TWM627209U - Photonic crystal surface-emitting laser device and optical system - Google Patents

Abstract

The present disclosure provides a photonic crystal surface-emitting laser device including a substrate, a light emitting layer on a surface of the substrate for generating photons driven by a driving signal, a photonic crystal layer on a side of the light emitting layer away from the substrate, and a metasurface on a side of the substrate away from the photonic crystal layer. The photons incident into the photonic crystal layer to generate laser light through a vibration on Bragg diffraction. The metasurface includes a substrate and a plurality of pillars on a surface of the substrate. At least two of the plurality of cylinders have different shapes or/and sizes. The shapes and the sizes of the plurality of cylinders are used to control an emission angle of the laser. The present disclosure also provides an optical system.

Description

Photonic crystal surface-emitting laser device and optical system

The present application relates to the technical field of laser detection, and in particular, to a photonic crystal surface-emitting laser device and an optical system.

Photonic Crystal Surface-Emitting Laser (PCSEL) devices have the advantages of good beam quality, small size, low energy consumption, easy integration, and high reliability, and are widely used in scanning LiDAR systems. .

The conventional LiDAR usually needs to be equipped with a motorized spinning scanner or a MEMS scanner to realize the scanning of the laser beam. However, structures such as mechanical motor rotation scanning or MEMS scanning are not conducive to controlling the volume of the LiDAR. The photonic crystal surface emitting laser device in LiDAR includes a diffraction grating to control the emission angle of the laser. However, the traditional diffraction grating includes a plurality of diffraction units with the same structure that are repeated periodically, and the emission angle of the laser beam is controlled in a single way. The emission angle range is limited by the factors of the grating process, and the high-order diffraction effect cannot be eliminated. Complex laser spots with symmetrical distribution are generated, which is not conducive to beam scanning.

Therefore, conventional PCSELs are in urgent need of improvement.

A first aspect of the present application provides a photonic crystal surface-emitting laser device, comprising: a substrate; a light-emitting layer, located on a surface of the substrate, for generating photons driven by a driving signal; a photonic crystal layer, located on the light-emitting layer A side away from the substrate, when the photon is incident on the photonic crystal layer, Bragg diffraction oscillation is generated in the photonic crystal layer to generate a laser; and a meta interface is located on the substrate away from the photon On one side of the crystal layer, the meta interface includes a substrate and a plurality of pillars formed at intervals on a surface of the substrate, at least two of the pillars Different in shape or/and size, the meta interface is used for receiving the laser, diffracting the laser and then emitting.

Optionally, the distances between adjacent columns in the plurality of columns are equal; or the distances between adjacent columns in the plurality of columns are not all equal.

Optionally, the meta-interface includes a plurality of diffraction units, and each diffraction unit includes one of the plurality of cylinders or a plurality of cylinders; the shape of each of the cylinders in each of the diffraction units or / and size are different.

Optionally, a first transparent conductive layer is further included; the first transparent conductive layer covers the surface of the substrate on which the plurality of pillars are formed and fills part of the space between the plurality of pillars.

Optionally, the photonic crystal layer includes a first photonic crystal region and a second photonic crystal region surrounding the first photonic crystal region; Bragg diffraction oscillations are generated, and the second photonic crystal region is used to reflect the received photons to the first photonic crystal region.

Optionally, the orthographic projection of the first photonic crystal region on the substrate is a rectangle, and the orthographic projection of the second photonic crystal region on the substrate is a rectangular frame surrounding the rectangle; or the first The orthographic projection of a photonic crystal region on the substrate is a hexagon, and the orthographic projection of the second photonic region on the substrate is a hexagonal frame surrounding the hexagon; or the first The orthographic projection of the photonic crystal region on the substrate is a circle, and the orthographic projection of the second photonic region on the substrate is an annular shape surrounding the circle.

Optionally, the first photonic crystal region is provided with a plurality of first through holes, the second photonic crystal region is provided with a plurality of second through holes, and the plurality of first through holes and the plurality of second through holes have the same size. different.

Optionally, the material of the meta interface is the same as that of the substrate.

Optionally, a second transparent conductive layer is further included, the second transparent conductive layer is located on the surface of the photonic crystal layer away from the substrate, and is used for current diffusion.

A second aspect of the present application provides an optical system, comprising: a plurality of photonic crystal surface-emitting laser devices, each of the photonic crystal surface-emitting laser devices as described above; and The control device is electrically connected with the complex photonic crystal surface-emitting laser device, and is used for outputting a driving signal to control the complex photonic crystal surface-emitting laser device to be turned on or off.

The above-mentioned photonic crystal surface-emitting laser device and optical system include a meta interface, and the meta interface includes a base formed on a surface of the base and a plurality of cylinders arranged at intervals, and the shapes of at least two of the cylinders or/and Different sizes, the meta interface is used for receiving the laser, diffracting the laser and then emitting. By setting the shape, size and quantity of the plurality of cylinders, the expected exit angle of the laser can be obtained, so that the Control the number and size of the spot formed by the laser. That is, the photonic crystal surface-emitting laser device and optical system of the present embodiment can not only realize the deflection of the laser, but also realize the shaping of the laser through the meta-interface, which is beneficial to realize the diversification of the laser. control.

100: Optical System

1: Photonic crystal surface-emitting laser device

10: Substrate

11: Buffer layer

12: The first cladding layer

13: Light-emitting layer

131: Quantum Well Light Emitting Layer

132: Energy barrier layer

14: Photonic crystal layer

141: Ohmic contact layer

142: Second cladding layer

143: The first photonic crystal region

144: Second photonic crystal region

145: first through hole

146: second through hole

S: light-emitting area

15: Meta Interface

150: Diffraction unit

151: Base

152: Cylinder

153: first dielectric layer

154: Second dielectric layer

161: the first transparent conductive layer

162: the second transparent conductive layer

171: First electrode

172: Second electrode

18: Insulation layer

2: Control device

200: flip chip substrate

FIG. 1 is a schematic structural diagram of a module of an optical system in an embodiment of the present application.

FIG. 2 is a schematic plan view of the photonic crystal surface-emitting laser device in FIG. 1 .

FIG. 3 is a schematic cross-sectional structure diagram of the photonic crystal surface-emitting laser device in FIG. 2 along the line III-III.

FIG. 4 is a schematic plan view of the photonic crystal layer in FIG. 3 .

FIG. 5 is a schematic plan view of a photonic crystal layer of a photonic crystal surface-emitting laser device according to a modified embodiment of the present application.

FIG. 6 is a schematic three-dimensional structure diagram of the Meta interface in FIG. 3 .

FIG. 7 is a schematic three-dimensional structural diagram of a diffraction unit in different meta-interfaces according to other embodiments of the present application.

FIG. 8 is a schematic diagram of the exit angle distribution of the laser after being diffracted by the diffractive unit in FIG. 7 .

FIG. 9 is a schematic three-dimensional structure diagram of a pillar in a meta interface according to another embodiment of the present application.

Please refer to FIG. 1 , the optical system 100 of the present application includes a complex photonic crystal surface-emitting laser device 1 . The optical system 100 can be a face recognition sensing device, a laser radar, etc., which can be applied to various consumer electronics such as smart phones, augmented reality (AR) glasses, and virtual reality (VR) glasses. The device can also be applied to automobiles, households or medical equipment, as well as unmanned vehicles used in smart chemical factories and automated warehousing. Photonic crystal surface-emitting laser device 1 is applied to the above-mentioned various optical systems 100 is used for emitting a laser according to the driving signal, so that the optical system 100 realizes functions such as three-dimensional image sensing and flight ranging.

The optical system 100 further includes a control device 2 electrically connected to each photonic crystal surface-emitting laser device 1 , and the control device 2 is used for outputting driving signals to each photonic crystal surface-emitting laser device 1 . In this embodiment, the control device 2 may be a chip, a chip set, a control motherboard, or the like. The plurality of photonic crystal surface-emitting laser devices 1 are arranged in a laser emitting array, and each photonic crystal surface-emitting laser device 1 is independently controlled by the control device 2 to be in an on state or an off state. Each photonic crystal surface-emitting laser device 1 emits a laser when it is in an on state, and does not emit a laser when it is in an off state. In the laser emitting array, at least two photonic crystal surface-emitting laser devices 1 emit lasers in different directions.

During a working period, the control device 2 controls one or more photonic crystal surface-emitting laser devices 1 to turn on according to the direction, distance, size, etc. of the object to be detected. By changing the working state (on or off) of each photonic crystal surface-emitting laser device 1 in different working periods, the direction and shape of the laser emitted by the laser emitting array in different working periods can be changed.

Please refer to FIG. 2 and FIG. 3 together. The photonic crystal surface emitting laser device 1 includes a substrate 10 , a buffer layer 11 , a first cladding layer 12 , a light emitting layer 13 and a photonic crystal layer 14 that are stacked in sequence.

The substrate 10 is an insulating substrate for carrying and growing the buffer layer 11 , the first cladding layer 12 , the light-emitting layer 13 and the photonic crystal layer 14 . The material of the substrate 10 may be n-type gallium arsenide. In the present application, the material of the buffer layer 11 can be n-type gallium arsenide.

The light-emitting layer 13 includes a plurality of quantum well light-emitting layers 131 and a plurality of energy barrier layers 132 . The plurality of quantum well light-emitting layers 131 and the plurality of energy barrier layers 132 are stacked alternately. That is, the quantum well light-emitting layers 131 and the energy barrier layers 132 are alternately arranged. In some embodiments of the present application, the light-emitting layer 13 includes three to five quantum well light-emitting layers 131 and four to six energy barrier layers 132 that are alternately stacked. In this embodiment, the light-emitting layer 13 includes three quantum well light-emitting layers 131 and four energy barrier layers 132 that are alternately stacked. The material of each quantum well light-emitting layer 131 is indium gallium arsenide, and the material of each energy barrier layer 132 is gallium arsenide. In other embodiments, the quantum well light-emitting layer 131 can also be AlGaAs or InGaAsP, and the energy barrier layer 132 can also be AlGaAs or AlGaInAs.

The light-emitting layer 13 is used for generating photons under the driving of the driving signal. The photons generated by the light-emitting layer 13 propagate around, and the photons propagated to the photonic crystal layer 14 generate Bragg diffraction oscillation in the photonic crystal layer 14 until the photonic crystal surface-emitting laser device 1 reaches a state of gain and loss balance, generating laser. In this embodiment, the wavelength of the laser emitted by the photonic crystal surface-emitting laser device 1 is 905 to 1550 nm (including the end value).

The photonic crystal layer 14 includes a stacked ohmic contact layer 141 and a second cladding layer 142 . The second cladding layer 142 is located between the ohmic contact layer 141 and the light-emitting layer 13 . In this embodiment, the material of the ohmic contact layer 141 is p-type gallium arsenide. In other embodiments, the ohmic contact layer 141 may also be indium phosphide or indium gallium arsenide phosphide.

In this embodiment, the material of the first cladding layer 12 is n-type AlGaAs, and the material of the second cladding layer 142 is p-type AlGaAs. The first cladding layer 12 and the second cladding layer 142 are used for cooperating and locking the photons emitted by the light-emitting layer 13 to reduce the propagation of the photons toward the photonic crystal layer 14 . In other embodiments, the material of the first cladding layer 12 and the second cladding layer 142 may also be AlInAs, InP or GaAs.

Referring to FIG. 4 , the photonic crystal layer 14 includes a first photonic crystal region 143 and a second photonic crystal region 144 surrounding the periphery of the first photonic crystal region 143 . When the photons are incident on the first photonic crystal region 143 , Bragg diffraction oscillation is generated in the first photonic crystal region 143 to generate laser light. The second photonic crystal region 144 is used to reflect the received photons to the first photonic crystal region 143 , so as to reduce photon loss, which is beneficial to improve the luminous efficiency of the photonic crystal surface-emitting laser device 1 .

The first photonic crystal region 143 defines a plurality of first through holes 145 arranged at intervals, and the second photonic crystal region 144 defines a plurality of second through holes 146 arranged at intervals. Each first through hole 145 penetrates through the ohmic contact layer 141 and the second cladding layer 142 , and each second through hole 146 penetrates through the ohmic contact layer 141 and the second cladding layer 142 . The plurality of first through holes 145 and the plurality of second through holes 146 are both circular through holes. Each of the first through holes 145 has the same diameter, and each of the second through holes 146 has the same diameter. The diameter of the first through hole 145 is larger than the diameter of the second through hole 146 , and the energy position of a selected mode on the inverse space Γ point of the first photonic crystal region 143 is not aligned with the energy position of the same mode of the second photonic crystal region 144 , so the resonance wavelength of the first photonic crystal region 143 can fall within the energy gap of the second photonic crystal region 144, so that the second photonic crystal region 144 can be used as a mirror in the horizontal direction to reflect the photons to the first photon The crystal region 143 generates laser light by oscillating in the first photonic crystal region 143 . In other embodiments, the first through holes 145 and the second through holes 146 may also be oval, triangular, quadrangular, "L" shaped, "V" shaped, double holes, etc. 145. The shape of the second through hole 146 is the shape of the opening of the first through hole 145 and the second through hole 146 on the photonic crystal layer 14).

A region where the photonic crystal surface-emitting laser device 1 can emit laser light is defined as the light-emitting region S. In this embodiment, the region where the first photonic crystal region 143 is located is the light emitting region S.

In the first aspect, the smaller the area occupied by the first photonic crystal region 143 is, the smaller the driving signal threshold is, that is, the smaller the current threshold required to drive the photonic crystal surface-emitting laser device 1 to emit laser, the smaller the current threshold is. The smaller the current threshold value, the shorter the time required to reach the current threshold value, which is beneficial to improve the operation speed of the photonic crystal surface-emitting laser device 1 .

In the second aspect, the smaller the area occupied by the first photonic crystal region 143 is, the smaller the light emitting area of the photonic crystal surface-emitting laser device 1 is. The smaller the light-emitting area of a single photonic crystal surface-emitting laser device 1 is, the greater the number of photonic crystal surface-emitting laser devices 1 that can be accommodated by a laser emitting array of the same area. The more the number of photonic crystal surface emitting laser devices 1 in the laser emitting array, the more diverse the directions and shapes of the lasers emitted by the laser emitting array.

Therefore, in this embodiment, by setting the photonic crystal layer 14 to include the first photonic crystal region 143 and the second photonic crystal region 144, the first photonic crystal region 143 emits laser light, which is beneficial to reduce the size of the photonic crystal surface-emitting laser The area of the light-emitting region S of the device 1 is beneficial to improve the operating speed of the photonic crystal surface-emitting laser device 1, and is conducive to making the laser emitted by the laser emission array applied in the photonic crystal surface-emitting laser device 1. The direction and shape of the shot are more diverse.

It can be seen from FIG. 4 that the first photonic crystal region 143 in this embodiment is a rectangle, and the second photonic crystal region 144 is a rectangular frame surrounding the first photonic crystal region 143 . Please refer to FIG. 5 , in a modified embodiment of the present application, the planar structure of the first photonic crystal region 143 is a hexagon, and the planar structure of the second photonic crystal region 144 is a hexagon surrounding the first photonic crystal region 143 frame. In other embodiments, the first photonic crystal region 143 may also be circular, and the second photonic crystal region 144 may be corresponding to a circular shape (the shape of the first photonic crystal region 143 and the second photonic crystal region 144 described in this application). are the orthographic shapes of the first photonic crystal region 143 and the second photonic crystal region 144 on the substrate 10).

The shape of the first photonic crystal region 143 depends on the lattice type of the photonic crystal material in the photonic crystal layer 14 . For example, when the lattice type of the photonic crystal material is triangular lattice or honeycomb lattice, the first photonic crystal region 143 is hexagonal; when the lattice type of the photonic crystal material is square lattice, the first photonic crystal region 143 is Quadrilateral (or rectangle).

Please continue to refer to FIG. 3 . In this embodiment, the photonic crystal surface-emitting laser device 1 further includes a meta interface 15 . The meta interface 15 is located on the surface of the substrate 10 away from the photonic crystal layer 14 . The laser generated by the photonic crystal layer 14 is diffracted by the meta interface 15 and then exits from a side of the meta interface 15 away from the photonic crystal layer 14 .

The photonic crystal layer 14 is disposed opposite to the meta interface 15 . That is, the orthographic projection of the photonic crystal layer 14 on the light-emitting layer 13 at least partially coincides with the orthographic projection of the meta interface 15 on the light-emitting layer 13 . In this embodiment, the orthographic projection of the photonic crystal layer 14 on the light-emitting layer 13 and the meta-interface 15 on the light-emitting layer 13 The orthographic projections above are completely coincident. In other embodiments, the orthographic projection of the meta interface 15 on the light-emitting layer 13 may completely cover the orthographic projection of the photonic crystal layer 14 on the light-emitting layer 13 . In this way, the laser generated by the photonic crystal layer 14 can be incident on the meta interface 15 as much as possible, and the utilization rate of the laser can be improved.

Please also refer to FIG. 6 , the meta interface 15 includes a base 151 and a plurality of spaced pillars 152 protruding from a surface of the base 151 (the structure of the pillars 152 in the plan view of FIG. 2 is only an example, the pillars 152 Please refer to Figure 6 for the specific structure). The surface of the base 151 opposite to the surface on which the pillars 152 are formed is in direct contact with the surface of the substrate 10 . The base 151 and the cylinder 152 are made of the same material, and the base 151 and the cylinder 152 are integrally formed. Each of the pillars 152 is formed by etching a base material including the base 151 . In this embodiment, the material of the meta interface 15 is the same as that of the substrate 10 .

Each column 152 is a cylinder. In some embodiments, the distance between each column 152 is the same, that is, the distance between every two adjacent columns 152 is the same. In other embodiments, the distance between two adjacent pillars 152 is not all the same. That is, the distances between some adjacent columns 152 are different, and the distances between some adjacent columns 152 are the same; or the distances between adjacent columns 152 are all different. In still other embodiments, the diameters and/or heights of the various pillars 152 are different. The plurality of pillars 152 on the substrate 151 are divided into a plurality of diffraction units 150 , and each diffraction unit 150 includes a plurality of adjacently arranged pillars 152 . Each diffraction unit 150 is used to diffract the received laser.

Figures (a)-(c) in FIG. 7 show the structures of several different diffraction units 150 in other embodiments of the present application, and FIG. 8 shows the laser after being diffracted by the various diffraction units 150 in FIG. 7 . The outgoing direction (or the outgoing angle, in which the direction perpendicular to the meta interface 15 is taken as the 0° direction). It can be seen that, by changing the size (including diameter, height, etc.), shape and quantity of each cylinder in each diffractive unit 150, the exit direction of the laser beam diffracted and exited by the meta interface 15 can be changed.

Further, since the meta-interface 15 can change the exiting direction of the laser, when the meta-interface 15 controls the laser to concentrate in a certain direction, it is equivalent to forming a convergence effect on the laser. The converging effect of the interface 15 on the laser can make the laser finally emitted by the meta-interface 15 form a single light spot or a plurality of light spots. According to the degree of convergence of the laser, the size of the formed light spot can also be controlled. Therefore, the meta-interface 15 of this embodiment can also change the size (including diameter, height, etc.), shape, and quantity of each column in each diffraction unit 150 , so as to change the number of light spots and the light spots formed by the laser. size etc.

In other embodiments, each column 152 can be a column of other shapes. For example, the elliptical cylinder shown in Fig. 9(a), the quadrangular prism shown in Fig. 9(b), and Fig. 9(c) and (d) The triangular prism shown in the figure, the "L"-shaped cylinder shown in Fig. 9(e), the "V"-shaped cylinder shown in Fig. 9(f), the "cross"-shaped cylinder or the C"-shaped column etc. (the shape of the column body 152 in this application is the shape of the orthographic projection of the column body 152 on the base 151).

In this embodiment, the photonic crystal surface-emitting laser device 1 is a flip-chip structure. After the buffer layer 11 , the first cladding layer 12 , the light emitting layer 13 and the photonic crystal layer 14 are grown on one surface of the substrate 10 , the surface is inverted. In the photonic crystal surface emitting laser device 1 , the photonic crystal surface emitting laser device 1 is supported on a flip chip substrate 200 , and a meta interface 15 is formed on the other opposite surface of the substrate 10 . In this embodiment, the substrate 10 is thinned first, and then the meta interface 15 is formed. In some embodiments, the thickness of the substrate 10 after the thinning process is 10% to 90% of that before the thinning process, preferably 20% to 70%. Thinning the substrate 10 is beneficial to maintain heat dissipation. In addition, the laser needs to pass through the substrate 10 before being emitted. Thinning the substrate 10 is also beneficial to reduce the absorption of the laser by the substrate 10 and reduce the loss of the laser.

Please refer to FIG. 3 again. In this embodiment, the photonic crystal surface-emitting laser device 1 further includes a first transparent conductive layer 161 and a second transparent conductive layer 162 . The first transparent conductive layer 161 is located on the surface of the meta interface 15 away from the photonic crystal layer 14 , and the second transparent conductive layer 162 is located on the surface of the photonic crystal layer 14 away from the substrate 10 . Both the first transparent conductive layer 161 and the second transparent conductive layer 162 are indium tin oxide (ITO). The first transparent conductive layer 161 and the second transparent conductive layer 162 are used to diffuse current, so that the current distribution is more uniform.

In this embodiment, the first transparent conductive layer 161 covers the surface of the substrate 151 on which the pillars 152 are formed and fills the spaces between the pillars 152 in the meta interface 15 . The thickness of the first transparent conductive layer 161 is smaller than the height of each column 152 , that is, the space between each column 152 is not completely filled by the first transparent conductive layer 161 .

Therefore, when the laser is incident from the photonic crystal layer 14 into the meta interface 15, it needs to pass through two dielectric layers with different refractive indices successively. In this embodiment, two dielectric layers with different refractive indices are defined as a first dielectric layer 153 and a second dielectric layer 154 . The first dielectric layer 153 is a dielectric layer composed of each of the pillars 152 and the first transparent conductive layer 161 . The laser has a first deflection angle α1 after passing through the first dielectric layer 153 . The second dielectric layer 154 is a dielectric layer composed of each of the pillars 152 and air, and the laser has a second deflection angle α2 after passing through the second dielectric layer 154 . It can be seen from this that the laser has undergone two angular deflections after passing through two dielectric layers with different refractive indices, and the final angle of the laser emitted by the photonic crystal surface emitting laser device 1 is the sum of the two angular deflections, which is α1 +α2.

Therefore, by disposing the first transparent conductive layer 161, and the first transparent conductive layer 161 partially fills the space between the columns 152, it is beneficial to increase the deflection angle of the laser finally emitted by the photonic crystal surface emitting laser device 1 , so that the final outgoing laser has a larger deflection angle range. Furthermore, when the photonic crystal surface emitting laser device 1 is applied to the optical system 100, the optical system 100 has a larger detection range.

In this embodiment, the photonic crystal surface-emitting laser device 1 further includes a first electrode 171 and a second electrode 172 . The first electrode 171 is located on the side of the substrate 10 away from the photonic crystal layer 14 and is in electrical contact with the first transparent conductive layer 161, and the second electrode 172 is located on the surface of the second transparent conductive layer 162 away from the photonic crystal layer 14, and is in contact with the second transparent conductive layer 14. Layer 162 makes electrical contact. The first electrode 171 and the second electrode 172 are used for electrical connection with the control device 2 to receive the driving signal. The first electrode 171 and the second electrode 172 are metals, such as titanium (Ti), germanium (Ge), nickel (Ni), gold (Au) or platinum (Pt) and alloys thereof. In this embodiment, the first electrode 171 is an n-type electrode, and the second electrode 172 is a p-type electrode.

When a driving signal is applied to the first electrode 171 and the second electrode 172 respectively (the magnitude of the driving signal applied to the first electrode 171 and the second electrode 172 is different), the driving current is passed from the photonic crystal layer 14 to one side of the transparent substrate 10 . injection. The light-emitting layer 13 generates photons under the driving of the driving current. When the photons generated by the light-emitting layer 13 propagate to the photonic crystal layer 14, Bragg diffraction oscillations are generated in the photonic crystal layer 14, until the photonic crystal surface-emitting laser device 1 reaches the gain and loss balance, and the laser is generated. The meta-interface 15 in the meta-interface 15 is diffracted by the meta-interface 15 with a specific structure, and then emitted by the meta-interface 15 in a specific shape and a specific angle.

In this embodiment, the photonic crystal surface-emitting laser device 1 further includes an insulating layer 18 . The insulating layer 18 may be silicon nitride (SiN _x ), silicon dioxide (SiO ₂ ) or polymethyl methacrylate (PMMA). The insulating layer 18 is located between the substrate 10 and the first electrode 171 and between the second electrode 172 and the photonic crystal layer 14 . The insulating layer 18 is mainly disposed on the periphery of the first electrode 171 , the second electrode 172 , the substrate 10 and the photonic crystal layer 14 , and protects the materials of each layer in the photonic crystal surface-emitting laser device 1 .

The photonic crystal surface-emitting laser device 1 and the optical system 100 of the present embodiment include the meta interface 15 . The meta interface includes a substrate 151 and a plurality of pillars 152 formed at intervals on a surface of the substrate 151 , at least two pillars. The shapes and/or sizes of the bodies 152 are different. The meta interface 15 is used for receiving lasers, diffracting the lasers and then emitting them. By setting the shape, size and quantity of the plurality of cylinders 152, the expected output of the lasers can be obtained. angle, so as to control the number and size of light spots formed by the laser. that is, The photonic crystal surface-emitting laser device 1 and the optical system 100 of the present embodiment can not only deflect the laser, but also realize the shaping of the laser through the meta interface 15, which is beneficial to realize the diversification of the laser. control.

Those of ordinary skill in the art should realize that the above embodiments are only used to illustrate the present invention, but not to limit the present invention, as long as the above embodiments are appropriate within the spirit and scope of the present invention Changes and changes all fall within the scope of the claimed protection of this new model.

1: Photonic crystal surface-emitting laser device

10: Substrate

11: Buffer layer

12: The first cladding layer

13: Light-emitting layer

131: Quantum Well Light Emitting Layer

132: Energy barrier layer

14: Photonic crystal layer

141: Ohmic contact layer

142: Second cladding layer

15: Meta Interface

151: Base

152: Cylinder

153: first dielectric layer

154: Second dielectric layer

161: the first transparent conductive layer

162: the second transparent conductive layer

171: First electrode

172: Second electrode

18: Insulation layer

200: flip chip substrate

S: light-emitting area

Claims (10)

A photonic crystal surface-emitting laser device, which is improved by comprising: a substrate; a light-emitting layer, located on a surface of the substrate, for generating photons under the driving of a driving signal; a photonic crystal layer, located on the light-emitting layer away from all On one side of the substrate, when the photon is incident on the photonic crystal layer, Bragg diffraction oscillation is generated in the photonic crystal layer to generate a laser; and a meta interface is located on the substrate away from the photonic crystal layer On one side, the meta interface includes a base and a plurality of pillars formed at intervals on a surface of the base, at least two of the pillars are different in shape or/and size, and the meta interface is used for The laser is received, diffracted and then emitted. The photonic crystal surface-emitting laser device according to claim 1, wherein the distance between each adjacent column in the plurality of columns is equal; or the distance between adjacent columns in the plurality of columns is not all equal . The photonic crystal surface-emitting laser device according to claim 1, wherein the meta-interface comprises a plurality of diffraction units, and each diffraction unit comprises one or a plurality of the plurality of cylinders; each The shape or/and size of each of the cylinders in the diffraction unit is different. The photonic crystal surface-emitting laser device according to claim 1, further comprising a first transparent conductive layer; the first transparent conductive layer covers the surface of the substrate on which the plurality of pillars are formed and fills the Partial space between plural cylinders. The photonic crystal surface-emitting laser device according to claim 1, wherein the photonic crystal layer comprises a first photonic crystal region and a second photonic crystal region surrounding the first photonic crystal region; When the photons are incident on the photonic crystal layer, Bragg diffraction oscillation is generated in the first photonic crystal region, and the second photonic crystal region is used for reflecting the received photons to the first photonic crystal region. The photonic crystal surface-emitting laser device of claim 5, wherein the orthographic projection of the first photonic crystal region on the substrate is a rectangle, and the second photonic crystal region is on the substrate The orthographic projection is a rectangular frame surrounding the rectangle; or the orthographic projection of the first photonic crystal region on the substrate is a hexagon, and the orthographic projection of the second photonic crystal region on the substrate is a surrounding The hexagonal frame of the hexagon; or the orthographic projection of the first photonic crystal region on the substrate is a circle, and the orthographic projection of the second photonic crystal region on the substrate is around the The circular torus. The photonic crystal surface-emitting laser device according to claim 5, wherein a plurality of first through holes are formed in the first photonic crystal region, a plurality of second through holes are formed in the second photonic crystal region, and the The plurality of first through holes and the plurality of second through holes have different sizes. The photonic crystal surface-emitting laser device according to claim 1, wherein the material of the meta interface is the same as that of the substrate. The photonic crystal surface-emitting laser device according to any one of claims 1 to 4, further comprising a second transparent conductive layer, the second transparent conductive layer is located on the surface of the photonic crystal layer away from the substrate , for the diffusion current. An optical system, which is improved by comprising: a plurality of photonic crystal surface-emitting laser devices according to any one of claims 1 to 9; and a control device electrically connected to the plurality of photonic crystal surface-emitting laser devices , which is used for outputting a driving signal to control the complex photonic crystal surface-emitting laser device to be turned on or off.

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