UA68570U - A probe device for study of electro-physical characteristics of semiconductor structures - Google Patents

A probe device for study of electro-physical characteristics of semiconductor structures

Info

Publication number
UA68570U
UA68570U UAU201112260U UAU201112260U UA68570U UA 68570 U UA68570 U UA 68570U UA U201112260 U UAU201112260 U UA U201112260U UA U201112260 U UAU201112260 U UA U201112260U UA 68570 U UA68570 U UA 68570U
Authority
UA
Ukraine
Prior art keywords
electro
physical characteristics
semiconductor structures
probe device
study
Prior art date
Application number
UAU201112260U
Other languages
Russian (ru)
Ukrainian (uk)
Inventor
Богдан Васильович Павлик
Роман Іванович Дідик
Йосип Андрійович Шикоряк
Роман Мирославович Лис
Андрій Сергійович Грипа
Дмитро Петрович Слободзян
Ольга Валентинівна Цвєткова
Original Assignee
Львівський Національний Університет Імені Івана Франка
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Львівський Національний Університет Імені Івана Франка filed Critical Львівський Національний Університет Імені Івана Франка
Priority to UAU201112260U priority Critical patent/UA68570U/en
Publication of UA68570U publication Critical patent/UA68570U/en

Links

Abstract

A probe device for measurement of electro-physical characteristics of semiconductor structures includes spring-loaded probes for supply of test signals. Additional probes are included, those are placed to the guide openings of fluoroplastic plate arranged by template in places corresponding to applied contacts on the test sample.
UAU201112260U 2011-10-19 2011-10-19 A probe device for study of electro-physical characteristics of semiconductor structures UA68570U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
UAU201112260U UA68570U (en) 2011-10-19 2011-10-19 A probe device for study of electro-physical characteristics of semiconductor structures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
UAU201112260U UA68570U (en) 2011-10-19 2011-10-19 A probe device for study of electro-physical characteristics of semiconductor structures

Publications (1)

Publication Number Publication Date
UA68570U true UA68570U (en) 2012-03-26

Family

ID=63013333

Family Applications (1)

Application Number Title Priority Date Filing Date
UAU201112260U UA68570U (en) 2011-10-19 2011-10-19 A probe device for study of electro-physical characteristics of semiconductor structures

Country Status (1)

Country Link
UA (1) UA68570U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2618598C1 (en) * 2015-11-17 2017-05-04 Акционерное общество "Эпиэл" Measuring probe device and method for measuring electrophysical parameters of semiconductor wafers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2618598C1 (en) * 2015-11-17 2017-05-04 Акционерное общество "Эпиэл" Measuring probe device and method for measuring electrophysical parameters of semiconductor wafers

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