UA12165A1 - METHOD connection of quartz target to the cathode - Google Patents

METHOD connection of quartz target to the cathode

Info

Publication number
UA12165A1
UA12165A1 UA4804404A UA4804404A UA12165A1 UA 12165 A1 UA12165 A1 UA 12165A1 UA 4804404 A UA4804404 A UA 4804404A UA 4804404 A UA4804404 A UA 4804404A UA 12165 A1 UA12165 A1 UA 12165A1
Authority
UA
Ukraine
Prior art keywords
cathode
target
method connection
quartz target
connection
Prior art date
Application number
UA4804404A
Other languages
Russian (ru)
Ukrainian (uk)
Inventor
Валерій Андрійович Бессонов
Валерий Андреевич Бессонов
Леонід Олександрович Ленніков
Леонид Александрович Ленников
Олена Олександрівна Костюк
Елена Александровна Костюк
Original Assignee
Науково-Дослідний Технологічний Інститут Приладобудування
Научно-исследовательский технологический институт приборостроения
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Науково-Дослідний Технологічний Інститут Приладобудування, Научно-исследовательский технологический институт приборостроения filed Critical Науково-Дослідний Технологічний Інститут Приладобудування
Priority to UA4804404A priority Critical patent/UA12165A1/en
Publication of UA12165A1 publication Critical patent/UA12165A1/en

Links

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  • Battery Electrode And Active Subsutance (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A method involves vacuum application of coating on the contacting surfaces of target and cathode and connection of the target and cathode by heating and pressing in the vacuum. Cathode pressing to the target is carried out with effort of 0.25 kg, their heating is carried out to the temperature of 260-280 °C and they are maintained at this temperature for 8-10 mines.
UA4804404A 1990-01-11 1990-01-11 METHOD connection of quartz target to the cathode UA12165A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
UA4804404A UA12165A1 (en) 1990-01-11 1990-01-11 METHOD connection of quartz target to the cathode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
UA4804404A UA12165A1 (en) 1990-01-11 1990-01-11 METHOD connection of quartz target to the cathode

Publications (1)

Publication Number Publication Date
UA12165A1 true UA12165A1 (en) 1996-12-25

Family

ID=74553184

Family Applications (1)

Application Number Title Priority Date Filing Date
UA4804404A UA12165A1 (en) 1990-01-11 1990-01-11 METHOD connection of quartz target to the cathode

Country Status (1)

Country Link
UA (1) UA12165A1 (en)

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