement of the optical pattern in a slide plane that is oriented orthogonal to an optical axis of the imaging optics.
- the device for projecting a time variable optical pattern onto an object that is to be measured in three dimensions includes a frame for an optical pattern, a light source with illumination optics, and imaging optics wherein the optical pattern is on slide that is attached to a movement mechanism that moves the optical pattern relative to the illumination optics and relative to the imaging optics.
- the movement mechanism causes a movement of the optical pattern in a slide plane that is oriented orthogonal to the optical axis of the imaging optics.
- the linear movement mechanism includes an arrangement of linear guides that are crossed relative to each other in order to support the frame wherein the movement of the optical pattern is performed in superimposed linear movements that are facilitated by the crossed over linear guides.
- Crossed over designates an arrangement where both linear guides are not arranged parallel to each other.
- the linear guides can thus be in particular oriented perpendicular to each other.
- the movement mechanism is configured in a form of a bearing that is fabricated into the frame and with a shaped element that rotates in the bearing in an eccentrical manner and that is driven by a motor.
- the movement mechanism is configured by linear actuators engaging the frame wherein the linear actuators are configured as piezoelectrically moved lever arrangements.
- the light source, the illumination optics, the imaging optics and at least one of the linear guides are connected with each other by a rigid base element in an advantageous configuration.
- the linear actuators are controlled so that the frame is moved on a circular path.
- linear guides that are connected with the base element are arranged perpendicular to an effective direction of a gravitational force.
- the movement mechanism includes two bearings that are provided in a floating and fixed bearing arrangement.
- FIG. 1 illustrates a first view of an exemplary embodiment (view of the X-Z plane of the right-hand coordinate system);
- FIG. 2 illustrates a second view of the device illustrated in FIG. 1 (view of the X-Y plane of the right-hand coordinate system);
- FIG. 3 illustrates a possible embodiment of the eccentrical element drive of the device illustrated in FIGS. 1 and 2 ;
- FIG. 4 illustrates an embodiment with a linear movement mechanism that is driven by a linear actuator
- FIG. 5 illustrates another embodiment of a linear movement mechanism that is driven by a linear actuator.
- Moving the optical pattern on a circular path has proven to be a rather simple.
- a very uniform adjustment of the projected patter structure is possible.
- the projected pattern structure is always moved with constant velocity and no movement direction is preferred.
- FIGS. 1-2 illustrate a first embodiment in several views.
- the pattern projector includes a light source 1 with optional illumination optics 2 , an optical pattern configured as a slide 5 and imaging optics 3 .
- the illumination optics and the imaging optics have a common optical axis 4 .
- the common optical axis is advantageous but not required.
- the slide 5 is illuminated by the light source 1 using the optional illumination optics 2 which is used e.g. for homogenizing and collimating the light.
- the illumination optics image the slide onto the measuring object (not illustrated).
- the slide 5 is between illumination optics 2 and imaging optics 3 .
- the slide itself is connected with a mechanism that moves the slide relative to the light source and the optics.
- the slide plane 6 In order for the optical pattern to always be imaged on the measuring object in a crisp manner at the same distance from the projector the slide plane 6 has to be oriented orthogonal to the optical axis 4 of the imaging optics 3 and the movement of the slide 5 must be performed exclusively parallel to the slide plane 6 .
- the slide movement mechanism to assure that the movement of the slide 5 is performed parallel to the slide plane 6 and so that this slide plane is also maintained under external influences (e.g. gravity).
- the movement of the slide in the slide plane shall be performed in a uniform manner, advantageously the movement is performed on a circular path.
- the requirement for a fixed slide plane and a uniform movement is complied with by a suitable combination of different mechanical arrangements.
- the optical pattern is provided on a slide 5 and connected with a mechanism that has the following features:
- the slide 5 is arranged in a frame 7 that is connected through a bearing 10 with a motor 8 .
- the motor axis 9 and the axis of the bearing 10 are arranged eccentrical relative to each other.
- the frame 7 of the slide 5 is connected with two crossed linear guides 11 , 12 , so that the movement of the slide 5 with the frame 7 is limited to a purely linear movement.
- two crossed linear guides 11 , 12 are respectively arranged parallel to the slide plane 6 and orthogonal to the motor axis 9 .
- the motor shaft 9 is arranged orthogonal to the slide plane 6 .
- the optical axis 4 of the imaging optics 3 is arranged orthogonal to the linear supports 11 , 12 and parallel to the motor axis 9 .
- the linear guides 11 , 12 can be arranged perpendicular to each other for practical purposes. This, however, is not mandatory. It is only necessary that the two linear guides 11 , 12 are not arranged parallel to each other.
- the light source 1 , the optics 2 , 3 , the motor 8 and one of the linear guides 12 are fixated at each other by a rigid connection 13 subsequently designated as base plate.
- the frame 7 with the slide 5 , the bearing 10 and the other linear guide 11 forms a first moving unit.
- the connection element 14 of the two crossed linear guides 11 , 12 forms a second moving unit.
- the first moving unit is moved on a circular path in the slide plane 6 .
- the second moving unit is moved back and forth in a straight line along the linear guide 12 .
- the arrangement of the linear guides 11 , 12 is exchangeable.
- the linear guide 11 that is connected with the frame 7 is arranged horizontally in FIG. 2 , parallel to the x-axis and the linear guide 12 that is connected with the base plate 13 is arranged vertically and parallel to the y-axis.
- the linear guide 12 that is connected with the base plate in a rigid manner is arranged horizontally and the linear guide 11 that is connected with the frame 7 is arranged vertically.
- slide moving mechanism has the following features:
- the actual direction of the gravitational force should be considered.
- the connection element 14 of the linear guides 11 , 12 only has to be moved perpendicular to the gravitational force by the motor 8 .
- the motor 8 does not have to apply any additional force in order to move the connection element 14 parallel to the weight force.
- the linear guide 11 that is connected with the frame 7 therefore has to be arranged parallel to a direction of the gravitational force.
- linear guides 11 , 12 can be implemented e.g. by a combination of a respective bolt with an adapted straight bearing or a respective bolt with an adapted linear bearing or a respective linear rail with a respective corresponding slide.
- the combination of motor shaft 9 and eccentrically arranged bearing 10 can be implemented as follows as illustrated in FIG. 3 .
- the shaft of the motor 8 is connected with a second shaft 15 that is oriented parallel to the motor axis 9 but moved perpendicular thereto.
- the two shafts are connected with each other in a rigid manner by a mechanism 16 .
- the second shaft 15 is centrally connected with a ball bearing 17 whose outer ring is connected in turn with the frame of the slide 5 .
- a ball bearing typically also facilitates other rotations as a pure rotation about the axes of the ball bearing. This clearance facilitates that the slide that is connected with the ball bearing 17 by the frame 7 moves orthogonal to the desired slide plane 6 .
- two ball bearings 17 are arranged in series on the shaft 15 in a fixed and floating bearing arrangement instead of a single ball bearing 17 . This way the circular movement of the slide 5 can be limited precisely to the desired slide plane 6 . This facilitates a constant crisp imaging of the slide 5 through the imaging optics 3 onto the measuring object that is not illustrated herein.
- FIGS. 4 and 5 illustrate alternative devices for implementing a slide moving mechanism using a linear actuator arrangement, e.g. piezo electro-magnetic, pneumatic or hydraulic actuators.
- a linear actuator arrangement e.g. piezo electro-magnetic, pneumatic or hydraulic actuators.
- the slide is fixed at a frame 18 .
- the frame 18 is fixed at a linear actuator 19 or at piezo actuator or a voice coil actuator which can move the frame along the X-axis.
- the linear actuator 19 is connected through a connection element 20 with another linear actuator 21 , advantageously with a crossed movement direction.
- the additional linear actuator 21 moves the components 19 and 20 and thus also the frame 18 along the advantageously crossed direction.
- the linear actuators 19 and 21 can be additionally connected by a lever arrangement with the components 18 and 20 in order to increase a maximum movement travel.
- the linear actuators 19 and 21 can be respectively controlled so that the time based movement is performed according to a cosine function. When the phase shift between the respective curves is 90° and the frequency is identical a circular movement of the frame is achieved.
- FIG. 5 illustrates another embodiment.
- the slide is fixated at a frame 22 .
- Crossed linear guides 23 , 24 are attached at the frame wherein a respective slide 25 , 26 is movable on the linear guides.
- the slides 25 , 26 are respectively fixed at a linear actuator 19 , 21 or at a piezo actuator or a voice-coil actuator.
- the linear actuators that are also arranged crossed over move the slides and thus the connected frame 22 in a plane.
- the linear actuators 19 , 21 can be additionally connected by a lever device in order to increase a maximum movement travel using the first slide 25 and/or the second slide 26 .
- the linear actuators 19 , 21 can be respectively controlled so that the time based diagram respectively corresponds to a cosine function wherein different phase differences, frequencies and amplitudes are possible. When the phase shift between the respective diagrams is 90° for identical frequencies and amplitudes a circular movement of the frame is achieved. A movement along closed or non-closed Lissajous-figures is certainly also possible.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
-
- 1 light source
- 2 illumination optics
- 3 imaging optics
- 4 optical axis
- 5 slide
- 6 slide plane
- 7 frame
- 8 motor
- 9 motor shaft
- 10 bearing
- 11 first linear guide
- 12 second linear guide
- 13 base plate
- 14 connection element
- 15 shaft
- 16 mechanism
- 17 ball bearing
- 18 frame
- 19 first linear actuator
- 20 connection element
- 21 second linear actuator
- 22 frame
- 23 first linear guide
- 24 second linear guide
- 25 first slide
- 26 second slide
Claims (18)
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102016111228 | 2016-06-20 | ||
DE102016111228 | 2016-06-20 | ||
DEDE102016111228.3 | 2016-06-20 | ||
PCT/EP2017/065114 WO2017220595A1 (en) | 2016-06-20 | 2017-06-20 | Apparatus for projecting a time-variable optical pattern onto an object to be measured in three dimensions |
DE102017113475.1A DE102017113475A1 (en) | 2016-06-20 | 2017-06-20 | Device for projecting a temporally variable optical pattern onto an object to be measured three-dimensionally |
DE102017113475 | 2017-06-20 | ||
DEDE102017113475.1 | 2017-06-20 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2017/065114 Continuation WO2017220595A1 (en) | 2016-06-20 | 2017-06-20 | Apparatus for projecting a time-variable optical pattern onto an object to be measured in three dimensions |
Publications (2)
Publication Number | Publication Date |
---|---|
US20190137267A1 US20190137267A1 (en) | 2019-05-09 |
US10648798B2 true US10648798B2 (en) | 2020-05-12 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US16/221,539 Active US10648798B2 (en) | 2016-06-20 | 2018-12-16 | Apparatus for projecting a time-variable optical pattern onto an object to be measured in three dimensions |
Country Status (5)
Country | Link |
---|---|
US (1) | US10648798B2 (en) |
KR (1) | KR102268326B1 (en) |
CN (1) | CN109690240B (en) |
DE (1) | DE102017113475A1 (en) |
WO (1) | WO2017220595A1 (en) |
Families Citing this family (1)
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US10791277B2 (en) | 2018-09-11 | 2020-09-29 | Cognex Corporation | Methods and apparatus for optimizing image acquisition of objects subject to illumination patterns |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US5714832A (en) * | 1996-03-15 | 1998-02-03 | Hughes Electronics | Miniature grating device |
EP1302800A1 (en) * | 2001-10-11 | 2003-04-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Holding device for optical elements |
US20050243330A1 (en) * | 2004-04-28 | 2005-11-03 | Simon Magarill | Methods and apparatus for determining three dimensional configurations |
US20110292527A1 (en) * | 2010-05-27 | 2011-12-01 | Jack Weston Frankovich | X-y adjustable optical mount with z rotation |
EP2905643A1 (en) | 2014-02-05 | 2015-08-12 | Trumpf Laser Marking Systems AG | Traversing device for a non-linear crystal or for saturatable absorber and method for determining the increments of the traversing device |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2797421Y (en) * | 2005-05-23 | 2006-07-19 | 郭华忠 | Picture cutter of painting brush and cutting combination |
FR2963673B1 (en) * | 2010-08-03 | 2017-01-20 | Telmat Ind | INSTALLATION AND METHOD FOR THE THREE-DIMENSIONAL DIGITAL ACQUISITION OF FORMS AND / OR POSITION OF OBJECTS OR SUBJECTS |
DE102011101476B4 (en) | 2011-05-11 | 2023-05-25 | Cognex Ireland Ltd. | Process for 3D measurement of objects |
JP2013242488A (en) * | 2012-05-22 | 2013-12-05 | Nikon Corp | Exposure device, exposure method and device manufacturing method |
CN203902062U (en) * | 2014-05-17 | 2014-10-29 | 金华职业技术学院 | Manual cam mechanism characteristic curve drawing instrument |
CN104568753B (en) * | 2014-12-24 | 2017-08-22 | 天津大学 | Sample drift active compensation method and device based on digital hologram |
-
2017
- 2017-06-20 KR KR1020197001702A patent/KR102268326B1/en active IP Right Grant
- 2017-06-20 WO PCT/EP2017/065114 patent/WO2017220595A1/en active Application Filing
- 2017-06-20 CN CN201780045563.4A patent/CN109690240B/en active Active
- 2017-06-20 DE DE102017113475.1A patent/DE102017113475A1/en active Pending
-
2018
- 2018-12-16 US US16/221,539 patent/US10648798B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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US5714832A (en) * | 1996-03-15 | 1998-02-03 | Hughes Electronics | Miniature grating device |
EP1302800A1 (en) * | 2001-10-11 | 2003-04-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Holding device for optical elements |
US20050243330A1 (en) * | 2004-04-28 | 2005-11-03 | Simon Magarill | Methods and apparatus for determining three dimensional configurations |
US20110292527A1 (en) * | 2010-05-27 | 2011-12-01 | Jack Weston Frankovich | X-y adjustable optical mount with z rotation |
EP2905643A1 (en) | 2014-02-05 | 2015-08-12 | Trumpf Laser Marking Systems AG | Traversing device for a non-linear crystal or for saturatable absorber and method for determining the increments of the traversing device |
US20160341925A1 (en) * | 2014-02-05 | 2016-11-24 | Trumpf Laser Marking Systems Ag | Moving a Nonlinear Crystal or a Saturable Absorber in Two Dimensions |
Non-Patent Citations (1)
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Piazo Nano Position 2013/2014 PrecisionPositioning Stage contents, Jan. 1, 2014, Catalog. |
Also Published As
Publication number | Publication date |
---|---|
DE102017113475A1 (en) | 2017-12-21 |
KR20190020761A (en) | 2019-03-04 |
KR102268326B1 (en) | 2021-06-23 |
WO2017220595A1 (en) | 2017-12-28 |
CN109690240A (en) | 2019-04-26 |
CN109690240B (en) | 2022-01-25 |
US20190137267A1 (en) | 2019-05-09 |
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