UA83364U - Holder for fastening of rod substrates in reactor for growing of polycrystalline silicon - Google Patents

Holder for fastening of rod substrates in reactor for growing of polycrystalline silicon

Info

Publication number
UA83364U
UA83364U UAU201300686U UAU201300686U UA83364U UA 83364 U UA83364 U UA 83364U UA U201300686 U UAU201300686 U UA U201300686U UA U201300686 U UAU201300686 U UA U201300686U UA 83364 U UA83364 U UA 83364U
Authority
UA
Ukraine
Prior art keywords
growing
reactor
fastening
holder
polycrystalline silicon
Prior art date
Application number
UAU201300686U
Other languages
Russian (ru)
Ukrainian (uk)
Inventor
Юрий Васильевич Реков
Алексей Михайлович Трегуб
Александр Сергеевич Кригер
Алексей Григорьевич Иванищев
Евгений Александрович Голев
Original Assignee
Частное Акционерное Общество "Завод Полупроводников"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Частное Акционерное Общество "Завод Полупроводников" filed Critical Частное Акционерное Общество "Завод Полупроводников"
Priority to UAU201300686U priority Critical patent/UA83364U/en
Publication of UA83364U publication Critical patent/UA83364U/en

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Abstract

A holder for fastening of rod substrates in reactor for growing of polycrystalline silicon contains adapter with fixed in it collet latch for arrangement of rod substrate, having mounted part, metal cooling current lead, connected with electrode, and current lead has receiving well, in which the mounted part of adapter is fixed, besides the depth of the receiving well of current lead is greater than the length of the mounted art of the adapter.
UAU201300686U 2013-01-21 2013-01-21 Holder for fastening of rod substrates in reactor for growing of polycrystalline silicon UA83364U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
UAU201300686U UA83364U (en) 2013-01-21 2013-01-21 Holder for fastening of rod substrates in reactor for growing of polycrystalline silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
UAU201300686U UA83364U (en) 2013-01-21 2013-01-21 Holder for fastening of rod substrates in reactor for growing of polycrystalline silicon

Publications (1)

Publication Number Publication Date
UA83364U true UA83364U (en) 2013-09-10

Family

ID=52275696

Family Applications (1)

Application Number Title Priority Date Filing Date
UAU201300686U UA83364U (en) 2013-01-21 2013-01-21 Holder for fastening of rod substrates in reactor for growing of polycrystalline silicon

Country Status (1)

Country Link
UA (1) UA83364U (en)

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