TWM645800U - Laser-treated anti-deposition object - Google Patents

Abstract

A laser-treated anti-deposition object is disclosed. The laser-treated anti-deposition object comprises a main structure and a fluorine coating layer, wherein the fluorine coating layer covers a laser treated surface of the main structure to form an anti-deposition surface, wherein an initial surface of the main structure is treated by a laser to form the laser-treated surface with a plurality of microstructures. The anti-deposition object is used for contacting a process material used or emitted by a process equipment during a process in a vacuum environment, and the anti-deposition surface has a higher water droplet contact angle to the process material. The laser-treated anti-deposition object of this invention can prevent the vacuum parts from being scratched by the process materials such as particles, and can also achieve the effect of self-cleaning and easy cleaning, so as to reduce the cost and manpower of frequent maintenance.

Description

Anti-deposit components with laser surface treatment

The invention relates to a vacuum component, in particular to an anti-sediment component with laser surface treatment.

In recent years, due to the continuous vigorous development of semiconductor technology, technological products have made great strides. In the manufacturing process of semiconductor wafers, wafers are usually placed in process equipment to perform related process operations, and a vacuum pump is used to extract air or gas from the process equipment to keep the process equipment in a negative pressure state, that is, to a certain A degree of vacuum. However, in the semiconductor manufacturing process, process substances such as process gas or process exhaust gas are easily deposited or accumulated in the fluid channels, which in turn leads to shorter and shorter maintenance cycles, thereby affecting manufacturing costs and schedules.

In view of this, one purpose of this invention is to provide an anti-sediment component with laser surface treatment to solve the above-mentioned problems of the conventional art.

In order to achieve the aforementioned purpose, this invention proposes an anti-deposition component with laser surface treatment. The anti-deposition component contacts a process substance used or emitted when a process equipment is performing a process in a vacuum environment, and includes: a main structure. , wherein at least one initial surface of the main structure is passed through a laser Performing a laser surface treatment step to form a laser-treated surface having a plurality of microstructures; and a fluorine coating layer covering the plurality of laser-treated surfaces of the main structure On a microstructure, it serves as an anti-deposition surface of the main structure, wherein the initial surface of the main structure and the laser-treated surface are hydrophilic surfaces, and the hydrophilicity of the laser-treated surface is higher than that of the initial surface. property, and the anti-deposition surface is a hydrophobic surface, so that the anti-deposition surface has a higher contact angle with the process substance compared to the initial surface of the main structure and the laser-treated surface.

Wherein, the fluorine coating layer is coated on the laser-treated surface of the main structure, so that the fluorine coating layer covers the plurality of microstructures of the main structure.

Wherein, the fluorine coating layer conformally covers the plurality of microstructures of the main structure.

Wherein, the initial surface of the main structure is irradiated by the laser with an energy density to form the laser-treated surface with the plurality of microstructures, wherein the energy density ranges from 0.01W/cm ² to 110W/ cm ² .

Among them, the scanning speed of the laser ranges from 50mm/s to 100mm/s, the scanning frequency of the laser ranges from 10kHz to 40kHz, the pulse width of the laser ranges from 20ns to 200ns, and the laser The radiation scanning pitch ranges from 10 μm to 200 μm, thereby forming the plurality of microstructures on the main structure.

The power of the laser ranges from 10 watts to 100 watts, and the wavelength of the laser ranges from 380 nm to 1400 nm, thereby forming the plurality of microstructures on the main structure.

Among them, the main structure is made of stainless steel.

Wherein, the main structure is an outlet pipe fitting of the process equipment or a pipe fitting or component of a peripheral equipment of the process equipment.

Wherein, the fluorine coating layer is located on the surface of a part of the main structure, which part is an inclined part, a flat part or a curved part of the main structure.

Wherein, the anti-deposition surface has higher acid corrosion resistance and plasma etching resistance than the initial surface of the main structure.

Wherein, the anti-deposition surface has a similar or higher hardness than the initial surface of the main structure.

Wherein, the surface roughness of the laser-treated surface having the plurality of microstructures is higher than the surface roughness of the original surface of the main structure.

Wherein, the initial surface of the main structure is a polished surface that has undergone a polishing process.

Among them, the components of the fluorine coating layer are fluorocarbons (Fluoro-carbons) accounting for 0.01~20%wt, alkoxysilanes accounting for 5~50wt, catalytic additives accounting for 0.01%~20%wt, and solvents accounting for 10% Composed of ~90wt.

Wherein, the process performed by the process equipment is an atomic layer deposition (ALD) process, an organic metal chemical vapor deposition (MOCVD) process or an aluminum pad (Al-pad) process.

Wherein, the contact angle of the anti-deposition surface ranges from 99 degrees to 150.2 degrees.

Based on the above, the anti-sediment component with laser surface treatment of this invention has the following advantages:

(1) By performing laser surface treatment on the initial surface of the main structure of the vacuum component, a laser-treated surface with a plurality of microstructures can be formed, thereby increasing hydrophilicity and roughness, which is helpful for subsequent The fluorine coating layer is covered on the microstructure.

(2) By coating the laser-treated surface of the vacuum component with a high-hardness fluorine coating layer as an anti-deposition surface, the vacuum component can be prevented from being scratched by impact from particles and other process substances.

(3) By coating the laser-treated surface of the vacuum components with a high contact angle fluorine coating layer as an anti-deposition surface, the vacuum components can be prevented from depositing and achieve self-cleaning and easy-to-clean effects.

(4) The fluorine coating layer has good adhesion to the main structure with a laser-treated surface, which can avoid peeling off during the manufacturing process.

(5) By providing anti-deposition components using a fluorine coating layer as an anti-deposition surface, money and manpower for frequent maintenance can be saved.

In order to enable Jun Shen to have a better understanding of the technical characteristics and the technical effects that can be achieved by this invention, the following is a preferred embodiment and a detailed description.

10: Anti-sediment parts

20:Main structure

22a:Initial surface

22b: Laser treated surface

22c: Anti-deposition surface

24: parts

26:Spiral guide groove

27:Microstructure

30: Fluorine coating layer

40:Laser generator

42:Laser

44: Lens group

100: Process equipment

110:Process material

θ: contact angle

X, Y, Z: axis

S10, S20, S30: steps

Figure 1 is a schematic diagram of the partial structure of the anti-sediment component with laser surface treatment of this invention.

Figure 2 is a manufacturing flow chart of the anti-deposition component with laser surface treatment of this invention.

Figure 3 is a schematic cross-sectional view of the manufacturing process of the anti-deposition component with laser surface treatment of this invention.

Figure 4 is a schematic diagram of the anti-deposition component with laser surface treatment of this invention applied to process equipment.

Figure 5 is a schematic cross-sectional structural view of the first implementation example of the laser surface-treated anti-deposition component of this invention.

Figure 6 is a schematic cross-sectional structural diagram of the second implementation example of the laser surface-treated anti-sediment component of this invention.

Figure 7 is a schematic cross-sectional structural diagram of the third implementation example of the laser surface-treated anti-deposition component of this invention.

Figure 8 is a schematic three-dimensional structural diagram of the fourth implementation example of the laser surface-treated anti-deposition component of this invention.

In order to facilitate understanding of the technical features, content and advantages of this invention and the effects it can achieve, this invention is described in detail below with diagrams and in the form of expressions of embodiments. The purpose of the diagrams used is only They are for illustration and auxiliary instructions, and may not represent the true proportions and precise configurations of the creation after its implementation. Therefore, the proportions and configurations of the attached drawings should not be interpreted to limit the scope of rights in the actual implementation of this creation. In addition, to facilitate understanding, the same elements in the following embodiments are labeled with the same symbols for explanation.

In addition, unless otherwise noted, the terms used throughout the specification and patent application generally have the ordinary meanings of each term used in the field, the content disclosed herein, and the specific content. Certain terms used to describe the invention are discussed below or elsewhere in this specification to provide those skilled in the art with additional guidance in describing the invention.

The use of "first", "second", "third", "fourth", etc. in this article does not specifically refer to the order or order, nor is it used to limit this creation. It is only used to distinguish between the same and the same. Technical terms describing components or operations only.

Secondly, if the words "include", "includes", "have", "contains", etc. are used in this article, they are all open terms, which means including but not limited to.

Since process equipment uses or emits many process substances when performing various semiconductor processes, and these process substances are easily deposited on the pipes or pipe walls in contact with them, so in order to avoid the deposition of process substances, this invention provides a laser-irradiated surface An anti-sediment component and a manufacturing method thereof are provided. The anti-sediment component has a very high contact angle (also known as water droplet contact angle or water droplet angle). Moreover, compared to a surface that only has a rough structure or a fluorine coating layer, the anti-deposition surface of this anti-deposition component has a higher contact angle, which means it has super-hydrophobic and super-oleophobic effects. Figure 1 is a schematic diagram of the partial structure of the anti-sediment component with laser surface treatment of this invention. Figure 2 is a manufacturing flow chart of the anti-deposition component with laser surface treatment of this invention. Figure 3 is a schematic cross-sectional view of the manufacturing process of the anti-deposition component with laser surface treatment of this invention.

Please refer to Figures 1 to 3. The anti-deposition component 10 with laser surface treatment of the present invention includes a main structure 20 and a fluorine coating layer 30, wherein the main structure 20 has a rough structure produced by laser surface treatment ( That is, a plurality of microstructures 27), the fluorine coating layer 30 covers the microstructures 27 of the main structure 20 to form an anti-deposition surface 22c. The plurality of microstructures 27 are, for example, arranged on the main structure 20 . This invention takes as an example a plurality of microstructures 27 arranged at intervals. The plurality of microstructures 27 are, for example, a plurality of convex ribs extending along the Y-axis direction and arranged on the main structure 20 along the X-axis direction. The shape of the top can be arc, semi-arc, plane, inclined, irregular or other shapes as shown in Figure 1, and the distance between adjacent microstructures 27 is, for example, the above-mentioned laser scanning distance, but Not limited to this, micro knot The structures 27 may also be arranged in a dot matrix, for example. Alternatively, a plurality of microstructures 27 can also be adjacent to each other, which means that any shape of the microstructures 27 or any arrangement pattern, as long as the cost-effective creation can achieve the effect of increasing the contact angle, falls within the scope of the invention. In addition, this creation is illustrated by taking the fluorine coating layer 30 conformally covering the surface of the microstructure 27 of the main structure 20 , which means that the fluorine coating layer 30 covers the microstructure 27 along with the microstructure 27 , and also covers the surface of the microstructure 27 of the main structure 20 . On the main structure 20 between adjacent microstructures 27, but not limited to this, as long as the cost-effective creation can achieve the effect of increasing the contact angle, any covering type falls within the scope of protection claimed by this invention.

In the manufacturing method of the anti-sediment component with laser surface treatment of the present invention, firstly, as shown in Figure 2 and (A) of Figure 3, a main structure 20 is provided (step S10), wherein the main structure 20 has at least one Initial surface 22a. Next, as shown in (B) of FIG. 2 and FIG. 3 , the laser 42 is used to perform a laser surface treatment step (step S20 ) on the initial surface 22 a of the main structure 20 , so that the initial surface 22 a has a plurality of microstructures. 27. Laser treated surface 22b. In this invention, for example, the laser generator 40 generates one or more lasers 42. The laser 42 is a pulse light, and the laser 42 is transmitted to the initial surface of the main structure 20 through the lens group 44, for example. 22a, and can move along the X-axis, Y-axis or Z-axis direction, for example, by remelting the initial surface 22a of the main structure 20 made of stainless steel to modify it to generate nanoscale wrinkles, that is, a plurality of Microstructure 27 thus produces a larger total contact area (roughness). The laser generator 40 is, for example, an Nd:YAG laser, but is not limited thereto. Then, as shown in (C) of FIG. 2 and FIG. 3 , the laser-treated surface 22 b of the main structure 20 is covered with the fluorine coating layer 30 (step S30 ), so as to cover the fluorine coating layer 30 A plurality of microstructures 27 are formed on the laser-treated surface 22b of the main structure 20, thereby forming an anti-deposition surface 22c on the main structure 20. One of the features of this invention is that the initial surface 22a of the main structure 20 is subjected to a laser surface treatment step by a laser 42 to become a laser-treated surface 22b having a plurality of microstructures 27. Among them, if the initial surface 22a of the main structure 20 is hydrophilic (Hydrophilic, the contact angle is about 80 to 86 degrees), after the laser surface treatment step, the hydrophilicity of the laser-treated surface 22b of the main structure 20 will be improved to super hydrophilic (the contact angle is about less than 20 degrees). Spend). On the contrary, if the initial surface 22a of the main structure 20 is hydrophobic, the hydrophobicity of the laser-treated surface 22b of the main structure 20 will increase after the laser surface treatment step. However, in this invention, after the fluorine coating layer 30 is covered on the super-hydrophilic laser-treated surface 22b, the anti-deposition surface 22c formed will be super hydrophobic (Super hydrophobic, the contact angle θ is approximately greater than 130 degrees), and The contact angle θ of the anti-deposition surface of this invention can even be greater than or equal to about 150 degrees, while the sliding angle is less than or equal to about 10 degrees. The above-mentioned sliding angle refers to the droplet (such as water droplet) impact test with a needle at a height of about 90mm from the anti-sediment component 10, so that when the droplet falls on the inclined anti-sediment component 10, the droplet can slide. The inclination angle of the anti-sediment component 10. The smaller the above-mentioned sliding angle is, the better the anti-deposition effect of the anti-deposition component 10 is.

In the above-mentioned laser surface treatment step, the energy density of the laser 42 irradiating the initial surface 22a of the main structure 20 (that is, using the laser 42 to cause the main structure 20 to generate the microstructure 27) ranges from about 0.01W/cm Any value or range from ² to about 110 W/cm ² to form a plurality of microstructures 27 on the main structure 20 , wherein these microstructures 27 preferably have mutually independent peaks, so that the fluorine coating layer 30 can be used in the subsequent When the surface of the microstructure 27 of the main structure 20 is conformally covered, the anti-deposition surface 22c formed by it still retains the shape of the microstructure 27, so the above conformal shape can also be called maintains shape. . The scanning speed of the laser 42 ranges from 50 mm/s to 100 mm/s. For example, the laser generator 40 can generate a plurality of laser beams 42 spaced apart along the Y-axis direction. The above-mentioned scanning speed is, for example, the moving speed of the laser 42 in the X-axis direction. The scanning frequency range of laser 42 is any value or interval from 10kHz to 40kHz, the pulse width range of laser 42 is any value or interval from 20ns to 200ns, and the laser scanning spacing range of laser 42 is from For any value or interval from 10 μm to 200 μm (for example, 10 μm, 20 μm, 30 μm, 40 μm, 50 μm, 80 μm, 100 μm, 200 μm), the number of scanning times of the laser 42 can be one or more times. The power of the laser 42 ranges from 10 watts to 100 watts, and is, for example, 10 watts, 15 watts, 20 watts, ..., and so on. The wavelength of the laser 42 ranges from 380 nm to 1400 nm, and For example, they are 380nm to 420nm, 445nm to 473nm, 532nm, 633nm, and 785nm to 1064nm. A person with ordinary knowledge in the technical field to which this invention belongs can select appropriate parameters from the above data range and combine them to obtain the required contact angle based on the content previously disclosed in this invention. The range of the contact angle in this invention can be From about 99 degrees to about 150.2 degrees.

Another feature of this creation is that the fluorine coating layer 30 covers the plurality of microstructures 27 on the laser-treated surface 22b of the main structure 20, thereby forming an anti-deposition surface 22c on the main structure 20, that is, using fluorine The coating layer 30 serves as the anti-deposition surface 22c of the main structure 20 . Another feature of this creation is that the initial surface 22a and the laser-treated surface 22b of the main structure 20 are hydrophilic surfaces. The hydrophilicity of the laser-treated surface 22b is higher than that of the initial surface 22a, and the anti-deposition surface 22c is hydrophobic. surface, so that the anti-deposition surface 22c has a higher contact angle with the process material than the initial surface 22a and the laser-treated surface 22b of the main structure 20. Taking the main structure 20 as stainless steel as an example, such as various types of 304 stainless steel plates on the market, the initial surface 22a of the main structure 20 is hydrophilic (with a contact angle of about 80 to 86 degrees). After the laser surface treatment step , the hydrophilicity of the laser-treated surface 22b of the main structure 20 will be improved to super hydrophilic (Super hydrophilic, the contact angle is approximately less than 20 degrees). However, after being covered with the fluorine coating layer 30, the anti-deposition surface 22c formed will have super hydrophobicity (Super hydrophobic, the contact angle is approximately greater than 130 degrees). The contact angle of the anti-deposition surface of this invention ranges from about 99 degrees to about 150.2 degrees, that is, the contact angle can be greater than or equal to 150 degrees, and the sliding angle can be less than or equal to 10 degrees.

The anti-sediment component 10 of the present invention is used in a vacuum environment, as shown in Figure 4, and comes into contact with the process substances 110 used or discharged by the process equipment 100 during the process in the vacuum environment, where the above The vacuum environment is not limited to a specific vacuum degree, and may be determined according to the requirements of the process equipment 100 . The fluorine coating layer 30 covers the plurality of microstructures 27 on the laser-treated surface 22b of the main structure 20 to form an anti-deposition surface 22c. The anti-deposition surface 22c of the anti-deposition component 10 of the present invention can be located on all or part 24 of the main structure 20, for example. The location 24 may be a location where deposition of process materials often occurs, such as a curved or inclined location, and other non-planar locations, such as but not limited to the inner wall surface or the outer wall surface. Therefore, in this invention, the above-mentioned part 24 is, for example, a curved part (as shown in Figure 5) or an inclined part (as shown in Figure 6) of the main structure 20, but this invention is not limited to this. The fluorine coating of this invention The layer 30 can also cover the planar portion of the main structure 20 (as shown in Figure 7). In addition, the main structure 20 of the anti-sediment component 10 of the present invention is, for example, the outlet pipe of the process equipment 100 (as shown in FIGS. 5 to 7 ) or the peripheral equipment of the process equipment 100 (such as a vacuum pump). Pipe fittings (shown in Figures 5 to 7) or components (shown in Figure 8 as a Holweck pump part with a spiral guide groove 26). Although various forms of the main structure 20 of the anti-sediment component 10 are listed above, the present invention is not limited thereto. All forms of objects that can be applied in a vacuum environment fall within the scope of protection claimed by the present invention. For example, the anti-sediment component 10 and its main structure 20 of the present invention can also be a cavity or component of a vacuum pump, such as a rotor blade and/or a stator blade of a turbomolecular vacuum pump (TMP). For example, the anti-sediment component 10 and its main structure 20 of the present invention can also be a cavity or component of a valve structure. In short, this invention can selectively perform laser surface treatment steps on the initial surfaces 22a of all objects that may come into contact with the process material 110 to form a plurality of microstructures 27, and cover the fluorine coating layer 30 on the plurality of microstructures. On the structure 27, an anti-deposition surface 22c is formed. Furthermore, the main structure 20 of the anti-sediment component 10 of the present invention can also be, for example, a cavity wall or component of a process chamber.

One of the features of the laser surface-treated anti-sediment component of this invention is that the fluorine coating layer 30 covers the microstructure 27 of the main structure 20. Therefore, the fluorine coating layer 30 can replace the initial surface 22a or laser of the main structure 20. The injection processing surface 22b is used or discharged when it contacts the processing equipment 100 to perform the process. Process material 110. The fluorine coating layer 30 can cover the laser-treated surface 22b of the main structure 20 by coating, such as but not limited to spraying, brushing, dipping or rubbing. Among them, in this invention, for example, the main structure 20 formed with the microstructure 27 can be directly immersed in the liquid (fluid state) fluorine coating layer 30, thereby coating the fluorine coating layer 30 on the laser-treated surface of the main structure 20 On the microstructure 27 of 22b, the soaking time is, for example, about 1 minute, but is not limited to this. As long as the fluorine coating layer 30 can cover the microstructure 27, it falls within the scope of the invention. This invention can increase the laser treatment of the fluorine coating layer 30 and the main structure 20 by forming a rough structure with convex ribs (ie, microstructure 27) on the main structure 20 and by increasing the hydrophilicity of the main structure 20. Adhesion between surfaces 22b. Taking the main structure 20 as stainless steel as an example, the initial surface 22a of the stainless steel is hydrophilic, and after laser surface treatment, the hydrophilicity of the laser-treated surface 22b of the stainless steel will be further improved. That is to say, if the initial surface 22a is hydrophilic, the laser-treated surface 22b will be more hydrophilic; if the initial surface 22a is hydrophobic, the laser-treated surface 22b will be more hydrophobic. This invention can increase the adhesion between the fluorine coating layer 30 and the laser-treated surface 22b of the main structure 20. Among them, this invention can also polish the initial surface 22a of the main structure 20 before laser surface treatment to make it a polished surface, thereby improving the laser treatment surface 22b of the subsequent process. The uniformity and consistency can further improve the contact angle. Although the polishing process is used as an example above, the present invention is not limited thereto. As long as the initial surface 22a of the main structure 20 can be uniformized or planarized, it falls within the scope of protection claimed by the present invention, so it will not be described again here.

In this invention, after the liquid (fluid state) fluorine coating layer 30 is coated on the laser-treated surface 22b of the main structure 20, it can be selectively allowed to undergo a self-condensation reaction at room temperature for about 1 to 7 days or at room temperature. The self-condensation reaction is carried out at a temperature of 40 degrees Celsius to 60 degrees Celsius for about 1 minute to 24 hours, that is, the fluorine coating layer 30 is solidified on the laser-treated surface 22b of the main structure 20 to form fluorine in a solidified state. Plain coating layer 30. Among them, this creation is, for example, immersing the main structure 20 with the microstructure 27 in a liquid (fluid) state. (in the bulk state) for about 1 minute, take it out and bake it at a temperature of 50 degrees Celsius for about 1 minute to 24 hours to cause a self-condensation reaction. The thickness of the fluorine coating layer 30 may range, for example, from 0.1 μm to 30 μm, and may be any numerical interval or upper and lower endpoint values within this range, such as from 1 μm to 10 μm. The physical and chemical properties of the fluorine coating layer 30 are better than the original physical and chemical properties of the initial surface 22a of the main structure 20 . For example, in a vacuum environment, the fluorine coating layer 30 (ie, the anti-deposition surface 22c) has a higher contact angle θ to the process material 110 than the initial surface 22a and the laser-treated surface 22b of the main structure 20. That is, the contact angle between the fluorine coating layer 30 and the process material 110 (ranging from about 99 degrees to about 150.2 degrees, and can be any numerical range or upper and lower limit endpoints within this range, such as 150 degrees) is higher than The contact angle between the initial surface 22a and the process material 110 ranges from approximately 89 to 95 degrees. By coating the vacuum components with a high contact angle fluorine coating layer 30, this invention can prevent deposition on the vacuum components and achieve self-cleaning and easy-to-clean effects. Compared with the initial surface 22a and the laser-treated surface 22b of the main structure 20, the fluorine coating layer 30 has a similar or higher hardness, that is, the hardness of the fluorine coating layer 30 (ranging from about 8H to 9H, and can be Any numerical interval within the range or the upper and lower endpoint values) is close to, the same as, or higher than the hardness of the initial surface 22a of the main structure 20 (the range is approximately 4H to 6.5H). This invention coats the vacuum components with a high-hardness fluorine coating layer 30 to prevent the vacuum components from being scratched by impact from particles and other process substances. The adhesion between the fluorine coating layer 30 and the laser-treated surface 22b of the main structure 20 (the range of the Cross-Cut test is about 4B to 5B) is higher than the process material 110 applied to the fluorine coating layer 30 The contact force (for example, the external force or adsorption force when the process substance 110 hits the fluorine coating layer 30 when it is discharged), thereby the fluorine coating layer 30 of the present invention has good adhesion to the main structure 20, which can avoid the occurrence of Peeling phenomenon. Compared with the initial surface 22a of the main structure 20, the fluorine coating layer 30 has higher acid corrosion resistance and plasma etching resistance. Therefore, the fluorine coating layer 30 of the present invention can protect the vacuum components from being acid etched and free. base erosion. For example, the fluorine coating layer 30 covers or even conformally covers the rough surface of the main structure 20 (that is, the laser with the microstructure 27 on the shot treatment surface 22b). In addition, the fluorine coating layer 30 of the present invention can withstand a very high temperature, and its operating temperature range is very wide, and the withstand temperature can be as high as about 600 degrees Celsius. The working temperature range of the fluorine coating layer 30 is, for example, less than or equal to about 600 degrees Celsius, preferably from about 260 degrees Celsius to 600 degrees Celsius, and can be any numerical interval or upper and lower limit endpoints less than or equal to 600 degrees Celsius. value. On the other hand, traditional water-repellent coatings or anti-fouling coatings usually cannot withstand high temperatures. For example, the operating temperature of traditional Teflon is below 260 degrees Celsius. What's more, the hardness of traditional water-repellent coatings or anti-fouling coatings is only about 1H to 3H. For example, the hardness of traditional Teflon is 1H to 2H. It can be seen from this that the traditional water-repellent layer or anti-fouling layer cannot withstand the high temperature, high vacuum, high corrosiveness, high impact and high sedimentation environment when the process equipment 100 performs the semiconductor process. In other words, by combining the fluorine coating layer 30 and the main structure 20, the anti-sediment component 10 of the present invention can save money and manpower in frequent maintenance.

The composition of the fluorine coating layer 30 of the present invention can be, for example, fluorocarbons accounting for about 0.01~20%wt, alkoxysilanes accounting for about 5~50wt, and catalytic additives accounting for about 0.01%~20% %wt and solvent account for about 10~90%wt. Fluorocarbons are, for example, fluorine-containing monomers or polymers containing 1 to 20 carbon atoms. For example, the fluorocarbon compound is a fluorine-containing monomer containing about 3 to about 20 carbon atoms and at least one terminal trifluoromethyl group. For example, the fluorocarbon compound is selected from the group consisting of perfluoroalkane (PFAS), chlorofluorocarbon (CFC), semifluorocarbon (HFC), fluoropolymer (PTFE) and hydrofluorochlorocarbon (HCFC). ethnic group. The alkoxysilanes are, for example, selected from the group consisting of alkoxysilane oligomers, alkoxysilane compounds, alkoxysilane polymers, and alkoxysiloxanes. Alkoxylsiloxane Oligomer, Alkoxysiloxane compound, Alkoxylsiloxane polymer, Alkoxylaminosiloxane Oligomer, Alkoxysiloxane Silazane compound (Alkoxylaminosiloxane compound) and alkoxysilane A group of Alkoxylaminosiloxane polymers. The catalytic additive system is selected from platinum, titanium, tin, zinc, aluminum, silver, calcium, magnesium, potassium, sodium, nickel, chromium, molybdenum, vanadium, copper, iron, cobalt, germanium, hafnium, lanthanum, lead, A group composed of metals, metal oxides, phosphates and carboxylates of ruthenium, tantalum, tungsten and zirconium. For example, the catalytic additive is selected from the group consisting of silicon oxide, aluminum oxide, titanium oxide, iron oxide, magnesium oxide, molybdenum oxide, calcium oxide and calcium chloride, and is, for example, nanometer-sized. However, this creation is not limited to this. Catalytic additives or components with micro-nano size or even micron size fall within the scope of protection claimed by this invention. Examples of the solvent include alcohols such as ethanol, propanol or butanol. However, this invention is not limited to this. The solvent of this invention can be selected from the group consisting of alcohols, ketones, esters, fluoroalcohols, fluoroethers and ethers. The alkoxysilanes of this invention have reactive functional groups, and the reactive functional groups can undergo a self-condensation reaction at room temperature for 1 to 7 days (for example, 7 days) or at a temperature of 40 to 60 degrees Celsius for 1 to 24 hours ( For example, 24 hours) to perform a self-condensation reaction. Among them, the above-mentioned reactive functional groups are, for example, hydrosilylation reactive functional groups (such as alkenyl groups, acrylyl groups, hydrogen atoms bonded to silicon atoms), condensation reactive functional groups (such as hydroxyl groups, alkoxy groups, and acyloxy groups). group) or peroxide hardening reactive functional group (such as alkyl, alkenyl, acrylyl, hydroxyl). In addition, in possible implementations, the composition of the fluorine coating layer 30 of the present invention can also be, for example, an organic/inorganic polymer copolymer composed of fluorine, nano-titanium, silicon and silicon elastomer. Since those with ordinary knowledge in the technical field to which this invention belongs should know how to select and modulate the anti-deposition component 10 of the fluorine coating layer 30 to have the effect of this invention based on the foregoing content of this invention, therefore no further details are described here.

The surface hardness testing method of this invention is to use a hardness pencil to test the surface hardness of the fluorine coating layer 30. For example, load a hardness pencil (Mitsubishi standard pencil) on a fixed-load trolley at an angle of 45 degrees, and then push the trolley by hand to slide over the surface of the fluorine coating layer 30 of the anti-sediment component 10 to confirm scratches by the pencil. surface hardness. In the anti-sediment component 10 of this invention, the fluorine coating layer 30 covers the main body The surface hardness test results on the laser-treated surface 22b of the structure 20 are all between 8H load 1Kg and 9H load 500g.

5%)之間。由此可知，本創作之氟素鍍膜層30對於主體結構20之初始表面22a及雷射處理表面22b之附著力(密著性)相當高。 The Cross-Cut test of this creation is tested according to ASTM D3359 method B (cross-cut method). The test method is to use a cross-cut knife to draw 10×10 (100) 1mm×1mm small grids on the surface of the test sample. Each scribed line should be as deep as the bottom of the fluorine coating layer 30 of the anti-sediment component 10; use a brush to clean the debris in the test area; use standard tape (3M No. 600 tape) or tape with equivalent effectiveness to stick the quilt Test the small grid line and wipe the tape vigorously with an eraser to increase the contact area and strength between the tape and the tested area. Grasp one end of the tape with your hand and quickly tear off the tape at an angle of 180 degrees within 1.5 minutes plus or minus 30 seconds. And observe the peeling state of the fluorine coating layer 30. In the anti-sediment component 10 of the invention, the 100-grid test results of the fluorine coating layer 30 covering the laser-treated surface 22b of the main structure 20 are all at 5B (the edge of the cut is completely smooth, and there is no peeling on the edge of the grid) To 4B (small pieces peel off at the intersection of the cuts, actual damage in the cross-hatch area

5%). It can be seen from this that the adhesion (adhesion) of the fluorine coating layer 30 of the present invention to the initial surface 22a and the laser-treated surface 22b of the main structure 20 is quite high.

The acid corrosion resistance testing experiment of this creation uses 0.05ML of 5% HCl (hydrochloric acid), drops it on the test sample, and leaves it for 24 hours, waiting for the HCl solution to evaporate. During the evaporation process, the concentration of the HCl area will increase, and the diffusion corrosion effect will be increased. . Observe the corrosion spread area after 24 hours. According to the test results, the corrosion area (mm ² ) of the laser-treated surface 22b of the main structure 20 without the fluorine coating layer 30 is approximately 45.13mm. However, the laser treatment area (mm 2 ) of the main structure 20 with the fluorine coating layer 30 is The corrosion area (mm ² ) of the treated surface 22b is only about 19.4mm.

In addition, this creation has also been tested by plasma etching, and the results show that under the same etching conditions (CHF ₃ : Ar is 1:1, 60 minutes, the etching rate of the oxide is 750nm/30min), the The creative fluorine coating layer 30 indeed has better resistance to plasma etching than the laser-treated surface 22b (anodized aluminum material) of the main structure 20 . As far as the thermal stability test (Thermogravimetric Analyzer, TGA test) is concerned, in a test environment with a heating rate of 5 degrees Celsius/minute and a test atmosphere of _N2 , the weight of the fluorine coating layer 30 of the present invention is within the test temperature range ( (600 degrees Celsius), all showed a steady and slow decrease, and no sudden weight changes occurred, indicating that the fluorine coating layer 30 of the anti-sediment component 10 of the invention did not crack.

The process performed by the process equipment 100 is, for example, a semiconductor process. For example, the process performed by the process equipment 100 is an atomic layer deposition (ALD) process, and the process material is titanium tetrachloride (TiCl ₄ ). The main structure 20 of the anti-sediment component 10 is, for example, a fluid delivery pipe, but is not limited to this. For example, the process performed by the process equipment 100 is a metal-organic chemical vapor deposition (MOCVD) process, and the process material is a process gas or a process waste gas. The main structure 20 of the anti-sediment component 10 is, for example, the outlet of a vacuum pump. management, but not limited to this. For example, the process performed by the process equipment 100 is an aluminum pad (Al-pad) process, and the process material is a process gas reactant or a process waste gas, such as N ₂ , O ₂ , Ar, SF ₆ , He, A group consisting of HBr, CF ₄ , CH ₄ , Cl ₂ , BCl ₃ and CHF ₃ , in which the main structure 20 of the anti-sediment component 10 is, for example, a pump component and an outlet pipe with a flow-guiding spiral groove, but is not limited to this. . The anti-sediment components with laser surface treatment of this creation have been tested in practice and have good results in the above-mentioned processes. For example, in the aluminum pad (Al-pad) process, the anti-sediment components of this creation can extend by about 20%. The maintenance cycle can reduce the funds and manpower required for frequent maintenance.

To sum up, the anti-sediment component with laser surface treatment of this invention has the following advantages:

(1) By performing laser surface treatment on the initial surface of the main structure of the vacuum component, a laser-treated surface with a plurality of microstructures can be formed, thereby increasing hydrophilicity and roughness, which is helpful for subsequent The fluorine coating layer is covered on the microstructure.

(2) By coating the laser-treated surface of the vacuum component with a high-hardness fluorine coating layer as an anti-deposition surface, the vacuum component can be prevented from being scratched by impact from particles and other process substances.

(3) By coating the laser-treated surface of the vacuum components with a high contact angle fluorine coating layer as an anti-deposition surface, the vacuum components can be prevented from depositing and achieve self-cleaning and easy-to-clean effects.

(4) The fluorine coating layer has good adhesion to the main structure with a laser-treated surface, which can avoid peeling off during the manufacturing process.

(5) By providing anti-deposition components using a fluorine coating layer as an anti-deposition surface, money and manpower for frequent maintenance can be saved.

The above is only illustrative and not restrictive. Any equivalent modifications or changes that do not depart from the spirit and scope of this creation shall be included in the appended patent application scope.

10: Anti-sediment parts

20:Main structure

22c: Anti-deposition surface

27:Microstructure

30: Fluorine coating layer

110:Process material

θ: contact angle

Claims (16)

An anti-deposition component with laser surface treatment. The anti-deposition component contacts a process substance used or emitted when a process equipment is performing a process in a vacuum environment, including: A main structure, wherein at least one initial surface of the main structure is subjected to a laser surface treatment step using a laser to become a laser-treated surface having a plurality of microstructures; and A fluorine coating layer, the fluorine coating layer covers the plurality of microstructures on the laser-treated surface of the main structure, thereby serving as an anti-deposition surface of the main structure, wherein the initial surface of the main structure The laser-treated surface is a hydrophilic surface, the hydrophilicity of the laser-treated surface is higher than the hydrophilicity of the original surface, and the anti-deposition surface is a hydrophobic surface, so that the anti-deposition surface is compared with the main structure The initial surface and the laser-treated surface have a higher contact angle with the process material. The anti-deposition component with laser surface treatment as described in claim 1, wherein the fluorine coating layer is coated on the laser-treated surface of the main structure, so that the fluorine coating layer covers the On the plurality of microstructures of the main structure. The anti-deposition component with laser surface treatment as described in claim 1, wherein the fluorine coating layer conformally covers the plurality of microstructures of the main structure. The anti-deposition component with laser surface treatment as described in claim 1, wherein the initial surface of the main structure is irradiated by the laser with an energy density to form the laser-treated surface with the plurality of microstructures. , where the energy density ranges from 0.01 W/cm ² to 110 W/cm ² . The anti-deposition component with laser surface treatment as described in claim 1, wherein the scanning speed of the laser ranges from 50 mm/s to 100 mm/s, and the scanning frequency of the laser ranges from 10 kHz to 40 kHz, the pulse width of the laser ranges from 20 ns to 200 ns, and the laser scanning pitch ranges from 10 µm to 200 µm, thereby forming the plurality of microstructures on the main structure. The anti-deposit component with laser surface treatment as described in claim 1, wherein the power of the laser ranges from 10 watts to 100 watts, and the wavelength of the laser ranges from 380 nm to 1400 nm, thereby forming the complex number microstructure on the main structure. The anti-deposition component with laser surface treatment as described in claim 1, wherein the main structure is made of stainless steel. The anti-deposition component with laser surface treatment as described in claim 1, wherein the main structure is an outlet pipe fitting of the process equipment or a pipe fitting or component of a peripheral equipment of the process equipment. The anti-deposition component with laser surface treatment as described in claim 1, wherein the anti-deposition surface is located on a part of the main structure, and the part is an inclined part, a flat part or a curved part of the main structure. . The anti-deposition component with laser surface treatment as described in claim 1, wherein the anti-deposition surface has higher acid corrosion resistance and plasma etching resistance than the original surface of the main structure. The anti-deposition component with laser surface treatment as described in claim 1, wherein the anti-deposition surface has a hardness similar to or higher than that of the original surface of the main structure. The anti-deposition component with laser surface treatment as claimed in claim 1, wherein the surface roughness of the laser-treated surface having the plurality of microstructures is higher than the surface roughness of the original surface of the main structure. The anti-deposition component with laser surface treatment as claimed in claim 12, wherein the initial surface of the main structure is a polished surface that has undergone a polishing process. The anti-sediment component with laser surface treatment as described in claim 1, wherein the composition of the fluorine coating layer is 0.01~20%wt of fluorocarbons and 5~5% of alkoxysilanes. It is composed of 50wt, catalytic additives accounting for 0.01%~20%wt and solvent accounting for 10~90%wt. The anti-deposition component with laser surface treatment as described in claim 1, wherein the process performed by the process equipment is an atomic layer deposition (ALD) process, an organic metal chemical vapor deposition (MOCVD) process or an aluminum Pad (Al-pad) process. The anti-deposition component with laser surface treatment as described in claim 1, wherein the contact angle of the anti-deposition surface ranges from 99 degrees to 150.2 degrees.

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