TWM636433U - Stable liquefied gas supply heating equipment - Google Patents

Abstract

The heating equipment provided by this creation includes a gas supply system, a gas storage tank, a pressure sensor, a temperature sensor, a heating device and a control system; the heating device is installed on the bottom side of the gas storage tank, and has a magnetic control unit that can generate magnetic flux changes ; The control system has a pressure and temperature control module. Wherein, a pressure parameter and a temperature parameter will be transmitted to the control system respectively, so that a heating control signal is generated and transmitted to the heating device; when the air pressure value exceeds the pressure parameter, a stop control signal is generated and transmitted to the heating device, so that The air pressure value gradually decreases; when the air pressure value is lower than the pressure parameter, the heating control signal is transmitted to the heating device, so that the air pressure value rises, so that the air pressure value remains within the set range of the pressure parameter. In this way, the liquid gas can be quickly vaporized into the target gas with stable pressure.

Description

Stable liquid gas supply heating equipment

This creation relates to a gas supply device for semiconductor manufacturing process, especially a supply heating device that quickly vaporizes liquid gas to achieve a stable pressure value.

In the manufacturing process of products in the semiconductor field (such as: wafers, panels or light-emitting diodes), it is necessary to use some special gases (such as: NH ₃ , SiH ₄ , N ₂ O....) in the process. Among them, a part is liquid gas (such as: NH ₃ ), therefore, the traditional way is to buy a gas supply cylinder that stores liquid gas, and install the gas supply cylinder on the gas delivery pipeline. The bottle is heated to vaporize the liquid gas before it can be transported to the end of the supply system for use.

Please refer to Fig. 1, the traditional liquid gas supply is to install a heater 11 outside a gas supply bottle 10, and only match a temperature sensor 12 arranged on the outside of the gas supply bottle 10 to carry out the heating process, The gas supply bottle body 10 is directly heated by the heater 11, and then the gas supply bottle body 10 conducts heat to the internal liquid gas. However, such a heating design cannot obtain the true temperature of the gas inside the gas supply bottle body 10, which will cause the air pressure state supplied by the gas supply bottle body 10 to be unstable, and the response time of the indirect heating method is too slow, and will When the gas consumption is increased, the gas pressure will be insufficient. Conversely, if the gas consumption is reduced or the gas supply is stopped, the gas supply cylinder 10 will still be heated and the pressure will be too high.

Therefore, there is another temperature sensor installed inside the gas supply bottle on the market, so that the temperature sensor can accurately measure the real temperature of the gas inside the gas supply bottle. However, the heating device still uses heat conduction to Indirect heating of the internal gas still has the problem that the heating reaction time is too long.

The main purpose of this creation is to provide a control device for heating and supplying liquid gas, so that the gas supply system can stably obtain a target gas with an appropriate supply pressure from the gas storage tank, and ensure that the temperature of the gas storage tank can be maintained at a safe level below the value.

The secondary purpose of this creation is to supply the heating equipment with an electromagnetic design outside the tank to directly heat the liquid gas, so that the liquid gas inside the gas storage tank can quickly heat up and gasify to form a target gas, so that the target gas will not be under pressure due to excessive dosage Instability happens.

Another purpose of this creation is that pressure parameters and temperature parameters can be input in the control system according to actual wafer processing requirements, so that users can adjust the air supply pressure and temperature conditions of the protection mechanism in real time.

Another purpose of this creation is that the control equipment can use multiple gas storage tanks to supply gas synchronously, and by detecting the weight of each gas storage tank, all the gas storage tanks can exhaust the internal liquid gas at the same time, Avoid the phenomenon that a single gas storage tank is exhausted first, so as to improve the quality of gas supply.

In order to achieve the aforementioned purpose, in the first preferred embodiment, the stable liquid gas supply heating equipment of the present invention includes: a gas supply system; an upstream gas storage system and a control system, wherein the upstream gas storage system includes a storage An air tank, a transmission pipeline, a pressure sensor, a temperature sensor and a heating device.

The gas storage tank stores a liquid gas; the transmission pipeline is connected between the gas storage tank and the gas supply system; the pressure sensor is connected to the transmission pipeline to detect changes in the gas pressure of the gas storage tank , and can continuously generate a pressure value; the temperature sensor is installed on the surface of the air storage tank to detect the temperature change of the tank body, and can continuously generate a temperature value; the heating device is installed on the outer bottom side of the air storage tank , with a magnetic control unit that can generate magnetic flux changes to quickly heat the liquid gas inside the gas storage tank; the control system has a pressure control module to electrically connect the pressure sensor and a temperature control The mold making group is electrically connected to the temperature sensor, and the pressure control module and the temperature control module are both electrically connected to the heating device.

When a pressure parameter and a temperature parameter are respectively input to the pressure control module and the temperature control module, a heating control signal will be generated by the control system and transmitted to the heating device, so that the liquid gas is heated by the heating device Vaporize into a target gas; when the air pressure value rises above a pressure setting value of the pressure parameter, a stop control signal will be generated by the pressure control module and transmitted to the heating device, so that the air pressure value will gradually decrease; when the When the air pressure value is lower than the pressure setting value of the pressure parameter, the heating control signal is transmitted to the heating device, so that the air pressure value rises, so that the air pressure value remains within the range of the pressure parameter; when the air pressure value exceeds the When the pressure parameter reaches a pressure warning value, a power-off control signal will be generated by the pressure control module and transmitted to the heating device, so that the heating device will stop heating.

In addition, when the temperature value exceeds a temperature setting value of the temperature parameter, the stop control signal will be generated by the temperature control module and transmitted to the heating device; when the temperature value exceeds a temperature warning value of the temperature parameter , the power-off control signal will be generated by the temperature control module and transmitted to the heating device, so that the heating device stops heating.

Wherein, when the air pressure value exceeds the pressure warning value, the control system will generate a pressure warning alarm; when the temperature value exceeds the temperature warning value, the control system will generate a temperature warning warning.

And the temperature setting value, the temperature warning value, the pressure setting value and the pressure warning value can all be repeatedly set through a man-machine interface of the control system. Both the pressure control module and the temperature control module have a display and an alarm, so that the air pressure value and the The temperature values can be displayed separately by individual monitors, and the pressure reminder alarm and the temperature reminder alarm can be respectively activated by individual alarms under abnormal conditions.

In addition, the control system further includes an overheating protection module, the overheating protection module is electrically connected to the heating device to obtain an operating temperature of the heating device, and the overheating protection module will generate when the operating temperature exceeds the load The power-off control signal, the power-off control signal will be transmitted to the heating device to avoid self-burning due to excessive temperature of the device.

In the second preferred embodiment, the stable liquid gas supply heating equipment of the present invention includes: a gas supply system, a first upstream gas storage system, a second upstream gas storage system and a control system, wherein the first The upstream gas storage system includes a first gas storage tank, a first transmission pipeline, a first pressure sensor, a first temperature sensor, a first heating device and a first weight sensor; the The second upstream gas storage system includes a second gas storage tank, a second transmission pipeline, a second pressure sensor, a second temperature sensor, a second heating device and a second weight sensor .

Both the first gas storage tank and the second gas storage tank store a liquid gas; the first transmission pipeline is connected between the first gas storage tank and the gas supply system, and the second transmission pipeline is connected to Between the second gas storage tank and the gas supply system.

The first pressure sensor is connected to the first transmission pipeline to detect the gas pressure change of the first gas storage tank, and can continuously generate a first air pressure value; the first temperature sensor is installed on the first gas storage tank The surface of a gas storage tank is used to detect the temperature change of the tank body, and can continuously generate a first temperature value; the first heating device is installed on the outer bottom side of the first gas storage tank, and has a first magnetic flux change. The magnetic control unit rapidly heats the liquid gas inside the first gas storage tank.

The second pressure sensor is connected to the second transmission pipeline to detect the gas pressure change of the second gas storage tank, and can continuously generate a second air pressure value; the second temperature sensor is installed on the second gas storage tank The surface of the second air storage tank is used to detect the temperature change of the tank body, and can continuously generate a second temperature value; the second heating device is installed on the outer bottom side of the second air storage tank, and has a second magnetic flux change. The magnetic control unit rapidly heats the liquid gas inside the second gas storage tank.

The first weight sensor is arranged at the bottom of the first air storage tank to continuously generate a first weight value; the second weight sensor is arranged at the bottom of the second air storage tank to continuously generate a second weight value; the control The system has a pressure control module, a temperature control module and a programmable logic controller, the pressure control module is electrically connected to the first pressure sensor, the second pressure sensor and the heating device Between, the temperature control module is electrically connected between the first temperature sensor, the second temperature sensor and the heating device, and the programmable logic controller is electrically connected to the first weight sensor detector, the second weight sensor, the pressure control module and the temperature control module.

When a first pressure parameter, a second pressure parameter, a first temperature parameter and a second temperature parameter are respectively input to the pressure control module and the temperature control module, a heating control signal is generated by the control system to be transported to the first heating device and the second heating device, so that most of the liquid gas can be vaporized into a target gas by the first heating device and the second heating device respectively.

Wherein, when the first air pressure value rises above a first pressure setting value of the first pressure parameter, a stop control signal will be transmitted to the first heating device, so that the first air pressure value gradually decreases; and when the When the first air pressure value is lower than the first pressure setting value of the first pressure parameter, the heating control signal will be transmitted to the heating device again, so that the first air pressure value will rise, and the first air pressure value will be maintained at the Within the range of the first pressure parameter; when the first air pressure value exceeds the first When a pressure parameter reaches a first pressure warning value, a power-off control signal will be transmitted to the heating device, so that the heating device stops heating.

And when the second air pressure value rises above a second pressure setting value of the second pressure parameter, the stop control signal will be transmitted to the second heating device, so that the second air pressure value gradually decreases; and when the first pressure parameter When the second air pressure value is lower than the second pressure setting value of the second pressure parameter, the heating control signal will be transmitted to the heating device again, so that the second air pressure value will rise, so that the second air pressure value will remain at the first Within the range of two pressure parameters; when the second pressure value exceeds a second pressure warning value of the second pressure parameter, the power-off control signal will be transmitted to the heating device.

When a weight difference between the first weight value and the second weight value exceeds a set value, an adjustment control signal is generated by the programmable logic controller, and the adjustment control signal is controlled by the programmable logic controller The device is transmitted to the pressure control module and the temperature control module, and one of the pressure parameters of the pressure control module and one of the temperature parameters of the temperature control module are automatically adjusted to change the first gas storage tank and The gas vaporization amount of one of the second gas storage tanks is used to reduce the weight difference between the first gas storage tank and the second gas storage tank.

The feature of this creation is that the magnetic control unit that can generate magnetic flux changes is used to directly electromagnetically heat the liquid gas, so that the temperature of the liquid gas can rise rapidly. At the same time, the control system controls the pressure at a stable value. Supply to avoid the problem of insufficient air supply pressure or excessive tank pressure during the air supply process.

10: Gas bottle body

11: heater

12: Temperature sensor

2: Gas supply system

3: Upstream gas storage system

30: Gas storage tank

31: Transmission pipeline

32: Pressure sensor

321: air pressure value

33: Temperature sensor

331: temperature value

34: Heating device

341: protection unit

342: operating temperature

4: Control system

40: Man-machine interface

401: Stress Reminder Warning

402: temperature reminder warning

41: Pressure control module

411: Pressure parameters

412: Pressure setpoint

413:Pressure warning value

414: The first pressure parameter

415: Second pressure parameter

42:Temperature control module

421: Temperature parameter

422: Temperature setpoint

423: temperature warning value

424: The first temperature parameter

425: Second temperature parameter

43: Overheat protection module

44: Microprocessor

441: Heating control signal

442: stop control signal

443: Power-off control signal

45: Programmable logic controller

451: Adjust the control signal

5: The first upstream gas storage system

50: The first gas storage tank

51: The first transmission pipeline

52: The first pressure sensor

521: The first air pressure value

53: The first temperature sensor

531: The first temperature value

54: The first heating device

541: The first protection unit

542: The first operating temperature

55: The first weight sensor

551: first weight value

6: The second upstream gas storage system

60: Second gas storage tank

61: the second transmission pipeline

62: Second pressure sensor

621: Second air pressure value

63: Second temperature sensor

631: second temperature value

64: Second heating device

641: The second protection unit

642: Second operating temperature

65: Second weight sensor

651: Second weight value

Fig. 1 is the schematic diagram of conventional liquid gas supply equipment; Fig. 2 is the schematic diagram of the first embodiment of the stable liquid gas supply heating equipment of the present invention; Fig. 3 is a schematic block diagram of the transmission of air pressure value, temperature value and control signal in the first embodiment; Fig. 4 is a schematic diagram of the safety protection mechanism of the heating control device; Fig. 5 is a schematic diagram of the second embodiment of the heating control device of this invention; Fig. 6A and FIG. 6B is a schematic block diagram of transmitting air pressure value, temperature value, weight value and control signal in the second embodiment; and FIG. 7 is a schematic diagram of control logic of the heating control device in FIG. 5 .

In order to further have a clear and detailed understanding and understanding of the structure, use and characteristics of this creation, a preferred embodiment is given, and the details are as follows in conjunction with the drawings: The stable liquid gas supply heating equipment of this creation is mainly A liquid gas is vaporized into a target gas with a stable saturation pressure through heating, and the target gas is supplied to a gas supply system.

Please refer to Fig. 2 and shown in Fig. 3, the stable liquid gas supply heating equipment of the present invention has a gas supply system 2, an upstream gas storage system 3 and a control system 4; wherein, the gas supply system 2 is connected to a semiconductor processing equipment, and can provide the target gas to the semiconductor processing equipment.

The upstream gas storage system 3 includes a gas storage tank 30, a transmission pipeline 31, a pressure sensor 32, a temperature sensor 33 and a heating device 34, wherein the gas storage tank 30 stores the liquid gas, and presents a vertical arrangement, however, this is only for the convenience of illustration, that is, the gas storage tank 30 can also present a flat arrangement (not shown); the transmission pipeline 31 is connected to the storage Between the gas tank 30 and the gas supply system 2, used to transmit the target gas; the pressure sensor 32 is electrically connected to the control system 4, and is installed at one end of the transmission pipeline 31 close to the gas storage tank 30, In order to detect the pressure change inside the air storage tank 30, and continuously generate an air pressure value 321 to transmit to the control system 4; the temperature sensing The device 33 is electrically connected to the control system 4, and is installed on the surface of the gas storage tank 30 to detect the temperature change of the tank body, and can continuously generate a temperature value 331 to transmit to the control system 4; the heating device 34 is also Electrically connected to the control system 4, and installed on the outer bottom side of the gas storage tank 30, there is a magnetic control unit capable of generating changes in magnetic flux and a protection unit 341, and the magnetic control unit electromagnetically rapidly heats the air in the air tank 30. The liquid gas inside the gas storage tank 30 enables the liquid gas to rapidly vaporize into the target gas.

The control system 4 includes a man-machine interface 40, a pressure control module 41, a temperature control module 42 and an overheat protection module 43; the man-machine interface 40 can obtain a pressure parameter 411 through a user's manual input And a temperature parameter 421, in a preferred embodiment, the pressure parameter 411 has a pressure setting value 412 and a pressure warning value 413 whose value is greater than the pressure setting value 412, the temperature parameter 421 has a temperature setting value 422 and A temperature warning value 423 whose value is greater than the temperature setting value 422 .

The pressure control module 41 can obtain the air pressure value 321 from the pressure sensor 32 , and can display the air pressure value 321 in the current state through a display of the control system 4 . The temperature control module 42 can obtain the temperature value 331 from the temperature sensor 33 , and can display the temperature value 331 in the current state through another display of the control system 4 . The overheat protection module 43 can obtain an operating temperature 342 from the protection unit 341 .

This invention uses the pressure parameter 411 , the air pressure value 321 , the temperature parameter 421 , the temperature value 331 and the operating temperature 342 to form different safety protection mechanisms and generate different control signals in different operating states.

In the first open state, the control system 4 generates a heating control signal 441 after obtaining the pressure parameter 411 and the temperature parameter 421, and the heating control signal 441 will be transmitted to the The heating device 34 enables the liquid gas in the gas storage tank 30 to be vaporized into the target gas by the heating device 34 .

In the second heating state, the control system 4 will continue to receive the air pressure value 321 and the temperature value 331, when the air pressure value 321 rises above the pressure setting value 412 of the pressure parameter 411, a stop control signal 442 It will be generated by the pressure control module 41 and transmitted to the heating device 34, so that the air pressure value 321 gradually decreases.

In the third reheating state, when the air pressure value 321 drops to a set value lower than the pressure setting value 412, the heating control signal 441 will be transmitted to the heating device 34 again, so that the heating device 34 alternately The process of heating up and stopping cooling down is carried out in a consistent manner, so that the air pressure value 321 is maintained within a proportional range of the pressure parameter 411 .

In the fourth pressure exceeding state, when the air pressure value 321 exceeds the pressure warning value 413, the pressure control module 41 will generate a pressure warning warning 401 and a power-off control signal 443, wherein the pressure warning warning 401 is provided to an alarm of the operation control panel 40, and the power-off control signal 443 is transmitted to the heating device 34, so that the heating device 34 stops heating.

In the fifth temperature exceeding state, when the temperature value 331 exceeds the temperature setting value 422, the temperature control module 42 will generate the stop control signal 442; when the temperature value 331 exceeds the temperature warning value 423, the The temperature control module 42 will generate a temperature reminder alarm 402 and the power-off control signal 443, wherein the temperature reminder alarm 402 is provided to another alarm of the operation control panel 40, and the power-off control signal 443 is is transmitted to the heating device 34, so that the heating device 34 stops heating.

In the sixth load exceeding state, the overheating protection module 43 will generate the power-off control signal 443 when the operating temperature 342 of the heating device 34 exceeds the load, and the power-off control signal 443 will be controlled by the overheating protection module. The group 43 is transported to the heating device 34 to prevent the device from overheating and self-burning.

Please refer to Fig. 5, shown in 6A and 6B, the second embodiment of the stable liquefied gas supply heating equipment of this creation, comprises: a gas supply system 2; A first upstream gas storage system 5, a second upstream gas storage system 6 and a control system 4 . Wherein, the gas supply system 2 is also connected to a semiconductor processing equipment, and can provide the target gas to the semiconductor processing equipment, and the first upstream gas storage system 5 and the second upstream gas storage system 6 are both connected to the Gas supply system 2.

The first upstream gas storage system 5 includes: a first gas storage tank 50, a first transmission pipeline 51, a first pressure sensor 52, a first temperature sensor 53, and a first heating device 54 and a first weight sensor 55 . Wherein, the liquid gas is stored inside the first gas storage tank 50 and is placed vertically; the first transmission pipeline 51 is connected between the first gas storage tank 50 and the gas supply system 2 for use in to transmit the target gas; the first pressure sensor 52 is installed on the first transmission pipeline 51 and electrically connected to the control system 4, and the first pressure sensor 52 is close to the first gas storage The tank 50 detects the pressure change of the first air storage tank 50 , and can continuously generate a first air pressure value 521 to be transmitted to the control system 4 .

The first temperature sensor 53 is installed on the surface of the first gas storage tank 50 to detect the temperature change of the tank body, and can continuously generate a first temperature value 531 to be transmitted to the control system 4; the first heating The device 54 is installed on the outer bottom side of the first gas storage tank 50, and has a magnetic control unit capable of producing changes in magnetic flux and a first protection unit 541. The magnetic control unit directly heats the air in the first storage tank in an electromagnetic manner The liquid gas inside the gas tank 50 makes the liquid gas quickly vaporize into the target gas: the first The weight sensor 55 is installed under the first air storage tank 50 to detect the weight change of the first air storage tank 50 , and can continuously generate a first weight value 551 to be transmitted to the control system 4 .

The second upstream gas storage system 6 includes: a second gas storage tank 60, a second transmission pipeline 61, a second pressure sensor 62, a second temperature sensor 63, and a second heating device 64 and a second weight sensor 65 . Wherein, the second gas storage tank 60 stores the liquid gas inside, and also presents a vertical arrangement; the second transmission pipeline 61 is connected between the second gas storage tank 60 and the gas supply system 2, Used to transmit the target gas; the second pressure sensor 62 is installed on the second transmission pipeline 61 and electrically connected to the control system 4, and the second pressure sensor 62 is close to the second storage The air tank 60 detects the pressure change of the second air storage tank 60 , and can continuously generate a second air pressure value 621 to be transmitted to the control system 4 .

The second temperature sensor 63 is installed on the surface of the second gas storage tank 60 to detect the temperature change of the tank body, and can continuously generate a second temperature value 631 to be transmitted to the control system 4; the second heating The device 64 is installed on the outer bottom side of the second gas storage tank 60, and has a magnetic control unit capable of producing changes in magnetic flux and a second protection unit 641. The magnetic control unit directly heats the gas in the second storage tank in an electromagnetic manner The liquid gas inside the gas tank 60 makes the liquid gas quickly vaporize into the target gas: the second weight sensor 65 is installed below the second gas storage tank 60 to detect the second gas storage tank 60 The weight changes, and can continuously generate a second weight value 651 to be transmitted to the control system 4 .

The control system 4 includes a man-machine interface 40, a pressure control module 41, a temperature control module 42, an overheat protection module 43 and a programmable logic controller 45 (programmable logic controller, PLC for short), wherein, The man-machine interface 40 is provided with a touch screen, and the touch screen can display a manual operation mode and an automatic operation mode, and the manual operation mode obtains a first pressure parameter 414 through a user's manual input , a second pressure parameter 415, a first temperature parameter Number 424, a second temperature parameter 425 and a set value. In a feasible embodiment, the first air pressure parameter 414 includes a first air pressure setting value and a first air pressure warning value, and the second air pressure parameter 415 includes a The second air pressure setting value and a second air pressure warning value. The first temperature parameter 424 has a first temperature setting value and a first temperature warning value. The second temperature parameter 425 has a second temperature setting value and a first temperature setting value. Two temperature warning values, the set value includes a first difference value and a second difference value.

The pressure control module 41 can obtain the first air pressure value 521 and the second air pressure value 621 from the first pressure sensor 52 and the second pressure sensor 62 respectively, and can pass through one of the control system 4 The display is used to display the first air pressure value 521 and the second air pressure value 621 in the current state.

The temperature control module 42 can obtain the first temperature value 531 and the second temperature value 631 from the first temperature sensor 53 and the second temperature sensor 63 respectively, and can pass through another part of the control system 4 A display is used to display the first temperature value 531 and the second temperature value 631 in the current state.

The overheat protection module 43 can obtain a first operating temperature 542 and a second operating temperature 642 from the first protection unit 541 and the second protection unit 641 respectively. The programmable logic controller 45 is electrically connected to the man-machine interface, the pressure control module 41 and the temperature control module 42 . The programmable logic controller 45 can respectively obtain the first weight value 551 and the second weight value 651 from the first weight sensor 55 and the second weight sensor 65, and calculate the first weight value 551 and the second weight value 651 to generate a weight difference, and then compare the weight difference with the set value. When the weight difference exceeds the set value, the programmable logic controller 45 will enter the automatic balance mode of the two air storage tanks, and the program will automatically adjust one of the pressure parameters of the pressure control module 41 and the temperature control module. One of the temperature parameters of the group 42 is automatically adjusted to change the first gas storage tank 50 and the second gas storage tank 60. The vaporization amount of one of them is used to reduce the weight difference between the first gas storage tank 50 and the second gas storage tank 60 .

This creation obtains the first pressure parameter 414, the second pressure parameter 415, the first air pressure value 521, the second air pressure value 621, the first temperature parameter 424, the second temperature parameter 425, the first temperature Value 531, the second temperature value 631, the first operating temperature 542, the second operating temperature 642, the first weight value 551, the second weight value 651 and the set value to form different safety protection mechanisms, and Different control signals are generated under different operating states.

In the first open state, the control system 4 generates the heating control signal 441 after obtaining the first pressure parameter 414, the second pressure parameter 415, the first temperature parameter 424 and the second temperature parameter 425, and The heating control signal 441 will be transmitted to the first heating device 54 and the second heating device 64, so that the liquid gas inside both the first gas storage tank 50 and the second gas storage tank 60 is vaporized into the target gas.

In the second heating state, the microprocessor 44 will continue to receive the first air pressure value 521, the second air pressure value 621, the first temperature value 531 and the second temperature value 631, when the first air pressure value When 521 rises above the first pressure setting value of the first pressure parameter 414, a stop control signal 442 will be generated by the pressure control module 41 and transmitted to the first heating device 54, so that the first air pressure value 521 gradually decrease; if the second air pressure value 621 rises above the second pressure setting value of the second pressure parameter 415, the stop control signal 442 will be generated by the pressure control module 41 and transmitted to the second heating device 64 , so that the second air pressure value 621 gradually decreases.

In the third pressure exceeding state, when one of the first air pressure value 521 or the second air pressure value 621 exceeds the set condition (the first air pressure warning value or the second air pressure warning value), the controller The control system 4 will generate the power-off control signal 443 to transmit to the first heating device 54 and the second heating device 64, so that the first heating device 54 and the second heating device 64 stop heating.

In the fourth temperature exceeding state, when one of the first temperature value 531 or the second temperature value 631 exceeds the set condition (the first temperature warning value or the second temperature warning value), the control system 4 will The power-off control signal 443 is generated and transmitted to the first heating device 54 and the second heating device 64 , so that the first heating device 54 and the second heating device 64 stop heating.

In the fifth load exceeding state, the overheat protection module 43 will generate the power-off control signal 443 when one of the first heating device 54 or the second heating device 64 exceeds the load, the power-off control signal 443 will be transported to the first heating device 54 and the second heating device 64 to prevent the device from being overheated and self-burned.

In the sixth state of uneven weight, when a weight difference between the first weight value 551 and the second weight value 651 exceeds a set value, an adjustment control signal 451 will be controlled by the programmable logic controller 45 generated, and the adjustment control signal 451 will be transmitted to the pressure control module 41 and the temperature control module 42, so that the first air pressure setting value and the second air pressure setting value of the pressure control module 41 are changed, And the first temperature setting value and the second temperature setting value of the temperature control module will also be changed, so as to change the heating power of one of the first heating device 54 and the second heating device 64, so that the two gas storage The tanks generate different vaporization amounts of the liquid gas, so as to reduce the weight difference between the first gas storage tank 50 and the second gas storage tank 60 .

Please refer to Fig. 7, when the user starts to operate the supply heating equipment, he must first set the gas pressure of the gas storage tank and the surface temperature of the gas storage tank; the subsequent microprocessor 44 will respectively monitor the first upstream The gas storage system 5 and the second upstream gas storage system 6 take the gas pressure P of the gas storage tank as the first judgment condition. When the gas pressure P of the gas storage tank is greater than the pressure setting value or the pressure alarm value, the control system 4 will directly stop the output power of the heating device, but if the gas pressure P is lower than the pressure setting value, the control system 4 needs to judge the surface temperature of the gas storage tank.

When the air pressure condition meets the set value, when the surface temperature T of the air storage tank is lower than the temperature set value, the control system 4 will maintain the output power of the heating device; otherwise, when the surface temperature T of the air storage tank is greater than the temperature set value or the temperature warning value , the control system 4 will directly stop the output power of the heating device.

2: Gas supply system

3: Upstream gas storage system

30: Gas storage tank

31: Transmission pipeline

32: Pressure sensor

321: air pressure value

33: Temperature sensor

331: temperature value

34: Heating device

342: operating temperature

4: Control system

40: Man-machine interface

401: Stress Reminder Warning

402: temperature reminder warning

41: Pressure control module

411: Pressure parameters

412: Pressure setpoint

413:Pressure warning value

42:Temperature control module

421: Temperature parameter

422: Temperature setpoint

423: temperature warning value

43: Overheat protection module

44: Microprocessor

441: Heating control signal

442: stop control signal

443: Power-off control signal

Claims (8)

A stable liquid gas supply heating equipment, comprising: a gas supply system; an upstream gas storage system, including: a gas storage tank, storing a liquid gas; a transmission pipeline, connected to the gas storage tank and the gas supply system Between; a pressure sensor, connected to the transmission pipeline to detect the gas pressure change of the gas storage tank, and can continuously generate a pressure value; a temperature sensor, installed on the surface of the gas storage tank to detect Measuring the temperature change of the tank body, and can continuously generate a temperature value; and a heating device, installed on the outer bottom side of the gas storage tank, has a magnetic control unit capable of generating magnetic flux changes to quickly heat the inside of the gas storage tank liquid gas; and a control system having a pressure control module electrically connected to the pressure sensor and a temperature control module electrically connected to the temperature sensor, and the pressure control module and the temperature control module are both Electrically connected to the heating device; wherein, when a pressure parameter and a temperature parameter can be respectively input to the pressure control module and the temperature control module, a heating control signal is generated by the control system and transmitted to the heating device, so that the liquid gas is vaporized by the heating device into a target gas; when the air pressure value rises above a pressure setting value of the pressure parameter, a stop control signal will be generated by the pressure control module and transmitted to the heating device , so that the air pressure value gradually decreases; and when the air pressure value is lower than the pressure parameter, the heating control signal is transmitted to the heating device, so that the air pressure value increases, so that the air pressure value remains within the range of the pressure parameter; When the air pressure value exceeds a pressure warning value of the pressure parameter, a power-off control signal will be generated by the pressure control module and transmitted to the heating device, so that the heating device stops heating. The stable liquid gas supply heating device as described in Claim 1, wherein, when the air pressure value exceeds the pressure warning value, the pressure control module will generate a pressure warning warning. Stable liquid gas supply heating equipment as described in claim 2, wherein, when the temperature value exceeds a temperature setting value of the temperature parameter, the temperature control module will generate the stop control signal; when the temperature value exceeds the When the temperature parameter reaches a temperature warning value, the power-off control signal will be generated by the temperature control module and transmitted to the heating device, so that the heating device will stop heating. In the stable liquid gas supply heating device as described in claim 3, the temperature setting value, the temperature warning value, the pressure setting value and the pressure warning value can all be repeatedly set through a man-machine interface of the control system. The stable liquid gas supply heating device as described in claim 3, wherein, when the temperature value exceeds the temperature warning value, the temperature control module will generate a temperature warning warning. Stable liquid gas supply heating equipment as described in claim 5, wherein both the pressure control module and the temperature control module have a display and an alarm, so that the pressure value and the temperature value in the current state are both It can be displayed separately by individual monitors, and the pressure reminder alarm and the temperature reminder alarm can be respectively activated by individual alarms under abnormal conditions. Stable liquid gas supply heating equipment as described in Claim 1, wherein the control system further includes an overheating protection module, the overheating protection module is electrically connected to the heating device to obtain an operating temperature of the heating device, the overheating The protection module will generate the power-off control signal when the operating temperature exceeds the load, and the power-off control signal will be transmitted to the heating device to prevent the device from being burned due to excessive temperature. A stable liquid gas supply heating device, comprising: a gas supply system; a first upstream gas storage system, including: a first gas storage tank storing a liquid gas; a first transmission pipeline connected to the first Between the gas storage tank and the gas supply system; a first pressure sensor connected to the first transmission pipeline to detect changes in the gas pressure of the first gas storage tank, and can continuously generate a first air pressure value ; a first temperature sensor installed on the surface of the first air storage tank to detect the temperature change of the tank body, and can continuously generate a first temperature value; a first heating device installed on the first air storage tank The outer bottom side of the first gas storage tank has a first magnetic control unit capable of generating a change in magnetic flux to rapidly heat the liquid gas inside the first gas storage tank; and a first weight sensor is arranged at the bottom of the first gas storage tank to Continuously generate a first weight value; a second upstream gas storage system, including: a second gas storage tank, storing the liquid gas; a second transmission pipeline, connected to the second gas storage tank and the gas supply between the systems; a second pressure sensor, connected to the second transmission pipeline to detect the gas pressure change of the second gas storage tank, and can continuously generate a second air pressure value; a second temperature sensor A device installed on the surface of the second gas storage tank to detect the temperature change of the tank body, and can continuously generate a second temperature value; a second heating device, installed on the outer bottom side of the second gas storage tank, has a A second magnetic control unit that can generate a change in magnetic flux to quickly heat the liquid gas inside the second gas storage tank; and a second weight sensor, arranged at the bottom of the second air storage tank to continuously generate a second weight value; and a control system, with a pressure control module, a temperature control module and a programmable logic controller , the pressure control module is electrically connected between the first pressure sensor, the second pressure sensor and the heating device, the temperature control module is electrically connected between the first temperature sensor, the Between the second temperature sensor and the heating device, the programmable logic controller is electrically connected to the first weight sensor, the second weight sensor, the pressure control module and the temperature control module between groups; wherein, when a first pressure parameter, a second pressure parameter, a first temperature parameter and a second temperature parameter are respectively input to the pressure control module and the temperature control module, a heating control The signal is transmitted to the first heating device and the second heating device by the control system, so that the plurality of liquid gases can be vaporized into a target gas by the first heating device and the second heating device; when the first pressure value increases When a first pressure setting value of the first pressure parameter is exceeded, a stop control signal will be transmitted to the first heating device, so that the first air pressure value gradually decreases; and when the first air pressure value is lower than the first When the first pressure setting value of the pressure parameter is reached, the heating control signal will be transmitted to the heating device, so that the first air pressure value will rise, so that the first air pressure value remains within the range of the first pressure parameter; When the first air pressure value exceeds a first pressure warning value of the first pressure parameter, a power-off control signal will be transmitted to the heating device, so that the heating device stops heating; when the second air pressure value rises above the first pressure warning value When a second pressure setting value of the second pressure parameter is reached, the stop control signal will be transmitted to the second heating device, so that the second air pressure value will gradually decrease; and when the second air pressure value is lower than the second pressure parameter’s When the second pressure setting value is reached, the heating control signal will be transmitted to the heating device again, so that the second air pressure value will rise, so that the second air pressure value will maintain keep within the range of the second pressure parameter; when the second pressure value exceeds a second pressure warning value of the second pressure parameter, the power-off control signal will be transmitted to the heating device; when the first weight When a weight difference between the value and the second weight value exceeds the set value, an adjustment control signal will be generated by the programmable logic controller, and the adjustment control signal will be transmitted to the pressure by the programmable logic controller control module and the temperature control module, and one of the pressure parameters of the pressure control module and one of the temperature parameters of the temperature control module are automatically adjusted to change the first gas storage tank and the second gas storage tank The gas vaporization amount of one of the tanks is used to reduce the weight difference between the first gas storage tank and the second gas storage tank.

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