TWM667451U - Manipulator, detection device for detecting physical features of micro-nano element - Google Patents

Abstract

The subject disclosure relates to a manipulator used for holding probes, a detection device with a manipulator, and a method for detecting the physical features of micro-nano elements. The manipulator includes a positioning adjustment component, which comprises a slide rail assembly. The slide rail assembly includes a slide rail cover and an elastic element. The slide rail cover comprises a slide rail received in a slide groove of a slide rail base, and the two ends of the elastic element respectively fixed to the slide rail base and the slide rail cover. The manipulator further includes a knob assembly, a cantilever connected to the positioning adjustment component, and a holding element with a hole. The knob assembly is able to contact with the slide rail cover, and a connecting member is received within a channel of the cantilever.

Description

Robotic arm and detection device for detecting physical characteristics of micro-nano components

The present disclosure relates to a robot arm and a detection device, and more particularly to providing a detection device having a robot arm and using the robot arm to detect physical characteristics of micro-nano components.

Probes are often used in the manufacturing and analysis of semiconductor components, especially in detecting the structure, size, material properties or possible defects of chips, wafers, transistors, integrated circuit boards, or other micro-nano-scale electronic components. Different technical fields may have different detection requirements, such as structural analysis or electrical testing; for example, an electron beam can be used to scan the surface of the object to be tested, and the surface characteristics of the object to be tested, such as the shape of bumps, can be detected by observing the reflected light or transmitted light, so as to detect the surface characteristics of the object to be tested. With the development of technology, the application of semiconductors is becoming more and more extensive, and the demand for semiconductor parts is also increasing. In the semiconductor manufacturing process, precision control is particularly required. Therefore, probes are particularly important in the semiconductor industry.

In known testing technology, the probe usually has a specific length, and its length will remain at a certain length after being installed in the testing device. However, the height or thickness of each object to be tested is different, and the position of the surface of the object to be tested that the probe tip needs to touch is also different. Therefore, the length of the probe will directly affect the distance that the probe tip penetrates into the object to be tested. If the length of the probe is too short, the probe will not be able to fully contact the surface of the object to be tested; on the contrary, if the length of the probe is too long, the needle tip penetrates too deeply into the surface of the object to be tested, which can easily cause damage to the probe and the object to be tested.

For the same reason, the adjustability of the detection device used to clamp the probe is also very important. However, it is known that the detection device for micro-nano components is often limited by the rotation axis direction or component connection relationship, so that certain specific components (for example, the component holding the probe and the cantilever of the robot arm) cannot move relative to each other, which results in insufficient adjustability of the detection device. Since the probe of the micro-nano component detection device often needs to make fine coordinate adjustments and has extremely high requirements on accuracy, multi-axis operability is crucial for such equipment. In addition, if the probe cannot be stably clamped or accommodated in the detection device, it will also greatly affect the accuracy of the semiconductor process or analysis process.

In summary, how to accurately adjust the distance between the probe and the object to be tested, and how to increase the adjustability of the detection device while keeping the probe stable so that it has more accurate measurement results, are technical problems that need to be solved urgently in this technical field.

The present disclosure mainly provides a mechanical arm for clamping a probe, a detection device having the mechanical arm, and a method for detecting the physical characteristics of micro-nano components. The mechanical arm has multi-axial adjustment capabilities and good clamping stability, thereby making the operation of the detection device more flexible and convenient, and improving the accuracy of the measurement results.

In some embodiments, the present disclosure provides a robot arm for clamping a probe, which includes a positioning adjustment assembly disposed on a positioning adjustment base. The positioning adjustment assembly includes a slide rail assembly, which includes a slide rail top cover and an elastic element. A slide rail of the slide rail top cover can be slidably accommodated in a slide groove of a slide rail base, and the two ends of the elastic element are respectively fixed to the slide rail base and the slide rail top cover. In addition, the robot arm further includes a handwheel assembly, a cantilever connected to the positioning adjustment assembly, and a clamping member with a hole. The handwheel assembly can contact the slide rail top cover, and the connecting member is accommodated in a groove in the cantilever.

In an exemplary embodiment, a first handwheel connecting frame is disposed on the first slide rail base, a first guide is disposed in the first handwheel connecting frame, and the screw of the first handwheel assembly can be locked into a through hole of the first guide.

In an exemplary embodiment, the positioning adjustment assembly further comprises: a second slide rail assembly, which comprises a second slide rail connecting plate connected to the first slide rail assembly; a second slide rail top cover, a slide groove of the second slide rail top cover is slidably accommodated in a slide rail of a second slide rail base approximately along a second direction; and a second elastic element, whose two ends are respectively fixed to the second slide rail base and the second slide rail top cover; and the robot arm further comprises a second hand wheel assembly, which has a screw that can contact the second slide rail top cover, wherein the second direction is approximately perpendicular to the first direction.

In an exemplary embodiment, a second handwheel connecting frame is disposed on the second slide rail base, a second guide member is disposed in the second handwheel connecting frame, and the screw of the second handwheel assembly can be locked into a through hole of the second guide member.

In an exemplary embodiment, the positioning adjustment assembly further includes: a third slide rail assembly, which includes a third slide rail cover connected to the second slide rail assembly, a slide groove of the third slide rail cover is slidably accommodated in a slide rail of a third slide rail base along a third direction, and the third slide rail base is arranged on one side of the positioning adjustment base; and a third elastic element, whose two ends are respectively fixed between the third slide rail base and the third slide rail cover; and the robot arm further includes a third hand wheel assembly, which has a screw that can contact the third slide rail cover, wherein the third direction is substantially perpendicular to the first direction and the second direction.

In an exemplary embodiment, a third handwheel connecting frame is disposed on the third slide rail base, a third guide is disposed in the third handwheel connecting frame, and the screw of the third handwheel assembly can be locked into a through hole of the third guide.

In an exemplary embodiment, the first slide rail top cover can move ±10 mm relative to the first slide rail base along the first direction.

In an exemplary embodiment, the cantilever member further includes a cantilever connecting plate, and the end of the cantilever member is fixed to the positioning adjustment assembly through the cantilever connecting plate.

In an exemplary embodiment, a first end of the connecting member is positioned inside the groove of the cantilever member and is pivotally connected to the cantilever member, whereby the connecting member can rotate relative to the cantilever member on a first plane formed by the first direction and the second direction with the first end as an axis.

In an exemplary embodiment, the connector can rotate 10 degrees on the first plane.

In an exemplary embodiment, the cantilever member further includes a height adjustment knob disposed adjacent to a second end of the connecting member opposite to the first end.

In an exemplary embodiment, the robot further includes an elastic element located between the cantilever and the clamping member, and the two ends of the elastic element located between the cantilever and the clamping member are respectively fixed on a first anchoring member located on the cantilever and a second anchoring member located on the clamping member. The first anchoring member and the second anchoring member are respectively located at different heights.

In an exemplary embodiment, the second anchor is disposed on a protrusion of the clamp. In addition, the protrusion may be a flat surface or have a free-form surface or an inclined surface.

In an exemplary embodiment, the first end of the clamping member is movably connected to a second end of the connecting member opposite to the first end, whereby the clamping member can move relative to the second end of the connecting member on a second plane formed by the second direction and the third direction.

In an exemplary embodiment, the clamping member can rotate ±70 degrees on the second plane.

In an exemplary embodiment, the hole of the clamping member is formed between a first positioning plate and a second positioning plate, and one or more distance adjustment members are provided between the first positioning plate and the second positioning plate.

In an exemplary embodiment, the robot arm further includes a cable collection clip disposed on the positioning adjustment assembly.

In an exemplary embodiment, an inner wall of the hole of the positioning and adjustment base or the clamp is magnetic.

In some embodiments, the present disclosure provides a detection device for detecting physical characteristics of micro-nano components, which includes a disclosed robot arm, a probe holder accommodated between the holes of the clamp, and a probe connected to one end of the probe holder.

In some embodiments, the present disclosure provides a method for detecting the physical characteristics of a micro-nano device, which includes placing a detection device disclosed in the disclosure on a substrate surface; providing a light source to illuminate the surface of the micro-nano device to obtain an optical signal; and receiving and processing the optical signal to obtain information related to the physical characteristics of the micro-nano device.

The above has been a fairly broad overview of the technical features of the present disclosure, so that the detailed description of the present disclosure below can be better understood. Other technical features that constitute the subject matter of the patent application scope of the present disclosure will be described below. Those with ordinary knowledge in the technical field to which the present disclosure belongs should understand that the concepts and specific embodiments disclosed below can be easily used to modify or design other structures or processes to achieve the same purpose as the present disclosure. Those with ordinary knowledge in the technical field to which the present disclosure belongs should also understand that such equivalent constructions cannot deviate from the spirit and scope of the present disclosure as defined by the attached patent application scope.

1:Robotic arm

10: Positioning adjustment assembly

11: Slide rail assembly

11a: First slide rail assembly

111a: First slide rail connecting plate

111b: Second slide rail connecting plate

112a: First slide rail base

1121a: First handwheel connecting frame

1122a: First guide member

113a: Displacement adjustment assembly

114a: Top cover of the first slide rail

1131a: First lock firmware

1132a: Second lock firmware

1133a: first elastic element

1123a: Slide rail

1141a: Chute

1142a: Cantilever fixing plate

11b: Second slide rail assembly

114b: Second slide rail top cover

112b: Second slide rail base

1121b: Second hand wheel connecting frame

1122b: Second guide member

113b: Displacement adjustment assembly

1131b: Third lock firmware

1132b: The fourth lock firmware

1133b: Second elastic element

1123b: Slide rail

1141b: Chute

11c: Third slide rail assembly

114c: Third rail top cover

112c: Third rail base

1121c: Third hand wheel connecting frame

1122c: Third guide member

113c: Displacement adjustment assembly

1131c: Fifth lock firmware

1132c: Sixth lock firmware

1133c: The third elastic element

1123c: Slide rail

1141c: chute

12: Handwheel assembly

12a: First handwheel assembly

121a: Handwheel part

122a: Screw

12b: Second hand wheel assembly

121b: Handwheel part

122b: screw

12c: Third handwheel assembly

121c: Handwheel part

122c: screw

13: Position and adjust the base

14: Cantilever parts

141: Cantilever connecting plate

142: Groove

143: Height adjustment knob

1431: Knob

1432: Screw

144: First anchor

15: Connectors

151: First end

152: Second end

16: Clamping piece

161: First end

162: Second anchor

163: protrusion

164: First positioning plate

165: Second positioning plate

166: Distance adjustment piece

17: Elastic element

18: Cable management clip

2: Probe holder

3: Probe

4: Object to be tested

BS: Base surface

R: Receiver

CA: Medium

H: Hole

S: Light source

L: beam

L': reflected beam

D: Detection device

FIG1 is a schematic diagram of a robotic arm according to an embodiment of the present disclosure.

FIG2A shows a schematic diagram of a three-dimensional decomposition of a robotic arm according to an embodiment of the present disclosure.

FIG. 2B shows a side view of a robot arm according to an embodiment of the present disclosure, wherein a slide rail top cover is in a neutral position.

FIG. 2C shows a side view of a robot arm according to an embodiment of the present disclosure, wherein a slide rail top cover contacts a hand wheel assembly and moves downward.

FIG. 2D shows a side view of a robot arm according to an embodiment of the present disclosure, wherein a slide rail top cover contacts a hand wheel assembly and moves upward.

FIG3A shows a second three-dimensional exploded schematic diagram of a robotic arm according to an embodiment of the present disclosure.

FIG. 3B shows a side view of a robot arm according to an embodiment of the present disclosure, wherein a slide rail top cover is in a neutral position.

FIG3C shows a side view of a robot arm according to an embodiment of the present disclosure, wherein a slide rail top cover contacts a hand wheel assembly and moves to the right.

FIG3D shows a side view of a robot arm according to an embodiment of the present disclosure, wherein a slide rail top cover contacts a hand wheel assembly and moves to the left.

FIG4A is a schematic diagram of a three-dimensional decomposition of a robotic arm according to an embodiment of the present disclosure.

FIG. 4B shows a side view of a robot arm according to an embodiment of the present disclosure, wherein a slide rail top cover is in a neutral position.

FIG. 4C shows a side view of a robot arm according to an embodiment of the present disclosure, wherein a slide rail top cover contacts a hand wheel assembly and moves to the right.

FIG. 4D shows a side view of a robot arm according to an embodiment of the present disclosure, wherein a slide rail top cover contacts a hand wheel assembly and moves to the left.

FIG. 5A shows a side view of a robot arm according to an embodiment of the present disclosure, wherein a connecting member is accommodated in a groove of a cantilever member.

FIG. 5B shows a side view of a robot arm according to an embodiment of the present disclosure, wherein one end of a connecting member rotates counterclockwise.

FIG6A shows a partial enlarged view of a robot arm according to an embodiment of the present disclosure, wherein a clamping member is in a neutral position.

FIG6B shows a partial enlarged view of a robot arm according to an embodiment of the present disclosure, wherein a clamping member rotates in a clockwise direction.

FIG6C is a partial enlarged view of a robot arm according to an embodiment of the present disclosure, in which the first positioning plate of a clamping member is separated from the second positioning plate.

FIG7 shows a schematic diagram of a detection device of the present disclosure having a robotic arm of the above-mentioned embodiment.

FIG8 is a schematic diagram showing the detection device of the above-mentioned embodiment of the present disclosure during the detection process.

For ease of description, spatially relative terms (such as "below", "below", "down", "above", "upper", "above" and the like) are used herein to describe the relationship between one element or component and another (some) element or component, as shown in the figure. In addition to the orientation depicted in the figure, spatially relative terms are also intended to cover different orientations of the device during use or operation. In addition, relative direction terms such as "X-axis", "Y-axis" and "Z-axis" are also used herein to describe the relationship between one element or component and another (some) element or component. It should be understood that these terms are intended to be illustrative rather than limiting. Elements or components can be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein can also be interpreted accordingly.

Those with ordinary knowledge in the art to which this disclosure belongs should understand that in order to simply and clearly illustrate the elements in the figures, the figures of this disclosure may not necessarily draw the elements in the figures according to the actual scale. For example, the size of some elements in the figures may be exaggerated relative to other elements to help understand various aspects of this technology.

As used herein, the terms "substantially", "substantial", "substantial" and "substantially" are used to describe and take into account minor variations. When used in conjunction with an event or circumstance, these terms may refer to both situations where the event or circumstance definitely occurred and situations where the event or circumstance closely approximates to occurring.

FIG1 is a schematic diagram of a robot arm according to an embodiment of the present disclosure. The robot arm 1 includes a positioning adjustment assembly 10, which includes at least one slide rail assembly 11, and the positioning adjustment assembly 10 is connected to a positioning adjustment base 13. In some embodiments of the present disclosure, the slide rail assembly 11 may include a first slide rail assembly 11a, a second slide rail assembly 11b, and a third slide rail assembly 11c. In some embodiments of the present disclosure, the first handwheel assembly 12a can cooperate with the first slide rail assembly 11a, so that the cantilever 14 can move along the X-axis direction; the second handwheel assembly 12b can cooperate with the second slide rail assembly 11b, so that the cantilever 14 can move along the Y-axis direction; and the third handwheel assembly 12c can cooperate with the third slide rail assembly 11c, so that the cantilever 14 can move along the Z-axis direction.

In some embodiments, the position of the handwheel assembly 12 can be configured differently according to the user's preference. For example, the third handwheel assembly 12c shown in FIG. 1 is disposed on the left side of the positioning adjustment assembly 10, but the third handwheel assembly 12c can be disposed on the right side of the positioning adjustment assembly 10 according to the user's needs (for example, the user's dominant hand is different). In addition, the handwheel portion of the handwheel assembly 12 (for example, the handwheel portion 121a of the first handwheel assembly 12a shown in FIG. 2A) can be provided with grooves or scales (not shown) to facilitate the user to perform a rotation operation.

One end of the cantilever member 14 is connected to the positioning and adjusting assembly 10 through the cantilever connecting plate 141. As shown in FIG1 , the cantilever connecting plate 141 is provided with a plurality of holes, and the cantilever connecting plate 141 can be fixed to the positioning and adjusting assembly 10 using screws or other locking methods. In this way, the cantilever member 14 can be detachably arranged on one side of the positioning and adjusting assembly 10 through the cantilever connecting plate 141, and allows the user to quickly replace the cantilever member 14 of the robot arm 1 according to actual use requirements. In some embodiments, the cantilever member 14 can also be formed integrally with the cantilever connecting plate 141. In other embodiments, a plurality of cantilever members 14 may be disposed on the surface of the cantilever connecting plate 141. The cantilever members 14 may be disposed at different positions and have the same or different lengths. Thus, the plurality of cantilever members 14 may be respectively equipped with one or more clamping members 16.

A groove 142 is provided in the cantilever member 14, and a connector 15 can be accommodated inside the groove 142. One end of the connector 15 is pivoted inside the groove 142, and the other end is configured to be connected to the clamping member 16. In addition, the clamping member 16 is provided with a hole H, which can accommodate a probe holder 2 or other components, and the probe holder 2 can be used to hold various tools such as the probe 3 (refer to Figure 7). In some embodiments, a magnetic material or a contoured limiting material can be provided on a specific area of the inner diameter surface of the hole H to make the component accommodated in the hole H more stable. In this way, the user can adjust the position of the probe 3 by operating the robot arm 1, so as to detect the physical characteristics of the object to be tested (such as a micro-nano component). The projection area of the holder 2 may be within the cantilever 14, and in other embodiments, the number of the clamping members 16 may be plural and located outside the projection area of the cantilever 14. The clamping members 16 are used to detain at least one probe 3, a probe array, at least one probe card or a combination thereof.

The following describes how the robot arm 1 disclosed herein can move the cantilever 14 along the X-axis, Y-axis and Z-axis directions through the cooperation between each hand wheel assembly 12 and the corresponding slide rail assembly 11.

Please refer to FIG. 2A, which shows a three-dimensional exploded schematic diagram of a robot arm according to an embodiment of the present disclosure. The first slide rail connecting plate 111a of the first slide rail assembly 11a is connected to the second slide rail assembly 11b through the second slide rail connecting plate 111b, and the first slide rail base 112a is further locked on the first slide rail connecting plate 111a, so that the first slide rail base 112a is connected to the second slide rail assembly 11b, the third slide rail assembly 11c and the positioning adjustment base 13. A first hand wheel connecting frame 1121a may be provided on the first slide rail base 112a, and a first guide member 1122a is provided in the first hand wheel connecting frame 1121a. The first handwheel connecting frame 1121a can be fixed to the first slide rail base 112a by locking or the like, or can be formed integrally with the first slide rail base 112a. In this way, the screw 122a of the first handwheel assembly 12a can be connected to the first handwheel connecting frame 1121a by passing through the through hole of the first guide member 1122a, and can move relative to the first handwheel connecting frame 1121a by rotational locking.

Specifically, the screw 122a of the first handwheel assembly 12a is engraved with an external thread (not shown), and the through hole in the first guide 1122a is provided with an internal thread (not shown) corresponding to the external thread of the screw 122a. Therefore, when the user rotates the handwheel portion 121a of the first handwheel assembly 12a, the screw 122a rotates accordingly, so that the external thread on the screw 122a and the internal thread of the through hole in the first guide 1122a are locked with each other. In this way, the first handwheel assembly 12a can be locked by rotation so that it can move relative to the first handwheel connecting frame 1121a of the first slide rail assembly 11a.

In some embodiments, the first slide rail assembly 11a may not include the first hand wheel connecting frame 1121a, and the first guide member 1122a may be directly disposed on the surface of the first slide rail assembly 11a. In this way, the first hand wheel assembly 12a can be directly rotated and locked into the through hole of the first guide member 1122a disposed on the surface of the first slide rail assembly 11a.

The first slide rail assembly 11a further includes at least one displacement adjustment assembly 113a (two are shown in the figure) and a first slide rail top cover 114a. Each displacement adjustment assembly 113a includes a first locking member 1131a connected to the first slide rail base 112a, a second locking member 1132a connected to the first slide rail top cover 114a, and a first elastic member 1133a disposed between the first locking member 1131a and the second locking member 1132a. One end of the first elastic member 1133a is sleeved on the first locking member 1131a and thereby fixed to the first slide rail base 112a; and the other end of the first elastic member 1133a is sleeved on the second locking member 1132a and thereby fixed to the first slide rail top cover 114a. The slide rail 1123a on the first slide rail base 112a has an outer profile corresponding to the slide groove 1141a in the first slide rail top cover 114a, so that the slide rail 1123a can slide inside the slide groove 1141a. In this way, the first slide rail top cover 114a can move relative to the first slide rail base 112a.

Please refer to FIG. 1 and FIG. 2A to FIG. 2D at the same time, which show the cooperation between the first slide rail assembly 11a and the first hand wheel assembly 12a, wherein the first slide rail cover 114a shown in FIG. 2B is in a neutral position. The first hand wheel assembly 12a is connected to the first slide rail assembly 11a through the through holes in the first hand wheel connecting frame 1121a and the first guide 1122a, and the screw 122a of the first hand wheel assembly 12a abuts against the surface of the first slide rail cover 114a. In some embodiments of the present disclosure, the screw 122a abuts against the surface of the slide groove 1141a. When the user rotates the hand wheel portion 121a of the first hand wheel assembly 12a, the screw 122a rotates and moves downward. At this time, one end of the first elastic element 1133a is fixed to the first rail base 112a and the first rail connecting plate 111a through the first locking piece 1131a and is integrally connected to the second rail assembly 11b, while the other end is fixed to the second rail assembly 11b through the second locking piece 1132a. Fixed on the first slide rail top cover 114a, therefore, when the screw 122a rotates, one end of the first elastic element 1133a fixed on the first slide rail base 112a remains stationary, while the other end fixed on the first slide rail top cover 114a moves with the compression and stretching of the first elastic element 1133a, thereby driving the first slide rail top cover 114a to move relative to the first slide rail base 112a.

In detail, as shown in FIG2C , when the user rotates the hand wheel portion 121a clockwise, the screw rod 122a will rotate clockwise accordingly and press the first rail top cover 114a downward along the X-axis direction. In this way, the first elastic element 1133a will be compressed and deformed, so that the first rail top cover 114a moves downward relative to the first rail base 112a. Conversely, as shown in FIG2D , when the user rotates the hand wheel portion 121a counterclockwise, the screw rod 122a will rotate counterclockwise accordingly and move upward. At this time, the first elastic element 1133a pushes the first slide rail top cover 114a due to the restoring force (elastic force) generated by the deformation, so that it continues to abut against the screw rod 122a, thereby driving the first slide rail top cover 114a to move upward relative to the first slide rail base 112a.

As shown in Figures 2A to 2D, the cantilever member 14 is fixed to the cantilever fixing plate 1142a through the cantilever connecting plate 141, and thereby connected to the first slide rail top cover 114a of the first slide rail assembly 11a. Therefore, when the first slide rail top cover 114a moves up or down with the first hand wheel assembly 12a, the cantilever member 14 of the robot arm 1 will be displaced accordingly, thereby realizing the coordinate adjustment of the cantilever member 14 along the X-axis direction.

As mentioned above, the displacement of the first slideway top cover 114a can be adjusted by rotating the first hand wheel assembly 12a, and the maximum displacement that can be adjusted by the first hand wheel assembly 12a depends on the length of the screw rod 122a. Specifically, when the end of the screw rod 122a moves upward to be completely embedded in the through hole of the first guide member 1122a, such as when the end of the screw rod 122a is flush with the bottom surface of the guide member, it is impossible to continue to rotate the first hand wheel assembly 12a to move the first slideway top cover 114a upward. Similarly, when the bottom surface of the hand wheel portion 121a contacts the top surface of the first hand wheel connecting frame 1121a, the first rail top cover 114a cannot be moved downward by rotating the first hand wheel assembly 12a. However, at this time, the first elastic element 1133a can still be further compressed by applying an external force, thereby driving the first rail top cover 114a and the cantilever member 14 to continue to move downward. In a preferred embodiment, by rotating the first hand wheel assembly 12a, the first slide rail top cover 114a can be moved about ±10mm along the X-axis from the neutral position (as shown in FIG. 2B); in other words, the first slide rail top cover 114a can be moved up or down from the neutral position by about 10mm.

In some embodiments, the robot arm 1 may not include any of the cantilever connecting plate 141 or the cantilever fixing plate 1142a. In other words, one end of the cantilever member 14 may be directly connected to the first slide rail top cover 114a, or may be formed integrally with the first slide rail top cover 114a, thereby achieving connection with the positioning adjustment assembly 10.

Please refer to FIG. 3A, which is a second three-dimensional exploded schematic diagram of a robot arm according to an embodiment of the present disclosure. The second rail connecting plate 111b of the second rail assembly 11b is connected to the first rail assembly 11a through the first rail connecting plate 111a. The second rail top cover of the second rail assembly 11b is locked to the bottom surface of the second rail connecting plate 111b, and the second rail base 112b is locked to the third rail top cover 114c of the third rail assembly 11c. In this way, while the second rail assembly 11b is connected to the first rail assembly 11a, its bottom surface is also connected to the whole formed by the third rail assembly 11c and the positioning adjustment base 13.

Similar to the first rail base 112a, the second rail base 112b may be provided with a second hand wheel connecting frame 1121b, and the second hand wheel connecting frame 1121b may be provided with a second guide member 1122b. The second hand wheel connecting frame 1121b may be fixed to the second rail base 112b by locking or the like, or may be formed integrally with the second rail base 112b. Thus, the second hand wheel assembly 12b may pass through the through hole of the second guide member 1122b to be connected to the second hand wheel connecting frame 1121b, and may be rotated and locked to move relative to the second hand wheel connecting frame 1121b. In addition, the second rail assembly 11b also includes at least one displacement adjustment assembly 113b. Each displacement adjustment assembly 113b includes a third locking piece 1131b connected to the second rail base 112b, a fourth locking piece 1132b connected to the second rail top cover 114b, and a second elastic element 1133b. One end of the second elastic element 1133b is sleeved on the third locking piece 1131b and thereby fixed to the second rail base 112b; and the other end of the second elastic element 1133b is sleeved on the fourth locking piece 1132b and thereby fixed to the second rail top cover 114b. Similarly, the rail 1123b on the second rail base 112b has an outer profile corresponding to the slide groove 1141b in the second rail top cover 114b, so that the rail 1123b can slide inside the slide groove 1141b. In this way, the second rail top cover 114b can move relative to the second rail base 112b.

In some embodiments, the second slide rail assembly 11b may not include the second hand wheel connecting frame 1121b, but the second guide member 1122b may be directly disposed on the surface of the second slide rail assembly 11b. In this way, the second hand wheel assembly 12b can be directly rotated and locked into the through hole of the second guide member 1122b disposed on the surface of the second slide rail assembly 11b.

FIG. 3B to FIG. 3D illustrate the cooperative actuation between the second rail assembly 11b and the second hand wheel assembly 12b, wherein the second rail cover 114b shown in FIG. 3B is in a second neutral position. The second hand wheel assembly 12b is connected to the second rail assembly 11b through the through holes in the second hand wheel connecting frame 1121b and the second guide 1122b, and the screw 122b of the second hand wheel assembly 12b abuts against the surface of the second rail cover 114b. In some embodiments of the present disclosure, the screw 122b abuts against the surface of the slide groove 1141b. When the user rotates the hand wheel portion 121b of the second hand wheel assembly 12b, the screw 122b rotates and moves to the right. At this time, one end of the second elastic element 1133b is fixed to the second rail base 112b and the third rail top cover 114c through the third locking piece 1131b, and is connected to the whole formed by the third rail assembly 11c and the positioning adjustment base 13, while the other end is fixed to the second rail base 112b and the third rail top cover 114c through the fourth locking piece 1132b. It is fixed on the second rail top cover 114b and the second rail connecting plate 111b. Therefore, when the screw 122b rotates, one end of the second elastic element 1133b fixed on the second rail base 112b remains stationary, while the other end fixed on the second rail top cover 114b moves with the compression and stretching of the second elastic element 1133b, thereby driving the second rail top cover 114b to move relative to the second rail base 112b.

Specifically, as shown in FIG3C , when the user rotates the hand wheel 121b clockwise, the screw 122b will rotate clockwise and push the second rail cover 114b to the right along the Y-axis direction. In this way, the second elastic element 1133b will be compressed and deformed, so that the second rail cover 114b moves to the right relative to the second rail base 112b. Conversely, as shown in FIG3D , when the user rotates the hand wheel 121b counterclockwise, the screw 122b will rotate counterclockwise and move to the left. At this time, the second elastic element 1133b will push the second slide rail top cover 114b through the restoring force (elastic force) generated by the deformation, so that it continues to abut against the screw rod 122b, thereby driving the second slide rail top cover 114b to move leftward relative to the second slide rail base 112b.

As shown in FIG. 3A to FIG. 3D , the second slide rail assembly 11b is connected to the first slide rail connecting plate 111a of the first slide rail assembly 11a through the second slide rail connecting plate 111b, and thereby connected to the first slide rail assembly 11a and the cantilever 14 as a whole. Therefore, when the second slide rail top cover 114b moves to the right or left along with the second hand wheel assembly 12b, the first slide rail assembly 11a and the cantilever 14 of the robot arm 1 will be displaced accordingly, thereby achieving the coordinate adjustment of the cantilever 14 along the Y-axis direction. In addition, similar to the first hand wheel assembly 12a, the maximum displacement that can be adjusted through the second hand wheel assembly 12b depends on the length of the screw 122b. In a preferred embodiment, by rotating the second hand wheel assembly 12b, the second slide rail top cover 114b can be moved about ±10mm along the Y axis from the neutral position (as shown in FIG. 3B); in other words, the second slide rail top cover 114b can be displaced about 10mm to the right or left from the neutral position.

Please refer to FIG. 4A, which is a three-dimensional exploded schematic diagram of the robot arm according to the embodiment of the present disclosure. The third rail top cover 114c of the third rail assembly 11c is connected to the second rail assembly 11b through the second rail base 112b. The third rail base 112c of the third rail assembly 11c is locked to the top surface of the third rail connecting plate 111c, and the third rail connecting plate 111c is locked to the positioning adjustment base 13. In this way, the third rail assembly 11c is connected to the second rail assembly 11b and is also connected to the positioning adjustment base 13 through the third rail connecting plate 111c. In some embodiments, the third slide rail assembly 11c may not include the third slide rail connecting plate 111c, but may be directly connected to the positioning adjustment base 13 through the third slide rail base 112c.

Similar to the first slide rail assembly 11a and the second slide rail assembly 11b, a third hand wheel connecting frame 1121c can be provided on the third slide rail base 112c of the third slide rail assembly 11c, and a third guide 1122c is provided in the third hand wheel connecting frame 1121c. The third hand wheel connecting frame 1121c can be fixed on the third slide rail base 112c by locking or the like, or can be formed integrally with the third slide rail base 112c. Thus, the third hand wheel assembly 12c can pass through the through hole of the third guide 1122c to connect to the third hand wheel connecting frame 1121c, and can move relative to the third hand wheel connecting frame 1121c by rotational locking. In addition, the third slide rail assembly 11c also includes at least one set of displacement adjustment components 113c. Each displacement adjustment assembly 113c includes a fifth locking member 1131c connected to the third rail base 112c, a sixth locking member 1132c connected to the third rail top cover 114c, and a third elastic member 1133c. One end of the third elastic member 1133c is sleeved on the fifth locking member 1131c and thereby fixed to the third rail base 112c; and the other end of the third elastic member 1133c is sleeved on the sixth locking member 1132c and thereby fixed to the third rail top cover 114c. Similarly, the rail 1123c on the rail base 112c has an outer profile corresponding to the slide groove 1141c in the rail top cover 114c, so that the rail 1123c can slide inside the slide groove 1141c. In this way, the rail top cover 114c can move relative to the rail base 112c.

In some embodiments, the third rail assembly 11c may not include the third hand wheel connecting frame 1121c, but directly set the third guide member 1122c on the surface of the third rail assembly 11c. In this way, the third hand wheel assembly 12c can be directly rotated and locked into the through hole of the third guide member 1122c set on the surface of the third rail assembly 11c.

FIG. 4B to FIG. 4D illustrate the cooperative actuation between the third rail assembly 11c and the third hand wheel assembly 12c, wherein the third rail cover 114c shown in FIG. 4B is in a neutral position. The third hand wheel assembly 12c is connected to the third rail assembly 11c through the third hand wheel connecting frame 1121c and the through hole in the third guide 1122c, and the screw 122c of the third hand wheel assembly 12c abuts against the surface of the rail cover 114c. In some embodiments of the present disclosure, the screw 122c abuts against the surface of the slide groove 1141c. When the user rotates the hand wheel portion 121c of the third hand wheel assembly 12c, the screw rod 122c rotates and moves to the right; at this time, one end of the third elastic element 1133c is fixed to the third slide rail base 112c and the third slide rail connecting plate 111c through the fifth locking piece 1131c, and is integrally connected to the positioning adjustment base 13, while the other end is fixed to the third slide rail base 112c through the sixth locking piece 1132c. Therefore, when the screw 122c rotates, one end of the third elastic element 1133c fixed on the third slide rail base 112c remains stationary, while the other end fixed on the third slide rail top cover 114c moves with the compression and stretching of the third elastic element 1133c, thereby driving the third slide rail top cover 114c to move relative to the third slide rail base 112c.

In detail, as shown in FIG4C , when the user rotates the hand wheel portion 121c clockwise, the screw rod 122c will rotate clockwise accordingly and push the third rail top cover 114c to the right along the Z-axis direction. In this way, the third elastic element 1133c will be compressed and deformed, so that the third rail top cover 114c moves to the right relative to the third rail base 112c. On the contrary, as shown in FIG3D , when the user rotates the hand wheel portion 121c counterclockwise, the screw rod 122c will rotate counterclockwise accordingly and move to the left. At this time, the third elastic element 1133c will push the third slide rail top cover 114c through the restoring force (elastic force) generated by the deformation, so that it continues to abut against the screw rod 122c, thereby driving the third slide rail top cover 114c to move leftward relative to the third slide rail base 112c.

As shown in FIG. 4A to FIG. 4D , the third rail assembly 11c is connected to the second rail base 112b of the second rail assembly 11b through the third rail top cover 114c, and is thereby connected to the second rail assembly 11b, the first rail assembly 11a and the cantilever 14 (not shown). Therefore, when the third rail top cover 114c moves to the right or left along with the third hand wheel assembly 12c, the cantilever 14 of the robot arm 1 will be displaced accordingly, thereby achieving the coordinate adjustment of the cantilever 14 along the Z-axis direction. In addition, similar to the first handwheel assembly 12a and the second handwheel assembly 12b, the maximum displacement that can be adjusted by the third handwheel assembly 12c depends on the length of the screw 122c. In a preferred embodiment, by rotating the third handwheel assembly 12c, the third slide rail top cover 114c can be moved about ±10mm along the Z axis from the neutral position (as shown in FIG. 4B); in other words, the third slide rail top cover 114c can be displaced about 10mm to the right or left from the neutral position.

The following describes how the robot arm 1 disclosed herein realizes the rotation of the connecting member 15 in the XZ plane by adjusting the height adjustment knob 143, thereby adjusting the coordinate adjustment of the tip 16 of the probe 3 (refer to FIG. 7 ) in the X-axis direction.

Please refer to Figure 1 and Figures 5A to 5B. Figure 5A shows the connecting member 15 accommodated in the groove 142 of the cantilever member 14, while Figure 5B shows the connecting member 15 rotating counterclockwise with its first end 151 as the axis. As best seen in Figure 5A, the cantilever member 14 is provided with a groove 142, and the interior of the groove 142 can accommodate the connecting member 15, wherein the first end 151 of the connecting member 15 is positioned inside the groove 142 and is mutually coupled with the cantilever member 14 through the bolt and nut.

The robot arm 1 further includes a clamping member 16, the first end 161 of the clamping member 16 has an external contour feature that complements the second end 152 of the connector 15, and is connected to the second end 152 of the connector 15 by locking or the like. In addition, as shown in FIG1 , the clamping member 16 has a hole H, which can accommodate the probe holder 2 of the detection device D, and the probe holder 2 can be further used to hold various detection tools such as the probe 3 (see FIG7 ). Therefore, the user can adjust the position of the probe 3 by operating the clamping member 16 of the robot arm 1, thereby detecting the physical characteristics of the object to be detected (such as a micro-nano component).

As shown in FIGS. 5A and 5B , the cantilever member 14 further includes a height adjustment knob 143, which is disposed adjacent to the second end 152 of the connecting member 15. The structure of the height adjustment knob 143 is similar to that of the hand wheel assembly 12, and may include a knob portion 1431 and a screw rod 1432 having an external thread (not shown). In addition, the outer surface of the knob portion 1431 may be provided with a groove (not shown) to facilitate the user to perform a rotation operation. The cantilever member 14 is provided with a through hole (not shown) at a position corresponding to the screw 1432. The through hole has an internal thread corresponding to the external thread shape of the screw 1432, so that the height adjustment knob 143 can be connected to the cantilever member 14 through the screw 1432 and can be rotated to lock with the cantilever member 14.

The robot arm 1 further includes an elastic element 17, whose two ends are respectively fixed to the suspension member 14 and the clamping member 16. Specifically, the suspension member 14 can be provided with a first anchor 144 on the top surface of one end close to the clamping member 16, and the clamping member 16 can be provided with a second anchor 162 on the top surface away from the suspension member 14. The two ends of the elastic element 17 can be respectively fixed to the first anchor 144 of the suspension member 14 and the second anchor 162 of the clamping member 16. In addition, the distance between the first anchor 144 and the second anchor 162 can be adjusted according to design requirements. For example, in order to match the elastic coefficient of the elastic element 17, a protrusion 163 can be designed on the clamping member 16, and the second anchor 162 can be set on the top surface of the protrusion 163, thereby shortening the distance between the first anchor 144 and the second anchor 162.

In the configuration of the above embodiment, the height adjustment knob 143 is disposed adjacent to the second end 152 of the connecting member 15, and the first end 151 opposite thereto is pivotally connected to the cantilever member 14, so when the user rotates the knob portion 1431 of the height adjustment knob 143 in a clockwise direction, the screw rod 1432 is driven to rotate in a clockwise direction and move downward, and the end of the screw rod 1432 is pressed against and pushes the connecting member 15. At this time, since the first end 151 of the connecting member is pivoted to the cantilever member 14, it cannot move in the X-axis and Y-axis directions. Therefore, when the screw 1432 pushes the connecting member 15 downward, the connecting member 15 will rotate on the XY plane with its first end 151 as the axis (to be precise, with the position where the connecting member 15 is pivoted to the cantilever member 14 as the axis).

When the user rotates the knob 1431 clockwise, the screw 1432 will continue to press downward against the connector 15, and the second end 152 of the connector 15 will rotate downward. At this time, the elastic element 17 will be stretched and deformed, thereby providing a restoring force (elastic force) between the cantilever 14 and the clamping member 16. When the user rotates the knob 1431 of the height adjustment knob 143 counterclockwise, the screw 1432 will move upward, and at this time, the elastic element 17 will force the clamping member 16 to return to the initial position by the restoring force (elastic force) generated by the deformation (as shown in Figure 5A).

As shown in FIG. 5B , by turning the height adjustment knob 143 , the connector 15 can be rotated on the XY plane with its first end 151 as the axis, thereby adjusting the angle φ between the connector 15 and the Y axis. The range of the angle φ that can be adjusted by turning the height adjustment knob 143 depends on the length of the screw 1432 . In a preferred embodiment, the angle φ can be between about 0 and 10 degrees.

The second end 152 of the connecting member 15 actually rotates in the XY plane. Since the first end 161 of the clamping member 16 is connected to the second end 152 of the connecting member 15, when the second end 152 of the connecting member 15 rotates downward, the clamping member 16 is driven to rotate together. However, when the clamping member 16 clamps the probe holder 2 and further fixes the probe 3 (refer to FIG. 7 ), the slight displacement of the probe tip 3 in the Y-axis direction caused by the rotation of the clamping member 16 can be ignored. Therefore, when the probe 3 is mounted on the probe holder 2 and the probe holder 2 is clamped in the clamp 16, rotating the height adjustment knob 143 can be regarded as precisely fine-tuning the coordinate position of the probe tip 3 on the X-axis by adjusting the angle φ between the connector 15 and the Y-axis.

Through the configuration of the above embodiment, the connector 15 can be rotated on the XY plane with its first end 151 by operating the height adjustment knob 143, thereby adjusting the displacement of the clamping member 16 in the X-axis direction. In this way, the fine adjustment of the probe tip coordinates of the probe 3 can be achieved, and the flexibility of the detection device D in operation and the accuracy of measurement can be improved. In addition, the elastic element 17 can provide a buffering and shock-absorbing effect when the probe 3 contacts the object to be tested, enhance the stability of the probe 3, and further improve the accuracy of the detection device D during detection.

The following describes how the robot arm disclosed herein adjusts the position of the probe 3 on the YZ plane by adjusting the angle between the clamping member 16 and the connecting member 15.

Please refer to Figures 5A to 6B, Figure 6A shows the clamping member 16 in a neutral position, while Figure 6B shows the clamping member 16 rotating in a clockwise direction on the YZ plane. The first end 161 of the clamping member 16 is pivoted with the second end 152 of the connecting member 15 by means of a bolt and a nut, so that the clamping member 16 can rotate relative to the second end 152 of the connecting member 15. When the user rotates the clamping member 16 (as shown in Figure 6B), the angle θ between the central axis CA of the hole H of the clamping member 16 and the connecting member 15 can be adjusted. The angle θ between the central axis CA and the connecting member 15 can be between about 0 degrees and ±30 degrees, and in a preferred embodiment, the angle θ can be between about 0 degrees and ±70 degrees. In other words, the clamping member 16 can rotate to the left and right sides relative to the second end 152 of the connecting member 15, so that the angle θ between the central axis CA and the connecting member 15 is about 0 degrees to 70 degrees.

Since the probe 3 can be mounted on the robot arm 1 through the probe holder 2 and the clamp 16, the coordinates of the probe 3 on the YZ plane can be adjusted by rotating the clamp 16 through the configuration of the above embodiment, thereby improving the flexibility of the detection device D during the detection process.

Please refer to FIG. 6A and FIG. 6C. FIG. 6C shows the first positioning plate 164 and the second positioning plate 165 in a separated state. The clamping member 16 may include the first positioning plate 164 and the second positioning plate 165, and in the embodiment shown in the figure, the first positioning plate 164 and the second positioning plate 165 are respectively located at the upper and lower sides.

The hole H of the clamping member 16 can be formed between the first positioning plate 164 and the second positioning plate 165. Specifically, the first positioning plate 164 and the second positioning plate 165 can respectively have half holes corresponding to each other and roughly presenting an arch shape, and the shapes of these half holes respectively correspond to the upper half contour and the lower half contour of the probe holder 2. When the first positioning plate 164 and the second positioning plate 165 are close to each other, the two arched half holes will form a complete hole H that can accommodate the probe holder 2.

One or more distance adjustment members 166 may be further disposed between the first positioning plate 164 and the second positioning plate 165. These distance adjustment members 166 are used to adjust the distance between the first positioning plate 164 and the second positioning plate 165, thereby further adjusting the size of the hole H. As shown in FIGS. 6A to 6C, in some embodiments, the distance adjustment member 166 may be formed by the mutual cooperation of a bolt and a nut. When the probe holder 2 is installed in the hole H, the user may rotate the distance adjustment member 166 to adjust the distance between the first positioning plate 164 and the second positioning plate 165, thereby locking or loosening the clamping of the probe holder 2.

In other embodiments, the distance adjustment member 166 may be composed of other elements, such as elastic elements. In this case, when the user pulls the second positioning plate 165 to separate it from the first positioning plate 164, the distance adjustment member 166 will deform and provide a restoring force (elastic force) between the first positioning plate 164 and the second positioning plate 165, thereby pulling the second positioning plate 165 back to the initial position (as shown in FIG. 6A). In this way, the probe holder 2 can be stably clamped in the hole H.

In addition, it should be understood that when the outer contour size of the probe holder 2 is exactly equal to or smaller than the size of the hole H, the clamping member 16 can clamp the probe holder 2 therein when the first positioning plate 164 and the second positioning plate 165 are in contact with each other; and when the outer contour size of the probe holder 2 is larger than the size of the hole H, the clamping member 16 can clamp the probe holder 2 therein when the first positioning plate 164 and the second positioning plate 165 are not in contact with each other, and at this time, at least a portion of the outer contour of the probe holder 2 will fit the peripheral wall of the hole H.

Through the configuration of the above embodiment, probe holders 2 of different sizes can be replaced according to the user's operating requirements, and the probe holder 2 can be stably clamped in the clamping member 16, thereby improving the stability of the detection device D during the detection process.

The above description describes the actuation of the robot arm 1 on the XY plane (as shown in Figures 5A to 5B) and the actuation of the robot arm 1 on the YZ plane (as shown in Figures 6A to 6C) respectively. However, it should be understood that the adjustments on these different coordinate planes can be performed simultaneously. For example, the clamping member 16 can be rotated clockwise relative to the connecting member 15 (as shown in Figure 6B) while the connecting member 15 is rotated downward with its first end 151 (as shown in Figure 5B).

Please refer to FIG. 7, which shows a detection device D equipped with the robot arm 1 disclosed herein. The detection device D can be used to detect the physical characteristics of micro-nano components, and includes the robot arm 1, the probe holder 2, and the probe 3. The structure of the robot arm 1 and the connection relationship between its components have been described in detail in the previous text, and will not be repeated here.

The probe holder 2 of the detection device D can be accommodated in the hole H of the clamping member 16 of the robot arm 1, and one end of the probe holder 2 can be used to engage the probe 3, so as to hold the probe 3 therein. In other embodiments, the probe holder 2 can be used to clamp other components such as optical path correction accessories, semiconductor detection consumables, integrated circuit detection consumables, rigid wires, cables or electrodes. In practical applications, the probe 3 can be a micro probe, a nano probe, an angstrom probe or other probes used to detect micro-nano components. In addition, the probe 3 can be a straight needle-shaped object, or it can be bent to have a bending section (as shown in FIG. 7 ). In some embodiments, at least one probe holder 2 can be arranged to be accommodated in the hole H of the clamping member 16 of the robot arm 1, and one end of the probe holder 2 can be used to engage a probe card on a carrier with multiple probes arranged at multiple intervals. In other embodiments, at least one probe 3 or probe card can be arranged in the clamping area of the hole H of the clamping member.

One end of the probe holder 2 is connected to the probe 3, and the other end thereof can be electrically connected to a cable (not shown), wherein the cable can be a conductive wire, a communication wire, a data transmission wire or other wire with similar functions. Therefore, during the detection process, electrical signals can be received and transmitted through the cable.

As shown in FIG7 , the robot arm 1 of the detection device D may further include a cable collection clamp 18, which is disposed on the positioning and adjustment assembly 10. In some embodiments, the cable collection clamp 18 may be disposed on the top of the positioning and adjustment assembly 10, i.e., on the second slide rail connecting plate 111b, and fixed by locking or the like. The cable collection clamp 18 is configured so that cables can be passed through it. In other embodiments, the cable collection clamp 18 may be disposed at any position of the robot arm 1, such as the middle section of the positioning and adjustment assembly 10 or the positioning and adjustment base 13, and may be designed to be integrally formed with the robot arm 1. Through the configuration of the above-mentioned embodiments, the cables (not shown) can be neatly stored in the cable collection clamp 18, thereby preventing them from interfering with the normal operation of the detection device D during the detection process.

Please refer to Figure 8, which shows the state of the detection device D during the detection process. In practical applications, the detection device D can be placed on the base surface BS (see Figure 8). The base surface BS can be a flat surface, a curved surface, an irregular non-flat surface, or a groove or protrusion structure relative to the surrounding environment. The base surface BS can be composed of a flexible material, an inflexible material or a combination thereof. On the other hand, the robot arm 1 can be set on the base surface BS by adjusting the positioning adjustment base 13. The bottom surface of the positioning adjustment base 13 can be a flat surface, a curved surface, an irregular non-flat bottom surface, or a surface that complements the shape characteristics of the base surface BS. In some embodiments, the positioning adjustment base 13 can be magnetic and can be adsorbed to the base surface BS, thereby improving the stability of the detection device D during the detection process.

The present disclosure also provides a method for detecting physical characteristics of micro-nano devices, which includes providing a detection device D having a robot arm 1 disposed on a substrate surface BS. The structure of the robot arm 1 and the detection device D and the connection relationship between their components have been described in detail in the previous text and will not be repeated here.

During the detection process, the detection device D is set on the substrate surface BS to detect the physical characteristics of the object to be tested 4. The object to be tested 4 can be a chip, a wafer, a transistor, an integrated circuit, or other micro-nano electronic components. During the detection process, one or more visible light and/or invisible light sources S and one or more signal transceivers can be provided to collect the physical characteristics of the object to be tested 4.

Specifically, when the probe 3 approaches or touches the surface of the object to be tested 4, the light source S can be operated to emit a light beam L, which irradiates the surface of the object to be tested 4 and generates a reflected light beam L'. At this time, the receiver R in the signal transceiver can be configured to receive the reflected light beam L', thereby obtaining an optical signal related to the object to be tested 4. Then, the receiver R can send the received optical signal to an electronic device (such as a mobile terminal, tablet computer, desktop computer or any other electronic device capable of performing data processing) through the transmitter of the signal transceiver for calculation processing, thereby obtaining information related to the physical characteristics of the object to be tested 4.

In addition, although in the embodiment shown in FIG. 8 , the object to be tested 4 and the detection device D are placed on the same plane, the object to be tested 4 and the detection device D may also be placed on two separate surfaces, and these different surfaces may be located at different heights or positions.

In some embodiments, the detection device D may be a non-destructive detection tool, including but not limited to the following equipment: Atomic Force Microscope (AFM), Transmission Electron Microscope (TEM), Focused Ion Beam Microscope (FIB), Scanning Probe Microscopy (SPM), Electrostatic Force Microscopy (EFM), Scanning Capacitance Microscopy (SCM), Scanning Ion Conductance Microscope (SICM).

The features of several embodiments have been summarized above so that those skilled in the art can better understand the state of the present disclosure. Those skilled in the art should understand that they can easily use the present disclosure as a basis for designing or modifying other processes and structures to implement the same purpose and/or achieve the same advantages of the embodiments introduced in this article. Those skilled in the art should also realize that such equivalent structures should not deviate from the spirit and scope of the present disclosure, and that they can make various changes, substitutions and modifications to this article.

1:Robotic arm

10: Positioning adjustment assembly

11: Slide rail assembly

11a: First slide rail assembly

11b: Second slide rail assembly

11c: Third slide rail assembly

12: Handwheel assembly

12a: First handwheel assembly

12b: Second hand wheel assembly

12c: Third handwheel assembly

13: Position and adjust the base

14: Cantilever parts

141: Cantilever connecting plate

142: Groove

143: Height adjustment knob

15: Connectors

16: Clamping piece

Claims (19)

A robot arm, suitable for clamping at least one probe, comprises: a positioning adjustment assembly, which is arranged on a positioning adjustment base, the positioning adjustment assembly comprises: a first slide rail assembly, which is arranged in the positioning adjustment assembly, the first slide rail assembly comprises: a first slide rail top cover, a slide groove of the first slide rail top cover can slideably accommodate a slide rail of a first slide rail base therein along a first direction; and a first elastic element, two ends of which are respectively fixed to the first slide rail bottom The first handwheel assembly comprises a screw rod that can contact the first slide rail cover; a cantilever member, one end of which is connected to the positioning adjustment assembly, and a groove that can accommodate a connecting member is arranged in the cantilever member; and a clamping member having at least one hole, a first end of which is configured to connect with the connecting member; wherein the first handwheel assembly cooperates with the first slide rail assembly to enable the cantilever member to move along the first direction. The robot arm as described in claim 1, wherein a first handwheel connecting frame is provided on the first slide rail base, a first guide member is provided in the first handwheel connecting frame, and the screw of the first handwheel assembly can be locked into a through hole of the first guide member. The robot arm as described in claim 1, wherein the positioning adjustment assembly further comprises: a second slide rail assembly, which comprises a second slide rail connecting plate connected to the first slide rail assembly; a second slide rail top cover, wherein a slide groove of the second slide rail top cover can slideably accommodate a slide rail of a second slide rail base therein along a second direction; and a second elastic element, whose two ends are respectively fixed to the second slide rail base and the second slide rail top cover; and the robot arm further comprises a second hand wheel assembly, which has a screw that can contact the second slide rail top cover, wherein the second direction is substantially perpendicular to the first direction. The robot arm as described in claim 3, wherein a second handwheel connecting frame is provided on the second slide rail base, a second guide member is provided in the second handwheel connecting frame, and the screw of the second handwheel assembly can be locked into a through hole of the second guide member. The robot arm as described in claim 3, wherein the positioning adjustment assembly further comprises: a third slide rail assembly, which comprises a third slide rail top cover connected to the second slide rail assembly, a slide groove of the third slide rail top cover is slidably accommodated in a slide rail of a third slide rail base along a third direction, and the third slide rail base is arranged on one side of the positioning adjustment base; and a third elastic element, whose two ends are respectively fixed between the third slide rail base and the third slide rail top cover; and the robot arm further comprises a third hand wheel assembly, which has a screw that can contact the third slide rail top cover, wherein the third direction is substantially perpendicular to the first direction and the second direction. The robot arm as described in claim 5, wherein a third handwheel connecting frame is provided on the third slide rail base, a third guide is provided in the third handwheel connecting frame, and the screw of the third handwheel assembly can be locked into a through hole of the third guide. A robot arm as described in claim 1, wherein the first slide rail top cover can move ±10 mm along the first direction relative to the first slide rail base. The robot arm as described in claim 1, wherein the cantilever member further comprises a cantilever connecting plate, and the end of the cantilever member is fixed to the positioning adjustment assembly through the cantilever connecting plate. A robot arm as described in claim 3, wherein a first end of the connecting member is positioned inside the groove of the cantilever member and is pivotally connected to the cantilever member, whereby the connecting member can rotate relative to the cantilever member on a first plane formed by the first direction and the second direction with the first end as an axis. A robotic arm as described in claim 9, wherein the connecting member can rotate 10 degrees on the first plane. A robotic arm as described in claim 9, wherein the cantilever member further comprises a height adjustment knob disposed adjacent to a second end of the connecting member opposite to the first end. The robot arm as described in claim 11, wherein the robot arm further comprises an elastic element located between the cantilever member and the clamping member, and the two ends of the elastic element located between the cantilever member and the clamping member are respectively fixed on a first anchor member located on the cantilever member and a second anchor member located on the clamping member. A robot arm as described in claim 12, wherein the second anchor is disposed on a protrusion of the clamping member. As described in claim 5, the first end of the clamping member can be movably connected to a second end of the connecting member opposite to the first end, so that the clamping member can move relative to the second end of the connecting member on a second plane formed by the second direction and the third direction. A robotic arm as described in claim 14, wherein the clamping member can rotate ±70 degrees on the second plane. The robot arm as described in claim 1, wherein the hole of the clamping member is formed between a first positioning plate and a second positioning plate, and one or more distance adjustment members are provided between the first positioning plate and the second positioning plate. A robotic arm as described in claim 1, wherein the robotic arm further comprises a cable collection clip disposed on the positioning adjustment assembly. A robotic arm as described in claim 1, wherein the positioning adjustment base is magnetic. A detection device for detecting physical characteristics of micro-nano components, comprising: a robot arm as described in any one of claims 1 to 18; a probe holder accommodated between the holes of the clamp; at least one probe connected to one end of the probe holder.

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