TWM635561U - Mobile electrostatic discharge shielding transport device for component carrier and/or component carrier preform, loaded mobile electrostatic discharge shielding transport device, transport device system, and transport device organization system - Google Patents

Abstract

It is described a mobile electrostatic discharge (ESD) shielding transport device (100) for a component carrier (100) and/or a component carrier preform, wherein the transport device (100) comprises: (i) a storage volume (120) for ESD-shielded storing the component carrier (100) and/or the component carrier preform, (ii) a locking element (130) for locking the storage volume (120), (iii) a locking control unit (140), coupled with the locking element (130), and configured to: (a) open the locking element (130), when an operator (400) is authorized, and (b) leave the locking element (130) closed, when an operator (400) is unauthorized; and (iv) a wireless communication device (150) configured to communicate with an external device (100a-c, 210) with respect to a transport device (100) related information.

Description

Mobile ESD shielding transporter, loaded mobile ESD shielding transporter, transporter system, and transporter organization system for component carriers and/or component carrier preforms

The utility model relates to a mobile electrostatic discharge (ESD) shielding transport device for component carriers and/or component carrier preforms. The invention may also relate to a mobile ESD shielding transporter loaded with component carriers (preforms), a transporter system comprising a plurality of transporters, and a transporter organization system. Furthermore, the invention may relate to methods of transporting component carriers (preforms) in an ESD shielded manner and to the use of wireless communication devices.

With the increase in product functions of component carriers equipped with one or more electronic components, and the miniaturization of such electronic components, and the number of electronic components mounted on said component carriers such as printed circuit boards Increasingly, more and more powerful array-like components or packages with several electronic components are being used with multiple contacts or connections and the spacing between these contacts is getting smaller and smaller. Removing the heat generated during operation of such electronic components and the component carrier itself is becoming an increasingly important issue. At the same time, the component carrier should be mechanically robust as well as electrically and magnetically reliable in order to operate even under harsh conditions.

In particular, electrostatic discharges (ESD) present a high risk of damage during the component carrier manufacturing process. Conventionally, part carriers (preforms) in production can be safely stored in lockers protected from ESD events. However, component carriers in production need to be handled by operators such as human workers or robots. According to the ANSI ESD S20.20/IEC61340-5-1 standard required for static control, the operator's electrostatic voltage should be lower than ±100V to avoid the risk of ESD. However, the electrostatic voltage of an operator cannot be estimated, therefore, ESD-sensitive equipment is usually accidentally handled by an operator charged with static electricity, thereby damaging or even destroying it. In addition, since the environment of the component carrier manufacturing facility is full of chemicals, the locker itself may rust and generate foreign matter, which may also damage the component carrier in production. Opening locker doors in an environment where part carrier production is busy may further increase the risk of injury to the working human operator. In addition, in large part carrier manufacturing facilities, a large number of lockers may be used, therefore, many lockers may be lost or lost without opening the locker. It may not be possible to identify the contents of the locker in some cases (this increases the risk of ESD injury).

It is an object of the present invention to transport ESD shielded component carriers and/or component carrier preforms in a component carrier manufacturing facility in an efficient and safe manner.

To achieve the above objects, a transporter, a loaded transporter, a transporter system, a transporter organization system, a method of transporting component carriers (preforms) and a method of using a wireless communication device are provided according to the independent claims. The dependent claims describe advantageous embodiments.

According to an aspect of the invention, a mobile electrostatic discharger for component carriers (e.g. printed circuit boards) and/or component carrier preforms (e.g. panels comprising a plurality of semi-finished component carriers) is described. (ESD) shielded (antistatic) transport equipment (hereinafter referred to as "transport equipment"), wherein the transport equipment includes: i) storage of component carriers for ESD shielding (eg, by using ESD shielding material) and/or or a storage volume of the component carrier preform (e.g. a cavity between partition walls), ii) a locking element (e.g. a movable door) for (safely) locking the storage volume (in an ESD-shielding manner), iii ) a locking control unit (e.g., a lock and/or door opening mechanism), which is coupled to the locking element and is configured to: a) when the operator is authorized (e.g., when the operator passes an electrostatic test test), open the locking element, and b) leave the locking element closed when the operator is unauthorized (for example, when the operator fails an electrostatic test), and iv) a wireless communication device that Configured to communicate with an external device (e.g., another transport device and/or a control device) regarding transport device-related information such as the location of the transport device, the authorization status of a particular operator, information about part carriers (preforms) information) to communicate.

According to another aspect of the present invention, a loaded (component carrier) mobile ESD shielded transport is described, comprising: i) a mobile ESD shielded transport as described above, and ii) ESD shielded carried on Component carriers and/or component carrier preforms in the storage volume.

According to another aspect of the present invention, a transportation device system is described, comprising: a plurality of transportation devices as described above, wherein the plurality of transportation devices are configured to communicate wirelessly with each other within a wireless communication network (in particular by configured to communicate with each other regarding information related to the transport equipment).

According to another aspect of the utility model, a transport equipment organization system is described, comprising: i) at least one transport equipment and/or transport equipment system as described above, ii) a control device including a control device configured to communicate with said wireless A communication device communicates with another wireless communication device.

According to another aspect of the present invention, a method of ESD shielded transport of component carriers and/or component carrier preforms is described, the method comprising: i) ESD test is performed on operator, ii) ESD test result is stored in wireless communication network (eg WLAN, WiFi), iii) operator is close to above mentioned mobile ESD shielded transport equipment, iv) Test result is retrieved from wireless communication network , and based on test results: v) Authorize or not authorize the operator to open the locking element of the transport device.

According to another aspect of the present invention, a wireless communication device to be attached to a mobile ESD shielded transport device for ESD testing of component carriers and/or component carrier preforms in a component carrier manufacturing facility is described. The purpose (method of use) of shielding for coordination (organization).

In the context of this document, the term "electrostatic discharge" (ESD) can mean the sudden flow of electrical current between two charged objects. ESD can occur when different charged objects are brought close to each other. In the context of component carrier manufacturing, ESD may be considered an undesired effect that may injure or destroy the component carrier (during manufacture). When subjected to the high voltages of ESD, they can be permanently damaged. Therefore, component carrier manufacturers can use anti-charging measures and anti-static equipment to establish an electrostatic protected area (EPA) that is substantially free of static charges. In particular, sensitive products can be protected by ESD shielding. ESD shielding or "means of ESD shielding" may refer to devices or measures that reduce, suppress, or otherwise prevent electrostatic discharge. Therefore, in the context of this document, the term "ESD shielding" may refer to any measure to reduce/prevent ESD, such as by applying antistatic materials and antistatic agents. In this document, the terms "ESD shielded" and "antistatic" are used synonymously.

In the context of this document, the term "transport device" may denote any device suitable for storing component carriers (in a cavity) in an ESD shielded manner. The transport device may include locking elements to securely lock ESD sensitive products within the ESD shielded cavity. Preferably, the walls surrounding the storage volume and locking element comprise ESD shielding/antistatic material. In one embodiment, the transport device is mobile, ie using wheels. A component carrier manufacturing facility may include a plurality of such transporters, each transporter storing a different component carrier at a different stage of production.

In the context of this document, the term "wireless communication device" may denote any device adapted to communicate wirelessly (with another wireless communication device). For example, communication between a wireless communication device that can communicate (send/receive) via 4G, 5G, Wifi (802.11p), radio frequency (RF), RFID, NFC, or DSRC (Dedicated Short Range Communication) and another wireless communication device Data information). A wireless communication device may be configured as a receiver, transmitter or transceiver. The wireless communication device may also be configured to communicate with wireless communication devices (external devices) of other transportation devices. Furthermore, the wireless communication device may be configured to communicate with a control device (external device) of the transportation device organization system. Additionally or alternatively, a wireless communication device may be integrated in a wireless communication network and/or an Internet of Things (IoT) system.

In the context of this document, the term "wireless communication network" may refer to a computer network that uses wireless data connections between network nodes (eg, wireless communication devices). In an example, the network may be configured as a wireless local area network (WLAN), which links two or more multiple devices. In an example, the IEEE 802.11 WLAN standard (Wi-Fi) may be used. In the network, information indicative of the transport device(s) can be stored and retrieved again. For example, an electrostatic test (device) can be connected to a network and the (identity-related) test results for different operators can be stored in the network or in a network-associated memory. Furthermore, the transport device can upload its current position and/or its current load to a network or network-related memory. These data can be stored, for example, in a memory (of the control device). By combining information in the network, transportation equipment can be efficiently organized.

The wireless communication device and/or the further wireless communication device includes 4G and/or 5G functionality. In the context of this document, the term "4G and/or 5G capable" may refer to known wireless system standards. 4G (or LTE) is an established standard, while 5G is an upcoming technology that is standardized and likely to be fully established in the near future. This wireless communication device can also be adapted for future developments such as 6G.

Wireless communication devices may also conform to WiFi standards, such as 2.4GHz, 5GHz, and 60Ghz. The electronic device may for example comprise a so-called wireless combination (integrated with WiFi, Bluetooth, GPS, . . . ), a Radio Frequency Front End (RFFE) or a Low Power Wide Area (LPWA) network module.

A wireless communication device and/or an additional wireless communication device may include an antenna. In the context of this document, the term "antenna" may especially denote an element connected to a receiver or a transmitter, for example by a transmission line. Thus, an antenna can be denoted as an electrical component that converts electrical energy into radio waves (and vice versa). Antennas can be connected to control devices such as radio transmitters and/or radio receivers controller (such as a control chip) together. In transmission, a radio transmitter may supply an electric current oscillating at radio frequency (ie, high-frequency alternating current) to an antenna, and the antenna may radiate energy from the electric current as electromagnetic waves (especially radio waves). In receive mode, the antenna can intercept some of the power of the electromagnetic waves to provide a small voltage which can be applied, for example, to a receiver for amplification. In an embodiment, the antenna may be configured as a receiver antenna, a transmitter antenna or a transceiver (ie transmitter and receiver) antenna. In one example, the antennas may be configured as a single antenna. In another example, the antennas may be configured as (adhered, embedded) antenna arrays.

The wireless communication device and/or the additional wireless communication device may include radar. In the context of this document, the term "radar" may refer to object detection that uses electromagnetic waves to determine the distance, angle, or velocity of one or more objects. A radar device may include a transmitter that emits electromagnetic waves (eg, in the radio or microwave range). Electromagnetic waves from the transmitter reflect off the object and return to the receiver. Thus, one antenna structure can be used for both transmission and reception. Additionally, processors, such as electronic components, may be used to determine properties of objects such as position and velocity based on received electromagnetic waves. According to further embodiments, the described component carrier can be used in the context of radar applications. Especially for industrial radar applications. Radar applications can be performed in the following frequency ranges: 65GHz and higher, in medium or long range - today typically from 77GHz to 81GHz, but can increase to 90Ghz, and in the longer term, as technology capabilities increase increase even further. Radar applications in particular can be performed in the millimeter wave range for industrial industrial applications (e.g. level indicators). In these examples, antenna structures and electronic components (eg, HF components for radar applications) may advantageously be arranged in spatial proximity without undesired parasitic effects occurring.

In the context of this document, the term "component carrier" may especially denote any support structure capable of receiving one or more components on and/or in it to provide mechanical support and/or electrical connection. In other words, the component carrier can be configured as a mechanical and/or electronic carrier for components. In particular, the component carrier may be one of a printed circuit board, an organic interposer and an IC (Integrated Circuit) substrate. The component carrier can also be a hybrid plate combining different types of component carriers of the above-mentioned types.

In one embodiment, the component carrier comprises a (layer) stack of at least one electrically insulating layer structure and at least one electrically conductive layer structure. For example, the component carrier can be a laminate of the mentioned electrically insulating layer structure(s) and electrically conductive layer structure(s), which are formed in particular by applying mechanical pressure and/or thermal energy. The mentioned stack can provide a plate-shaped component carrier which is able to provide a large mounting surface for further components and which is still very thin and compact. The term "layer structure" may especially denote a continuous layer, a patterned layer or a plurality of discontinuous islands in a common plane.

In the context of this document, the term "component carrier preform" may in particular denote a panel comprising a plurality of semi-finished component carrier products (as described above). For example, the panels can later be separated (singulated) into multiple (finished) component carriers. In another example, the component carrier preform may be a single semi-finished component carrier.

According to exemplary embodiments, the utility model can be based on the following idea method whereby part carriers and/or part carrier preforms can be stored and transported in a part carrier manufacturing facility in an efficient and safe manner, when ESD shielded transportable transport equipment is applied which includes: i) can be supplied by An ESD shielded storage volume with locking elements securely closed, and ii) a wireless communication device for communicating information related to the transport device with external devices. Therefore, only authorized and ESD-risk-free operators may open the transport device and handle the internal component carriers. The external device can be another transport device, a control device and/or a network. Thus, the transport device can (automatically) receive relevant information about the authorization status of the operator. Furthermore, the wireless communication device(s) can be used to efficiently organize and coordinate the transportation device (or transportation devices) during the component carrier manufacturing process.

Conventionally, there is no way to verify that the operator is indeed free from ESD risk. Testing is only possible at specific test stations and an operator who accidentally forgets to test himself opens the ESD shielded locker and damages/destroys the contents. These disadvantages have been overcome by the transport device, which only opens when an authorization message (from an electrostatic test) is received wirelessly.

Furthermore, conventionally, in large facilities, ESD shielded lockers are often lost, or it is not possible to identify any information about their contents without opening them. These disadvantages are also overcome in that the described transport device can be positioned and coordinated by means of a wireless communication device and/or a wireless communication network (in particular using a control device) using information related to the transport device.

Detailed Description of Exemplary Embodiments

According to an exemplary embodiment, a wireless communication device is coupled to the locking control unit, and the wireless communication device is configured to control the locking control unit (or trigger a reaction of the locking control unit) based on information related to the transport device. This may provide the advantage that the ESD-sensitive contents of the transport device may be effectively protected since the opening/closing of the locking element depends on information received by the wireless communication device.

For example, information related to transport equipment includes information about the authorization status of the operator, in particular if the operator passed an electrostatic test. In this way, the wireless communication device can receive authorization information (via the network) from the electrostatic testing device, and then the wireless communication device can pass the test-related command "open" or "keep closed" to the lock control unit.

According to further exemplary embodiments, the external device is at least one of: at least one further mobile ESD shielding transport device, a control device, an Internet of Things (IoT) application. This may provide the advantage that the transport equipment is widely connected within the component carrier manufacturing facility so that information can be effectively coordinated.

The term "IoT" in this context may refer to a network of physical objects (things) including: sensors, software, and other devices used to connect and exchange data with other devices and systems over a network (the Internet) technology. In other words, the term "IoT application" can refer to particularly complex wireless communication networks. A component carrier manufacturing facility may be at least partially equipped with IoT applications in which a large number of devices are interconnected. A transport device or multiple transport devices can be integrated into such an IoT application. In an example, electrostatic test equipment and/or control equipment may also be integrated in IoT applications.

According to a further exemplary embodiment, the information related to the transport device comprises information about the location of the transport device (in particular in a component carrier manufacturing facility). This may provide the advantage that the location of a particular transport (and its contents) may be easily found, in particular by retrieving this information from a wireless communication network. Thus, the known disadvantage of ESD shielded lockers being lost in complex component carrier manufacturing facilities is overcome.

According to a further exemplary embodiment, the transport device-related information comprises information about component carriers and/or component carrier preforms to be stored in the storage volume. This may provide the advantage that, in particular by retrieving this information from a wireless communication network, the location of a particular component carrier (preform) at a particular processing step (or facility level) can be easily found.

Furthermore, it is possible to identify which transport device contains which part carrier (preform) without opening the transport device (which would create unnecessary ESD risks). Thus, the known disadvantage of a particular component carrier being lost in a complex component carrier manufacturing facility and having to open the ESD shielded locker to verify its contents can be overcome.

According to a further exemplary embodiment, the information related to the transport equipment comprises information about the authorization status of a specific operator, in particular the result of an electrostatic test. This may provide the advantage of being able to provide authorization information to the transport device (and locking control unit) in a dynamic (regularly updated) manner, especially based on recent electrostatic test results.

According to a further exemplary embodiment, the locking element comprises a locking gate, such as a roller shutter gate and/or a telescoping sliding gate. Conventional ESD shielded lockers include doors that open in a window-like fashion, thereby Occupy space in space-constrained manufacturing environments. This increases the risk of damage to the operator. Locking doors configured as roller shutters and/or retractable sliding doors overcome these problems and provide the benefit of added security for the work environment.

According to further exemplary embodiments, the transportation device includes at least one of an ESD shielding material, an antistatic material, an ESD shielding agent, an antistatic agent, an ESD or antistatic coating, an antirust coating. In this way, in particular the ESD-sensitive contents of the transport device are protected from ESD. In addition, rusting of transportation equipment, which may be used in component carrier manufacturing facilities in which a large amount of chemicals are used, can be effectively suppressed.

According to a further exemplary embodiment, the transport device also comprises a token reader coupled to the locking control unit for analyzing the operator's token, in particular a smart card. Based on the results of the analysis, the token reader is also configured to provide information to the lock control unit whether the operator is authorized or the operator is not authorized. The token reader can advantageously be applied as an additional authorization mechanism interacting with the wireless communication device coupled to the locking control unit.

The token reader may be arranged on the exterior of the transport device and may be configured as a card reader (eg RFID or NFC). The operator can swipe his personal (facility) card on the card reader, and the card reader can identify the operator's personal identity. This can increase security as only certain operators may be allowed to open certain transports. Therefore, even if an operator is authorized statically, access can still be denied based on personal identity.

According to a further exemplary embodiment, the transport device further comprises a (self) positioning device configured to self-position the transport device and store the positioning result as information related to the transport device. In this way, the transport device can position itself and communicate said information to the network (eg to the control device) so that organization/coordination can be done efficiently.

The (self) localization device may comprise, for example, one of the following: distance sensor, speed sensor, positioning sensor, camera, radar, ultrasound functionality, GPS (Global Positioning System), differential GNSS, SLAM (simultaneous localization and mapping) functionality , GPR (Ground Penetrating Radar). In principle, the positioning device may be any kind of sensor device which enables the transport device to position itself within the component carrier manufacturing facility, in particular with respect to the different levels of the facility.

According to an additional exemplary embodiment, the transport device further comprises an output element coupled to the storage volume and configured to automatically output at least one component carrier and/or at least one component carrier from the storage volume in an ESD shielded manner piece preforms. This can provide the advantage that the ESD-sensitive contents are protected even more safely, since the operator does not have to manually retrieve the component carriers (preforms) from the storage volume.

The output element may comprise any mechanism suitable for automatically delivering the contents of the transport device. For example, the output element may comprise a drawer (in particular L-shaped) that automatically pushes out the storage volume (see FIG. 2 ).

According to a further exemplary embodiment, the storage volume comprises a plurality of grooves for storing a plurality of component carriers and/or component carrier preforms. Thus, the contents of the transport device can be well organized and the desired object can be retrieved in an easy and safe manner.

According to further exemplary embodiments, the operator is a human and/or a transport robot. While the operator is in many examples a human facility worker, it could also be any kind of robot configured to handle component carriers (preforms) during manufacturing. The robot may also have to undergo an electrostatic test before being authorized to open the locking elements of the transport device.

According to a further exemplary embodiment, the transport device further comprises a display configured to provide an operator of the transport device with information related to the transport device. The transport device-related information is, for example, an indication of component carriers and/or component carrier preforms to be stored in the storage volume. This may provide the advantage that an operator can easily find the location of a particular part carrier (preform) at a particular processing step without opening the transport equipment (which would create unnecessary ESD risks). Thus, the known disadvantage of a particular component carrier being lost in a complex component carrier manufacturing facility and having to open the ESD shielded locker to verify its contents can be overcome.

According to a further exemplary embodiment, the transport device further comprises a mechanical lock element for receiving the master key and coupled to the locking element, wherein the mechanical lock element is configured to open the lock element upon receipt of the master key. This measure offers the advantage of additional security. For example, in an emergency it may be critical to open the locking element even if the operator is not authorized. The mechanical lock may be part of the locking control unit, or may be arranged independently of the locking control unit.

According to a further exemplary embodiment, the locking control unit is configured to automatically close the locking element after a predefined period of time. This aspect is ESD Sensitive transport of device contents provides an additional measure of security.

According to a further exemplary embodiment, the transport device comprises at least one movable element, in particular a wheel, for moving the transport device manually or automatically within the component carrier manufacturing facility. In particular, the movable element is coupled to the storage volume via a mounting structure such that the storage volume is positioned at an elevated level generally accessible to an upright standing human operator. This can offer the advantage that the described transport device is easy to handle and is particularly user-friendly.

According to a further exemplary embodiment, the control device comprises a memory for storing transport device-related information comprising at least one of: positioning, authorized and/or unauthorized operation of a plurality of transport devices The identity of the owner, the direction of transport of the part carrier and/or part carrier preforms in the part carrier manufacturing facility.

According to a further exemplary embodiment, the control device is configured to coordinate a plurality of transport devices. In particular, coordination includes at least one of: coordination of positioning, coordination of authorized and unauthorized operators, coordination of part carriers and/or part carrier preforms in the part carrier manufacturing facility Coordination of transport directions.

This can offer the advantage that multiple (large) transport installations can be organized and coordinated even in large component carrier manufacturing installations. The control device may be any processor or processors configured to receive, store and control information received from the transportation device and/or the wireless network. The control device can be handled by a human operator or can work automatically. The control device can also include AI capabilities that can be trained based on human decision making (e.g. e.g. neural networks). The control device can be coupled to a wireless communication network and/or IoT application.

According to a further exemplary embodiment, the transportation equipment organization system is coupled to an Internet of Things (IoT) application, in particular, wherein the IoT application includes an artificial intelligence (AI) algorithm (see description above).

According to a further exemplary embodiment, further comprising: presenting the operator's token to a token analyzer of the transport device; analyzing the token; and based on the result of the analysis: further authorizing or further disauthorizing the operator to open the locking element of the transport device (see description of tokens above).

According to a further exemplary embodiment, the token is an identification of the operator, and the identity of the operator is linked to the test results stored in the wireless communication network. In this way, the token can be used to identify the operator, which can then be used to retrieve test results from the network. Thus, transport equipment can be handled in a safe, automated and user-friendly manner.

According to a further exemplary embodiment, in case the operator is authorized, the method further comprises automatically opening the locking element and/or manually opening the locking element (see description above) a.

According to a further exemplary embodiment, the electrostatic test comprises testing a specific part of the operator, in particular the shoe or the wrist. This can provide the advantage that established electrostatic testing methods can be applied, allowing the methods to be directly implemented into existing facilities. Preferably, the electrostatic testing device(s) may be coupled to the facility wireless communication network for uploading test results. Additionally, uploaded test results can be linked to corresponding operators (eg, personal identities).

According to a further exemplary embodiment, the movable element comprises a locking function. For example, the wheels can be locked automatically. This may provide the advantage of increased safety even when for example locking elements should not be closed or the ESD shielded device is charged.

According to further exemplary embodiments, an ESD shielded transport device includes an energy storage element (eg, a battery and/or accumulator) and an automatic charging function. For example, the device is configured to automatically charge the energy storage element (and automatically drive to a charging station) when the power state of the energy storage element is low (eg, below 10%). This may provide the advantage that the power supply of the device is robust and accordingly the device works in a very safe manner.

In an embodiment, the component carrier is shaped as a plate. This facilitates a compact design, wherein the component carrier still provides a large base for components mounted thereon. Furthermore, in particular, for example bare dies as an example of embedded electronic components can be easily embedded in thin boards such as printed circuit boards due to their small thickness.

In an embodiment, the component carrier is configured as one of: a printed circuit board, a substrate (in particular an IC substrate), and an interposer.

In the context of the present application, the term "printed circuit board" (PCB) may in particular denote a board-shaped component carrier, which is obtained by laminating several conductive layer structures with several electrically insulating layer structures (e.g. by applying pressure and/or or by supplying thermal energy). As a preferred material for PCB technology, the conductive layer structure is made of copper, while the electrically insulating layer structure can consist of resin and/or glass fibres, so-called prepregs or FR4 material. The various conductive layer structures can be connected to one another in the desired manner by, for example, laser drilling or machine Mechanical drilling forms via holes through the laminate; and filling them with conductive material, especially copper, thereby forming via holes as via connections. In addition to one or more components that may be embedded in the printed circuit board, the printed circuit board is generally configured to receive one or more components on one or two opposing surfaces of the board-shaped printed circuit board. These components may be connected to the respective main surfaces by welding. The dielectric portion of the PCB may be composed of resin with reinforcing fibers such as glass fibers.

In the context of the present application, the term "substrate" may especially denote a small component carrier. Compared to a PCB, a substrate can be a relatively small component carrier on which one or more components can be mounted and which can act as a connection between a chip(s) and another PCB medium. For example, the substrate may have substantially the same dimensions as components (in particular electronic components) to be mounted thereon (for example, in the case of a chip scale package (CSP)). More specifically, a substrate can be understood as a carrier for electrical connections or electrical networks and a component carrier comparable to a printed circuit board (PCB), but which has a rather high density. Horizontal connections are eg conductive paths, while vertical connections may eg be drilled holes. These lateral and/or vertical connections are arranged within the substrate and can be used to provide electrical, thermal connections and/or mechanical connections. Therefore, the term "substrate" also includes "IC substrate". The dielectric part of the substrate may consist of a resin with reinforcing particles, such as reinforcing spheres, especially glass spheres.

The substrate or interposer may include or consist of the following Composition: At least one layer of glass, silicon (Si) or photoimageable or dry-etched organic material, such as epoxy-based laminates (such as epoxy-based laminates) or polymer compounds, such as polyimide, polybenzo Oxazole or benzocyclobutene functionalized polymers.

In an embodiment, said at least one electrically insulating layer structure comprises at least one of the following: a resin (such as a reinforced or non-reinforced resin, such as epoxy resin or bismaleimide-triazine resin), Cyanate ester resins, polyphenylene derivatives, glass (especially fiberglass, laminated glass, glass-like materials), prepreg materials (such as FR-4 or FR-5), polyimides, polyamides, liquid crystals Polymers (LCP), epoxy-based laminates, polytetrafluoroethylene (PTFE, Teflon®), ceramics and metal oxides. Reinforcing structures, such as meshes, fibers or spheres, for example made of glass (multilayer glazing), can also be used. Although prepregs, especially FR4, are generally preferred for rigid PCBs, other materials can be used, especially epoxy-based build-up films or photoimageable dielectric materials. For high frequency applications, high frequency materials such as polytetrafluoroethylene, liquid crystal polymers and/or cyanate resins, low temperature cofired ceramics (LTCC) or other low, very low or ultra-low DK materials can be implemented on the part As an electrical insulating layer structure in the carrier.

In one embodiment, at least one conductive layer structure includes at least one of the following: copper, aluminum, nickel, silver, gold, palladium, magnesium, and tungsten. Although copper is generally preferred, other materials or coated versions thereof are also possible, especially coated with a superconducting material such as graphene.

At least one (electronic) component may be selected from among the following: non-conductive inlays, conductive inlays (e.g. metal inlays, preferably comprising copper or aluminium), heat transfer elements elements (such as heat pipes), light-guiding elements (such as optical waveguides or light-conducting connections), optical elements (such as lenses), bridges, energy harvesting units, electronic components, or combinations thereof. For example, the component may be an active electronic component, a passive electronic component, an electronic chip, a storage device (such as a DRAM or other data storage), a filter, an integrated circuit, a signal processing component, a power management component, an optoelectronic interface element, a light emitting diode , optocouplers, voltage converters (such as DC/DC converters or AC/DC converters), cryptographic components, transmitters and/or receivers, electromechanical converters, sensors, actuators, microelectromechanical systems (MEMS) , microprocessors, capacitors, resistors, inductors, batteries, switches, cameras, antennas, logic chips, and energy harvesting units. However, other components may be embedded in the component carrier. For example, magnetic elements can be used as components. Such a magnetic element may be a permanent magnetic element (such as a ferromagnetic element, an antiferromagnetic element, a multiferroic element or a ferrimagnetic element, eg a ferrite core) or may be a paramagnetic element. However, the component can also be a substrate, an interposer or another component carrier, for example in a board-to-board configuration. The component can be surface mounted on the component carrier and/or can be embedded inside it. Furthermore, other components, especially those that generate and emit electromagnetic radiation and/or are sensitive to electromagnetic radiation propagating from the environment, may also be used as components.

In one embodiment, the component carrier is a laminate-type component carrier. In such an embodiment, the component carrier is a composite of multilayer structures that are stacked and joined together by applying pressure and/or heat.

After processing the inner layer structure of the component carrier, one or more additional electrically insulating layer structures and/or conductive layer structures can be symmetrically Or asymmetrically cover, in particular by lamination, one or two opposite main surfaces of a layer structure treated. In other words, layering can continue until the desired number of layers is obtained.

After the superposition of the electrically insulating layer structure and the electrically conductive layer structure has been formed, the obtained layer structure or component carrier can be surface treated.

In particular, an electrically insulating solder resist can be applied to one or both opposite main surfaces of the layer stack or component carrier. For example, solder resist, such as solder resist, can be formed over the entire major surface and the solder resist layer subsequently patterned to expose one or more conductive surface portions that will be used to carry the component The components are electrically coupled to the periphery of the electronic components. Surface parts of the component carrier covered with solder resist, in particular copper-containing surface parts, can be effectively protected from oxidation or corrosion.

In terms of surface treatment, it is also possible to optionally apply a surface finish to exposed conductive surface portions of the component carrier. Such a surface finish may be a conductive covering material on exposed conductive layer structures on the surface of the component carrier, such as pads, conductive tracks, etc., in particular containing or consisting of copper. If such an exposed conductive layer structure is not protected, the exposed conductive component carrier material, in particular copper, may oxidize, reducing the reliability of the component carrier. The surface modification can then be formed, for example as an interface between the surface mounted component and the component carrier. The surface modification has the function of protecting exposed conductive layer structures, in particular copper circuits, and enables a joining process with one or more components, for example by soldering. Examples of suitable materials for surface modification are organic solderability preservatives (OSP), electroless nickel immersion gold (ENIG), gold (especially hard gold), electroless tin, nickel gold, nickel palladium, ENIPIG (chemical nickel immersion palladium immersion gold), etc.

The aspects defined above and other aspects of the invention will be apparent from and elucidated with reference to the examples of embodiment to be described hereinafter.

100: ESD shielded mobile transport equipment

100a-100c: multiple transport equipment

110: component carrier

120: Storage volume

130: locking element

135: Token reader

140: Lock control unit

141: Locking element status indicator

150: wireless communication equipment

151: Wireless communication network

160: output element

170: Movable components

175: Installation structure

180: mechanical lock

181: Power display

182: Main power switch

200: Transportation equipment organization system

210: Control equipment

250: Additional wireless communication equipment

400: operator

410: Electrostatic testing equipment

500: Component carrier manufacturing facility

[ Fig. 1 ] shows a mobile ESD shielding transportation device according to an exemplary embodiment of the present invention.

[ Fig. 2 ] shows a loaded mobile ESD shielding transport device according to another exemplary embodiment of the present invention.

[ Fig. 3 ] shows a transportation equipment organization system according to an exemplary embodiment of the present invention.

[ Fig. 4 ] shows an electrostatic test environment for a plurality of operators according to an exemplary embodiment of the present invention.

[ Fig. 5 ] shows a component carrier manufacturing facility according to an exemplary embodiment of the present invention.

The illustrations in the figures are schematic. In different figures, similar or identical elements bear the same reference signs.

Exemplary embodiments will be described in further detail and will be summarized based on some basic considerations under which the exemplary embodiments of the present invention have been developed, before referring to the accompanying drawings.

According to an exemplary embodiment, the ESD cart electronic lock (lock fixed control unit) is interconnected with the personal static system (wireless communication network), where, in the personal static system, personal static tests (such as shoes, wristbands, body resistance) are qualified (according to ANSI ESD S20.20 resistance requirements: Personnel bracelet system resistance: 1.0*106 to 3.5*107, personnel sole system resistance 105 to 109, tribostatic voltage between -100V and +100V), and ESD cart shield (locking element) can be checked After the card (token) is opened. When the operator passes the electrostatic test and provides the card, the electronic lock will display the light and activate the unlock button (lock control unit) to open the top cover of the transport device (lock element).

According to an exemplary embodiment, the transport device can be implemented in such a way that in order to avoid the influence of the external electric field on the product (component carrier), the external electric field is covered using a cavity (storage volume) conductor, so that the inner product is not affected by the external electric field , thus effectively avoiding the damage caused by static electricity. The screen door (locking element) is designed to meet the space requirements and is fixed on the trolley (transportation equipment), effectively avoiding the risk of personal injury. When the shutter lock (lock control unit) is open, the product can be picked up and placed. When the rolling door is pushed into position, the inner L-shaped frame (output element) can be moved.

According to a further exemplary embodiment, potential foreign material (FM) problems caused by telescoping sliding doors can be overcome by: i) the guide rail material is manufactured based on the current in-plant upper and lower trigger roll material (POM), and the guide rail production It can be easily replaced, and/or ii) the track can also use 903 rigid material, and the electric door uses sealed bearings as the contact point, which can effectively reduce the friction surface and avoid the problem of FM.

FIG. 1 shows a component carrier 110 according to an exemplary embodiment Mobile electrostatic discharge (ESD) shielded transport equipment 100 for and/or component carrier preforms. The transport device 100 comprises a storage volume 120 in a container which is configured for storing the component carriers 110 and/or the component carrier pre-forms in an ESD shielded manner. The transportation device 100 includes ESD shielding and/or antistatic materials and antirust coatings. The storage volume 120 is coupled via a mounting structure 175 to a movable element 170 (wheels, especially wheels that can lock automatically), so that the storage volume 120 is positioned at a raised height that can be operated by a human operator standing upright 400 touches. Using the wheels 170 , the transport device 100 can be moved manually or automatically within the component carrier manufacturing facility 500 .

The transport device 100 also comprises a locking element 130 for securely locking the storage volume 120 . The locking element 130 is a telescopic sliding door which, in the closed state, protects the interior 120 of the transport device 100 from electrostatic discharges. In addition, the transportation device 100 includes a lock control unit 140 coupled with the lock member 130 and configured to control opening and closing of the lock member 130 . The locking element status indicator 141 also indicates the status of the telescoping sliding door 130 . The locking control unit 140 may be configured to lock only, and the locking element 130 must be manually opened. Alternatively, the locking device 140 comprises a mechanism for automatically opening the locking element 130 . The locking control unit 140 may be configured to automatically close the locking element 130 after a predetermined period of time. In the operating state of the transport device 100 , the component carrier 110 (preform) is located in the storage volume 120 and the locking element 130 is closed. The locking control unit 140 only triggers the opening of the locking element 130 when the operator 400 (human or transport robot) is authorized, and causes the lock to open when the operator 400 is not authorized. The fixed element 130 is closed.

The transport device 100 also includes a token reader 135, which is a smart card reader/writer coupled to the locking control unit 140 for authenticating to a smart card (e.g., a personal Facility ID) token for analysis. Based on the results of the analysis, the token reader 135 is also configured to provide the lock control unit 140 with information whether the operator 400 is authorized or the operator 400 is not authorized.

For emergency situations, the transport device 100 comprises a mechanical lock element 180 for receiving a master key, which is coupled to the locking element 130 so that the locking element 130 can be opened using the master key. The transportation device 100 may further include a positioning device (e.g., a GPS device or an ultrasound device, not shown) configured to allow the transportation device 100 to self-position and store the positioning results as information related to the transportation device 100 (e.g., on a wireless network).

The transportation device 100 also includes a wireless communication device 150 configured to communicate information related to the transportation device 100 with the external devices 100a-100c, 210 (see FIG. 3 below). Said information relating to the transport device 100 comprises information on at least one of the component carriers 110 and/or component carrier preforms to be stored in the storage volume 120, the information on the transport device 100 being stored in the component carrier Location in the part manufacturing facility, and/or authorization status with respect to a particular operator 400.

The wireless communication device 150 is coupled with the lock control unit 140 such that the wireless communication device 150 can control the lock control unit 140 based on information related to the transportation device 100 (and eg, trigger opening/closing).

The ESD shielded transport device 100 includes batteries/accumulators (not shown) so that it can move freely within the component carrier manufacturing facility 500 without cables. The power status is displayed through the power display 181 , and the main power switch 182 can be used to turn on/off the device 100 . Preferably, the ESD shielded transport device 100 is configured to automatically recharge itself (automatically drive to a charging station) when the battery/accumulator power state is low.

Figure 2 shows a loaded mobile ESD shielding transport 100 according to an exemplary embodiment from a side view. The mobile ESD shielded transport device 100 is in principle the same as that described in FIG. 1 , however, the interior can be seen in this view. The component carriers 110 and/or the component carrier preforms are loaded in the storage volume 120 in an ESD shielded manner. The storage volume 120 comprises a plurality of slots for storing a plurality of component carriers (preforms). An L-shaped output element 160 (designed as an automatically movable drawer) is coupled to the storage volume 120 and is configured to automatically (selectively) output at least one component carrier 110 and/or a component carrier preform from the storage volume 120 pieces.

FIG. 3 illustrates a transport equipment organization system 200 in a component carrier manufacturing facility 500 according to an exemplary embodiment. The system 200 includes a plurality of transporters 100a-100c (as described above) forming a transporter system. The system 200 also includes a control device 210 (external device) that includes a further wireless communication device 250 configured to communicate with the plurality of wireless communication devices 150 respectively attached to the transport devices 100a-100c. to communicate. The control device 210 includes a memory for storing information related to the transport device 100, such as the location of the plurality of transport devices 100a-100c, the identity of authorized and/or unauthorized operators 400, component loading The direction of transport of the parts 110 and/or the part carrier preforms in the part carrier manufacturing facility 500 .

Thus, the control device 210 is configured to coordinate the plurality of transport devices 100a-100c based on information related to the transport device 100, such as coordination of positioning, authorized and unauthorized operators 400, component carriers 110 ( preforms) in the direction of transport. The manufacturing facility 500 comprises several levels so that the (self) localization of the transport equipment 100a-100c may not be based solely on GPS, eg additional ultrasound functionality may be used. The equipment of the transportation equipment organization system 200 is connected with the control equipment 210 via the wireless communication network 151 (for example, WiFi).

Preferably, the transportation equipment organization system 200 is also coupled (integrated) to an Internet of Things (IoT) application (not shown) including an artificial intelligence (AI) algorithm.

FIG. 4 illustrates an exemplary embodiment of an electrostatic testing 410 environment for multiple operators 400 . The electrostatic test 410 is performed by the corresponding equipment (and/or floor system) that tests for electrostatic discharge at a specific portion of each operator 400 (eg, at a shoe or wrist). The test results are then stored in the wireless communication network 151 (eg WLAN) of the component carrier manufacturing facility 500 (eg in the memory 250 of the control device 210 ).

FIG. 5 shows an exemplary embodiment of a component carrier manufacturing facility 500 with mobile ESD shielded transport equipment 100 and multiple operators 400 . Operators (personnel) entering an Electrostatic Protected Area (EPA) to work with ESD sensitive products need to have access rights. Therefore, only qualified operators 400 can handle the ESD sensitive products. When approaching the transportation device 100, the test results are retrieved from the wireless communication network 151, and based on the test results If so, the operator 400 will be authorized or not authorized to open the locking element 130 of the transport device 100 .

Preferably, the operator 400 comprises a smart card analyzed by the token reader 135 of the transport device 100 , based on the result of the analysis, the operator 400 will be further authorized or not authorized to open the locking element 130 of the transport device 100 . Thus, the token is the identity of the operator 400 and the identity of the operator 400 is linked to the test results stored in the wireless communication network 151 . Thus, before opening the transport device 100, the identity of the operator 400 (using a token) and the electrostatic status of the operator 400 (using test results stored in the network) are controlled. In case the operator 400 is authorized, the locking element 130 will open automatically and/or must be opened manually by the operator 400 .

100: ESD shielded mobile transport equipment

130: locking element

135: Token reader

140: Lock control unit

141: Locking element status indicator

150: wireless communication equipment

170: Movable components

175: Installation structure

180: mechanical lock

181: Power display

182: Main power switch

Claims (26)

A mobile electrostatic discharge shielding transport (100) for component carriers (110) and/or component carrier preforms, wherein the mobile electrostatic discharge shielding transport (100) comprises: a storage volume (120) for storing the component carrier (110) and/or the component carrier pre-forms shielded from electrostatic discharge; a locking element (130) for locking the storage volume (120); a locking control unit (140), the locking control unit (140) being coupled to the locking element (130), and the locking control unit (140) being configured to: When the operator (400) is authorized, the locking element (130) is unlocked, and leaving said locking element (130) closed when the operator (400) is unauthorized; and A wireless communication device (150) configured to communicate information related to the transportation device (100) with an external device (100a-100c, 210). According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1, Wherein, the wireless communication device (150) is coupled with the locking control unit (140), and Wherein, the wireless communication device (150) is configured to: The locking control unit (140) is controlled based on the information related to the transport device (100). According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein, said external device (100a-100c, 210) is at least one of the following: at least one additional mobile electrostatic discharge shielding transport device (100a-100c), a control device (210), an Internet of Things application. According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein the information related to the transporter (100) includes information about the location of the mobile electrostatic discharge shielding transporter (100) in the component carrier manufacturing facility (500). According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Therein, the information relating to the transport device (100) comprises information about the component carriers (110) and/or the component carrier preforms to be stored in the storage volume (120). According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein said information related to the transportation device (100) includes information about the authorization status of a specific operator (400). According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein, the locking element (130) includes a locking door, in particular, the locking element (130) includes a rolling door and/or a telescopic sliding door. According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein, the mobile electrostatic discharge shielding transport equipment (100) includes at least one of the following: electrostatic discharge shielding material, antistatic material, antistatic agent, electrostatic discharge shielding coating, antistatic coating, antirust coating. According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein, the mobile electrostatic discharge shielding transport equipment (100) also includes: a token reader (135) coupled to the locking control unit (140) to analyze the operator's (400) token, Wherein, based on the results of said analysis, said token reader (135) is further configured to provide said lock control unit (140) with the following information: said operator (400) is authorized, or The operator (400) is unauthorized. According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein, the mobile electrostatic discharge shielding transport equipment (100) also includes: A positioning device configured to: enable the mobile electrostatic discharge shielding transport device (100) to self-position, and store a positioning result as the information related to the transport device (100). According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein, the mobile electrostatic discharge shielding transport equipment (100) also includes: An output element (160) coupled to the storage volume (120) and configured to automatically output at least one component carrier ( 110) and/or at least one component carrier preform. According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Therein, the storage volume (120) comprises a plurality of grooves for storing a plurality of component carriers and/or a plurality of component carrier preforms. According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein, the operator (400) is a human and/or a transport robot. According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein, the mobile electrostatic discharge shielding transport equipment (100) also includes: a display configured to provide an operator (400) with information related to the transport device (100), In particular, wherein said information relating to the transport device (100) indicates said component carriers (110) and/or component carrier preforms to be stored in said storage volume (120). According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein, the mobile electrostatic discharge shielding transport equipment (100) also includes: a mechanical lock element (180) for receiving a master key and coupled to the locking element (130), wherein the mechanical lock element (180) is configured to open when receiving the master key The locking element (130). According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein the locking control unit (140) is configured to automatically close the locking element (130) after a predetermined period of time. According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein, the mobile electrostatic discharge shielding transport equipment (100) includes: At least one movable element (170), in particular a wheel, for making said mobile electrostatic discharge shielding transport device manufactured on a component carrier Moves within the facility (500) manually or automatically. According to the mobile electrostatic discharge shielding transportation device (100) described in claim 17, Wherein said at least one movable element (170) includes an automatic locking function. According to the mobile electrostatic discharge shielding transportation device (100) described in claim 1 or 2, Wherein, the mobile electrostatic discharge shielding transportation device (100) also includes an energy storage element and an automatic charging function. A loaded mobile electrostatic discharge shielding transport device (100), comprising: The mobile electrostatic discharge shielding transport device (100) according to any one of claims 1 to 19; The component carrier (110) and/or component carrier pre-forms are loaded electrostatically shielded in the storage volume (120). The loaded mobile electrostatic discharge shielding transport device (100) according to claim 20, wherein the component carrier (110) and/or the component carrier preform comprises at least one electrically conductive layer structure (104) and/or at least one electrically insulating layer structure (102), and at least one of the following features By: The component carrier (110) comprises at least one electronic component which is surface mounted on and/or embedded in the component carrier (110), in particular , the at least one electronic component is embedded in the cavity of the component carrier (110), wherein the at least one electronic component is particularly selected from the group consisting of non-conductive and/or conductive inlays, heat transfer units, photoconductive elements, Optical components, bridges, energy harvesting units, active electronic components, passive electronic components, electronic chips, storage devices, filters, integrated circuits, signal processing components, power management components, optoelectronic interface components, voltage converters, cryptographic components, Transmitters and/or receivers, electromechanical transducers, actuators, MEMS, microprocessors, capacitors, resistors, inductors, batteries, switches, cameras, antennas, magnetics, additional component carriers and logic chip; Wherein at least one of the conductive layer structures (104) of the component carrier comprises at least one of the following: copper, aluminium, nickel, silver, gold, palladium, magnesium and tungsten, the mentioned Any of the materials of is optionally coated with a superconducting material such as graphene; Wherein, the electrical insulating layer structure (102) includes at least one of the following: resin, FR-4, FR-5, cyanate resin, polyphenylene derivative, glass, prepreg material, polyamide Imines, polyamides, liquid crystal polymers, epoxy-based laminates, polytetrafluoroethylene, ceramics and metal oxides, wherein the resins are in particular reinforced or unreinforced, such as epoxy or bismaleimide Imine-triazine resin; wherein the component carrier (110) and/or the component carrier preform is formed as a plate; Wherein, the component carrier (110) is configured as one of the following: a printed circuit board; a substrate, in particular an IC substrate; and an interposer, in particular an organic interposer; In this case, the component carrier (110) is configured as a laminate-type component carrier; Therein, the component carrier preform is configured as a panel comprising a plurality of semi-finished component carriers (110). A transport equipment system comprising: A plurality of mobile electrostatic discharge shielding transport devices (100a, 100b, 100c) according to claim 1, Wherein, the mobile electrostatic discharge shielding transport devices (100a, 100b, 100c) of the plurality of mobile electrostatic discharge shielding transport devices are configured to wirelessly communicate with each other in the wireless communication network (151) with the transport device (100) communicate relevant information. A transportation equipment organization system (200), comprising: At least one mobile electrostatic discharge shielding transporter (100) according to claim 1 and/or a transporter system according to claim 22; and A control device (210), the control device (210) comprising an additional wireless communication device (250), the additional wireless communication device (250) configured to communicate with the wireless communication device (150) and/or a plurality of The wireless communication device (150) communicates. According to the transportation equipment organization system (200) described in claim 23, Wherein, the control device (210) includes a memory, and the memory is used to store at least one piece of information related to the transportation device (100), and the information related to the transportation device (100) includes: a plurality of mobile electrostatic discharge shields Location of Transport Equipment (100), Identity of Authorized and/or Unauthorized Operators (400), Part Carriers (110) and/or Part Carrier Preforms in Part Carrier Manufacturing Facility (500) direction of transport. According to the transportation equipment organization system (200) described in claim 23 or 24, wherein said control device (210) is configured to coordinate a plurality of mobile electrostatic discharge shielding transport devices (100a-100c), and Wherein said coordination includes at least one of: coordination of authorized and unauthorized operators (400), part carrier (110) and/or part carrier preforms during part carrier manufacturing Coordination of positioning and/or transport directions in the facility (500). According to the transportation equipment organization system (200) described in claim 23 or 24, Wherein, the transportation equipment organization system (200) is connected to the Internet of Things application, In particular, wherein the IoT application includes an artificial intelligence algorithm.

Images