UA83012U - Scanning microwave microscope for control of electrophysical parameters of semiconductor structures - Google Patents

Scanning microwave microscope for control of electrophysical parameters of semiconductor structures

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Publication number
UA83012U
UA83012U UAU201301878U UAU201301878U UA83012U UA 83012 U UA83012 U UA 83012U UA U201301878 U UAU201301878 U UA U201301878U UA U201301878 U UAU201301878 U UA U201301878U UA 83012 U UA83012 U UA 83012U
Authority
UA
Ukraine
Prior art keywords
control
semiconductor structures
electrophysical parameters
scanning microwave
microwave microscope
Prior art date
Application number
UAU201301878U
Other languages
Russian (ru)
Ukrainian (uk)
Inventor
Сергей Юрьевич Ларкин
Евгений Иванович Новиков
Original Assignee
Публичное Акционерное Общество "Научно-Производственный Концерн "Наука"
Государственное Предприятие "Государственный Научно-Исследовательский Центр "Фонон"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Публичное Акционерное Общество "Научно-Производственный Концерн "Наука", Государственное Предприятие "Государственный Научно-Исследовательский Центр "Фонон" filed Critical Публичное Акционерное Общество "Научно-Производственный Концерн "Наука"
Priority to UAU201301878U priority Critical patent/UA83012U/en
Publication of UA83012U publication Critical patent/UA83012U/en

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Abstract

A scanning microwave microscope for control of electrophysical parameters of semiconductor structures comprises a SHF generator, a coaxial resonant cavity with a pointed central conductor, a detector, a controllable table for semiconductor samples, a unit for control and processing information signals. The central conductor of resonant cavity is located inside of a dielectric tube beam waveguide; an auxiliary emitting source is connected to the dielectric beam waveguide face.
UAU201301878U 2013-02-15 2013-02-15 Scanning microwave microscope for control of electrophysical parameters of semiconductor structures UA83012U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
UAU201301878U UA83012U (en) 2013-02-15 2013-02-15 Scanning microwave microscope for control of electrophysical parameters of semiconductor structures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
UAU201301878U UA83012U (en) 2013-02-15 2013-02-15 Scanning microwave microscope for control of electrophysical parameters of semiconductor structures

Publications (1)

Publication Number Publication Date
UA83012U true UA83012U (en) 2013-08-27

Family

ID=52275260

Family Applications (1)

Application Number Title Priority Date Filing Date
UAU201301878U UA83012U (en) 2013-02-15 2013-02-15 Scanning microwave microscope for control of electrophysical parameters of semiconductor structures

Country Status (1)

Country Link
UA (1) UA83012U (en)

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