TWM636963U - Resonant vibration actuator - Google Patents

Abstract

The present invention is a vibration actuator capable of generating vibration in two directions, comprising: a housing, a mover, a plurality of electromagnet groups, two elastic supports, and a connecting line; the housing is provided with terminal points ; The mover includes: a frame, a plurality of permanent magnet units, and two magnetic backplanes, the permanent magnet unit and the magnetic backplane are arranged in the frame; the electromagnet group is arranged on the two permanent magnet units of the mover Between; the elastic support member is connected to the casing and the mover respectively by two connecting parts located at both ends; the connection line is used to connect the electromagnet group and the terminal point outside the casing; wherein, when By energizing the electromagnet group, the electromagnet exerts force on the permanent magnet unit so that the mover relatively moves in the housing to generate vibration.

Description

vibration actuator

The present invention relates to the technical field of a vibration actuator, in particular to a vibration actuator capable of producing two different vibration directions.

Most electronic devices on the market, such as portable communication devices, game consoles, tablet computers, touch pads and other electronic products have begun to be equipped with tactile feedback functions. In order to enable timely feedback when the product is triggered by force, some electronic devices Vibration is generated using a vibration actuator, including for notifying a portable communication device of an incoming call, for providing haptic feedback from a game console, and the like.

The vibration actuator that is used for this purpose is usually a casing 10, and the electromagnet of the tool coil that is provided with in the casing 10, the vibrating mover 20 that has permanent magnet in the casing 10, by For the permanent magnet and the electromagnet disposed in the casing 10, applying alternating current to the electromagnet generates a magnetic field with alternating polarity, and vibration is generated by alternately generating attractive and repulsive forces between the permanent magnet and the electromagnet.

The main purpose of the present invention is to provide an electric actuator that can generate two different vibration directions to increase the diversity of tactile feedback.

In order to achieve the aforementioned purpose, the present invention provides the following technical solutions: a vibration actuator that can generate vibration in two directions, including: a housing (casing), a mover (mover), a plurality of electromagnet sets (electromagnet set) , two elastic supports (elastic suspension), and a connection line; the casing includes: a chassis, and a top cover, the top cover can be covered and combined with the chassis to form a three-dimensional rectangular box after the combination, the outside of the casing A terminal is provided to electrically connect an external circuit; the mover includes: a frame (mover frame), a plurality of permanent magnet units (permanent magnet units), two magnetic back plates (magnetic back), the The magnetic backboard is closely arranged in the frame, the plurality of permanent magnet units are arranged side by side and adjacent to the magnetic backboard, and the magnetic backboard and the permanent magnet unit form a magnetic circuit to prevent the magnetic field of the permanent magnet unit from leaking to the outside; Each electromagnet group includes: a magnetic core, two conductive bobbin flanges, and a coil. The magnetic axis constitutes a bobbin, and the coil is wound on the bobbin. The electromagnet group is arranged between the two permanent magnet units of the mover, and is connected with the permanent magnet unit and the magnetic back plate. An electromagnetic driving portion is formed; the elastic support includes: two connection portions and a connection block, the two connection portions are respectively located at both ends of the elastic support, and one of the connection portions is The connection block is fixed to the casing, and the other connection part is connected to the mover; the connection line is used to connect the coil of the electromagnet group and the terminal point outside the casing; wherein, when passing through the When the coil is energized, the electromagnet exerts a force on the permanent magnet unit so that the mover moves relatively in the casing to generate vibration.

In a preferred embodiment, the electromagnet assembly is further fixed on the chassis and the upper cover of the housing, or one of them, by an electromagnet rack.

In a preferred embodiment, a first direction is defined as parallel to the magnetic axis, a second direction is perpendicular to the first direction and parallel to the chassis 11, and a third direction is parallel to the first direction and the second direction are perpendicular, the electromagnetic driving part uses magnetic force to drive the mover along the second direction and the third direction; the elastic support member is connected to the casing and supports the mover in the casing, so that the mover Vibrates within the housing in a second direction and a third direction.

In a preferred embodiment, the elastic supporting member is a leaf spring formed by cutting and bending, and further includes two connecting parts, two necks, and a deformation supporting part, wherein the configuration of each part is sequentially arranged as the connecting part , a neck, a deformation support portion, a neck, and a connecting portion; the two connecting portions are located at both ends of the elastic support along the first direction, wherein the connecting portion fixed to the housing by the connecting block and the connecting portion The joints of the connecting parts of the mover are located on different two sides of the elastic supporting member in the second direction, and each connecting part is respectively connected to the deformation supporting part by a neck with a smaller width.

In a preferred embodiment, the positive and negative ends of the third direction in the middle part of the elastic supporting member in the first direction have L-shaped features bent outwards toward the second direction, and have a break along the third direction. hole, and the L-shaped feature is still connected with the elastic support without disconnection; the elastic support is perpendicular to the mask of the second direction with a hole, and the hole must not exceed the elastic support in the third direction and the first direction, the elastic support The elastic support has no disconnection in the third direction.

In a preferred embodiment, the deformable supporting part is a square frame with a hollow part, and the square frame is bent into a square ㄈ character, and the bending direction of the upper and lower sides of the square ㄈ character is in line with the direction of the connecting block. Same, and the hollow part is also bent into a square ㄈ character, and the hollow part includes positive and negative hollow features in the second direction and the third direction.

In a preferred embodiment, the elastic supporting member elastically deforms along the second direction and the third direction, thereby supporting the mover to vibrate along the second direction and the third direction.

In a preferred embodiment, the elastic coefficient in the second direction of the elastic support is the first elastic coefficient, the elastic coefficient in the third direction is the second elastic coefficient, and the first elastic coefficient and the second elastic coefficient are different values .

In a preferred embodiment, the mover is supported by the elastic support and vibrates along the second direction at a first natural frequency determined by the first elastic coefficient and the mass of the mover, and when the second elastic coefficient corresponds to A second natural frequency determined by the mass of the mover vibrates along a third direction, and the first natural frequency and the second natural frequency have different values.

In a preferred embodiment, the permanent magnet unit is a plate-shaped magnet with a substantially rectangular parallelepiped shape; the largest and substantially rectangular surface of the permanent magnet unit is a magnetized surface, and each permanent magnet unit is formed from two opposite corners of the magnetized surface. One of the wires is divided into two magnetized regions, and the two magnetized regions are magnetized to mutually different polarities.

In a preferred embodiment, the permanent magnet unit can be a single permanent magnet with two magnetized regions, or a combination of two permanent magnets with a single magnetized region.

In a preferred embodiment, the permanent magnet units are respectively attached to the magnetic back plates on the front side and the rear side of the mover frame, and are located on the extension line in the front and rear direction of the magnetic axis of the winding coil constituting the electromagnet group, The magnetized plane of the permanent magnet unit is perpendicular to the extension line; the area of the magnetic back plate covers the area of a plurality of permanent magnet units adjacent to the same side.

In a preferred embodiment, a corresponding alternating magnetic field can be generated by applying an alternating voltage of a specific frequency to the coils of the electromagnet group; when the electromagnet group generates an alternating magnetic field with the same frequency as the first natural frequency , the mover generates vibration along a second direction; and when the electromagnet group generates an alternating magnetic field having the same frequency as the second natural frequency, the mover generates vibration along a third direction.

In a preferred embodiment, the conductive shaft disk has a hollow central part, so that the magnetic shaft can pass through and be embedded in it; when the mover vibrates, the permanent magnet unit inside moves relative to the conductive shaft disk , the eddy current is generated on the conductive shaft disk, and the magnetic field generated by the eddy current circuit acts on the permanent magnet unit in the mover and suppresses the vibration of the mover; after the supply of the AC voltage is stopped, the vibration of the mover is suppressed The effect enables the mover to stop for a short time.

In a preferred embodiment, the diagonal directions of the permanent magnet units of two adjacent electromagnetic drive parts to divide the magnetized regions are the same; the coils of the electromagnetic drive parts can be connected in series or connected in parallel. parallel) makes the number of endpoints of this terminal two.

In a preferred embodiment, the diagonal lines dividing the magnetized regions of the permanent magnet units of two adjacent electromagnetic driving parts are in different directions, and the coils of the electromagnetic driving parts are respectively connected to the terminal points, so the number of terminal points is four ; When the AC voltage of the same phase (in phase) is applied to the two groups of electromagnetic drive parts, the direction of the combined magnetic force generated is one of the second direction or the third direction, and the opposite phase (completely) is applied to the two groups of electromagnetic drive parts. out of phase) AC voltage, the direction of the combined magnetic force generated is the other direction in the second direction or the third direction.

As mentioned above, the present invention uses a coil and a winding frame to form an electromagnet group. When the current passes through the coil and magnetizes the front and rear ends of the magnetic axis, a magnetic field is generated. Furthermore, the permanent magnet unit is arranged in the casing, facing the two ends of the electromagnet group, the magnetization surface of each permanent magnet unit has two regions with different polarities, and then the electromagnet group and the permanent magnet unit are used to The magnetic force between them can drive the mover in two different directions, and then support the vibrate mover on the housing through the elastic support, so as to achieve the purpose of the present invention.

The technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments and accompanying drawings. It should be noted that when an element is referred to as being "mounted or fixed on" another element, it means that it may be directly on another element or there may be an intervening element. When an element is said to be "connected" to another element, it means that it may be directly connected to the other element or intervening elements may also be present. In the illustrated embodiment, the directions meaning up, down, left, right, front and rear, etc. are relative to explain that the structure and movement of the different components are relative in this case. These representations are pertinent when the components are in the positions shown in the figures. However, if the description of the location of elements changes, these representations are considered to change accordingly.

Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art of this invention. The terminology used herein is only for the purpose of describing specific embodiments, and is not intended to limit the present invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Figure 1 is an exploded view of the first embodiment of the present invention. The present invention provides a vibrating actuator capable of vibrating in two directions, comprising: a housing 10 , a mover 20 , a plurality of electromagnet groups 30 , two elastic supports 40 , and a connecting line 50 .

The following is a detailed description of each component:

As shown in Figure 1, the housing 10 includes: a chassis 11, and an upper cover 12, the upper cover 12 can be covered and combined with the chassis 11 to form a three-dimensional rectangular box after the combination, the housing 10 is provided with wiring The terminal 13 (terminal) is electrically connected to an external circuit.

The mover 20 comprises: a frame (mover frame) 21, a plurality of permanent magnet units (permanent magnet units) 22, two magnetic back plates (magnetic back) 23, and the magnetic back plates 23 are arranged on the frame body 21 closely Inside, the plurality of permanent magnet units 22 are arranged side by side and adjacent to the magnetic back plate 23 .

Each electromagnet group 30 includes: a magnetic axis 31 (magnetic core), two conductive bobbin flanges 32 (conductive bobbin flange), and a coil 33 (coil), and the two conductive bobbin flanges are respectively located at the magnetic axis 31 and form a bobbin with the magnetic axis 31, the coil 33 is wound on the bobbin, and the electromagnet group 30 is arranged between the two permanent magnet units 22 of the mover 20 , and form an electromagnetic driving portion together with the permanent magnet unit 22 and the magnetic back plate 23 . Wherein, the magnetic shaft 31 can be made of magnetic material such as silicon steel, and the conductive shaft disk 32 is made of good conductive material such as copper and aluminum. The electromagnet assembly 30 is further fixed on the chassis 11 and the upper cover 12 of the housing 10 , or one of them, by an electromagnet rack 34 .

The elastic support 40 includes: two connection portions 41 (connection portion) and a connection block 42, the two connection portions 41 are respectively located at the two ends of the elastic support 40, one of the connection portions 41 is connected by the connection portion 42 Fixed to the housing 10 , another connecting portion 41 is connected to the mover 20 .

The connection line 50 is used to connect the coil 33 of the electromagnet group 30 and the terminal point 13 outside the housing 10; when the coil 33 is energized, the electromagnet group 30 is stressed to the permanent magnet unit 22 The mover 20 relatively moves in the casing 10 to generate vibration.

In the embodiment of FIG. 1 , two electromagnet groups 30 are used, so four permanent magnet units 22 are required. In the following description, two electromagnet groups 30 and four permanent magnet units 22 are taken as examples. Furthermore, in the following description, a first direction is defined as parallel to the magnetic axis 31, a second direction is perpendicular to the first direction and parallel to the chassis 11, and a third direction is parallel to the first direction. and perpendicular to the second direction. In other words, the first direction and the second direction define a plane that is flat with the chassis 11 , and the third-party image is perpendicular to the plane. One of the main technical features of the present invention is that the mover 20 is driven along the second direction and the third direction by magnetic force through the electromagnetic driving part; correspondingly, the elastic support member 40 is connected to the housing 10 and The mover 20 in the casing 10 is supported so that the mover 20 vibrates in the casing 10 along the second direction and the third direction.

As shown in FIG. 1 , in this embodiment, the two magnetic back plates 23 are arranged close to the opposite sides of the frame body 21 in the first direction, and the four permanent magnet units 22 are approximately rectangular parallelepiped in shape. The plate magnets are respectively attached to the magnetic backboard 23 on the front side and the rear side (that is, the first direction) of the frame body 21, and the four permanent magnet units 22 are electromagnetically aligned along the first direction. The iron group 30 is arranged corresponding to the permanent magnet units 22 at both ends through the conductive shaft disk 32; in other words, along the first direction, the electromagnetic drive part is respectively arranged in the following two groups in sequence: the magnetic back plate 23, the permanent magnet Unit 22 , electromagnet group 30 , permanent magnet unit 22 , and magnetic back plate 23 .

It should be noted that, in this embodiment, the permanent magnet units 22 are respectively located on the extension lines of the front and rear direction of the magnetic axis 31 of the winding coil 33 constituting the electromagnet group 30, and the magnetization plane of the permanent magnet unit 22 is perpendicular to the Extended line; the area of the magnetic back plate 23 covers the area of the two permanent magnet units 22 adjacent to the same side.

The conductive shaft disk 32 has a hollowed-out central portion, so that the magnetic shaft core 31 can pass through and be embedded therein. The cross-sectional area of the magnetic shaft 31 corresponding to the hollow area of the conductive shaft disk 32 is not limited to be equal to the cross-sectional area of the magnetic shaft 31 wrapped around the coil 33 . When the mover 20 vibrates, the permanent magnet unit 22 in the mover 20 moves relative to the conductive shaft disk 32, and an eddy current (eddy current) will be generated on the conductive shaft disk 32, and the magnetic field generated by the eddy current circuit will act on the movable shaft. The permanent magnet unit 22 in the mover 20 further suppresses the vibration of the mover 20 .

FIG. 2 is a schematic diagram of the permanent magnet unit of the present invention. As shown in Figure 2, the largest and substantially rectangular surface of the permanent magnet unit 22 is set as a magnetized surface, and each permanent magnet unit 22 is divided into two magnetized regions from one of the two diagonals of the magnetized surface, and the two The magnetized regions are magnetized with different polarities, such as N pole and S pole in FIG. 2 . It should be noted that the permanent magnet unit 22 can be a single permanent magnet with two magnetized regions, or a combination of two permanent magnets with a single magnetized region, which is not limited in the present invention.

Figures 3a and 3b are schematic diagrams of forces acting when the diagonals of the magnetized regions of two adjacent groups of permanent magnet units of the present invention are in different directions. When the permanent magnet units 22 of two adjacent electromagnetic drive parts have the same diagonal direction for dividing the magnetized regions; The number of endpoints 13 is two, and the direction of the influence of the magnetic force remains the same.

However, when the diagonals of the permanent magnet units 22 of two adjacent electromagnetic drive parts that divide the magnetized regions are in different directions, the coils 33 of each electromagnetic drive part are connected to the terminal points 13 respectively, and the number of terminal points 13 is four. .

As mentioned above, each elastic support 40 has two connecting parts 41, located at the two ends of the elastic supporting part 40 along the first direction; The mover 20 is connected so that the mover 20 vibrates in the housing 10 along the second direction and the third direction.

In this embodiment, the elastic supporting member 40 has an L-shaped feature at the positive and negative ends of the third direction in the middle part of the first direction, and is bent outward toward the second direction, and has a hole along the third direction. , and the L-shaped feature is still connected with the elastic support without disconnection; the elastic support 40 is perpendicular to the mask of the second direction with a hole, and the hole must not exceed the elastic support 40 in the third direction and the first direction, The elastic supporting member 40 is not disconnected in the third direction.

Furthermore, FIG. 4 is a three-dimensional schematic view of the elastic support member of the present invention. As shown in Figure 4, the elastic support member 40 is a leaf spring formed by cutting and bending, and further includes two connecting parts 41, two neck parts 43, and a deformable supporting part 44, wherein the arrangement of each part is as follows: Connecting portion 41, neck 43, deformation support portion 44, neck 43, and connecting portion 41; the two connecting portions 41 are located at both ends of the elastic support 40 along the first direction, wherein the connecting block 42 The joints between the connecting portion 41 fixed to the casing 10 and the connecting portion 41 connected to the mover 20 are located on different sides of the elastic support 40 in the second direction, and each connecting portion 41 is formed by a smaller width. The neck 43 is connected with the deformable supporting part 44 .

More specifically, in this embodiment, the deformable supporting portion 44 is a square frame with a hollow portion 45, and the square frame is bent into a square (ㄈ), the bending direction of the upper and lower sides of the square (ㄈ) is the same as that of the square (ㄈ). The connection blocks 42 are located in the same direction, and the hollow portion 45 is also bent into a square “ㄈ” shape, and the hollow portion 45 includes positive and negative hollow features in the second direction and the third direction. Thereby, the elastic supporting member 40 elastically deforms along the second direction and the third direction, thereby supporting the mover 20 to vibrate along the second direction and the third direction. In short, the elastic supporting member 40 can provide displacement in two different directions.

It is worth noting that, in the leaf spring elastic support member having such a bent structure, the degree of difficulty of elastic deformation in the up-down direction and the elastic deformation in the left-right direction are generally different. Therefore, the elastic coefficient of the left-right direction of the leaf spring elastic support is defined as the first elastic coefficient, and the elastic coefficient of the up-down direction of the leaf spring elastic support is defined as the second elastic coefficient, then the first elastic coefficient and the second elastic coefficient are different values. In other words, in this embodiment, the elastic coefficient of the elastic support member 40 in the second direction is defined as the first elastic coefficient, and the elastic coefficient in the third direction is defined as the second elastic coefficient, and the first elastic coefficient and the second elastic coefficient are different values.

Furthermore, the mover 20 is supported by the elastic support member 40 and vibrates along the second direction at a first natural frequency corresponding to the first elastic coefficient and the quality of the mover 20; A second natural frequency determined by the coefficient and the mass of the mover 20 vibrates along the third direction. The first elastic coefficient and the second elastic coefficient have different values, therefore, the first natural frequency and the second natural frequency have different values.

In this embodiment, a corresponding alternating magnetic field can be generated by applying an AC voltage of a specific frequency to the coil 33 of the electromagnet group 30; when the electromagnet group 30 generates an alternating current with the same frequency as the first natural frequency When the magnetic field is applied, the mover 20 vibrates along the second direction; and when the electromagnet group 30 generates an alternating magnetic field with the same frequency as the second natural frequency, the mover 20 vibrates along the third direction.

Furthermore, the effect of suppressing the vibration of the mover 20 described above enables the mover 20 to stop in a short time after the supply of the aforementioned AC voltage is stopped.

Based on the above, the vibration actuator provided by the present invention uses a coil and a bobbin to form an electromagnet group. When the current passes through the coil and magnetizes the front and rear ends of the magnetic axis, a magnetic field is generated. Furthermore, the permanent magnet unit is arranged in the casing, facing the two ends of the electromagnet group, the magnetization surface of each permanent magnet unit has two regions with different polarities, and then the electromagnet group and the permanent magnet unit are used to The magnetic force between them can drive the mover in two different directions, and then support the vibrate mover on the housing through the elastic support, so as to achieve the purpose of the present invention.

The above are only preferred embodiments of the present invention, and are not intended to limit the scope of the embodiments of the present invention. That is, all equivalent changes and modifications made according to the patent scope of the present application are covered by the patent scope of the present invention.

10: Shell 11: Chassis 12: Upper cover 13: Wiring endpoint 20: Movers 21: frame 22:Permanent magnet unit 23:Magnetic Backplane 30: Electromagnet group 31: Magnetic axis 32: Conductive shaft disk 33: Coil 34: Solenoid bracket 40: elastic support 41: Connecting part 42: Connection block 43: Neck 44: Deformation support part 45: hollow part 50: Connecting lines N: N pole S: S pole X: first direction Y: the second direction Z: third direction

Fig. 1 is the exploded schematic view of the first embodiment of the present invention;

Fig. 2 is the schematic diagram of the magnetization area division of the permanent magnet unit of the present invention;

Fig. 3a, 3b are the schematic diagrams of force when the diagonals of the divided magnetized regions of the adjacent two sets of permanent magnet units of the present invention are in different directions;

FIG. 4 is a three-dimensional schematic view of the elastic support of the present invention.

10: Housing

11: Chassis

12: Upper cover

13: Wiring endpoint

20: Movers

21: frame

22:Permanent magnet unit

23:Magnetic Backplane

30: Electromagnet group

31: Magnetic axis

32: Conductive shaft disk

33: Coil

34: Solenoid bracket

40: elastic support

41: Connecting part

42: Connection block

50: Connecting lines

X: first direction

Y: the second direction

Z: third direction

Claims (10)

A vibration actuator, comprising: a casing, a mover, a plurality of electromagnet groups, two elastic supports, and a connecting line; the casing further includes: a chassis, and an upper cover, which can cover and combine On the chassis, a three-dimensional rectangular box is formed after being combined, and terminal points are arranged on the outside of the shell to electrically connect an external circuit; the mover further includes: a frame, a plurality of permanent magnet units, and two magnetic backplanes , the two magnetic backboards are respectively closely attached to the opposite sides of the frame, and the plurality of permanent magnet units are arranged side by side and adjacent to the two magnetic backboards; each electromagnet group further includes: a magnetic axis, two conductive A shaft disc and a coil, the two conductive shaft discs are respectively located at the two ends of the magnetic axis, and form a winding frame with the magnetic axis, the coil is wound on the winding frame, and the electromagnet is arranged on Between the two permanent magnet units of the mover, an electromagnetic driving part is formed with the permanent magnet unit and the magnetic backboard; the elastic support further includes: two connecting parts and a connecting block, and the two connecting parts are respectively located At both ends of the elastic support, one of the connecting parts is fixed to the casing by the connecting block, and the other connecting part is connected to the mover; the connecting line is used to connect the coil of the electromagnet group and the casing A terminal point outside the body; wherein a first direction is defined as being parallel to the magnetic axis, a second direction is perpendicular to the first direction and parallel to the chassis, and a third direction is defined as being parallel to the first direction and The second direction is vertical; the electromagnetic driving part uses magnetic force to drive the mover along the second direction and the third direction; the elastic support member is connected to the casing and supports the mover in the casing, so that the mover moves along the vibrating in the housing in a second direction and a third direction; Wherein the positive and negative ends of the third direction in the middle part of the elastic supporting member in the first direction have L-shaped bends facing outward toward the second direction, and have a hole along the third direction, and the L-shaped bends are still It is connected with the elastic support without disconnection; the elastic support is perpendicular to the second direction and has a hole in the mask. The hole cannot exceed the elastic support in the third direction and the first direction. The elastic support is in the third direction. No disconnection; wherein the permanent magnet unit is a plate-shaped magnet with a roughly rectangular parallelepiped shape; the largest and roughly rectangular surface of the permanent magnet unit is a magnetized surface, and each permanent magnet unit starts from one of the two diagonals of the magnetized surface One is divided into two magnetized regions, and the two magnetized regions are magnetized to mutually different polarities. The vibration actuator as described in claim 1, wherein the electromagnet group is further fixed to the bottom plate and the upper cover of the housing, or one of them, by an electromagnet bracket. The vibration actuator as described in claim 1, wherein the elastic support member is a leaf spring formed by cutting and bending, and further includes two connecting parts, two neck parts, and a deformable supporting part, and the arrangement of each part The sequence is the connection part, the neck part, the deformation support part, the neck part, and the connection part; the two connection parts are located at the two ends of the elastic support along the first direction, wherein the connection block is fixed to the housing The joints of the connecting portion and the connecting portion connected to the mover are located on different sides of the elastic support member in the second direction, and each connecting portion is respectively connected to the deformation supporting portion by a neck with a smaller width. The vibration actuator as described in claim 3, wherein the deformation supporting part is a square frame with a hollow part, and the square frame is bent into a square (ㄈ), the bending direction of the upper and lower sides of the square (ㄈ) is the same as that of the square (ㄈ) The directions of the connecting blocks are the same, and the hollow part is also bent into a square ㄈ character, and the hollow part includes positive and negative hollow features in the second direction and the third direction. The vibration actuator according to claim 1, wherein the elastic supporting member can elastically deform in the second direction or the third direction, thereby supporting the mover to vibrate in the second direction or the third direction. The vibration actuator as described in claim 5, wherein the elastic coefficient of the elastic support member in the second direction is the first elastic coefficient, the elastic coefficient in the third direction is the second elastic coefficient, the first elastic coefficient and the second elastic coefficient Coefficients are different values. The vibration actuator according to claim 1, wherein the permanent magnet unit can be a single permanent magnet with two magnetized regions, or can be formed by combining two permanent magnets with a single magnetized region. The vibration actuator as described in Claim 1, wherein the permanent magnet units are respectively attached to the magnetic back plates on the front and rear sides of the mover frame, and are located at the front and rear of the magnetic axis of the winding coil constituting the electromagnet group On the extension line of the direction, the magnetized surface of the permanent magnet unit is perpendicular to the extension line; the area of the magnetic back plate covers the area of a plurality of permanent magnet units adjacent to the same side. The vibration actuator as described in claim item 7, wherein the permanent magnet units of two adjacent electromagnetic driving parts have the same diagonal direction for dividing the magnetized areas; the coils of the electromagnetic driving parts can be connected in series or in parallel. The terminal number of this connection is two. As the vibration actuator described in claim 7, wherein the diagonals of the permanent magnet units of two adjacent electromagnetic drive parts that divide the magnetized areas are in different directions, and the coils of the electromagnetic drive parts are connected to the terminal points respectively, then the wiring The number of endpoints is four.

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