TWM638000U - Gas detection system - Google Patents

Gas detection system Download PDF

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TWM638000U
TWM638000U TW111211249U TW111211249U TWM638000U TW M638000 U TWM638000 U TW M638000U TW 111211249 U TW111211249 U TW 111211249U TW 111211249 U TW111211249 U TW 111211249U TW M638000 U TWM638000 U TW M638000U
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gas
pipeline
valve
injection nozzle
analyzer
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TW111211249U
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Chinese (zh)
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李仁捷
陳煖妮
張正
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信紘科技股份有限公司
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Abstract

A gas detection system includes a cabinet, a pipeline module, a gas analyzer, a valve assembly and a control unit. The pipeline module is provided with a pipeline set, a gas inlet and an outlet, and the pipeline set is located in the cabinet and respectively connected to the gas inlet and the outlet. The gas inlet is used to inject a detected gas from the outside. The outlet is used to exhaust the detected gas. The gas analyzer is in the cabinet, and connected to the pipeline set to analyze the detected gas collected from the pipeline set. The valve assembly is on the pipeline set, and is used to reversibly cut off the connection between the gas inlet and the gas analyzer. The control unit is electrically connected to the valve assembly for electrically switching of the valve assembly. Through the system integration of the analyzer, the problem of repeated sampling and transferring to specific equipment is solved in the conventional technology, which not only saves the time for multiple testing and analysis, but also reduces the risk of gas leakage from the gas cylinder to be tested.

Description

氣體檢測系統 Gas detection system

本創作有關於一種檢測系統,尤指一種氣體檢測系統。The invention relates to a detection system, especially a gas detection system.

按,氣體檢測及分析用於偵測某些化學氣體之存在及濃度及判定其化學組合的重要手段。目前對於氣體檢測方式大多對待測氣瓶人工取樣之後,再以人工搬移至特定分析項目之分析設備,以進行氣體檢測及分析。According to, gas detection and analysis is an important means for detecting the existence and concentration of certain chemical gases and determining their chemical combination. At present, most of the gas detection methods are manually sampled from the gas cylinders to be tested, and then manually moved to the analysis equipment for specific analysis items for gas detection and analysis.

然而,在面對多種分析項目時,上述氣體檢測方式不僅需要每次重複取樣及搬移至特定分析設備,如此,需要耗費多次送測時間及分析時間,且對待測氣瓶之頻繁取樣也容易造成氣體洩漏之風險,相當耗時及不便。However, in the face of various analysis items, the above gas detection method not only needs to repeat the sampling each time and move to a specific analysis equipment, so it needs to spend multiple times of sending and analysis time, and it is also easy to take frequent samples of the gas cylinder to be tested. The risk of gas leakage is caused, which is time-consuming and inconvenient.

由此可見,上述技術顯然仍存在不便與缺陷,而有待加以進一步改良。因此,如何能有效地解決上述不便與缺陷,實屬當前重要研發課題之一,亦成爲當前相關領域亟需改進的目標。This shows that the above-mentioned technology obviously still has inconvenience and defective, and needs to be further improved. Therefore, how to effectively solve the above-mentioned inconveniences and defects is one of the current important research and development issues, and has become an urgent need for improvement in related fields.

本創作之一目的在於提供一種氣體檢測系統,用以解決以上先前技術所提到的困難。One purpose of the present invention is to provide a gas detection system to solve the difficulties mentioned above in the prior art.

本創作之一實施例提供一種氣體檢測系統。氣體檢測系統包含一櫃體、一管路模組、至少一氣體分析儀、一閥件總成及一控制單元。管路模組具有一管線組、一第一注氣嘴及一排氣口。管線組安裝於櫃體內,分別連接第一注氣嘴及排氣口。第一注氣嘴以供自外部注入一受測氣體,排氣口以供排出受測氣體。氣體分析儀安裝於櫃體內,接通管線組,用以分析自管線組取得之受測氣體。閥件總成包含至少一第一閥件。第一閥件安裝於管線組上,且介於第一注氣嘴與氣體分析儀之間,用以可回復地切斷第一注氣嘴與氣體分析儀的聯通。控制單元電連接第一閥件,用以控制第一閥件之開關。One embodiment of the present invention provides a gas detection system. The gas detection system includes a cabinet, a pipeline module, at least one gas analyzer, a valve assembly and a control unit. The pipeline module has a pipeline group, a first gas injection nozzle and an exhaust port. The pipeline group is installed in the cabinet and connected to the first gas injection nozzle and the exhaust port respectively. The first gas injection nozzle is used for injecting a test gas from the outside, and the exhaust port is used for discharging the test gas. The gas analyzer is installed in the cabinet and connected to the pipeline group to analyze the measured gas obtained from the pipeline group. The valve assembly includes at least one first valve. The first valve element is installed on the pipeline set and interposed between the first gas injection nozzle and the gas analyzer, and is used for reversibly cutting off the communication between the first gas injection nozzle and the gas analyzer. The control unit is electrically connected to the first valve part and is used for controlling the switch of the first valve part.

如此,透過以上各實施例之所述架構,本創作能夠將一或多種分析儀進行系統整合,如此,不僅能夠節省多次送測時間及分析時間,且亦可降低待測氣瓶造成氣體洩漏之風險。In this way, through the structures described in the above embodiments, this creation can integrate one or more analyzers into a system, which not only saves the time for multiple testing and analysis, but also reduces the gas leakage caused by the gas cylinder to be tested risk.

以上所述僅係用以闡述本創作所欲解決的問題、解決問題的技術手段、及其產生的功效等等,本創作之具體細節將在下文的實施方式及相關圖式中詳細介紹。The above description is only used to explain the problem to be solved by this creation, the technical means to solve the problem, and its effects, etc. The specific details of this creation will be introduced in detail in the following implementation methods and related drawings.

以下將以圖式揭露本創作之複數個實施例,為明確說明起見,許多實務上的細節將在以下敘述中一併說明。然而,應瞭解到,這些實務上的細節不應用以限制本創作。也就是說,在本創作各實施例中,這些實務上的細節是非必要的。此外,為簡化圖式起見,一些習知慣用的結構與元件在圖式中將以簡單示意的方式繪示之。A plurality of embodiments of the invention will be disclosed with diagrams below. For the sake of clarity, many practical details will be described together in the following description. However, it should be understood that these practical details should not be used to limit the present invention. That is, in the various embodiments of the present invention, these practical details are unnecessary. In addition, for the sake of simplifying the drawings, some well-known structures and components will be shown in a simple and schematic manner in the drawings.

第1圖為本創作之氣體檢測系統10的簡易示意圖。如第1圖所示,氣體檢測系統10包含一櫃體100、一管路模組200、一氣體分析儀600、一閥件總成700及一中控系統900。管路模組200具有一管線組210、一第一注氣嘴510及一排氣口560。第一注氣嘴510與排氣口560分別固設於櫃體100之表面,且管線組210固定於櫃體100內。管線組210之一端接通第一注氣嘴510,且另端接通排氣口560。第一注氣嘴510以供自外部注入一受測氣體,且排氣口560以供排出所述受測氣體。舉例來說,第一注氣嘴510以供接上一內含受測氣體之鋼瓶C或一外接氣管(圖中未示),且排氣口560以供接上一抽風設備V或外接氣管(圖中未示),本實施例中所述之受測氣體例如為氯化氫(HCl)、氯氣(Cl2)、氮氣(N2)、氧氣(O2)、氦(He)、氬(Ar)、六氟丁二烯(C4F6)、二氟甲烷(CH2F2)、氟甲烷(CH3F)、八氟環丁烷(C4F8)、三氟甲烷(CHF3)、氫氟酸(HF)、六氟化鎢(WF6)、二氯矽烷(SiH2Cl2)、甲矽烷(SiH4)等氣體,然而,本創作不限於此。Fig. 1 is a simplified schematic diagram of the gas detection system 10 of the present invention. As shown in FIG. 1 , the gas detection system 10 includes a cabinet 100 , a pipeline module 200 , a gas analyzer 600 , a valve assembly 700 and a central control system 900 . The pipeline module 200 has a pipeline set 210 , a first gas injection nozzle 510 and an exhaust port 560 . The first gas injection nozzle 510 and the exhaust port 560 are respectively fixed on the surface of the cabinet body 100 , and the pipeline set 210 is fixed inside the cabinet body 100 . One end of the pipeline set 210 is connected to the first gas injection nozzle 510 , and the other end is connected to the exhaust port 560 . The first gas injection nozzle 510 is used to inject a test gas from the outside, and the exhaust port 560 is used to discharge the test gas. For example, the first gas injection nozzle 510 is used to connect to a steel cylinder C containing the gas to be tested or an external gas pipe (not shown in the figure), and the exhaust port 560 is used to connect to a ventilation device V or an external gas pipe (not shown in the figure), the measured gas described in this embodiment is, for example, hydrogen chloride (HCl), chlorine (Cl2), nitrogen (N2), oxygen (O2), helium (He), argon (Ar), hexa Fluorobutadiene (C4F6), difluoromethane (CH2F2), fluoromethane (CH3F), octafluorocyclobutane (C4F8), trifluoromethane (CHF3), hydrofluoric acid (HF), tungsten hexafluoride (WF6 ), dichlorosilane (SiH2Cl2), monosilane (SiH4) and other gases, however, the invention is not limited thereto.

氣體分析儀600安裝於櫃體100內,且接通至管線組210之一部份。閥件總成700包含一前閥件710與一後閥件720。前閥件710安裝於管線組210上,介於第一注氣嘴510與氣體分析儀600之間,用以切斷或恢復第一注氣嘴510與氣體分析儀600的聯通。後閥件720安裝於管線組210上,介於排氣口560與氣體分析儀600之間,用以切斷或恢復排氣口560與氣體分析儀600彼此的聯通。The gas analyzer 600 is installed in the cabinet 100 and connected to a part of the pipeline set 210 . The valve assembly 700 includes a front valve 710 and a rear valve 720 . The front valve 710 is installed on the pipeline set 210 between the first gas injection nozzle 510 and the gas analyzer 600 for cutting off or restoring the communication between the first gas injection nozzle 510 and the gas analyzer 600 . The rear valve 720 is installed on the pipeline set 210 between the exhaust port 560 and the gas analyzer 600 for cutting off or restoring the communication between the exhaust port 560 and the gas analyzer 600 .

中控系統900包含一控制單元910、一邏輯電路920及一操作面板930。控制單元910電連接邏輯電路920及操作面板930,且控制單元910依據邏輯電路920之程式內容自動執行特定檢測程序,並透過操作面板930回報檢測結果。更具體地,控制單元910電連接前閥件710與後閥件720,用以分別控制前閥件710與後閥件720之開關。操作面板930電連接氣體分析儀600,用以透過控制單元910指示前閥件710與後閥件720之開關,以及將氣體分析儀600所輸出之分析數據傳至操作面板930之顯示螢幕或資料庫(圖中未示)中。舉例來說,中控系統900位於櫃體100上,然而,本創作不限於此。The central control system 900 includes a control unit 910 , a logic circuit 920 and an operation panel 930 . The control unit 910 is electrically connected to the logic circuit 920 and the operation panel 930 , and the control unit 910 automatically executes a specific detection program according to the program content of the logic circuit 920 , and reports the detection result through the operation panel 930 . More specifically, the control unit 910 is electrically connected to the front valve part 710 and the rear valve part 720 to control the opening and closing of the front valve part 710 and the rear valve part 720 respectively. The operation panel 930 is electrically connected to the gas analyzer 600, and is used to instruct the switch of the front valve 710 and the rear valve 720 through the control unit 910, and transmit the analysis data output by the gas analyzer 600 to the display screen or data of the operation panel 930 library (not shown in the figure). For example, the central control system 900 is located on the cabinet body 100, however, the present invention is not limited thereto.

如此,當氣體檢測系統10欲進行氣體分析程序時,透過上述程式內容自動執行,控制單元910能夠開啟上述前閥件710與後閥件720;接著,如方向D所示,將受測氣體從第一注氣嘴510引入管線組210內,並於通過氣體分析儀600之後,由氣體分析儀600分析自管線組210所取得之受測氣體,並將分析數據傳至中控系統900。In this way, when the gas detection system 10 intends to perform a gas analysis program, the control unit 910 can open the front valve 710 and the rear valve 720 through the automatic execution of the above program content; The first gas injection nozzle 510 is introduced into the pipeline set 210 , and after passing through the gas analyzer 600 , the gas analyzer 600 analyzes the measured gas obtained from the pipeline set 210 and transmits the analysis data to the central control system 900 .

反之,當氣體分析程序完成時,透過上述程式內容自動執行,控制單元910關閉上述前閥件710與後閥件720。故,受測氣體便被阻隔絕而無法被傳導至氣體分析儀600。然而,本創作不限於此,其他實施例中亦允許讓操作人員透過操作面板930手動指示控制單元910執行或終止上述氣體分析程序。Conversely, when the gas analysis program is completed, the control unit 910 closes the front valve 710 and the rear valve 720 through the automatic execution of the above program content. Therefore, the measured gas is blocked and cannot be conducted to the gas analyzer 600 . However, the present invention is not limited thereto. In other embodiments, the operator is also allowed to manually instruct the control unit 910 to execute or terminate the above-mentioned gas analysis program through the operation panel 930 .

此外,氣體檢測系統10包含一第一氣壓傳感器810及一流量控制元件860。第一氣壓傳感器810安裝於管線組210上,介於後閥件720與氣體分析儀600之間,用以感測管線組210的管內壓力。第一氣壓傳感器810更電連接操作面板930及控制單元910,並將第一氣壓傳感器810之感測結果顯示於操作面板930之顯示面板,然而,本創作不限於此。流量控制元件860安裝於管線組210上,用以因應第一氣壓傳感器810之感測結果,對應調整管線組210的管內壓力。In addition, the gas detection system 10 includes a first air pressure sensor 810 and a flow control element 860 . The first air pressure sensor 810 is installed on the pipeline set 210 between the rear valve 720 and the gas analyzer 600 for sensing the pressure inside the pipeline set 210 . The first air pressure sensor 810 is further electrically connected to the operation panel 930 and the control unit 910, and displays the sensing result of the first air pressure sensor 810 on the display panel of the operation panel 930, however, the invention is not limited thereto. The flow control element 860 is installed on the pipeline set 210 , and is used for adjusting the internal pressure of the pipeline set 210 in response to the sensing result of the first air pressure sensor 810 .

如此,透過流量控制元件860調整管線組210的管內壓力,氣體檢測系統10能夠讓受測氣體自動進樣至氣體分析儀600,讓氣體分析儀600維持穩定運作,從而節省多次送測時間及分析時間,且亦可降低待測氣瓶造成氣體洩漏之風險。In this way, by adjusting the internal pressure of the pipeline group 210 through the flow control element 860, the gas detection system 10 can allow the gas under test to be automatically sampled into the gas analyzer 600, so that the gas analyzer 600 can maintain stable operation, thereby saving multiple testing times And analysis time, and can also reduce the risk of gas leakage caused by the gas cylinder to be tested.

第2圖為本創作一實施例之氣體檢測系統11的管路架構圖。第3圖為第2圖之氣體檢測系統11的電子方塊圖。如第2圖與第3圖所示,本實施例之氣體檢測系統11與上述大致相同,其差異在於,本實施例之氣體檢測系統11能在氣體分析之前,進行自動沖吹置換、標準氣體基準點校正及檢量線校正,接著可依分析儀器需求同步或依序將同一氣體(如受測氣體)分別導入多種氣體分析儀600,以接受各自之檢測分析。藉由分析時環境氣氛控制,達到高準精確分析結果,從而降低人為操作誤差值,達到同一氣體多重分析之目的。FIG. 2 is a pipeline structure diagram of a gas detection system 11 according to an embodiment of the invention. FIG. 3 is an electronic block diagram of the gas detection system 11 in FIG. 2 . As shown in Figure 2 and Figure 3, the gas detection system 11 of this embodiment is roughly the same as the above, the difference is that the gas detection system 11 of this embodiment can perform automatic flushing, replacement, and standard gas before gas analysis. Base point calibration and calibration line calibration, and then the same gas (such as the gas to be measured) can be introduced into multiple gas analyzers 600 synchronously or sequentially according to the requirements of the analysis instrument, so as to accept their respective detection and analysis. By controlling the ambient atmosphere during analysis, Micro Motion can achieve accurate analysis results, thereby reducing the value of human error and achieving the purpose of multiple analysis of the same gas.

更具體地,在本實施例中,氣體檢測系統11之管線組210更包含一前段管路211、一後段管路212及多個(例如四個)分支管路213。前段管路211連接第一注氣嘴510。後段管路212連接排氣口560。這些分支管路213位於前段管路211與後段管路212之間,且每個分支管路213分別連通前段管路211及後段管路212。此外,氣體檢測系統11具有多個氣體分析儀600(例如四個)、多個第一前閥件731(例如四個)與多個第一後閥件732(例如四個)。每個分支管路213上皆安裝有其中一氣體分析儀600、第一前閥件731與第一後閥件732,且同一個分支管路213上之氣體分析儀600位於對應之第一前閥件731與第一後閥件732之間。More specifically, in this embodiment, the pipeline set 210 of the gas detection system 11 further includes a front pipeline 211 , a rear pipeline 212 and multiple (eg four) branch pipelines 213 . The front pipeline 211 is connected to the first gas injection nozzle 510 . The rear pipeline 212 is connected to the exhaust port 560 . The branch pipelines 213 are located between the front pipeline 211 and the rear pipeline 212 , and each branch pipeline 213 communicates with the front pipeline 211 and the rear pipeline 212 respectively. In addition, the gas detection system 11 has multiple gas analyzers 600 (eg, four), multiple first front valve elements 731 (eg, four) and multiple first rear valve elements 732 (eg, four). One of the gas analyzers 600, the first front valve 731 and the first rear valve 732 are installed on each branch pipeline 213, and the gas analyzer 600 on the same branch pipeline 213 is located at the corresponding first front Between the valve element 731 and the first rear valve element 732 .

氣體檢測系統11包含一分析配件440及一第七注氣嘴580。第七注氣嘴580固設於櫃體100之表面。管路模組200具有一連接分析配件440及第七注氣嘴580之第五外接管路260。第七注氣嘴580以供接上一內含受測氣體之鋼瓶C或一外接氣管(圖中未示)。第七注氣嘴580用以供自外部注入一稀釋氣體,稀釋氣體沿著第五外接管路260流至分析配件440。舉例來說,分析配件440為一種能夠接收稀釋氣體與標準氣體並混合出不同比例混合氣體之混合裝置,且本文之稀釋氣體為氮氣(N2)、氦(He)、氬(Ar)等氣體。閥件總成700包含一第五閥件763,第五閥件763安裝於第五外接管路260上,電連接控制單元910,用以切斷或恢復分析配件440與第七注氣嘴580的聯通。The gas detection system 11 includes an analysis accessory 440 and a seventh gas injection nozzle 580 . The seventh gas injection nozzle 580 is fixed on the surface of the cabinet body 100 . The pipeline module 200 has a fifth external pipeline 260 connected to the analysis accessory 440 and the seventh gas injection nozzle 580 . The seventh gas injection nozzle 580 is used for connecting a steel cylinder C containing the gas to be tested or an external gas pipe (not shown in the figure). The seventh gas injection nozzle 580 is used for injecting a diluent gas from the outside, and the diluent gas flows to the analysis accessory 440 along the fifth external pipeline 260 . For example, the analysis accessory 440 is a mixing device capable of receiving diluent gas and standard gas and mixing them to produce mixed gases in different proportions, and the diluent gas herein is nitrogen (N2), helium (He), argon (Ar) and other gases. The valve assembly 700 includes a fifth valve 763 installed on the fifth external pipeline 260 and electrically connected to the control unit 910 to cut off or restore the analysis accessory 440 and the seventh gas injection nozzle 580 China Unicom.

更具體地,標準氣體基準點校正之執行例如先透過開啟第五分支閥件775、關閉特定之第一前閥件731,並由第六注氣嘴570注入標準氣體至特定之氣體分析儀600。檢量線校正之執行例如先開啟第四前閥件761、第四後閥件762、第五閥件763與第三分支閥件773,並由第四注氣嘴540注入一標準氣體進入分析配件440中,並由第七注氣嘴580注入不同比例的稀釋標準氣體,並導入氣體分析儀600中,進行檢量線製作。須了解到,本創作所屬領域具有通常知識者可以依據需求或限制為特定之氣體分析儀前預先安裝上述之管路架構。More specifically, the calibration of the reference point of the standard gas is carried out, for example, by first opening the fifth branch valve 775, closing the specific first front valve 731, and injecting the standard gas into the specific gas analyzer 600 through the sixth gas injection nozzle 570. . To execute the calibration curve calibration, for example, first open the fourth front valve 761, the fourth rear valve 762, the fifth valve 763 and the third branch valve 773, and inject a standard gas into the analysis through the fourth gas injection nozzle 540 In the accessories 440, the seventh gas injection nozzle 580 injects different proportions of diluted standard gases, and introduces them into the gas analyzer 600 for making calibration curves. It should be understood that those with ordinary knowledge in the field of this invention can pre-install the above-mentioned pipeline structure before a specific gas analyzer according to requirements or restrictions.

故,當氣體檢測系統11欲進行多重氣體分析時,透過上述程式內容自動執行,控制單元910因應第一氣壓傳感器810所感應到的壓力值,指示流量控制元件860運轉而讓受測氣體自動從第一注氣嘴510進入前段管路211,並沿著前段管路211到達這些分支管路213。接著,控制單元910能夠選擇同步或依序開啟一個、幾個或全部分支管路213上所設置之第一前閥件731及第一後閥件732,從而讓受測氣體沿著上述一或多個分支管路213而到達對應之氣體分析儀600。然而,本創作不限於此,其他實施例中亦允許讓操作人員透過操作面板930手動指示控制單元910(第1圖)執行或終止上述氣體分析程序。Therefore, when the gas detection system 11 intends to perform multiple gas analysis, through the automatic execution of the above-mentioned program content, the control unit 910 instructs the flow control element 860 to operate in response to the pressure value sensed by the first air pressure sensor 810 so that the gas to be tested automatically flows from The first gas injection nozzle 510 enters the front pipeline 211 and reaches the branch pipelines 213 along the front pipeline 211 . Then, the control unit 910 can choose to synchronously or sequentially open one, several or all of the first front valve 731 and the first rear valve 732 provided on the branch pipeline 213, so that the gas under test can flow along the above-mentioned one or Multiple branch pipelines 213 reach the corresponding gas analyzers 600 . However, the present invention is not limited thereto. In other embodiments, the operator is also allowed to manually instruct the control unit 910 (FIG. 1 ) to execute or terminate the above gas analysis program through the operation panel 930 .

須了解到,這些氣體分析儀600不限於具有相同或不同之分析功能,舉例來說,其分析項目如下,氣體水含量、氣體純度比、氣體比重、氣相層析、氣體懸浮顆粒、微含量氣體檢測等等,然而,本創作不限於此。It should be understood that these gas analyzers 600 are not limited to have the same or different analysis functions. For example, the analysis items are as follows, gas water content, gas purity ratio, gas specific gravity, gas chromatography, gas suspended particles, micro-content Gas detection and the like, however, the invention is not limited thereto.

更進一步地,氣體檢測系統11包含一安裝於前段管路211上之第二氣壓傳感器820。閥件總成更包含配置於前段管路211上之一第二前閥件741與一第二後閥件742。第二前閥件741介於第一注氣嘴510與第二氣壓傳感器820之間,且第二後閥件742介於第二氣壓傳感器820與第一前閥件731之間。第二氣壓傳感器820位於第二前閥件741與第二後閥件742之間,用以感測管線組210於第二前閥件741與第二後閥件742之間的管內壓力。第二前閥件741用以切斷或恢復第一注氣嘴510與第二氣壓傳感器820的聯通。第二後閥件742用以切斷或恢復第一注氣嘴510與分支管路213的聯通。Furthermore, the gas detection system 11 includes a second air pressure sensor 820 installed on the front pipeline 211 . The valve assembly further includes a second front valve 741 and a second rear valve 742 disposed on the front pipeline 211 . The second front valve element 741 is interposed between the first air injection nozzle 510 and the second air pressure sensor 820 , and the second rear valve element 742 is interposed between the second air pressure sensor 820 and the first front valve element 731 . The second air pressure sensor 820 is located between the second front valve part 741 and the second rear valve part 742 and is used for sensing the internal pressure of the pipeline set 210 between the second front valve part 741 and the second rear valve part 742 . The second front valve element 741 is used to cut off or restore the communication between the first gas injection nozzle 510 and the second air pressure sensor 820 . The second rear valve element 742 is used to cut off or restore the communication between the first gas injection nozzle 510 and the branch pipeline 213 .

管路模組更包含一或多個(如二個)第二注氣嘴520。管線組210更包含一分流管路214及一第一外接管路220。分流管路214之二端分別連接前段管路211與後段管路212,亦即,前段管路211內之任意氣體可以不經由分支管路213而自排氣口560排出。舉例來說,第二注氣嘴520分別或共同接上一自動吹沖裝置B。The pipeline module further includes one or more (eg, two) second gas injection nozzles 520 . The pipeline set 210 further includes a branch pipeline 214 and a first external pipeline 220 . Two ends of the branch pipeline 214 are respectively connected to the front pipeline 211 and the rear pipeline 212 , that is, any gas in the front pipeline 211 can be discharged from the exhaust port 560 without going through the branch pipeline 213 . For example, the second gas injection nozzles 520 are respectively or jointly connected with an automatic blowing device B.

第一外接管路220之一端接通前段管路211,其另端以分歧管形式分別接通此些第二注氣嘴520。閥件總成更包含安裝於第一外接管路220上之二第三前閥件751及一第三後閥件752。第三前閥件751分別電連接控制單元910,且每個第三前閥件751用以切斷或恢復前段管路211與第二注氣嘴520的聯通。氣體檢測系統11包含一安裝於第一外接管路220上之第三氣壓傳感器830。第三氣壓傳感器830位於第三前閥件751及第三後閥件752之間,用以感測第一外接管路220於第三前閥件751及第三後閥件752之間的管內壓力。One end of the first external pipe 220 is connected to the front pipe 211 , and the other end is respectively connected to the second gas injection nozzles 520 in the form of branch pipes. The valve assembly further includes two third front valve parts 751 and a third rear valve part 752 mounted on the first external pipe 220 . The third front valve parts 751 are respectively electrically connected to the control unit 910 , and each third front valve part 751 is used to cut off or restore the communication between the front pipeline 211 and the second gas injection nozzle 520 . The gas detection system 11 includes a third air pressure sensor 830 installed on the first external pipeline 220 . The third air pressure sensor 830 is located between the third front valve part 751 and the third rear valve part 752, and is used for sensing the connection between the first external pipeline 220 and the third front valve part 751 and the third rear valve part 752. internal pressure.

閥件總成更包含配置於分流管路214上之第一分支閥件771及多個第二分支閥件772。第一分支閥件771電連接控制單元910,用以切斷或恢復後段管路212與前段管路211的聯通。氣體檢測系統11包含一安裝於前段管路211上之第四氣壓傳感器840。第四氣壓傳感器840位於第一分支閥件771之上游,用以感測分流管路214上的管內壓力。The valve assembly further includes a first branch valve 771 and a plurality of second branch valves 772 disposed on the branch pipeline 214 . The first branch valve 771 is electrically connected to the control unit 910 for cutting off or restoring the communication between the rear pipeline 212 and the front pipeline 211 . The gas detection system 11 includes a fourth air pressure sensor 840 installed on the front pipeline 211 . The fourth air pressure sensor 840 is located upstream of the first branch valve 771 and is used for sensing the pressure in the branch line 214 .

再者,管路模組更包含多個第三注氣嘴530,管線組210更包含多個第二外接管路230,且閥件總成更包含多個第二分支閥件772。每個第二外接管路230連通其中一第三注氣嘴530以及其中一分支管路213,且這些第二分支閥件772分別安裝於第二外接管路230上,且電連接控制單元910,用以切斷或恢復分支管路213與第三注氣嘴530的聯通。每個第三注氣嘴530以供自外部注入一養護氣體,讓氣體分析儀600在不進行氣體分析時進行設備保養維護。養護氣體沿著對應之分支管路213而流至與其對應之氣體分析儀600。舉例來說,第三注氣嘴530以供接上一內含養護氣體之鋼瓶或一外接氣管(圖中未示),且本文之養護氣體例如為氮氣(N2)、氦(He)、氬(Ar)等氣體,然而,本創作不限於此。Moreover, the pipeline module further includes a plurality of third gas injection nozzles 530 , the pipeline set 210 further includes a plurality of second external pipelines 230 , and the valve assembly further includes a plurality of second branch valves 772 . Each second external pipeline 230 communicates with one of the third gas injection nozzles 530 and one of the branch pipelines 213 , and these second branch valves 772 are installed on the second external pipeline 230 respectively, and are electrically connected to the control unit 910 , used to cut off or restore the communication between the branch pipeline 213 and the third gas injection nozzle 530 . Each of the third gas injection nozzles 530 is used for injecting a maintenance gas from the outside, so that the gas analyzer 600 can perform equipment maintenance when gas analysis is not performed. The curing gas flows along the corresponding branch pipeline 213 to the corresponding gas analyzer 600 . For example, the third gas injection nozzle 530 is used to connect a steel cylinder containing curing gas or an external gas pipe (not shown in the figure), and the curing gas herein is, for example, nitrogen (N2), helium (He), argon (Ar) and other gases, however, the present invention is not limited thereto.

如此,當氣體檢測系統11欲進行氣體分析儀600之維護程序時,透過上述程式內容自動執行,控制單元910選擇關閉所有第一前閥件731以及開啟所有第二分支閥件772與第一後閥件732;接著,控制單元910依第一氣壓傳感器810之數值,指示流量控制元件860運轉,控制後段管路212之內壓,且開啟第二分支閥件772,指示養護氣體由第三注氣嘴530沿著這些分支管路213送至對應之氣體分析儀600,從而對此氣體分析儀600進行維護;另控制關閉第三後閥件752,由抽風設備V從排氣口560持續抽氣。然而,本創作不限於此,其他實施例中亦允許讓操作人員透過操作面板930手動指示控制單元910(第1圖)執行或終止上述分析儀之維護程序。In this way, when the gas detection system 11 intends to perform the maintenance procedure of the gas analyzer 600, the control unit 910 selects to close all the first front valves 731 and open all the second branch valves 772 and the first rear valve through the automatic execution of the above program content. Valve 732; then, the control unit 910 instructs the flow control element 860 to operate according to the value of the first air pressure sensor 810, controls the internal pressure of the rear pipeline 212, and opens the second branch valve 772 to instruct the curing gas to be injected by the third The gas nozzle 530 is sent to the corresponding gas analyzer 600 along these branch pipelines 213, so that the gas analyzer 600 is maintained; in addition, the third rear valve 752 is controlled to be closed, and the ventilation device V is continuously sucked from the exhaust port 560. gas. However, the present invention is not limited thereto. In other embodiments, the operator is also allowed to manually instruct the control unit 910 (FIG. 1 ) to execute or terminate the maintenance procedure of the analyzer through the operation panel 930 .

之後,當氣體檢測系統11欲進行管路清潔程序,透過上述程式內容自動執行,控制單元910選擇關閉所有第一前閥件731、第二後閥件742以及開啟第三前閥件751、第三後閥件752及第一分支閥件771;接著,待第四氣壓傳感器840偵測前段管路211為真空,以及指示開啟第三後閥件752並讓自動吹沖裝置B自外部注入一清潔氣體(或稱吹掃氣體)至第一外接管路220,並經由分流管路214而自排氣口560排出,以便對管線組210之前段管路211及分流管路214內部進行清潔。舉例來說,清潔氣體例如為氮氣(N2)、氦(He)、氬(Ar)等氣體,然而,本創作不限於此。Afterwards, when the gas detection system 11 intends to perform a pipeline cleaning procedure, the control unit 910 selects to close all the first front valve 731 and the second rear valve 742 and open the third front valve 751 and the second valve through the automatic execution of the above program content. Three rear valve parts 752 and the first branch valve part 771; then, wait for the fourth air pressure sensor 840 to detect that the front pipeline 211 is a vacuum, and instruct to open the third rear valve part 752 and allow the automatic blowing device B to inject a The cleaning gas (or purge gas) is sent to the first external connection pipeline 220 and discharged from the exhaust port 560 through the diversion pipeline 214 so as to clean the inside of the pipeline group 210 before the pipeline 211 and the diversion pipeline 214 . For example, the cleaning gas is nitrogen (N2), helium (He), argon (Ar), etc., however, the invention is not limited thereto.

如此,由於氣體檢測系統11能夠對管路自動沖吹,從而避免管路之間的交叉污染。然而,本創作不限於此,其他實施例中亦允許讓操作人員透過操作面板930手動指示控制單元910(第1圖)執行或終止上述管路清潔程序。In this way, since the gas detection system 11 can automatically flush the pipelines, cross-contamination between pipelines can be avoided. However, the present invention is not limited thereto. In other embodiments, the operator is also allowed to manually instruct the control unit 910 (FIG. 1 ) to execute or terminate the above pipeline cleaning procedure through the operation panel 930 .

管路模組更包含一或多個(如二個)第四注氣嘴540。管線組210更包含一校正管路組400,用於某個需要製作分析檢量線之特定氣體分析儀600。校正管路組400分別接通第四注氣嘴540、特定之其中一分支管路213以及後段管路212。在本實施例中,所述分支管路213介於特定之氣體分析儀600與特定之第一前閥件731之間的區段。任一第四注氣嘴540以供自外部注入一標準氣體,經主通道410至分析配件440,稀釋氣體從第七注氣嘴580通過第五閥件763至分析配件440,控制單元910指示分析配件440混合出多種特定濃度比利之稀釋標準氣體,再透過第一次通道420及分支管路213進入特定之氣體分析儀600,以便進行檢量線之建立,並且所述氣體接著自排氣口560排出。舉例來說,第四注氣嘴540以供接上一內含標準氣體之鋼瓶C或一外接氣管(圖中未示),稀釋氣體由第五外接管路260進入分析配件440,依序混合不同濃度之稀釋標準氣體,再通入特定氣體分析儀600建立檢量線,且本實施例中所述之標準氣體例如為氯化氢(HCl)、氯氣(Cl2)、氮氣(N2)、氧氣(O2)、氦(He)、氬(Ar)、六氟丁二烯(C4F6)、二氟甲烷(CH2F2)、氟甲烷(CH3F)、八氟環丁烷(C4F8)、三氟甲烷(CHF3)、氫氟酸(HF)、六氟化鎢(WF6)、二氯矽烷(SiH2Cl2)、甲矽烷(SiH4)等氣體;稀釋氣體例如:氦氣(He)、氮氣(N2)、氬氣(Ar)等氣體。然而,本創作不限於此。須了解到,本創作所屬領域具有通常知識者可以依據需求或限制為特定之氣體分析儀前預先安裝上述之管路架構。The pipeline module further includes one or more (eg, two) fourth gas injection nozzles 540 . The pipeline set 210 further includes a calibration pipeline set 400, which is used for a specific gas analyzer 600 that needs to make an analytical calibration curve. The calibration pipeline group 400 is respectively connected to the fourth gas injection nozzle 540 , a specific one of the branch pipelines 213 and the rear pipeline 212 . In this embodiment, the branch pipeline 213 is located in the section between the specific gas analyzer 600 and the specific first front valve 731 . Any fourth gas injection nozzle 540 is used to inject a standard gas from the outside, through the main channel 410 to the analysis fitting 440, and the dilution gas passes through the fifth valve 763 from the seventh gas injection nozzle 580 to the analysis fitting 440, and the control unit 910 instructs The analysis accessory 440 mixes a variety of diluted standard gases with specific concentrations, and then enters the specific gas analyzer 600 through the first channel 420 and the branch pipeline 213, so as to establish a calibration line, and the gas is then self-exhausted Port 560 exits. For example, the fourth gas injection nozzle 540 is used to connect a steel cylinder C containing standard gas or an external gas pipe (not shown in the figure), and the diluted gas enters the analysis fitting 440 from the fifth external pipeline 260, and is mixed in sequence Diluted standard gases of different concentrations are passed into a specific gas analyzer 600 to establish a calibration line, and the standard gases described in this embodiment are, for example, hydrogen chloride (HCl), chlorine (Cl2), nitrogen (N2), oxygen (O2 ), helium (He), argon (Ar), hexafluorobutadiene (C4F6), difluoromethane (CH2F2), fluoromethane (CH3F), octafluorocyclobutane (C4F8), trifluoromethane (CHF3), Hydrofluoric acid (HF), tungsten hexafluoride (WF6), dichlorosilane (SiH2Cl2), monosilane (SiH4) and other gases; diluent gases such as: helium (He), nitrogen (N2), argon (Ar) Wait for gas. However, the present work is not limited thereto. It should be understood that those with ordinary knowledge in the field of this invention can pre-install the above-mentioned pipeline structure before a specific gas analyzer according to requirements or restrictions.

如此,當氣體檢測系統11欲進行氣體分析儀600之檢量線校正程序時,透過上述程式內容自動執行,控制單元910選擇關閉對應之第一前閥件731及第二後閥件742並開啟第四前閥件761、第四後閥件762及第三分支閥件773;接著,控制單元910指示流量控制元件860運轉而自第四注氣嘴540引入標準氣體至對應之主通道410進入分析配件440,並開啟第五閥件763讓稀釋氣體通過第五外接管路260進入分析配件440,控制單元910依檢量線需求指示分析配件440調配出多種不同混合比例稀釋之標準氣體,經第一次通道420、分支管路213進入氣體分析儀600以執行檢量線之建立,之後,分析後之所述氣體經由後段管路212而自排氣口560排出,以供對應之氣體分析儀600進行檢量線校正。然而,本創作不限於此,其他實施例中亦允許讓操作人員透過操作面板930手動指示控制單元910(第1圖)執行或終止上述校正程序。 In this way, when the gas detection system 11 intends to perform the calibration curve calibration procedure of the gas analyzer 600, the control unit 910 selects to close the corresponding first front valve 731 and the second rear valve 742 and open them through the automatic execution of the above program content. The fourth front valve 761, the fourth rear valve 762, and the third branch valve 773; then, the control unit 910 instructs the flow control element 860 to operate and introduce standard gas from the fourth gas injection nozzle 540 to the corresponding main channel 410 to enter Analyzing accessory 440, and opening the fifth valve 763 to allow the diluted gas to enter the analyzing accessory 440 through the fifth external pipeline 260, the control unit 910 instructs the analyzing accessory 440 to prepare a variety of standard gases diluted in different mixing ratios according to the requirements of the calibration line. The first channel 420 and the branch pipeline 213 enter the gas analyzer 600 to establish the calibration curve. Afterwards, the analyzed gas is discharged from the exhaust port 560 through the latter pipeline 212 for corresponding gas analysis. Instrument 600 performs calibration curve calibration. However, the present invention is not limited thereto. In other embodiments, the operator is also allowed to manually instruct the control unit 910 (FIG. 1 ) to execute or terminate the above calibration procedure through the operation panel 930 .

更具體地,校正管路組400包含一主通道410、一第一次通道420與一第二次通道430。主通道410之一端以分歧管形式接通此些第四注氣嘴540,另端接通分析配件440。第一次通道420分別連接分析配件440以及上述之分支管路213,且第二次通道430分別連接主通道410以及後段管路212。閥件總成更包含二第四前閥件761、一第四後閥件762、一第三分支閥件773與一第四分支閥件774。第三分支閥件773安裝於第一次通道420上,且電連接控制單元910,用以切斷或恢復校正管路組400與上述之分支管路213的聯通。第四分 支閥件774安裝於第二次通道430上,且電連接控制單元910,用以切斷或恢復校正管路組400與後段管路212的聯通。第四前閥件761及第四後閥件762安裝於校正管路組400上。第四前閥件761分別電連接控制單元910,且每個第四前閥件761用以切斷或恢復校正管路組400與第四注氣嘴540的聯通。氣體檢測系統11包含一第五氣壓傳感器850。第五氣壓傳感器850位於第四前閥件761及第四後閥件762之間,用以感測校正管路組400於第四前閥件761及第四後閥件762之間的管內壓力。如此,氣體檢測系統11能夠自動控制導入空白樣品氣體(如標準氣體),以自動取樣空白樣品氣體,以避免分析誤差值並針對廢氣回灌部份建置管線系統(如盤面系統),避免分析後廢氣回灌至氣體分析儀600。 More specifically, the calibration pipeline set 400 includes a main channel 410 , a primary channel 420 and a second secondary channel 430 . One end of the main channel 410 is connected to the fourth gas injection nozzles 540 in the form of a branch pipe, and the other end is connected to the analysis accessory 440 . The first channel 420 is respectively connected to the analysis accessory 440 and the aforementioned branch pipeline 213 , and the second channel 430 is respectively connected to the main channel 410 and the rear pipeline 212 . The valve assembly further includes two fourth front valve parts 761 , a fourth rear valve part 762 , a third branch valve part 773 and a fourth branch valve part 774 . The third branch valve 773 is installed on the primary channel 420 and is electrically connected to the control unit 910 for cutting off or restoring the communication between the calibration pipeline set 400 and the aforementioned branch pipeline 213 . fourth point The branch valve 774 is installed on the second channel 430 and is electrically connected to the control unit 910 for cutting off or restoring the communication between the calibration pipeline set 400 and the rear pipeline 212 . The fourth front valve part 761 and the fourth rear valve part 762 are installed on the calibration pipeline set 400 . The fourth front valve parts 761 are respectively electrically connected to the control unit 910 , and each fourth front valve part 761 is used to cut off or restore the communication between the calibration pipeline set 400 and the fourth gas injection nozzle 540 . The gas detection system 11 includes a fifth air pressure sensor 850 . The fifth air pressure sensor 850 is located between the fourth front valve part 761 and the fourth rear valve part 762, and is used to sense the calibration pipeline set 400 in the tube between the fourth front valve part 761 and the fourth rear valve part 762. pressure. In this way, the gas detection system 11 can automatically control the introduction of a blank sample gas (such as a standard gas) to automatically sample the blank sample gas to avoid analysis error values and build a pipeline system (such as a panel system) for the exhaust gas refilling part to avoid After analysis, the exhaust gas is recirculated to the gas analyzer 600 .

此外,管路模組更包含一第五注氣嘴550,且管線組210更包含一第三外接管路240。第三外接管路240連通主通道410以及第五注氣嘴550,且第五注氣嘴550以供自外部注入一清潔氣體(或稱吹掃氣體),清潔氣體沿著第三外接管路240及第二次通道430而流至排氣口560用以對校正管路進行清潔吹掃。舉例來說,第五注氣嘴550也可能接上上述之自動吹沖裝置B或類似裝置,以供輸出清潔氣體至第三外接管路240、主通道410及第二次通道430,並從排氣口560排出,且清潔氣體例如為氮氣(N2)、氦(He)、氬(Ar)等氣體,然而,本創作不限於此。閥件總成更包含一第六分支閥件776,第六分支閥件776安裝於第三外接管路240上,且電連接控制單元910,用以切斷或恢復主通道410與第五注氣嘴550的聯通。須了解到,透過第五注氣嘴550及第三外接管路240進行管路清潔之程序,與透過第二注氣嘴520及前段管路211進行管路清潔之程序大致相似,故,再此不再加以贅述。In addition, the pipeline module further includes a fifth gas injection nozzle 550 , and the pipeline set 210 further includes a third external pipeline 240 . The third external pipeline 240 communicates with the main channel 410 and the fifth gas injection nozzle 550, and the fifth gas injection nozzle 550 is used for injecting a cleaning gas (or purging gas) from the outside, and the cleaning gas passes along the third external pipeline. 240 and the second channel 430 to flow to the exhaust port 560 for cleaning and purging the calibration pipeline. For example, the fifth gas injection nozzle 550 may also be connected to the above-mentioned automatic blowing device B or similar devices for outputting cleaning gas to the third external pipeline 240, the main channel 410 and the second channel 430, and from The exhaust port 560 is exhausted, and the cleaning gas is, for example, nitrogen (N 2 ), helium (He), argon (Ar), etc., however, the present invention is not limited thereto. The valve assembly further includes a sixth branch valve 776, the sixth branch valve 776 is installed on the third external pipeline 240, and is electrically connected to the control unit 910, and is used to cut off or restore the connection between the main channel 410 and the fifth injector. The connection of gas nozzle 550. It should be understood that the procedure of cleaning the pipeline through the fifth gas injection nozzle 550 and the third external pipeline 240 is roughly similar to the procedure of cleaning the pipeline through the second gas injection nozzle 520 and the front pipeline 211. Therefore, This will not be repeated here.

此外,在本實施例中,上述注氣嘴510、520、530、540、550、570、580及排氣口560分別固設於櫃體100之表面,然而,本創作不限於此。In addition, in this embodiment, the gas injection nozzles 510 , 520 , 530 , 540 , 550 , 570 , 580 and the exhaust port 560 are respectively fixed on the surface of the cabinet body 100 , however, the invention is not limited thereto.

須了解到,管線組210於圖中之表現形式僅為示意,並不侷限於其所表現之外型。此外,在上述各實施例中,管線組210例如為硬管或軟管之表現,然而,本創作不限於此。又,在上述各實施例中,流量控制元件860為質量流量控制器(Mass Flow Controller,MFC)或質量流量計(Mass Flow Meter,MFM),為一種精確測量氣體流量的儀表,其不但具有測量流量的功能,還能進行氣體流量之控制。It should be understood that the representation form of the pipeline group 210 in the figure is only for illustration, and is not limited to its appearance. In addition, in the above-mentioned embodiments, the pipeline set 210 is, for example, represented by a hard pipe or a flexible pipe, however, the present invention is not limited thereto. Also, in the above-mentioned embodiments, the flow control element 860 is a mass flow controller (Mass Flow Controller, MFC) or a mass flow meter (Mass Flow Meter, MFM), which is an instrument for accurately measuring gas flow, which not only has the function of measuring The flow function can also control the gas flow.

如第3圖所示,氣體檢測系統更包含一加熱模組870。加熱模組870用以在氣體分析之前,加熱管線組210,以消除管路內水分,提高氣體分析精準度,從而讓整體流程更順暢。然而,本創作不限於此,其他實施例中亦可能容許全程或其餘時程對管線組210進行加熱。As shown in FIG. 3 , the gas detection system further includes a heating module 870 . The heating module 870 is used to heat the pipeline group 210 before gas analysis, so as to eliminate moisture in the pipeline and improve the accuracy of gas analysis, thereby making the overall process smoother. However, the present invention is not limited thereto, and in other embodiments, it is also possible to allow the pipeline group 210 to be heated in the whole process or in other time frames.

在上述實施例中,氣體檢測系統之操作方法大致為對管路內部體吹沖置換,管路內部體吹沖置換後,則自動通入標準氣體進行檢測儀器校正,分析儀器校正完成後,開始依序通入待測氣體,進行氣體特性檢測分析,同時在分析廢氣部分,利用壓力傳感元件與流量控制元件控制廢氣端氣體環境,避免廢氣回灌分析儀器導致分析失真。分析完成後將分析數據回傳至中控系統或其他電腦系統。In the above-mentioned embodiments, the operation method of the gas detection system is roughly to blow and replace the internal body of the pipeline. After the internal body of the pipeline is blown and replaced, the standard gas is automatically introduced to calibrate the detection instrument. After the calibration of the analytical instrument is completed, start The gas to be tested is introduced in order to detect and analyze the gas characteristics. At the same time, in the analysis of the exhaust gas part, the pressure sensing element and the flow control element are used to control the gas environment at the exhaust gas end, so as to avoid the analysis distortion caused by the exhaust gas backfilling the analysis instrument. After the analysis is completed, the analysis data is sent back to the central control system or other computer systems.

第4圖為本創作一實施例之氣體檢測系統的氣體檢測方法的流程圖。如第4圖所示,氣體檢測方法包含步驟501~步驟507如下。在步驟501中,清潔管路模組並維護氣體分析儀。在步驟502中,使管內產生負壓,並將管內氣體排除。在步驟503中,通入標準氣體進行氣體分析儀校正。在步驟504中,清潔管路模組並維護氣體分析儀。在步驟505中,使管內產生負壓,並將管內氣體排除。在步驟506中,注入待測氣體依序或同步至各氣體分析儀。在步驟507中,氣體分析儀分析待測氣體,並輸出氣體分析儀之分析數據。FIG. 4 is a flowchart of a gas detection method of a gas detection system according to an embodiment of the invention. As shown in FIG. 4 , the gas detection method includes steps 501 to 507 as follows. In step 501, the pipeline module is cleaned and the gas analyzer is maintained. In step 502, a negative pressure is generated in the tube, and the gas in the tube is removed. In step 503, a standard gas is introduced to perform gas analyzer calibration. In step 504, the pipeline module is cleaned and the gas analyzer is maintained. In step 505, a negative pressure is generated in the tube, and the gas in the tube is removed. In step 506, the gas to be tested is injected into each gas analyzer sequentially or synchronously. In step 507, the gas analyzer analyzes the gas to be tested, and outputs the analysis data of the gas analyzer.

在步驟501與504中,更具體地,注入一清潔氣體(或稱吹掃氣體)至管路模組內以清潔管路模組之一部分,以及從這些分支管路分別注入一養護氣體至對應之氣體分析儀,以維護對應之氣體分析儀。在步驟502與505中,更具體地,將管路模組內之管內壓力降為負壓,以將清潔氣體及養護氣體排出管路模組之外。更進一步地,在步驟502與505中,感測管路模組內的管內壓力,接著,因應所感測的管內壓力,對應調整管路模組的管內壓力。在步驟503中,更具體地,注入一標準氣體至其中一氣體分析儀,以供此氣體分析儀進行校正;接著,注入一清潔氣體(或稱吹掃氣體)至管路模組內以清潔管路模組之一部分;接著,從這些分支管路分別注入一養護氣體至對應之氣體分析儀,以維護對應之氣體分析儀。在步驟506至507中,更具體地,注入一受測氣體至氣體檢測系統之管路模組內,選擇同步或依序開啟一個、幾個或全部分支管路上所設置之閥件,從而讓受測氣體沿著上述一或多個分支管路而到達對應之氣體分析儀;接著,透過氣體分析儀分析自分支管路取得之受測氣體,並輸出受測氣體之分析數據;以及將受測氣體排出管路模組。In steps 501 and 504, more specifically, a cleaning gas (or purge gas) is injected into the pipeline module to clean a part of the pipeline module, and a curing gas is respectively injected from these branch pipelines into the corresponding To maintain the corresponding gas analyzer. In steps 502 and 505, more specifically, the pressure inside the pipeline module is reduced to negative pressure, so as to discharge the cleaning gas and maintenance gas out of the pipeline module. Furthermore, in steps 502 and 505, the tube pressure in the tube module is sensed, and then, the tube pressure of the tube module is adjusted correspondingly according to the sensed tube pressure. In step 503, more specifically, a standard gas is injected into one of the gas analyzers for calibration of the gas analyzer; then, a cleaning gas (or purge gas) is injected into the pipeline module for cleaning A part of the pipeline module; then, inject a curing gas from these branch pipelines to the corresponding gas analyzers respectively, so as to maintain the corresponding gas analyzers. In steps 506 to 507, more specifically, a test gas is injected into the pipeline module of the gas detection system, and the valves set on one, several or all branch pipelines are selected to be opened synchronously or sequentially, so that The gas under test reaches the corresponding gas analyzer along the above-mentioned one or more branch pipelines; then, the gas analyzer analyzes the gas under test obtained from the branch pipeline, and outputs the analysis data of the gas under test; Gas exhaust pipeline module.

在本實施例中,在步驟506之前,本方法更包含加熱氣體檢測系統之管路模組。更具體地,加熱氣體檢測系統之管路模組之步驟更包含數個步驟如下。透過一高頻加熱線圈加熱氣體檢測系統之管路模組。透過一熱風裝置朝管路模組之內管與外管之間所間隔出的管內氣隙內送入熱風。In this embodiment, before step 506, the method further includes heating the pipeline module of the gas detection system. More specifically, the step of heating the pipeline module of the gas detection system further includes several steps as follows. The pipeline module of the gas detection system is heated by a high-frequency heating coil. Through a hot air device, hot air is sent into the air gap in the pipe separated between the inner pipe and the outer pipe of the pipeline module.

如此,透過以上各實施例之所述架構,本創作能夠將一或多種分析儀進行系統整合,如此,不僅能夠節省多次送測時間及分析時間,且亦可降低待測氣瓶造成氣體洩漏之風險。In this way, through the structures described in the above embodiments, this creation can integrate one or more analyzers into a system, which not only saves the time for multiple testing and analysis, but also reduces the gas leakage caused by the gas cylinder to be tested risk.

最後,上述所揭露之各實施例中,並非用以限定本創作,任何熟習此技藝者,在不脫離本創作之精神和範圍內,當可作各種之更動與潤飾,皆可被保護於本創作中。因此本創作之保護範圍當視後附之申請專利範圍所界定者為準。Finally, the embodiments disclosed above are not intended to limit this creation. Anyone who is familiar with this technique can make various changes and modifications without departing from the spirit and scope of this creation, and all of them can be protected in this creation. creation. Therefore, the scope of protection of this creation should be defined by the scope of the attached patent application.

10、11:氣體檢測系統 100:櫃體 200:管路模組 210:管線組 211:前段管路 212:後段管路 213:分支管路 214:分流管路 220:第一外接管路 230:第二外接管路 240:第三外接管路 260:第五外接管路 400:校正管路組 410:主通道 420:第一次通道 430:第二次通道 440:分析配件 501~507:步驟 510:第一注氣嘴 520:第二注氣嘴 530:第三注氣嘴 540:第四注氣嘴 550:第五注氣嘴 560:排氣口 570:第六注氣嘴 580:第七注氣嘴 600:氣體分析儀 700:閥件總成 710:前閥件 720:後閥件 731:第一前閥件 732:第一後閥件 741:第二前閥件 742:第二後閥件 751:第三前閥件 752:第三後閥件 761:第四前閥件 762:第四後閥件 763:第五閥件 771:第一分支閥件 772:第二分支閥件 773:第三分支閥件 774:第四分支閥件 775:第五分支閥件 776:第六分支閥件 810:第一氣壓傳感器 820:第二氣壓傳感器 830:第三氣壓傳感器 840:第四氣壓傳感器 850:第五氣壓傳感器 860:流量控制元件 870:加熱模組 900:中控系統 910:控制單元 920:邏輯電路 930:操作面板 B:自動吹沖裝置 C:鋼瓶 D:方向 V:抽風設備 10, 11: Gas detection system 100: Cabinet 200: pipeline module 210: pipeline group 211: front pipeline 212: Rear pipeline 213: branch pipeline 214: shunt pipeline 220: The first external pipeline 230: the second external pipeline 240: The third external pipeline 260: The fifth external pipeline 400: Correction pipeline group 410: main channel 420: first pass 430:Second channel 440: Analysis Accessories 501~507: steps 510: The first gas injection nozzle 520: Second gas injection nozzle 530: The third gas injection nozzle 540: The fourth gas injection nozzle 550: Fifth gas injection nozzle 560: exhaust port 570: The sixth injection nozzle 580: The seventh gas injection nozzle 600: Gas analyzer 700: valve assembly 710: front valve 720: rear valve 731: The first front valve 732: the first rear valve 741: the second front valve 742: second rear valve 751: The third front valve 752: The third rear valve 761: The fourth front valve 762: The fourth rear valve 763: fifth valve 771: The first branch valve 772: The second branch valve 773: The third branch valve 774: The fourth branch valve 775: The fifth branch valve 776: The sixth branch valve 810: the first air pressure sensor 820: Second air pressure sensor 830: The third air pressure sensor 840: The fourth air pressure sensor 850: Fifth air pressure sensor 860: flow control element 870: heating module 900: central control system 910: control unit 920: Logic Circuits 930: operation panel B: Automatic blowing device C: cylinder D: Direction V: ventilation equipment

為讓本創作之上述和其他目的、特徵、優點與實施例能更明顯易懂,所附圖式之說明如下: 第1圖為本創作之氣體檢測系統的簡易示意圖; 第2圖為本創作一實施例之氣體檢測系統的管路架構圖; 第3圖為第2圖之氣體檢測系統的電子方塊圖;以及 第4圖為本創作一實施例之氣體檢測系統的氣體檢測方法的流程圖。 In order to make the above-mentioned and other purposes, features, advantages and embodiments of this creation more obvious and easy to understand, the description of the accompanying drawings is as follows: Figure 1 is a simple schematic diagram of the gas detection system of this creation; Figure 2 is a pipeline structure diagram of a gas detection system according to an embodiment of the invention; Figure 3 is an electronic block diagram of the gas detection system in Figure 2; and FIG. 4 is a flowchart of a gas detection method of a gas detection system according to an embodiment of the invention.

10:氣體檢測系統 10: Gas detection system

100:櫃體 100: Cabinet

200:管路模組 200: pipeline module

210:管線組 210: pipeline group

510:第一注氣嘴 510: The first gas injection nozzle

560:排氣口 560: exhaust port

600:氣體分析儀 600: Gas analyzer

700:閥件總成 700: valve assembly

710:前閥件 710: front valve

720:後閥件 720: rear valve

810:第一氣壓傳感器 810: the first air pressure sensor

860:流量控制元件 860: flow control element

900:中控系統 900: central control system

910:控制單元 910: control unit

920:邏輯電路 920: Logic Circuits

930:操作面板 930: operation panel

C:鋼瓶 C: cylinder

D:方向 D: Direction

V:抽風設備 V: ventilation equipment

Claims (9)

一種氣體檢測系統,包含: 一櫃體; 一管路模組,具有一管線組、一第一注氣嘴及一排氣口,該管線組安裝於該櫃體內,分別連接該第一注氣嘴及該排氣口,該第一注氣嘴以供自外部注入一受測氣體,該排氣口以供排出該受測氣體; 至少一氣體分析儀,安裝於該櫃體內,接通該管線組,用以分析自該管線組取得之該受測氣體; 一閥件總成,包含至少一第一閥件,該第一閥件安裝於該管線組上,且介於該第一注氣嘴與該氣體分析儀之間,用以可回復地切斷該第一注氣嘴與該氣體分析儀的聯通;以及 一控制單元,電連接該第一閥件,用以控制該第一閥件之開關。 A gas detection system comprising: a cabinet; A pipeline module, with a pipeline group, a first gas injection nozzle and an exhaust port, the pipeline group is installed in the cabinet, respectively connected to the first gas injection nozzle and the exhaust port, the first injection nozzle The gas nozzle is used to inject a test gas from the outside, and the exhaust port is used to discharge the test gas; At least one gas analyzer installed in the cabinet and connected to the pipeline group to analyze the measured gas obtained from the pipeline group; A valve assembly, including at least one first valve, installed on the pipeline set, and interposed between the first gas injection nozzle and the gas analyzer, for reversibly shutting off the communication between the first gas injection nozzle and the gas analyzer; and A control unit, electrically connected to the first valve, is used to control the switch of the first valve. 如請求項1所述之氣體檢測系統,其中該管線組包含: 一前段管路,連接該第一注氣嘴; 一後段管路,連接該排氣口;以及 複數個分支管路,位於該前段管路與該後段管路之間,該些分支管路中之每一者分別連通該前段管路及該後段管路, 其中該至少一氣體分析儀與該至少一第一閥件皆為多數個,且該些氣體分析儀中之每一者與該些第一閥件其中之一共同安裝於該些分支管路其中之一,該些第一閥件中之每一者用以可回復地切斷該前段管路與對應之該氣體分析儀的聯通, 其中當該受測氣體沿著該前段管路進入該些分支管路時,該控制單元能夠開啟該些第一閥件至少其中之一,從而讓該受測氣體沿著相應該至少其中一第一閥件之該分支管路到達與其對應之該氣體分析儀。 The gas detection system as described in claim 1, wherein the pipeline group includes: A front pipeline connected to the first gas injection nozzle; a rear pipeline connected to the exhaust port; and A plurality of branch pipelines are located between the front pipeline and the rear pipeline, each of the branch pipelines communicates with the front pipeline and the rear pipeline, Wherein the at least one gas analyzer and the at least one first valve are multiple, and each of the gas analyzers and one of the first valves are installed in the branch pipelines together One, each of the first valves is used to reversibly cut off the connection between the front pipeline and the corresponding gas analyzer, Wherein when the gas under test enters the branch pipelines along the front pipeline, the control unit can open at least one of the first valves, so that the gas under test can flow along at least one of the corresponding first valves. The branch pipeline of a valve element reaches the corresponding gas analyzer. 如請求項2所述之氣體檢測系統,其中該管路模組更包含至少一第二注氣嘴,該管線組更包含一分流管路及一第一外接管路,該分流管路分別連接該前段管路與該後段管路,該第一外接管路分別接通該前段管路及該第二注氣嘴;以及 該閥件總成更包含一第二閥件,該第二閥件安裝於該第一外接管路上,且電連接該控制單元,用以可回復地切斷該前段管路與該第二注氣嘴的聯通。 The gas detection system as described in claim 2, wherein the pipeline module further includes at least one second gas injection nozzle, and the pipeline set further includes a split pipeline and a first external pipeline, and the split pipelines are respectively connected to The front pipeline and the rear pipeline, the first external pipeline are respectively connected to the front pipeline and the second gas injection nozzle; and The valve assembly further includes a second valve installed on the first external pipeline and electrically connected to the control unit for reversibly cutting off the front pipeline from the second injector. Air mouth Unicom. 如請求項3所述之氣體檢測系統,更包含: 一自動吹沖裝置,連接該第二注氣嘴,以供自外部注入一清潔氣體, 其中當該控制單元關閉該些第一閥件以及開啟該第二閥件時,該自動吹沖裝置自該第二注氣嘴注入該清潔氣體至該第一外接管路,並經由該分流管路而自該排氣口排出。 The gas detection system as described in claim 3 further includes: an automatic blowing device, connected to the second gas injection nozzle, for injecting a clean gas from the outside, Wherein when the control unit closes the first valves and opens the second valves, the automatic blowing device injects the cleaning gas from the second gas injection nozzle into the first external pipeline, and passes through the shunt pipe The road is discharged from the exhaust port. 如請求項2所述之氣體檢測系統,更包含: 一氣壓傳感器,安裝於該後段管路上,用以感測該後段管路的管內壓力;以及 一流量控制元件,安裝於該後段管路上,用以因應該氣壓傳感器之感測結果,對應調整該後段管路的管內壓力。 The gas detection system as described in claim 2 further includes: An air pressure sensor installed on the rear pipeline to sense the internal pressure of the rear pipeline; and A flow control element is installed on the rear pipeline, and is used to adjust the internal pressure of the rear pipeline correspondingly in response to the sensing result of the air pressure sensor. 如請求項2所述之氣體檢測系統,其中該管路模組更包含複數個第三注氣嘴,該管線組更包含複數個第二外接管路,該些第二外接管路中之每一者分別連通該些第三注氣嘴其中之一以及該些分支管路其中之一,該些第三注氣嘴中之每一者以供自外部注入一養護氣體至與其對應之該氣體分析儀,並且自該排氣口排出;以及 該閥件總成更包含複數個第三閥件,該些第三閥件分別安裝於該些第二外接管路上,且電連接該控制單元,用以可回復地切斷該分支管路與該第三注氣嘴的聯通, 其中當該控制單元開啟該些第三閥件以及關閉該些第一閥件時,該養護氣體被共同送至該些氣體分析儀並自該排氣口排出。 The gas detection system as described in claim 2, wherein the pipeline module further includes a plurality of third gas injection nozzles, the pipeline group further includes a plurality of second external pipelines, each of these second external pipelines One of them communicates with one of the third gas injection nozzles and one of the branch pipelines respectively, each of the third gas injection nozzles is used for injecting a curing gas from the outside to the gas corresponding to it Analyzer, and exhausted from the exhaust port; and The valve assembly further includes a plurality of third valves, the third valves are respectively installed on the second external pipes, and are electrically connected to the control unit, so as to reversibly cut off the branch pipe and the branch pipe. The connection of the third gas injection nozzle, Wherein when the control unit opens the third valves and closes the first valves, the curing gas is sent to the gas analyzers and discharged from the exhaust port. 如請求項1所述之氣體檢測系統,其中該管路模組更包含一第四注氣嘴,該管線組更包含一校正管路組,該校正管路組之一端連接該第四注氣嘴,另端連接至該管線組介於該氣體分析儀與該第一閥件之間的區段,該第四注氣嘴以供自外部注入一標準氣體,經該校正管路組至該氣體分析儀,並且自該排氣口排出;以及 該閥件總成更包含一第四閥件,該第四閥件安裝於該校正管路組上,且電連接該控制單元,用以可回復地切斷該第四注氣嘴與該氣體分析儀的聯通, 其中當該控制單元開啟該第四閥件以及關閉該第一閥件時,該標準氣體能夠被送至該氣體分析儀以供校正該氣體分析儀。 The gas detection system as described in claim 1, wherein the pipeline module further includes a fourth gas injection nozzle, and the pipeline group further includes a calibration pipeline group, one end of the calibration pipeline group is connected to the fourth gas injection nozzle The other end is connected to the section of the pipeline set between the gas analyzer and the first valve, and the fourth gas injection nozzle is used for injecting a standard gas from the outside, through the calibration pipeline set to the a gas analyzer and exits from the exhaust port; and The valve assembly further includes a fourth valve, which is installed on the calibration pipeline set and is electrically connected to the control unit for reversibly cutting off the fourth gas injection nozzle from the gas Analyzer connectivity, Wherein when the control unit opens the fourth valve and closes the first valve, the standard gas can be sent to the gas analyzer for calibration of the gas analyzer. 如請求項1所述之氣體檢測系統,更包含: 一加熱模組,用以加熱該管路模組。 The gas detection system as described in claim 1 further includes: A heating module is used for heating the pipeline module. 如請求項1所述之氣體檢測系統,更包含: 一操作面板,位於該櫃體上,電連接該控制單元及該氣體分析儀,用以透過該控制單元指示該閥件總成作動,以及顯示該氣體分析儀所輸出之分析數據。 The gas detection system as described in claim 1 further includes: An operation panel, located on the cabinet body, electrically connected to the control unit and the gas analyzer, is used to instruct the valve assembly to operate through the control unit, and to display the analysis data output by the gas analyzer.
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