TWM638239U - Vertical wetting process device - Google Patents

Abstract

The invention provides a vertical wet process device, which includes a conveying mechanism, a horizontal track, a hanger and at least one sprinkler. The conveying mechanism includes a plurality of rollers arranged in parallel. The horizontal track is arranged above the conveying mechanism, and the horizontal track has a guiding channel. The hanger includes a frame and a plurality of fixtures arranged on the frame. These fixtures are arranged in two vertical rows at intervals. The hanger is carried on the rollers, and the top of the hanger is limited in the guide channel. . The sprinkler is arranged on one side of the conveying mechanism and is arranged towards the hanger. In this way, the process liquid adhering to the jig is prevented from flowing down to the center of the surface of the substrate held by the jig.

Description

Vertical wet process device

This creation is about substrate surface processing, especially a vertical wet process device.

Today's vertical wet process devices for substrate surface processing generally use a hanger to hang the substrate. The top of the hanger is equipped with a plurality of fixtures arranged in a row, and the substrate is suspended by the fixture clamping the top edge of the substrate. Hang in hanger. The hanger is conveyed through the sprayer, and the sprayer sprays the process liquid on the substrate to process the surface of the substrate. The process chemical solution adhering to the jig tends to flow vertically along the surface of the substrate, which makes the distribution of the process chemical solution adhering to the substrate surface uneven, thereby reducing the yield rate.

In view of this, the author of the present invention, aiming at the above-mentioned prior art, devoted himself to the research and cooperated with the application of theories, and tried his best to solve the above-mentioned problems, which became the goal of the author's improvement.

The invention provides a vertical wet process device, which includes a conveying mechanism, a horizontal track, a hanger and at least one sprinkler. The conveying mechanism includes a plurality of rollers arranged in parallel. The horizontal track is arranged above the conveying mechanism, and the horizontal track has a guiding channel. The hanger includes a frame and a plurality of fixtures arranged on the frame. These fixtures are arranged in two vertical rows at intervals. The hanger is carried on the rollers, and the top of the hanger is limited in the guide channel. . The sprinkler is arranged on one side of the conveying mechanism and is arranged towards the hanger.

In an embodiment of the present invention, the hanger includes a base, the base is arranged at the bottom of the frame and the base is carried on the rollers. The sides of each roller shaft are protrudingly provided with a bearing for carrying the base respectively. department. Each roller shaft is respectively provided with a pair of retaining walls, and the hanger can be limited between the pair of retaining walls. The bearing part is arranged between the pair of retaining walls. The base is pivotally connected to the frame.

In an embodiment of the present invention, the conveying mechanism includes a motor and a transmission shaft, the motor drives the transmission shaft, and the transmission shaft engages with each roller respectively. The two ends of the guide channel respectively have an expansion opening. The horizontal track includes a pair of parallel and spaced horizontal rods, and the guide channel is formed between the pair of horizontal rods. At each end of the horizontal track, the pair of horizontal rods are respectively offset and separated to form expansion openings. The hanger includes a pair of vertical poles arranged in parallel and spaced apart, a part of the clamps is disposed on one of the vertical poles, and the rest of the clamps are disposed on the other vertical pole.

In the vertical wet process device of this invention, the fixtures are arranged in vertical columns to limit the process liquid attached to the fixtures from dripping only on the edge of the substrate, so as to ensure that the center of the substrate is processed evenly, and the edge of the substrate is a waste area, so It can improve the process yield.

10: Substrate

100: conveying mechanism

110: roller shaft

111: bearing part

112: retaining wall

120: motor

130: drive shaft

200: horizontal track

201: Guide channel

202: Expansion mouth

210: horizontal bar

300: hanger

310: frame

311: Pole

320: fixture

330: base

400: Sprinkler

Fig. 1 is a three-dimensional schematic diagram of a vertical wet process device according to an embodiment of the present invention.

Fig. 2 is a side view of a vertical wet process device according to an embodiment of the invention.

Fig. 3 is a partially enlarged view of Fig. 2 .

Fig. 4 is another side view of the vertical wet process device of an embodiment of the invention.

Fig. 5 is a partially enlarged view of Fig. 4 .

Fig. 6 is a schematic diagram of another embodiment of the vertical wet process device of the present invention.

Fig. 7 is a schematic diagram of the use state of the vertical wet process device of the invention.

Referring to FIG. 1 to FIG. 5 , an embodiment of the present invention provides a vertical wet process device for vertical wet process surface treatment of a rectangular substrate 10 . The substrate 10 is rectangular, but the invention does not limit the form of the substrate 10 , for example, it can be a metal plate, a glass plate or a circuit board.

The wet process device of the present invention includes a conveying mechanism 100 , a horizontal track 200 , a hanger 300 and a sprinkler 400 .

The conveying mechanism 100 includes a plurality of rollers 110 arranged in parallel, and the rollers 110 are arranged in a row. Each roller shaft 110 is respectively provided with a pair of retaining walls 112 arranged at intervals. The conveying mechanism 100 includes a motor 120 and a transmission shaft 130 , the motor 120 drives the transmission shaft 130 , and the transmission shaft 130 engages with each roller shaft 110 respectively.

The horizontal track 200 is arranged above the conveying mechanism 100 and parallel to the row of roller shafts 110 . The horizontal track 200 has a guiding channel 201 . In this embodiment, the horizontal track 200 includes a pair of horizontal bars 210 arranged in parallel and spaced apart, and the guiding channel 201 is formed between the pair of horizontal bars 210 . Two ends of the guiding channel 201 respectively have an expansion opening 202 . Specifically, at each end of the horizontal track 200 , the pair of rods are respectively offset and separated to form expansion openings 202 .

The hanger 300 is used to hang the substrate 10. In this embodiment, the hanger 300 includes a frame body 310 and a plurality of clamps 320 arranged on the frame body 310. These clamps 320 are arranged in two vertical columns at intervals for clamping The two sides of the substrate 10 are opposite to each other. Specifically, the frame body 310 of the hanger 300 is provided with a pair of vertical poles 311 arranged in parallel and spaced apart, a part of the clamps 320 is disposed on one of the vertical poles 311, and the rest of the clamps 320 are disposed on the other. On the pole 311 , the clamps 320 are arranged in two vertical rows at intervals.

The hanger 300 is carried on the roller shafts 110, and the top of the hanger 300 is limited in the guide channel 201 of the horizontal track 200, and the bottom of the hanger 300 is limited by the pair of retaining walls of the conveying mechanism 100 112 , when the rollers 110 rotate, the hanger 300 can be pushed and transported by the rollers 110 . Guide channel 201 The two ends of the hanger have expansion openings 202 , and when the hanger 300 is placed into the guide channel 201 , it can be reversed by the expansion openings 202 to facilitate insertion. The specific configuration of the pair of retaining walls 112 and the bottom of the hanger 300 will be described in detail later.

In this implementation, the hanger 300 may include a base 330 disposed on the bottom of the frame body 310 and supported on the rollers 110 . Specifically, the base 330 is pivotally connected to the frame body 310 to prevent the frame body 310 from shaking during transportation. The sides of each roller shaft 110 are protrudingly provided with at least one bearing part 111 respectively, and the bearing part 111 surrounds the roller shaft 110 where it is located and is located between the pair of retaining walls 112 and can be used to carry the hanger 300 when the roller shaft 110 rotates. Base 330. In this implementation, a pair of carrying parts 111 is disposed between the pair of retaining walls 112 , but the present invention does not limit the number of carrying parts 111 .

The arrangement of the hanger 300 and the roller shaft 110 is not limited to the above-mentioned embodiment, and as shown in FIG.

Referring to FIGS. 2 , 4 , and 7 , the sprinkler 400 is disposed on one side of the conveying mechanism 100 and is disposed toward the hanger 300 . In this embodiment, a plurality of sprinklers 400 are provided, and these sprinklers 400 can be respectively arranged on two sides of the conveying mechanism 100 according to the requirements of the manufacturing process. The substrate 10 is suspended in the hanger 300 and the hanger 300 is pushed by the conveying mechanism 100 , and the hanger 300 is guided by the horizontal track 200 so that the substrate 10 passes through the sprinkler 400 . The sprayer 400 sprays the process chemical solution on the substrate 10 to process the surface of the substrate 10 . The jigs 320 are arranged in a vertical row to limit the process chemicals adhering to the jigs 320 from dripping only on the edge of the substrate 10, so as to ensure that the center of the substrate 10 is uniformly processed. The above-mentioned process liquid will not reduce the process yield, which improves the process yield compared with the existing technology.

The above descriptions are only preferred embodiments of this creation, and are not intended to limit the patent scope of this creation. Other equivalent changes that use the patent spirit of this creation should all fall within the patent scope of this creation.

10: Substrate

100: conveying mechanism

110: roller shaft

120: motor

130: drive shaft

200: horizontal track

201: Guide channel

202: Expansion mouth

210: horizontal bar

300: hanger

310: frame

311: Pole

320: fixture

330: base

Claims (11)

A vertical wet process device, comprising: a conveying mechanism, including a plurality of rollers arranged side by side; a horizontal track, arranged above the conveying mechanism, and the horizontal track has a guiding channel; a hanger, including a frame and a plurality of fixtures arranged on the frame body, the fixtures are arranged in two vertical rows at intervals, the hanger is carried on the rollers, and the top of the hanger is restricted in the guide channel; and At least one sprinkler is arranged on one side of the conveying mechanism and arranged toward the hanger. The vertical wet process device as claimed in claim 1, wherein the hanger includes a base, the base is arranged at the bottom of the frame and the base is carried on the rollers. The vertical wet processing device as claimed in claim 2, wherein a supporting portion for supporting the base is protruded from the side of each of the roller shafts. The vertical wet process device as claimed in claim 2, wherein each of the roller shafts is respectively provided with a pair of retaining walls, and the hanger can be restricted between the pair of retaining walls. The vertical wet process device as claimed in claim 4, wherein a bearing part for supporting the base is protruded from the side of each of the roller shafts, and the bearing part is arranged between the pair of retaining walls. The vertical wet process device as claimed in claim 2, wherein the base is pivotally connected to the frame. The vertical wet process device as claimed in claim 1, wherein the conveying mechanism includes a motor and a transmission shaft, the motor drives the transmission shaft, and the transmission shaft engages with the rollers respectively. The vertical wet processing device as claimed in Claim 1, wherein two ends of the guiding channel respectively have an expansion port. The vertical wet process device as claimed in claim 1, wherein the horizontal track includes a pair of horizontal bars arranged in parallel and spaced apart, and the guiding channel is formed between the pair of horizontal bars. The vertical wet process device as claimed in claim 9, wherein at each end of the horizontal track, the pair of horizontal rods are respectively offset and separated to form an expansion port. The vertical wet process device as described in Claim 1, wherein the hanger includes a pair of vertical poles arranged in parallel and spaced apart, a part of the clamps is disposed on one of the vertical poles, and the rest of the clamps Configure another pole.

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