TWM607872U - Imaging device for surface inspection - Google Patents

Imaging device for surface inspection Download PDF

Info

Publication number
TWM607872U
TWM607872U TW109210682U TW109210682U TWM607872U TW M607872 U TWM607872 U TW M607872U TW 109210682 U TW109210682 U TW 109210682U TW 109210682 U TW109210682 U TW 109210682U TW M607872 U TWM607872 U TW M607872U
Authority
TW
Taiwan
Prior art keywords
light
inspected
workpiece
module
image
Prior art date
Application number
TW109210682U
Other languages
Chinese (zh)
Inventor
孫志仲
Original Assignee
上溢精密股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 上溢精密股份有限公司 filed Critical 上溢精密股份有限公司
Priority to TW109210682U priority Critical patent/TWM607872U/en
Publication of TWM607872U publication Critical patent/TWM607872U/en

Links

Images

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

本創作係揭露一種表面檢驗的成像裝置,其包含工作台、二個攝像裝置及二個發光模組。工作台係供承載具有曲面且為光滑表面的待檢驗工件。二個攝像裝置相對於該待檢驗工件而設置,且二個攝像裝置的成像軸線相互垂直。各攝像裝置分別具有遠心鏡頭及位於遠心鏡頭的成像面上的影像擷取單元。各發光模組分別具有分光鏡及發光單元;分光鏡介於待檢驗工件與遠心鏡頭之間;發光單元向分光鏡照射一照射光線,其經由分光鏡形成平行光線並照射於待檢驗工件。其中,各影像擷取單元分別利用平行光線以擷取對應於待檢驗工件的第一影像及第二影像。This creation discloses a surface inspection imaging device, which includes a workbench, two camera devices and two light-emitting modules. The workbench is used to carry the workpiece to be inspected with a curved surface and a smooth surface. The two camera devices are arranged relative to the workpiece to be inspected, and the imaging axes of the two camera devices are perpendicular to each other. Each camera device has a telecentric lens and an image capturing unit located on the imaging surface of the telecentric lens. Each light-emitting module has a beam splitter and a light-emitting unit; the beam splitter is between the workpiece to be inspected and the telecentric lens; the light-emitting unit irradiates an irradiating light to the beam splitter, which forms a parallel light through the beam splitter and irradiates the workpiece to be inspected. Wherein, each image capturing unit uses parallel rays to capture the first image and the second image corresponding to the workpiece to be inspected.

Description

表面檢驗的成像裝置Imaging device for surface inspection

本創作是有關於一種成像裝置的技術領域,特別是關於一種用於檢驗表面瑕疵的表面檢驗的成像裝置。This creation is related to the technical field of an imaging device, in particular to a surface inspection imaging device used to inspect surface defects.

現代的生產設備可以非常高的速度生產產品。當然,對於產品外觀的要求也相提高。本身外觀異常是產品被退回的一項原因。此外,異常的外觀可以顯示出產品結構上潛在的缺陷,此為產品被退回的另一項原因。Modern production equipment can produce products at very high speeds. Of course, the requirements for the appearance of the product have also increased. The abnormal appearance of the product itself is a reason for the return of the product. In addition, the abnormal appearance can show potential defects in the product structure, which is another reason for the product being returned.

而近年來,檢驗的方式漸漸地由人工檢驗轉變為自動化檢驗,其可減少人眼可能因標準不同或疲勞等問題所産生的失誤。其中自動化檢測中使用光學檢測的方法最為精確,且不會破壞目標物的表面。因此,在自動化檢測中使用光學檢測,如何使其能快速又準確地檢驗元件,則所屬領域中的技術人員所爭相努力的目標。In recent years, the way of inspection has gradually changed from manual inspection to automated inspection, which can reduce human eye errors due to problems such as different standards or fatigue. Among them, the optical inspection method is the most accurate in automated inspection, and it will not damage the surface of the target. Therefore, how to use optical inspection in automated inspection to make it possible to inspect components quickly and accurately is a goal that technicians in the field are striving for.

綜觀前所述,本創作之創作人設計了一種表面檢驗的成像裝置,以針對現有技術之缺失加以改善,進而增進產業上之實施利用。In summary, the creator of this creation has designed a surface inspection imaging device to improve on the shortcomings of the existing technology, thereby enhancing the industrial application.

有鑑於上述習知技藝之問題,本創作之目的就是在於提供一種表面檢驗的成像裝置,以改善上述習知技術所產生的問題。In view of the above-mentioned conventional technology problems, the purpose of this creation is to provide a surface inspection imaging device to improve the above-mentioned conventional technology problems.

基於上述目的,本創作係提供一種表面檢驗的成像裝置,其包含工作台、第一攝像裝置、第一發光模組、第二攝像裝置及第二發光模組。工作台係供承載待檢驗工件,該待檢驗工件係具有曲面,且該待檢驗工件之表面係為光滑表面。第一攝像裝置係相對於該待檢驗工件而設置,且第一攝像裝置係具有第一遠心鏡頭及第一影像擷取單元;該第一影像擷取單元係位於該第一遠心鏡頭的成像面上,該第一遠心鏡頭係具有第一成像軸線,且該第一成像軸線係對準於該待檢驗工件。第一發光模組係具有第一分光鏡及第一發光單元;該第一分光鏡為半穿透半反射鏡,該第一分光鏡係位於該第一成像軸線上,且介於該待檢驗工件與該第一遠心鏡頭之間;該第一發光單元位於該第一成像軸線之一側,該第一發光單元係向該第一分光鏡照射第一照射光線;該第一照射光線係經由該第一分光鏡形成第一平行光線,且該第一平行光線照射於該待檢驗工件。第二攝像裝置係相對於該待檢驗工件而設置,且第二攝像裝置係具有第二遠心鏡頭及第二影像擷取單元;該第二影像擷取單元係位於該第二遠心鏡頭的成像面上,該第二遠心鏡頭係具有第二成像軸線,該第二成像軸線係垂直於該第一成像軸線,且該第二成像軸線係對準於該待檢驗工件。第二發光模組係具有第二分光鏡及第二發光單元;該第二分光鏡為半穿透半反射鏡,該第二分光鏡係位於該第二成像軸線上,且介於該待檢驗工件與該第二遠心鏡頭之間;該第二發光單元位於該第二成像軸線之一側,該第二發光單元係向該第二分光鏡照射第二照射光線;該第二照射光線係經由該第二分光鏡形成第二平行光線係且該第二平行光線照射於該待檢驗工件。其中,該第一影像擷取單元係利用該第一平行光線以擷取對應於該待檢驗工件的第一影像;該第二影像擷取單元係利用該第二平行光線以擷取對應於該待檢驗工件的第二影像。Based on the above objective, the author provides an imaging device for surface inspection, which includes a workbench, a first camera device, a first light-emitting module, a second camera device, and a second light-emitting module. The workbench is used to carry the workpiece to be inspected, the workpiece to be inspected has a curved surface, and the surface of the workpiece to be inspected is a smooth surface. The first camera device is arranged relative to the workpiece to be inspected, and the first camera device has a first telecentric lens and a first image capturing unit; the first image capturing unit is located on the imaging surface of the first telecentric lens Above, the first telecentric lens has a first imaging axis, and the first imaging axis is aligned with the workpiece to be inspected. The first light-emitting module has a first beam splitter and a first light-emitting unit; the first beam splitter is a semi-transmissive half-reflecting mirror, and the first beam splitter is located on the first imaging axis and between the to-be-inspected Between the workpiece and the first telecentric lens; the first light-emitting unit is located on one side of the first imaging axis, the first light-emitting unit irradiates the first beam splitter with the first irradiation light; the first irradiation light passes through The first beam splitter forms a first parallel light, and the first parallel light irradiates the workpiece to be inspected. The second camera device is arranged relative to the workpiece to be inspected, and the second camera device has a second telecentric lens and a second image capturing unit; the second image capturing unit is located on the imaging surface of the second telecentric lens Above, the second telecentric lens has a second imaging axis, the second imaging axis is perpendicular to the first imaging axis, and the second imaging axis is aligned with the workpiece to be inspected. The second light-emitting module has a second beam splitter and a second light-emitting unit; the second beam splitter is a semi-transmissive half-reflecting mirror, and the second beam splitter is located on the second imaging axis and between the to-be-inspected Between the workpiece and the second telecentric lens; the second light-emitting unit is located on one side of the second imaging axis, and the second light-emitting unit irradiates the second illuminating light to the second beam splitter; the second illuminating light passes through The second beam splitter forms a second parallel light system and the second parallel light irradiates the workpiece to be inspected. Wherein, the first image capturing unit uses the first parallel light to capture the first image corresponding to the workpiece to be inspected; the second image capturing unit uses the second parallel light to capture the first image corresponding to the The second image of the workpiece to be inspected.

較佳地,該第一攝像裝置及該第二攝像裝置係分別擷取該曲面以産生該第一影像及該第二影像。Preferably, the first camera device and the second camera device capture the curved surface to generate the first image and the second image, respectively.

較佳地,更包含移動模組,該移動模組係設置於該工作台,該移動模組係使該待檢驗工件轉動或移動。Preferably, it further comprises a mobile module, the mobile module is arranged on the worktable, and the mobile module makes the workpiece to be inspected rotate or move.

較佳地,更包含垂直位移模組,該垂直位移模組係設置於該工作台,該第一攝像裝置及該第一發光模組係設置於該垂直位移模組,該垂直位移模組係帶動該第一攝像裝置及該第一發光模組在垂直方向上位移。Preferably, it further comprises a vertical displacement module, the vertical displacement module is arranged on the workbench, the first camera device and the first light emitting module are arranged on the vertical displacement module, the vertical displacement module is Drive the first camera device and the first light-emitting module to shift in a vertical direction.

較佳地,更包含橫向位移模組,該橫向位移模組係設置於該工作台,該第二攝像裝置及該第二發光模組係設置於該橫向位移模組,該橫向位移模組係帶動該第二攝像裝置及該第二發光模組在橫向方向上位移。Preferably, it further includes a lateral displacement module, the lateral displacement module is arranged on the workbench, the second camera device and the second light-emitting module are arranged on the lateral displacement module, the lateral displacement module is Drive the second camera device and the second light-emitting module to shift in the lateral direction.

較佳地,更包含處理模組,該處理模組係電性連接該第一攝像裝置及該第二攝像裝置,並接收該第一影像及該第二影像,並依據該第一影像或該第二影像判斷該待檢驗工件為合格或不合格。Preferably, it further includes a processing module that is electrically connected to the first camera device and the second camera device, and receives the first image and the second image, and based on the first image or the second image The second image determines whether the workpiece to be inspected is qualified or unqualified.

較佳地,更包含控制模組,該控制模組係電性連接該第一發光單元及該第二發光單元,該控制模組係控制該第一發光單元的該第一照射光線的亮度及該第二發光單元的該第二照射光線的亮度。Preferably, it further comprises a control module which is electrically connected to the first light-emitting unit and the second light-emitting unit, and the control module controls the brightness of the first irradiated light of the first light-emitting unit and The brightness of the second irradiated light of the second light-emitting unit.

本創作的表面檢驗的成像裝置的鏡頭是使用遠心鏡頭,且利用分光鏡將照射光線反射為平行光線進行成像。由於待檢驗工件所待檢驗的表面是曲面,從而影像中大致上會形成三個區域,例如曝光正常的區域及曝光正常的區域的兩側的曝光過度或曝光不足的二個區域,而曝光正常的區域即為待檢驗的區域。藉此,在後續的程序中,可便於提取曝光正常的區域作檢驗。另外,本創作的表面檢驗的成像裝置可同時檢驗待檢驗工件的兩個區域,從而可提升檢驗效率。The lens of the imaging device for surface inspection in this creation uses a telecentric lens, and uses a beam splitter to reflect the illuminating light into parallel rays for imaging. Because the surface of the workpiece to be inspected is a curved surface, there are roughly three areas in the image, such as the overexposed or underexposed two areas on both sides of the normally exposed area and the normally exposed area, while the normal exposure The area is the area to be inspected. In this way, in the subsequent procedure, it is convenient to extract the normally exposed area for inspection. In addition, the surface inspection imaging device of this invention can simultaneously inspect two areas of the workpiece to be inspected, thereby improving inspection efficiency.

以下將以具體的實施例配合所附的圖式詳加說明本創作的技術特徵,以使所屬技術領域具有通常知識者可易於瞭解本創作的目的、技術特徵、及其優點。The technical features of this creation will be explained in detail below with specific embodiments and accompanying drawings, so that those with ordinary knowledge in the technical field can easily understand the purpose, technical features, and advantages of this creation.

為利於瞭解本創作的技術特徵、內容與優點及其所能達成的功效,茲將本創作配合附圖,並以實施例的表達形式詳細說明如下,而其中所使用的圖式,其主旨僅為示意及輔助說明書之用,未必為本創作實施後的真實比例與精確配置,故不應就所附的圖式的比例與配置關係解讀、侷限本創作於實際實施上的權利範圍,合先敘明。In order to facilitate the understanding of the technical features, content and advantages of this creation and its achievable effects, this creation is combined with the accompanying drawings, and is described in detail in the form of embodiments as follows, and the schematics used therein are only In order to illustrate and supplement the manual, it may not be the true proportions and precise configuration after the implementation of this creation. Therefore, the proportion and configuration relationship of the attached drawings should not be interpreted, and the scope of rights of the creation in actual implementation should not be interpreted. Narrate.

需要說明的是,當一個元件被稱為是「連接於」、「設置於」或「安裝於」另一個元件,它可以是直接連接或設置到另一個元件或者可能同時存在居中元件。此外,若使用術語“第一”、“第二”、“第三”僅用於描述目的,而不能理解為指示或暗示相對重要性或者其順序或者其方向關係。It should be noted that when an element is referred to as being "connected to", "installed in" or "installed in" another element, it can be directly connected or set to another element, or a centered element may exist at the same time. In addition, if the terms "first", "second", and "third" are used for descriptive purposes only, they cannot be understood as indicating or implying relative importance or its sequence or directional relationship.

以下將參照相關圖式,說明依本創作的表面檢驗的成像裝置,為使便於理解,下述實施例中的相同元件係以相同的符號標示來說明。Hereinafter, the imaging device for surface inspection created according to the present invention will be described with reference to related drawings. For ease of understanding, the same elements in the following embodiments are indicated by the same symbols.

請參閱第1至4圖。第1圖為本創作的表面檢驗的成像裝置的第一實施例的結構示意圖。第2圖為本創作的表面檢驗的成像裝置的第一實施例的第一攝像裝置及第一發光模組的結構示意圖。第3圖為本創作的表面檢驗的成像裝置的第一實施例的方塊示意圖。第4圖為本創作的表面檢驗的成像裝置的第一實施例的第一影像的示意圖。Please refer to Figures 1 to 4. Figure 1 is a schematic structural diagram of the first embodiment of the created surface inspection imaging device. Figure 2 is a schematic diagram of the structure of the first camera device and the first light-emitting module of the first embodiment of the created surface inspection imaging device. Figure 3 is a block diagram of the first embodiment of the created surface inspection imaging device. Figure 4 is a schematic diagram of the first image of the first embodiment of the created surface inspection imaging device.

如圖所示,本創作的一種表面檢驗的成像裝置1,其包含工作台10、第一攝像裝置20、第一發光模組30、第二攝像裝置40及第二發光模組50。表面檢驗的成像裝置1係用以檢驗具有光亮、光滑表面的産品或元件的表面。其中,待檢驗工件9具有曲面91,且待檢驗工件9之表面為光滑表面。舉例來說,待檢驗工件9可為管狀或桶狀元件,且其外觀經過電鍍的方式,從而具有光亮且光滑的表面。其中,待檢驗工件9是被檢驗表面上是否具有刮傷、異物、污漬等等。其中,工作台10係供承載待檢驗工件9,以使待檢驗工件9能穩定地接受檢驗。As shown in the figure, a surface inspection imaging device 1 created by the present invention includes a workbench 10, a first camera device 20, a first light-emitting module 30, a second camera device 40, and a second light-emitting module 50. The imaging device 1 for surface inspection is used to inspect the surface of a product or component with a bright and smooth surface. Among them, the workpiece 9 to be inspected has a curved surface 91, and the surface of the workpiece 9 to be inspected is a smooth surface. For example, the workpiece 9 to be inspected may be a tubular or barrel-shaped element, and its appearance is electroplated to have a bright and smooth surface. Among them, the workpiece 9 to be inspected is whether there are scratches, foreign objects, stains, etc. on the inspected surface. Among them, the workbench 10 is used to carry the workpiece 9 to be inspected, so that the workpiece 9 to be inspected can be inspected stably.

第一攝像裝置20係相對於該待檢驗工件9而設置,且第一攝像裝置20係具有第一遠心鏡頭21及第一影像擷取單元22。遠心鏡頭具有低畸變、不會隨物距改變而使影像大小改變,能降低放大誤差率和增加量測的景深,並且保持影像清晰和精確的篩選瑕疵等優點。其中,該第一影像擷取單元22係位於該第一遠心鏡頭21的成像面上,該第一遠心鏡頭21係具有第一成像軸線211。並且,該第一成像軸線211係對準於該待檢驗工件9。特別地,第一成像軸線211是對準於該待檢驗工件9所待檢驗的表面,例如曲面的部分,即該第一攝像裝置20係擷取該曲面91以産生該第一影像221。The first camera device 20 is disposed relative to the workpiece 9 to be inspected, and the first camera device 20 has a first telecentric lens 21 and a first image capturing unit 22. The telecentric lens has the advantages of low distortion, will not change the image size with the change of the object distance, can reduce the magnification error rate and increase the measured depth of field, and maintain the image clarity and accurate screening of defects. The first image capturing unit 22 is located on the imaging surface of the first telecentric lens 21, and the first telecentric lens 21 has a first imaging axis 211. Moreover, the first imaging axis 211 is aligned with the workpiece 9 to be inspected. In particular, the first imaging axis 211 is aligned with the surface to be inspected of the workpiece 9 to be inspected, such as a curved surface, that is, the first imaging device 20 captures the curved surface 91 to generate the first image 221.

第一發光模組30係具有第一分光鏡31及第一發光單元32。其中,該第一分光鏡31係位於該第一成像軸線211上,且介於該待檢驗工件9與該第一遠心鏡頭21之間,該第一發光單元32位於該第一成像軸線211之一側,該第一發光單元32係向該第一分光鏡31照射第一照射光線321。由於第一分光鏡31為半穿透半反射鏡,因此第一攝像裝置20可擷取待檢驗工件9的影像,而第一發光單元32的第一照射光線321則可經由該第一分光鏡31的反射而形成照射於該待檢驗工件9的第一平行光線311。The first light-emitting module 30 has a first beam splitter 31 and a first light-emitting unit 32. Wherein, the first beam splitter 31 is located on the first imaging axis 211 and between the workpiece 9 to be inspected and the first telecentric lens 21, and the first light-emitting unit 32 is located on the first imaging axis 211 On one side, the first light-emitting unit 32 irradiates the first light beam 321 to the first beam splitter 31. Since the first beam splitter 31 is a semi-transmissive half mirror, the first camera device 20 can capture an image of the workpiece 9 to be inspected, and the first irradiated light 321 of the first light-emitting unit 32 can pass through the first beam splitter The reflection of 31 forms a first parallel light 311 irradiating the workpiece 9 to be inspected.

類似地,第二攝像裝置40係相對於該待檢驗工件9而設置,且第二攝像裝置40係具有第二遠心鏡頭41及第二影像擷取單元42。其中,該第二影像擷取單元42係位於該第二遠心鏡頭41的成像面上,該第二遠心鏡頭41係具有第二成像軸線411。其中,該第二成像軸線411係垂直於該第一成像軸線211,且該第二成像軸線411係對準於該待檢驗工件9。特別地,第二成像軸線411是對準於該待檢驗工件9所待檢驗的表面,例如曲面的部分,即該第二攝像裝置40係擷取該曲面91以産生該第二影像421。Similarly, the second camera device 40 is disposed relative to the workpiece 9 to be inspected, and the second camera device 40 has a second telecentric lens 41 and a second image capturing unit 42. The second image capturing unit 42 is located on the imaging surface of the second telecentric lens 41, and the second telecentric lens 41 has a second imaging axis 411. Wherein, the second imaging axis 411 is perpendicular to the first imaging axis 211, and the second imaging axis 411 is aligned with the workpiece 9 to be inspected. In particular, the second imaging axis 411 is aligned with the surface to be inspected of the workpiece 9 to be inspected, such as a curved surface, that is, the second camera device 40 captures the curved surface 91 to generate the second image 421.

第二發光模組50係具有第二分光鏡51及第二發光單元52。其中,該第二分光鏡51係位於該第二成像軸線411上,且介於該待檢驗工件9與該第二遠心鏡頭41之間,該第二發光單元52位於該第二成像軸線411之一側,該第二發光單元52係向該第二分光鏡51照射第二照射光線521。由於第二分光鏡51為半穿透半反射鏡,因此第二攝像裝置40可擷取待檢驗工件9的影像,而第二發光單元52的第二照射光線521則經由該第二分光鏡51的反射而形成照射於該待檢驗工件9的第二平行光線511。The second light-emitting module 50 has a second beam splitter 51 and a second light-emitting unit 52. Wherein, the second beam splitter 51 is located on the second imaging axis 411 and between the workpiece 9 to be inspected and the second telecentric lens 41, and the second light emitting unit 52 is located on the second imaging axis 411 On one side, the second light-emitting unit 52 irradiates the second light beam 521 to the second beam splitter 51. Since the second beam splitter 51 is a semi-transmissive half mirror, the second camera device 40 can capture an image of the workpiece 9 to be inspected, and the second irradiated light 521 from the second light-emitting unit 52 passes through the second beam splitter 51 Reflected by, forms a second parallel light 511 irradiating the workpiece 9 to be inspected.

順帶一提的是,第一分光鏡31與第一成像軸線211之間及第二分光鏡51與第二成像軸線411之間可具有一夾角,較佳地,該夾角可為45度。Incidentally, there may be an included angle between the first beam splitter 31 and the first imaging axis 211 and between the second beam splitter 51 and the second imaging axis 411, and preferably, the included angle may be 45 degrees.

藉由上述,該第一影像擷取單元22能利用該第一平行光線311以擷取對應於該待檢驗工件9的第一影像221,而該第二影像擷取單元42能利用該第二平行光線511以擷取對應於該待檢驗工件9的第二影像421。With the above, the first image capturing unit 22 can use the first parallel light 311 to capture the first image 221 corresponding to the workpiece 9 to be inspected, and the second image capturing unit 42 can use the second The parallel rays 511 are used to capture the second image 421 corresponding to the workpiece 9 to be inspected.

本創作的第一攝像裝置20及第二攝像裝置40的鏡頭是使用遠心鏡頭,且利用分光鏡將照射光線反射為平行光線進行成像。由於待檢驗工件9所待檢驗的表面是曲面,從而第一影像221及第二影像421中大致上會形成三個區域,例如曝光正常的區域及曝光正常的區域的兩側的曝光過度或曝光不足的二個區域,而曝光正常的區域即為待檢驗的區域,即如第4圖所示。藉此,在後續的程序中,可便於提取曝光正常的區域作檢驗。The lenses of the first camera device 20 and the second camera device 40 of the present invention use a telecentric lens, and a beam splitter is used to reflect the irradiated light into parallel rays for imaging. Since the surface to be inspected of the workpiece 9 to be inspected is a curved surface, roughly three areas are formed in the first image 221 and the second image 421, such as overexposure or overexposure on both sides of the normally exposed area and the normally exposed area The two insufficient areas, and the normal exposure area is the area to be inspected, as shown in Figure 4. In this way, in the subsequent procedure, it is convenient to extract the normally exposed area for inspection.

另一方面,本創作的一種表面檢驗的成像裝置1更包含一移動模組61,該移動模組61係設置於該工作台10,該移動模組61能使該待檢驗工件9轉動或移動。由於本創作的一種表面檢驗的成像裝置1,其每次僅可擷取到待檢驗工件9的部分區域的影像,因此,移動模組61可帶動待檢驗工件9轉動或移動,以調整擷取待檢驗工件9的區域。其中,移動模組例如可為馬達、滾珠螺桿、齒輪、齒條或其組合,其係為所屬技術領域中具有通常知識者所熟知的技術,於此便不再加以贅述。On the other hand, the imaging device 1 for surface inspection of the present invention further includes a moving module 61, which is arranged on the worktable 10, and the moving module 61 can rotate or move the workpiece 9 to be inspected. . Since the imaging device 1 for surface inspection created by this invention can only capture images of a partial area of the workpiece 9 to be inspected each time, the moving module 61 can drive the workpiece 9 to be inspected to rotate or move to adjust the capture The area of the workpiece 9 to be inspected. Among them, the mobile module can be, for example, a motor, a ball screw, a gear, a rack, or a combination thereof, which is a technology well known to those with ordinary knowledge in the relevant technical field, and will not be repeated here.

又一方面,本創作的一種表面檢驗的成像裝置1更包含垂直位移模組62及橫向位移模組63。該垂直位移模組62係設置於該工作台10,該第一攝像裝置20及該第一發光模組30係設置於該垂直位移模組62,該垂直位移模組62係帶動該第一攝像裝置20及該第一發光模組30在垂直方向上位移。該橫向位移模組63係設置於該工作台10,該第二攝像裝置40及該第二發光模組50係設置於該橫向位移模組63,該橫向位移模組63係帶動該第二攝像裝置40及該第二發光模組50在橫向方向上位移。In another aspect, the imaging device 1 for surface inspection of the present invention further includes a vertical displacement module 62 and a lateral displacement module 63. The vertical displacement module 62 is arranged on the workbench 10, the first camera device 20 and the first light emitting module 30 are arranged on the vertical displacement module 62, and the vertical displacement module 62 drives the first camera The device 20 and the first light-emitting module 30 are displaced in the vertical direction. The lateral displacement module 63 is arranged on the workbench 10, the second camera device 40 and the second light-emitting module 50 are arranged on the lateral displacement module 63, and the lateral displacement module 63 drives the second camera The device 40 and the second light-emitting module 50 are displaced in the lateral direction.

其中,垂直位移模組62及橫向位移模組63可為類似於滾珠螺母、螺桿與馬達的組合,攝像裝置則可設置於滾珠螺母上,以被帶動而位移,其係為所屬技術領域中具有通常知識者所熟知的技術,於此便不再加以贅述。Among them, the vertical displacement module 62 and the lateral displacement module 63 can be similar to the combination of a ball nut, a screw and a motor, and the camera device can be arranged on the ball nut to be driven and displaced. The technologies that are generally well known to knowledgeable persons will not be repeated here.

請參閱第5圖,其為本創作的表面檢驗的成像裝置的第二實施例的方塊示意圖。在本實施例中,相同元件符號的元件,其運作與配置係與前述實施例相同或類似,而與前述實施例相同或類似之處,於此便不再加以贅述。如圖所示,在本實施例中,本創作的一種表面檢驗的成像裝置1更包含一處理模組71及一控制模組72。Please refer to FIG. 5, which is a block diagram of the second embodiment of the created surface inspection imaging device. In this embodiment, the operation and configuration of the components with the same reference symbols are the same as or similar to those in the previous embodiment, and the same or similar parts to the previous embodiment will not be repeated here. As shown in the figure, in this embodiment, the imaging device 1 for surface inspection of the present invention further includes a processing module 71 and a control module 72.

其中,該處理模組71係電性連接該第一攝像裝置20及該第二攝像裝置40,並接收該第一影像221及該第二影像421,並依據該第一影像221或該第二影像421判斷該待檢驗工件9為合格或不合格,例如第6圖所示,第一影像221為合格,第二影像421為不合格。舉例來說,處理模組71可利用影像辨識等技術由第一影像221或第二影像421中,辨識出預定特徵,例如刮傷、指甲痕、凹凸不平等特徵,進而判斷待檢驗工件9為合格或不合格。Wherein, the processing module 71 is electrically connected to the first camera device 20 and the second camera device 40, and receives the first image 221 and the second image 421, and according to the first image 221 or the second image The image 421 determines whether the workpiece 9 to be inspected is qualified or unqualified. For example, as shown in FIG. 6, the first image 221 is qualified and the second image 421 is unqualified. For example, the processing module 71 can use image recognition technology to identify predetermined features, such as scratches, nail marks, and uneven features from the first image 221 or the second image 421, and then determine whether the workpiece 9 to be inspected is Pass or fail.

另外,該控制模組72係電性連接該第一發光單元32及該第二發光單元52,該控制模組72係控制該第一發光單元32的該第一照射光線321的亮度及該第二發光單元52的該第二照射光線521的亮度。也就是說,藉由控制模組72的控制第一發光單元32及第二發光單元52可依據待檢驗工件9的顏色深淺等條件,而調整光源照射的亮度,從而能更有效的進行檢驗。In addition, the control module 72 is electrically connected to the first light-emitting unit 32 and the second light-emitting unit 52, and the control module 72 controls the brightness of the first irradiated light 321 of the first light-emitting unit 32 and the second light-emitting unit 52. The brightness of the second illuminating light 521 of the two light-emitting units 52. In other words, by controlling the first light-emitting unit 32 and the second light-emitting unit 52 of the control module 72, the brightness of the light source can be adjusted according to conditions such as the color depth of the workpiece 9 to be inspected, so that the inspection can be performed more effectively.

以上所述僅為舉例性,而非為限制性者。任何未脫離本創作之精神與範疇,而對其進行之等效修改或變更,均應包含於後附之申請專利範圍中。The above description is only illustrative, and not restrictive. Any equivalent modifications or changes made without departing from the spirit and scope of this creation shall be included in the scope of the attached patent application.

1:表面檢驗的成像裝置 10:工作台 20:第一攝像裝置 21:第一遠心鏡頭 211:第一成像軸線 22:第一影像擷取單元 221:第一影像 30:第一發光模組 31:第一分光鏡 311:第一平行光線 32:第一發光單元 321:第一照射光線 40:第二攝像裝置 41:第二遠心鏡頭 411:第二成像軸線 42:第二影像擷取單元 421:第二影像 50:第二發光模組 51:第二分光鏡 511:第二平行光線 52:第二發光單元 521:第二照射光線 61:移動模組 62:垂直位移模組 63:橫向位移模組 71:處理模組 72:控制模組 9:待檢驗工件 91:曲面 1: Imaging device for surface inspection 10: Workbench 20: The first camera 21: The first telecentric lens 211: The first imaging axis 22: The first image capture unit 221: First Image 30: The first light-emitting module 31: The first beam splitter 311: The first parallel ray 32: The first light-emitting unit 321: The first illuminating light 40: Second camera device 41: second telecentric lens 411: Second imaging axis 42: The second image capture unit 421: second image 50: The second light-emitting module 51: second beam splitter 511: second parallel ray 52: The second light-emitting unit 521: second illuminating light 61: mobile module 62: Vertical displacement module 63: Lateral displacement module 71: Processing Module 72: control module 9: Workpiece to be inspected 91: curved surface

為了更清楚地說明本創作實施例的技術方案,下面將對本創作實施例描述中所需要使用的附圖作簡單地介紹,顯而易見地,下面所描述的附圖僅僅是本創作的一些實施例,對於所屬技術領域中具有通常知識者來講,還可以根據這些附圖獲得其他的附圖。 第1圖為本創作的表面檢驗的成像裝置的第一實施例的結構示意圖。 第2圖為本創作的表面檢驗的成像裝置的第一實施例的第一攝像裝置及第一發光模組的結構示意圖。 第3圖為本創作的表面檢驗的成像裝置的第一實施例的方塊示意圖。 第4圖為本創作的表面檢驗的成像裝置的第一實施例的第一影像的示意圖。 第5圖為本創作的表面檢驗的成像裝置的第二實施例的方塊示意圖。 第6圖為本創作的表面檢驗的成像裝置的第二實施例的應用示意圖。 In order to more clearly illustrate the technical solution of the creative embodiment, the following will briefly introduce the drawings that need to be used in the description of the creative embodiment. Obviously, the drawings described below are only some embodiments of the creative. Those with ordinary knowledge in the technical field can also obtain other drawings based on these drawings. Figure 1 is a schematic structural diagram of the first embodiment of the created surface inspection imaging device. Figure 2 is a schematic diagram of the structure of the first camera device and the first light-emitting module of the first embodiment of the created surface inspection imaging device. Figure 3 is a block diagram of the first embodiment of the created surface inspection imaging device. Figure 4 is a schematic diagram of the first image of the first embodiment of the created surface inspection imaging device. Figure 5 is a block diagram of the second embodiment of the created surface inspection imaging device. Figure 6 is a schematic diagram of the application of the second embodiment of the created surface inspection imaging device.

1:表面檢驗的成像裝置 1: Imaging device for surface inspection

10:工作台 10: Workbench

20:第一攝像裝置 20: The first camera

21:第一遠心鏡頭 21: The first telecentric lens

22:第一影像擷取單元 22: The first image capture unit

30:第一發光模組 30: The first light-emitting module

32:第一發光單元 32: The first light-emitting unit

40:第二攝像裝置 40: Second camera device

41:第二遠心鏡頭 41: second telecentric lens

42:第二影像擷取單元 42: The second image capture unit

50:第二發光模組 50: The second light-emitting module

51:第二分光鏡 51: second beam splitter

52:第二發光單元 52: The second light-emitting unit

61:移動模組 61: mobile module

62:垂直位移模組 62: Vertical displacement module

63:橫向位移模組 63: Lateral displacement module

9:待檢驗工件 9: Workpiece to be inspected

91:曲面 91: curved surface

Claims (7)

一種表面檢驗的成像裝置,其包含: 一工作台,係供承載一待檢驗工件,該待檢驗工件係具有一曲面,且該待檢驗工件之表面係為光滑表面; 一第一攝像裝置,係相對於該待檢驗工件而設置,且第一攝像裝置係具有一第一遠心鏡頭及一第一影像擷取單元,該第一影像擷取單元係位於該第一遠心鏡頭的成像面上,該第一遠心鏡頭係具有一第一成像軸線,且該第一成像軸線係對準於該待檢驗工件; 一第一發光模組,係具有一第一分光鏡及一第一發光單元,該第一分光鏡為半穿透半反射鏡,該第一分光鏡係位於該第一成像軸線上,且介於該待檢驗工件與該第一遠心鏡頭之間,該第一發光單元位於該第一成像軸線之一側,該第一發光單元係向該第一分光鏡照射一第一照射光線,該第一照射光線係經由該第一分光鏡形成一第一平行光線,且該第一平行光線照射於該待檢驗工件; 一第二攝像裝置,係相對於該待檢驗工件而設置,且第二攝像裝置係具有一第二遠心鏡頭及一第二影像擷取單元,該第二影像擷取單元係位於該第二遠心鏡頭的成像面上,該第二遠心鏡頭係具有一第二成像軸線,且該第二成像軸線係垂直於該第一成像軸線,且該第二成像軸線係對準於該待檢驗工件; 一第二發光模組,係具有一第二分光鏡及一第二發光單元,該第二分光鏡為半穿透半反射鏡,該第二分光鏡係位於該第二成像軸線上,且介於該待檢驗工件與該第二遠心鏡頭之間,該第二發光單元位於該第二成像軸線之一側,該第二發光單元係向該第二分光鏡照射一第二照射光線,該第二照射光線係經由該第二分光鏡形成一第二平行光線,且該第二平行光線照射於該待檢驗工件; 其中,該第一影像擷取單元係利用該第一平行光線以擷取對應於該待檢驗工件的一第一影像,該第二影像擷取單元係利用該第二平行光線以擷取對應於該待檢驗工件的一第二影像。 An imaging device for surface inspection, which comprises: A worktable for carrying a workpiece to be inspected, the workpiece to be inspected has a curved surface, and the surface of the workpiece to be inspected is a smooth surface; A first camera device is set relative to the workpiece to be inspected, and the first camera device has a first telecentric lens and a first image capturing unit, and the first image capturing unit is located at the first telecentric lens. On the imaging surface of the lens, the first telecentric lens has a first imaging axis, and the first imaging axis is aligned with the workpiece to be inspected; A first light-emitting module has a first beam splitter and a first light-emitting unit. The first beam splitter is a semi-transmissive half-reflective mirror. The first beam splitter is located on the first imaging axis and intervenes. Between the workpiece to be inspected and the first telecentric lens, the first light-emitting unit is located on one side of the first imaging axis, and the first light-emitting unit irradiates a first irradiation light to the first beam splitter, and the second An irradiating ray forms a first parallel ray through the first beam splitter, and the first parallel ray irradiates the workpiece to be inspected; A second camera device is arranged relative to the workpiece to be inspected, and the second camera device has a second telecentric lens and a second image capturing unit, the second image capturing unit is located at the second telecentric lens On the imaging surface of the lens, the second telecentric lens has a second imaging axis, and the second imaging axis is perpendicular to the first imaging axis, and the second imaging axis is aligned with the workpiece to be inspected; A second light-emitting module has a second beam splitter and a second light-emitting unit, the second beam splitter is a half-transmitting half-reflecting mirror, and the second beam splitter is located on the second imaging axis and intervenes Between the workpiece to be inspected and the second telecentric lens, the second light-emitting unit is located on one side of the second imaging axis, and the second light-emitting unit irradiates a second irradiation light to the second beam splitter. Two irradiating light rays form a second parallel light ray through the second beam splitter, and the second parallel light ray irradiates the workpiece to be inspected; Wherein, the first image capturing unit uses the first parallel light to capture a first image corresponding to the workpiece to be inspected, and the second image capturing unit uses the second parallel light to capture a first image corresponding to A second image of the workpiece to be inspected. 如請求項1所述的表面檢驗的成像裝置,其中該第一攝像裝置及該第二攝像裝置係擷取該曲面以産生該第一影像及該第二影像。The imaging device for surface inspection according to claim 1, wherein the first camera device and the second camera device capture the curved surface to generate the first image and the second image. 如請求項1所述的表面檢驗的成像裝置,其中更包含一移動模組,該移動模組係設置於該工作台,該移動模組係使該待檢驗工件轉動或移動。The imaging device for surface inspection according to claim 1, which further includes a mobile module, the mobile module is arranged on the worktable, and the mobile module rotates or moves the workpiece to be inspected. 如請求項1所述的表面檢驗的成像裝置,其中更包含一垂直位移模組,該垂直位移模組係設置於該工作台,該第一攝像裝置及該第一發光模組係設置於該垂直位移模組,該垂直位移模組係帶動該第一攝像裝置及該第一發光模組在垂直方向上位移。The imaging device for surface inspection according to claim 1, which further includes a vertical displacement module, the vertical displacement module is arranged on the workbench, the first camera device and the first light-emitting module are arranged on the The vertical displacement module drives the first camera device and the first light-emitting module to move in a vertical direction. 如請求項1所述的表面檢驗的成像裝置,其中更包含一橫向位移模組,該橫向位移模組係設置於該工作台,該第二攝像裝置及該第二發光模組係設置於該橫向位移模組,該橫向位移模組係帶動該第二攝像裝置及該第二發光模組在橫向方向上位移。The imaging device for surface inspection according to claim 1, which further includes a lateral displacement module, the lateral displacement module is arranged on the workbench, the second camera device and the second light-emitting module are arranged on the The lateral displacement module drives the second camera device and the second light-emitting module to shift in the lateral direction. 如請求項1所述的表面檢驗的成像裝置,其中更包含一處理模組,該處理模組係電性連接該第一攝像裝置及該第二攝像裝置,並接收該第一影像及該第二影像,並依據該第一影像或該第二影像判斷該待檢驗工件為合格或不合格。The imaging device for surface inspection according to claim 1, which further includes a processing module electrically connected to the first camera device and the second camera device, and receives the first image and the first image Two images, and judging whether the workpiece to be inspected is qualified or unqualified according to the first image or the second image. 如請求項1所述的表面檢驗的成像裝置,其中更包含一控制模組,該控制模組係電性連接該第一發光單元及該第二發光單元,該控制模組係控制該第一發光單元的該第一照射光線的亮度及該第二發光單元的該第二照射光線的亮度。The imaging device for surface inspection according to claim 1, which further includes a control module electrically connected to the first light-emitting unit and the second light-emitting unit, and the control module controls the first light-emitting unit and the second light-emitting unit. The brightness of the first illuminating light of the light-emitting unit and the brightness of the second illuminating light of the second light-emitting unit.
TW109210682U 2020-08-18 2020-08-18 Imaging device for surface inspection TWM607872U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW109210682U TWM607872U (en) 2020-08-18 2020-08-18 Imaging device for surface inspection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW109210682U TWM607872U (en) 2020-08-18 2020-08-18 Imaging device for surface inspection

Publications (1)

Publication Number Publication Date
TWM607872U true TWM607872U (en) 2021-02-21

Family

ID=75782986

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109210682U TWM607872U (en) 2020-08-18 2020-08-18 Imaging device for surface inspection

Country Status (1)

Country Link
TW (1) TWM607872U (en)

Similar Documents

Publication Publication Date Title
CN101660894B (en) Device and method for multi-vision visual detection based on parallel light illumination
JP2019049556A (en) System and method for inspecting wafers
WO2012063859A1 (en) Substrate inspection method, substrate inspection device, exposure system, and manufacturing method for semiconductor device
TWI585394B (en) Automatic focusing system
JP5109633B2 (en) Measuring method and inspection method, measuring device and inspection device
TW201100779A (en) System and method for inspecting a wafer (3)
TWI778988B (en) Method and apparatus for inspecting defects on transparent substrate
WO2010005399A2 (en) Hole inspection method and apparatus
CN106290390B (en) Defect detecting device and method
JP4253649B2 (en) Container outline inspection equipment
KR101099392B1 (en) Vision inspection apparatus
TWM607872U (en) Imaging device for surface inspection
TWM608800U (en) Surface inspection apparatus
CN111198190A (en) Optical detection system
TWI705244B (en) Semiconductor defects inspection apparatus
JPH09133636A (en) Illuminator and defect inspection equipment employing it
TWM603958U (en) Surface inspection system
KR100606568B1 (en) A Flood Light for appearance inspection of LCD surface
TW202007954A (en) Detecting apparatus for identifying defect of hole wall
TWI715662B (en) Check device
WO2011056976A1 (en) High speed optical inspection system with adaptive focusing
LIEW et al. Design and Development of a Novel Lighting System for Car Wiper Arm Defects Inspection
JP2000028535A (en) Defect inspecting device
JP6014386B2 (en) Glass plate lighting device and processing device
WO2022153772A1 (en) Visual inspection device