TWM669376U - Photoluminescence imaging inspection system for multi-junction solar cells - Google Patents

Photoluminescence imaging inspection system for multi-junction solar cells Download PDF

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TWM669376U
TWM669376U TW113209649U TW113209649U TWM669376U TW M669376 U TWM669376 U TW M669376U TW 113209649 U TW113209649 U TW 113209649U TW 113209649 U TW113209649 U TW 113209649U TW M669376 U TWM669376 U TW M669376U
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junction solar
solar cell
light
module
photoexcitation
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TW113209649U
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程子桓
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立創光電股份有限公司
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Abstract

A photoluminescence (PL) imaging detection technology for multi-junction solar cells is disclosed. The technology uses a specific wavelength excitation light source to irradiate the solar cells, causing them to emit photoluminescence. A filter is used to block the excitation light wavelength, allowing the photodetector to capture only the photoluminescence signals emitted by the solar cells. These signals are processed by an image processing module to generate high-resolution images that identify and locate defects within the solar cells. The system and method provided by this disclosure offer high detection sensitivity and accuracy, significantly improving the efficiency of quality control for multi-junction solar cells. It is applicable for real-time quality inspection and defect analysis during the production process of solar cells.

Description

多接面太陽能電池的光激發光影像檢測系統Photoluminescence imaging detection system for multi-junction solar cells

本新型專利涉及太陽能電池技術領域,具體涉及一種針對多接面太陽能電池的光激發光(Photoluminescence,PL)影像檢測技術,該技術旨在提高太陽能電池的檢測效率和精度。 This new patent involves the field of solar cell technology, specifically a photoluminescence (PL) image detection technology for multi-junction solar cells, which aims to improve the detection efficiency and accuracy of solar cells.

多接面太陽能電池因其高效的光電轉換能力而受到廣泛關注,特別是在衛星、航天等高需求應用領域。然而,多接面結構的複雜性使得其製造過程中容易產生各種缺陷,如晶體結構中的微裂縫、錯位和接面不均勻性等,這些缺陷將嚴重影響太陽能電池的效率和壽命。因此,對多接面太陽能電池的內部結構進行精確的檢測和分析變得至關重要。 Multi-junction solar cells have attracted wide attention due to their efficient photoelectric conversion capabilities, especially in high-demand applications such as satellites and aerospace. However, the complexity of the multi-junction structure makes it easy to produce various defects during the manufacturing process, such as microcracks, dislocations and junction non-uniformity in the crystal structure, which will seriously affect the efficiency and life of the solar cell. Therefore, it is crucial to accurately detect and analyze the internal structure of multi-junction solar cells.

傳統的檢測技術如電致發光(Electroluminescence,EL)技術主要依賴於通過施加電壓來激發太陽能電池發光,然後通過檢測發光的強度和分佈來判斷內部缺陷。儘管EL技術在一 定程度上能夠檢測到大部分缺陷,但其檢測靈敏度和分辨率有限,特別是在多接面結構中,EL技術難以有效區分不同接面層之間的缺陷。此外,由於EL檢測需要在電池運行的條件下進行,這樣的檢測方式可能受到電池工作狀態的影響,導致檢測結果不穩定。 Traditional detection technologies such as electroluminescence (EL) technology mainly rely on applying voltage to stimulate solar cells to emit light, and then judging internal defects by detecting the intensity and distribution of the light. Although EL technology can detect most defects to a certain extent, its detection sensitivity and resolution are limited. Especially in multi-junction structures, EL technology is difficult to effectively distinguish defects between different junction layers. In addition, since EL detection needs to be carried out under the condition of battery operation, such detection method may be affected by the working state of the battery, resulting in unstable detection results.

另一種常用的檢測技術是外部量子效率(External Quantum Efficiency,EQE)測試。EQE測試通過測量在不同波長光照射下的光電轉換效率來分析電池的性能,然而這種方法主要用於整體性能測試,無法準確定位細微的內部缺陷。此外,EQE測試需要逐步掃描波長,檢測過程較為耗時,並且對多接面結構的細微缺陷敏感度較低。 Another commonly used detection technology is the external quantum efficiency (EQE) test. The EQE test analyzes the performance of the battery by measuring the photoelectric conversion efficiency under different wavelengths of light. However, this method is mainly used for overall performance testing and cannot accurately locate subtle internal defects. In addition, the EQE test requires step-by-step scanning of wavelengths, the detection process is time-consuming, and the sensitivity to subtle defects in multi-junction structures is low.

為了克服這些限制,光激發光(Photoluminescence,PL)技術開始引起業界的關注。PL技術通過使用光源激發太陽能電池,使其發出與材料特性相關的光激發光。由於PL技術不需要對電池施加電壓,因此可以避免工作狀態對檢測結果的干擾。此外,PL技術具有更高的靈敏度,特別是在檢測微小缺陷方面。然而,現有的PL檢測系統在檢測速度和影像處理能力上仍存在不足,難以滿足大規模生產線的實時檢測需求。 In order to overcome these limitations, photoluminescence (PL) technology has begun to attract the attention of the industry. PL technology uses a light source to excite solar cells, causing them to emit photoluminescence related to material properties. Since PL technology does not require the application of voltage to the battery, it can avoid the interference of the working state on the detection results. In addition, PL technology has higher sensitivity, especially in detecting tiny defects. However, the existing PL detection system still has shortcomings in detection speed and image processing capabilities, and it is difficult to meet the real-time detection needs of large-scale production lines.

因此,業界急需一種能夠對多接面太陽能電池進行高 效、高分辨率檢測的PL影像檢測技術,該技術不僅能夠準確識別和定位內部缺陷,還應能夠適應大規模生產線的在線檢測需求。本新型正是針對這些技術挑戰,提出了一種基於光激發光影像的多接面太陽能電池檢測系統和方法,旨在提高檢測的精度與效率。 Therefore, the industry urgently needs a PL image detection technology that can perform efficient and high-resolution inspection of multi-junction solar cells. This technology can not only accurately identify and locate internal defects, but also be able to adapt to the online inspection needs of large-scale production lines. This new technology is aimed at these technical challenges and proposes a multi-junction solar cell inspection system and method based on photoexcitation light imaging, aiming to improve the accuracy and efficiency of inspection.

下文係提供本新型專利之初始理解之一簡化概述,該概述不必識別關鍵要素亦不必限制本新型專利之範疇,而僅充當以下描述之一介紹。 The following is a simplified summary to provide an initial understanding of the present invention. The summary does not necessarily identify the key elements or limit the scope of the present invention, but only serves as an introduction to the following description.

本新型專利創作提供了一種用於多接面太陽能電池的PL影像檢測系統及方法,以解決現有技術在缺陷檢測靈敏度、分辨率及實時性方面的不足。該系統包括激發光光源、濾光片、光偵測器及影像處理模組。此系統能夠對多接面太陽能電池進行高分辨率的PL影像檢測,有效提升檢測效率,並可廣泛應用於太陽能電池的質量控制。 This new patent invention provides a PL image detection system and method for multi-junction solar cells to solve the shortcomings of existing technologies in terms of defect detection sensitivity, resolution and real-time performance. The system includes an excitation light source, a filter, a photodetector and an image processing module. This system can perform high-resolution PL image detection on multi-junction solar cells, effectively improving detection efficiency, and can be widely used in solar cell quality control.

具體來說,本新型的系統包括以下核心組成部分:(1)可調波長激發光光源:本新型採用了可調波長的激光器作為激發光光源,波長範圍覆蓋250至1500nm,以適應多接面太陽能電池中不同材料和結構的特性。這種可調波長的激光器能夠選擇性 地激發特定接面,從而提高對不同接面層內部缺陷的檢測靈敏度。(2)精確的濾光技術:系統中配置了多層次濾光片,這些濾光片可以過濾掉激發光的波長,僅允許特定波段的光激發光通過至光偵測器。此設計確保了所捕捉的PL信號純度,減少背景噪聲的干擾,從而提高檢測精度。(3)高靈敏度光偵測器:本新型中的光偵測器選用了高靈敏度的冷卻型電荷耦合元件(Charge Coupled Device,CCD)、互補式金屬氧化物半導體(Complementary Metal Oxide Semiconductor,CMOS)相機或高光譜儀(Hyperspectral Instrument),這些相機能夠在低光環境下工作,並且通過冷卻裝置減少熱噪聲的影響。這一配置允許系統捕捉到微弱的PL信號,從而實現對微小缺陷的檢測。(4)先進的影像處理模組:本系統集成了先進的影像處理技術,包括影像增強、邊緣檢測、缺陷分類和三維重建等算法。這些技術能夠在短時間內對捕捉到的PL影像進行處理,準確識別並定位太陽能電池內部的各種缺陷,如裂紋、位錯、異質接面不連續等。該模組還支持即時的缺陷分析,並且可以將檢測結果自動化報告。(5)多接面識別能力:本新型的系統具有多接面識別功能,能夠針對不同接面層進行獨立的PL影像檢測。這一功能通過在檢測過程中調整激發光的波長來實現,從而可以對不同接面層的特定缺陷進行靈敏檢測。(6)實時檢 測和在線應用:系統設計為適應大規模生產線的在線質量控制需求。該系統的高檢測速度和實時影像處理能力,使其能夠集成於太陽能電池的自動化生產線,進行實時缺陷檢測。這一特點極大地提高了生產過程中的質量控制效率,並有助於及時識別和排除生產中的潛在問題。 Specifically, the system of this novel type includes the following core components: (1) Adjustable wavelength excitation light source: This novel type adopts an adjustable wavelength laser as the excitation light source, with a wavelength range of 250 to 1500nm to adapt to the characteristics of different materials and structures in multi-junction solar cells. This adjustable wavelength laser can selectively excite specific junctions, thereby improving the detection sensitivity of internal defects in different junction layers. (2) Precise filtering technology: The system is equipped with multiple layers of filters, which can filter out the wavelength of the excitation light and only allow the optical excitation light of a specific wavelength band to pass through to the optical detector. This design ensures the purity of the captured PL signal, reduces the interference of background noise, and thus improves the detection accuracy. (3) High-sensitivity photodetector: The photodetector in this new model uses a high-sensitivity cooled charge coupled device (CCD), complementary metal oxide semiconductor (CMOS) camera or hyperspectral instrument. These cameras can work in low-light environments and reduce the impact of thermal noise through cooling devices. This configuration allows the system to capture weak PL signals, thereby realizing the detection of tiny defects. (4) Advanced image processing module: This system integrates advanced image processing technology, including image enhancement, edge detection, defect classification and three-dimensional reconstruction algorithms. These technologies can process the captured PL images in a short time, accurately identify and locate various defects inside the solar cell, such as cracks, dislocations, heterogeneous junction discontinuities, etc. The module also supports real-time defect analysis and can automatically report the detection results. (5) Multi-junction recognition capability: This new system has a multi-junction recognition function and can perform independent PL image detection on different junction layers. This function is achieved by adjusting the wavelength of the excitation light during the detection process, so that specific defects in different junction layers can be sensitively detected. (6) Real-time detection and online application: The system is designed to meet the online quality control needs of large-scale production lines. The system's high detection speed and real-time image processing capabilities enable it to be integrated into the automated production line of solar cells for real-time defect detection. This feature greatly improves the efficiency of quality control in the production process and helps to identify and eliminate potential problems in production in a timely manner.

本新型的這些技術特徵,使其在檢測精度、靈敏度和應用範圍上遠優於現有的PL檢測技術。該系統不僅能夠準確地檢測出多接面太陽能電池中的微小缺陷,還可以應用於不同種類和規模的太陽能電池生產中,提供強大的質量保證,並延長太陽能電池的使用壽命。 These technical features of this new technology make it far superior to existing PL detection technology in terms of detection accuracy, sensitivity and application range. This system can not only accurately detect tiny defects in multi-junction solar cells, but can also be applied to the production of solar cells of different types and scales, providing strong quality assurance and extending the service life of solar cells.

1:樣品 1: Sample

2:光電激發模組 2: Photoelectric excitation module

21:光源 21: Light source

211:檢測光 211: Detection light

22:電壓源 22: Voltage source

3:檢測模組 3: Detection module

4:電極機構 4: Electrode mechanism

41:第一電極 41: First electrode

42:第二電極 42: Second electrode

43:樣本座 43: Sample seat

5:濾光片模組 5: Filter module

6:激發光 6: Excitation light

圖1是本新型的多接面太陽能電池光激發光影像檢測系統之一較佳實施例的裝置示意圖。 Figure 1 is a schematic diagram of a preferred embodiment of the multi-junction solar cell photo-induced light image detection system of the present invention.

圖2是該較佳實施例的功能方塊圖。 Figure 2 is a functional block diagram of the preferred embodiment.

圖3是本新型的多接面太陽能電池光激發光影像檢測系統之另一實施例的裝置示意圖。 Figure 3 is a schematic diagram of another embodiment of the multi-junction solar cell photo-induced light image detection system of the present invention.

圖4是本新型的多接面太陽能電池光激發光影像檢測系統量測多接面太陽能電池的結果。 Figure 4 shows the results of measuring multi-junction solar cells using the novel multi-junction solar cell photo-excitation imaging detection system.

有關本新型之前述及其他技術內容、特點與功效,在以下配合參考圖式之一個較佳實施例的詳細說明中,將可清楚的呈現。 The above-mentioned and other technical contents, features and effects of the new invention will be clearly presented in the following detailed description of a preferred embodiment with reference to the drawings.

參閱圖1與圖2,本新型的材料發光影像檢測裝置之較佳實施例,用於檢測一樣品1的激發光影像,該樣品1為半導體材料所製成,例如表面有磊晶層的鍺半導體晶圓或是其他多接面材料,但不限於此。該檢測裝置包含:一光電激發模組2、一檢測模組3、一電極機構4以及一濾光片模組5。 Referring to Figures 1 and 2, the preferred embodiment of the novel material luminescence image detection device is used to detect the excitation light image of a sample 1, and the sample 1 is made of semiconductor material, such as a germanium semiconductor wafer with an epitaxial layer on the surface or other multi-junction materials, but not limited to this. The detection device includes: a photoelectric excitation module 2, a detection module 3, an electrode mechanism 4 and a filter module 5.

該光電激發模組2包括一個光源21,以及一個電壓源22,該光源21能發出一波長小於該樣品1的能隙所對應的波長的檢測光211,該檢測光211照射該樣品1後,能激發該樣品1之材料而使電子躍遷至激發態並留下電洞,激發態的電子再回歸至較穩定的低能階,在此同時會形成發光性複合而放光,此現象即稱為光激發光,即產生激發光6;該電壓源22能輸出特定之電壓至該電極機構4以調變該樣品1之能帶結構,使該樣品1之材料在光激發後的電子電洞分布位置受到調變而影響發光性複合現象。而該檢測模組3可以是CCD或CMOS的影像感測元件亦或是高光譜儀,如圖1所示,檢測模組3設置於光電激發模組2之一側,並用於擷取該樣品1的發光影像 及其光譜資訊。搭配濾光片模組5,可供判斷該樣品1在各個接面上是否有缺陷,透過影像的亮度均勻度、亮度梯度與梯度形貌等特性,可得知該樣品1的各個接面上是否有刮傷、隱痕或材料缺陷。 The photoelectric excitation module 2 includes a light source 21 and a voltage source 22. The light source 21 can emit a detection light 211 with a wavelength less than the wavelength corresponding to the energy gap of the sample 1. After the detection light 211 irradiates the sample 1, it can excite the material of the sample 1 and make the electrons jump to the excited state and leave holes. The electrons in the excited state return to a more stable low energy level, and at the same time, luminescent recombination is formed to emit light. This phenomenon is called photoluminescence, that is, the excitation light 6 is generated; the voltage source 22 can output a specific voltage to the electrode mechanism 4 to modulate the energy band structure of the sample 1, so that the electron-hole distribution position of the material of the sample 1 after photoexcitation is modulated to affect the luminescent recombination phenomenon. The detection module 3 can be a CCD or CMOS image sensor or a high spectrometer. As shown in FIG1 , the detection module 3 is disposed on one side of the photoelectric excitation module 2 and is used to capture the luminous image of the sample 1 and its spectral information. In combination with the filter module 5, it can be used to determine whether the sample 1 has defects on each interface. Through the characteristics of the image such as brightness uniformity, brightness gradient and gradient morphology, it can be known whether the sample 1 has scratches, hidden marks or material defects on each interface.

其中,該光源21可以為雷射光源、LED光源或燈泡,該檢測光211的波長不限,只要能使該樣品1照光後被激發發光即可。具體而言,該檢測光211的波長可以介於為250nm至1500nm,但不限於此。 The light source 21 can be a laser light source, an LED light source or a light bulb, and the wavelength of the detection light 211 is not limited, as long as the sample 1 can be excited to emit light after being illuminated. Specifically, the wavelength of the detection light 211 can be between 250nm and 1500nm, but is not limited thereto.

其中,該電壓源22可以為定電流源、定電壓源、可調變電壓源或具電表功能之電壓源,只要能使該該樣品1通電後可調變其材料能帶結構即可。具體而言,該電壓源22的電壓範圍可以介於為-200V至200V,但不限於此。 The voltage source 22 can be a constant current source, a constant voltage source, an adjustable voltage source, or a voltage source with an ammeter function, as long as the material band structure of the sample 1 can be adjusted after being powered on. Specifically, the voltage range of the voltage source 22 can be between -200V and 200V, but is not limited thereto.

該電極機構4位於該樣品1的下方,並用於承載該樣品1。該電極機構4包含一樣本座43、第一電極41、第二電極42作為該電壓源22的正負電極,該第一電極41與該第二電極42連接至該樣品1。該第一電極41與該第二電極42可調整接觸置放於該樣本座43上的該樣品1之正負極而不限於同一接觸面,以配合測量需求。 The electrode mechanism 4 is located below the sample 1 and is used to carry the sample 1. The electrode mechanism 4 includes a sample stand 43, a first electrode 41, and a second electrode 42 as positive and negative electrodes of the voltage source 22. The first electrode 41 and the second electrode 42 are connected to the sample 1. The first electrode 41 and the second electrode 42 can be adjusted to contact the positive and negative electrodes of the sample 1 placed on the sample stand 43 without being limited to the same contact surface to meet the measurement requirements.

由發光影像可以得知該樣品1上的任一個檢測點之不 同接面的發光特性,由於發光特性與該樣品1的純度、摻雜雜質濃度、摻雜種類、少數載子生命週期、接面特性、表面複合速率、內建電場及光致電壓特性等有關,因此由發光影像可以得到該樣品1材料的品質好壞、少數載子生命週期分布、接面特性分布、表面複合速率分布、內建電場分布及光致電壓分布。 The luminescence image can be used to know the luminescence characteristics of different junctions at any detection point on the sample 1. Since the luminescence characteristics are related to the purity, doping concentration, doping type, minority carrier life cycle, junction characteristics, surface recombination rate, built-in electric field and photovoltage characteristics of the sample 1, the luminescence image can be used to obtain the quality of the sample 1 material, minority carrier life cycle distribution, junction characteristics distribution, surface recombination rate distribution, built-in electric field distribution and photovoltage distribution.

本新型使用時,可選擇使用該光電激發模組2之該光源21、該電壓源22或其組合進行樣本激發。可個別量測該樣品1之特定偏壓下的光激發光影像(biased PL image)。光激發光影像可以反應出接近樣品不同接面的發光特性分布;特定偏壓下的光激發光影像則可以反應出不同的能帶變化下的載子分布與不同樣品深度的發光特性分布。 When using the present invention, the light source 21, the voltage source 22 or a combination of the light source 2 of the photoelectric excitation module 2 can be selected to excite the sample. The biased PL image of the sample 1 under a specific bias can be measured individually. The biased PL image can reflect the distribution of luminescence characteristics close to different interfaces of the sample; the biased PL image under a specific bias can reflect the carrier distribution under different energy band changes and the distribution of luminescence characteristics at different sample depths.

圖4是本新型的多接面太陽能電池光激發光影像檢測系統量測多接面太陽能電池的結果。在本實例中,係以磷化銦鎵/砷化鎵/鍺(InGaP/GaAs/Ge)多接面太陽能電池為例,分別以電壓源22提供0V或3V之電壓至InGaP/GaAs/Ge多接面太陽能電池片,並以檢測模組3擷取InGaP/GaAs/Ge多接面太陽能電池片之不同接面之光激發光影像(Photoluminescence Image,PL Image)。如圖4所示,圖中 4(a)為電壓為0V時,上接面(Top Junciton)之光激發光影像;4(b)為電壓為0V時,中間接面(Middle Junciton)之光激發光影像;4(c)為電壓為3V時,上接面(Top Junciton)之光激發光影像;4(d)為電壓為3V時,中間接面(Middle Junciton)之光激發光影像。由圖4可以看出亮暗點位置為磊晶缺陷、長條狀暗線為InGaP/GaAs/Ge多接面太陽能電池片的正面金屬線斷線。 FIG4 is the result of the multi-junction solar cell photoluminescence image detection system of the present invention measuring the multi-junction solar cell. In this example, an InGaP/GaAs/Ge multi-junction solar cell is taken as an example, and the voltage source 22 provides a voltage of 0V or 3V to the InGaP/GaAs/Ge multi-junction solar cell, and the detection module 3 captures the photoluminescence image (PL Image) of different junctions of the InGaP/GaAs/Ge multi-junction solar cell. As shown in Figure 4, Figure 4(a) is the photoluminescence image of the top junction when the voltage is 0V; 4(b) is the photoluminescence image of the middle junction when the voltage is 0V; 4(c) is the photoluminescence image of the top junction when the voltage is 3V; 4(d) is the photoluminescence image of the middle junction when the voltage is 3V. It can be seen from Figure 4 that the bright and dark spots are epitaxial defects, and the long dark lines are the broken metal lines on the front side of the InGaP/GaAs/Ge multi-junction solar cell.

綜上所述,結合光電激發模組2之該光源21與該電壓源22的組合應用,可以達到該樣品1的大面積檢測及其縱深方向的發光特性分布,另一方面,該電壓源22的電壓輸出為自動化程式控制,當該樣品1於不同條件下作檢測時,就不需以人工額外將樣品1卸下與重新安裝、設定量測參數,所以本新型使用上相當方便,因此可以提升整體的檢測速度,所以本新型具有檢測速度快、效率高之優點,乃為相當實用且多功能的檢測裝置。 In summary, the combined application of the light source 21 and the voltage source 22 of the photoelectric excitation module 2 can achieve large-area detection of the sample 1 and the distribution of its luminous characteristics in the vertical and deep directions. On the other hand, the voltage output of the voltage source 22 is automatically program-controlled. When the sample 1 is tested under different conditions, there is no need to manually remove and reinstall the sample 1 and set the measurement parameters. Therefore, the new type is very convenient to use, and the overall detection speed can be improved. Therefore, the new type has the advantages of fast detection speed and high efficiency, and is a very practical and multifunctional detection device.

惟以上所述者,僅為本新型之較佳實施例而已,當不能以此限定本新型實施之範圍,即大凡依本新型申請專利範圍及新型說明內容所作之簡單的等效變化與修飾,皆仍屬本新型專利涵蓋之範圍內。 However, the above is only the preferred embodiment of the present invention, and it cannot be used to limit the scope of implementation of the present invention. In other words, all simple equivalent changes and modifications made according to the scope of the patent application and the content of the description of the present invention are still within the scope of the present patent.

1:樣品 1: Sample

21:光源 21: Light source

22:電壓源 22: Voltage source

3:檢測模組 3: Detection module

5:濾光片模組 5: Filter module

Claims (5)

一種多接面太陽能電池的光激發光影像檢測系統,包括: 一光電激發模組,用於照射一多接面太陽能電池,以激發該多接面太陽能電池發出一光激發光,該光電激發模組包含一光源及一電壓源,該光源用以提供光照射至該多接面太陽能電池,該電壓源用以提供一電壓至該多接面太陽能電池; 一檢測模組,設置於該光電激發模組之一側,並用於捕捉由該多接面太陽能電池發出的該光激發光信號;以及 一濾光片模組,設置於該檢測模組之前端,用於過濾掉該光源之該光激發光之波段的光線,使得該檢測模組僅接收來自該多接面太陽能電池的該光激發光。 A photoexcitation light image detection system for a multi-junction solar cell comprises: a photoexcitation module for irradiating a multi-junction solar cell to excite the multi-junction solar cell to emit a photoexcitation light, the photoexcitation module comprising a light source and a voltage source, the light source is used to provide light irradiation to the multi-junction solar cell, and the voltage source is used to provide a voltage to the multi-junction solar cell; a detection module, arranged on one side of the photoexcitation module, and used to capture the photoexcitation light signal emitted by the multi-junction solar cell; and A filter module is arranged at the front end of the detection module, and is used to filter out the light of the wavelength band of the photoexcitation light of the light source, so that the detection module only receives the photoexcitation light from the multi-junction solar cell. 如請求項1所述之多接面太陽能電池的光激發光影像檢測系統,其中,所述光電激發模組之該光源包含波長可調的光源,波長範圍為250至1500nm。The multi-junction solar cell photo-excitation image detection system as described in claim 1, wherein the light source of the photoelectric excitation module includes a wavelength-adjustable light source with a wavelength range of 250 to 1500 nm. 如請求項1所述之多接面太陽能電池的光激發光影像檢測系統,其中,所述濾光片模組之通帶波長範圍,係配合不同之該多接面太陽能電池而調整。The photoluminescence image detection system of a multi-junction solar cell as described in claim 1, wherein the passband wavelength range of the filter module is adjusted to match different multi-junction solar cells. 如請求項1所述之多接面太陽能電池的光激發光影像檢測系統,其中,所述檢測模組包含電荷耦合元件(CCD)、互補式金屬氧化物半導體(CMOS)相機或高光譜儀,且該檢測模組具有一冷卻裝置以降低熱噪聲對檢測結果的影響。A photo-induced light imaging detection system for a multi-junction solar cell as described in claim 1, wherein the detection module comprises a charge coupled device (CCD), a complementary metal oxide semiconductor (CMOS) camera or a hyperspectrometer, and the detection module has a cooling device to reduce the influence of thermal noise on the detection result. 如請求項1所述之多接面太陽能電池的光激發光影像檢測系統,其中,該光電激發模組之該電壓源係用以提供一偏壓至該多接面太陽能電池。The photoexcitation light image detection system of a multi-junction solar cell as described in claim 1, wherein the voltage source of the photoexcitation module is used to provide a bias voltage to the multi-junction solar cell.
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