TWM614280U - Gas detection system - Google Patents

Abstract

The present invention relates to a gas detection system, comprising: a first air inlet for inputting a gas to be measured; a second air inlet for inputting a clean gas; at least two separation modules for separating the gas to be measured At least one target gas and at least one non-target gas, each of the separation modules can selectively communicate with one of the first and second air inlets to switch between a separation mode and a cleaning mode; The detection unit includes a detection chamber and a detection module. The detection chamber can selectively communicate with one of the separation modules for inputting the at least one target gas. The detection module can detect the inside of the detection chamber. The at least one target gas generates a detection signal; and a processing unit communicates with the detection unit, receives the detection signal and obtains a detection result data according to it.

Description

Gas detection system

This creation is related to detection systems, especially a gas detection system.

Volatile Organic Compounds (VOCs) are obviously harmful to the human body. When their concentration is too high, they can easily cause headaches and nausea. In severe cases, they can even cause people to coma and damage body organs. For example, in semiconductor processing equipment, most of the heat exchange system is used to control the environmental conditions of the process. The heat transfer fluid used as the cold and heat exchange medium in the heat exchange system is prone to generate volatile gases. Generally, the filter used in clean rooms does not have a good filtering effect on the low carbon number species in the volatile gas, so it is necessary to monitor its concentration to avoid harm.

However, the conventional monitoring method can only detect the total content of all gas molecules, and cannot separate the high-carbon number species and the low-carbon number species in the volatile gas, so that the detection accuracy of the low-carbon number species is not good. Moreover, to further separate the low-carbon number species, a complicated and time-consuming separation method is usually required, which reduces the detection efficiency and is not conducive to real-time monitoring.

Therefore, it is necessary to provide a novel and progressive gas detection system and detection method to solve the above-mentioned problems.

The main purpose of this creation is to provide a gas detection system that can separate target gas with high detection efficiency and accuracy.

In order to achieve the above-mentioned objective, this invention provides a gas detection system, which includes: a first gas inlet for inputting a gas to be measured; a second gas inlet for inputting a clean gas; at least two separation modules for inputting Separate at least one target gas and at least one non-target gas in the gas to be measured, each of the separation modules can be selectively communicated with one of the first and second air inlets to switch between a separation mode and a cleaning Between modes; a detection unit, including a detection chamber and a detection module, the detection chamber can be selectively connected with one of the separation modules and for inputting the at least one target gas, the detection module can detect The at least one target gas in the detection chamber generates a detection signal; and a processing unit communicates with the detection unit, receives the detection signal and obtains a detection result data according to it; wherein, when the at least two separation modules are When one of the at least two separation modules communicates with the first air inlet and is in the separation mode, the other of the at least two separation modules communicates with the second air inlet and is in the cleaning mode and is not in communication with the detection chamber. The separation module of the separation mode is used for retaining the at least one non-target gas and communicating with the detection chamber.

The following examples are only used to illustrate the possible implementation of this creation, but they are not intended to limit the scope of the creation to be protected, and we will explain it first.

Please refer to Figures 1 to 4, which show a preferred embodiment of this creation. The gas detection system of this creation includes a first air inlet 10a, a second air inlet 10b, at least two separation modules 20, a The detection unit 30 and a processing unit 40.

The first air inlet 10a is used to input a gas to be measured; the second air inlet 10b is used to input a clean gas; the at least two separation modules 20 are used to separate at least one target gas and at least one non-toxic gas in the gas to be measured Target gas, each of the separation modules 20 can selectively communicate with one of the first and second air inlets 10a, 10b to switch between a separation mode and a cleaning mode; the detection unit 30 includes a detection A chamber 31 and a detection module 32, the detection chamber 31 can be selectively communicated with one of the separation modules 20 for inputting the at least one target gas, the detection module 32 can detect the detection chamber 31 The at least one target gas generates a detection signal; the processing unit 40 communicates with the detection unit 30 and receives the detection signal to obtain a detection result data; wherein, when one of the at least two separation modules 20 and When the first air inlet 10a is in communication and is in the separation mode, the other of the at least two separation modules 20 is in communication with the second air inlet 10b and is in the cleaning mode and is not in communication with the detection chamber 31, The separation module 20 in the separation mode is used to retain the at least one non-target gas and communicate with the detection chamber 31. Thereby, the at least two separation modules 20 can separate the at least one target gas for detection, which effectively improves the detection efficiency and accuracy.

The gas detection system further includes a first splitting module 50a and a second splitting module 50b. The first splitting module 50a can control the first and second air inlets 10a, 10b and the at least two separate modules. In the communication state of the group 20, the second splitting module 50b can control the communication state between the at least two separation modules 20 and the detection chamber 31. In this embodiment, the first splitting module 50a and the second splitting module 50b respectively include a plurality of solenoid valves 51; the processing unit 40 includes a timing control module 41, the first splitting module 50a and the second splitting module 50a The two-split module 50b is in communication with the timing control module 41 and can change the at least two separate modules 20 and the first and second air inlets 10a, 10b and the timing control module 41 according to a plurality of timing signals generated by the timing control module 41. The communication state of the detection chamber 31 enables the at least two separation modules 20 to automatically switch between the separation mode and the cleaning mode, thereby achieving the effect of continuous separation and detection.

Each separation module 20 includes at least one separation tube 21 for separating the at least one non-target gas, and each separation tube 21 can be selected according to different properties of the separation target. In this embodiment, the at least one non-target gas includes high-carbon number gas molecules, and the carbon number of each high-carbon number gas molecule is not less than 6; the at least one target gas includes low-carbon number gas molecules, such as propanol, isopropyl alcohol Propanol, etc., can effectively separate and filter to separate low-carbon number gas molecules, increasing the detection accuracy. In detail, the detection unit 30 is a photoionization detector, which can obtain the content of the at least one target gas immediately and quickly, and the detection efficiency is good; the gas detection system further includes a gas pump 60 connected to the gas pump 60 The detection chamber 31 is used to discharge the at least one target gas after detection, so that the measured gas is quickly discharged from the detection chamber 31 and the next gas detection can be performed. In other embodiments, the detection unit can also be configured as other detection devices according to the difference of the at least one target gas. For example, but not limited to, an optical analysis instrument can be used to directly measure the content of the at least one target gas without ionization.

In this embodiment, the at least two separation modules 20 include a first separation module 20a and a second separation module 20b that are not connected. When the first separation module 20a is in the separation mode, the first separation module 20a is in the separation mode. The two separation modules 20b are in this cleaning mode. In detail, in the first separation module 20a, the high-carbon number gas molecules in the gas to be measured are separated by the at least one separation tube 21 and stay in the first separation module 20a, and the low-carbon number gas Molecules cannot be separated but can pass through to enter the detection chamber 31 to achieve a separation effect; in the second separation module 20b, the clean gas (such as inert gas or clean dry air) passes through the second air inlet 10b is passed into the at least one separation pipe 21 to desorb the at least one non-target gas, and the at least one non-target gas is discharged from an exhaust port 90 through the second splitter module 50b, so as to achieve a cleaning effect for the next time The separation. After the first separation module 20a completes the separation of the gas to be measured, it enters the cleaning mode, and after the second separation module 20b completes the cleaning, it enters the separation mode, thereby alternately performing separation and cleaning, shortening the time difference Improve analysis efficiency. 4, for example, during t2 to t3, the first separation module 20a is in the separation mode, and the second separation module 20b is in the cleaning mode; during t3 to t6, the first separation module 20a is completed The separation of the gas to be measured is switched to the cleaning mode, and the second separation module 20b is switched to the separation mode during the period t4 to t5 after the cleaning is completed, and the operation is repeated alternately; if the separation time of the gas to be measured is 1 The cleaning time of each separation tube 21 is 5 minutes, and the inspection can be completed every 3 minutes by the aforementioned scheduling method. Of course, the number of the at least two separation modules can also be increased according to demand; each of the separation modules can also include multiple separation tubes to increase the separation effect; the aforementioned time schedule can also be based on the separation time of the gas and each separation tube The cleaning time cooperates with each other to change the detection frequency.

The gas detection system further includes an operation display interface 80 for external operation. The operation display interface 80 communicates with the processing unit 40 and can display the detection result data. The detection result data can be, for example, but not limited to, a numerical value related to the content of the at least one target gas, a text prompt generated after being interpreted by the processing unit 40, a warning light, etc., so as to facilitate operation and inspection of the detection result.

Preferably, the gas detection system further includes a heating unit 70 connected to the at least two separation modules 20, and the heating unit 70 can heat at least one of the separation tubes 21 to accelerate the at least one non-target in the cleaning mode Desorption of gas. The heating unit 70 is in communication with the processing unit 40 and includes a heater 71 and a temperature control module 72 that can control the heater 71. The operation display interface 80 can send a control signal to the temperature through the processing unit 40 The control module 72 controls the operation of the heater 71, for example, controls the heating temperature and heating speed of the heater 71.

Preferably, the processing unit 40 can be switched between a calibration mode and an analysis mode. When the processing unit 40 is switched to the calibration mode, one of the at least two separation modules 20 and the detection chamber 31 provides Inputting a calibration gas, the detection unit 30 detects the calibration gas and generates a calibration signal, and the processing unit 40 receives the calibration signal and calibrates the detection signal accordingly, thereby increasing the accuracy of the detection result. For example, when the processing unit 40 is in a calibration mode, clean dry air can be input to a separation module 20 through the first air inlet 10a as the calibration gas to perform zero point calibration; or directly input A standard product is sent to the detection chamber 31 as the calibration gas to perform concentration calibration.

This creation also provides a detection method using the gas detection system as described above, including the following steps: Inlet S1: Input the gas to be tested and the clean gas into the at least two separation modules 20 respectively; Separate and clean S2: Pass the gas to be measured through one separation module 20 to separate the at least one target gas and clean the other separation module 20 with the clean gas; detection S3: input the at least one target gas into the detection chamber 31 and Obtain the detection signal by the detection module 32; and obtain the result S4: The processing unit 40 obtains the detection result data according to the detection signal. In detail, in the separation and cleaning step S2, after each separation module 20 completes the separation of the gas to be measured, it communicates with the second air inlet 10b to enter the cleaning mode. Through the above steps, the separation of the gas to be measured and the cleaning of at least one separation module 20 can be performed at the same time, which effectively increases the detection rate.

10a: The first air inlet 10b: second air inlet 20: Separation module 20a: The first separation module 20b: Second separation module 21: Separating tube 30: detection unit 31: Detection chamber 32: Detection module 40: processing unit 41: Timing control module 50a: The first shunt module 50b: The second shunt module 51: Solenoid valve 60: Gas pump 70: heating unit 71: heater 72: Temperature control module 80: Operation display interface 90: exhaust port t1~t9: time point S1~S4: steps

Figure 1 is a schematic diagram of the configuration of a preferred embodiment of the creation. Figure 2 is a block diagram of a preferred embodiment of the creation. Figure 3 is a flow chart of the detection method for creating a preferred embodiment. Fig. 4 is a schematic diagram of the time sequence allocation of a preferred embodiment of authoring.

10a: The first air inlet

10b: second air inlet

21: Separating tube

30: detection unit

51: Solenoid valve

60: Gas pump

70: heating unit

90: exhaust port

Claims (8)

A gas detection system includes: A first air inlet for inputting a gas to be measured; A second air inlet for inputting a clean gas; At least two separation modules for separating at least one target gas and at least one non-target gas in the gas to be measured, each of the separation modules can be selectively connected to one of the first and second air inlets for switching Between a separation mode and a cleaning mode; A detection unit includes a detection chamber and a detection module, the detection chamber can be selectively communicated with one of the separation modules for inputting the at least one target gas, and the detection module can detect the detection chamber The at least one target gas generates a detection signal; and A processing unit communicates with the detection unit, receives the detection signal and obtains a detection result data according to it; Wherein, when one of the at least two separation modules communicates with the first air inlet and is in the separation mode, the other of the at least two separation modules communicates with the second air inlet and is in the cleaning mode And it is not connected with the detection chamber, and the separation module in the separation mode is used to retain the at least one non-target gas and communicate with the detection chamber. The gas detection system according to claim 1, further comprising a first splitting module and a second splitting module, wherein the first splitting module can control the first and second air inlets and the at least two The communication state of the separation module, the second branch module can control the communication state of the at least two separation modules and the detection chamber. The gas detection system according to claim 2, wherein the processing unit includes a timing control module, and the first shunt module and the second shunt module are in communication with the timing control module and can be controlled according to the timing control module The plurality of time series signals generated by the group change the communication state of the at least two separation modules with the first and second air inlets and the detection chamber. The gas detection system according to claim 1, further comprising an operation display interface for external operation, wherein the operation display interface is in communication with the processing unit and can display the detection result data. The gas detection system according to claim 1, wherein each of the separation modules includes at least one separation tube for separating the at least one non-target gas. The gas detection system according to claim 1, further comprising a heating unit connected to the at least two separation modules. The gas detection system according to claim 1, wherein the processing unit can be switched between a calibration mode and an analysis mode, and when the processing unit is switched to the calibration mode, the at least two separation modules and the detection chamber One of the chambers is for inputting a calibration gas, the detection unit detects the calibration gas and generates a calibration signal, and the processing unit receives the calibration signal and calibrates the detection signal accordingly. The gas detection system according to claim 3, further comprising an operation display interface for external operation, wherein the operation display interface is in communication with the processing unit and can display the detection result data; each of the separation modules includes at least one A separation tube for separating the at least one non-target gas; the at least one non-target gas is a high-carbon number gas molecule; the gas detection system further includes a heating unit connected to the at least two separation modules; the heating unit and the The processing unit is in communication and includes a heater and a temperature control module that can control the heater; the operation display interface can send a control signal to the temperature control module through the processing unit to control the operation of the heater; the The processing unit can be switched between a calibration mode and an analysis mode. When the processing unit is switched to the calibration mode, one of the at least two separation modules and the detection chamber is for inputting a calibration gas, and the detection unit detects The calibration gas generates a calibration signal, and the processing unit receives the calibration signal and calibrates the detection signal accordingly; the gas detection system further includes a gas pump connected to the detection chamber for discharging the detected signal At least one target gas; the detection unit is a photoionization detector; and the first splitting module and the second splitting module each include a plurality of solenoid valves.

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