TWM628587U - Probe detection system - Google Patents

Abstract

The present application provides a probe detection system, comprising: a platform, an optical detector and a host. The platform is configured to host probe cards. The optical detector is aligned with the probe card on the platform and is configured to detect the probes of the probe card. The host is electrically connected with the platform and the optical detector. The host acquires the length of the probe, the level of the needle end and the position of the needle end according to the measurement result of the optical detector and/or the positioning information of the platform.

Description

Probe Detection System

The present application relates to detection systems, in particular to a probe detection system.

In recent years, with the development of electronic products toward precision and multi-functionality, the wafer structure of integrated circuits used in electronic products also tends to be more complex. In the manufacture of wafers, batch mass production is generally employed. To ensure the electrical quality of the wafers, measurements are performed before the wafers are packaged. Today, probe cards are generally used to test chips. By electrically contacting the probes of the probe card with the contact pads of the wafer, and then connecting the electrical signals to the tester through the circuit board of the probe card, the tester can transmit the test signal to the wafer or receive the output from the wafer. signal, and then achieve the effect of measuring the electrical characteristics of the wafer. The user can further remove defective wafers according to the measurement results for subsequent packaging processing.

As the interface between the tester and the wafer, the probe card must have high reliability. Therefore, in the manufacturing process of the probe card, after the probes are assembled with the circuit board, the detection and adjustment of the probes must be carried out. In the prior art, the length of the probe and the level of the needle tip are generally checked manually using an industrial microscope, and the position of the needle tip is checked with a probe card inspection instrument (eg PRVX). However, the manual inspection has errors caused by human operation, and labor-intensive inspection can only be performed by sampling. Furthermore, a probe card with an abnormal needle tip cannot be detected until the PRVX detection stage, and cannot be detected and repaired in time during the manufacturing process of the probe card.

In view of this, the present application provides a probe detection system to solve the above technical problems.

The present application provides a probe detection system, which can avoid errors caused by human operation and the problem that the abnormality of the needle tip cannot be detected in time during the manufacturing process of the probe card.

The present application provides a probe detection system, comprising: a platform configured to carry a probe card; an optical detector aligned with the probe card on the platform and configured to detect probes of the probe card; and a host, which is electrically connected to the platform and the optical detector, wherein the host acquires the length of the probe, the level of the needle end and the position of the needle end according to the measurement result of the optical detector and/or the positioning information of the platform.

In some embodiments, the optical detector comprises a white light interferometer.

In some embodiments, the platform is movable relative to the optical detector, and the movement of the platform enables the optical detector to detect the plurality of probes of the probe card.

In some embodiments, the platform includes an X-Y positioning platform.

In some embodiments, the X-Y positioning stage includes an X-axis stage and a Y-axis stage that can move perpendicular to each other.

In some embodiments, the probe card includes a carrier board and a plurality of the probes mounted on the carrier board, the host is configured to control the platform to move relative to the optical detector, and to control the optical detector to perform slave The carrier plate is scanned to a long-stroke scanning of the end of the probe, and the host acquires the length of the probe according to the result of the long-stroke scanning.

In some embodiments, the host is configured to control the optical detector to detect the distance between the optical detector and the ends of the probes of the probe card, and the host acquires the needle of the probe according to the distance end level.

In some embodiments, the host is further configured to obtain the positioning information when the optical detector is aligned with the ends of the probes of the probe card according to the movement of the platform, so as to obtain the needles of the probes end position.

Compared with the prior art, the present application improves the detection efficiency by providing a probe detection system, which can simultaneously acquire the needle length, the needle end level and the needle end position of the probe. Furthermore, the present application also avoids personnel operation errors caused by manual detection, realizes non-contact measurement and full automation of production lines, and further improves the reliability of detection data. On the other hand, through the probe detection system of the present application, the probes whose needle ends are shifted in position can be detected in advance during the manufacturing process of the probe card, which can not only be found and repaired in time, but also the probe card inspection instrument can be improved. (eg PRVX) equipment benefits.

1: Probe detection system

10: Platform

11: X-axis platform

12: Y-axis platform

20: Optical detector

30: Host

31: Processor

32: Storage

40: Probe card

41: circuit board

42: carrier board

43: Probe

FIG. 1 shows a schematic diagram of a probe detection system according to an embodiment of the present application.

Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments, however, can be embodied in various forms and should not be construed as limited to the examples set forth herein. Rather, these embodiments are provided so that this application will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The drawings are merely schematic illustrations of the present application and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus their repeated descriptions will be omitted.

Referring to FIG. 1, a schematic diagram of a probe detection system according to an embodiment of the present application is shown. The probe detection system 1 is suitable for detecting a probe card, and detecting and acquiring information of the probes of the probe card, wherein the information includes the needle length, needle end level, and needle end position of each probe, and the specific description is as follows.

As shown in FIG. 1 , the probe detection system 1 includes a stage 10 , an optical detector 20 and a host 30 . Platform 10 is configured to carry probe card 40 . The probe card 40 includes a circuit board 41 , a carrier board 42 and a plurality of probes 43 arranged in sequence. A plurality of probes 43 are vertically mounted on the carrier board 42 , and the carrier board 42 is fixed on the circuit board 41 . When the probe card 40 is placed at a fixed point on the platform 10 , the circuit board 41 of the probe card 40 is in contact with the platform 10 , and the probes 43 extend in a direction away from the platform 10 . Specifically, probe 43 includes opposing bottoms and ends, the bottom of probe 43 being relatively close to platform 10 and the end of probe 43 being relatively remote from platform 10 . In some embodiments, the width of the probe 43 gradually decreases as the probe 43 is further away from the platform 10 .

As shown in FIG. 1 , the platform 10 is a positioning platform that can move relative to the optical detector 20 . In this embodiment, the platform 10 is an X-Y positioning platform, including an X-axis platform 11 and a Y-axis platform 12 that can move vertically to each other. It should be understood that the platform 10 may also use other types of positioning platforms, but is not limited thereto.

As shown in FIG. 1 , the optical detector 20 is aligned with the probe card 40 on the platform 10 and is configured to detect the probes 43 of the probe card 40 . Specifically, the movement of the platform 10 enables the optical detector 20 to detect the plurality of probes 43 of the probe card 40 . In this embodiment, the optical detector includes a white light interferometer, but is not limited thereto. The host 30 is electrically connected to the platform 10 and the optical detector 20 . The host 30 acquires the length of the probe 43 , the level of the needle end and the position of the needle end according to the positioning information of the platform 10 and/or the measurement result of the optical detector 20 .

As shown in FIG. 1, the host 30 may include one or more of the following components: a processor 31, a storage 32, a circuit board, a power supply circuit, and the like. The processor 31 and the storage 32 are provided on the circuit board. The power supply circuit is configured to supply power to each circuit or element of the host computer 30 . The storage 32 is configured to store executable program code. The processor 31 reads the executable program codes stored in the storage 32 and executes programs corresponding to the executable program codes to perform the following probe detection operations.

When the information related to the needle length of each probe is acquired by the probe detection system 1 , the host 30 is configured to control the platform 10 to move 20 relative to the optical detector, and to control the optical detector 20 to carry out loading and unloading. The plate 42 is scanned to a long stroke scan of the end of each probe 43 for a complete inspection in one pass. The host 30 obtains the length of each probe 43 according to the result of the long stroke scan.

When the information related to the needle end level of each probe is acquired by the probe detection system 1 , the host 30 is configured to control the platform 10 to move 20 relative to the optical detector, and to control the optical detector 20 to detect the level of the optical detector 20 . The distance between the probe head and the ends of the plurality of probes 43 of the probe card 40 . The host 30 obtains the horizontal planes of the ends of the plurality of probes 43 according to the distance, and further obtains the needle end levels of the probes 43 . In some embodiments, when the length of each probe 43 is obtained in advance, the Z axis of the optical detector moving 20 can be moved to the focus point through the length of the probe 43 to perform short stroke scanning (eg 50um). Therefore, compared with the contact measurement in the prior art, the present application can greatly shorten the detection time.

The host 30 is configured to control the platform 10 to move 20 relative to the optical detector when the information related to the position of the needle end of each probe is acquired by the probe detection system 1 . According to the movement of the platform 10 , the host 30 obtains the positioning information when the optical detector 20 is aligned with the ends of the plurality of probes 43 of the probe card 40 , so as to obtain the needle end position of each probe 43 . That is to say, when the needle end level of the probe 43 is acquired, the needle end position of the probe 43 can be obtained at the same time, thereby achieving the benefit of simultaneously detecting the needle end level and the needle end position of the probe 43 .

In this embodiment, the processor 31 is generally configured to control the overall operation of the host 30 . The processor may include one or more processors to execute instructions to perform actions in all or some of the steps in the operation of the probe detection system described above. Additionally, processor 31 may include one or more modules that facilitate interaction between processor 31 and other components. For example, the processor may include a communication module to facilitate interaction between the communication components and the processor 31 . The storage 32 is configured to store various types of data to support the operation of the host 30 . Examples of such material include instructions for any application or method operating on host 30 . Storage 32 may be implemented using any type of volatile or non-volatile storage device or combination thereof. The power circuit supplies power to various components of the host computer 30 . The power circuit may include a power management system, one or more electrical source, and any other components associated with the generation, management, and distribution of power to host 30 . In an exemplary embodiment, the host 30 may be implemented by an independent terminal device or an electronic component such as a controller, a microcontroller and the like integrated in the optical detector.

To sum up, the present application improves the detection efficiency by providing a probe detection system, which can simultaneously acquire the needle length, the needle end level and the needle end position of the probe. Furthermore, the present application also avoids personnel operation errors caused by manual detection, realizes non-contact measurement and full automation of production lines, and further improves the reliability of detection data. On the other hand, through the probe detection system of the present application, the probes whose needle ends are shifted in position can be detected in advance during the manufacturing process of the probe card, which can not only be found and repaired in time, but also the probe card inspection instrument can be improved. (eg PRVX) equipment benefits.

The above are only specific embodiments of the present application, but the protection scope of the present application is not limited to this. Any person with ordinary knowledge in the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should cover within the scope of protection of this application. Therefore, the protection scope of the present application shall be subject to the protection scope of the application patent scope.

1: Probe detection system

10: Platform

11: X-axis platform

12: Y-axis platform

20: Optical detector

30: Host

31: Processor

32: Storage

40: Probe card

41: circuit board

42: carrier board

43: Probe

Claims (8)

A probe detection system, comprising: a platform configured to carry a probe card; an optical detector aligned with the probe card on the platform and configured to detect probes of the probe card; and a host, It is electrically connected with the platform and the optical detector, wherein the host acquires the length of the probe, the level of the needle end and the position of the needle end according to the measurement result of the optical detector and/or the positioning information of the platform. The probe detection system of claim 1, wherein the optical detector comprises a white light interferometer. The probe detection system of claim 1, wherein the platform is movable relative to the optical detector, and the optical detector detects the plurality of probes of the probe card by the movement of the platform. The probe detection system of claim 3, wherein the platform comprises an X-Y positioning platform. The probe detection system according to claim 4, wherein the X-Y positioning platform comprises an X-axis platform and a Y-axis platform that can move vertically to each other. The probe detection system of claim 1, wherein the probe card includes a carrier board and a plurality of the probes mounted on the carrier board, the host is configured to control the platform to move relative to the optical detector, and The optical detector is controlled to perform a long-stroke scan from the carrier plate to the end of the probe, and the host acquires the length of the probe according to the result of the long-stroke scan. The probe detection system of claim 1, wherein the host is configured to control the optical detector to detect the distance between the optical detector and the ends of the probes of the probe card, and the host determines the distance according to the distance Obtain the tip level of the probe. The probe detection system according to claim 1, wherein the host is further configured to acquire the positioning information when the optical detector is aligned with the ends of the probes of the probe card according to the movement of the platform, so as to Obtain the needle end position of the probe.

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