CN206587426U - A kind of low-boiling point material vapourizing unit - Google Patents
A kind of low-boiling point material vapourizing unit Download PDFInfo
- Publication number
- CN206587426U CN206587426U CN201720273824.5U CN201720273824U CN206587426U CN 206587426 U CN206587426 U CN 206587426U CN 201720273824 U CN201720273824 U CN 201720273824U CN 206587426 U CN206587426 U CN 206587426U
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- Prior art keywords
- cabinet
- evaporator
- boiling point
- low
- heating plate
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Abstract
The utility model provides a kind of low-boiling point material vapourizing unit, including cabinet, it is arranged on the inlet of cabinet bottom and the gas outlet on cabinet top, it is arranged on evaporator and gas flow controller inside cabinet, heating plate is provided with the cabinet, cabinet is divided into upper chamber and lower chambers by the heating plate, the volume of the lower chambers is more than the volume of the upper chamber, the heating plate is horizontally disposed, and the thermal discharge of heating plate upper and lower surface is identical, the vapourizing unit fully phases out cooling water system in evaporator, the temperature field that arrangement one is lifted step by step in vapourizing unit, and then prevent low boiling gaseous material generation liquefaction phenomenon, ensure that flow output is stable.
Description
Technical field
Regulation device, especially low-boiling point material evaporation regulation device are evaporated the present invention relates to one kind.
Background technology
, it is necessary to SiCl in electronics, semiconductor, optical communication, solar energy, quartzy production industry4(57.6 DEG C of boiling point),
GeCl4Low-boiling point materials such as (84 DEG C of boiling points) carries out accurate and stable flow control, can reach the dress of accurate and stability contorting
It is all to use gaseous flow controller at present to put, therefore just these materials must be vaporized, and then carries out flow control,
Evaporation is main by way of being heated to evaporator.After the vaporization of these low-boiling point materials, it is necessary to protect in gaseous course of conveying
The temperature for being more than or equal to front end along the temperature for flowing to end is demonstrate,proved, if terminal temperature is less than head temperature, will be produced
Liquefaction phenomenon, ultimately results in that flow control is unstable, and then flow controller damages uncontrollable phenomenon.
Current low-boiling point material evaporation regulation and control are all installed with the device such as evaporator, valve, filter, flow controller accessory
In an insulating box, to ensure that evaporator is in lower temperature, then cooling coil is designed in evaporator, inside is passed through cooling water
To reach the purpose of cooling.
Prior art is evaporator internal cooling, and the mode of external heat, observable index is larger, while evaporator internal temperature
Stability is not enough, causes pressure oscillation big, influences output flow.Evaporator internal cooling water system easily goes wrong, when cold
But during water system failure, the change of flow controller flow, temperature will be too high in evaporator, and then causes rear end gaseous material
Liquefaction, flow control is then failed.
The content of the invention
The invention aims to fully phase out cooling water system in evaporator, arrange that one carries step by step in vapourizing unit
The temperature field risen, and then prevent low boiling gaseous material generation liquefaction phenomenon, ensure that flow output is stable.
The present invention provides a kind of low-boiling point material vapourizing unit, including cabinet, be arranged on cabinet bottom inlet and
The gas outlet on cabinet top, is arranged in evaporator and gas flow controller inside cabinet, the cabinet and is provided with heating
Cabinet is divided into upper chamber and lower chambers by plate, the heating plate, and the volume of the lower chambers is more than the volume of the upper chamber,
The heating plate is horizontally disposed, and the thermal discharge of heating plate upper and lower surface is identical.
The evaporator is arranged in lower chamber, and base of evaporator is provided with charging aperture, and top is provided with discharging opening, and charging aperture leads to
Cross woven hose to be connected with inlet, discharging opening is entered in upper chamber by appendix through heating plate, and appendix is in upper chamber
Be connected with the gas outlet, the gas flow controller be arranged on appendix close at gas outlet.
Lower chambers are heated by heating plate, maintain internal temperature.Heating plate is located at lower chambers top, bottom chamber temperature
Distribution is to gradually rise from the bottom to top, higher closer to heater regional temperature.Upper chamber is also to be heated by heating plate,
But the whole cavity volume of upper chamber is smaller than lower chambers, while high-temperature gas is toward rising, this ensures that epicoele room temperature
More than cavity of resorption room temperature.
After gaseous matter comes out at the top of evaporator, upper chamber is delivered to by delivery pipe, in the course of conveying of lower chambers
In, with the raising of height, environment temperature gradually rises, it is to avoid liquefaction of the gaseous material in pipeline.Then gaseous material
Equipment is transferred out by flow controller regulating flow.
Further, the appendix is less than or equal to 45 °, institute in the part of lower chambers to be obliquely installed with horizontal sextant angle
It is horizontally disposed that appendix, which is stated, in the part of upper chamber.
Further, the appendix is less than or equal to 5 ° in the part of lower chambers with horizontal sextant angle.
Sloping transfer line uses the design of tilt-lift, ensure that tipping tube temperature is gradually lifted, prevents inner gaseous
The liquefied purpose of material.Simultaneously can effective guarantee when heating plate accidental damage, line temperature reduction, gaseous material liquefaction,
Flowed back to from tipping tube in evaporator, will not enter in gaseous state flow controller, prevent gaseous state flow controller from damaging.
Further, the heater of the evaporator is arranged on the outer surface of evaporator.Improve temperature inside evaporator
The stability of degree.
Further, feed liquor hand-operated valve is sequentially provided with the woven hose from inlet to charging aperture, enters liquid filter, enter
Liquid metering valve, pre-heater and feed liquor pneumatic operated valve.
Further, the appendix presses gas flow direction in the part of upper chamber, in the gas flow controller
Gaseous state valve and gaseous state filter are additionally provided with before.
Further, the cabinet is surrounded by heat-insulation layer.
Brief description of the drawings
Fig. 1 is low-boiling point material vapourizing unit side cross-sectional, view of the present invention；
Fig. 2 is low-boiling point material vapourizing unit top cross-sectional view of the present invention；
In figure：1- cabinets, 2- inlets, 3- gas outlets, 4- evaporators, 5- gas flow controllers, 6- heating plates, on 7-
Chamber, 8- lower chambers, 9- woven hoses, 10- appendixs, 11- heat-insulation layers, 201- feed liquors hand-operated valve, 202- enter liquid filter, 203-
Feed liquor metering valve, 204- pre-heaters, 205- feed liquors pneumatic operated valve, 301- gaseous states valve, 302- gaseous states filter, 401- chargings
Mouth, 402- discharging openings, 403- heaters.
Embodiment
As depicted in figs. 1 and 2, apparatus of the present invention include cabinet 1, are arranged on the inlet 2 and cabinet 1 of the bottom of cabinet 1
The gas outlet 3 on top, is arranged in evaporator 4 and gas flow controller 5 inside cabinet 1, the cabinet 1 and is provided with heating
Cabinet 1 is divided into upper chamber 7 and lower chambers 8 by plate 6, the heating plate 6, and the heating plate 6 is horizontally disposed, and heating plate 6
The thermal discharge of upper and lower surface is identical, and the volume of the lower chambers 8 is more than the volume of the upper chamber 7；The evaporator 4 is arranged on
In lower chamber, the bottom of evaporator 4 is provided with charging aperture 401, and top is provided with discharging opening 402, and charging aperture 401 is by woven hose 9 with entering
Liquid mouthfuls 2 is connected, and discharging opening 402 is entered in upper chamber 7 by appendix 10 through heating plate 6, appendix 10 in upper chamber 7 with
The gas outlet 3 is connected, the gas flow controller 5 be arranged on appendix 10 close at gas outlet 3.
Evaporator 4 is arranged on lower chambers 8, and liquid passes through feed liquor hand-operated valve 201, enters liquid filter 202, feed liquor metering
Enter evaporator 4, feed liquor metering valve 203 and pre-heater from bottom after valve 203, pre-heater 204 and feed liquor pneumatic operated valve 205
204 constantly quantitative to evaporator 4 can be filled with the liquid substance of higher temperature (1-15 DEG C typically below boiling point substance
Between), the internal pressure of evaporator 4 and temperature is kept stable.Enter the particulate of the main filtration liquid of liquid filter 202, really
Protect the feed liquor quality of evaporator 4.Feed liquor hand-operated valve 201 and the control feed liquor break-make of feed liquor pneumatic operated valve 205 are used.
Gaseous state valve 301, gaseous state filter 302, flow controller 5 are arranged on upper chamber 7.Install the outer surface of evaporator 4
There is heater 403, liquid is gasified, produce the gaseous material of certain pressure, gaseous material is warm after appendix 10
Degree is stepped up, subsequently into upper chamber 7, reaches technological requirement temperature, eventually passes gaseous state valve 301 and gaseous state filter
302 enter flow controller 5, and gaseous material directly turns on out apparatus of the present invention after flow controller 5 and enters production equipment
In.
Heat-insulation layer 11 is arranged on lower chamber and upper cavity surrounding, device is isolated from the outside out, and keeps internal temperature.
The surface of evaporator 4 is provided with heater 403 (such as heating blanket), right after cryogenic liquid material enters evaporator 4
It carries out heating evaporation, is changed into gaseous material.Gaseous matter is come out by the top of evaporator 4, and epicoele is delivered into appendix 10
Body 7, in the appendix 10 for tilting (angle of inclination is less than or equal to 45 °, preferably smaller than equal to 5 °), material is constantly from external world's absorption
Heat, gaseous material temperature is raised step by step from bottom to top with low-temperature space thermal field.Then gaseous material by gaseous state valve 301 and
Flow controller 5 is reached after gaseous state filter 302, the regulating flow of flow controller 5 is eventually passed and transfers out equipment.
Appendix 10 ensure that tipping tube temperature is gradually lifted, prevented inner gaseous using the design of tilt-lift
The liquefied purpose of material.Simultaneously can effective guarantee when 6 accidental damage of heating plate, line temperature reduction, gaseous material liquefaction,
Flowed back to from appendix 10 in evaporator, will not enter in gaseous state flow controller 5, prevent gaseous state flow controller 5 from damaging.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art
Scholar can understand present disclosure and implement according to this, and it is not intended to limit the scope of the present invention.It is all according to the present invention
The equivalent change or modification that Spirit Essence is made, should all be included within the scope of the present invention.
Claims (7)
1. a kind of low-boiling point material vapourizing unit, including cabinet (1), are arranged on the inlet (2) and cabinet of cabinet (1) bottom
(1) gas outlet (3) on top, is arranged on cabinet (1) internal evaporator (4) and gas flow controller (5), and its feature exists
In：Heating plate (6) is provided with the cabinet (1), cabinet (1) is divided into upper chamber (7) and lower chambers by the heating plate (6)
(8), the heating plate (6) is horizontally disposed, and the thermal discharge of heating plate (6) upper and lower surface is identical, the appearance of the lower chambers (8)
Volume of the product more than the upper chamber (7)；The evaporator (4) is arranged in lower chamber, and evaporator (4) bottom is provided with charging aperture
(401), top is provided with discharging opening (402), and charging aperture (401) is connected by woven hose (9) with inlet (2), discharging opening (402)
Entered by appendix (10) through heating plate (6) in upper chamber (7), appendix (10) in upper chamber (7) with the outlet
Mouthful (3) connection, the gas flow controller (5) be arranged on appendix (10) close to gas outlet (3) place.
2. low-boiling point material vapourizing unit according to claim 1, it is characterised in that the appendix (10) is in lower chambers
(8) part is less than or equal to 45 °, the appendix (10) is water in the part of upper chamber (7) to be obliquely installed with horizontal sextant angle
It is flat to set.
3. low-boiling point material vapourizing unit according to claim 2, it is characterised in that appendix (10) is in lower chambers (8)
Part and horizontal sextant angle be less than or equal to 5 °.
4. low-boiling point material vapourizing unit according to claim 1, it is characterised in that the heating dress of the evaporator (4)
Put the outer surface that (403) are arranged on evaporator.
5. low-boiling point material vapourizing unit according to claim 1, it is characterised in that from feed liquor on the woven hose (9)
Mouthful (2) are sequentially provided with feed liquor hand-operated valve (201) to charging aperture (401), enter liquid filter (202), feed liquor metering valve (203), in advance
Heater (204) and feed liquor pneumatic operated valve (205).
6. low-boiling point material vapourizing unit according to claim 2, it is characterised in that the appendix (10) is in upper chamber
(7) gas flow direction is pressed in part, and gaseous state valve (301) and gaseous state are additionally provided with before the gas flow controller (5)
Filter (302).
7. the low-boiling point material vapourizing unit according to one of claim 1-6, it is characterised in that the four of the cabinet (1)
Week is provided with heat-insulation layer (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720273824.5U CN206587426U (en) | 2017-03-20 | 2017-03-20 | A kind of low-boiling point material vapourizing unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720273824.5U CN206587426U (en) | 2017-03-20 | 2017-03-20 | A kind of low-boiling point material vapourizing unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206587426U true CN206587426U (en) | 2017-10-27 |
Family
ID=60124672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720273824.5U Withdrawn - After Issue CN206587426U (en) | 2017-03-20 | 2017-03-20 | A kind of low-boiling point material vapourizing unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206587426U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106823425A (en) * | 2017-03-20 | 2017-06-13 | 无锡市孚艾科技有限公司 | A kind of low-boiling point material vapourizing unit |
-
2017
- 2017-03-20 CN CN201720273824.5U patent/CN206587426U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106823425A (en) * | 2017-03-20 | 2017-06-13 | 无锡市孚艾科技有限公司 | A kind of low-boiling point material vapourizing unit |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20181214 Address after: No. 18 Yongdao Road, Dongzhou Street, Fuyang District, Hangzhou City, Zhejiang Province, 311400 Patentee after: HANGZHOU YONGTONG SMART MANUFACTURING TECHNOLOGY Co.,Ltd. Address before: 214000 Xihu East Road, Wuxi City, Jiangsu Province, 8-1122 Patentee before: WUXI FUAI TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20171027 Effective date of abandoning: 20220913 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20171027 Effective date of abandoning: 20220913 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |