Частное Акционерное Общество "Завод Полупроводников"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Частное Акционерное Общество "Завод Полупроводников"filedCriticalЧастное Акционерное Общество "Завод Полупроводников"
Priority to UAU201300686UpriorityCriticalpatent/UA83364U/en
Publication of UA83364UpublicationCriticalpatent/UA83364U/en
A holder for fastening of rod substrates in reactor for growing of polycrystalline silicon contains adapter with fixed in it collet latch for arrangement of rod substrate, having mounted part, metal cooling current lead, connected with electrode, and current lead has receiving well, in which the mounted part of adapter is fixed, besides the depth of the receiving well of current lead is greater than the length of the mounted art of the adapter.
UAU201300686U2013-01-212013-01-21Holder for fastening of rod substrates in reactor for growing of polycrystalline silicon
UA83364U
(en)