TWM655923U - Vacuum drying equipment that adjusts the air guide direction - Google Patents

Abstract

A vacuum drying device for adjusting the air conduction direction comprises: a vacuum chamber, the vacuum chamber is provided with a containing groove, a plurality of exhaust ports and a lower side, the exhaust ports are arranged on the lower side of the vacuum chamber and connected to the containing groove; a glass substrate base, the glass substrate base is arranged in the containing groove of the vacuum chamber; a substrate film, the substrate film is arranged on the glass substrate base; an air conduction adjustment plate, the air conduction adjustment plate is provided with brackets on both sides, the air conduction adjustment plate is arranged on the glass substrate base through the brackets; a vacuum exhaust pump, the vacuum exhaust pump is connected to the exhaust ports of the vacuum chamber. By arranging the exhaust holes and the holes, the exhaust airflow is drawn from the substrate film toward the air conduction adjustment plate and then out to the exhaust ports around the air conduction adjustment plate, so that the invention can achieve the effect of uniform airflow distribution, thereby preventing the surface of the substrate film from being secondary contaminated by the solvent.

Description

Vacuum drying equipment with adjustable air conduction direction

This invention relates to a vacuum drying device, and in particular to a vacuum drying device capable of adjusting the air conduction direction.

Generally speaking, vacuum drying is a method of placing the object to be processed in a chamber and putting the object to be processed in a negative pressure state by vacuuming, so that the object to be processed solidifies and dries. Under negative pressure, the moisture contained in the object to be processed obtains sufficient kinetic energy to leave the surface of the object to be processed due to the increase in vacuum degree.

Please refer to FIG. 1, which is a cross-sectional schematic diagram of a conventional vacuum drying device, which is provided with a vacuum pump A1 and a vacuum chamber A2. A glass bottom plate A3 is provided in the vacuum chamber A2, and a glass substrate A31 is provided on the glass bottom plate A3. The glass substrate A31 contains a large amount of solvent. An exhaust port A21 is provided at one end of the vacuum chamber A2. The vacuum pump A1 is connected to the exhaust port A21 through a valve A11. The vacuum chamber A2 is provided with a vacuum gauge A22 to detect the vacuum level in the vacuum chamber A2.

Generally speaking, the exhaust port A21 is usually located at the central bottom of the vacuum chamber A2. When the vacuum pump A1 starts to evacuate, the valve A11 will open. At this time, the gas in the vacuum chamber A2 will move toward the exhaust port A21 along the periphery of the glass substrate A31, and the solvent in the glass substrate A31 will evaporate and move toward the exhaust port A21 together with the gas in the vacuum chamber A2 and be extracted and discharged through the vacuum pump A1.

However, the airflow and the solvent volatilization of the glass substrate A31 will flow along the surface of the glass substrate A31 toward the exhaust port A21, and the exhaust rate around the glass substrate A31 will be greater than the exhaust rate in the center, which will cause the solvent in the center of the glass substrate A31 to flow to the edge of the glass substrate, resulting in the problem of secondary solvent contamination.

Therefore, how to overcome the difficulties encountered in practical equipment integration and the problem of secondary solvent contamination on the surface of the glass substrate caused by uneven airflow generated by exhaust are the technical difficulties that the creators of this case want to solve.

In view of the problems of the prior art, the purpose of this invention is to improve the situation where the uneven airflow during exhaust leads to secondary solvent contamination on the surface of the substrate, and the problems faced by the prior art can be solved by this invention.

A vacuum drying device for adjusting the air conduction direction comprises: A vacuum chamber, the vacuum chamber is provided with a containing groove, a plurality of exhaust ports, an upper side and a lower side, the containing groove is arranged between the upper side and the lower side, and the exhaust ports are arranged at the lower side of the vacuum chamber and connected to the containing groove; A glass substrate base, the glass substrate base is arranged in the containing groove of the vacuum chamber and adjacent to the lower side; A substrate film, the substrate film is arranged on the glass substrate base; An air conduction adjustment plate, the air conduction adjustment plate is provided with brackets on both sides, and the air conduction adjustment plate is arranged on the glass substrate base through the brackets; A vacuum exhaust pump, the vacuum exhaust pump is connected to the exhaust ports of the vacuum chamber.

In one embodiment, the vacuum chamber has at least one edge, and the vacuum ports are disposed at the center of the lower side of the vacuum chamber or between the lower side of the vacuum chamber and the edge.

In one embodiment, a distance is provided between the glass substrate base and the lower side of the vacuum chamber.

In one embodiment, the substrate film may be a calcium-titanium solar cell glass substrate or a flat panel display glass substrate.

In one embodiment, a vacuum gauge is provided on one side of the vacuum chamber.

In one embodiment, the air conduction adjustment plate is provided with at least one air extraction hole and a plurality of holes.

In one embodiment, the holes include at least one large-diameter hole, at least one medium-diameter hole, and at least one small-diameter hole.

In one embodiment, a plurality of small-diameter holes are arranged around the exhaust holes, a plurality of medium-diameter holes are arranged around the small-diameter holes away from the exhaust holes, and a plurality of large-diameter holes are arranged around the medium-diameter holes away from the small-diameter holes.

In one embodiment, at least one vacuum valve is disposed between the vacuum pump and the vacuum ports of the vacuum chamber.

In the present invention, the air-conducting adjustment plate is provided with the exhaust holes, the large-diameter holes, the medium-diameter holes and the small-diameter holes, and the exhaust holes and the holes are arranged so that the exhaust airflow is exhausted from the substrate film toward the air-conducting adjustment plate, and then exhausted to the exhaust ports around the air-conducting adjustment plate, so that the present invention achieves the effect of uniform airflow distribution, thereby avoiding the secondary contamination of the surface of the substrate film by the solvent.

In order to make the above-mentioned purposes, features and advantages of the present invention more clearly understandable, the specific implementation of the present invention is described in detail below in conjunction with the attached figures. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited to the specific embodiments disclosed below.

It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the description of this creation are for illustrative purposes only and do not represent the only implementation method.

In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this work, the meaning of "multiple" and "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

In this work, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first feature is directly in contact with the second feature, or that the first feature and the second feature are indirectly in contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "above", "above" or "above" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

Unless otherwise defined, all technical and scientific terms used in the description of this invention have the same meaning as those commonly known to those skilled in the art to which this invention belongs. The terms used in the description of this invention are only for the purpose of describing specific implementations and are not intended to limit this invention. The term "and/or" used in the description of this invention includes any and all combinations of one or more of the related listed items.

Please refer to FIG. 2 , which is a cross-sectional diagram of a vacuum drying device for adjusting the air conduction direction of the present invention. The present invention is a vacuum drying device for adjusting the air conduction direction, which includes: a vacuum chamber 1, a glass substrate base 2, a substrate film 3, an air conduction adjustment plate 4 and a vacuum pump 5.

The vacuum chamber 1 is provided with a receiving groove 11, a plurality of exhaust ports 12, an upper side 13, a lower side 14 and at least one edge 15. In one embodiment, the exhaust ports 12 are provided at the lower side 14 of the vacuum chamber 1 and communicate with the receiving groove 11. Specifically, the vacuum chamber 1 is a closable space or container, the top of the vacuum chamber 1 is the upper side 13, and the The bottom of the vacuum chamber 1 is the lower side 14, and the vacuum chamber 1 is the accommodating groove 11 between the upper side 13 and the lower side 14. The accommodating groove 11 is limited by the equal edges 15 in the lateral expansion direction, wherein the exhaust port 12 is arranged at the center of the lower side 14 of the accommodating groove 11 or the exhaust port 12 is arranged between the lower side 14 of the accommodating groove 11 and the equal edges 15.

A vacuum gauge 6 is further provided on the upper side 13 of the vacuum chamber 1, so that the invention can evacuate the vacuum chamber 1 through the vacuum gauge 6, and the change of the air pressure in the vacuum chamber 1 can be known by observing the vacuum gauge 6.

The glass substrate base 2 is disposed in the accommodating groove 11 of the vacuum chamber 1. A distance is provided between the glass substrate base 2 and the lower side 14 of the vacuum chamber 1. The distance between the glass substrate base 2 and the lower side 14 prevents the glass substrate base 2 from obstructing or blocking the exhaust ports 12 provided on the lower side 14, thereby ensuring exhaust.

The substrate film 3 is disposed on the glass substrate base 2. The substrate film 3 can be a calcium-titanium solar cell glass substrate or a flat panel display glass substrate. The surface of the substrate film 3 has a solvent to be volatilized.

The air conduction adjustment plate 4 has brackets 41 on both sides. The air conduction adjustment plate 4 is disposed on the glass substrate base 2 through the brackets 41. The air conduction adjustment plate 4 has at least one exhaust hole 42 and a plurality of holes 43. The exhaust holes 42 are symmetrically or asymmetrically disposed on the inner edge of the air conduction adjustment plate 4. The distance between the air conduction adjustment plate 4 and the glass substrate base 2 is about 20 mm.

Please refer to Figure 3, which is a bird's-eye view of the air conduction adjustment plate 4 of the present invention. The holes 43 arranged around the exhaust holes 42 of the air conduction adjustment plate 4 are a plurality of small-diameter holes 431, a plurality of medium-diameter holes 432 are arranged around the small-diameter holes 431 on the sides away from the exhaust holes 42, and the holes 43 arranged around the medium-diameter holes 432 on the sides away from the small-diameter holes 431 are a plurality of large-diameter holes 433.

Among them, the area of the large-diameter holes 433 is larger than the area of the medium-diameter holes 432 and the area of the small-diameter holes 431, and the area of the medium-diameter holes 432 is larger than the area of the small-diameter holes 431. This is only an example and the present invention is not limited to this.

At least one vacuum valve 7 is provided between the vacuum pump 5 and the exhaust ports 12 of the vacuum chamber 1, wherein the exhaust ports 12 can be connected to the vacuum pump 5 through a vacuum valve 7 after converging, or the exhaust ports 12 can be respectively provided with a vacuum valve 7 and then connected to the vacuum pump 5. The vacuum pump 5 is connected to the exhaust ports 12 of the vacuum chamber 1 through the vacuum valve 7, so that the vacuum pump 5 exhausts the containing tank 11 of the vacuum chamber 1, so that the containing tank 11 of the vacuum chamber 1 gradually becomes evacuated, and the vacuum valve 7 is used to prevent the exhausted gas from entering the containing tank 11 of the vacuum chamber 1 due to the pressure difference.

In the present invention, the air-conducting adjustment plate 4 is provided with the exhaust holes 42, the large-diameter holes 433, the medium-diameter holes 432 and the small-diameter holes 431, and the exhaust holes 42 and the holes 43 are arranged so that the exhaust airflow is exhausted from the substrate film 3 toward the air-conducting adjustment plate 4, and is exhausted toward the exhaust holes 42 around the air-conducting adjustment plate 4, so that the present invention achieves the effect of uniform airflow distribution, thereby avoiding the secondary contamination of the surface of the substrate film 3 by the solvent.

A1: Vacuum pump

A11: Valve

A2: Vacuum chamber

A21: Air extraction port

A22: Vacuum gauge

A3: Glass bottom plate

A31: Glass substrate

1: Vacuum chamber

11: Receiving groove

12: Air outlet

13: Upper side

14: Lower side

15: Edge

2: Glass substrate base

3: Substrate film

4: Air guide adjustment plate

41: Bracket

42: Exhaust hole

43: Holes

431: Small aperture hole

432:Medium diameter hole

433: Large aperture hole

5: Vacuum pump

6: Vacuum gauge

7: Vacuum valve

FIG. 1 is a schematic cross-sectional view of a conventional vacuum drying apparatus.

FIG. 2 is a schematic cross-sectional view of the vacuum drying device for adjusting the air conduction direction of the present invention.

FIG. 3 is a bird's-eye view of the air guide adjustment plate of this invention.

1: Vacuum chamber

11: Storage tank

12: Exhaust port

13: Upper side

14: Lower side

15: Edge

2: Glass substrate base

3: Substrate film

4: Air guide adjustment plate

41: Bracket

5: Vacuum pump

6: Vacuum gauge

7: Vacuum valve

Claims (9)

A vacuum drying device for adjusting the air conduction direction comprises: a vacuum chamber, the vacuum chamber is provided with a containing groove, a plurality of exhaust ports, an upper side and a lower side, the containing groove is arranged between the upper side and the lower side, the exhaust ports are arranged at the lower side of the vacuum chamber and connected to the containing groove; a glass substrate base, the glass substrate base is arranged in the containing groove of the vacuum chamber and adjacent to the lower side; a substrate film, the substrate film is arranged on the glass substrate base; an air conduction adjustment plate, the air conduction adjustment plate is provided with brackets on both sides, the air conduction adjustment plate is arranged on the glass substrate base through the brackets; a vacuum exhaust pump, the vacuum exhaust pump is connected to the exhaust ports of the vacuum chamber. The vacuum drying device for adjusting the air conduction direction as described in claim 1, wherein the vacuum chamber is provided with at least one edge, and the exhaust ports are provided at the center of the lower side of the vacuum chamber or between the lower side of the vacuum chamber and the edge. The vacuum drying device for adjusting the air conduction direction as described in claim 1, wherein a distance is provided between the glass substrate base and the lower side of the vacuum chamber. The vacuum drying device for adjusting the air conduction direction as described in claim 1, wherein the substrate film can be a calcium-titanium solar cell glass substrate or a flat panel display glass substrate. A vacuum drying device for adjusting the air conduction direction as described in claim 1, wherein a vacuum gauge is provided on one side of the vacuum chamber. The vacuum drying device for adjusting the air conduction direction as described in claim 1, wherein the air conduction adjustment plate is provided with at least one air extraction hole and a plurality of holes. A vacuum drying device for adjusting the air conduction direction as described in claim 6, wherein the holes have at least one large-diameter hole, at least one medium-diameter hole, and at least one small-diameter hole. The vacuum drying device for adjusting the air conduction direction as described in claim 7, wherein the small-diameter holes are arranged around the exhaust holes, the medium-diameter holes are arranged around the small-diameter holes away from the exhaust holes, and the large-diameter holes are arranged around the medium-diameter holes away from the small-diameter holes. The vacuum drying device for adjusting the air conduction direction as described in claim 1, wherein at least one vacuum valve is provided between the vacuum pump and the vacuum ports of the vacuum chamber.

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