TWM652546U - Optical sensing system and optical sensing module thereof - Google Patents

Abstract

An optical sensing module includes: a substrate; a ultraviolet sensor disposed on the substrate; a focusing structure disposed on the substrate; a first lens connected with the focusing structure and positioned with the ultraviolet sensor; and a light-guide element disposed between the first lens and the ultraviolet sensor. The focusing structure is configured to drive the first lens to move along a light incident direction. An optical sensing system is also disclosed.

Description

Optical sensing system and optical sensing module

The invention relates to an optical sensing system, and in particular to an optical sensing system and its optical sensing module.

For anomaly detection of small structures or volumes in the market, short-wavelength and high-energy ultraviolet (UV) or deep ultraviolet (DUV) light is usually used to further improve the detection resolution.

However, the current UV chip-encapsulated modules cannot change the angle of the incident light, and with the current production process, the angle of the incident light is fixed and cannot be changed, cannot adjust the focus, and cannot improve the photosensitive effect.

For this reason, how to design an optical sensing system and its optical sensing module, especially to solve the above-mentioned technical problems of the existing technology, is an important topic studied by the creator of this project.

In view of the bottlenecks and technical problems caused by the prior art, this paper provides an optical sensing system and its optical sensing module that can change the incident light angle and adjust the focus to overcome the problems mentioned in the prior art.

This invention provides an optical sensing module, including: a substrate; an ultraviolet light sensor arranged on the substrate; a focusing structure arranged on the substrate; a first lens connected to the focusing structure, and The pair is located at the ultraviolet light sensor; and a light guide element is disposed between the first lens and the ultraviolet light sensor. The focusing structure drives the first lens to move in a light incident direction.

In some embodiments, the optical sensing module further includes: a second lens, connected to the focusing structure, located opposite to the ultraviolet light sensor, and disposed above or below the first lens. Wherein, the second lens is fixed on the focusing structure.

In some embodiments, the light guide element has a light condensing structure, and a focus of the light condensing structure corresponds to the ultraviolet light sensor.

In some embodiments, the light guide element has a microlens structure, and the microlens structure is disposed on the light guide element. In some embodiments, the light guide element has a filter layer disposed on the other side relative to the ultraviolet light sensor.

In some embodiments, the focusing structure has a moving part and a fixed part. The moving part is connected to the fixed part and is movable relative to the fixed part.

In some embodiments, the focusing structure is a microelectromechanical system structure or a mechanical structure.

In some embodiments, the first lens has a filter layer disposed on the other side relative to the light guide element.

This invention also provides an optical sensing system, which includes: a carrier board; and a plurality of optical sensing modules as mentioned above, which are arranged on the carrier board. In some embodiments, the optical sensing module arrays are arranged on the carrier.

Following the above, the optical sensing module of this invention has a focusing structure to drive the lens to move in the direction of light incidence, and can adjust the light incidence angle of the lens, thereby adjusting the focal length of the light reaching the ultraviolet light sensor. . Therefore, the optical sensing module of this invention can achieve the effect of increasing the angle range and focal length of detection. In addition, the focusing structure can be, for example, a micro-electromechanical system structure or a mechanical structure, which is driven through electrical connections, and its movement can be electrically controlled to adjust the focus. Furthermore, the optical sensing module of the present invention can further have a plurality of lenses (such as a first lens and a second lens). Through the relative movement of the plurality of lenses, the efficiency of the optical sensing module of the present invention can be further increased. Detected angle range and focal length. In addition, the optical sensing system of this invention has a plurality of optical sensing modules. Through the focusing structure of each optical sensing module, the incident angle of the lens can be adjusted to adjust the focal length of the light reaching the ultraviolet light sensor. This can achieve the effect of increasing the overall detection angle range and focal length of the optical sensing system.

The following describes the implementation of the present invention through specific embodiments. Those familiar with this technology can easily understand other advantages and effects of the present invention from the content disclosed in this specification. This creation can also be implemented or applied through other different specific examples, and various details in this creation description can also be modified and changed in various ways based on different viewpoints and applications without departing from the spirit of this creation.

It should be noted that the structure, proportion, size, number of components, etc. shown in the drawings attached to this specification are only in conjunction with the content disclosed in the specification and are for the understanding and reading of people familiar with this technology. They do not limit the implementation of this creation. , therefore it has no technical substantive significance. Any structural modifications, changes in proportions, or adjustments in size, as long as they do not affect the effects that this creation can produce and the purposes that it can achieve, should fall within the scope of what this creation reveals. The technical content must be within the scope that can be covered.

Figure 1 is a schematic diagram of an optical sensing module 1 according to the first embodiment of the present invention. The optical sensing module 1 is, for example, an optical sensing module that uses short-wavelength and high-energy ultraviolet light or deep ultraviolet light to detect defects in electrical equipment. It can be used to detect and determine the location and orientation of abnormal points in space. The optical sensing module 1 includes a substrate 11, an ultraviolet light sensor 12, a focusing structure 13, a lens (first lens) 14 and a light guide element 15.

The substrate 11 may be, for example, a single-layer circuit board, a double-layer circuit board, or a multi-layer circuit board, and the substrate 11 may be, for example, a printed circuit board or a ceramic circuit board.

The ultraviolet light sensor 12 is disposed on the substrate 11 . The UV sensor 12 can be fixed on the substrate 11 through wire bonding, flip-chip bonding, or soldering, which is not intended to limit the present invention. In this embodiment, the ultraviolet light sensor 12 is fixed to the substrate 11 through the solder joints 111 as an example for description, but this is not limiting. The ultraviolet light sensor 12 is, for example, an ultraviolet light sensor whose sensing wavelength range is UVA, UVB or UVC, or a deep ultraviolet light sensor whose sensing wavelength range is between 180 nanometers and 260 nanometers. It should be noted that UVA is ultraviolet rays with a wavelength between 320 nanometers and 400 nanometers, UVB is ultraviolet rays with a wavelength between 280 nanometers and 320 nanometers, and UVC is ultraviolet rays with a wavelength between 200 nanometers and 280 nanometers.

The focusing structure 13 is disposed on the substrate 11 . The focusing structure 13 may be an integrated structure, such as a Micro Electro Mechanical System (MEMS) structure or a mechanical structure. The material of the focusing structure 13 may be, for example, metal, plastic material, high heat-resistant plastic, silicone material, etc. The focusing structure 13 has a telescopic function, that is, the focusing structure 13 can extend or contract along the up and down direction in FIG. 1 . In other words, the user can electrically control the focusing structure 13 to expand or contract on the substrate 11 along the up and down direction in FIG. 1 via a circuit or other controller.

The lens 14 is connected to the focusing structure 13 and is opposite to the ultraviolet light sensor 12 . Being located on the ultraviolet light sensor 12 means that the focus of the lens 14 will be focused on the sensing area of the ultraviolet light sensor 12 (not shown in the figure, for example, the upper surface of the ultraviolet light sensor 12). The lens 14 may be, for example, glass, or other materials with high temperature resistance and high transmittance, or materials with good transmittance for ultraviolet light (or UVC), which is not limited thereto.

The light guide element 15 is disposed between the lens 14 and the ultraviolet light sensor 12 . The material of the light guide element 15 may be, for example, a transparent silicon substrate, glass, or a highly heat-resistant transparent material (polymer material). In some embodiments, the light guide element 15 may have a microlens structure 151, but this is not limiting. The microlens structure 151 can be disposed on the light guide element 15, and the microlens structure 151 can increase the light collection efficiency and angle of the ultraviolet light sensor 12.

In some embodiments, the light guide element 15 may further have a filter layer 152 disposed on the other side relative to the ultraviolet light sensor 12, or on both sides of the light guide element 15, which is not intended to limit the present invention. Creation. The filter layer 152 can, for example, be used to filter light of other wavelengths except ultraviolet light (or UVC) or other wavelength ranges to be sensed, that is, only allow ultraviolet light (or UVC) or other wavelength ranges to be sensed. The light passes through the light guide element 15. It is worth mentioning that, depending on different design requirements, the lens 14 may have a filter layer (not shown) disposed on the other side relative to the light guide element 15 .

Therefore, the focusing structure 13 of the optical sensing module 1 of this embodiment can drive the lens 14 to move in the light incident direction D1 to adjust the light incident angle of the lens 14, thereby adjusting the light reaching the ultraviolet light sensor 12 the focal length. In other words, the user can electrically control the focusing structure 13 to expand or contract on the substrate 11 along the up and down direction in FIG. 1 through a circuit or other controller to drive the lens 14 to move in the up and down direction in FIG. 1 , thereby By adjusting the incident angle of the lens 14, the focal length of the light reaching the ultraviolet light sensor 12 can be adjusted.

To sum up, the optical sensing module 1 of this embodiment has a focusing structure 13 to drive the lens 14 to move in the light incident direction D1, and the light incident angle of the lens 14 can be adjusted, thereby adjusting the light to reach the ultraviolet light. focal length on sensor 12. Therefore, the optical sensing module 1 of this embodiment can achieve the effect of increasing the angle range and focal length of detection. In addition, the focusing structure 13 can be, for example, a micro-electromechanical system structure or a mechanical structure, which is driven through an electrical connection, and its movement can be electrically controlled to adjust the focus.

Figure 2 is a schematic diagram of the optical sensing module 2 according to the second embodiment of the present invention. The optical sensing module 2 also includes a substrate 21, an ultraviolet light sensor 22, a focusing structure 23, a lens 24 and a light guide element 25. The difference between the optical sensing module 2 of this embodiment and the optical sensing module 1 of the first embodiment is that the optical sensing module 2 further includes a lens (second lens) 26, and the light guide element 25 has a light concentrator. structure 251, and the focusing structure 23 has a moving part 231 and a fixed part 232. It should be noted that this embodiment uses two lenses 24 and 26 as an example for illustration. However, it is not limiting and more than three lenses can also be used as needed. If more than three lenses are used, the relative movement relationships between the lenses can be configured in different ways.

The lens 26 is connected to and fixed on the focusing structure 23 and is opposite to the ultraviolet light sensor 22 . Similarly, being located at the ultraviolet light sensor 22 means that the focus of the lens 26 will be focused on the sensing area of the ultraviolet light sensor 22 (not shown in the figure, for example, the upper surface of the ultraviolet light sensor 22). It is worth mentioning that in this embodiment, the lens 26 is fixedly disposed under the lens 24 as an example for illustration, but this is not limiting. In some other embodiments, the lens 26 can also be fixedly disposed on the lens 24 .

The light guide element 25 can be, for example, a light guide material such as a transparent silicon substrate, glass, or a highly heat-resistant transparent material (polymer material), and the focus of its light condensing structure 251 corresponds to the ultraviolet light sensor 22 . That is, the focus of the light condensing structure 251 will be focused on the sensing area of the ultraviolet light sensor 22 . The light-gathering structure 251 is, for example, a light-gathering cup. The ultraviolet light sensor 22 can be embedded in a groove below the light-gathering structure 251 , and the groove forms a light-gathering surface. It is worth mentioning that the upper surface of the light condensing structure 251 can match the shape of the lens 26, but it is not limited thereto. The upper surface of the light condensing structure 251 and the shape of the lens 26 may not match, leaving a gap.

The moving part 231 and the fixed part 232 of the focusing structure 23 are connected to each other, and the moving part 231 is movable relative to the fixed part 232. The moving part 231 may be, for example, a MEMS structure or a mechanical structure, and the fixed part 232 may be, for example, a base and is fixedly connected to the substrate 21 or the light guide element 25 . In some other embodiments, the moving part 231 and the fixed part 232 can both be bases, and the two are connected by a telescopic structure so that the moving part 231 can move relative to the fixed part 232, which is not limiting.

In this embodiment, the lens 24 is connected to the moving part 231 of the focusing structure 23 , and the lens 26 is connected to the fixed part 232 of the focusing structure 23 . Thereby, the moving member 231 of the focusing structure 23 can drive the lens 24 to move relative to the lens 26 in the light incident direction D1 to adjust the light incident angle of the lens 24, thereby adjusting the focal length of the light reaching the ultraviolet light sensor 22. . In other words, the user can electrically control the moving member 231 of the focusing structure 23 to extend or contract on the fixed member 232 along the up and down direction in FIG. 2 through a circuit or other controller, so as to drive the lens 24 along the up and down direction in FIG. 2 By moving in the direction, the incident angle of the lens 24 is adjusted, thereby adjusting the focal length of the light reaching the ultraviolet light sensor 22 .

To sum up, the focusing structure 23 of the optical sensing module 2 of this embodiment has a moving member 231 to drive the lens 24 to move relative to the lens 26 in the light incident direction D1, so as to adjust the light incident angle of the lens 24. Then the focal length of the light reaching the ultraviolet light sensor 22 can be adjusted. Therefore, the optical sensing module 2 of this embodiment can achieve the effect of increasing the angle range and focal length of detection. In addition, the optical sensing module 2 of this embodiment can further have a plurality of lenses 24 and 26. Through the relative movement of the plurality of lenses 24 and 26, the detection of the optical sensing module 2 of this embodiment can be further increased. Measured angle range and focal length.

Figure 3 is a schematic diagram of the optical sensing system 3 of this invention. The optical sensing system 3 includes, for example, a carrier board 31 and a plurality of optical sensing modules 1 or 2 disposed on the carrier board 31 . It is worth mentioning that the optical sensing system 3 can use the optical sensing module 1 of the first embodiment or the optical sensing module 2 of the second embodiment, or mix the optical sensing modules 1 and 2 Use is non-limiting.

In some embodiments, the optical sensing modules 1 and 2 are arranged in arrays on the carrier plate 31 , that is, they are arranged on the carrier plate 31 in a compound-eye manner. Since these optical sensing modules 1 and 2 have a focusing structure to drive the lens to move in the direction of light incidence, the light incidence angle of the lens can be adjusted, thereby adjusting the focal length of the light reaching the ultraviolet light sensor.

For example, assuming that the detection angle of the fixed field of view (FOV) of the optical sensing system 3 is set to 120 degrees, two (or multiple) optical sensing modules 1 with detection angles at least greater than 60 degrees can be used , 2 respectively position and measure the measurement field of view. Use the left optical sensing module 1 and 2 in Figure 3 to illuminate the right half of the field of view, and use the right optical sensing module 1 and 2 in Figure 3 to illuminate the field of view. The left half of the field of view can cover all viewing angles 120 degrees.

Figure 4 is another schematic diagram of the optical sensing system 3 of this invention. On the other hand, a plurality of optical sensing modules 1 and 2 can be configured by, for example, finding the visual field intersection area A of the two optical sensing modules 1 and 2. After deducting the visual field intersection area A, The separation distance between the central axes of the two optical sensing modules 1 and 2 and the angles they can cover are defined, but they are not limiting.

Therefore, the optical sensing system 3 of this embodiment has a plurality of optical sensing modules 1 and 2. Through the focusing structure of each optical sensing module 1 and 2, the incident angle of the lens can be adjusted to adjust the light reaching the ultraviolet rays. The focal length on the light sensor can achieve the effect of increasing the overall detection angle range and focal length of the optical sensing system 3.

To sum up, the optical sensing module of this invention has a focusing structure to drive the lens to move in the direction of light incidence, and can adjust the light incidence angle of the lens, thereby adjusting the focal length of the light reaching the ultraviolet light sensor. . Therefore, the optical sensing module of this invention can achieve the effect of increasing the angle range and focal length of detection. In addition, the focusing structure can be, for example, a micro-electromechanical system structure or a mechanical structure, which is driven through electrical connections, and its movement can be electrically controlled to adjust the focus. Furthermore, the optical sensing module of the present invention can further have a plurality of lenses (such as a first lens and a second lens). Through the relative movement of the plurality of lenses, the efficiency of the optical sensing module of the present invention can be further increased. Detected angle range and focal length. In addition, the optical sensing system of this invention has a plurality of optical sensing modules. Through the focusing structure of each optical sensing module, the incident angle of the lens can be adjusted to adjust the focal length of the light reaching the ultraviolet light sensor. This can achieve the effect of increasing the overall detection angle range and focal length of the optical sensing system.

The above are only detailed descriptions and drawings of preferred specific embodiments of this invention. However, the characteristics of this invention are not limited thereto, nor do they limit this invention. The entire scope of this invention should be subject to the following patent application scope. , all embodiments that are within the spirit of the patentable scope of this invention and similar changes thereof shall be included in the scope of this invention. Any person familiar with the art can easily think of any changes or modifications in the field of this invention. It can be covered by the following patent scope of this case.

1, 2: Optical sensing module 11, 21: Substrate 111:Solder joint 12, 22: UV sensor 13, 23: Focusing structure 14, 24, 26: Lens 15, 25: Light guide element 151:Microlens structure 152:Filter layer 231:Moving parts 232: Fixtures 251: Condensing structure 3: Optical sensing system 31: Carrier board A: View intersection area D1: Light incident direction FOV: field of view

In order to further understand the technology, means and effects used by this creation to achieve the intended purpose, please refer to the following detailed description and drawings about this creation. I believe that you can gain an in-depth and specific understanding of the features and characteristics of this creation. , however, the attached drawings are only for reference and illustration, and are not intended to limit this creation. Figure 1 is a schematic diagram of an optical sensing module according to the first embodiment of the present invention. Figure 2 is a schematic diagram of an optical sensing module according to the second embodiment of the present invention. Figure 3 is a schematic diagram of the optical sensing system of this invention. Figure 4 is another schematic diagram of the optical sensing system of this invention.

1: Optical sensing module

11:Substrate

111:Solder joint

12:UV light sensor

13: Focusing structure 1

14: Lens

15:Light guide element

151:Microlens structure

152:Filter layer

D1: Light incident direction

Claims (10)

An optical sensing module including: a substrate; An ultraviolet light sensor is provided on the substrate; A focusing structure is provided on the substrate; a first lens, connected to the focusing structure and positioned on the ultraviolet light sensor; and a light guide element disposed between the first lens and the ultraviolet light sensor, Wherein, the focusing structure drives the first lens to move in a light incident direction. For example, the optical sensing module of claim 1 further includes: a second lens, connected to the focusing structure, positioned on the ultraviolet light sensor, and disposed above or below the first lens, Wherein, the second lens is fixed on the focusing structure. The optical sensing module of claim 1, wherein the light guide element has a light condensing structure, and a focus of the light condensing structure corresponds to the ultraviolet light sensor. The optical sensing module of claim 1, wherein the light guide element has a microlens structure, and the microlens structure is disposed on the light guide element. The optical sensing module of claim 1, wherein the light guide element has a filter layer disposed on the other side relative to the ultraviolet light sensor. The optical sensing module of claim 1, wherein the focusing structure has a moving part and a fixed part, and the moving part is connected to the fixed part and is movable relative to the fixed part. The optical sensing module of claim 1, wherein the focusing structure is a microelectromechanical system structure or a mechanical structure. The optical sensing module of claim 1, wherein the first lens has a filter layer disposed on the other side relative to the light guide element. An optical sensing system including: a carrier board; and A plurality of optical sensing modules as described in any one of claims 1 to 9 are provided on the carrier board. The optical sensing system of claim 9, wherein the optical sensing module arrays are arranged on the carrier board.

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