CN218896092U - Gas detection system - Google Patents

Abstract

The utility model relates to a gas detection system. The gas detection system comprises a cabinet body, a pipeline module, a gas analyzer, a valve and a control unit. The pipeline module is provided with a pipeline group, an air injection nozzle and an air outlet, wherein the pipeline group is positioned in the cabinet body and is respectively connected with the air injection nozzle and the air outlet. The gas injection nozzle is used for injecting the tested gas from outside. The exhaust port is used for exhausting the tested gas. The gas analyzer is installed in the cabinet body, connected with the pipeline group and used for analyzing the tested gas obtained from the pipeline group. The valve is installed on the pipeline set and is arranged between the gas injection nozzle and the gas analyzer to open or close the communication between the gas injection nozzle and the gas analyzer. The control unit is electrically connected with the valve element and used for electrically controlling the switch of the valve element. Through the structure, the utility model can integrate one or more analyzers in a system, thereby saving the sending time and the analysis time and reducing the risk of gas leakage.

Description

Gas detection system

Technical Field

The present utility model relates to a detection system, and more particularly, to a gas detection system.

Background

Gas detection and analysis, as such, is an important means for detecting the presence and concentration of certain chemical gases and determining their chemical composition. At present, a gas detection mode is mostly adopted to manually sample a gas cylinder to be detected, and then the gas cylinder is manually moved to analysis equipment of a specific analysis project so as to detect and analyze the gas.

However, when the above gas detection method faces to various analysis items, not only needs to repeatedly sample and move to a specific analysis device each time, so that multiple times of delivering and analyzing time are required, but also frequent sampling of the gas cylinder to be detected easily causes risk of gas leakage, which is quite time-consuming and inconvenient.

It is evident from this that the above-described technique still has inconveniences and drawbacks, and needs to be further improved. Therefore, how to effectively solve the above-mentioned inconveniences and drawbacks, which are one of the important research and development problems at present, is also an urgent need for improvement in the related art.

Disclosure of Invention

It is therefore an object of the present utility model to provide a gas detection system that overcomes the above-mentioned difficulties.

An embodiment of the present utility model provides a gas detection system. The gas detection system comprises a cabinet body, a pipeline module, at least one gas analyzer, a valve assembly and a control unit. The pipeline module is provided with a pipeline group, a first air injection nozzle and an air outlet. The pipeline group is arranged in the cabinet body and is respectively connected with the first air injection nozzle and the air outlet. The first air injection nozzle is used for injecting the tested gas from the outside, and the air exhaust nozzle is used for exhausting the tested gas. The gas analyzer is installed in the cabinet body, connected with the pipeline group and used for analyzing the tested gas obtained from the pipeline group. The valve assembly includes at least one first valve member. The first valve is installed on the pipeline set and is arranged between the first gas injection nozzle and the gas analyzer, so as to cut off the communication between the first gas injection nozzle and the gas analyzer in a recoverable way. The control unit is electrically connected with the first valve element and used for controlling the switch of the first valve element.

In accordance with one or more embodiments of the present utility model, in the gas detection system, the pipeline group includes a front pipeline, a rear pipeline, and a plurality of branch pipelines. The front section pipeline is connected with the first air injection nozzle. The rear section pipeline is connected with the exhaust port. The branch pipelines are positioned between the front-section pipeline and the rear-section pipeline, and each branch pipeline is respectively communicated with the front-section pipeline and the rear-section pipeline. The gas analyzers and the first valves are multiple, each gas analyzer and one of the first valves are mounted on one of the branch pipelines together, and each first valve is used for cutting off communication between the front pipeline and the corresponding gas analyzer in a recoverable way. When the detected gas enters the branch pipelines along the front-section pipeline, the control unit can open at least one first valve element, so that the detected gas reaches the gas analyzer corresponding to the detected gas along the branch pipeline of the corresponding first valve element.

In accordance with one or more embodiments of the present utility model, the piping module further comprises at least one second nozzle. The pipeline group further comprises a diversion pipeline and a first external pipeline. The shunt pipeline is respectively connected with the front section pipeline and the rear section pipeline, and the first external pipeline is respectively connected with the front section pipeline and the second air injection nozzle. The valve assembly further includes a second valve member. The second valve is arranged on the first external connection pipe and is electrically connected with the control unit, so as to cut off the communication between the front pipeline and the second air injection nozzle in a reverting way.

In accordance with one or more embodiments of the present utility model, in the gas detection system, the gas detection system further comprises an automatic purge device. The automatic blowing device is connected with the second air injection nozzle for injecting cleaning gas from the outside. When the control unit closes the first valve parts and opens the second valve parts, the automatic blowing device injects cleaning gas from the second gas injection nozzle to the first external pipeline and discharges the cleaning gas from the gas outlet through the diversion pipeline.

In accordance with one or more embodiments of the present utility model, the gas detection system further comprises a gas pressure sensor and a flow control element. The air pressure sensor is arranged on the rear-section pipeline and is used for sensing the pressure in the pipe of the rear-section pipeline. The flow control element is arranged on the rear-section pipeline and is used for correspondingly adjusting the in-pipe pressure of the rear-section pipeline according to the sensing result of the air pressure sensor.

In accordance with one or more embodiments of the present utility model, the piping module further comprises a plurality of third nozzles. The pipeline group further comprises a plurality of second external pipelines. Each second external connection pipe is respectively communicated with the middle third air injection nozzle and one of the branch pipes, and each third air injection nozzle is used for injecting curing gas from the outside to the corresponding gas analyzer and discharging the curing gas from the exhaust port. The valve assembly further comprises a plurality of third valves. The third valve parts are respectively arranged on the second external connecting pipelines and are electrically connected with the control unit, so that the communication between the branch pipelines and the third air injection nozzle can be cut off in a reverting mode. When the control unit opens the third valves and closes the first valves, the curing gas is supplied to the gas analyzers together and discharged from the gas outlet.

In accordance with one or more embodiments of the present utility model, the piping module further comprises a fourth nozzle. The pipeline group further comprises a correction pipeline group, one end of the correction pipeline group is connected with a fourth air injection nozzle, the other end of the correction pipeline group is connected to a section of the pipeline group between the gas analyzer and the first valve, the fourth air injection nozzle is used for injecting standard gas from the outside, and the standard gas is discharged from the air outlet after passing through the correction pipeline group to the gas analyzer. The valve assembly further includes a fourth valve member. The fourth valve is installed on the correction pipeline group and is electrically connected with the control unit, so as to cut off the communication between the fourth air injection nozzle and the gas analyzer in a recoverable way. When the control unit opens the fourth valve and closes the first valve, the standard gas can be sent to the gas analyzer for calibrating the gas analyzer.

In accordance with one or more embodiments of the present utility model, the gas detection system further comprises a heating module. The heating module is used for heating the pipeline module.

In accordance with one or more embodiments of the present utility model, the gas detection system further comprises an operation panel. The operation panel is positioned on the cabinet body and is electrically connected with the control unit and the gas analyzer, and is used for indicating the valve assembly to act through the control unit and displaying analysis data output by the gas analyzer.

Therefore, through the architecture of each embodiment, the utility model can integrate one or more analyzers systematically, so that not only can the time for repeated sending and analysis be saved, but also the risk of gas leakage caused by the gas cylinder to be tested can be reduced.

The above description is merely illustrative of the problems to be solved, the technical means to solve the problems, the efficacy of the utility model, etc., and the specific details of the utility model are set forth in the following description and related drawings.

Drawings

The above and other objects, features, advantages and embodiments of the present utility model will become more apparent by reading the following description of the accompanying drawings in which:

FIG. 1 is a simplified schematic diagram of a gas detection system according to the present utility model.

FIG. 2 is a schematic diagram of a gas detection system according to an embodiment of the present utility model.

FIG. 3 is an electronic block diagram of the gas detection system of FIG. 2.

FIG. 4 is a flow chart of a gas detection method of a gas detection system according to an embodiment of the utility model.

[ Main element symbols description ]

10. 11 gas detection system 100, cabinet

200 pipeline module 210 pipeline group

211 front section pipeline 212 and rear section pipeline

213 branch line 214 branch line

220 first external pipeline 230 second external pipeline

240, third external pipeline 260 and fifth external pipeline

400 correction pipe group 410 main channel

420 first sub-channel 430 second sub-channel

440 analytical components 501-507 steps

510 first gas injection nozzle 520 second gas injection nozzle

530 third nozzle 540 fourth nozzle

550 fifth nozzle 560 exhaust port

570 sixth air injection nozzle 580 seventh air injection nozzle

600 gas analyzer 700 valve assembly

710 front valve member 720 rear valve member

731 first front valve element 732 first rear valve element

741 second front valve element 742, second rear valve element

751 third front valve piece 752 third rear valve piece

761 fourth front valve part 762 fourth rear valve part

763 fifth valve 771 first branch valve

772 second branch valve 773 third branch valve

774 fourth 775 fifth branch valve

776 sixth branch valve 810 first air pressure sensor

820 second air pressure sensor 830 third air pressure sensor

840 fourth air pressure sensor 850, fifth air pressure sensor

860 flow control element 870 heating module

900 central control system 910, control unit

920 logic circuit 930 operation panel

B, automatic blowing device C, steel cylinder

D, direction V, exhaust equipment

Detailed Description

Various embodiments of the utility model are disclosed in the following drawings, in which details of the practice are set forth in the following description for the purpose of clarity. However, it should be understood that these practical details are not to be taken as limiting the utility model. That is, in embodiments of the present utility model, these practical details are not necessary. Moreover, for the purpose of simplifying the drawings, some of the structures and elements commonly known in the art will be shown in a simplified schematic form.

Fig. 1 is a simplified schematic diagram of a gas detection system 10 of the present utility model. As shown in fig. 1, the gas detection system 10 includes a cabinet 100, a piping module 200, a gas analyzer 600, a valve assembly 700, and a central control system 900. The piping module 200 has a piping set 210, a first nozzle 510, and an exhaust port 560. The first air injection nozzle 510 and the air outlet 560 are respectively fixed on the surface of the cabinet 100, and the pipeline group 210 is fixed in the cabinet 100. One end of the manifold 210 is connected to the first nozzle 510 and the other end is connected to the exhaust port 560. The first nozzle 510 is provided for injecting a test gas from the outside, and the exhaust opening 560 is provided for exhausting the test gas. For example, the first nozzle 510 is connected to a cylinder C or an external gas pipe (not shown) containing a gas to be tested, and the gas outlet 560 is connected to a pumping device V or an external gas pipe (not shown), wherein the gas to be tested is, for example, hydrogen chloride (HCl), chlorine (Cl 2), nitrogen (N2), oxygen (O2), helium (He), argon (Ar), hexafluorobutadiene (C4F 6), difluoromethane (CH 2F 2), fluoromethane (CH 3F), octafluorocyclobutane (C4F 8), trifluoromethane (CHF 3), hydrofluoric acid (HF), tungsten hexafluoride (WF 6), dichlorosilane (SiH 2Cl 2), monosilane (SiH 4), etc., however, the utility model is not limited thereto.

The gas analyzer 600 is mounted within the cabinet 100 and is connected to a portion of the line set 210. The valve assembly 700 includes a front valve member 710 and a rear valve member 720. The front valve 710 is mounted on the pipeline set 210 between the first nozzle 510 and the gas analyzer 600 for cutting off or restoring communication between the first nozzle 510 and the gas analyzer 600. The rear valve 720 is mounted on the manifold 210 between the exhaust port 560 and the gas analyzer 600 to shut off or restore communication between the exhaust port 560 and the gas analyzer 600.

The central control system 900 includes a control unit 910, a logic circuit 920, and an operation panel 930. The control unit 910 is electrically connected to the logic circuit 920 and the operation panel 930, and the control unit 910 automatically executes a specific detection procedure according to the program content of the logic circuit 920 and returns the detection result through the operation panel 930. More specifically, the control unit 910 is electrically connected to the front valve 710 and the rear valve 720, for controlling the opening and closing of the front valve 710 and the rear valve 720, respectively. The operation panel 930 is electrically connected to the gas analyzer 600 for indicating the opening and closing of the front valve 710 and the rear valve 720 by the control unit 910, and transmitting the analysis data outputted from the gas analyzer 600 to a display screen or database (not shown) of the operation panel 930. For example, the central control system 900 is located on the cabinet 100, however, the present utility model is not limited thereto.

Thus, when the gas detection system 10 is about to perform a gas analysis process, the control unit 910 can open the front valve 710 and the rear valve 720 by automatically executing the process; next, as shown in direction D, the gas under test is introduced into the pipeline set 210 from the first nozzle 510, and after passing through the gas analyzer 600, the gas analyzer 600 analyzes the gas under test obtained from the pipeline set 210, and transmits the analysis data to the central control system 900.

In contrast, when the gas analysis process is completed, the control unit 910 closes the front valve 710 and the rear valve 720 by automatically executing the process contents. Therefore, the measured gas is blocked from being conducted to the gas analyzer 600. However, the present utility model is not limited thereto, and other embodiments allow an operator to manually instruct the control unit 910 to perform or terminate the gas analysis process through the operation panel 930.

In addition, the gas detection system 10 includes a first gas pressure sensor 810 and a flow control element 860. The first air pressure sensor 810 is installed on the pipeline set 210 between the rear valve 720 and the gas analyzer 600 for sensing the in-line pressure of the pipeline set 210. The first air pressure sensor 810 is further electrically connected to the operation panel 930 and the control unit 910, and displays the sensing result of the first air pressure sensor 810 on the display panel of the operation panel 930, however, the present utility model is not limited thereto. The flow control element 860 is installed on the pipeline set 210 for adjusting the in-line pressure of the pipeline set 210 in response to the sensing result of the first air pressure sensor 810.

Thus, the flow control element 860 adjusts the pressure in the pipe of the pipe set 210, so that the gas detection system 10 can automatically sample the gas to be detected to the gas analyzer 600, and the gas analyzer 600 can maintain stable operation, thereby saving multiple time for delivering and analyzing, and reducing the risk of gas leakage caused by the gas cylinder to be detected.

Fig. 2 is a schematic diagram of a pipeline of a gas detection system 11 according to an embodiment of the present utility model. Fig. 3 is an electronic block diagram of the gas detection system 11 of fig. 2. As shown in fig. 2 and 3, the gas detection system 11 of the present embodiment is substantially the same as that described above, except that the gas detection system 11 of the present embodiment can perform automatic purge replacement, standard gas reference point correction and calibration curve correction before gas analysis, and then can synchronously or sequentially introduce the same gas (e.g. the detected gas) into the multiple gas analyzers 600 according to the needs of the analysis apparatus, respectively, so as to receive the respective detection analysis. By controlling the environment and atmosphere during analysis, a high-accuracy analysis result is achieved, so that the error value of manual operation is reduced, and the aim of multiple analysis of the same gas is fulfilled.

More specifically, in the present embodiment, the pipeline set 210 of the gas detection system 11 further includes a front pipeline 211, a rear pipeline 212, and a plurality of (e.g., four) branch pipelines 213. The front pipe 211 is connected to the first nozzle 510. The back end line 212 is connected to an exhaust port 560. These branch pipes 213 are located between the front-stage pipe 211 and the rear-stage pipe 212, and each branch pipe 213 communicates with the front-stage pipe 211 and the rear-stage pipe 212, respectively. Further, the gas detection system 11 has a plurality of gas analyzers 600 (e.g., four), a plurality of first front valve elements 731 (e.g., four), and a plurality of first rear valve elements 732 (e.g., four). One of the gas analyzers 600, the first front valve 731, and the first rear valve 732 are mounted on each of the branch pipes 213, and the gas analyzer 600 on the same branch pipe 213 is located between the corresponding first front valve 731 and first rear valve 732.

The gas detection system 11 includes an analysis assembly 440 and a seventh gas injection nozzle 580. The seventh nozzle 580 is fixedly disposed on the surface of the cabinet 100. The pipeline module 200 has a fifth external pipeline 260 connected to the analysis fitting 440 and the seventh nozzle 580. The seventh nozzle 580 is provided for connecting to a cylinder C or an external gas pipe (not shown) containing the gas to be tested. The seventh nozzle 580 is used for injecting the dilution gas from the outside, and the dilution gas flows to the analysis fitting 440 along the fifth external connection 260. For example, the analyzing fitting 440 is a mixing device capable of receiving a dilution gas and a standard gas and mixing the mixture gas with different ratios, and the dilution gas herein is nitrogen (N2), helium (He), argon (Ar), or the like. The valve assembly 700 includes a fifth valve 763, the fifth valve 763 is mounted on the fifth external conduit 260 and electrically connected to the control unit 910 for cutting off or restoring communication between the analysis fitting 440 and the seventh nozzle 580.

More specifically, the calibration of the standard gas reference point is performed, for example, by opening the fifth branch valve 775, closing the particular first front valve 731, and injecting the standard gas from the sixth nozzle 570 into the particular gas analyzer 600. The calibration is performed by, for example, opening the fourth front valve 761, the fourth rear valve 762, the fifth valve 763, and the third branch valve 773, injecting the standard gas from the fourth nozzle 540 into the analysis fitting 440, injecting the diluted standard gas with different proportions from the seventh nozzle 580, and introducing the diluted standard gas into the gas analyzer 600. It should be understood that the above-mentioned piping structure can be pre-installed by a person skilled in the art according to the requirement or limitation to a specific gas analyzer.

Therefore, when the gas detection system 11 is about to perform multiple gas analyses, the control unit 910 instructs the flow control element 860 to operate to automatically let the detected gas enter the front-stage pipeline 211 from the first gas injection nozzle 510 and reach the branch pipelines 213 along the front-stage pipeline 211 according to the pressure value sensed by the first gas pressure sensor 810. Next, the control unit 910 can selectively open the first front valve 731 and the first rear valve 732 disposed on one, several or all of the branch lines 213 simultaneously or sequentially, so as to allow the measured gas to reach the corresponding gas analyzer 600 along the one or more branch lines 213. However, the present utility model is not limited thereto, and other embodiments allow an operator to manually instruct the control unit 910 (fig. 1) to perform or terminate the gas analysis process through the operation panel 930.

It should be understood that the gas analyzers 600 are not limited to have the same or different analyzing functions, for example, the analysis items such as gas water content, gas purity ratio, gas specific gravity, gas chromatography, gas suspended particles, micro-content gas detection, etc., however, the present utility model is not limited thereto.

Further, the gas detection system 11 includes a second air pressure sensor 820 mounted on the front pipe 211. The valve assembly further comprises a second front valve 741 and a second rear valve 742 disposed on the front pipeline 211. The second front valve 741 is interposed between the first nozzle 510 and the second air pressure sensor 820, and the second rear valve 742 is interposed between the second air pressure sensor 820 and the first front valve 731. The second air pressure sensor 820 is located between the second front valve 741 and the second rear valve 742 for sensing the in-line pressure of the pipeline set 210 between the second front valve 741 and the second rear valve 742. The second front valve 741 is configured to shut off or resume communication of the first nozzle 510 with the second air pressure sensor 820. The second back valve 742 is configured to shut off or resume communication of the first nozzle 510 with the branch line 213.

The manifold module further includes one or more (e.g., two) second nozzles 520. The pipeline set 210 further includes a diversion pipeline 214 and a first external pipeline 220. The two ends of the diversion line 214 are respectively connected with the front-stage line 211 and the rear-stage line 212, that is, any gas in the front-stage line 211 can be discharged from the gas outlet 560 without passing through the diversion line 213. For example, the second nozzle 520 is connected to the automatic blowing device B separately or together.

One end of the first external pipeline 220 is connected to the front pipeline 211, and the other end of the first external pipeline is connected to the second air injection nozzles 520 in a branch pipe mode. The valve assembly further comprises two third front valves 751 and a third rear valve 752 mounted on the first external conduit 220. Third front valve elements 751 are each electrically connected to control unit 910, and each third front valve element 751 is configured to shut off or resume communication of front section line 211 with second nozzle 520. The gas detection system 11 includes a third air pressure sensor 830 mounted on the first external conduit 220. The third air pressure sensor 830 is disposed between the third front valve 751 and the third rear valve 752 for sensing the in-line pressure of the first external circuit 220 between the third front valve 751 and the third rear valve 752.

The valve assembly further includes a first branch valve 771 and a plurality of second branch valves 772 disposed on the branch line 214. The first branch valve 771 is electrically connected to the control unit 910 for cutting off or restoring communication between the back-end pipeline 212 and the front-end pipeline 211. The gas detection system 11 includes a fourth air pressure sensor 840 mounted on the front pipe 211. The fourth air pressure sensor 840 is located upstream of the first branch valve 771 for sensing the in-line pressure on the shunt line 214.

Furthermore, the piping module further comprises a plurality of third nozzles 530, the piping set 210 further comprises a plurality of second external piping 230, and the valve assembly further comprises a plurality of second branch valves 772. Each of the second external pipelines 230 is connected to one of the third nozzles 530 and the branch pipeline 213, and the second branch valves 772 are respectively installed on the second external pipelines 230 and electrically connected to the control unit 910 for cutting off or restoring the communication between the branch pipeline 213 and the third nozzle 530. Each third nozzle 530 is configured to inject a curing gas from outside, so that the gas analyzer 600 performs equipment maintenance when the gas analysis is not performed. The curing gas flows along the corresponding branch line 213 to the gas analyzer 600 corresponding thereto. For example, the third nozzle 530 is connected to a cylinder or an external gas pipe (not shown) containing a curing gas, and the curing gas is, for example, nitrogen (N2), helium (He), argon (Ar), etc., however, the utility model is not limited thereto.

Thus, when the gas detection system 11 is about to perform the maintenance procedure of the gas analyzer 600, the control unit 910 selectively closes all the first front valve 731 and opens all the second branch valve 772 and the first rear valve 732 by the above procedure; next, the control unit 910 instructs the flow control element 860 to operate according to the value of the first air pressure sensor 810, controls the internal pressure of the rear pipeline 212, and opens the second branch valve 772 to instruct the curing air to be sent from the third air nozzle 530 to the corresponding air analyzer 600 along the branch pipelines 213, so as to maintain the air analyzer 600; the third back valve element 752 is further controlled to close and the suction device V continues to suck air from the air outlet 560. However, the present utility model is not limited thereto, and other embodiments allow an operator to manually instruct the control unit 910 (fig. 1) to perform or terminate the maintenance procedure of the analyzer through the operation panel 930.

Then, when the gas detection system 11 is about to perform the pipeline cleaning process, the control unit 910 selectively closes all of the first front valve 731, the second rear valve 742, and opens the third front valve 751, the third rear valve 752, and the first branch valve 771; next, when the fourth air pressure sensor 840 detects that the front pipeline 211 is vacuum, and instructs to open the third back valve 752 and let the automatic blowing device B inject the cleaning gas (or purge gas) from the outside into the first external pipeline 220, and exhaust the cleaning gas from the air outlet 560 through the split pipeline 214, so as to clean the inside of the front pipeline 211 and the split pipeline 214 of the pipeline group 210. For example, the cleaning gas is, for example, a gas such as nitrogen (N2), helium (He), argon (Ar), or the like, however, the present utility model is not limited thereto.

In this way, the gas detection system 11 can automatically blow the pipelines, so that cross contamination between the pipelines is avoided. However, the present utility model is not limited thereto, and other embodiments allow the operator to manually instruct the control unit 910 (fig. 1) to perform or terminate the above-mentioned pipeline cleaning process through the operation panel 930.

The manifold module further includes one or more (e.g., two) fourth nozzles 540. The pipeline assembly 210 further includes a calibration pipeline assembly 400 for a particular gas analyzer 600 that is required to make an analytical calibration line. The calibration line set 400 is connected to the fourth nozzle 540, a specific one of the branch lines 213, and the back end line 212, respectively. In this embodiment, the branch line 213 is interposed between a particular gas analyzer 600 and a particular first front valve 731. Any one of the fourth nozzles 540 is supplied with a standard gas from the outside, the diluent gas is supplied from the seventh nozzle 580 to the analyzing fitting 440 through the main channel 410 to the fifth valve 763, the control unit 910 instructs the analyzing fitting 440 to mix a plurality of diluent standard gases having a specific concentration ratio, and then the diluent standard gases are supplied to the specific gas analyzer 600 through the first sub-channel 420 and the branch pipe 213 to perform the calibration line establishment, and the diluent gases are discharged from the gas outlet 560. For example, the fourth nozzle 540 is connected to a cylinder C or an external gas pipe (not shown) containing standard gas, the diluted gas enters the analysis fitting 440 through the fifth external pipeline 260, the diluted standard gas with different concentrations is sequentially mixed, and then the diluted standard gas is introduced into the specific gas analyzer 600 to establish a measuring line, wherein the standard gas in this embodiment is, for example, hydrogen chloride (HCl), chlorine (Cl 2), nitrogen (N2), oxygen (O2), helium (He), argon (Ar), hexafluorobutadiene (C4F 6), difluoromethane (CH 2F 2), fluoromethane (CH 3F), octafluorocyclobutane (C4F 8), trifluoromethane (CHF 3), hydrofluoric acid (HF), tungsten hexafluoride (WF 6), dichlorosilane (SiH 2Cl 2), monosilane (SiH 4), and the like; dilution gas such as: helium (He), nitrogen (N2), argon (Ar), and the like. However, the present utility model is not limited thereto. It should be understood that the above-mentioned piping structure can be pre-installed by a person skilled in the art according to the requirement or limitation to a specific gas analyzer.

Thus, when the gas detection system 11 is about to perform the calibration procedure of the gas analyzer 600, the control unit 910 selects to close the corresponding first front valve 731 and second rear valve 742 and open the fourth front valve 761, fourth rear valve 762 and third branch valve 773 according to the above procedure; next, the control unit 910 instructs the flow control element 860 to operate to introduce the standard gas from the fourth nozzle 540 to the corresponding main channel 410 to enter the analysis fitting 440, and opens the fifth valve 570 to allow the diluent gas to enter the analysis fitting 440 through the fifth external pipeline 260, the control unit 910 instructs the analysis fitting 440 to dispense the standard gas diluted in various mixing ratios according to the calibration curve demand, and the standard gas enters the gas analyzer 600 through the first channel 420 and the branch pipeline 213 to perform calibration curve establishment, and then the analyzed gas is discharged from the gas outlet 560 through the rear pipeline 212 to be used for calibration curve calibration of the corresponding gas analyzer 600. However, the present utility model is not limited thereto, and other embodiments allow the operator to manually instruct the control unit 910 (fig. 1) to execute or terminate the calibration procedure through the operation panel 930.

More specifically, the calibration pipe set 400 includes a main channel 410, a first sub-channel 420, and a second sub-channel 430. One end of the main channel 410 is connected to the fourth nozzles 540 in the form of a manifold, and the other end is connected to the analysis assembly 440. The first secondary channel 420 is connected to the analysis fitting 440 and the branch line 213, and the second secondary channel 430 is connected to the main channel 410 and the rear line 212. The valve assembly further includes two fourth front valves 761, a fourth rear valve 762, a third branch valve 773, and a fourth branch valve 774. The third branch valve 773 is installed on the first sub-channel 420 and electrically connected to the control unit 910 for cutting off or restoring the communication between the calibration pipe set 400 and the branch pipe 213. The fourth branch valve 774 is installed on the second sub-channel 430 and electrically connected to the control unit 910 for cutting off or restoring the communication between the calibration pipe set 400 and the back pipe 212. The fourth front valve component 761 and the fourth rear valve component 762 are mounted on the calibration pipe set 400. The fourth front valves 761 are electrically connected to the control unit 910, respectively, and each of the fourth front valves 761 is configured to disconnect or restore communication between the calibration line set 400 and the fourth nozzle 540. The gas detection system 11 includes a fifth gas pressure sensor 850. The fifth air pressure sensor 850 is located between the fourth front valve 761 and the fourth rear valve 762, and is configured to sense the in-line pressure of the correction pipe set 400 between the fourth front valve 761 and the fourth rear valve 762. Thus, the gas detection system 11 can automatically control the introduction of the blank sample gas (e.g., standard gas) to automatically sample the blank sample gas, so as to avoid analysis error values and to construct a pipeline system (e.g., a disk system) for the exhaust recharging portion, so as to avoid recharging the exhaust after analysis to the gas analyzer 600.

In addition, the pipeline module further includes a fifth nozzle 550, and the pipeline set 210 further includes a third external pipeline 240. The third external connection pipe 240 is connected to the main channel 410 and the fifth nozzle 550, and the fifth nozzle 550 is used for injecting a cleaning gas (or purge gas) from outside, and the cleaning gas flows to the air outlet 560 along the third external connection pipe 240 and the second secondary channel 430 for cleaning and purging the calibration pipe. For example, the fifth nozzle 550 may also be connected to the automatic blowing device B or the like for outputting the cleaning gas, such as nitrogen (N2), helium (He), argon (Ar), etc., to the third external pipeline 240, the main channel 410 and the secondary channel 430, and discharging the cleaning gas from the exhaust port 560. The valve assembly further includes a sixth branch valve 776, wherein the sixth branch valve 776 is mounted on the third external pipeline 240 and electrically connected to the control unit 910 for cutting off or restoring the communication between the main channel 410 and the fifth nozzle 550. It should be appreciated that the process of cleaning the pipeline through the fifth nozzle 550 and the third external pipeline 240 is substantially similar to the process of cleaning the pipeline through the second nozzle 520 and the front pipeline 211, and thus will not be described again.

In addition, in the present embodiment, the air nozzles 510, 520, 530, 540, 550, 570, 580 and the air outlet 560 are respectively fixed on the surface of the cabinet 100, however, the present utility model is not limited thereto.

It should be understood that the representation of the pipeline set 210 in the figure is illustrative only and is not limited to the shape. In addition, in the above embodiments, the pipe line set 210 is a representation of, for example, a hard pipe or a soft pipe, however, the present utility model is not limited thereto. In the above embodiments, the Flow control element 860 is a Mass Flow controller (Mass Flow Controller, MFC) or a Mass Flow Meter (MFM), which is a Meter for accurately measuring the Flow rate of gas, and has not only a function of measuring the Flow rate but also a function of controlling the Flow rate of gas.

As shown in fig. 3, the gas detection system further comprises a heating module 870. The heating module 870 is used for heating the pipeline set 210 before gas analysis to eliminate moisture in the pipeline and improve the gas analysis accuracy, thereby making the overall process smoother. However, the present utility model is not limited thereto, and other embodiments may allow for the entire or remaining time to heat the manifold 210.

In the above embodiment, the operation method of the gas detection system is mainly that after the internal body of the pipeline is subjected to blowing replacement, the standard gas is automatically introduced to perform detection instrument correction, and after the correction of the analysis instrument is completed, the gas to be detected is sequentially introduced to perform gas characteristic detection analysis, and meanwhile, in the part of the analysis waste gas, the pressure sensing element and the flow control element are used for controlling the gas environment at the waste gas end, so that the analysis distortion caused by the waste gas recharging analysis instrument is avoided. And after analysis is completed, the analysis data is returned to the central control system or other computer systems.

FIG. 4 is a flow chart of a gas detection method of a gas detection system according to an embodiment of the utility model. As shown in fig. 4, the gas detection method includes steps 501 to 507 as follows. In step 501, the pipeline module is cleaned and the gas analyzer is maintained. In step 502, a negative pressure is generated in the tube and the gas in the tube is exhausted. In step 503, a standard gas is introduced to perform gas analyzer calibration. In step 504, the pipeline module is cleaned and the gas analyzer is maintained. In step 505, a negative pressure is generated in the tube, and the gas in the tube is exhausted. In step 506, the gas under test is injected into each gas analyzer sequentially or synchronously. In step 507, the gas analyzer analyzes the gas to be measured, and outputs analysis data of the gas analyzer.

In steps 501 and 504, more specifically, a cleaning gas (or purge gas) is injected into the pipeline module to clean a portion of the pipeline module, and a curing gas is injected from the branch pipelines to the corresponding gas analyzers, respectively, to maintain the corresponding gas analyzers. In steps 502 and 505, more specifically, the in-line pressure in the pipeline module is reduced to negative pressure to expel the cleaning gas and the curing gas out of the pipeline module. Further, in steps 502 and 505, the in-line pressure in the pipeline module is sensed, and then the in-line pressure of the pipeline module is adjusted correspondingly according to the sensed in-line pressure. In step 503, more specifically, a standard gas is injected into one of the gas analyzers for calibration by the gas analyzer; then, injecting a cleaning gas (or purge gas) into the pipeline module to clean a part of the pipeline module; then, the curing gas is injected from these branch pipes to the corresponding gas analyzers, respectively, to maintain the corresponding gas analyzers. In steps 506 to 507, more specifically, injecting the gas to be tested into the pipeline module of the gas detection system, and selectively opening the valve elements arranged on one, several or all branch pipelines synchronously or sequentially, so that the gas to be tested reaches the corresponding gas analyzer along the one or more branch pipelines; then, analyzing the detected gas obtained from the branch pipeline by a gas analyzer, and outputting analysis data of the detected gas; and discharging the tested gas out of the pipeline module.

In this embodiment, the method further includes heating the piping module of the gas detection system prior to step 506. More specifically, the step of heating the piping module of the gas detection system further includes several steps as follows. The pipeline module of the gas detection system is heated by a high-frequency heating coil. Hot air is fed into an air gap in the pipe, which is separated between the inner pipe and the outer pipe of the pipeline module, through the hot air device.

Therefore, through the architecture of each embodiment, the utility model can integrate one or more analyzers systematically, so that not only can the time for repeated sending and analysis be saved, but also the risk of gas leakage caused by the gas cylinder to be tested can be reduced.

Finally, the embodiments disclosed above are not intended to limit the utility model, but one skilled in the art can make various modifications and adaptations without departing from the spirit and scope of the utility model. The protection scope of the present utility model is therefore defined by the claims.

Claims (9)

1. A gas detection system, comprising:

a cabinet body;

the pipeline module is provided with a pipeline group, a first air injection nozzle and an air outlet, wherein the pipeline group is arranged in the cabinet body and is respectively connected with the first air injection nozzle and the air outlet, the first air injection nozzle is used for injecting tested gas from outside, and the air outlet is used for discharging the tested gas;

at least one gas analyzer installed in the cabinet body, connected to the pipeline set, for analyzing the tested gas obtained from the pipeline set;

the valve assembly comprises at least one first valve, and the first valve is arranged on the pipeline group and is arranged between the first gas injection nozzle and the gas analyzer, so as to cut off the communication between the first gas injection nozzle and the gas analyzer in a recoverable way; and

the control unit is electrically connected with the first valve element and used for controlling the switch of the first valve element.

2. The gas detection system of claim 1, wherein the pipeline set comprises:

the front pipeline is connected with the first air injection nozzle;

a rear pipeline connected with the exhaust port; and

a plurality of branch pipelines positioned between the front pipeline and the rear pipeline, each of the plurality of branch pipelines is respectively communicated with the front pipeline and the rear pipeline,

wherein the at least one gas analyzer and the at least one first valve are plural, each of the plurality of gas analyzers and one of the plurality of first valve are commonly installed on one of the plurality of branch pipelines, each of the plurality of first valve is used for cutting off communication between the front pipeline and the corresponding gas analyzer in a reverting way,

when the detected gas enters the branch pipelines along the front pipeline, the control unit can open at least one of the first valve members, so that the detected gas reaches the gas analyzer corresponding to the detected gas along the branch pipeline of the corresponding at least one first valve member.

3. The gas detection system of claim 2, wherein the pipeline module further comprises at least one second gas injection nozzle, the pipeline group further comprises a split pipeline and a first external pipeline, the split pipeline is respectively connected with the front pipeline and the rear pipeline, and the first external pipeline is respectively connected with the front pipeline and the second gas injection nozzle; and

the valve assembly further comprises a second valve element, wherein the second valve element is arranged on the first external connecting pipe and is electrically connected with the control unit, so as to cut off the communication between the front pipeline and the second air injection nozzle in a recoverable way.

4. The gas detection system of claim 3, further comprising:

an automatic blowing device connected with the second air injection nozzle for injecting cleaning gas from the outside,

when the control unit closes the first valves and opens the second valves, the automatic blowing device injects the cleaning gas from the second gas injection nozzle to the first external pipeline, and the cleaning gas is discharged from the gas outlet through the diversion pipeline.

5. The gas detection system of claim 2, further comprising:

the air pressure sensor is arranged on the rear-section pipeline and is used for sensing the pressure in the pipe of the rear-section pipeline; and

the flow control element is arranged on the rear pipeline and is used for correspondingly adjusting the in-pipe pressure of the rear pipeline according to the sensing result of the air pressure sensor.

6. The gas detection system of claim 2, wherein the piping module further comprises a plurality of third gas injection nozzles, the piping set further comprises a plurality of second external piping, each of the plurality of second external piping communicates with one of the plurality of third gas injection nozzles and one of the plurality of branch piping, respectively, each of the plurality of third gas injection nozzles for injecting a curing gas from outside to the gas analyzer corresponding thereto, and discharging from the gas outlet; and

the valve assembly further comprises a plurality of third valve components which are respectively arranged on the plurality of second external connecting pipes and are electrically connected with the control unit for cutting off the communication between the branch pipe and the third air injection nozzle in a recoverable way,

wherein the maintenance gas is commonly supplied to the plurality of gas analyzers and discharged from the gas outlet when the control unit opens the plurality of third valve elements and closes the plurality of first valve elements.

7. The gas detection system of claim 1, wherein the piping module further comprises a fourth gas nozzle, the piping set further comprises a calibration piping set, one end of the calibration piping set is connected to the fourth gas nozzle, the other end is connected to a section of the piping set between the gas analyzer and the first valve, the fourth gas nozzle is used for injecting standard gas from outside, through the calibration piping set to the gas analyzer, and discharging from the gas outlet; and

the valve assembly further comprises a fourth valve installed on the calibration pipeline set and electrically connected to the control unit for reversibly cutting off the communication between the fourth gas injection nozzle and the gas analyzer,

wherein when the control unit opens the fourth valve and closes the first valve, the standard gas can be sent to the gas analyzer for calibrating the gas analyzer.

8. The gas detection system of claim 1, further comprising:

the heating module is used for heating the pipeline module.

9. The gas detection system of claim 1, further comprising:

the operation panel is positioned on the cabinet body and is electrically connected with the control unit and the gas analyzer, and is used for indicating the valve assembly to act through the control unit and displaying analysis data output by the gas analyzer.

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