TWM641442U - High Power Semiconductor Laser System - Google Patents

High Power Semiconductor Laser System Download PDF

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TWM641442U
TWM641442U TW112200397U TW112200397U TWM641442U TW M641442 U TWM641442 U TW M641442U TW 112200397 U TW112200397 U TW 112200397U TW 112200397 U TW112200397 U TW 112200397U TW M641442 U TWM641442 U TW M641442U
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blue
output
laser
optical fiber
fiber
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王啓倫
李鴻生
林師緯
歐思村
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騰錂鐳射股份有限公司
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Abstract

一種高功率半導體雷射系統,包含複數組高亮度藍光雷射模組,其個 別之高亮度藍光雷射模組具有7顆以上之藍光雷射二極體以激發藍光光束 ,並經由快軸、慢軸準直鏡、反射鏡與聚焦鏡的作用,使個別之藍光光束 被準直、合併並耦合至藍光光纖中以發射一藍光雷射光束;一光纖合束器 ,其輸入端嵌入該複數組藍光光纖,其輸出端嵌入一輸出光纖;其中, 該光纖合束器係將該複數組藍光光纖所發出的藍光雷射光束合束成一輸 出光束,並耦合至該輸出光纖的纖核中,且該輸出光束的BPP(束流參數 乘積)將介於20〜50 mm x mrad,以及功率將可達200〜1500W之間;本 創作相較其他光纖合束或空間合束的雷射系統,可達到更佳的光束品質, 且兼有優異機械穩定性的優點。 A high-power semiconductor laser system, including complex groups of high-brightness blue-ray laser modules, one In addition, the high-brightness blue-ray laser module has more than 7 blue-ray laser diodes to excite the blue-ray beam , and through the effects of fast axis, slow axis collimating mirrors, reflectors and focusing mirrors, the individual blue light beams are collimated, combined and coupled into the blue optical fiber to emit a blue laser beam; a fiber combiner, Its input end is embedded in the complex array of blue optical fibers, and its output end is embedded in an output optical fiber; wherein, the fiber beam combiner combines the blue laser beams emitted by the complex array of blue optical fibers into an output beam, and couples it to the output In the fiber core of the optical fiber, and the BPP (beam parameter product) of the output beam will be between 20~50 mm x mrad, and the power will reach between 200~1500W; compared with other optical fiber combining or space combining Beam laser system can achieve better beam quality and has the advantages of excellent mechanical stability.

Description

高功率半導體雷射系統High Power Semiconductor Laser System

本創作係有關一種雷射系統,尤指應用光纖合束器以結合複數組高亮度藍光雷射模組,並據以產生百瓦級藍光雷射輸出的一種高功率半導體雷射系統。This work is related to a laser system, especially a high-power semiconductor laser system that uses an optical fiber combiner to combine multiple groups of high-brightness blue-ray laser modules, and thereby produces a hundred-watt-level blue-ray laser output.

按,半導體雷射一直有光束品質較差,與單一共振腔輸出功率受限等問題;是故若要得到更大的雷射功率,且須保持光束品質,則需要仰賴高密度的合束技術。先前本創作人所創作的高亮度模組技術,即是以6〜8顆5W雷射,進行高密度空間合束,據以達到功率30W、BPP達6 mm x mrad的藍光雷射模組;不過欲以此技術擴展至100W以上,將會面臨光學機構過度龐大與機構過於複雜的問題,尤其高密度空間合束的做法極易機械變形而導致穩定性不佳的後果。因此,以光纖合束來取代空間合束,進而將藍光雷射提升至100W以上,應該是一個比較簡單可行的解決方案。Press, semiconductor lasers have always had problems such as poor beam quality and limited output power of a single resonator; therefore, in order to obtain greater laser power and maintain beam quality, it is necessary to rely on high-density beam combining technology. The previous high-brightness module technology created by the author is to use 6~8 5W lasers to combine high-density beams in space, so as to achieve a blue-ray laser module with a power of 30W and a BPP of 6 mm x mrad; However, if this technology is to be expanded to more than 100W, the optical mechanism will be too large and the mechanism is too complicated, especially the method of high-density spatial beam combining is very easy to be mechanically deformed, resulting in poor stability. Therefore, it should be a relatively simple and feasible solution to replace spatial beam combining with optical fiber beam combining to increase the blue laser to more than 100W.

次按,一般雷射光束的品質狀態可用光束參數乘積beam parame ter product(BPP)來衡量,其中,BPP的數值係由雷射光束發散角α與雷射光束最窄點半徑R的乘積來取得;因此,BPP的數值不但可量化雷射光束的品質,同時也可以衡量雷射光束聚焦到一個小點的程度。 Click once, the quality status of the general laser beam can be multiplied by the beam parameter beam parameter ter product (BPP), where the value of BPP is obtained by the product of the divergence angle α of the laser beam and the radius R of the narrowest point of the laser beam; therefore, the value of BPP can not only quantify the quality of the laser beam, but also It is also a measure of how well the laser beam is focused to a small spot.

傳統上,光纖合束在高功率紅外雷射的應用已相當普遍,但其輸出的BPP通常很高,例如一般紅外線半導體雷射使用的合束器,其輸出光纖的BPP皆大於90 mm x mrad,且一般合束器使用的光纖,在藍光波段的衰減相當大,通常吸收率高達45dB/Km,此種現象將浪費許多寶貴的雷射能量,同時降低整體雷射系統的能量轉換效率。Traditionally, fiber combining has been widely used in high-power infrared lasers, but its output BPP is usually very high. For example, the BPP of the output fiber of the beam combiner used in general infrared semiconductor lasers is greater than 90 mm x mrad , and the optical fiber used in the general beam combiner has a considerable attenuation in the blue light band, and the absorption rate is usually as high as 45dB/Km. This phenomenon will waste a lot of precious laser energy and reduce the energy conversion efficiency of the overall laser system.

是以,如何應用光纖合束的技術以發展出百瓦級功率以及較低BPP值的藍光雷射,便成為本創作人所要積極思考的課題。Therefore, how to use the technology of fiber optic beam combining to develop a blue-ray laser with hundreds of watts of power and a lower BPP value has become a topic that the creators have to actively think about.

緣是,本創作之主要目的,在提供一種應用光纖合束以結合複數組高亮度藍光雷射模組,並據以產生百瓦級功率與較低BPP值藍光雷射輸出的一種高功率半導體雷射系統。The reason is that the main purpose of this creation is to provide a high-power semiconductor that uses optical fiber combining to combine multiple groups of high-brightness blue-ray laser modules, and to generate hundreds of watts of power and lower BPP value blue-ray laser output. laser system.

為達上述目的,本創作所採取的手段,包括複數組高亮度藍光雷射模組,藉由與其對應之複數組藍光光纖,據以發出複數組藍光雷射光束;一光纖合束器,其輸入端嵌入該複數組藍光光纖,其輸出端嵌入一輸出光纖;其中,該光纖合束器係將該複數組藍光光纖所發出的複數組藍光雷射光束合束成一輸出光束,並耦合至該輸出光纖的纖核中,且該輸出光束的BPP(束流參數乘積)介於20〜50 mm x mrad,功率則可達200〜1500W之間。In order to achieve the above purpose, the means adopted in this creation include multiple sets of high-brightness blue-ray laser modules, which emit multiple sets of blue-ray laser beams through corresponding sets of blue-ray optical fibers; an optical fiber combiner, whose The input end is embedded with the plurality of sets of blue-ray optical fibers, and the output end is embedded with an output optical fiber; wherein, the optical fiber combiner combines the plurality of sets of blue-ray laser beams emitted by the plurality of sets of blue-ray optical fibers into an output beam, and couples it to the In the core of the output optical fiber, and the BPP (beam parameter product) of the output beam is between 20-50 mm x mrad, the power can reach between 200-1500W.

依據前揭特徵,本創作中個別該高亮度藍光雷射模組,具有至少7顆以上之藍光雷射二極體,以個別激發一波長為400nm〜670nm之藍光光束,至少7枚之快軸準直鏡、慢軸準直鏡與反射鏡,係個別依序置於該藍光光束的光路上,使該個別之藍光光束經過各該快軸準直鏡、各該慢軸準直鏡分別準直,再經各該反射鏡的反射,進而在空間合併成該藍光雷射光束;以及一聚焦鏡,用以將該藍光雷射光束耦合至該藍光光纖之纖核中。According to the characteristics disclosed above, the individual high-brightness blue laser modules in this invention have at least 7 blue laser diodes to individually excite a blue light beam with a wavelength of 400nm~670nm, and at least 7 fast axes The collimating mirror, the slow axis collimating mirror and the reflecting mirror are individually and sequentially placed on the optical path of the blue light beam, so that the individual blue light beam passes through each of the fast axis collimating mirrors and each of the slow axis collimating mirrors respectively collimates Straight, and then reflected by each of the mirrors, and then merged into the blue laser beam in space; and a focusing mirror, used to couple the blue laser beam to the core of the blue optical fiber.

依據前揭特徵,本創作中該藍光雷射光束,其波長將介於360nm〜530nm,功率達30W,以及BPP(束流參數乘積)則可達6 mm x mrad。According to the characteristics disclosed above, the wavelength of the blue laser beam in this creation will be between 360nm ~ 530nm, the power can reach 30W, and the BPP (beam parameter product) can reach 6 mm x mrad.

依據前揭特徵,本創作中該光纖合束器的輸入端係嵌入7〜19組藍光光纖。According to the features disclosed above, the input end of the fiber combiner in this creation is embedded with 7 to 19 groups of blue optical fibers.

依據前揭特徵,本創作中該輸出光纖具有直徑100μm之纖核及300μm之包層。According to the characteristics disclosed above, the output fiber in this invention has a core with a diameter of 100 μm and a cladding with a diameter of 300 μm.

藉助前揭特徵,本創作「高功率半導體雷射系統」,具有如下之效益: (1) 本創作係應用複數組高亮度藍光雷射模組作為合束光束的光 源,其中,個別之高亮度藍光雷射模組具有至少7顆以上之藍光雷射二 極體,以激發一波長為400nm〜670nm之藍光光束,並經由快軸、慢軸準 直鏡、反射鏡與聚焦鏡的作用,使個別之藍光光束準直、合併並耦合至藍 光光纖中以發射一藍光雷射光束;而個別藍光雷射光束之波長將介於 360nm〜530nm,功率達30W,以及BPP(束流參數乘積)值可達6 mm x mrad。 (2) 本創作係應用光纖合束器,嵌入7〜19組藍光光纖,使其發射 的藍光雷射光束合併成一輸出光束;且該輸出光束的功率可達200〜 1500W之間、以及BPP(束流參數乘積)值將介於20〜50 mm x mrad;而 該輸出光束相較其他光纖合束或空間合束的雷射系統,可達到更佳的光束 品質,且兼有優異機械穩定性的優點。 With the help of the previously disclosed features, this creation "high-power semiconductor laser system" has the following benefits: (1) In this creation, complex groups of high-brightness blue laser modules are used as the light beams of combined beams source, wherein, individual high-brightness blue-ray laser modules have at least seven or more blue-ray lasers Polar body, to excite a blue light beam with a wavelength of 400nm~670nm, and collide through the fast axis and slow axis The functions of straight mirror, reflecting mirror and focusing mirror make the individual blue light beams collimate, merge and couple into the blue optical fiber to emit a blue laser beam; and the wavelength of the individual blue laser beam will be between 360nm~530nm, power up to 30W, and BPP (beam parameter product) value up to 6 mm x mrad. (2) This creation uses a fiber optic combiner to embed 7 to 19 groups of blue optical fibers to make it emit The blue laser beams are combined into an output beam; and the power of the output beam can reach 200~ Between 1500W, and the BPP (beam parameter product) value will be between 20~50 mm x mrad; and Compared with other fiber-combined or space-combined laser systems, the output beam can achieve better beam quality and has the advantages of excellent mechanical stability.

以下係藉由特定的具體實施例說明本新型之實施方式,熟習此技藝之人士可由本說明書所揭示之內容輕易地了解本新型之其他優點與效。本新型亦可藉由其他不同的具體實施例加以施行或應用,本說明書中的各項細節亦可基於不同觀點與應用,在不悖離本新型之精神下進行各種修飾與變更。The implementation of the present invention is described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied by other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

首先,請參閱圖1所示,為本創作高功率半導體雷射系統100之組合結構,包括複數組之高亮度藍光雷射模組10,藉由與其對應複數組之藍光光纖20,據以發出複數組之藍光雷射光束L10;一光纖合束器30,其輸入端31嵌入該複數組之藍光光纖20,其輸出端32嵌入一輸出光纖40;其中,該光纖合束器30係將該複數組之藍光光纖20所發出複數組之藍光雷射光束L10合束成一輸出光束L30,並耦合至該輸出光纖40的纖核中;再者,本創作中該輸出光纖40將具有直徑100μm之纖核及300μm之包層,以及該光纖合束器30的輸入端31計嵌入7〜19組之藍光光纖20,而該輸出光束L30的BPP(束流參數乘積)將介於20〜50 mm x mrad,其功率則可達200〜1500W之間。First of all, please refer to FIG. 1 , which is the combined structure of the high-power semiconductor laser system 100 created in this invention, including a complex set of high-brightness blue-ray laser modules 10, which emit light through corresponding sets of blue-ray optical fibers 20. The blue-ray laser light beam L10 of complex group; An optical fiber combiner 30, its input end 31 is embedded in the blue-ray optical fiber 20 of this complex group, and its output end 32 is embedded in an output optical fiber 40; Wherein, this optical fiber combiner 30 is the The multiple sets of blue laser beams L10 emitted by the multiple sets of blue optical fibers 20 are combined into an output beam L30, and coupled into the core of the output optical fiber 40; moreover, the output optical fiber 40 will have a diameter of 100 μm in this creation. The core and the cladding of 300 μm, and the input end 31 of the optical fiber combiner 30 are embedded with 7~19 groups of blue optical fibers 20, and the BPP (beam parameter product) of the output beam L30 will be between 20~50 mm x mrad, its power can reach between 200~1500W.

圖2〜4所示,為本創作中高亮度藍光雷射模組10之結構,其具 有至少7顆以上之藍光雷射二極體11,以個別激發一波長為400nm〜670nm之藍光光束L11,至少7枚之快軸準直鏡12、慢軸準直鏡13與反射鏡14,係個別依序置於該藍光光束L11的光路上,使該個別之藍光光束L11經過各該快軸準直鏡12、各該慢軸準直鏡13而被準直,再經各該反射鏡14的反射,進而在空間合併成該藍光雷射光束L10;以及一聚焦鏡15,用以將該藍光雷射光束L10耦合至該藍光光纖20之纖核中。本創作中之高亮度藍光雷射模組10中,各個藍光雷射二極體11之間的水平方向,係相互密合而無間隙,如圖3所示,且個別之快軸準直鏡12、慢軸準直鏡13與反射鏡14,可單獨針對該藍光雷射二極體11所發出藍光光束L11的光路狀態進行位置與角度之調整;同時,亦可針對個別藍光光束L11所合併成該藍光雷射光束L10的光路狀態,將個別藍光雷射二極體11之間的垂直間隙G調整至最小,如圖4所示;因此,本創作中高亮度藍光雷射模組10所發射的藍光雷射光束L10,其波長介於360nm〜530nm,功率將達30W,以及BPP(束流參數乘積)則可達6 mm x mrad。 Shown in Fig. 2~4, it is the structure of high brightness blue light laser module 10 in this creation, it has There are at least 7 blue laser diodes 11 to individually excite a blue light beam L11 with a wavelength of 400nm~670nm, at least 7 fast-axis collimating mirrors 12, slow-axis collimating mirrors 13 and reflective mirrors 14, It is placed on the optical path of the blue light beam L11 in sequence, so that the individual blue light beam L11 is collimated through each of the fast axis collimating mirrors 12 and each of the slow axis collimating mirrors 13, and then through each of the reflecting mirrors 14, and then combined into the blue laser beam L10 in space; In the high-brightness blue-ray laser module 10 in this creation, the horizontal direction between each blue-ray laser diode 11 is close to each other without gaps, as shown in Figure 3, and individual fast-axis collimating mirrors 12. The slow-axis collimating mirror 13 and the reflector 14 can individually adjust the position and angle of the light path state of the blue light beam L11 emitted by the blue laser diode 11; at the same time, they can also be combined for individual blue light beams L11 To achieve the optical path state of the blue laser beam L10, the vertical gap G between the individual blue laser diodes 11 is adjusted to the minimum, as shown in Figure 4; therefore, the high brightness blue laser module 10 in this creation The blue laser beam L10 of the company has a wavelength of 360nm~530nm, a power of 30W, and a BPP (beam parameter product) of 6 mm x mrad.

本創作的實施例中係採用19x1的光纖合束系統,請參閱圖5〜6所示;圖式中顯示其輸入端31嵌入19組之藍光光纖20,而輸出端32則嵌入一輸出光纖40;其中,19組藍光光纖20所發出之藍光雷射光束L10在光纖合束器30中合束成一輸出光束L30,並耦合至該輸出光纖40的纖核中;該輸出光束L30的BPP(束流參數乘積)將介於20〜50 mm x mrad,且功率可達200〜1500W之間。本創作更進一步利用高OH的輸出光纖40,則該輸出光束L30的能量效率將可達5%的增幅。In the embodiment of this creation, the fiber combining system of 19x1 is adopted, please refer to shown in Fig. 5~6; Show that its input end 31 is embedded in blue light optical fiber 20 of 19 groups in the figure, and output end 32 then is embedded in an output optical fiber 40 ; Wherein, the blue laser beam L10 that 19 groups of blue light optical fibers 20 send is bundled into an output beam L30 in the fiber beam combiner 30, and is coupled in the fiber core of this output optical fiber 40; The BPP (bundle of the output beam L30 Flow parameter product) will be between 20~50 mm x mrad, and the power can reach between 200~1500W. In this invention, the output optical fiber 40 with high OH is further utilized, and the energy efficiency of the output beam L30 can be increased by 5%.

本創作係應用複數組高亮度藍光雷射模組10作為合束光束的光 源,其中,個別之高亮度藍光雷射模組10具有至少7顆以上之藍光雷射二 極體11,以激發一波長為400nm〜670nm之藍光光束L11,並經由快軸、慢 軸準直鏡12/13、反射鏡14與聚焦鏡15的作用,使個別之藍光光束L11被 準直、合併並耦合至藍光光纖20中以發射一藍光雷射光束L10;而個別藍 光雷射光束L10之波長將介於360nm〜530nm,功率達30W,以及BPP(束流 參數乘積)值可達6 mm x mrad。再者,本創作係應用光纖合束器30,嵌 入7〜19組藍光光纖20,使其發射的藍光雷射光束L10合併成一輸出光束 L30;且該輸出光束L30的功率可達200〜1500W之間、以及BPP(束流參數 乘積)值將介於20〜50 mm x mrad;而該輸出光束L30相較其他光纖合束 或空間合束的雷射系統,可達到更佳的光束品質,且兼有優異機械穩定性 的優點。 In this creation, complex groups of high-brightness blue-ray laser modules 10 are used as the light beams of combined beams. source, wherein the individual high-brightness blue-ray laser module 10 has at least seven or more blue-ray lasers The polar body 11 is used to excite a blue light beam L11 with a wavelength of 400nm~670nm, and through the effects of the fast axis and slow axis collimating mirrors 12/13, reflecting mirror 14 and focusing mirror 15, the individual blue light beam L11 is collimated , combined and coupled to the blue optical fiber 20 to emit a blue laser beam L10; and the wavelength of the individual blue laser beam L10 will be between 360nm~530nm, the power reaches 30W, and the BPP (beam parameter product) value can reach 6 mm x mrad. Furthermore, the invention uses a fiber combiner 30 to embed 7 to 19 groups of blue optical fibers 20, so that the emitted blue laser beam L10 is combined into an output beam L30; and the power of the output beam L30 can reach more than 200 to 1500W Between, and BPP (beam parameter product) value will be between 20 ~ 50 mm x mrad; and the output beam L30 can achieve better beam quality than other laser systems with optical fiber combining or space combining, and Combined with the advantages of excellent mechanical stability.

綜上所述,本創作所揭示之構造,為昔所無,且確能達到功效之增進,並具可供產業利用性,完全符合新型專利要件,祈請 鈞局核賜專利,以勵創新,無任德感。To sum up, the structure disclosed in this creation is unprecedented, and it can indeed achieve the improvement of efficacy, and is available for industrial use. It fully meets the requirements of new patents. I pray that the Jun Bureau will grant a patent to encourage innovation. , no sense of morality.

惟,上述所揭露之圖式、說明,僅為本創作之較佳實施例,大凡熟悉此項技藝人士,依本案精神範疇所作之修飾或等效變化,仍應包括在本案申請專利範圍內。However, the diagrams and descriptions disclosed above are only the preferred embodiments of this creation, and modifications or equivalent changes made by those who are familiar with this art according to the spirit of this case should still be included in the scope of this patent application.

10:高亮度藍光雷射模組 11:藍光雷射二極體 12:快軸準直鏡 13:慢軸準直鏡 14:反射鏡 15:聚焦鏡 20:藍光光纖 30:光纖合束器 31:輸入端 32:輸出端 40:輸出光纖 100:高功率半導體雷射系統 L10:藍光雷射光束 L11:藍光光束 L30:輸出光束 G:垂直間隙 10: High brightness blue laser module 11:Blue laser diode 12: Fast axis collimating mirror 13: Slow axis collimating mirror 14: Mirror 15: Focusing mirror 20: Blu-ray optical fiber 30: Fiber combiner 31: input terminal 32: output terminal 40: output fiber 100: High power semiconductor laser system L10: Blu-ray laser beam L11: Blue light beam L30: output beam G: vertical gap

圖1係本創作高功率半導體雷射系統之組合結構示意圖。 圖2係本創作中高亮度藍光雷射模組之組合結構示意圖。 圖3係本創作中高亮度藍光雷射模組之組合結構上視圖。 圖4係本創作中高亮度藍光雷射模組之二極體排列側視圖。 圖5係本創作中光纖合束器輸入端之結構剖視圖。 圖6係本創作中光纖合束器輸出端之結構剖視圖。 Figure 1 is a schematic diagram of the combined structure of the high-power semiconductor laser system of this invention. Figure 2 is a schematic diagram of the combined structure of the high-brightness blue-ray laser module in this creation. Figure 3 is the top view of the combined structure of the high-brightness blue-ray laser module in this creation. Figure 4 is a side view of the diode arrangement of the high-brightness blue-ray laser module in this creation. Fig. 5 is the structural cross-sectional view of the input end of the optical fiber combiner in this creation. Fig. 6 is the structural sectional view of the output end of the optical fiber combiner in this creation.

10:高亮度藍光雷射模組 10: High brightness blue laser module

20:藍光光纖 20: Blu-ray optical fiber

30:光纖合束器 30: Fiber combiner

31:輸入端 31: input terminal

32:輸出端 32: output terminal

40:輸出光纖 40: output fiber

100:高功率半導體雷射系統 100: High power semiconductor laser system

L10:藍光雷射光束 L10: Blu-ray laser beam

L30:輸出光束 L30: output beam

Claims (5)

一種高功率半導體雷射系統,包括: 複數組高亮度藍光雷射模組,藉由與其對應之複數組藍光光纖, 據以發出複數組藍光雷射光束; 一光纖合束器,其輸入端嵌入該複數組藍光光纖,其輸出端嵌入 一輸出光纖;其中,該光纖合束器係將該複數組藍光光纖所發出的複數 組藍光雷射光束合束成一輸出光束,並耦合至該輸出光纖的纖核中,且 該輸出光束的BPP(束流參數乘積)介於20〜50 mm x mrad,功率則可達 200〜1500W之間。 A high power semiconductor laser system comprising: Multiple arrays of high-brightness blue-ray laser modules, with corresponding arrays of blue-ray optical fibers, Based on this, complex groups of blue laser beams are emitted; An optical fiber beam combiner, the input end of which is embedded in the complex array of blue optical fibers, and the output end is embedded in An output optical fiber; wherein, the optical fiber combiner is the complex number emitted by the complex group of blue optical fibers A group of blue laser beams are combined into an output beam and coupled into the core of the output fiber, and The BPP (beam parameter product) of the output beam is between 20~50 mm x mrad, and the power can reach Between 200~1500W. 如申請專利範圍第1項所述之高功率半導體雷射系統,其中,個別該高亮度藍光雷射模組,具有至少7顆以上之藍光雷射二極體,以個別激發一波長為400nm〜670nm之藍光光束,至少7枚之快軸準直鏡、慢軸準直鏡與反射鏡,係個別依序置於該藍光光束的光路上,使該個別之藍光光束經過各該快軸準直鏡、各該慢軸準直鏡分別準直,再經各該反射鏡的反射,進而在空間合併成該藍光雷射光束;以及一聚焦鏡,用以將該藍光雷射光束耦合至該藍光光纖之纖核中。The high-power semiconductor laser system as described in Item 1 of the scope of the patent application, wherein each of the high-brightness blue laser modules has at least 7 or more blue laser diodes, which are individually excited with a wavelength of 400nm~ 670nm blue light beam, at least 7 fast-axis collimating mirrors, slow-axis collimating mirrors and reflectors are placed on the optical path of the blue light beam in sequence, so that the individual blue light beams are collimated through the fast axes Mirror, each of the slow-axis collimating mirrors are collimated separately, and then combined into the blue laser beam in space after being reflected by each of the mirrors; and a focusing mirror is used to couple the blue laser beam to the blue light In the core of the optical fiber. 如申請專利範圍第2項所述之高功率半導體雷射系統,其中,該藍光雷射光束,其波長將介於360nm〜530nm,功率達30W,以及BPP(束流參數乘積)則可達6 mm x mrad。As the high-power semiconductor laser system described in item 2 of the scope of patent application, wherein, the blue laser beam has a wavelength between 360nm~530nm, a power of 30W, and a BPP (beam parameter product) of up to 6 mm x mrad. 如申請專利範圍第1項所述之高功率半導體雷射系統,其中,該光纖合束器的輸入端係嵌入7〜19組藍光光纖。As the high-power semiconductor laser system described in item 1 of the scope of patent application, wherein, the input end of the fiber combiner is embedded with 7 to 19 groups of blue optical fibers. 如申請專利範圍第1項所述之高功率半導體雷射系統,其中,該輸出光纖具有直徑100μm之纖核及300μm之包層。The high-power semiconductor laser system as described in Item 1 of the scope of the patent application, wherein the output fiber has a core with a diameter of 100 μm and a cladding of 300 μm.
TW112200397U 2023-01-12 2023-01-12 High Power Semiconductor Laser System TWM641442U (en)

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