TWI752814B - Gas detection system and detection method using the same - Google Patents

Abstract

A gas detection system and detection method using the same are provided, the gas detection system including: a first gas inlet, configured for an analyte to be inputted therein; a second gas inlet, configured for a clean gas to be inputted therein; at least two separation modules, configured to separate at least one target gas and at least one non-target gas from the analyte, each of the at least two separation modules being selectively communicated with one of the first and second gas inlets; a detection unit, including a detection chamber and a detection module, the detection chamber being selectively communicated with one of the at least two separation modules and configured for the at least one target gas to be inputted therein, the detection module detecting the at least one target gas and producing a detection signal; and a processing unit, being communicative with the detection unit to receive the detection signal and produce a detection result data according to the detection signal.

Description

Gas detection system and detection method thereof

The present invention relates to a detection system, in particular to a gas detection system and a detection method thereof.

Volatile Organic Compounds (VOCs) are harmful to the human body. When the concentration is too high, it is easy to cause headaches, nausea, and even coma and damage to body organs in severe cases. For example, in semiconductor process equipment, a heat exchange system is usually used to control the environmental conditions of the process, and the heat transfer liquid used as a cold and heat exchange medium in the heat exchange system is prone to generate volatile gas. Generally, the filters used in clean rooms are not effective in filtering low-carbon species in volatile gases, so special monitoring of their concentrations is required to avoid hazards.

However, the conventional monitoring method can only detect the total content of all gas molecules, and cannot separate the high carbon number species and the low carbon number species in the volatile gas, so the detection accuracy of the low carbon number species is poor. In order to further isolate the low carbon number species, complex and time-consuming separation methods are usually required, which reduces the detection efficiency and is not conducive to real-time monitoring.

Therefore, it is necessary to provide a novel and progressive gas detection system and its detection method to solve the above problems.

The main purpose of the present invention is to provide a gas detection system and a detection method thereof, which can separate the target gas and have high detection efficiency and accuracy.

In order to achieve the above object, the present invention provides a gas detection system, comprising: a first air inlet for inputting a gas to be measured; a second air inlet for inputting a clean gas; at least two separation modules for inputting a gas to be measured; Separating at least one target gas and at least one non-target gas in the gas to be tested, each of the separation modules can selectively communicate with one of the first and second air inlets to switch between a separation mode and a cleaning mode between modes; a detection unit including a detection chamber and a detection module, the detection chamber can be selectively communicated with one of the separation modules for inputting the at least one target gas, and the detection module can detect The at least one target gas in the detection chamber generates a detection signal; and a processing unit communicates with the detection unit, receives the detection signal and obtains a detection result data accordingly; wherein, when the at least two separation modules are When one is in communication with the first air inlet and is in the separation mode, the other of the at least two separation modules is in communication with the second air inlet in the cleaning mode and is not in communication with the detection chamber, in the The separation module of the separation mode is used to retain the at least one non-target gas and communicate with the detection chamber.

In order to achieve the above object, the present invention further provides a detection method using the above-mentioned gas detection system, comprising the following steps: air intake: inputting the gas to be detected and the cleaning gas into the at least two separation modules respectively; separating and Cleaning: passing the gas to be tested through one of the separation modules to separate the at least one target gas and cleaning the other separation module with the cleaning gas; detection: inputting the at least one target gas into the detection chamber and by The detection module obtains the detection signal; and obtains the result: the processing unit obtains the detection result data according to the detection signal.

The following examples only illustrate possible implementations of the present invention, but are not intended to limit the scope of protection of the present invention, and are described together first.

Please refer to FIGS. 1 to 4, which show a preferred embodiment of the present invention. The gas detection system of the present invention includes a first air inlet 10a, a second air inlet 10b, at least two separation modules 20, a The detection unit 30 and a processing unit 40 are provided.

The first air inlet 10a is used for inputting a gas to be tested; the second air inlet 10b is used for inputting a cleaning gas; the at least two separation modules 20 are used for separating at least one target gas and at least one non-target gas in the gas to be tested The target gas, each of the separation modules 20 can be selectively communicated with one of the first and second air inlets 10a, 10b to switch between a separation mode and a cleaning mode; the detection unit 30 includes a detection A chamber 31 and a detection module 32 , the detection chamber 31 can selectively communicate with one of the separation modules 20 for inputting the at least one target gas, and the detection module 32 can detect the inside of the detection chamber 31 The at least one target gas generates a detection signal; the processing unit 40 communicates with the detection unit 30 and receives the detection signal to obtain a detection result data; wherein, when one of the at least two separation modules 20 is connected to When the first air inlet 10a is in communication with the separation mode, the other of the at least two separation modules 20 is in communication with the second air inlet 10b in the cleaning mode and is not in communication with the detection chamber 31 , The separation module 20 in the separation mode is for retaining the at least one non-target gas and communicates with the detection chamber 31 . Thereby, the at least two separation modules 20 can separate the at least one target gas for detection, which effectively improves the detection efficiency and accuracy.

The gas detection system further includes a first distribution module 50a and a second distribution module 50b. The first distribution module 50a can control the first and second air inlets 10a, 10b and the at least two separation modes. For the communication state of the group 20 , the second distribution module 50b can control the communication state of the at least two separation modules 20 and the detection chamber 31 . In this embodiment, the first splitting module 50a and the second splitting module 50b respectively include a plurality of solenoid valves 51; the processing unit 40 includes a timing control module 41, the first splitting module 50a and the The two splitting module 50b communicates with the timing control module 41 and can change the at least two separation modules 20 and the first and second air inlets 10a, 10b and the The communication state of the detection chamber 31 enables the at least two separation modules 20 to automatically switch between the separation mode and the cleaning mode, thereby achieving the effect of continuous separation and detection.

Each of the separation modules 20 includes at least one separation tube 21 for separating the at least one non-target gas, and each of the separation tubes 21 can be selected according to different properties of the separation target. In this embodiment, the at least one non-target gas includes high-carbon number gas molecules, and the carbon number of each high-carbon number gas molecule is not less than 6; the at least one target gas includes low-carbon number gas molecules, such as propanol, isopropyl alcohol, etc. Propanol, etc., which can be effectively separated and filtered to separate low-carbon number gas molecules and increase the detection accuracy. In detail, the detection unit 30 is a photoionization detector, which can obtain the content of the at least one target gas immediately and quickly, and has good detection efficiency; the gas detection system further includes a gas pump 60 which is connected to the gas pump 60 The detection chamber 31 is used to discharge the at least one target gas after the detection, so that the gas after the measurement is quickly discharged from the detection chamber 31 so that the next gas detection can be performed. In other embodiments, the detection unit can also be configured as other detection devices according to the difference of the at least one target gas, for example but not limited to, an optical analyzer directly measures the content of the at least one target gas without ionization.

In this embodiment, the at least two separation modules 20 include a first separation module 20a and a second separation module 20b that are not connected to each other. When the first separation module 20a is in the separation mode, the first separation module 20a is in the separation mode. The second separation module 20b is in the cleaning mode. In detail, in the first separation module 20a, the high carbon number gas molecules in the gas to be tested are separated by the at least one separation tube 21 and stay in the first separation module 20a, and the low carbon number gas molecules are retained in the first separation module 20a. Molecules cannot be separated but can pass through to enter the detection chamber 31 to achieve separation effect; in the second separation module 20b, the clean gas (eg inert gas or clean dry air) passes through the second air inlet 10b is passed into the at least one separation pipe 21 to desorb the at least one non-target gas, and the at least one non-target gas is discharged from an exhaust port 90 through the second splitting module 50b, thereby achieving a cleaning effect and waiting for the next time separation. When the first separation module 20a completes the separation of the gas to be tested, it enters the cleaning mode, and after the second separation module 20b completes the cleaning, it enters the separation mode, so as to alternately perform separation and cleaning, and shorten the time difference to Improve analytical efficiency. Referring to FIG. 4 , for example, during the period from t2 to t3, the first separation module 20a is in the separation mode, and the second separation module 20b is in the cleaning mode; during the period from t3 to t6, the first separation module 20a is completed The separation of the gas to be tested is switched to the cleaning mode, and the second separation module 20b is switched to the separation mode during the period t4 to t5 after cleaning is completed, and the operation is repeated alternately; if the separation time of the gas to be tested is 1 minutes, the cleaning time of each separation tube 21 is 5 minutes, and a test can be completed every 3 minutes by the above-mentioned scheduling method. Of course, the number of the at least two separation modules can also be increased according to requirements; each of the separation modules can also include a plurality of separation tubes to increase the separation effect; the aforementioned time schedule can also be based on the separation time of the gas, each of the separation tubes The cleaning time cooperates with each other to change the detection frequency.

The gas detection system further includes an operation display interface 80 for external operation. The operation display interface 80 communicates with the processing unit 40 and can display the detection result data. The detection result data can be, for example, but not limited to, a value related to the content of the at least one target gas, text prompts, warning lights, etc. generated after being interpreted by the processing unit 40, which facilitates operation and inspection of the detection results.

Preferably, the gas detection system further includes a heating unit 70 connected with the at least two separation modules 20, the heating unit 70 can heat at least one of the separation tubes 21 to accelerate the at least one non-target in the cleaning mode Desorption of gas. The heating unit 70 communicates with the processing unit 40 and includes a heater 71 and a temperature control module 72 capable of controlling the heater 71 . The operation display interface 80 can send a control signal to the temperature through the processing unit 40 The control module 72 is used to control the action of the heater 71 , such as controlling the heating temperature and the heating speed of the heater 71 .

Preferably, the processing unit 40 can be switched between a calibration mode and an analysis mode. When the processing unit 40 is switched to the calibration mode, one of the at least two separation modules 20 and the detection chamber 31 is used for A calibration gas is input, the detection unit 30 detects the calibration gas and generates a calibration signal, and the processing unit 40 receives the calibration signal and calibrates the detection signal accordingly, so as to increase the accuracy of the detection result. For example, when the processing unit 40 is in a calibration mode, clean dry air can be input through the first air inlet 10a to a separation module 20 as the calibration gas, so as to perform zero-point calibration; it can also be directly input A standard is sent to the detection chamber 31 as the calibration gas for concentration calibration.

The present invention provides a detection method using the above-mentioned gas detection system, comprising the following steps: inlet S1: inputting the gas to be detected and the cleaning gas into the at least two separation modules 20 respectively; separation and cleaning S2: feeding The gas to be tested passes through one of the separation modules 20 to separate the at least one target gas and clean the other separation module 20 with the cleaning gas; detection S3: input the at least one target gas into the detection chamber 31 and use the Obtain the detection signal from the detection module 32; and obtain the result S4: the processing unit 40 obtains the detection result data according to the detection signal. In detail, in the separation and cleaning step S2, each of the separation modules 20 communicates with the second air inlet 10b to enter the cleaning mode after completing the separation of the gas to be tested. Through the above steps, the separation of the gas to be tested and the cleaning of at least one of the separation modules 20 can be simultaneously performed, thereby effectively improving the detection rate.

10a: First Air Inlet

10b: Second air inlet

20: Separate modules

20a: The first separation module

20b: Second separation module

21: Separation tube

30: Detection unit

31: Detection chamber

32: Detection module

40: Processing unit

41: Timing control module

50a: The first shunt module

50b: Second shunt module

51: Solenoid valve

60: Gas pump

70: Heating unit

71: Heater

72: Temperature control module

80: Operation display interface

90: exhaust port

t1~t9: time point

S1~S4: Steps

FIG. 1 is a schematic configuration diagram of a preferred embodiment of the present invention. FIG. 2 is a block diagram of a preferred embodiment of the present invention. FIG. 3 is a flow chart of a detection method according to a preferred embodiment of the present invention. FIG. 4 is a schematic diagram of timing allocation according to a preferred embodiment of the present invention.

10a: First Air Inlet

10b: Second air inlet

21: Separation tube

30: Detection unit

51: Solenoid valve

60: Gas pump

70: Heating unit

90: exhaust port

Claims (10)

A gas detection system, comprising: a first air inlet for inputting a gas to be tested; a second air inlet for inputting a clean gas; at least two separation modules for separating at least one of the gas to be tested a target gas and at least one non-target gas, each of the separation modules can be selectively communicated with one of the first and second air inlets to switch between a separation mode and a cleaning mode; a detection unit, It includes a detection chamber and a detection module, the detection chamber can selectively communicate with one of the separation modules and is used for inputting the at least one target gas, and the detection module can detect the at least one in the detection chamber target gas and generate a detection signal; and a processing unit, communicated with the detection unit, receives the detection signal and obtains a detection result data according to it; wherein, when one of the at least two separation modules and the first intake air When the port is connected to the separation mode, the other one of the at least two separation modules is in communication with the second air inlet to be in the cleaning mode and not communicated with the detection chamber, and the separation module in the separation mode is used for Retaining the at least one non-target gas and communicating with the detection chamber, the at least one target gas cannot be separated but can pass through to enter the detection chamber; wherein, the at least one target gas includes low carbon number gas molecules, the at least one target gas Non-target gases include high carbon number gas molecules. The gas detection system of claim 1, further comprising a first distribution module and a second distribution module, wherein the first distribution module can control the first and second air inlets and the at least two The communication state of the separation module, the second splitting module can control the communication state of the at least two separation modules and the detection chamber. The gas detection system according to claim 2, wherein the processing unit includes a timing control module, the first diversion module and the second diversion module are in communication with the timing control module and can be controlled according to the timing sequence The plurality of timing signals generated by the group change the communication state of the at least two separation modules with the first and second air inlets and the detection chamber. The gas detection system according to claim 1 further comprises an operation display interface for external operation, wherein the operation display interface communicates with the processing unit and can display the detection result data. The gas detection system of claim 1, wherein each of the separation modules includes at least one separation tube for separating the at least one non-target gas. The gas detection system according to claim 1, further comprising a heating unit connected to the at least two separation modules. The gas detection system of claim 1, wherein the processing unit can be switched between a calibration mode and an analysis mode, when the processing unit is switched to the calibration mode, the at least two separation modules and the detection chamber One of the chambers is used for inputting a calibration gas, the detection unit detects the calibration gas and generates a calibration signal, and the processing unit receives the calibration signal and calibrates the detection signal accordingly. The gas detection system according to claim 3, further comprising an operation display interface for external operation, wherein the operation display interface communicates with the processing unit and can display the detection result data; each of the separation modules includes at least one A separation pipe for separating the at least one non-target gas; the gas detection system further includes a heating unit connected with the at least two separation modules; the heating unit communicates with the processing unit and includes a heater and a control unit capable of controlling the The temperature control module of the heater; the operation display interface can send a control signal to the temperature control module through the processing unit to control the action of the heater; the processing unit can be switched between a calibration mode and an analysis mode During the time, when the processing unit is switched to the calibration mode, one of the at least two separation modules and the detection chamber is used for inputting a calibration gas, and the detection unit The unit detects the calibration gas and generates a calibration signal. The processing unit receives the calibration signal and calibrates the detection signal accordingly. The gas detection system further includes a gas pump, which is connected to the detection chamber for exhaust detection. the at least one target gas; the detection unit is a photoionization detector; and the first splitting module and the second splitting module respectively comprise a plurality of solenoid valves. A detection method using the gas detection system according to any one of claims 1 to 8, comprising the following steps: inlet: the gas to be detected and the cleaning gas are respectively input into the at least two separation modules; separation and cleaning : pass the gas to be tested through one of the separation modules to separate the at least one target gas and clean the other separation module with the cleaning gas; detection: input the at least one target gas into the detection chamber and use the cleaning gas to clean the other separation module The detection module obtains the detection signal; and obtains a result: the processing unit obtains the detection result data according to the detection signal; wherein, the at least one target gas includes low carbon number gas molecules, and the at least one non-target gas includes high carbon number gas molecular. The detection method of claim 9, wherein in the separation and cleaning step, after each separation module completes the separation of the gas to be tested, the second air inlet is connected to enter the cleaning mode.

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