Публичное Акционерное Общество "Научно-Производственный Концерн "Наука"
Государственное Предприятие "Государственный Научно-Исследовательский Центр "Фонон"
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A scanning microwave microscope for control of electrophysical parameters of semiconductor structures comprises a SHF generator, a coaxial resonant cavity with a pointed central conductor, a detector, a controllable table for semiconductor samples, a unit for control and processing information signals. The central conductor of resonant cavity is located inside of a dielectric tube beam waveguide; an auxiliary emitting source is connected to the dielectric beam waveguide face.
UAU201301878U2013-02-152013-02-15Scanning microwave microscope for control of electrophysical parameters of semiconductor structures
UA83012U
(en)
Apparatus for dehydrating organic material comprising a vacuum chamber, a set of two or more microwave generators, a transparent window to the microwaves for the transmission of radiation, a microwave chamber; and method to dehydrate an organic material.