Інститут Проблем Матеріалознавства Ім. І.М. Францевича Ан України
Институт проблем материаловедения им. И.М. Францевича АН Украины
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The process comprises a nitration of silicon by nitrogen at high temperatures. With the purpose of increasing of yield of silicon nitride, before the nitration silicon is treated by a liquid nitrogen or hydrogen.
UA4474161A1988-08-151988-08-15Process for preparation of silicon nitride with predominant content of alpha-phase
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