TWM680973U - Random access memory with two-terminal memory cells - Google Patents

Random access memory with two-terminal memory cells

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Publication number
TWM680973U
TWM680973U TW114211435U TW114211435U TWM680973U TW M680973 U TWM680973 U TW M680973U TW 114211435 U TW114211435 U TW 114211435U TW 114211435 U TW114211435 U TW 114211435U TW M680973 U TWM680973 U TW M680973U
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Taiwan
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memory
memory element
character
voltage
memory cell
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TW114211435U
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Chinese (zh)
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賴炳成
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賴炳成
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Application filed by 賴炳成 filed Critical 賴炳成
Publication of TWM680973U publication Critical patent/TWM680973U/en

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Abstract

A random access memory includes: at least one memory cell array, the memory cell array includes: at least one memory cell, the memory cell has two terminals, a first terminal of the memory cell is connected to a word line, a second terminal of the memory cell is connected to a bit line, the memory cell includes: a type of diode has an anode and a cathode, the anode of the diode is connected to the word line; and a memory element has two terminals, a first terminal of the memory element is connected to the cathode of the diode, and a second terminal of the memory element is connected to the bit line, wherein, the characteristic of the diode has a forward conduction voltage, and the memory element stores data, the low resistance state of the memory element is the first state of the data, and the high resistance state of the memory element is the second state of the data.

Description

具兩端點記憶體胞元之隨機存取記憶體Random access memory with two-terminal memory cells

本揭露是有關於記憶體,特別是有關於隨機存取記憶體。 This disclosure relates to memory, and particularly to random access to memory.

隨機存取記憶體(RAM)主要分類為靜態隨機存取記憶體(SRAM)及動態隨機存取記憶體(DRAM)。靜態隨機存取記憶體以六個電晶體之靜態隨機存取記憶體(6T SRAM)為主,六個電晶體之靜態隨機存取記憶體之優點為不需於操作過程中執行記憶體胞元中儲存資料的資料更新(Refresh)動作,且製作過程與一般邏輯電路晶片的製作過程相容,而缺點則為六個電晶體之靜態隨機存取記憶體胞元所占用的晶片面積比一個電晶體與一個電容元件組成之動態隨機存取記憶體胞元(1T1C DRAM)的面積為大。動態隨機存取記憶體以一個電晶體與一個立體電容元件組成之動態隨機存取記憶體(1T1C DRAM)為主,一個電晶體與一個立體電容元件之動態隨機存取記憶體之優點為所占用的晶片面積比較小,而缺點則為其製作過程無法與現行的一般邏輯電路晶片的製作過程相容,需額外執行立體電容元件的製程。現行的一般邏輯電路晶片中有許多晶片需要包含具有大數量的記憶體胞元的隨機存取記憶體於該晶片中以暫時儲存晶片操作過程中的大量資料;並且較低價格的高密度或能立體堆疊記憶體胞元的高容量或高速的隨機存取記憶體的需求持續增加。因此,隨機存取記憶體能夠 與一般邏輯電路以較低成本共同製作於一晶片中以及占用較小晶片面積的高密度或能立體堆疊記憶體胞元的高容量或高速的隨機存取記憶體為目前的需求。 Random access memory (RAM) is mainly classified into static random access memory (SRAM) and dynamic random access memory (DRAM). Static random access memory (SRAM) is mainly composed of six transistors (6T SRAM). The advantage of six transistor SRAM is that it does not require data refresh during operation, and its manufacturing process is compatible with that of general logic circuit chips. The disadvantage is that the chip area occupied by six transistor SRAM cells is larger than that of dynamic random access memory cells (1T1C DRAM) composed of one transistor and one capacitor. Dynamic random access memory (DRAM) is mainly composed of a transistor and a capacitor (1T1C DRAM). The advantage of DRAM with a transistor and a capacitor is that it occupies a smaller chip area. The disadvantage is that its manufacturing process is not compatible with the current general logic circuit chip manufacturing process, and the manufacturing process of the capacitor needs to be performed separately. Many current general logic circuit chips require random access memory (RAM) with a large number of memory cells to temporarily store large amounts of data during chip operation. The demand for high-density or high-capacity/high-speed RAM with stackable memory cells at a lower cost continues to increase. Therefore, the current demand is for RAM that can be co-fabricated with general logic circuits on a single chip at a lower cost, and that occupies a smaller chip area while maintaining high density or high capacity/high speed with stackable memory cells.

本揭露對於前述之需求,提出不同的實施例,本揭露之一實施例為一種隨機存取記憶體,包括:至少一記憶體胞元陣列,該記憶體胞元陣列包括:至少一記憶體胞元,該記憶體胞元具有二個端點,該記憶體胞元的第一端點連接至一字元線,該記憶體胞元的第二端點連接至一位元線,該記憶體胞元包括:一種(A type of)二極體,該二極體具有一陽極與一陰極,該二極體的陽極連接至該字元線;以及一記憶元件,該記憶元件具有二個端點,該記憶元件的第一端點連接至該二極體的陰極,該記憶元件的第二端點連接至該位元線,其中,該二極體之特性具有一順向導通電壓,並且該記憶元件儲存有一資料,該記憶元件的低電阻狀態為資料第一狀態,該記憶元件的高電阻狀態為資料第二狀態。 This disclosure provides different embodiments to address the aforementioned needs. One embodiment of this disclosure is a random access memory, comprising: at least one memory cell array, the memory cell array comprising: at least one memory cell having two endpoints, the first endpoint of the memory cell being connected to a word line, and the second endpoint of the memory cell being connected to a bit line, the memory cell comprising: a (Type A) A diode having an anode and a cathode, the anode of the diode being connected to the character line; and a memory element having two terminals, a first terminal of the memory element being connected to the cathode of the diode, and a second terminal of the memory element being connected to the character line, wherein the diode has a forward conduction voltage, and the memory element stores data, the low resistance state of the memory element being a first data state, and the high resistance state of the memory element being a second data state.

本揭露對於前述之需求,提出不同的實施例,本揭露之一實施例為一種隨機存取記憶體,包括:至少一記憶體胞元陣列,該記憶體胞元陣列包括:至少一記憶體胞元,該記憶體胞元具有二個端點,該記憶體胞元的第一端點連接至一字元線,該記憶體胞元的第二端點連接至一位元線,該記憶體胞元包括:一記憶元件,該記憶元件具有二個端點,該記憶元件的第一端點連接至該字元線;以及一種(A type of)二極體,該二極體具有一陽極與一陰極,該二極體的陽極連接至該記憶元件的第二端點,該二極體的陰極連接至該位元線,其中,該二極體之特性具有一順向導通電壓,並且該記憶元件儲存有一資料, 該記憶元件的低電阻狀態為資料第一狀態,該記憶元件的高電阻狀態為資料第二狀態。 This disclosure provides different embodiments to address the aforementioned needs. One embodiment of this disclosure is a random access memory, comprising: at least one memory cell array, the memory cell array including: at least one memory cell having two endpoints, the first endpoint of the memory cell being connected to a word line, and the second endpoint of the memory cell being connected to a word line; the memory cell including: a memory element having two endpoints, the first endpoint of the memory element being connected to the word line; and a (Type A) A diode having an anode and a cathode, the anode of the diode being connected to a second terminal of the memory element, and the cathode of the diode being connected to a bit line. The diode has a forward conduction voltage, and the memory element stores data. The low resistance state of the memory element is the first data state, and the high resistance state of the memory element is the second data state.

根據本揭露之至少一實施例,其中該二極體係為一齊納二極體(Zener Diode),該齊納二極體之特性更具有一逆向齊納電壓。 According to at least one embodiment of this disclosure, the diode system is a Zener diode, which further has the characteristic of having a reverse Zener voltage.

根據本揭露之至少一實施例,其中該記憶元件的低電阻狀態係由施加於該記憶元件的二個端點的一第一電壓訊號條件所決定,該記憶元件的高電阻狀態係由施加於該記憶元件的二個端點的一第二電壓訊號條件所決定,該記憶元件儲存的資料的讀取係藉由施加一第三電壓訊號條件於該記憶元件的二個端點以偵測該記憶元件的電阻狀態,其中該第一電壓訊號條件與該第二電壓訊號條件的電壓極性為相同,並且該第二電壓訊號條件的絕對電壓值大於該第一電壓訊號條件的絕對電壓值,該第三電壓訊號條件的絕對電壓值小於該第一電壓訊號條件的絕對電壓值與該第二電壓訊號條件的絕對電壓值;其中該記憶元件係為變阻式記憶體(Resistive RAM,RRAM)元件或相變化記憶體(Phase Change Memory,PCM)元件。 According to at least one embodiment of this disclosure, the low-resistance state of the memory element is determined by a first voltage signal condition applied to the two terminals of the memory element, the high-resistance state of the memory element is determined by a second voltage signal condition applied to the two terminals of the memory element, and the reading of data stored in the memory element is performed by applying a third voltage signal condition to the two terminals of the memory element to detect the voltage of the memory element. The system is in a resistive state, wherein the first voltage signal condition and the second voltage signal condition have the same voltage polarity, and the absolute voltage value of the second voltage signal condition is greater than the absolute voltage value of the first voltage signal condition, while the absolute voltage value of the third voltage signal condition is less than the absolute voltage values of both the first and second voltage signal conditions; wherein the memory element is a resistive RAM (RRAM) element or a phase change memory (PCM) element.

根據本揭露之至少一實施例,其中該記憶元件的低電阻狀態係由施加於該記憶元件的二個端點的一第一電壓訊號條件所決定,該記憶元件的高電阻狀態係由施加於該記憶元件的二個端點的一第二電壓訊號條件所決定,該記憶元件儲存的資料的讀取係藉由施加一第三電壓訊號條件於該記憶元件的二個端點以偵測該記憶元件的電阻狀態,其中該第一電壓訊號條件與該第二電壓訊號條件的電壓極性為相反,該第三電壓訊號條件的絕對電壓值小於該第一電壓訊號條件的絕對電壓值與該第二電壓訊號條件的絕對電壓值;其中該記憶元件係為變阻式記憶體(Resistive RAM,RRAM)元件、相變化記憶體(Phase Change Memory,PCM)元件、鐵電記憶體(Ferroelectric RAM,FeRAM)元件或磁性穿隧接面記憶體(Magnetic Tunnel Junction Memory,MTJ Memory)元件,該磁性穿隧接面記憶體元件包括藉由穿隧阻障層分隔開的固定磁化層及自由磁化層。 According to at least one embodiment of this disclosure, the low-resistance state of the memory element is determined by a first voltage signal condition applied to two terminals of the memory element, the high-resistance state of the memory element is determined by a second voltage signal condition applied to two terminals of the memory element, and the reading of data stored in the memory element is performed by applying a third voltage signal condition. The two terminals of the memory element are used to detect the resistance state of the memory element, wherein the voltage polarities of the first voltage signal condition and the second voltage signal condition are opposite, and the absolute voltage value of the third voltage signal condition is less than the absolute voltage values of the first voltage signal condition and the second voltage signal condition; wherein the memory element is a resistive memory. RAM (RRAM) elements, phase change memory (PCM) elements, ferroelectric RAM (FeRAM) elements, or magnetic tunneling junction memory (MTJ) elements, wherein the magnetic tunneling junction memory element includes a fixed magnetization layer and a free magnetization layer separated by a tunneling barrier layer.

根據本揭露之至少一實施例,其中該記憶體胞元陣列包括有複數個記憶體胞元、複數個字元線以及複數個位元線,該複數個記憶體胞元配置於一基板平面上方以第一方向及垂直於該第一方向的第二方向的平行於該基板平面的陣列狀排列,該複數個字元線沿第一方向配置,該複數個位元線沿第二方向配置;以及該隨機存取記憶體更包括有字元線解碼驅動電路、位元線感應電路及位元線解碼驅動電路,其中該複數個字元線連接至該字元線解碼驅動電路,該複數個位元線連接至該位元線感應電路及該位元線解碼驅動電路,其中,該字元線解碼驅動電路包含複數個字元線開關以各別與該複數個字元線連接,該複數個字元線開關係為電晶體開關或傳輸閘(Transmission Gate)開關。 According to at least one embodiment of this disclosure, the memory cell array includes a plurality of memory cells, a plurality of word lines, and a plurality of bit lines. The plurality of memory cells are arranged in an array above a substrate plane in a first direction and a second direction perpendicular to the first direction, parallel to the substrate plane. The plurality of word lines are arranged along the first direction, and the plurality of bit lines are arranged along the second direction. The random access memory further includes a word... The system includes a character line decoding driver circuit, a character line sensing circuit, and a character line decoding driver circuit. The plurality of character lines are connected to the character line decoding driver circuit, and the plurality of bit lines are connected to both the character line sensing circuit and the character line decoding driver circuit. The character line decoding driver circuit includes a plurality of character line switches, each individually connected to the plurality of character lines. These character line switches are either transistor switches or transmission gate switches.

根據本揭露之至少一實施例,該隨機存取記憶體更包括有複數個記憶體胞元陣列,其中該各個記憶體胞元陣列的該複數個記憶體胞元係以個別垂直於該基板平面的方式連接該複數個字元線以及該複數個位元線以形成記憶體胞元陣列層;其中該各個記憶體胞元陣列係位於不同的平面層以於該基板平面上方形成複數個記憶體胞元陣列層,該複數個記憶體胞元陣列層的該複數個字元線以及該複數個位元線係於該複數個記憶體胞元陣列層的邊端垂直地往下連接至該基板平面以分別連接位於該基板平面的該字元線解碼驅動電路、該位元線感應電路及該位元線解碼驅動電路,以形成包含複數個記憶體胞元陣列層的立體(Three dimensional)結構。 According to at least one embodiment of this disclosure, the random access memory further includes a plurality of memory cell arrays, wherein the plurality of memory cells in each memory cell array are connected to a plurality of word lines and a plurality of bit lines in a manner perpendicular to the substrate plane to form a memory cell array layer; wherein each memory cell array is located on different planar layers to form a plurality of [missing information - likely related to the substrate plane]. A plurality of memory cell array layers, wherein the plurality of word lines and the plurality of bit lines of the plurality of memory cell array layers are vertically connected downward from the edges of the plurality of memory cell array layers to the substrate plane to respectively connect to the word line decoding driver circuit, the bit line sensing circuit, and the bit line decoding driver circuit located on the substrate plane, thereby forming a three-dimensional structure comprising the plurality of memory cell array layers.

根據本揭露之至少一實施例,其中,儲存該複數個記憶體胞元中的其中一個記憶體胞元的記憶元件的低電阻狀態的條件包括:該字元線解碼驅動電路施加一字元線電壓於該記憶體胞元的字元線及該位元線解碼驅動電路施加一位元線電壓於該記憶體胞元的位元線,以使該記憶元件的二個端點具有一第一電壓訊號條件,該第一電壓訊號條件決定該記憶元件的低電阻狀態,並且,該字元線解碼驅動電路經由關閉其他的字元線所連接的字元線開關以使其他的字元線維持浮接(Floating)狀態,該位元線解碼驅動電路施加一相同於該字元線電壓減去該二極體的順向導通電壓的電壓訊號於其他的位元線或該位元線解碼驅動電路使其他的位元線維持浮接(Floating)狀態。 According to at least one embodiment of this disclosure, the conditions for the low-resistance state of a memory element storing one of the plurality of memory cells include: the word line decoding driver circuit applying a word line voltage to the word line of the memory cell and the bit line decoding driver circuit applying a bit line voltage to the bit line of the memory cell, so that the two terminals of the memory element have a first voltage signal condition, the first voltage signal condition determining... The memory element is in a low-resistance state, and the word line decoder driver keeps the other word lines floating by turning off the word line switches connected to them. The bit line decoder driver applies a voltage signal equal to the word line voltage minus the diode's forward conduction voltage to the other bit lines, or the bit line decoder driver keeps the other bit lines floating.

根據本揭露之至少一實施例,其中,儲存該複數個記憶體胞元中的其中一個記憶體胞元的記憶元件的高電阻狀態的條件包括:該字元線解碼驅動電路施加一字元線電壓於該記憶體胞元的字元線及該位元線解碼驅動電路施加一位元線電壓於該記憶體胞元的位元線,以使該記憶元件的二個端點具有一第二電壓訊號條件,該第二電壓訊號條件決定該記憶元件的高電阻狀態,並且,該字元線解碼驅動電路經由關閉其他的字元線所連接的字元線開關以使其他的字元線維持浮接(Floating)狀態,該位元線解碼驅動電路施加一相同於該字元線電壓減去該二極體的順向導通電壓的電壓訊號於其他的位元線或該位元線解碼驅動電路使其他的位元線維持浮接(Floating)狀態。 According to at least one embodiment of this disclosure, the conditions for the high-resistance state of the memory element storing one of the plurality of memory cells include: the word line decoding driver circuit applies a word line voltage to the word line of the memory cell, and the bit line decoding driver circuit applies a bit line voltage to the bit line of the memory cell, so that the two terminals of the memory element have a second voltage signal condition, the second voltage signal condition determining... The memory element is in a high-resistance state, and the word line decoder driver keeps the other word lines floating by turning off the word line switches connected to them. The bit line decoder driver applies a voltage signal equal to the word line voltage minus the diode's forward conduction voltage to the other bit lines, or the bit line decoder driver keeps the other bit lines floating.

根據本揭露之至少一實施例,其中,讀取該複數個記憶體胞元中的其中一個記憶體胞元的記憶元件的儲存資料的條件包括:該字元線解碼驅動電路施加一字元線電壓於該記憶體胞元的字元線及該位元線解碼驅動電路施加一位元線電壓於該記憶體胞元的位元線,以使該記憶元件的二個端點具有一第 三電壓訊號條件,該第三電壓訊號條件無法決定該記憶元件的高電阻狀態或低電阻狀態,其中該記憶元件的第一端點的電壓值比該記憶元件的第二端點的電壓值還高,並且,該字元線解碼驅動電路經由關閉其他的字元線所連接的字元線開關以使其他的字元線維持浮接(Floating)狀態,再使該位元線經該位元線感應電路開始感應,其他的位元線經該位元線感應電路開始感應或該位元線解碼驅動電路使其他的位元線維持浮接(Floating)狀態;以及該位元線經該位元線感應電路開始感應後的一第一時間區間後,該位元線解碼驅動電路傳輸該位元線經感應後的電壓值。 According to at least one embodiment of this disclosure, the conditions for reading stored data from the memory element of one of the plurality of memory cells include: the word line decoding driver applies a word line voltage to the word line of the memory cell, and the bit line decoding driver applies a bit line voltage to the bit line of the memory cell, so that the two terminals of the memory element have a third voltage signal condition, which cannot determine the high resistance state or low resistance state of the memory element, wherein the voltage value of the first terminal of the memory element is higher than that of the second terminal of the memory element. The voltage value at the endpoint is still high, and the character line decoding driver circuit, by turning off the character line switches connected to other character lines to keep the other character lines in a floating state, then causes the character line to start sensing through the character line sensing circuit. Other character lines either start sensing through the character line sensing circuit or the character line decoding driver circuit keeps other character lines in a floating state. After a first time interval following the character line starting to sense through the character line sensing circuit, the character line decoding driver circuit transmits the sensed voltage value of the character line.

根據本揭露之至少一實施例,其中,維持該記憶體胞元陣列中的該複數個記憶體胞元的記憶元件的儲存資料的條件包括:該字元線解碼驅動電路經由關閉全部的字元線所連接的字元線開關以使全部的字元線維持浮接(Floating)狀態,該位元線解碼驅動電路施加一預定的位元線電壓於全部的位元線或該位元線解碼驅動電路使全部的位元線維持浮接(Floating)狀態。 According to at least one embodiment of this disclosure, the conditions for maintaining the stored data of the memory elements in the plurality of memory cells of the memory cell array include: the word line decoding driver keeps all word lines in a floating state by turning off the word line switches connected to all word lines; the bit line decoding driver applies a predetermined bit line voltage to all bit lines; or the bit line decoding driver keeps all bit lines in a floating state.

根據本揭露之至少一實施例,其中,該字元線解碼驅動電路施加一字元線電壓於一字元線,並且該字元線解碼驅動電路經由關閉其他的字元線所連接的字元線開關以使其他的字元線維持浮接狀態,及該位元線解碼驅動電路施加相同或不同的位元線電壓於該複數個位元線,以使該字元線所連接的複數個記憶體胞元同時進行複數個資料的寫入儲存。 According to at least one embodiment of this disclosure, the character line decoder driver applies a character line voltage to a character line, and maintains other character lines in a floating state by turning off character line switches connected to other character lines, and the bit line decoder driver applies the same or different bit line voltages to the plurality of bit lines, so that the plurality of memory cells connected to the character lines simultaneously perform the writing and storage of a plurality of data.

根據本揭露之至少一實施例,其中,該字元線解碼驅動電路施加一字元線電壓於一字元線,並且該字元線解碼驅動電路經由關閉其他的字元線所連接的字元線開關以使其他的字元線維持浮接狀態,再使該複數個位元線經該位元線感應電路開始感應;以及該複數個位元線經該位元線感應電路開始感 應後的一第一時間區間後,該位元線解碼驅動電路傳輸該複數個位元線經感應後的電壓值,以使該字元線所連接的複數個記憶體胞元同時進行複數個資料的讀取。 According to at least one embodiment of this disclosure, the character line decoding driver applies a character line voltage to a character line, and the character line decoding driver keeps the other character lines in a floating state by turning off character line switches connected to the other character lines, and then causes the plurality of character lines to start sensing through the character line sensing circuit; and after a first time interval following the start of sensing by the plurality of character lines, the character line decoding driver transmits the sensed voltage value of the plurality of character lines, so that the plurality of memory cells connected to the character line can simultaneously read a plurality of data.

0V:零伏特電壓 0V: Zero volt voltage

101:字元線解碼驅動電路 101: Character Line Decoding Driver Circuit

102:位元線解碼驅動電路,位元線感應電路 102: Bit line decoder driver circuit, bit line sensing circuit

103:時序控制電路 103: Timing Control Circuit

All BLs:全部位元線 All BLs: All Bit Lines

All WLs:全部字元線 All WLs: All character lines

All WLs Floating:全部字元線浮接 All WLs Floating: All character lines are floated.

Barrier Layer:阻障層 Barrier Layer: A barrier layer

BL、BL 1、BL 2、BL 3、BLs:位元線 BL, BL 1, BL 2, BL 3, BLs: Bitline

D:二極體 D: Diode

Fixed Layer:固定磁化層 Fixed Layer: Fixed magnetization layer

Free Layer:自由磁化層 Free Layer: Free magnetization layer

MC、MC 1、MC 2、MC 3、MC 4、MC 5、MC 6、MC 7、MC 8、MC 9:記憶體胞元 MC, MC 1, MC 2, MC 3, MC 4, MC 5, MC 6, MC 7, MC 8, MC 9: Memory Cells

ME:記憶元件 ME: Memory element

Memory Cell Array Layer 1、Memory Cell Array Layer 2、Memory Cell Array Memory Cell Array Layer 1, Memory Cell Array Layer 2, Memory Cell Array

Layer 3:記憶體胞元陣列層 Layer 3: Memory cell array layer

Memory Control Circuit Layer:記憶體控制電路層 Memory Control Circuit Layer

MSW、MSW1、MSW2、MSW3:電晶體 MSW, MSW1, MSW2, MSW3: Transistors

MTJ:磁性穿隧接面記憶體元件 MTJ: Magnetic Tunneling Junction Memory Component

No Operation:無作業 No Operation: No operation

Other BLs:其他位元線 Other BLs: Other bit lines

Other WLs:其他字元線 Other WLs: Other character lines

Other WLs Floating:其他字元線浮接 Other WLs Floating: Other character lines floating

Read:讀取 Read: 謀取

Sensing:感應 Sensing: to sense or perceive

SL:選擇線 SL: Select Line

Substrate:基板 Substrate: substrate

T1:第一時間區間 T1: First Time Zone

Vap:磁性穿隧接面記憶體元件MTJ之反平行磁化方向電壓 Vap: Antiparallel magnetization voltage of MTJ (Magnetic Tunneling Junction Memory) element.

Vpp:磁性穿隧接面記憶體元件MTJ之反平行磁化方向電壓加上齊納二極體ZD之順向導通電壓加上磁性穿隧接面記憶體元件MTJ之平行磁化方向電壓加上齊納二極體ZD之逆向齊納電壓(絕對值) Vpp: The sum of the antiparallel magnetization voltage of the magnetic tunneling junction memory element (MTJ) and the forward conduction voltage of the Zener diode (ZD) plus the parallel magnetization voltage of the MTJ and the reverse Zener voltage of the Zener diode (ZD) (absolute value).

Vr:磁性穿隧接面記憶體元件MTJ之讀取電壓 Vr: Read voltage of MTJ (Magnetic Tunneling Junction) memory element

Vt:齊納二極體ZD之順向導通電壓 Vt: Forward conduction voltage of the Zener diode (ZD)

WL、WL 1、WL 2、WL 3、WLs:字元線 WL, WL 1, WL 2, WL 3, WLs: Character lines

WL Control 1、WL Control 2、WL Control 3:控制訊號 WL Control 1, WL Control 2, WL Control 3: Control Signals

Write 0:寫入0 Write 0: Write 0

Write 1:寫入1 Write 1: Write 1

ZD:齊納二極體 ZD: Zinner Diode

參照所附之圖式以閱讀後述的實施方式可得到較佳的理解;應注意的是,圖式中之特徵尺寸並非按比例繪製,並且圖式中之位置僅做為說明;為使清晰表達與容易理解,可增大或減小尺寸或調整位置。 A better understanding can be obtained by referring to the attached diagrams when reading the implementation methods described below; it should be noted that the dimensions of the features in the diagrams are not drawn to scale, and the positions in the diagrams are for illustrative purposes only; the dimensions may be increased or decreased, or the positions adjusted, for clarity and ease of understanding.

圖1是一先前技術的包含1個MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件、1個電晶體及3個端點的隨機存取記憶體胞元。 Figure 1 shows a prior art random access memory cell comprising one MTJ (Magnetic Tunnel Junction) memory element, one transistor, and three endpoints.

圖2是本揭露之包含1個記憶元件、1個二極體及2個端點的隨機存取記憶體胞元的一實施例。 Figure 2 is an embodiment of the random access memory cell disclosed herein, comprising one memory element, one diode, and two endpoints.

圖3是本揭露之包含1個記憶元件、1個二極體及2個端點的隨機存取記憶體胞元的一實施例。 Figure 3 is an embodiment of the random access memory cell disclosed herein, comprising one memory element, one diode, and two endpoints.

圖4是本揭露之包含1個記憶元件、1個齊納二極體及2個端點的隨機存取記憶體胞元的一實施例。 Figure 4 is an embodiment of the random access memory cell disclosed herein, comprising one memory element, one zircon, and two endpoints.

圖5是本揭露之包含1個記憶元件、1個齊納二極體及2個端點的隨機存取記憶體胞元的一實施例。 Figure 5 is an embodiment of the random access memory cell disclosed herein, comprising one memory element, one zircon, and two endpoints.

圖6是本揭露之包含1個MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件、1個齊納二極體及2個端點的隨機存取記憶體胞元的一實施例。 Figure 6 is an embodiment of the random access memory cell disclosed herein, comprising one MTJ (Magnetic Tunnel Junction) memory element, one Zener diode, and two endpoints.

圖7是本揭露之包含1個MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件、1個齊納二極體及2個端點的隨機存取記憶體胞元的一實施例。 Figure 7 is an embodiment of the random access memory cell disclosed herein, comprising one MTJ (Magnetic Tunnel Junction) memory element, one Zener diode, and two endpoints.

圖8是MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件的一說明圖。 Figure 8 is an illustration of an MTJ (Magnetic Tunnel Junction) memory element.

圖9是MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件的一說明圖。 Figure 9 is an illustration of an MTJ (Magnetic Tunnel Junction) memory element.

圖10是MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件的一說明圖。 Figure 10 is an illustration of an MTJ (Magnetic Tunnel Junction) memory element.

圖11是本揭露之包含1個MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件、1個齊納二極體及2個端點的隨機存取記憶體胞元陣列的一實施例。 Figure 11 is an embodiment of the random access memory cell array disclosed herein, comprising one MTJ (Magnetic Tunnel Junction) memory element, one Zener diode, and two endpoints.

圖12是本揭露之包含1個MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件、1個齊納二極體及2個端點的隨機存取記憶體胞元陣列的一實施例。 Figure 12 is an embodiment of the random access memory cell array disclosed herein, comprising one MTJ (Magnetic Tunnel Junction) memory element, one Zener diode, and two endpoints.

圖13是本揭露之包含1個MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件、1個齊納二極體及2個端點的隨機存取記憶體胞元陣列層的一實施例。 Figure 13 is an embodiment of the random access memory cell array layer disclosed herein, comprising one MTJ (Magnetic Tunnel Junction) memory element, one Zener diode, and two endpoints.

圖14是本揭露之包含複數個隨機存取記憶體胞元陣列層的隨機存取記憶體的一實施例。 Figure 14 is an embodiment of random access memory (RAM) disclosed herein, comprising a plurality of random access memory cell array layers.

圖15是本揭露之隨機存取記憶體胞元陣列中一記憶體胞元的寫入資料1的操作條件的一實施例。 Figure 15 is an example of an embodiment of the operational conditions for writing data 1 to a memory cell in the random access memory cell array disclosed herein.

圖16是本揭露之隨機存取記憶體胞元陣列中一記憶體胞元的寫入資料0的操作條件的一實施例。 Figure 16 is an example of an embodiment of the operational conditions for writing data 0 to a memory cell in a random access memory cell array disclosed herein.

圖17是本揭露之隨機存取記憶體胞元陣列中一記憶體胞元的讀取資料的操作條件的一實施例。 Figure 17 is an example of the operational conditions for reading data from a memory cell in the random access memory cell array disclosed herein.

圖18是本揭露之隨機存取記憶體胞元陣列中維持記憶體胞元的資料的操作條件的一實施例。 Figure 18 is an example of an embodiment of the operational conditions for maintaining data in memory cells within a random access memory cell array disclosed herein.

下述的揭露內容將提供不同的本揭露之實施例以實施本揭露之物的不同特徵,並且該些實施例僅做為例示而非做為限制。 The following disclosure provides different embodiments of this disclosure to implement different features of the disclosed object, and these embodiments are by way of illustration only and not limitation.

參照所附之圖式以閱讀後述的本揭露之實施方式內容可得到較佳的理解;應注意的是,圖式中之特徵尺寸並非按比例繪製,並且圖式中之位置僅做為說明;為使清晰表達與容易理解,可增大或減小尺寸或調整位置。 A better understanding of the embodiments of this disclosure can be obtained by referring to the accompanying drawings; it should be noted that the dimensions of the features in the drawings are not to scale, and the positions in the drawings are for illustrative purposes only; dimensions may be increased or decreased, or positions adjusted, for clarity and ease of understanding.

目前有各種形式的隨機存取記憶體(RAM)存在,如六個電晶體之靜態隨機存取記憶體(6T SRAM)及由一個電晶體與一個立體電容元件組成之動態隨機存取記憶體(1T1C DRAM),但6T SRAM及1T1C DRAM各自具有如前述的先前技術中的缺點。現行的一般邏輯電路晶片中有許多晶片需要包含具有大數量的記憶體胞元的隨機存取記憶體於該晶片中以暫時儲存晶片操作過程中的大量資料;並且較低價格的高密度或能立體堆疊記憶體胞元的高容量或高速的隨機存取記憶體的需求持續增加。因此,隨機存取記憶體能夠與一般邏輯電路以較低成本共同製作於一晶片中以及占用較小晶片面積的高密度或能立體堆疊記憶體胞元的高容量或高速的隨機存取記憶體為目前的需求。 Currently, various forms of random access memory (RAM) exist, such as static random access memory (6T SRAM) with six transistors and dynamic random access memory (1T1C DRAM) consisting of one transistor and one 3D capacitor. However, both 6T SRAM and 1T1C DRAM have the disadvantages mentioned above in the prior art. Many current general logic circuit chips require random access memory with a large number of memory cells to temporarily store large amounts of data during chip operation; and the demand for lower-cost, high-density, or high-capacity or high-speed random access memory with stackable memory cells continues to increase. Therefore, there is a current demand for random access memory (RAM) that can be co-fabricated with general logic circuits on a single chip at a lower cost, and for high-density, high-capacity, or high-speed RAM that occupies a small chip area and can three-dimensionally stack memory cells.

參照圖1,一先前技術係為如圖1之一種隨機存取記憶體之記憶體胞元MC,其中係為包含1個MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件MTJ、1個電晶體MSW及3個端點接線的隨機存取記憶體胞元,該3個端點接線係分別為字元線WL、位元線BL及選擇線SL,該磁性穿隧接面記憶體元件MTJ係用於記憶資料,該字元線WL及位元線BL係用於該磁性穿隧接面記憶體元件MTJ的選取,該電晶體MSW係用於該磁性穿隧接面記憶體元件MTJ的選取控制開關,該選擇線SL係配合位元線BL用於該磁性穿隧接面記憶體元件MTJ的記憶資料的讀寫電壓訊號控制。然而,該先前技術之電晶體MSW及3個端點接線會使該記憶體胞元占用固定的晶片基板面積,而使隨機存取記憶體難以高密度化或難以立體堆疊記憶體胞元。 Referring to Figure 1, a prior art is a memory cell MC for random access memory as shown in Figure 1, which includes one MTJ (Magnetic Tunnel). A random access memory cell consisting of a magnetic tunneling junction memory element (MTJ), a transistor MSW, and three endpoint wires: a word line (WL), a bit line (BL), and a select line (SL). The MTJ is used to store data. The WL and BL lines are used to select the MTJ. The MSW is used as a control switch for selecting the MTJ. The SL line, in conjunction with the BL line, controls the read/write voltage signals for the MTJ's stored data. However, the prior art's transistor MSW and three terminal wires cause the memory cell to occupy a fixed area of the chip substrate, making it difficult to achieve high density of randomly accessed memory or to stack memory cells in three dimensions.

本揭露對於前述之需求,為改善如先前技術之隨機存取記憶體胞元占用較大的固定的晶片基板面積之難以高密度化或難以立體堆疊記憶體胞元 的缺點,本揭露提出僅包含1個記憶元件、1個二極體及2個端點接線的隨機存取記憶體胞元及隨機存取記憶體胞元陣列,且本揭露提出的該隨機存取記憶體胞元陣列於操作過程中能不受到操作中的記憶體胞元以外的其他的記憶體胞元所儲存的資料造成的干擾,亦不會影響到操作中的記憶體胞元以外的其他的記憶體胞元所儲存的資料。本揭露提出的僅包含1個記憶元件、1個二極體及2個端點接線的隨機存取記憶體胞元較先前技術之包含1個記憶元件、1個電晶體及3個端點接線的隨機存取記憶體胞元佔用較小的晶片基板面積,因此,於相同的晶片基板面積下可提高隨機存取記憶體的密度,節省成本,並且較易於立體堆疊記憶體胞元。 To address the aforementioned needs and overcome the shortcomings of prior art where random access memory (RAM) cells occupy a large area of a fixed chip substrate, making it difficult to achieve high density or three-dimensional stacking of RAM cells, this disclosure proposes a RAM cell and RAM cell array comprising only one memory element, one diode, and two terminal connections. Furthermore, the RAM cell array proposed in this disclosure is unaffected by data stored in other memory cells besides the currently operating memory cell during operation, and does not affect the data stored in other memory cells besides the currently operating memory cell. The random access memory (RAM) cell disclosed herein, comprising only one memory element, one diode, and two terminal connections, occupies a smaller chip substrate area than the prior art RAM cell comprising one memory element, one transistor, and three terminal connections. Therefore, with the same chip substrate area, the RAM density can be increased, costs can be saved, and it is easier to stack memory cells in three dimensions.

參照圖2,本揭露對於前述之需求提出不同的實施例,本揭露提出之一實施例為如圖2之一種隨機存取記憶體,包括:至少一記憶體胞元陣列,該記憶體胞元陣列包括:至少一記憶體胞元MC,該記憶體胞元MC具有二個端點,該記憶體胞元的第一端點連接至一字元線WL,該記憶體胞元MC的第二端點連接至一位元線BL,該記憶體胞元MC包括:一種(A type of)二極體D,該二極體D具有一陽極與一陰極,該二極體D的陽極連接至該字元線WL;以及一記憶元件ME,該記憶元件ME具有二個端點,該記憶元件ME的第一端點連接至該二極體D的陰極,該記憶元件ME的第二端點連接至該位元線BL,其中,該二極體D之特性具有一順向導通電壓(Vt),並且該記憶元件ME儲存有一資料,該記憶元件ME的低電阻狀態為資料第一狀態,該記憶元件的高電阻狀態為資料第二狀態。 Referring to Figure 2, this disclosure proposes different embodiments to address the aforementioned requirements. One embodiment proposed in this disclosure is a random access memory as shown in Figure 2, comprising: at least one memory cell array, the memory cell array including: at least one memory cell MC, the memory cell MC having two endpoints, the first endpoint of the memory cell being connected to a word line WL, and the second endpoint of the memory cell MC being connected to a bit line BL, the memory cell MC including: a (Type A) A diode D has an anode and a cathode, the anode of which is connected to the character line WL; and a memory element ME has two terminals, the first terminal of which is connected to the cathode of the diode D, and the second terminal of which is connected to the character line BL. The diode D has a forward conduction voltage (Vt), and the memory element ME stores data. The low resistance state of the memory element ME is the first data state, and the high resistance state of the memory element is the second data state.

圖2中的記憶元件ME與先前技術圖1中的磁性穿隧接面記憶體元件MTJ具相同的儲存資料的功能,該記憶元件ME可為變阻式記憶體(Resistive RAM,RRAM)元件或相變化記憶體(Phase Change Memory,PCM)元件。先前技術圖1中的電晶體MSW作為磁性穿隧接面記憶體元件MTJ的選取與避免不同的 記憶體胞元MC於讀寫時的相互干擾,但先前技術圖1佔較大晶片基板面積及不易立體堆疊記憶體胞元MC。本揭露圖2利用字元線WL選取記憶元件ME及採用二極體D的電流單極性特性以避免不同的記憶體胞元MC於讀寫時的相互干擾,以提高隨機存取記憶體的密度,節省成本,並且較易於立體堆疊記憶體胞元MC。 The memory element ME in Figure 2 has the same data storage function as the magnetic tunneling junction memory element MTJ in the prior art Figure 1. The memory element ME can be a resistive RAM (RRAM) element or a phase change memory (PCM) element. The transistor MSW in the prior art Figure 1, used as the magnetic tunneling junction memory element MTJ, avoids mutual interference between different memory cells MC during read and write operations. However, the prior art Figure 1 occupies a larger chip substrate area and makes it difficult to three-dimensionally stack memory cells MC. Figure 2 of this disclosure utilizes character lines (WL) to select memory elements (ME) and employs the unipolar current characteristic of diodes (D) to avoid mutual interference between different memory cells (MC) during read and write operations. This improves the density of random access memory, saves costs, and facilitates the three-dimensional stacking of memory cells (MC).

參照圖3,本揭露對於前述之需求提出不同的實施例,本揭露提出之一實施例為如圖3之一種隨機存取記憶體,包括:至少一記憶體胞元陣列,該記憶體胞元陣列包括:至少一記憶體胞元MC,該記憶體胞元MC具有二個端點,該記憶體胞元MC的第一端點連接至一字元線WL,該記憶體胞元MC的第二端點連接至一位元線BL,該記憶體胞元MC包括:一記憶元件ME,該記憶元件ME具有二個端點,該記憶元件ME的第一端點連接至該字元線WL;以及一種(A type of)二極體D,該二極體D具有一陽極與一陰極,該二極體D的陽極連接至該記憶元件ME的第二端點,該二極體D的陰極連接至該位元線BL,其中,該二極體D之特性具有一順向導通電壓(Vt),並且該記憶元件ME儲存有一資料,該記憶元件ME的低電阻狀態為資料第一狀態,該記憶元件ME的高電阻狀態為資料第二狀態。 Referring to Figure 3, this disclosure proposes different embodiments to address the aforementioned requirements. One embodiment proposed in this disclosure is a random access memory as shown in Figure 3, comprising: at least one memory cell array, the memory cell array including: at least one memory cell MC, the memory cell MC having two endpoints, the first endpoint of the memory cell MC being connected to a word line WL, and the second endpoint of the memory cell MC being connected to a bit line BL, the memory cell MC including: a memory element ME, the memory element ME having two endpoints, the first endpoint of the memory element ME being connected to the word line WL; and a (Type A) A diode D has an anode and a cathode. The anode of the diode D is connected to a second terminal of the memory element ME, and the cathode of the diode D is connected to the bit line BL. The diode D has a forward conduction voltage (Vt), and the memory element ME stores data. The low resistance state of the memory element ME is the first data state, and the high resistance state of the memory element ME is the second data state.

圖3中的記憶元件ME與先前技術圖1中的磁性穿隧接面記憶體元件MTJ具相同的儲存資料的功能,該記憶元件ME可為變阻式記憶體(Resistive RAM,RRAM)元件或相變化記憶體(Phase Change Memory,PCM)元件。先前技術圖1中的電晶體MSW作為磁性穿隧接面記憶體元件MTJ的選取與避免不同的記憶體胞元MC於讀寫時的相互干擾,但先前技術圖1佔較大晶片基板面積及不易立體堆疊記憶體胞元MC。本揭露圖3利用字元線WL選取記憶元件ME及採用二極體D的電流單極性特性以避免不同的記憶體胞元MC於讀寫時的相互干擾, 以提高隨機存取記憶體的密度,節省成本,並且較易於立體堆疊記憶體胞元MC。 The memory element ME in Figure 3 has the same data storage function as the magnetic tunneling junction memory element MTJ in the prior art Figure 1. The memory element ME can be a resistive RAM (RRAM) element or a phase change memory (PCM) element. The transistor MSW in the prior art Figure 1 is used as the magnetic tunneling junction memory element MTJ to avoid mutual interference between different memory cells MC during reading and writing. However, the prior art Figure 1 occupies a larger chip substrate area and is not easy to stack memory cells MC in three dimensions. Figure 3 of this disclosure utilizes character lines (WL) to select memory elements (ME) and employs the unipolar current characteristic of diodes (D) to avoid mutual interference between different memory cells (MC) during read and write operations, thereby increasing the density of random access memory, saving costs, and facilitating the three-dimensional stacking of memory cells (MC).

該記憶元件ME可儲存一邏輯1或邏輯0的二進制的資料,該邏輯1或邏輯0的二進制的資料由該記憶元件ME的低電阻狀態(資料第一狀態)或高電阻狀態(資料第二狀態)來決定;該低電阻狀態(資料第一狀態)可為邏輯1或邏輯0,該高電阻狀態(資料第二狀態)可為邏輯0或邏輯1。 The memory element ME can store binary data of logic 1 or logic 0, which is determined by the low resistance state (first data state) or high resistance state (second data state) of the memory element ME; the low resistance state (first data state) can be logic 1 or logic 0, and the high resistance state (second data state) can be logic 0 or logic 1.

參照圖4,本揭露對於前述之需求提出不同的實施例,本揭露提出之一實施例為如圖4之一種隨機存取記憶體的一記憶體胞元陣列中的一記憶體胞元MC,該記憶體胞元MC中的齊納二極體(Zener Diode)ZD係為圖2中的一種二極體D的一種實施例,圖4中之該齊納二極體ZD之特性更具有一逆向齊納電壓(Vz)。 Referring to Figure 4, this disclosure proposes different embodiments to address the aforementioned requirements. One embodiment is a memory cell MC in a random access memory array, as shown in Figure 4. The Zener diode ZD in the memory cell MC is an embodiment of a diode D shown in Figure 2. The Zener diode ZD in Figure 4 further features a reverse Zener voltage (Vz).

圖4中的記憶元件ME與先前技術圖1中的磁性穿隧接面記憶體元件MTJ具相同的儲存資料的功能,該記憶元件ME可為變阻式記憶體(Resistive RAM,RRAM)元件、相變化記憶體(Phase Change Memory,PCM)元件、鐵電記憶體(Ferroelectric RAM,FeRAM)元件或磁性穿隧接面記憶體(Magnetic Tunnel Junction Memory,MTJ Memory)元件。先前技術圖1中的電晶體MSW作為磁性穿隧接面記憶體元件MTJ的選取與避免不同的記憶體胞元MC於讀寫時的相互干擾,但先前技術圖1佔較大晶片基板面積及不易立體堆疊記憶體胞元MC。本揭露圖4利用字元線WL選取記憶元件ME及採用齊納二極體ZD的於較低偏壓時的電流單極性特性以避免不同的記憶體胞元MC於讀寫時的相互干擾,以及採用齊納二極體ZD於較高逆向偏壓時的電流雙極性特性以執行需雙極性寫入資料的記憶元件ME的寫入作業,以提高隨機存取記憶體的密度,節省成本,並且較易於立體堆疊記憶體胞元MC。 The memory element ME in Figure 4 has the same data storage function as the magnetic tunneling junction memory element MTJ in the prior art Figure 1. The memory element ME can be a resistive RAM (RRAM) element, a phase change memory (PCM) element, a ferroelectric RAM (FeRAM) element, or a magnetic tunneling junction memory (MTJ) element. The transistor MSW in the prior art Figure 1 is used as the magnetic tunneling junction memory element MTJ to avoid mutual interference between different memory cells MC during reading and writing. However, the prior art Figure 1 occupies a larger chip substrate area and is not easy to stack memory cells MC in three dimensions. Figure 4 of this disclosure utilizes the character line WL to select memory elements ME and employs the unipolar current characteristic of a ZD at lower bias voltage to avoid mutual interference between different memory cells MC during read and write operations. It also utilizes the bipolar current characteristic of the ZD at higher reverse bias voltage to perform write operations on memory elements ME that require bipolar data writing. This increases the density of random access memory, saves costs, and facilitates the three-dimensional stacking of memory cells MC.

參照圖5,本揭露對於前述之需求提出不同的實施例,本揭露提出之一實施例為如圖5之一種隨機存取記憶體的一記憶體胞元陣列中的一記憶體胞元MC,該記憶體胞元MC中的齊納二極體ZD係為圖3中的一種二極體D的一種實施例,圖5中之該齊納二極體ZD之特性更具有一逆向齊納電壓(Vz)。 Referring to Figure 5, this disclosure proposes different embodiments to address the aforementioned requirements. One embodiment is a memory cell MC in a random access memory array, as shown in Figure 5. The Zener diode ZD in the memory cell MC is an embodiment of a diode D shown in Figure 3. The Zener diode ZD in Figure 5 further features a reverse Zener voltage (Vz).

圖5中的記憶元件ME與先前技術圖1中的磁性穿隧接面記憶體元件MTJ具相同的儲存資料的功能,該記憶元件ME可為變阻式記憶體(Resistive RAM,RRAM)元件、相變化記憶體(Phase Change Memory,PCM)元件、鐵電記憶體(Ferroelectric RAM,FeRAM)元件或磁性穿隧接面記憶體(Magnetic Tunnel Junction Memory,MTJ Memory)元件。先前技術圖1中的電晶體MSW作為磁性穿隧接面記憶體元件MTJ的選取與避免不同的記憶體胞元MC於讀寫時的相互干擾,但先前技術圖1佔較大晶片基板面積及不易立體堆疊記憶體胞元MC。本揭露圖5利用字元線WL選取記憶元件ME及採用齊納二極體ZD的於較低偏壓時的電流單極性特性以避免不同的記憶體胞元MC於讀寫時的相互干擾,以及採用齊納二極體ZD於較高逆向偏壓時的電流雙極性特性以執行需雙極性寫入資料的記憶元件ME的寫入作業,以提高隨機存取記憶體的密度,節省成本,並且較易於立體堆疊記憶體胞元MC。 The memory element ME in Figure 5 has the same data storage function as the magnetic tunneling junction memory element MTJ in the prior art Figure 1. The memory element ME can be a resistive RAM (RRAM) element, a phase change memory (PCM) element, a ferroelectric RAM (FeRAM) element, or a magnetic tunneling junction memory (MTJ) element. The transistor MSW in the prior art Figure 1 is used as the magnetic tunneling junction memory element MTJ to avoid mutual interference between different memory cells MC during reading and writing. However, the prior art Figure 1 occupies a larger chip substrate area and is not easy to stack memory cells MC in three dimensions. Figure 5 of this disclosure utilizes the character line WL to select memory elements ME and employs the unipolar current characteristic of a ZD at lower bias voltage to avoid mutual interference between different memory cells MC during read and write operations. It also utilizes the bipolar current characteristic of the ZD at higher reverse bias voltage to perform write operations on memory elements ME that require bipolar data writing. This increases the density of random access memory, saves costs, and facilitates the three-dimensional stacking of memory cells MC.

參照圖6,根據本揭露之至少一實施例,其中該MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件MTJ係為記憶元件ME的一實施例,該記憶元件ME的其他實施例可為變阻式記憶體(Resistive RAM,RRAM)元件、相變化記憶體(Phase Change Memory,PCM)元件或鐵電記憶體(Ferroelectric RAM,FeRAM)元件,該一種二極體D係為齊納二極體ZD。 Referring to Figure 6, according to at least one embodiment of this disclosure, the MTJ (Magnetic Tunnel Junction) memory element is an embodiment of the memory element ME. Other embodiments of the memory element ME may be resistive RAM (RRAM), phase change memory (PCM), or ferroelectric RAM (FeRAM), and the diode D is a zircon diode ZD.

參照圖7,根據本揭露之至少一實施例,其中該MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件MTJ係為記憶元件ME的一實施例,該記憶元件ME的其他實施例可為變阻式記憶體(Resistive RAM,RRAM)元件、相 變化記憶體(Phase Change Memory,PCM)元件或鐵電記憶體(Ferroelectric RAM,FeRAM)元件,該一種二極體D係為齊納二極體ZD。 Referring to Figure 7, according to at least one embodiment of this disclosure, the MTJ (Magnetic Tunnel Junction) memory element is an embodiment of the memory element ME. Other embodiments of the memory element ME may be resistive RAM (RRAM), phase change memory (PCM), or ferroelectric RAM (FeRAM), and the diode D is a nano-diode ZD.

參照圖8,圖中所示為MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件MTJ,該磁性穿隧接面記憶體元件MTJ具兩個端點,該磁性穿隧接面記憶體元件MTJ主要由3個層組成,包含穿隧阻障層Barrier Layer及藉由穿隧阻障層Barrier Layer分隔開的固定磁化層Fixed Layer及自由磁化層Free Layer。圖中箭頭符號所示為磁化方向,固定磁化層Fixed Layer之磁化方向係於製造過程中為固定,圖中自由磁化層Free Layer之箭頭符號為雙向係為表示該自由磁化層Free Layer的磁化方向可於該磁性穿隧接面記憶體元件MTJ的資料寫入過程中決定為與固定磁化層Fixed Layer之磁化方向同向或反向。 Referring to Figure 8, the figure shows an MTJ (Magnetic Tunnel Junction) memory element. The MTJ has two endpoints and is mainly composed of three layers: a tunneling barrier layer, a fixed magnetization layer, and a free magnetization layer, separated by the barrier layer. The arrows in the figure indicate the magnetization direction. The magnetization direction of the fixed magnetization layer is fixed during the manufacturing process. The bidirectional arrows for the free magnetization layer indicate that its magnetization direction can be determined during the data writing process of the MTJ, either in the same direction or opposite to the magnetization direction of the fixed magnetization layer.

參照圖9,圖中所示為MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件MTJ,該磁性穿隧接面記憶體元件MTJ經施加一反平行磁化方向(anti-parallel magnetization direction)電壓(Vap)後,使自由磁化層Free Layer的磁化方向與固定磁化層Fixed Layer之磁化方向為反向,使磁性穿隧接面記憶體元件MTJ的兩個端點間形成高電阻狀態。 Referring to Figure 9, the figure shows an MTJ (Magnetic Tunnel Junction) memory element. When an anti-parallel magnetization direction voltage (Vap) is applied to the MTJ, the magnetization direction of the free layer is reversed compared to the magnetization direction of the fixed layer, creating a high-resistance state between the two terminals of the MTJ.

參照圖10,圖中所示為MTJ(Magnetic Tunnel Junction)磁性穿隧接面記憶體元件MTJ,該磁性穿隧接面記憶體元件MTJ經施加一平行磁化方向(parallel magnetization direction)電壓(Vp)後,使自由磁化層Free Layer的磁化方向與固定磁化層Fixed Layer之磁化方向為同向,使磁性穿隧接面記憶體元件MTJ的兩個端點間形成低電阻狀態。 Referring to Figure 10, the figure shows an MTJ (Magnetic Tunnel Junction) memory element. When a parallel magnetization direction voltage (Vp) is applied to the MTJ, the magnetization direction of the free layer and the fixed layer are aligned, creating a low-resistance state between the two endpoints of the MTJ.

其中,磁性穿隧接面記憶體元件MTJ及齊納二極體ZD可以用沉積方式構成,可以使用例如物理氣相沉積(Physical Vapor Deposition,PVD)、化學氣相沉積(Chemical Vapor Deposition,CVD)、原子層沉積製程(Atomic Layer Deposition Process,ALD Process)或是其他適合的製程。其中,穿隧阻障層 Barrier Layer之材料可為鎂氧化物(MgO)或為其他合適材料,固定磁化層Fixed Layer之材料可為鈷鐵硼(CoFeB)及包括鉑(Pt)的反鐵磁材料(Anti-Ferro Magnetic Material,AFM)所組成或為其他合適材料,自由磁化層Free Layer之材料可為鈷鐵硼(CoFeB)或為其他合適材料。 The magnetic tunneling junction (MTJ) memory element and the z-nano diode (ZD) can be constructed by deposition, using methods such as physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD), or other suitable processes. The tunneling barrier layer can be made of magnesium oxide (MgO) or other suitable materials. The fixed magnetization layer can be composed of cobalt iron boron (CoFeB) and antiferromagnetic materials (AFM) including platinum (Pt), or other suitable materials. The free magnetization layer can also be made of cobalt iron boron (CoFeB) or other suitable materials.

根據本揭露之至少一實施例,其中該記憶元件ME的低電阻狀態係由施加於該記憶元件ME的二個端點的一第一電壓訊號條件所決定,該記憶元件ME的高電阻狀態係由施加於該記憶元件ME的二個端點的一第二電壓訊號條件所決定,該記憶元件ME儲存的資料的讀取係藉由施加一第三電壓訊號條件於該記憶元件ME的二個端點以偵測該記憶元件ME的電阻狀態,其中該第一電壓訊號條件與該第二電壓訊號條件的電壓極性為相同,並且該第二電壓訊號條件的絕對電壓值大於該第一電壓訊號條件的絕對電壓值,該第三電壓訊號條件的絕對電壓值小於該第一電壓訊號條件的絕對電壓值與該第二電壓訊號條件的絕對電壓值;其中該記憶元件ME可為變阻式記憶體(Resistive RAM,RRAM)元件或相變化記憶體(Phase Change Memory,PCM)元件。 According to at least one embodiment of this disclosure, the low-resistance state of the memory element ME is determined by a first voltage signal condition applied to the two terminals of the memory element ME, the high-resistance state of the memory element ME is determined by a second voltage signal condition applied to the two terminals of the memory element ME, and the reading of data stored in the memory element ME is performed by applying a third voltage signal condition to the two terminals of the memory element ME to detect the memory. The resistive state of the element ME, wherein the voltage polarity of the first voltage signal condition and the second voltage signal condition is the same, and the absolute voltage value of the second voltage signal condition is greater than the absolute voltage value of the first voltage signal condition, and the absolute voltage value of the third voltage signal condition is less than the absolute voltage values of the first voltage signal condition and the second voltage signal condition; wherein the memory element ME can be a resistive RAM (RRAM) element or a phase change memory (PCM) element.

參照圖2~圖5,其中該記憶元件ME可經由施加於字元線WL及位元線BL間的大於二極體D(或齊納二極體ZD)的順向導通電壓(Vt)的正偏壓而於該記憶元件ME的兩個端點得到該第一電壓訊號條件、該第二電壓訊號條件與該第三電壓訊號條件。變阻式記憶體(Resistive RAM,RRAM)元件或相變化記憶體(Phase Change Memory,PCM)元件可經設計為施加不同大小的單極性電流或單極性偏壓而於低電阻狀態與高電阻狀態間切換,並經較小的偏壓來讀取記憶體元件的電阻狀態。 Referring to FIGS. 2 to 5 , the memory element ME can obtain the first voltage signal condition, the second voltage signal condition and the third voltage signal condition at the two end points of the memory element ME by applying a forward bias voltage greater than the forward conduction voltage (Vt) of the diode D (or Zener diode ZD) between the word line WL and the bit line BL. Resistive RAM (RRAM) elements or Phase Change Memory (PCM) elements can be designed to switch between low resistance states and high resistance states by applying unipolar currents or unipolar bias voltages of different sizes, and use smaller bias voltages to read the resistance state of the memory element.

根據本揭露之至少一實施例,其中該記憶元件ME的低電阻狀態係由施加於該記憶元件ME的二個端點的一第一電壓訊號條件所決定,該記憶元件ME的高電阻狀態係由施加於該記憶元件ME的二個端點的一第二電壓訊號 條件所決定,該記憶元件ME儲存的資料的讀取係藉由施加一第三電壓訊號條件於該記憶元件ME的二個端點以偵測該記憶元件ME的電阻狀態,其中該第一電壓訊號條件與該第二電壓訊號條件的電壓極性為相反,該第三電壓訊號條件的絕對電壓值小於該第一電壓訊號條件的絕對電壓值與該第二電壓訊號條件的絕對電壓值;其中該記憶元件ME可為變阻式記憶體(Resistive RAM,RRAM)元件、相變化記憶體(Phase Change Memory,PCM)元件、鐵電記憶體(Ferroelectric RAM,FeRAM)元件或磁性穿隧接面記憶體(Magnetic Tunnel Junction Memory,MTJ Memory)MTJ元件,該磁性穿隧接面記憶體元件MTJ包括藉由穿隧阻障層Barrier Layer分隔開的固定磁化層Fixed Layer及自由磁化層Free Layer。 According to at least one embodiment of this disclosure, the low resistance state of the memory element ME is determined by a first voltage signal condition applied to the two terminals of the memory element ME, the high resistance state of the memory element ME is determined by a second voltage signal condition applied to the two terminals of the memory element ME, and the reading of data stored in the memory element ME is performed by applying a third voltage signal condition. The memory element ME has two terminals for detecting its resistive state. The first voltage signal condition and the second voltage signal condition have opposite voltage polarities. The absolute voltage value of the third voltage signal condition is less than the absolute voltage values of the first and second voltage signal conditions. The memory element ME can be a resistive memory. RAM (RRAM) elements, phase change memory (PCM) elements, ferroelectric RAM (FeRAM) elements, or magnetic tunneling junction memory (MTJ) elements, wherein the MTJ element includes a fixed magnetization layer and a free magnetization layer separated by a tunneling barrier layer.

參照圖4及圖5,其中該記憶元件ME可經由施加於字元線WL及位元線BL間的大於齊納二極體ZD的順向導通電壓(Vt)的正偏壓及大於齊納二極體ZD的齊納電壓(Vz)的逆偏壓而於該記憶元件ME的兩個端點得到該第一電壓訊號條件、該第二電壓訊號條件與該第三電壓訊號條件。變阻式記憶體(Resistive RAM,RRAM)元件、相變化記憶體(Phase Change Memory,PCM)元件、鐵電記憶體(Ferroelectric RAM,FeRAM)元件或磁性穿隧接面記憶體(Magnetic Tunnel Junction Memory,MTJ Memory)MTJ元件可經設計為施加不同大小或相同大小的雙極性電流或雙極性偏壓而於低電阻狀態與高電阻狀態間切換,並經較小的正偏壓來讀取記憶體元件的電阻狀態。 Referring to FIGS. 4 and 5 , the memory element ME can obtain the first voltage signal condition, the second voltage signal condition and the third voltage signal condition at the two end points of the memory element ME by applying a forward bias voltage greater than the forward conduction voltage (Vt) of the Zener diode ZD and a reverse bias voltage greater than the Zener voltage (Vz) of the Zener diode ZD between the word line WL and the bit line BL. Resistive RAM (RRAM), phase change memory (PCM), ferroelectric RAM (FeRAM), and magnetic tunnel junction memory (MTJ) devices can be designed to switch between low and high resistance states by applying different or the same amount of bipolar current or bipolar bias voltage, and the resistance state of the memory device can be read with a small forward bias voltage.

變阻式記憶體(Resistive RAM,RRAM)元件係利用在材料中形成或斷開導電細絲來改變材料的電阻值,以達到儲存資料的目的。基本的變阻式記憶體是由上下兩層金屬電極及在中間的過渡金屬氧化層(Transition Metal Oxide,TMO)所組成,主要是利用過渡金屬氧化層會隨著所施加偏壓的改變而產生不同電阻值。依所施加於變阻式記憶體的電壓極性,電阻切換模式可分為單極性(Unipolar)與雙極性(Bipolar)兩種分類;單極性為使用相同極性但不同大小的電 壓來進行設定(即低電阻狀態)與重設(即高電阻狀態),重設是使用焦耳熱效應熔斷導電細絲;雙極性為使用相反極性電壓來進行設定(即低電阻狀態)與重設(即高電阻狀態)。而變阻式記憶體的記憶體材料層可以例如是金屬氧化物的電阻材料,金屬氧化物可以是氧化鉿、氧化鋁、氧化鎳、氧化鉀、氧化鈦或其他合適的氧化物材料。依據氧化物材料沉積的方法、氧與金屬的比例及其他的製程條件,可以調整記憶體材料層而得到不同的特性。 Resistive RAM (RRAM) devices utilize the formation or interruption of conductive filaments within a material to change its resistance, thereby achieving the purpose of data storage. A basic RRAM consists of two layers of metal electrodes and a transition metal oxide (TMO) layer in between. The key advantage is that the TMO layer generates different resistance values depending on the applied bias voltage. Depending on the polarity of the voltage applied to the variable resistance memory, the resistance switching modes can be classified into two types: unipolar and bipolar. Unipolar uses voltages of the same polarity but different magnitudes for setting (i.e., low resistance state) and resetting (i.e., high resistance state), with the resetting process using Joule heating to melt the conductive filament. Bipolar uses voltages of opposite polarities for setting (i.e., low resistance state) and resetting (i.e., high resistance state). The memory material layer of the variable resistance memory can be, for example, a resistive material of metal oxide, such as iron oxide, aluminum oxide, nickel oxide, potassium oxide, titanium oxide, or other suitable oxide materials. Different properties can be obtained by adjusting the memory material layers according to the method of oxide material deposition, the oxygen-to-metal ratio, and other process conditions.

相變化記憶體(Phase Change Memory,PCM)元件利用相變化材料經過加熱和冷卻以改變材料的晶態結構(結晶態Crystalline State-低電阻狀態或非晶態Amorphous State-高電阻狀態),而切換於高電阻狀態或低電阻狀態間以儲存資料。相變化記憶體係經由調整施加於相變化材料的電流大小與脈衝寬度來控制相變化材料的相變狀態(結晶態Crystalline State-低電阻狀態或非晶態Amorphous State-高電阻狀態)。施加一較短及較大的電流脈衝以加熱材料及快速冷卻可使相變化材料形成非晶態Amorphous State之高電阻狀態。相變化記憶體的記憶體材料層可以是硫族合金化合物(Chalcogenide Alloy),硫族合金化合物例如是GeSbTe(GST)。 Phase-change memory (PCM) devices utilize phase-change materials to change their crystalline structure (crystalline state - low resistance or amorphous state - high resistance) through heating and cooling, switching between these states to store data. PCM controls the phase-change state (crystalline state - low resistance or amorphous state - high resistance) of the material by adjusting the magnitude and pulse width of the current applied to it. Applying a shorter and larger current pulse to heat the material and then rapidly cooling it causes the phase-change material to form the amorphous state, which has high resistance. The memory material layer of phase-change memory can be a chalcogenide alloy, such as GeSbTe (GST).

鐵電記憶體(Ferroelectric RAM,FeRAM)元件利用改變鐵電材料的極化方向,而切換於高電阻狀態和低電阻狀態之間以儲存資料。鐵電材料具有平衡狀態體電偶極矩(equilibrium-state bulk electric dipole moment),通常,可通過施加適度的外加電場來控制電偶極矩極化的量值及其方向排列,方向的改變可指示其所儲存的資料(高電阻狀態或低電阻狀態)。鐵電記憶體的鐵電層可為二氧化鉿(HfO2)及摻雜而形成的鐵電材料或是鈦酸鋇(BaTiO3)鐵電材料等等。利用鐵電材料的自發極化原理儲存資料,鐵電材料中的電偶極矩在外加不同電場時會改變極化方向,不同的極化方向造成不同的電阻狀態,鐵電材料在移除 外加電場後可保持部分極化狀態,進而保持鐵電材料的高電阻狀態或低電阻狀態以儲存資料。 Ferroelectric RAM (FeRAM) devices store data by switching between high-resistance and low-resistance states by changing the polarization direction of the ferroelectric material. Ferroelectric materials possess an equilibrium-state bulk electric dipole moment. Typically, the magnitude and orientation of the dipole moment polarization can be controlled by applying a suitable external electric field. Changes in orientation indicate the stored data (high-resistance or low-resistance state). The ferroelectric layer of ferroelectric memory can be made of iron dioxide (HfO2) and doped ferroelectric materials, or barium titanium oxide (BaTiO3) ferroelectric materials, etc. Data storage is achieved by utilizing the spontaneous polarization principle of ferroelectric materials. The electric dipole moment in a ferroelectric material changes its polarization direction when different electric fields are applied. Different polarization directions result in different resistance states. After the applied electric field is removed, the ferroelectric material can retain some polarization, thus maintaining either a high or low resistance state to store data.

參照圖11,根據本揭露之至少一實施例,其中該記憶體胞元陣列MC1~MC9包括有複數個記憶體胞元MC1~MC9、複數個字元線WL1~WL3以及複數個位元線BL1~BL3,該複數個記憶體胞元MC1~MC9配置於一基板平面上方以第一方向及垂直於該第一方向的第二方向的平行於該基板平面的陣列狀排列,該複數個字元線WL1~WL3沿第一方向配置,該複數個位元線BL1~BL3沿第二方向配置;以及該隨機存取記憶體更包括有字元線解碼驅動電路101、位元線感應電路102及位元線解碼驅動電路102,其中該複數個字元線WL1~WL3連接至該字元線解碼驅動電路101,該複數個位元線BL1~BL3連接至該位元線感應電路102及該位元線解碼驅動電路102,其中,該字元線解碼驅動電路101包含複數個字元線開關MSW1~3以各別與該複數個字元線WL1~WL3連接,該複數個字元線開關MSW1~3係為電晶體開關或傳輸閘(Transmission Gate)開關。該隨機存取記憶體更包括有時序控制電路103,該時序控制電路103連接字元線解碼驅動電路101、位元線感應電路102及位元線解碼驅動電路102,該字元線解碼驅動電路101經WL Control1~3之控制訊號控制該複數個字元線開關MSW1~3。其中,圖11中的磁性穿隧接面記憶體元件MTJ係為圖2中的記憶元件ME及圖4中的記憶元件ME的一實施例,圖11中的該些磁性穿隧接面記憶體元件MTJ可以以變阻式記憶體(Resistive RAM,RRAM)元件、相變化記憶體(Phase Change Memory,PCM)元件或鐵電記憶體(Ferroelectric RAM,FeRAM)元件置換做實施以達到相同的儲存資料的目的。圖11中的齊納二極體ZD係為圖2中的二極體D及圖4中的齊納二極體ZD的一實施例。 Referring to Figure 11, according to at least one embodiment of this disclosure, the memory cell array MC1-MC9 includes a plurality of memory cells MC1-MC9, a plurality of character lines WL1-WL3, and a plurality of bit lines BL1-BL3. The plurality of memory cells MC1-MC9 are arranged in an array above a substrate plane in a first direction and a second direction perpendicular to the first direction, parallel to the substrate plane. The plurality of character lines WL1-WL3 are arranged along the first direction, and the plurality of bit lines BL1-BL3 are arranged along the second direction. The random access memory further includes a number of character lines. The circuit includes a character line decoder driver 101, a character line sensing circuit 102, and a character line decoder driver 102. The plurality of character lines WL1~WL3 are connected to the character line decoder driver 101, and the plurality of character lines BL1~BL3 are connected to the character line sensing circuit 102 and the character line decoder driver 102. The character line decoder driver 101 includes a plurality of character line switches MSW1~3, each of which is connected to the plurality of character lines WL1~WL3. The plurality of character line switches MSW1~3 are transistor switches or transmission gate switches. The random access memory further includes a timing control circuit 103, which is connected to a character line decoder driver circuit 101, a bit line sensing circuit 102, and a bit line decoder driver circuit 102. The character line decoder driver circuit 101 controls the plurality of character line switches MSW1 to 3 via control signals from WL Control1 to 3. In Figure 11, the magnetic tunneling junction memory element MTJ is an embodiment of the memory element ME in Figure 2 and Figure 4. These magnetic tunneling junction memory elements MTJ in Figure 11 can be implemented by replacing them with resistive RAM (RRAM), phase change memory (PCM), or ferroelectric RAM (FeRAM) elements to achieve the same data storage purpose. The Zener diode ZD in Figure 11 is an embodiment of the diode D in Figure 2 and the Zener diode ZD in Figure 4.

圖11中之記憶體胞元陣列MC 1~MC 9僅以3x3的9個記憶體胞元MC 1~MC 9做為一個記憶體胞元陣列的例示,而實際的隨機存取記憶體的記憶體胞元陣列的記憶體胞元數目可依晶片的實際需求設計。 The memory cell arrays MC1-MC9 in Figure 11 are only examples of a single memory cell array consisting of nine 3x3 memory cells (MC1-MC9). The actual number of memory cells in a random access memory array can be designed according to the specific requirements of the chip.

圖11中之字元線解碼驅動電路101提供複數個字元線WL 1~WL 3所需的電壓訊號。位元線感應電路102及位元線解碼驅動電路102提供複數個位元線BL 1~BL 3所需的電壓訊號,並且感應及讀取傳輸複數個位元線BL 1~BL 3的電壓訊號。時序控制電路103控制字元線解碼驅動電路101、位元線感應電路102及位元線解碼驅動電路102的電路操作時序。 The character line decoding driver circuit 101 in Figure 11 provides the voltage signals required for a plurality of character lines WL1~WL3. The bit line sensing circuit 102 and the bit line decoding driver circuit 103 provide the voltage signals required for a plurality of bit lines BL1~BL3, and sense and read the voltage signals of the plurality of bit lines BL1~BL3 for transmission. The timing control circuit 103 controls the circuit operation timing of the character line decoding driver circuit 101, the bit line sensing circuit 102, and the bit line decoding driver circuit 103.

參照圖12,根據本揭露之至少一實施例,其中該記憶體胞元陣列MC1~MC9包括有複數個記憶體胞元MC1~MC9、複數個字元線WL1~WL3以及複數個位元線BL1~BL3,該複數個記憶體胞元MC1~MC9配置於一基板平面上方以第一方向及垂直於該第一方向的第二方向的平行於該基板平面的陣列狀排列,該複數個字元線WL1~WL3沿第一方向配置,該複數個位元線BL1~BL3沿第二方向配置;以及該隨機存取記憶體更包括有字元線解碼驅動電路101、位元線感應電路102及位元線解碼驅動電路102,其中該複數個字元線WL1~WL3連接至該字元線解碼驅動電路101,該複數個位元線BL1~BL3連接至該位元線感應電路102及該位元線解碼驅動電路102,其中,該字元線解碼驅動電路101包含複數個字元線開關MSW1~3以各別與該複數個字元線WL1~WL3連接,該複數個字元線開關MSW1~3係為電晶體開關或傳輸閘(Transmission Gate)開關。該隨機存取記憶體更包括有時序控制電路103,該時序控制電路103連接字元線解碼驅動電路101、位元線感應電路102及位元線解碼驅動電路102,該字元線解碼驅動電路101經WL Control1~3之控制訊號控制該複數個字元線開關MSW1~3。其中,圖12中的磁性穿隧接面記憶體元件MTJ係為圖3中的記憶元件ME及圖5中的記憶元件ME的一實施例,圖12中的該些磁性穿隧接面記憶體元 件MTJ可以以變阻式記憶體(Resistive RAM,RRAM)元件、相變化記憶體(Phase Change Memory,PCM)元件或鐵電記憶體(Ferroelectric RAM,FeRAM)元件置換做實施以達到相同的儲存資料的目的。圖12中的齊納二極體ZD係為圖3中的二極體D及圖5中的齊納二極體ZD的一實施例。 Referring to Figure 12, according to at least one embodiment of this disclosure, the memory cell array MC1-MC9 includes a plurality of memory cells MC1-MC9, a plurality of character lines WL1-WL3, and a plurality of bit lines BL1-BL3. The plurality of memory cells MC1-MC9 are arranged in an array above a substrate plane in a first direction and a second direction perpendicular to the first direction, parallel to the substrate plane. The plurality of character lines WL1-WL3 are arranged along the first direction, and the plurality of bit lines BL1-BL3 are arranged along the second direction. The random access memory further includes a number of character lines. The circuit includes a character line decoder driver 101, a character line sensing circuit 102, and a character line decoder driver 102. The plurality of character lines WL1~WL3 are connected to the character line decoder driver 101, and the plurality of character lines BL1~BL3 are connected to the character line sensing circuit 102 and the character line decoder driver 102. The character line decoder driver 101 includes a plurality of character line switches MSW1~3, each of which is connected to the plurality of character lines WL1~WL3. The plurality of character line switches MSW1~3 are transistor switches or transmission gate switches. The random access memory further includes a timing control circuit 103, which is connected to a character line decoder driver circuit 101, a bit line sensing circuit 102, and a bit line decoder driver circuit 102. The character line decoder driver circuit 101 controls the plurality of character line switches MSW1 to 3 via control signals from WL Control1 to 3. In Figure 12, the magnetic tunneling junction memory element (MTJ) is an embodiment of the memory element ME in Figure 3 and Figure 5. These MTJs in Figure 12 can be implemented by replacing them with resistive RAM (RRAM), phase change memory (PCM), or ferroelectric RAM (FeRAM) elements to achieve the same data storage purpose. The Zener diode (ZD) in Figure 12 is an embodiment of the diode D in Figure 3 and the Zener diode ZD in Figure 5.

圖12中之記憶體胞元陣列MC 1~MC 9僅以3x3的9個記憶體胞元MC 1~MC 9做為一個記憶體胞元陣列的例示,而實際的隨機存取記憶體的記憶體胞元陣列的記憶體胞元數目可依晶片的實際需求設計。 The memory cell arrays MC1-MC9 in Figure 12 are only examples of a single memory cell array consisting of nine 3x3 memory cells. The actual number of memory cells in a random access memory array can be designed according to the specific requirements of the chip.

圖12中之字元線解碼驅動電路101提供複數個字元線WL 1~WL 3所需的電壓訊號。位元線感應電路102及位元線解碼驅動電路102提供複數個位元線BL 1~BL 3所需的電壓訊號,並且感應及讀取傳輸複數個位元線BL 1~BL 3的電壓訊號。時序控制電路103控制字元線解碼驅動電路101、位元線感應電路102及位元線解碼驅動電路102的電路操作時序。 The character line decoding driver circuit 101 in Figure 12 provides the voltage signals required for a plurality of character lines WL1~WL3. The bit line sensing circuit 102 and the bit line decoding driver circuit 103 provide the voltage signals required for a plurality of bit lines BL1~BL3, and sense and read the voltage signals of the plurality of bit lines BL1~BL3 for transmission. The timing control circuit 103 controls the circuit operation timing of the character line decoding driver circuit 101, the bit line sensing circuit 102, and the bit line decoding driver circuit 103.

參照圖13,根據本揭露之至少一實施例,該隨機存取記憶體更包括有複數個記憶體胞元陣列,其中該各個記憶體胞元陣列(圖13)的該複數個記憶體胞元MC係以個別垂直於該基板平面的方式連接該複數個字元線WL 1~WL 3以及該複數個位元線BL 1~BL 3以形成記憶體胞元陣列層(圖13、圖14Memory Cell Array Layer1~3中之1);參照圖14,其中該各個記憶體胞元陣列Memory Cell Array Layer1~3係位於不同的平面層以於該基板Substrate平面上方形成複數個記憶體胞元陣列層Memory Cell Array Layer1~3,該複數個記憶體胞元陣列層Memory Cell Array Layer1~3的該複數個字元線WLs以及該複數個位元線BLs係於該複數個記憶體胞元陣列層Memory Cell Array Layer1~3的邊端垂直地往下連接至該基板Substrate平面以分別連接位於該基板Substrate平面的該字元線解碼驅動電路101(無圖示,位於記憶體控制電路層Memory Control Circuit Layer)、該位元線感應電路102(無圖示,位於記憶體控制電路層Memory Control Circuit Layer)及該位元線解碼驅動電路102(無圖示,位於記憶體控制電路層Memory Control Circuit Layer),以形成包含複數個記憶體胞元陣列層Memory Cell Array Layer1~3的立體(Three dimensional)結構。 Referring to Figure 13, according to at least one embodiment of this disclosure, the random access memory further includes a plurality of memory cell arrays, wherein the plurality of memory cells MC in each memory cell array (Figure 13) are connected to a plurality of word lines WL1~WL3 and a plurality of bit lines BL1~BL3 in a manner perpendicular to the substrate plane to form a memory cell array layer (one of Memory Cell Array Layers 1~3 in Figures 13 and 14); referring to Figure 14, the memory cell arrays Memory Cell Array Layers 1~3 are located on different planar layers to form a plurality of memory cell array layers Memory Cell Array above the substrate plane. Layers 1-3, the plurality of word lines (WLs) and the plurality of bit lines (BLs) of the plurality of memory cell array layers 1-3 are vertically connected downwards from the edges of the plurality of memory cell array layers 1-3 to the substrate plane, respectively connecting to the word line decoding driver circuit 101 (not shown, located in the memory control circuit layer), the bit line sensing circuit 102 (not shown, located in the memory control circuit layer), and the bit line decoding driver circuit 102 (not shown, located in the memory control circuit layer) located on the substrate plane. Layers are used to form a three-dimensional structure consisting of multiple memory cell array layers (Layers 1-3).

參照圖15、圖11及圖12,根據本揭露之至少一實施例,其中,儲存該複數個記憶體胞元MC 1~MC 9中的其中一個記憶體胞元-例如MC 5的記憶元件ME的低電阻狀態的條件(圖15之Write 1)包括:該字元線解碼驅動電路101施加一字元線電壓於該記憶體胞元MC 5的字元線WL2及該位元線解碼驅動電路102施加一位元線電壓於該記憶體胞元MC 5的位元線BL2,以使該記憶元件ME的二個端點具有一第一電壓訊號條件,該第一電壓訊號條件決定該記憶元件ME的低電阻狀態,並且,該字元線解碼驅動電路101經由關閉其他的字元線WL1、WL3所連接的字元線開關MSW1、MSW3以使其他的字元線WL1、WL3維持浮接(Floating)狀態Other WLs Floating,該位元線解碼驅動電路102施加一相同於該字元線電壓減去該二極體D(or ZD)的順向導通電壓(Vt)的電壓訊號於其他的位元線BL1、BL3或該位元線解碼驅動電路102使其他的位元線BL1、BL3維持浮接(Floating)狀態。其中該記憶元件ME可為變阻式記憶體(Resistive RAM,RRAM)元件、相變化記憶體(Phase Change Memory,PCM)元件、鐵電記憶體(Ferroelectric RAM,FeRAM)元件或磁性穿隧接面記憶體(Magnetic Tunnel Junction Memory,MTJ Memory)MTJ元件。 Referring to Figures 15, 11, and 12, according to at least one embodiment of this disclosure, the condition for storing the low-resistance state of the memory element ME of one of the plurality of memory cells MC1 to MC9—for example, MC5 (Write 1 in Figure 15) includes: the word line decoding driver circuit 101 applying a word line voltage to the word line WL2 of the memory cell MC5, and the bit line decoding driver circuit 102 applying a bit line voltage to the memory cell MC5. Bit line BL2 of memory element ME is used to provide a first voltage signal condition at the two terminals of the memory element ME. This first voltage signal condition determines the low resistance state of the memory element ME. Furthermore, the character line decoding driver circuit 101 maintains the other character lines WL1 and WL3 in a floating state by turning off the character line switches MSW1 and MSW3 connected to them. The bit line decoding driver circuit 102 applies a voltage equal to the character line voltage minus the diode D (or The forward conduction voltage (Vt) signal of ZD is applied to other bit lines BL1, BL3, or the decoding driver circuit 102 of that bit line keeps the other bit lines BL1, BL3 in a floating state. The memory element ME can be a resistive RAM (RRAM), a phase change memory (PCM), a ferroelectric RAM (FeRAM), or a magnetic tunnel junction memory (MTJ) element.

參照圖15~圖18,其中,Vap=該磁性穿隧接面記憶體元件MTJ之反平行磁化方向電壓,Vp=該磁性穿隧接面記憶體元件MTJ之平行磁化方向電壓,Vt=該齊納二極體ZD之順向導通電壓,Vz=該齊納二極體ZD之逆向齊納電壓,Vpp=該磁性穿隧接面記憶體元件MTJ之反平行磁化方向電壓加該齊納二極體ZD之順向導通電壓加該磁性穿隧接面記憶體元件MTJ之平行磁化方向電 壓加該齊納二極體ZD之逆向齊納電壓(絕對值),Vr=該磁性穿隧接面記憶體元件MTJ之讀取電壓。 Referring to Figures 15-18, where Vap = antiparallel magnetization voltage of the magnetic tunneling junction memory element MTJ, Vp = parallel magnetization voltage of the magnetic tunneling junction memory element MTJ, Vt = forward conduction voltage of the ZN diode ZD, Vz = reverse ZN diode ZD, and Vpp = ... The voltage in the antiparallel magnetization direction of the magnetic tunneling junction memory element MTJ plus the forward conduction voltage of the Zener diode ZD plus the parallel magnetization voltage of the magnetic tunneling junction memory element MTJ plus the reverse Zener voltage of the Zener diode ZD (absolute value), Vr = the read voltage of the magnetic tunneling junction memory element MTJ.

參照圖15、圖11及圖12,根據本揭露之至少一實施例,其中,儲存該複數個記憶體胞元MC 1~MC 9中的其中一個記憶體胞元-例如MC 5的磁性穿隧接面記憶體元件MTJ的低電阻狀態的條件(圖15之Write 1)包括:該字元線解碼驅動電路101施加一字元線電壓Vap+Vt於該記憶體胞元MC 5的字元線WL2(圖15之WL)及該位元線解碼驅動電路102施加一位元線電壓Vpp於該記憶體胞元MC 5的位元線BL2(圖15之BL),以使該磁性穿隧接面記憶體元件MTJ的二個端點具有一第一電壓訊號條件Vp,該第一電壓訊號條件Vp決定該磁性穿隧接面記憶體元件MTJ的低電阻狀態,並且,該字元線解碼驅動電路101經由關閉其他的字元線WL1、WL3(圖15之Other WLs)所連接的字元線開關MSW1、MSW3以使其他的字元線WL1、WL3(圖15之Other WLs)維持浮接(Floating)狀態Other WLs Floating,該位元線解碼驅動電路102施加一相同於該字元線電壓Vap+Vt減去該齊納二極體ZD的順向導通電壓(Vt)的電壓訊號Vap於其他的位元線BL1、BL3(圖15之Other BLs)或該位元線解碼驅動電路102使其他的位元線BL1、BL3(圖15之Other BLs)維持浮接(Floating)狀態。 Referring to Figures 15, 11, and 12, according to at least one embodiment of this disclosure, the condition for storing the low-resistance state of the magnetic tunneling junction memory element MTJ of one of the plurality of memory cells MC1 to MC9—for example, MC5—(Write 1 in Figure 15) includes: the word line decoding driver circuit 101 applying a word line voltage Vap + Vt to the word line WL2 (WL in Figure 15) of the memory cell MC5, and the bit line decoding driver circuit 102 applying a bit line voltage Vpp to the memory cell MC5. Bit line BL2 (BL in Figure 15) is used to provide a first voltage signal condition Vp at the two terminals of the magnetic tunneling junction memory element MTJ. This first voltage signal condition Vp determines the low resistance state of the magnetic tunneling junction memory element MTJ. Furthermore, the word line decoding driver circuit 101 maintains the other word lines WL1 and WL3 (Other WLs in Figure 15) in a floating state by turning off the word line switches MSW1 and MSW3 connected to them. Floating: The bit line decoder driver 102 applies a voltage signal Vap equal to the word line voltage Vap + Vt minus the forward conduction voltage (Vt) of the Zener diode ZD to the other bit lines BL1, BL3 (Other BLs in Figure 15), or the bit line decoder driver 102 keeps the other bit lines BL1, BL3 (Other BLs in Figure 15) in a floating state.

參照圖16、圖11及圖12,根據本揭露之至少一實施例,其中,儲存該複數個記憶體胞元MC 1~MC 9中的其中一個記憶體胞元-例如MC 5的記憶元件ME的高電阻狀態的條件(圖16之Write 0)包括:該字元線解碼驅動電路101施加一字元線電壓於該記憶體胞元MC5的字元線WL2及該位元線解碼驅動電路102施加一位元線電壓於該記憶體胞元MC5的位元線BL2,以使該記憶元件ME的二個端點具有一第二電壓訊號條件,該第二電壓訊號條件決定該記憶元件ME的高電阻狀態,並且,該字元線解碼驅動電路101經由關閉其他的字元線WL1、WL3所連接的字元線開關MSW1、MSW3以使其他的字元線WL1、WL3 維持浮接(Floating)狀態Other WLs Floating,該位元線解碼驅動電路102施加一相同於該字元線電壓減去該二極體D(or ZD)的順向導通電壓(Vt)的電壓訊號於其他的位元線BL1、BL3或該位元線解碼驅動電路102使其他的位元線BL1、BL3維持浮接(Floating)狀態。其中該記憶元件ME可為變阻式記憶體(Resistive RAM,RRAM)元件、相變化記憶體(Phase Change Memory,PCM)元件、鐵電記憶體(Ferroelectric RAM,FeRAM)元件或磁性穿隧接面記憶體(Magnetic Tunnel Junction Memory,MTJ Memory)MTJ元件。 Referring to Figures 16, 11, and 12, according to at least one embodiment of this disclosure, the high-resistance state of the memory element ME storing one of the plurality of memory cells MC1 to MC9—for example, MC5—is described in Figure 16 (Write). 0) Includes: The character line decoding driver circuit 101 applies a character line voltage to the character line WL2 of the memory cell MC5, and the bit line decoding driver circuit 102 applies a bit line voltage to the bit line BL2 of the memory cell MC5, so that the two terminals of the memory element ME have a second voltage signal condition, the second voltage signal condition determines the high resistance state of the memory element ME, and the character line decoding driver circuit 101 keeps the other character lines WL1 and WL3 in a floating state by turning off the character line switches MSW1 and MSW3 connected to them. Floating: The bit line decoding driver circuit 102 applies a voltage signal equal to the word line voltage minus the forward conduction voltage (Vt) of the diode D (or ZD) to the other bit lines BL1, BL3, or the bit line decoding driver circuit 102 keeps the other bit lines BL1, BL3 in a floating state. The memory element ME can be a resistive RAM (RRAM), phase change memory (PCM), ferroelectric RAM (FeRAM), or magnetic tunnel junction memory (MTJ) element.

參照圖16、圖11及圖12,根據本揭露之至少一實施例,其中,儲存該複數個記憶體胞元MC 1~MC 9中的其中一個記憶體胞元-例如MC 5的磁性穿隧接面記憶體元件MTJ的高電阻狀態的條件(圖16之Write 0)包括:該字元線解碼驅動電路101施加一字元線電壓Vap+Vt於該記憶體胞元MC5的字元線WL2(圖16之WL)及該位元線解碼驅動電路102施加一位元線電壓0V於該記憶體胞元MC5的位元線BL2(圖16之BL),以使該磁性穿隧接面記憶體元件MTJ的二個端點具有一第二電壓訊號條件Vap,該第二電壓訊號條件Vap決定該磁性穿隧接面記憶體元件MTJ的高電阻狀態,並且,該字元線解碼驅動電路101經由關閉其他的字元線WL1、WL3(圖16之Other WLs)所連接的字元線開關MSW1、MSW3以使其他的字元線WL1、WL3(圖16之Other WLs)維持浮接(Floating)狀態Other WLs Floating,該位元線解碼驅動電路102施加一相同於該字元線電壓Vap+Vt減去該齊納二極體ZD的順向導通電壓(Vt)的電壓訊號Vap於其他的位元線BL1、BL3(圖16之Other BLs)或該位元線解碼驅動電路102使其他的位元線BL1、BL3(圖16之Other BLs)維持浮接(Floating)狀態。 Referring to Figures 16, 11, and 12, according to at least one embodiment of this disclosure, the high-resistivity state of the magnetic tunneling junction memory element MTJ storing one of the plurality of memory cells MC1 to MC9—for example, MC5—is described in Figure 16 (Write). 0) Includes: The character line decoding driver circuit 101 applies a character line voltage Vap+Vt to the character line WL2 (WL in FIG. 16) of the memory cell MC5, and the bit line decoding driver circuit 102 applies a bit line voltage 0V to the bit line BL2 (BL in FIG. 16) of the memory cell MC5, so that the two terminals of the magnetic tunneling junction memory element MTJ have a second voltage signal condition Vap. The second voltage signal condition Vap determines the high resistance state of the magnetic tunneling junction memory element MTJ. Furthermore, the character line decoding driver circuit 101 closes other character lines WL1 and WL3 (Other in FIG. 16). The character line switches MSW1 and MSW3 connected to the WLs (other WLs in Figure 16) keep the other character lines WL1 and WL3 (other WLs in Figure 16) floating. The bit line decoder driver 102 applies a voltage signal Vap equal to the character line voltage Vap + Vt minus the forward conduction voltage (Vt) of the Zener diode ZD to the other bit lines BL1 and BL3 (other BLs in Figure 16), or the bit line decoder driver 102 keeps the other bit lines BL1 and BL3 (other BLs in Figure 16) floating.

參照圖17、圖11及圖12,根據本揭露之至少一實施例,其中,讀取該複數個記憶體胞元MC 1~MC 9中的其中一個記憶體胞元-例如MC 5的記憶元件ME的儲存資料的條件(圖17之Read)包括:該字元線解碼驅動電路101施加 一字元線電壓於該記憶體胞元MC 5的字元線WL2及該位元線解碼驅動電路102施加一位元線電壓於該記憶體胞元MC 5的位元線BL2,以使該記憶元件ME的二個端點具有一第三電壓訊號條件,該第三電壓訊號條件無法決定該記憶元件ME的高電阻狀態或低電阻狀態,其中該記憶元件ME的第一端點的電壓值比該記憶元件ME的第二端點的電壓值還高,並且,該字元線解碼驅動電路101經由關閉其他的字元線WL1、WL3所連接的字元線開關MSW1、MSW3以使其他的字元線WL1、WL3維持浮接(Floating)狀態Other WLs Floating,再使該位元線BL2經該位元線感應電路102開始感應Sensing,其他的位元線BL1、BL3經該位元線感應電路102開始感應Sensing或該位元線解碼驅動電路102使其他的位元線BL1、BL3維持浮接(Floating)狀態;以及該位元線BL2經該位元線感應電路102開始感應後的一第一時間區間T1後,該位元線解碼驅動電路102傳輸該位元線BL2經感應後的電壓值。其中該記憶元件ME可為變阻式記憶體(Resistive RAM,RRAM)元件、相變化記憶體(Phase Change Memory,PCM)元件、鐵電記憶體(Ferroelectric RAM,FeRAM)元件或磁性穿隧接面記憶體(Magnetic Tunnel Junction Memory,MTJ Memory)MTJ元件。 Referring to Figures 17, 11, and 12, according to at least one embodiment of this disclosure, the condition for reading the stored data of memory element ME of one of the plurality of memory cells MC1 to MC9—for example, MC5 (Read in Figure 17)—includes: the word line decoding driver circuit 101 applies a word line voltage to the word line WL2 of the memory cell MC5, and the bit line decoding driver circuit 102 applies a bit line voltage to the memory cell MC5. Bit line BL2 of memory element ME is used to provide a third voltage signal condition at the two terminals of the memory element ME. This third voltage signal condition cannot determine whether the memory element ME is in a high-resistance or low-resistance state. The voltage value at the first terminal of the memory element ME is higher than the voltage value at the second terminal of the memory element ME. Furthermore, the character line decoding driver circuit 101 maintains the other character lines WL1 and WL3 in a floating state by turning off the character line switches MSW1 and MSW3 connected to them. Floating, then the bit line BL2 starts sensing through the bit line sensing circuit 102, and the other bit lines BL1 and BL3 start sensing through the bit line sensing circuit 102 or the bit line decoding driver circuit 102 keeps the other bit lines BL1 and BL3 in a floating state; and after a first time interval T1 after the bit line BL2 starts sensing through the bit line sensing circuit 102, the bit line decoding driver circuit 102 transmits the voltage value of the bit line BL2 after sensing. The memory element ME can be a resistive RAM (RRAM), a phase change memory (PCM), a ferroelectric RAM (FeRAM), or a magnetic tunnel junction memory (MTJ) element.

參照圖17、圖11及圖12,根據本揭露之至少一實施例,其中,讀取該複數個記憶體胞元MC 1~MC 9中的其中一個記憶體胞元-例如MC 5的磁性穿隧接面記憶體元件MTJ的儲存資料的條件(圖17之Read)包括:該字元線解碼驅動電路101施加一字元線電壓Vap+Vt+Vr於該記憶體胞元MC 5的字元線WL2(圖17之WL)及該位元線解碼驅動電路102施加一位元線電壓Vap於該記憶體胞元MC 5的位元線BL2(圖17之BL),以使該磁性穿隧接面記憶體元件MTJ的二個端點具有一第三電壓訊號條件Vr,該第三電壓訊號條件Vr無法決定該磁性穿隧接面記憶體元件MTJ的高電阻狀態或低電阻狀態,其中該磁性穿隧接面記憶體元件MTJ的第一端點的電壓值比該磁性穿隧接面記憶體元件MTJ的第二端 點的電壓值還高,並且,該字元線解碼驅動電路101經由關閉其他的字元線WL1、WL3(圖17之Other WLs)所連接的字元線開關MSW1、MSW3以使其他的字元線WL1、WL3(圖17之Other WLs)維持浮接(Floating)狀態Other WLs Floating,再使該位元線BL2(圖17之BL)經該位元線感應電路102開始感應Sensing,其他的位元線BL1、BL3(圖17之Other BLs)經該位元線感應電路102開始感應Sensing或該位元線解碼驅動電路102使其他的位元線BL1、BL3(圖17之Other BLs)維持浮接(Floating)狀態;以及該位元線BL2(圖17之BL)經該位元線感應電路102開始感應後的一第一時間區間T1後,該位元線解碼驅動電路102傳輸該位元線BL2(圖17之BL)經感應後的電壓值。 Referring to Figures 17, 11, and 12, according to at least one embodiment of this disclosure, the conditions for reading stored data from the magnetic tunneling junction memory element MTJ of one of the plurality of memory cells MC1 to MC9—for example, MC5—(Read in Figure 17) include: the character line decoding driver circuit 101 applying a character line voltage Vap+Vt+Vr to the character line WL2 (WL in Figure 17) of the memory cell MC5, and the bit line decoding driver circuit 102 applying a bit line voltage Vap to the memory cell MC5. Bit line BL2 (BL in Figure 17) is used to enable a third voltage signal condition Vr at the two terminals of the magnetic tunneling junction memory element MTJ. This third voltage signal condition Vr cannot determine whether the magnetic tunneling junction memory element MTJ is in a high-resistance or low-resistance state. The voltage at the first terminal of the magnetic tunneling junction memory element MTJ is higher than the voltage at the second terminal. Furthermore, the character line decoding driver circuit 101 maintains the other character lines WL1 and WL3 (Other WLs in Figure 17) in a floating state by turning off the character line switches MSW1 and MSW3 connected to them. The circuit initiates a floating state, allowing bit line BL2 (BL in Figure 17) to begin sensing via bit line sensing circuit 102. Other bit lines BL1 and BL3 (Other BLs in Figure 17) either begin sensing via bit line sensing circuit 102 or the bit line decoding driver circuit 102 maintains the floating state of the other bit lines BL1 and BL3 (Other BLs in Figure 17). After a first time interval T1 following the initiation of sensing by bit line BL2 (BL in Figure 17) via bit line sensing circuit 102, the bit line decoding driver circuit 102 transmits the induced voltage value of bit line BL2 (BL in Figure 17).

參照圖18、圖11及圖12,根據本揭露之至少一實施例,其中,維持該記憶體胞元陣列MC 1~MC 9中的該複數個記憶體胞元MC 1~MC 9的記憶元件ME的儲存資料的條件(圖18之No Operation)包括:該字元線解碼驅動電路101經由關閉全部的字元線WL1~WL3所連接的字元線開關MSW1~MSW3以使全部的字元線WL1~WL3維持浮接(Floating)狀態All WLs Floating,該位元線解碼驅動電路102施加一預定的位元線電壓於全部的位元線BL1~BL3或該位元線解碼驅動電路102使全部的位元線BL1~BL3維持浮接(Floating)狀態。 Referring to Figures 18, 11, and 12, according to at least one embodiment of this disclosure, the conditions for maintaining the storage of data in the memory elements ME of the plurality of memory cells MC1-MC9 in the memory cell array MC1-MC9 (No Operation in Figure 18) include: the character line decoding driver circuit 101 keeps all character lines WL1-WL3 in a floating state by turning off the character line switches MSW1-MSW3 connected to all character lines WL1-WL3. Floating: The bit line decoding driver circuit 102 applies a predetermined bit line voltage to all bit lines BL1~BL3, or the bit line decoding driver circuit 102 keeps all bit lines BL1~BL3 in a floating state.

參照圖18、圖11及圖12,根據本揭露之至少一實施例,其中,維持該記憶體胞元陣列MC 1~MC 9中的該複數個記憶體胞元MC 1~MC 9的磁性穿隧接面記憶體元件MTJ的儲存資料的條件(圖18之No Operation)包括:該字元線解碼驅動電路101經由關閉全部的字元線WL1~WL3(圖18之All WLs)所連接的字元線開關MSW1~MSW3以使全部的字元線WL1~WL3(圖18之All WLs)維持浮接(Floating)狀態All WLs Floating,該位元線解碼驅動電路102施加一預定的位元線電壓Vap於全部的位元線BL1~BL3(圖18之All BLs)或該位元線解碼驅動電路102使全部的位元線BL1~BL3(圖18之All BLs)維持浮接(Floating)狀態。 Referring to Figures 18, 11, and 12, according to at least one embodiment of this disclosure, the conditions for maintaining the data storage of the magnetic tunneling junction memory elements MTJ of the plurality of memory cells MC1-MC9 in the memory cell array MC1-MC9 (No Operation in Figure 18) include: the character line decoding driver circuit 101 maintains all character lines WL1-WL3 (All WLs in Figure 18) in a floating state by turning off the character line switches MSW1-MSW3 connected to all character lines WL1-WL3 (All WLs in Figure 18). Floating: The bit line decoding driver circuit 102 applies a predetermined bit line voltage Vap to all bit lines BL1~BL3 (All BLs in Figure 18), or the bit line decoding driver circuit 102 keeps all bit lines BL1~BL3 (All BLs in Figure 18) in a floating state.

參照圖11及圖12,根據本揭露之至少一實施例,該字元線解碼驅動電路101施加一字元線電壓於一字元線WL2,並且該字元線解碼驅動電路101經由關閉其他的字元線WL1、WL3所連接的字元線開關MSW1、MSW3以使其他的字元線WL1、WL3維持浮接(Floating)狀態,及該位元線解碼驅動電路102施加相同或不同的位元線電壓於該複數個位元線BL1~BL3,以使該字元線WL2所連接的複數個記憶體胞元MC 4~MC 6同時進行複數個資料的寫入儲存以實施一高頻寬的資料寫入作業。 Referring to Figures 11 and 12, according to at least one embodiment of this disclosure, the character line decoding driver circuit 101 applies a character line voltage to a character line WL2, and the character line decoding driver circuit 101 keeps the other character lines WL1 and WL3 in a floating state by turning off the character line switches MSW1 and MSW3 connected to the other character lines WL1 and WL3, and the bit line decoding driver circuit 102 applies the same or different bit line voltages to the plurality of bit lines BL1 to BL3, so that the plurality of memory cells MC4 to MC6 connected to the character line WL2 simultaneously perform the writing and storage of a plurality of data to implement a high-bandwidth data writing operation.

參照圖11及圖12,根據本揭露之至少一實施例,該字元線解碼驅動電路101施加一字元線電壓於一字元線WL2,並且該字元線解碼驅動電路101經由關閉其他的字元線WL1、WL3所連接的字元線開關MSW1、MSW3以使其他的字元線WL1、WL3維持浮接(Floating)狀態,再使該複數個位元線BL1~BL3經該位元線感應電路102開始感應;以及該複數個位元線BL1~BL3經該位元線感應電路102開始感應後的一第一時間區間後,該位元線解碼驅動電路102傳輸該複數個位元線BL1~BL3經感應後的電壓值,以使該字元線WL2所連接的複數個記憶體胞元MC 4~MC 6同時進行複數個資料的讀取以實施一高頻寬的資料讀取作業。 Referring to Figures 11 and 12, according to at least one embodiment of this disclosure, the character line decoding driver circuit 101 applies a character line voltage to a character line WL2, and the character line decoding driver circuit 101 maintains the other character lines WL1 and WL3 in a floating state by turning off the character line switches MSW1 and MSW3 connected to them. The multiple bit lines BL1~BL3 are initiated to sense by the bit line sensing circuit 102; and after a first time interval following the initiation of sensing by the bit line sensing circuit 102, the bit line decoding driver circuit 102 transmits the sensed voltage values of the multiple bit lines BL1~BL3, so that the multiple memory cells MC4~MC6 connected to the word line WL2 can simultaneously read multiple data points to perform a high-bandwidth data reading operation.

圖15至圖18之操作根據本揭露之至少一實施例的記憶體胞元陣列MC 1~MC 9之操作條件,可讓受操作的記憶體胞元MC正確地被實施該寫入或讀取的操作;並且,連接相同字元線WL的其他的記憶體胞元MC、連接相同位元線BL的其他的記憶體胞元MC或連接其他的字元線WL的數個記憶體胞元MC所儲存的資料不會受到影響。 The operations shown in Figures 15 to 18, based on the operating conditions of the memory cell arrays MC1 to MC9 of at least one embodiment of this disclosure, ensure that the written or read operation is correctly performed on the operated memory cell MC; and the data stored in other memory cells MC connected to the same character line WL, other memory cells MC connected to the same bit line BL, or several memory cells MC connected to other character lines WL are not affected.

以上揭示了一些實施例的特徵,以使所屬領域中的技術人員可更好地理解本揭露的各個方面。所屬領域中的技術人員應理解,他們可容易地使用本揭露作為設計或修改來實施與本揭露中所介紹的實施例相同的目的和/或實 施與本揭露中所介紹的實施例相同的優點。所屬領域中的技術人員還應認識到,這些均等設計或修改並不背離本揭露的精神及範圍,而且他們可在不背離本揭露的精神及範圍的條件下對本揭露作出各種改變、代替及變更。 The foregoing has revealed some features of the embodiments to enable those skilled in the art to better understand the various aspects of this disclosure. Those skilled in the art should understand that they can readily use this disclosure as a design or modification to achieve the same purpose and/or the same advantages as the embodiments described in this disclosure. Those skilled in the art should also recognize that these equivalent designs or modifications do not depart from the spirit and scope of this disclosure, and that they can make various changes, substitutions, and alterations to this disclosure without departing from its spirit and scope.

因此,本揭露之隨機存取記憶體較先前技術之隨機存取記憶體具較少的記憶體胞元MC端點接線數目,具有佔更小的晶片基板面積以提高隨機存取記憶體的密度、節省成本及較易於立體堆疊記憶體胞元MC的優點,確實具有新穎性及進步性,具有發明步驟(Inventive Step)及具有非顯而易見性(Non-Obviousness),並且與現有技術相比,本揭露具有突出的實質性特點與顯著的進步;本揭露確實針對需求提出實質有效的解決方案。 Therefore, the random access memory (RAM) disclosed herein has fewer memory cell (MC) endpoints than prior art RAM, resulting in a smaller chip substrate area for increased RAM density, cost savings, and easier three-dimensional stacking of MCs. It is indeed novel and progressive, possessing an inventive step and non-obviousness. Furthermore, compared to existing technologies, this disclosure has outstanding substantial features and significant progress; this disclosure truly proposes a practical and effective solution to the problem.

BL:位元線 BL: Bitline

D:二極體 D: Diode

MC:記憶體胞元 MC: Memory Cells

ME:記憶元件 ME: Memory element

WL:字元線 WL: Character Line

Claims (14)

一種隨機存取記憶體,包括: 至少一記憶體胞元陣列,該記憶體胞元陣列包括: 至少一記憶體胞元,該記憶體胞元具有二個端點,該記憶體胞元的第一端點連接至一字元線,該記憶體胞元的第二端點連接至一位元線,該記憶體胞元包括: 一種(A type of)二極體,該二極體具有一陽極與一陰極,該二極體的陽極連接至該字元線;以及 一記憶元件,該記憶元件具有二個端點,該記憶元件的第一端點連接至該二極體的陰極,該記憶元件的第二端點連接至該位元線, 其中,該二極體之特性具有一順向導通電壓,並且該記憶元件儲存有一資料,該記憶元件的低電阻狀態為資料第一狀態,該記憶元件的高電阻狀態為資料第二狀態。A random access memory includes: at least one memory cell array, the memory cell array including: at least one memory cell having two endpoints, a first endpoint of the memory cell connected to a word line, and a second endpoint of the memory cell connected to a bit line, the memory cell including: a type of diode having an anode and a cathode, the anode of the diode being connected to the word line; and a memory element having two endpoints, the first endpoint of the memory element being connected to the cathode of the diode, and the second endpoint of the memory element being connected to the bit line. The diode has a forward conduction voltage, and the memory element stores data. The low resistance state of the memory element is the first data state, and the high resistance state of the memory element is the second data state. 一種隨機存取記憶體,包括: 至少一記憶體胞元陣列,該記憶體胞元陣列包括: 至少一記憶體胞元,該記憶體胞元具有二個端點,該記憶體胞元的第一端點連接至一字元線,該記憶體胞元的第二端點連接至一位元線,該記憶體胞元包括: 一記憶元件,該記憶元件具有二個端點,該記憶元件的第一端點連接至該字元線;以及 一種(A type of)二極體,該二極體具有一陽極與一陰極,該二極體的陽極連接至該記憶元件的第二端點,該二極體的陰極連接至該位元線, 其中,該二極體之特性具有一順向導通電壓,並且該記憶元件儲存有一資料,該記憶元件的低電阻狀態為資料第一狀態,該記憶元件的高電阻狀態為資料第二狀態。A random access memory includes: at least one memory cell array, the memory cell array including: at least one memory cell having two endpoints, a first endpoint of the memory cell connected to a word line, and a second endpoint of the memory cell connected to a bit line, the memory cell including: a memory element having two endpoints, the first endpoint of the memory element connected to the word line; and a diode having an anode and a cathode, the anode of the diode connected to the second endpoint of the memory element, and the cathode of the diode connected to the bit line. The diode has a forward conduction voltage, and the memory element stores data. The low resistance state of the memory element is the first data state, and the high resistance state of the memory element is the second data state. 如請求項1的隨機存取記憶體,其中該二極體係為一齊納二極體(Zener Diode),該齊納二極體之特性更具有一逆向齊納電壓。For example, the random access memory in Request 1, wherein the diode system is a Zener diode, and the Zener diode is further characterized by having a reverse Zener voltage. 如請求項2的隨機存取記憶體,其中該二極體係為一齊納二極體(Zener Diode),該齊納二極體之特性更具有一逆向齊納電壓。For example, the random access memory in claim 2, wherein the diode system is a Zener diode, and the Zener diode is further characterized by having a reverse Zener voltage. 如請求項1、2、3或4的隨機存取記憶體,其中該記憶元件的低電阻狀態係由施加於該記憶元件的二個端點的一第一電壓訊號條件所決定,該記憶元件的高電阻狀態係由施加於該記憶元件的二個端點的一第二電壓訊號條件所決定,該記憶元件儲存的資料的讀取係藉由施加一第三電壓訊號條件於該記憶元件的二個端點以偵測該記憶元件的電阻狀態,其中該第一電壓訊號條件與該第二電壓訊號條件的電壓極性為相同,並且該第二電壓訊號條件的絕對電壓值大於該第一電壓訊號條件的絕對電壓值,該第三電壓訊號條件的絕對電壓值小於該第一電壓訊號條件的絕對電壓值與該第二電壓訊號條件的絕對電壓值;其中該記憶元件係為變阻式記憶體(Resistive RAM, RRAM)元件或相變化記憶體(Phase Change Memory, PCM)元件。For example, random access to memory as requested in items 1, 2, 3, or 4, wherein the low resistance state of the memory element is determined by a first voltage signal condition applied to the two terminals of the memory element, the high resistance state of the memory element is determined by a second voltage signal condition applied to the two terminals of the memory element, and the reading of data stored in the memory element is performed by detecting the memory by applying a third voltage signal condition to the two terminals of the memory element. The resistance state of the element, wherein the voltage polarity of the first voltage signal condition and the second voltage signal condition is the same, and the absolute voltage value of the second voltage signal condition is greater than the absolute voltage value of the first voltage signal condition, and the absolute voltage value of the third voltage signal condition is less than the absolute voltage values of the first voltage signal condition and the second voltage signal condition; wherein the memory element is a resistive RAM (RRAM) element or a phase change memory (PCM) element. 如請求項3或4的隨機存取記憶體,其中該記憶元件的低電阻狀態係由施加於該記憶元件的二個端點的一第一電壓訊號條件所決定,該記憶元件的高電阻狀態係由施加於該記憶元件的二個端點的一第二電壓訊號條件所決定,該記憶元件儲存的資料的讀取係藉由施加一第三電壓訊號條件於該記憶元件的二個端點以偵測該記憶元件的電阻狀態,其中該第一電壓訊號條件與該第二電壓訊號條件的電壓極性為相反,該第三電壓訊號條件的絕對電壓值小於該第一電壓訊號條件的絕對電壓值與該第二電壓訊號條件的絕對電壓值;其中該記憶元件係為變阻式記憶體(Resistive RAM, RRAM)元件、相變化記憶體(Phase Change Memory, PCM)元件、鐵電記憶體(Ferroelectric RAM, FeRAM)元件或磁性穿隧接面記憶體(Magnetic Tunnel Junction Memory, MTJ Memory)元件,該磁性穿隧接面記憶體元件包括藉由穿隧阻障層分隔開的固定磁化層及自由磁化層。For example, in request 3 or 4, random access to memory, wherein the low resistance state of the memory element is determined by a first voltage signal condition applied to the two terminals of the memory element, the high resistance state of the memory element is determined by a second voltage signal condition applied to the two terminals of the memory element, and the reading of data stored in the memory element is performed by applying a third voltage signal condition. The two terminals of the memory element are used to detect the resistance state of the memory element, wherein the voltage polarities of the first voltage signal condition and the second voltage signal condition are opposite, and the absolute voltage value of the third voltage signal condition is less than the absolute voltage values of the first voltage signal condition and the second voltage signal condition; wherein the memory element is a resistive memory. RAM (RRAM) elements, phase change memory (PCM) elements, ferroelectric RAM (FeRAM) elements, or magnetic tunneling junction memory (MTJ) elements, wherein the magnetic tunneling junction memory element includes a fixed magnetization layer and a free magnetization layer separated by a tunneling barrier layer. 如請求項1、2、3或4的隨機存取記憶體,其中該記憶體胞元陣列包括有複數個記憶體胞元、複數個字元線以及複數個位元線,該複數個記憶體胞元配置於一基板平面上方以第一方向及垂直於該第一方向的第二方向的平行於該基板平面的陣列狀排列,該複數個字元線沿第一方向配置,該複數個位元線沿第二方向配置;以及該隨機存取記憶體更包括有字元線解碼驅動電路、位元線感應電路及位元線解碼驅動電路,其中該複數個字元線連接至該字元線解碼驅動電路,該複數個位元線連接至該位元線感應電路及該位元線解碼驅動電路,其中,該字元線解碼驅動電路包含複數個字元線開關以各別與該複數個字元線連接,該複數個字元線開關係為電晶體開關或傳輸閘(Transmission Gate)開關。Random access memory as described in claims 1, 2, 3, or 4, wherein the memory cell array includes a plurality of memory cells, a plurality of word lines, and a plurality of bit lines, the plurality of memory cells being arranged in an array above a substrate plane in a first direction and a second direction perpendicular to the first direction, parallel to the substrate plane; the plurality of word lines being arranged along the first direction; and the plurality of bit lines being arranged along the second direction; and the random access memory further includes... It includes a character line decoding driver circuit, a bit line sensing circuit, and a bit line decoding driver circuit, wherein the plurality of character lines are connected to the character line decoding driver circuit, and the plurality of bit lines are connected to the bit line sensing circuit and the bit line decoding driver circuit. The character line decoding driver circuit includes a plurality of character line switches to be connected to the plurality of character lines respectively, and the plurality of character line switches are transistor switches or transmission gate switches. 如請求項7的隨機存取記憶體,該隨機存取記憶體更包括有複數個記憶體胞元陣列,其中該各個記憶體胞元陣列的該複數個記憶體胞元係以個別垂直於該基板平面的方式連接該複數個字元線以及該複數個位元線以形成記憶體胞元陣列層;其中該各個記憶體胞元陣列係位於不同的平面層以於該基板平面上方形成複數個記憶體胞元陣列層,該複數個記憶體胞元陣列層的該複數個字元線以及該複數個位元線係於該複數個記憶體胞元陣列層的邊端垂直地往下連接至該基板平面以分別連接位於該基板平面的該字元線解碼驅動電路、該位元線感應電路及該位元線解碼驅動電路,以形成包含複數個記憶體胞元陣列層的立體(Three dimensional)結構。As in claim 7, the random access memory further includes a plurality of memory cell arrays, wherein the plurality of memory cells in each memory cell array are connected to a plurality of word lines and a plurality of bit lines in a manner perpendicular to the substrate plane to form a memory cell array layer; wherein each memory cell array is located on different planar layers to form a plurality of [missing information - likely related to the substrate plane]. A plurality of memory cell array layers, wherein the plurality of word lines and the plurality of bit lines of the plurality of memory cell array layers are vertically connected downward from the edges of the plurality of memory cell array layers to the substrate plane to respectively connect the word line decoding driver circuit, the bit line sensing circuit and the bit line decoding driver circuit located on the substrate plane, thereby forming a three-dimensional structure comprising a plurality of memory cell array layers. 如請求項7的隨機存取記憶體,其中,儲存該複數個記憶體胞元中的其中一個記憶體胞元的記憶元件的低電阻狀態的條件包括: 該字元線解碼驅動電路施加一字元線電壓於該記憶體胞元的字元線及該位元線解碼驅動電路施加一位元線電壓於該記憶體胞元的位元線,以使該記憶元件的二個端點具有一第一電壓訊號條件,該第一電壓訊號條件決定該記憶元件的低電阻狀態,並且,該字元線解碼驅動電路經由關閉其他的字元線所連接的字元線開關以使其他的字元線維持浮接(Floating)狀態,該位元線解碼驅動電路施加一相同於該字元線電壓減去該二極體的順向導通電壓的電壓訊號於其他的位元線或該位元線解碼驅動電路使其他的位元線維持浮接狀態。As in claim 7, random access to memory, wherein the conditions for the low-resistance state of the memory element storing one of the plurality of memory cells include: the word line decoding driver applies a word line voltage to the word line of the memory cell, and the bit line decoding driver applies a bit line voltage to the bit line of the memory cell, so that the two terminals of the memory element have a first voltage signal condition, the first voltage signal condition determining the low-resistance state of the memory element, and the word line decoding driver... The circuit keeps other word lines floating by turning off the word line switches connected to them. The bit line decoder driver applies a voltage signal equal to the word line voltage minus the forward conduction voltage of the diode to the other bit lines, or the bit line decoder driver keeps the other bit lines floating. 如請求項7的隨機存取記憶體,其中,儲存該複數個記憶體胞元中的其中一個記憶體胞元的記憶元件的高電阻狀態的條件包括: 該字元線解碼驅動電路施加一字元線電壓於該記憶體胞元的字元線及該位元線解碼驅動電路施加一位元線電壓於該記憶體胞元的位元線,以使該記憶元件的二個端點具有一第二電壓訊號條件,該第二電壓訊號條件決定該記憶元件的高電阻狀態,並且,該字元線解碼驅動電路經由關閉其他的字元線所連接的字元線開關以使其他的字元線維持浮接狀態,該位元線解碼驅動電路施加一相同於該字元線電壓減去該二極體的順向導通電壓的電壓訊號於其他的位元線或該位元線解碼驅動電路使其他的位元線維持浮接狀態。As in claim 7, random access to memory, wherein the conditions for the high-resistance state of the memory element storing one of the plurality of memory cells include: the character line decoding driver applies a character line voltage to the character line of the memory cell, and the bit line decoding driver applies a bit line voltage to the bit line of the memory cell, so that the two terminals of the memory element have a second voltage signal condition, the second voltage signal condition determining the high-resistance state of the memory element, and the character line decoding driver applies a bit line voltage to the bit line of the memory cell, thereby giving the two terminals of the memory element a second voltage signal condition, the second voltage signal condition determining the high-resistance state of the memory element, and the character line decoding driver applying a bit line voltage to the bit line of the memory cell. The bit line decoding driver circuit keeps other word lines floating by turning off the word line switches connected to other word lines. The bit line decoding driver circuit applies a voltage signal that is the same as the word line voltage minus the forward conduction voltage of the diode to other bit lines or keeps other bit lines floating. 如請求項7的隨機存取記憶體,其中,讀取該複數個記憶體胞元中的其中一個記憶體胞元的記憶元件的儲存資料的條件包括: 該字元線解碼驅動電路施加一字元線電壓於該記憶體胞元的字元線及該位元線解碼驅動電路施加一位元線電壓於該記憶體胞元的位元線,以使該記憶元件的二個端點具有一第三電壓訊號條件,該第三電壓訊號條件無法決定該記憶元件的高電阻狀態或低電阻狀態,其中該記憶元件的第一端點的電壓值比該記憶元件的第二端點的電壓值還高,並且,該字元線解碼驅動電路經由關閉其他的字元線所連接的字元線開關以使其他的字元線維持浮接狀態,再使該位元線經該位元線感應電路開始感應,其他的位元線經該位元線感應電路開始感應或該位元線解碼驅動電路使其他的位元線維持浮接狀態;以及 該位元線經該位元線感應電路開始感應後的一第一時間區間後,該位元線解碼驅動電路傳輸該位元線經感應後的電壓值。For example, in the random access to memory as described in claim 7, the conditions for reading the stored data of the memory element in one of the plurality of memory cells include: the word line decoding driver applies a word line voltage to the word line of the memory cell, and the bit line decoding driver applies a bit line voltage to the bit line of the memory cell, so that the two terminals of the memory element have a third voltage signal condition, which cannot determine the high resistance state or low resistance state of the memory element, wherein the voltage value of the first terminal of the memory element is... The voltage is higher than that of the second terminal of the memory element, and the character line decoding driver circuit keeps the other character lines floating by turning off the character line switches connected to the other character lines, and then makes the character line start sensing through the character line sensing circuit, and the other character lines start sensing through the character line sensing circuit or the character line decoding driver circuit keeps the other character lines floating; and after a first time interval after the character line starts sensing through the character line sensing circuit, the character line decoding driver circuit transmits the voltage value of the character line after sensing. 如請求項7的隨機存取記憶體,其中,維持該記憶體胞元陣列中的該複數個記憶體胞元的記憶元件的儲存資料的條件包括: 該字元線解碼驅動電路經由關閉全部的字元線所連接的字元線開關以使全部的字元線維持浮接狀態,該位元線解碼驅動電路施加一預定的位元線電壓於全部的位元線或該位元線解碼驅動電路使全部的位元線維持浮接狀態。As in claim 7, random access to memory, wherein the conditions for maintaining the stored data of the memory elements of the plurality of memory cells in the memory cell array include: the word line decoder driver keeps all word lines in a floating state by turning off the word line switches connected to all word lines, the bit line decoder driver applies a predetermined bit line voltage to all bit lines, or the bit line decoder driver keeps all bit lines in a floating state. 如請求項7的隨機存取記憶體,其中,該字元線解碼驅動電路施加一字元線電壓於一字元線,並且該字元線解碼驅動電路經由關閉其他的字元線所連接的字元線開關以使其他的字元線維持浮接狀態,及該位元線解碼驅動電路施加相同或不同的位元線電壓於該複數個位元線,以使該字元線所連接的複數個記憶體胞元同時進行複數個資料的寫入儲存。For example, in the random access memory of claim 7, the character line decoder applies a character line voltage to a character line, and the character line decoder keeps other character lines in a floating state by turning off the character line switches connected to other character lines, and the bit line decoder applies the same or different bit line voltages to the plurality of bit lines, so that the plurality of memory cells connected to the character lines can simultaneously write and store a plurality of data. 如請求項7的隨機存取記憶體,其中,該字元線解碼驅動電路施加一字元線電壓於一字元線,並且該字元線解碼驅動電路經由關閉其他的字元線所連接的字元線開關以使其他的字元線維持浮接狀態,再使該複數個位元線經該位元線感應電路開始感應;以及該複數個位元線經該位元線感應電路開始感應後的一第一時間區間後,該位元線解碼驅動電路傳輸該複數個位元線經感應後的電壓值,以使該字元線所連接的複數個記憶體胞元同時進行複數個資料的讀取。As in claim 7, random access to memory, wherein the character line decoding driver applies a character line voltage to a character line, and the character line decoding driver keeps the other character lines in a floating state by turning off the character line switches connected to the other character lines, and then causes the plurality of character lines to start sensing through the character line sensing circuit; and after a first time interval after the plurality of character lines start sensing through the character line sensing circuit, the character line decoding driver transmits the voltage value of the plurality of character lines after sensing, so that the plurality of memory cells connected to the character line can simultaneously read a plurality of data.
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