TWM679203U - Process exhaust gas treatment system - Google Patents
Process exhaust gas treatment systemInfo
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- TWM679203U TWM679203U TW114210660U TW114210660U TWM679203U TW M679203 U TWM679203 U TW M679203U TW 114210660 U TW114210660 U TW 114210660U TW 114210660 U TW114210660 U TW 114210660U TW M679203 U TWM679203 U TW M679203U
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Abstract
一種製程廢氣處理系統，包含：主廢氣處理設備、 備援廢氣處理設備、連通構件以及控制裝置。主廢氣處理設備於預設廢氣處理溫度淨化處理製程廢氣。備援廢氣處理設備可切換地在低於預設廢氣處理溫度的節能溫度以及預設廢氣處理溫度下運轉。連通構件的歧管體具有連通主廢氣處理設備的第一出口部以及連通備援廢氣處理設備的第二出口部。控制裝置監控主廢氣處理設備的廢氣處理工作參數，且控制備援廢氣處理設備在節能溫度以及預設廢氣處理溫度之間的切換、以及控制連通構件的控制閥體在連通至第一出口部以及第二出口部之間的切換。A process waste gas treatment system includes: a main waste gas treatment device, a backup waste gas treatment device, a connecting component, and a control device. The main waste gas treatment device purifies the process waste gas at a preset waste gas treatment temperature. The backup waste gas treatment device can switch between operating at an energy-saving temperature lower than the preset waste gas treatment temperature and at the preset waste gas treatment temperature. The manifold body of the connecting component has a first outlet connecting to the main waste gas treatment device and a second outlet connecting to the backup waste gas treatment device. The control device monitors the waste gas treatment operating parameters of the main waste gas treatment equipment, and controls the switching between the backup waste gas treatment equipment and the preset waste gas treatment temperature, as well as the switching of the control valve body of the connecting component between the first outlet and the second outlet.
Description
本創作相關於一種製程廢氣處理系統，特別是相關於一種將製程廢氣予以加熱淨化處理的系統。This invention relates to a process waste gas treatment system, and more particularly to a system for heating and purifying process waste gas.
現有技術之加熱式的廢氣處理設備，為以預設廢氣處理溫度（如：攝氏900度）對於半導體製程所產生之有毒的製程廢氣進行加熱，而達成製程廢氣的淨化處理。在廢氣處理設備執行淨化處理的過程中，另配置有在同樣的預設廢氣處理溫度下待命運轉的備用廢氣處理設備，以在主要的廢氣處理設備失效時能夠接收製程廢氣從而續行淨化處理。Existing heated waste gas treatment equipment uses a preset waste gas treatment temperature (e.g., 900 degrees Celsius) to heat the toxic process waste gas generated during semiconductor manufacturing, thereby purifying the waste gas. During the purification process, a backup waste gas treatment system operating at the same preset temperature is also configured to receive the process waste gas and continue purification if the main waste gas treatment system fails.
然而，備用廢氣處理設備在未執行淨化處理的待命狀態下仍然以預設廢氣處理溫度運轉，造成維持淨化處理作業溫度之能源上的損耗，且亦由此拉抬製程廢氣處理設備的整體運轉成本。However, the standby waste gas treatment equipment still operates at the preset waste gas treatment temperature when it is not performing purification treatment, resulting in energy consumption to maintain the purification treatment temperature and thus increasing the overall operating cost of the process waste gas treatment equipment.
因此，本創作的目的即在提供一種製程廢氣處理系統，可節約維持製程廢氣之備援淨化處理作業溫度的能源。Therefore, the purpose of this invention is to provide a process exhaust gas treatment system that can save energy used to maintain the backup purification treatment temperature of process exhaust gas.
本創作為解決習知技術之問題所採用之技術手段係提供一種製程廢氣處理系統，包含：主廢氣處理設備，經配置而於預設廢氣處理溫度將加工製程所產生的製程廢氣淨化處理為淨化排氣；備援廢氣處理設備，經配置而可切換地在節能溫度以及該預設廢氣處理溫度下運轉，其中該節能溫度低於該預設廢氣處理溫度；連通構件，具有歧管體以及控制閥體，其中該歧管體的一端為入口部，該歧管體的另一端包含第一出口部以及第二出口部，該控制閥體設置於該入口部、以及該第一出口部與該第二出口部之間而使該入口部可切換地連通於該第一出口部或該第二出口部，該入口部接收該製程廢氣，該第一出口部流路連通於該主廢氣處理設備，以及該第二出口部流路連通於該備援廢氣處理設備；以及控制裝置，訊號連接該主廢氣處理設備、該備援廢氣處理設備以及該連通構件的該控制閥體，而監控該主廢氣處理設備的廢氣處理工作參數，且控制該備援廢氣處理設備在該節能溫度以及該預設廢氣處理溫度之間的切換、以及控制該控制閥體在連通至該第一出口部以及該第二出口部之間的切換，其中在該備援廢氣處理設備為該節能溫度、且該連通構件的該控制閥體使該歧管體的該入口部連通於該第一出口部時，該製程廢氣經由該主廢氣處理設備淨化處理為淨化排氣並自該主廢氣處理設備排放至外界環境，並且在該控制裝置依據該廢氣處理工作參數低於預設標準工作參數而判定該主廢氣處理設備為運轉警示狀態時，該控制裝置產生廢氣轉運指令以及廢氣處理指令，且將該廢氣處理指令傳送予該備援廢氣處理設備、以及將該廢氣轉運指令傳送予該控制閥體，藉此該備援廢氣處理設備自該節能溫度上升至該預設廢氣處理溫度，且該控制閥體使該入口部連通於該第二出口部，該製程廢氣經導引至該備援廢氣處理設備並經淨化處理為淨化排氣而自該備援廢氣處理設備排放至外界環境。The technical means employed in this invention to solve the problems of prior art is to provide a process waste gas treatment system, comprising: a main waste gas treatment device configured to purify process waste gas generated during the processing into purified exhaust gas at a preset waste gas treatment temperature; a backup waste gas treatment device configured to switchably operate at an energy-saving temperature and the preset waste gas treatment temperature, wherein the energy-saving temperature is lower than the preset waste gas treatment temperature; and a connecting component having a manifold body and a control valve body, wherein one end of the manifold body is an inlet, and the other end of the manifold body includes a first outlet. The system includes a second outlet and a control valve body disposed between the inlet, the first outlet, and the second outlet, allowing the inlet to be switchably connected to either the first or the second outlet. The inlet receives the process waste gas. The first outlet is connected to the main waste gas treatment equipment, and the second outlet is connected to the backup waste gas treatment equipment. A control device is also included, signal-connected to the main waste gas treatment equipment, the backup waste gas treatment equipment, and the control valve body of the connecting components, to monitor the waste gas treatment operating parameters of the main waste gas treatment equipment and control... The system controls the switching between the backup waste gas treatment equipment and the preset waste gas treatment temperature, and controls the switching between connecting the control valve body to the first outlet and the second outlet. When the backup waste gas treatment equipment is at the energy-saving temperature, and the control valve body of the connecting component connects the inlet of the manifold to the first outlet, the process waste gas is purified by the main waste gas treatment equipment into purified exhaust gas and discharged from the main waste gas treatment equipment to the external environment. Furthermore, the control device adjusts the waste gas treatment operating parameters according to a preset standard. When the main exhaust gas treatment equipment is determined to be in an operating warning state based on the operating parameters, the control device generates an exhaust gas transfer command and an exhaust gas treatment command, and transmits the exhaust gas treatment command to the backup exhaust gas treatment equipment and the exhaust gas transfer command to the control valve body. Thereby, the backup exhaust gas treatment equipment rises from the energy-saving temperature to the preset exhaust gas treatment temperature, and the control valve body connects the inlet to the second outlet. The process exhaust gas is guided to the backup exhaust gas treatment equipment and purified into purified exhaust gas, which is then discharged from the backup exhaust gas treatment equipment to the external environment.
在本創作的一實施例中係提供一種製程廢氣處理系統，其中該備援廢氣處理設備為瓦斯式、電熱式或電漿式的加熱裝置。In one embodiment of this invention, a process waste gas treatment system is provided, wherein the backup waste gas treatment equipment is a gas-fired, electric, or plasma-fired heating device.
在本創作的一實施例中係提供一種製程廢氣處理系統，其中該主廢氣處理設備為瓦斯式、電熱式或電漿式的加熱裝置。In one embodiment of this invention, a process waste gas treatment system is provided, wherein the main waste gas treatment equipment is a gas-fired, electric, or plasma-fired heating device.
在本創作的一實施例中係提供一種製程廢氣處理系統，其中該主廢氣處理設備為瓦斯式的加熱裝置，該主廢氣處理設備包含瓦斯流量計，該廢氣處理工作參數為該瓦斯流量計所讀取之實際淨化作業耗用瓦斯流量，以及該預設標準工作參數為預設淨化作業所需瓦斯流量。In one embodiment of this invention, a process waste gas treatment system is provided, wherein the main waste gas treatment equipment is a gas-type heating device, the main waste gas treatment equipment includes a gas flow meter, the waste gas treatment operating parameter is the actual gas flow rate consumed in the purification operation read by the gas flow meter, and the preset standard operating parameter is the preset gas flow rate required for the purification operation.
在本創作的一實施例中係提供一種製程廢氣處理系統，其中該廢氣處理工作參數為該主廢氣處理設備淨化處理該製程廢氣的實際淨化作業溫度，以及該預設標準工作參數為該預設廢氣處理溫度。In one embodiment of this invention, a process waste gas treatment system is provided, wherein the waste gas treatment operating parameter is the actual purification operating temperature of the main waste gas treatment equipment for purifying the process waste gas, and the preset standard operating parameter is the preset waste gas treatment temperature.
在本創作的一實施例中係提供一種製程廢氣處理系統，其中該廢氣處理工作參數為在該主廢氣處理設備之排放部的該淨化排氣的實際淨化作業流量，以及該預設標準工作參數為預設淨化排氣流量。In one embodiment of the present invention, a process waste gas treatment system is provided, wherein the waste gas treatment operating parameter is the actual purification operation flow rate of the purified exhaust gas at the emission section of the main waste gas treatment equipment, and the preset standard operating parameter is the preset purified exhaust gas flow rate.
在本創作的一實施例中係提供一種製程廢氣處理系統，其中該廢氣處理工作參數為在該歧管體的該第一出口部的該製程廢氣的實際淨化作業流量，以及該預設標準工作參數為預設製程廢氣流量。In one embodiment of the present invention, a process waste gas treatment system is provided, wherein the waste gas treatment operating parameter is the actual purification operation flow rate of the process waste gas at the first outlet of the manifold, and the preset standard operating parameter is the preset process waste gas flow rate.
經由本創作的製程廢氣處理系統所採用之技術手段，能夠獲得以下的技術功效。節約維持製程廢氣之淨化處理作業溫度的能源，並於主廢氣處理設備為運轉警示狀態時靈活地切換至備援廢氣處理設備以進行製程廢氣的淨化處理作業。The technical benefits achieved by the process waste gas treatment system of this invention are as follows: Energy is saved in maintaining the temperature of the process waste gas purification process, and the system can flexibly switch to the backup waste gas treatment equipment to perform the process waste gas purification process when the main waste gas treatment equipment is in an operation warning state.
以下根據第1圖至第5圖，而說明本創作的實施方式。該說明並非為限制本創作的實施方式，而為本創作之實施例的一種。The following description, based on Figures 1 through 5, illustrates the embodiments of the invention. This description is not intended to limit the embodiments of the invention, but rather to provide one example of its implementation.
如第1圖以及第2圖所示，依據本創作的一實施例的一種製程廢氣處理系統100，包含：主廢氣處理設備1、備援廢氣處理設備2、連通構件3以及控制裝置4。As shown in Figures 1 and 2, a process waste gas treatment system 100 according to an embodiment of the present invention includes: a main waste gas treatment device 1, a backup waste gas treatment device 2, a connecting component 3, and a control device 4.
如第1圖至第3圖所示，該主廢氣處理設備1經配置而於預設廢氣處理溫度將加工製程所產生的製程廢氣淨化處理為淨化排氣。As shown in Figures 1 to 3, the main exhaust gas treatment equipment 1 is configured to purify the process exhaust gas generated during the processing at a preset exhaust gas treatment temperature, turning it into purified exhaust gas.
如第1圖以及第2圖所示，該備援廢氣處理設備2經配置而可切換地在節能溫度以及該預設廢氣處理溫度下運轉，其中該節能溫度低於該預設廢氣處理溫度。換句話說，該備援廢氣處理設備2於待機狀態下維持在該節能溫度，在接收到淨化處理製程廢氣的指示啟動後，該備援廢氣處理設備2上升溫度至該預設廢氣處理溫度，以執行製程廢氣的淨化處理；藉此，本創作透過該備援廢氣處理設備2於待機狀態維持在相對低的溫度（相對於該預設廢氣處理溫度為低的溫度），以節省維持淨化處理作業溫度時能源上的損耗（亦即，本創作能夠避免該備援廢氣處理設備2長時間維持在該預設廢氣處理溫度之下運轉）。As shown in Figures 1 and 2, the backup exhaust gas treatment equipment 2 is configured to operate switchably at an energy-saving temperature and a preset exhaust gas treatment temperature, wherein the energy-saving temperature is lower than the preset exhaust gas treatment temperature. In other words, the backup waste gas treatment equipment 2 maintains the energy-saving temperature in standby mode. After receiving an instruction to purify the process waste gas, the backup waste gas treatment equipment 2 raises its temperature to the preset waste gas treatment temperature to perform the purification treatment of the process waste gas. In this way, the present invention saves energy consumption when maintaining the purification treatment operating temperature by keeping the backup waste gas treatment equipment 2 at a relatively low temperature in standby mode (a lower temperature than the preset waste gas treatment temperature). (That is, the present invention can avoid the backup waste gas treatment equipment 2 from operating at the preset waste gas treatment temperature for a long time.)
如第2圖至第4圖所示，該連通構件3具有歧管體31以及控制閥體32。具體而言，該歧管體31的一端為入口部311，以及該歧管體31的另一端包含第一出口部312以及第二出口部313；並且，該控制閥體32設置於該入口部311、以及該第一出口部312與該第二出口部313之間，而使該入口部311可切換地連通於該第一出口部312（如第3圖所示）或連通於該第二出口部313（如第4圖所示）。As shown in Figures 2 to 4, the connecting component 3 has a manifold body 31 and a control valve body 32. Specifically, one end of the manifold body 31 is an inlet 311, and the other end of the manifold body 31 includes a first outlet 312 and a second outlet 313; and the control valve body 32 is disposed between the inlet 311 and the first outlet 312 and the second outlet 313, so that the inlet 311 can be switched to the first outlet 312 (as shown in Figure 3) or to the second outlet 313 (as shown in Figure 4).
進一步而言，該入口部311接收該製程廢氣。如第2圖以及第3圖所示，該第一出口部312流路連通於該主廢氣處理設備1。如第2圖以及第4圖所示，該第二出口部313流路連通於該備援廢氣處理設備2。Furthermore, the inlet 311 receives the process waste gas. As shown in Figures 2 and 3, the first outlet 312 is connected to the main waste gas treatment equipment 1. As shown in Figures 2 and 4, the second outlet 313 is connected to the backup waste gas treatment equipment 2.
如第1圖、第3圖以及第4圖所示，該控制裝置4訊號連接該主廢氣處理設備1、該備援廢氣處理設備2以及該連通構件3的該控制閥體32。藉此，該控制裝置4監控該主廢氣處理設備1的廢氣處理工作參數；並且，由該控制裝置4控制該備援廢氣處理設備2在該節能溫度以及該預設廢氣處理溫度之間的切換、以及控制該控制閥體32在連通至該第一出口部312以及該第二出口部313之間的切換。As shown in Figures 1, 3, and 4, the control device 4 is signal-connected to the main waste gas treatment equipment 1, the backup waste gas treatment equipment 2, and the control valve body 32 of the connecting component 3. Thereby, the control device 4 monitors the waste gas treatment operating parameters of the main waste gas treatment equipment 1; and controls the switching of the backup waste gas treatment equipment 2 between the energy-saving temperature and the preset waste gas treatment temperature, and controls the switching of the control valve body 32 between connection to the first outlet 312 and the second outlet 313.
詳細而言，如第1圖至第3圖所示，在該備援廢氣處理設備2為該節能溫度、且該連通構件3的該控制閥體32使該歧管體31的該入口部311連通於該第一出口部312時，該製程廢氣經由該主廢氣處理設備1淨化處理為淨化排氣並自該主廢氣處理設備1排放至外界環境。In detail, as shown in Figures 1 to 3, when the backup waste gas treatment equipment 2 is at the energy-saving temperature and the control valve 32 of the connecting component 3 connects the inlet 311 of the manifold 31 to the first outlet 312, the process waste gas is purified into purified exhaust gas by the main waste gas treatment equipment 1 and discharged from the main waste gas treatment equipment 1 to the external environment.
此外，如第2圖、第4圖以及第5圖所示，在該控制裝置4依據該主廢氣處理設備1的該廢氣處理工作參數（第5圖的步驟S1）低於預設標準工作參數而判定該主廢氣處理設備1為運轉警示狀態時（第5圖的步驟S2），該控制裝置4產生廢氣處理指令（第5圖的步驟S3）且將該廢氣轉運指令傳送予該控制閥體32（第5圖的步驟S4），藉此該控制閥體32使該入口部311連通於該第二出口部313（第5圖的步驟S5，且參照第4圖）。Furthermore, as shown in Figures 2, 4, and 5, when the control device 4 determines that the main waste gas treatment equipment 1 is in an operation warning state based on the waste gas treatment operating parameters of the main waste gas treatment equipment 1 (step S1 in Figure 5) being lower than the preset standard operating parameters (step S2 in Figure 5), the control device 4 generates a waste gas treatment command (step S3 in Figure 5) and transmits the waste gas transfer command to the control valve body 32 (step S4 in Figure 5), thereby connecting the inlet 311 to the second outlet 313 (step S5 in Figure 5, and see Figure 4).
承上所述，另一方面，該控制裝置4產生廢氣轉運指令（第5圖的步驟S6）並將該廢氣處理指令傳送予該備援廢氣處理設備2（第5圖的步驟S7），而使該備援廢氣處理設備2自該節能溫度上升至該預設廢氣處理溫度（第5圖的步驟S8）。As described above, on the other hand, the control device 4 generates an exhaust gas transfer command (step S6 in Figure 5) and transmits the exhaust gas treatment command to the backup exhaust gas treatment equipment 2 (step S7 in Figure 5), thereby causing the backup exhaust gas treatment equipment 2 to rise from the energy-saving temperature to the preset exhaust gas treatment temperature (step S8 in Figure 5).
並且，該製程廢氣經導引至該備援廢氣處理設備2並經淨化處理為淨化排氣（第5圖的步驟S9）而自該備援廢氣處理設備2排放至外界環境（第5圖的步驟S10）。Furthermore, the process exhaust gas is guided to the backup exhaust gas treatment equipment 2 and purified into purified exhaust gas (step S9 in Figure 5) and then discharged from the backup exhaust gas treatment equipment 2 to the external environment (step S10 in Figure 5).
具體而言，依據本創作的一實施例的製程廢氣處理系統100，其中該備援廢氣處理設備2為瓦斯式、電熱式或電漿式的加熱裝置。Specifically, according to one embodiment of the present invention, a process waste gas treatment system 100 is provided, wherein the backup waste gas treatment device 2 is a gas-type, electric-type, or plasma-type heating device.
進一步而言，依據本創作的一實施例的製程廢氣處理系統100，其中該主廢氣處理設備1為瓦斯式、電熱式或電漿式的加熱裝置。Furthermore, according to an embodiment of the present invention, a process waste gas treatment system 100 is provided, wherein the main waste gas treatment device 1 is a gas-type, electric-type, or plasma-type heating device.
也就是說，本創作並不以該主廢氣處理設備1以及該備援廢氣處理設備2為同款式加熱裝置為限。例如：該主廢氣處理設備1為瓦斯式的加熱裝置，該備援廢氣處理設備2為電熱式的加熱裝置；或者。該主廢氣處理設備1為電熱式的加熱裝置，該備援廢氣處理設備2為電漿式的加熱裝置In other words, this invention is not limited to the main waste gas treatment equipment 1 and the backup waste gas treatment equipment 2 being the same type of heating device. For example, the main waste gas treatment equipment 1 is a gas-type heating device, and the backup waste gas treatment equipment 2 is an electric heating device; or, the main waste gas treatment equipment 1 is an electric heating device, and the backup waste gas treatment equipment 2 is a plasma heating device.
詳細而言，依據本創作的一實施例的製程廢氣處理系統100，其中該主廢氣處理設備1為瓦斯式的加熱裝置，該主廢氣處理設備1包含瓦斯流量計。該廢氣處理工作參數為該瓦斯流量計所讀取之實際淨化作業耗用瓦斯流量，以及該預設標準工作參數為預設淨化作業所需瓦斯流量。舉例而言，該預設淨化作業所需瓦斯流量為50L/min，若該瓦斯流量計所讀取之實際淨化作業耗用瓦斯流量為30L/min，則該控制裝置4依據該實際淨化作業耗用瓦斯流量低於該預設淨化作業所需瓦斯流量而判定該主廢氣處理設備1為運轉警示狀態。Specifically, according to an embodiment of the present invention, a process waste gas treatment system 100 is provided, wherein the main waste gas treatment device 1 is a gas-type heating device, and the main waste gas treatment device 1 includes a gas flow meter. The waste gas treatment operating parameter is the actual gas flow rate consumed in the purification operation read by the gas flow meter, and the preset standard operating parameter is the preset gas flow rate required for the purification operation. For example, if the preset gas flow rate required for the purification operation is 50L/min, and the actual gas flow rate consumed by the purification operation as read by the gas flow meter is 30L/min, then the control device 4 determines that the main waste gas treatment equipment 1 is in an operation warning state based on the fact that the actual gas flow rate consumed by the purification operation is lower than the preset gas flow rate required for the purification operation.
另一方面，依據本創作的一實施例的製程廢氣處理系統100，其中該廢氣處理工作參數為該主廢氣處理設備1淨化處理該製程廢氣的實際淨化作業溫度，以及該預設標準工作參數為該預設廢氣處理溫度。舉例而言，該預設廢氣處理溫度為攝氏900度，若該實際淨化作業溫度為攝氏700度，則該控制裝置4依據該實際淨化作業溫度低於該預設廢氣處理溫度而判定該主廢氣處理設備1為運轉警示狀態。On the other hand, according to an embodiment of the present invention, the process waste gas treatment system 100 has the following parameters: the waste gas treatment operating parameters are the actual purification operating temperature of the main waste gas treatment equipment 1 for purifying the process waste gas, and the preset standard operating parameters are the preset waste gas treatment temperature. For example, if the preset waste gas treatment temperature is 900 degrees Celsius, and the actual purification operating temperature is 700 degrees Celsius, then the control device 4 determines that the main waste gas treatment equipment 1 is in an operation warning state based on the fact that the actual purification operating temperature is lower than the preset waste gas treatment temperature.
另一方面，依據本創作的一實施例的製程廢氣處理系統100，其中該廢氣處理工作參數為在該主廢氣處理設備1之排放部的該淨化排氣的實際淨化作業流量，以及該預設標準工作參數為預設淨化排氣流量。舉例而言，該預設淨化排氣流量為200L/min，若該淨化排氣的實際淨化作業流量為120L/min，則該控制裝置4依據該淨化排氣的實際淨化作業流量低於該預設淨化排氣流量而判定該主廢氣處理設備1為運轉警示狀態。On the other hand, according to an embodiment of the present invention, the process waste gas treatment system 100 has the following operating parameters: the actual purification operation flow rate of the purified exhaust gas at the discharge section of the main waste gas treatment equipment 1, and the preset standard operating parameter is the preset purified exhaust gas flow rate. For example, if the preset purified exhaust gas flow rate is 200 L/min, and the actual purification operation flow rate of the purified exhaust gas is 120 L/min, then the control device 4 determines that the main waste gas treatment equipment 1 is in an operation warning state based on the fact that the actual purification operation flow rate of the purified exhaust gas is lower than the preset purified exhaust gas flow rate.
另一方面，依據本創作的一實施例的製程廢氣處理系統100，其中該廢氣處理工作參數為在該歧管體31的該第一出口部312的該製程廢氣的實際淨化作業流量，以及該預設標準工作參數為預設製程廢氣流量。舉例而言，該預設製程廢氣流量為800L/min，若該製程廢氣的實際淨化作業流量為600L/min，則該控制裝置4依據該製程廢氣的實際淨化作業流量低於該預設製程廢氣流量而判定該主廢氣處理設備1為運轉警示狀態。On the other hand, according to an embodiment of the present invention, the process waste gas treatment system 100 has the following operating parameters: the actual purification operation flow rate of the process waste gas at the first outlet 312 of the manifold 31, and the preset standard operating parameter is the preset process waste gas flow rate. For example, if the preset process waste gas flow rate is 800 L/min, and the actual purification operation flow rate of the process waste gas is 600 L/min, then the control device 4 determines that the main waste gas treatment equipment 1 is in an operation warning state based on the fact that the actual purification operation flow rate of the process waste gas is lower than the preset process waste gas flow rate.
由上述可知，本創作的該製程廢氣處理系統100，藉由該備援廢氣處理設備2於待機狀態下維持在該節能溫度而在該主廢氣處理設備1為運轉警示狀態時上升至該預設廢氣處理溫度，並配合該連通構件3使該製程廢氣轉運至該備援廢氣處理設備2進行淨化處理，以此使得維持該製程廢氣之淨化處理作業溫度的能源能夠獲得節約，從而節省整體該製程廢氣處理系統100的運轉成本。As can be seen from the above, the process waste gas treatment system 100 of this invention maintains the energy-saving temperature in the standby state by using the backup waste gas treatment equipment 2, and raises it to the preset waste gas treatment temperature when the main waste gas treatment equipment 1 is in the operation warning state. In conjunction with the connecting component 3, the process waste gas is transferred to the backup waste gas treatment equipment 2 for purification treatment. In this way, the energy required to maintain the purification treatment temperature of the process waste gas can be saved, thereby saving the overall operating cost of the process waste gas treatment system 100.
以上之敘述以及說明僅為本創作之較佳實施例之說明，對於此項技術具有通常知識者當可依據以下所界定申請專利範圍以及上述之說明而作其他之修改，惟此些修改仍應是為本創作之創作精神而在本創作之權利範圍中。The above description and explanation are merely illustrative examples of the preferred embodiments of this invention. Those skilled in the art may make other modifications based on the scope of the patent application as defined below and the above explanation, but such modifications shall still be within the spirit of the invention and the scope of the claims of this invention.
100:製程廢氣處理系統 1:主廢氣處理設備 2:備援廢氣處理設備 3:連通構件 31:歧管體 311:入口部 312:第一出口部 313:第二出口部 32:控制閥體 4:控制裝置 S1:步驟 S2:步驟 S3:步驟 S4:步驟 S5:步驟 S6:步驟 S7:步驟 S8:步驟 S9:步驟 S10:步驟100: Process Waste Gas Treatment System 1: Main Waste Gas Treatment Equipment 2: Backup Waste Gas Treatment Equipment 3: Connecting Components 31: Manifold Body 311: Inlet 312: First Outlet 313: Second Outlet 32: Control Valve Body 4: Control Device S1: Step S2: Step S3: Step S4: Step S5: Step S6: Step S7: Step S8: Step S9: Step S10: Step
［第1圖］為顯示根據本創作的一實施例的製程廢氣處理系統的方塊示意圖； ［第2圖］為顯示根據本創作實施例的製程廢氣處理系統中連通構件的方塊示意圖； ［第3圖］為顯示根據本創作實施例的製程廢氣處理系統於主廢氣處理設備淨化處理製程廢氣的方塊示意圖； ［第4圖］為顯示根據本創作實施例的製程廢氣處理系統於備援廢氣處理設備淨化處理製程廢氣的方塊示意圖；以及 ［第5圖］為顯示根據本創作實施例的製程廢氣處理系統以備援廢氣處理設備淨化處理製程廢氣的順序示意圖。[Figure 1] is a block diagram showing a process waste gas treatment system according to an embodiment of the present invention; [Figure 2] is a block diagram showing the connecting components in the process waste gas treatment system according to an embodiment of the present invention; [Figure 3] is a block diagram showing the purification treatment of process waste gas in the main waste gas treatment equipment according to an embodiment of the present invention; [Figure 4] is a block diagram showing the purification treatment of process waste gas in the backup waste gas treatment equipment according to an embodiment of the present invention; and [Figure 5] is a schematic diagram showing the sequence of process waste gas treatment system according to the present invention for purifying process waste gas with backup waste gas treatment equipment.
100:製程廢氣處理系統 100: Process Waste Gas Treatment System
1:主廢氣處理設備 1: Main exhaust gas treatment equipment
2:備援廢氣處理設備 2: Backup exhaust gas treatment equipment
3:連通構件 3: Connecting Components
31:歧管體 31: Manifold
32:控制閥體 32: Control valve body
4:控制裝置 4: Control Device
Claims (7)
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| TW114210660U TWM679203U (en) | 2025-10-07 | 2025-10-07 | Process exhaust gas treatment system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW114210660U TWM679203U (en) | 2025-10-07 | 2025-10-07 | Process exhaust gas treatment system |
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| TWM679203U true TWM679203U (en) | 2026-01-11 |
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