Науково-Дослідний Технологічний Інститут Приладобудування
Научно-исследовательский технологический институт приборостроения
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Priority to UA4804404ApriorityCriticalpatent/UA12165A1/en
Publication of UA12165A1publicationCriticalpatent/UA12165A1/en
A method involves vacuum application of coating on the contacting surfaces of target and cathode and connection of the target and cathode by heating and pressing in the vacuum. Cathode pressing to the target is carried out with effort of 0.25 kg, their heating is carried out to the temperature of 260-280 °C and they are maintained at this temperature for 8-10 mines.
UA4804404A1990-01-111990-01-11METHOD connection of quartz target to the cathode
UA12165A1
(en)