TWM607613U - Substrate baking apparatus - Google Patents

Substrate baking apparatus Download PDF

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Publication number
TWM607613U
TWM607613U TW109213513U TW109213513U TWM607613U TW M607613 U TWM607613 U TW M607613U TW 109213513 U TW109213513 U TW 109213513U TW 109213513 U TW109213513 U TW 109213513U TW M607613 U TWM607613 U TW M607613U
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Taiwan
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chain
sprocket
suction
baking
bearings
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TW109213513U
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Chinese (zh)
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陳安順
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群翊工業股份有限公司
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Priority to TW109213513U priority Critical patent/TWM607613U/en
Publication of TWM607613U publication Critical patent/TWM607613U/en

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Abstract

一種基板烘烤設備,包含:一箱體,具有一烘烤通道;一烘烤裝置,烘烤裝置自箱體外對於烘烤通道進氣並進行加熱;以及一載送裝置,包括複數個鏈輪、一鏈條以及一吊架,吊架用以夾持基板,鏈條抵於複數個鏈輪並且隨著鏈輪的旋轉而移動吊架,其中,至少一個鏈輪具有複數個軸承,複數個軸承為環狀排列,鏈條抵於可旋轉的複數個軸承,複數個軸承個別的旋轉軸線為平行於鏈輪的旋轉軸線。因軸承會對應於受力方向旋轉而減少與鏈條之間的摩擦,所以能減少粉塵的產生。A substrate baking equipment, comprising: a box body with a baking channel; a baking device, the baking device from the outside of the box into the baking channel into the air and heating; and a carrying device, including a plurality of sprockets , A chain and a hanger, the hanger is used to clamp the base plate, the chain abuts on a plurality of sprockets and moves the hanger with the rotation of the sprocket, wherein at least one sprocket has a plurality of bearings, and the plurality of bearings are The chain is arranged in a ring shape, and the chain abuts against a plurality of rotatable bearings, and the rotation axis of the plurality of bearings is parallel to the rotation axis of the sprocket. Because the bearing will rotate in the direction of the force and reduce the friction with the chain, it can reduce the generation of dust.

Description

基板烘烤設備Substrate baking equipment

本創作相關於一種基板製造設備,特別是相關於一種基板烘烤設備。This creation is related to a substrate manufacturing equipment, especially a substrate baking equipment.

為了製造出印刷電路基板,需經過繁複的製造步驟,例如:裁切、蝕刻、塗佈油墨、烘烤、鑽孔……等,分別是由對應的基板製造設備進行處理。其中,在基板的表面塗佈油墨後,是用基板烘烤設備以將基板表面的油墨烘烤硬化。In order to manufacture a printed circuit board, it needs to go through complicated manufacturing steps, such as cutting, etching, coating ink, baking, drilling, etc., which are processed by corresponding substrate manufacturing equipment. Among them, after coating the ink on the surface of the substrate, a substrate baking device is used to bake and harden the ink on the surface of the substrate.

在烘烤的過程中,基板是由載送裝置於基板烘烤設備之中進行載送。而在載送裝置運作的過程中,載送裝置各元件之間的磨耗會產生粉塵,而影響基板烘烤設備中的潔淨度。這些粉塵對於精密的印刷電路基板影響甚鉅,潔淨度的劣化會導致基板的良率下降。其中,鏈條與鏈輪之間的磨耗是粉塵的一大來源。因此,有必要提出一種基板烘烤設備,能夠減少鏈條與鏈輪之間的磨耗。During the baking process, the substrate is carried by the carrier device in the substrate baking equipment. During the operation of the carrier device, the abrasion between the components of the carrier device will generate dust, which will affect the cleanliness of the substrate baking equipment. These dusts have a great impact on the precision printed circuit board, and the deterioration of cleanliness will cause the yield of the board to decrease. Among them, the abrasion between the chain and the sprocket is a major source of dust. Therefore, it is necessary to provide a substrate baking equipment that can reduce the wear between the chain and the sprocket.

因此,本創作的目的即在提供一種基板烘烤設備,能夠減少鏈條與鏈輪之間的磨耗。Therefore, the purpose of this creation is to provide a substrate baking equipment that can reduce the wear between the chain and the sprocket.

本創作為解決習知技術之問題所採用之技術手段係提供一種基板烘烤設備,包含:一箱體,該箱體內具有一烘烤通道;一烘烤裝置,設置於該箱體內,該烘烤裝置自該箱體外對於該烘烤通道進氣並進行加熱;以及一載送裝置,設置於該箱體內,該載送裝置包括一驅動構件、複數個鏈輪、一鏈條以及一吊架,該驅動構件驅動複數個該鏈輪旋轉,該吊架設置於該鏈條上,用以夾持基板,該鏈條抵於複數個該鏈輪並且隨著該鏈輪的旋轉而移動該吊架, 其中,至少一個該鏈輪具有複數個軸承,複數個該軸承以該鏈輪的中心為中心而環狀排列,該鏈條抵於複數個該軸承,複數個該軸承為可旋轉,複數個該軸承個別的旋轉軸線為平行於該鏈輪的旋轉軸線。The technical means used in this creation to solve the problems of the conventional technology is to provide a substrate baking equipment, including: a cabinet with a baking channel in the cabinet; a baking device arranged in the cabinet, the baking The roasting device enters the roasting channel from outside the box and heats it; and a carrying device is arranged in the box. The carrying device includes a driving member, a plurality of sprockets, a chain, and a hanger, The driving member drives a plurality of the sprockets to rotate, the hanger is arranged on the chain to clamp the base plate, the chain abuts against the plurality of sprockets and moves the hanger with the rotation of the sprocket, wherein , At least one of the sprocket has a plurality of bearings, the plurality of the bearings are arranged in a ring with the center of the sprocket as the center, the chain abuts the plurality of the bearings, the plurality of the bearings are rotatable, and the plurality of the bearings are individually The axis of rotation is parallel to the axis of rotation of the sprocket.

在本創作的一實施例中係提供一種基板烘烤設備,更包括一吸風管道以及一抽氣裝置,該吸風管道設置於該鏈條的旁側,該吸風管道設有複數個抽氣口,複數個該抽氣口為朝向該鏈條,該抽氣裝置連通於該吸風管道以將該吸風管道內的空氣抽到該箱體外部。In an embodiment of the present creation, a substrate baking equipment is provided, which further includes a suction duct and a suction device. The suction duct is arranged beside the chain, and the suction duct is provided with a plurality of suction openings. , The plurality of air suction openings are facing the chain, and the air suction device is connected to the air suction duct to suck the air in the air suction duct to the outside of the box body.

在本創作的一實施例中係提供一種基板烘烤設備,該吸風管道設置於該鏈條的下側並且支撐該鏈條。In an embodiment of the present invention, a substrate baking device is provided, and the air suction duct is arranged on the lower side of the chain and supports the chain.

在本創作的一實施例中係提供一種基板烘烤設備,每個該吸風管道設有二個該抽氣裝置,分別連通於該吸風管道的相對二端。In an embodiment of the present invention, a substrate baking equipment is provided. Each suction duct is provided with two suction devices, which are respectively connected to two opposite ends of the suction duct.

在本創作的一實施例中係提供一種基板烘烤設備,一個該鏈輪為驅動輪,該鏈輪的齒嚙合於該鏈條。In an embodiment of the present invention, a substrate baking device is provided, one of the sprocket is a driving wheel, and the teeth of the sprocket are meshed with the chain.

在本創作的一實施例中係提供一種基板烘烤設備,複數個該軸承的滾子為圓筒狀。In an embodiment of the present invention, a substrate baking equipment is provided, and the rollers of a plurality of the bearings are cylindrical.

經由本創作的基板烘烤設備所採用之技術手段,在鏈輪上設有可轉動的軸承。藉此,在鏈條接觸於鏈輪上的軸承時,軸承會對應於受力方向旋轉而減少與鏈條之間的摩擦。因鏈條與鏈輪之間磨耗的減少,能對應地減少粉塵的產生,進而提高箱體內的潔淨度以及產品的良率。Through the technical means used in the substrate baking equipment of this creation, a rotatable bearing is provided on the sprocket. Thereby, when the chain is in contact with the bearing on the sprocket, the bearing will rotate corresponding to the direction of the force to reduce the friction with the chain. Due to the reduction of the wear between the chain and the sprocket, the generation of dust can be correspondingly reduced, thereby improving the cleanliness of the box and the yield of the product.

在部分的實施例中,本創作的基板烘烤設備還設有吸風管道以及抽氣裝置,設置於鏈條的旁側,以使得鏈條與鏈輪之間的磨耗、鏈條各節之間的磨耗、鏈條與其支撐物之間的磨耗……等所產生的粉塵能夠透過吸風管道而被抽氣裝置抽出箱體,而能進一步提高箱體內的潔淨度以及產品的良率。In some of the embodiments, the substrate baking equipment of the invention is also provided with suction ducts and suction devices, which are arranged on the side of the chain to make the wear between the chain and the sprocket and the wear between the links of the chain. , The abrasion between the chain and its support...etc. The dust produced can be drawn out of the box by the suction device through the suction duct, which can further improve the cleanliness of the box and the yield of the product.

以下根據第1圖至第5圖,而說明本創作的實施方式。該說明並非為限制本創作的實施方式,而為本創作之實施例的一種。The following describes the implementation of this creation based on Figures 1 to 5. This description is not intended to limit the implementation of this creation, but is a kind of embodiment of this creation.

如第1圖至第5圖所示,依據本創作的一實施例的一基板烘烤設備100,包含:一箱體1、一烘烤裝置2、一載送裝置3、一吸風管道4以及一抽氣裝置5。As shown in FIGS. 1 to 5, a substrate baking equipment 100 according to an embodiment of the present creation includes: a cabinet 1, a baking device 2, a carrier device 3, and a suction duct 4 And an air extraction device 5.

為顯示箱體1內部的各元件,第1圖省略顯示鏈輪31、部分的鏈條32、吊架33以及抽氣裝置5。In order to show the components inside the box 1, the sprocket 31, part of the chain 32, the hanger 33 and the air extraction device 5 are omitted in FIG. 1.

如第1圖及第2圖所示,箱體1內具有一烘烤通道11。烘烤通道11的二側設有爐內檢修門12,以便於檢修人員從烘烤通道11兩側檢修烘烤通道11內部的元件。As shown in Figures 1 and 2, the box 1 has a baking channel 11 inside. Two sides of the baking channel 11 are provided with furnace inspection doors 12 so that maintenance personnel can inspect the components inside the baking channel 11 from both sides of the baking channel 11.

如第2圖及第3圖所示,烘烤裝置2設置於箱體1內。烘烤裝置2包括一進氣構件21、一加熱構件22、一進氣過濾構件23以及熱空氣過濾構件24。第3圖的箭頭為示意氣流的方向。進氣構件21自箱體1外經進氣過濾構件23而對於箱體1內進氣。加熱構件22為電熱器,將進入箱體1的空氣進行加熱,而將空氣加熱到足以使基板S表面之油墨固化的程度。經加熱的空氣通過熱空氣過濾構件24而進入烘烤通道11。熱空氣過濾構件24為高效率空氣微粒子過濾網(HEPA),以確保進入烘烤通道11的空氣為潔淨。As shown in FIGS. 2 and 3, the baking device 2 is installed in the box 1. The baking device 2 includes an air intake member 21, a heating member 22, an air intake filter member 23 and a hot air filter member 24. The arrows in Figure 3 indicate the direction of airflow. The air intake member 21 passes through the air intake filter member 23 from the outside of the case 1 to enter the case 1. The heating member 22 is an electric heater, which heats the air entering the box 1 and heats the air to a degree sufficient to solidify the ink on the surface of the substrate S. The heated air enters the baking passage 11 through the hot air filter member 24. The hot air filter member 24 is a high-efficiency particulate air filter (HEPA) to ensure that the air entering the baking channel 11 is clean.

載送裝置3設置於箱體1內,以將基板S從烘烤通道11的一端載送到另一端。在載送裝置3載送基板S的同時,烘烤裝置2對於烘烤通道11吹送加熱空氣以烘烤基板S表面之油墨。The carrying device 3 is installed in the box 1 to carry the substrate S from one end of the baking channel 11 to the other end. While the carrier device 3 carries the substrate S, the baking device 2 blows heated air to the baking channel 11 to bake the ink on the surface of the substrate S.

詳細而言,如第2圖至第4圖所示,載送裝置3包括一驅動構件(圖未示)、複數個鏈輪31、31’、一鏈條32以及一吊架33。驅動構件為一馬達,驅動鏈輪31、31’旋轉。鏈條32為滾子鏈,在本實施例中為設置於烘烤通道11的二側而設置有二條。吊架33設置於鏈條32上。吊架33包括一連桿331以及夾具332。二條鏈條32透過之間連桿331而相互連接。夾具332為對稱地設置於連桿331,用以夾持基板S。在本實施例中,夾具332為四爪夾具。如第4圖所示,每條鏈條32抵於四個鏈輪31、31’的外緣並且隨著鏈輪31、31’的旋轉而移動吊架33。當然,在其他實施例中,鏈條32可以是一條或超過二條,對應於一條鏈條32所設置的鏈輪31也可以是四個以外的數量。In detail, as shown in FIGS. 2 to 4, the carrying device 3 includes a driving member (not shown), a plurality of sprockets 31, 31', a chain 32, and a hanger 33. The driving member is a motor, which drives the sprockets 31, 31' to rotate. The chain 32 is a roller chain, and in this embodiment, two are provided on both sides of the baking channel 11. The hanger 33 is installed on the chain 32. The hanger 33 includes a connecting rod 331 and a clamp 332. The two chains 32 are connected to each other through a connecting rod 331 between them. The clamp 332 is symmetrically arranged on the connecting rod 331 for clamping the substrate S. In this embodiment, the clamp 332 is a four-jaw clamp. As shown in Figure 4, each chain 32 abuts the outer edges of the four sprockets 31, 31' and moves the hanger 33 along with the rotation of the sprockets 31, 31'. Of course, in other embodiments, the number of chains 32 may be one or more than two, and the number of sprockets 31 provided corresponding to one chain 32 may also be other than four.

每條鏈條32所對應之鏈輪31、31’的部分或全部設置有複數個軸承311。在本實施例中,每條鏈條32所抵的四個鏈輪31、31’中,有三個鏈輪31具有複數個軸承311,一個鏈輪31’沒有設置軸承。無軸承的鏈輪31’為驅動輪,以鏈輪31’的齒嚙合於鏈條32,以確保鏈條32受鏈輪31’所帶動。Part or all of the sprocket 31, 31' corresponding to each chain 32 is provided with a plurality of bearings 311. In this embodiment, among the four sprockets 31, 31' against which each chain 32 abuts, three sprockets 31 have a plurality of bearings 311, and one sprocket 31' is not provided with a bearing. The bearing-less sprocket 31' is a driving wheel, and the teeth of the sprocket 31' mesh with the chain 32 to ensure that the chain 32 is driven by the sprocket 31'.

軸承311以所屬的鏈輪31的中心為中心而環狀排列,每個軸承311與相鄰的軸承311為等角度間距設置。每個軸承311為滾動軸承(rolling bearing)而為可旋轉,且每個軸承311的旋轉軸線皆為平行於鏈輪31的旋轉軸線。在第4圖中,每個軸承311及鏈輪31、31’的旋轉軸線的方向為垂直於紙面。鏈條32是抵於複數個軸承311的滾子312上而卡合到滾子312之間的凹部。藉此,在載送裝置3運行的過程中,鏈條32接觸到軸承311時,軸承311會對應於受力方向旋轉而減少與鏈條32之間的摩擦。因鏈條32與鏈輪31之間磨耗的減少,而能減少粉塵的產生,進而提高箱體1內的潔淨度以及產品的良率。The bearings 311 are arranged annularly with the center of the sprocket 31 to which they belong, and each bearing 311 is arranged at equal angular intervals with the adjacent bearing 311. Each bearing 311 is a rolling bearing and is rotatable, and the rotation axis of each bearing 311 is parallel to the rotation axis of the sprocket 31. In Figure 4, the direction of the axis of rotation of each bearing 311 and sprockets 31, 31' is perpendicular to the paper. The chain 32 abuts on the rollers 312 of the plurality of bearings 311 and engages with the recesses between the rollers 312. Thereby, when the chain 32 contacts the bearing 311 during the operation of the carrying device 3, the bearing 311 will rotate corresponding to the direction of force to reduce the friction with the chain 32. Due to the reduction of the abrasion between the chain 32 and the sprocket 31, the generation of dust can be reduced, and the cleanliness of the box 1 and the yield of the product can be improved.

在本實施例中,複數個軸承311的滾子312為圓筒狀。而在其他實施例中,軸承311的滾子312也可以是球狀或錐狀。In this embodiment, the rollers 312 of the plural bearings 311 are cylindrical. In other embodiments, the roller 312 of the bearing 311 may also be spherical or tapered.

在本實施例中,如第5圖所示,吸風管道4連通到抽氣裝置5。吸風管道4設置於鏈條32的旁側。抽氣裝置5將吸風管道4內的空氣抽到箱體1外部。抽氣裝置5可以是設置於箱體1內或設置於箱體1外部。吸風管道4對應於鏈條32的數量而設置有二個。吸風管道4設有複數個抽氣口41,抽氣口41為朝向的鏈條32,以使得鏈條32與鏈輪31之間的磨耗、鏈條32各節之間的磨耗、鏈條32與其支撐物(在本實施例為吸風管道4)之間的磨耗……等所產生的粉塵能夠通過吸風管道4而被抽氣裝置5抽出箱體1,而進一步提高箱體1內的潔淨度以及產品的良率。當然,在其他實施例中,也可不設置吸風管道4及抽氣裝置5,設有軸承311的鏈輪31即有提高箱體1內的潔淨度以及產品良率的效果。In this embodiment, as shown in FIG. 5, the suction duct 4 is connected to the suction device 5. The suction duct 4 is arranged beside the chain 32. The suction device 5 sucks the air in the suction duct 4 to the outside of the box 1. The air extraction device 5 may be installed in the box 1 or outside the box 1. Two suction ducts 4 are provided corresponding to the number of chains 32. The suction duct 4 is provided with a plurality of suction openings 41, and the suction openings 41 are facing the chain 32, so that the abrasion between the chain 32 and the sprocket 31, the abrasion between the links of the chain 32, the chain 32 and its support (in In this embodiment, the dust produced by the abrasion between the suction duct 4) can be drawn out of the box 1 by the suction device 5 through the suction duct 4, thereby further improving the cleanliness of the box 1 and the product quality Yield. Of course, in other embodiments, the suction duct 4 and the suction device 5 may not be provided, and the sprocket 31 provided with the bearing 311 has the effect of improving the cleanliness of the box 1 and the product yield.

吸風管道4可設置於鏈條32上下左右之旁側,皆能達到吸取粉塵的效果。而在本實施例中,吸風管道4設置於鏈條32的下方並且支撐鏈條32,使得吸風管道4能夠維持鏈條32及吊架33所夾持的基板S於一固定的高度。The suction duct 4 can be arranged on the upper, lower, left, and right sides of the chain 32 to achieve the effect of sucking dust. In this embodiment, the suction duct 4 is arranged under the chain 32 and supports the chain 32 so that the suction duct 4 can maintain the substrate S clamped by the chain 32 and the hanger 33 at a fixed height.

在本實施例中,如第5圖所示,本創作的實施例的基板烘烤設備100的每個吸風管道4設有二個抽氣裝置5,分別連接於吸風管道4的相對二端。第5圖所示的箭頭為示意氣流的方向。相較於每個吸風管道4僅設有一個抽氣裝置5的實施例,在本實施例中能夠減少各個抽氣口41的吸力隨距離衰減的現象而使吸力更為均勻。In this embodiment, as shown in Figure 5, each suction duct 4 of the substrate baking equipment 100 of the embodiment of the invention is provided with two suction devices 5, which are respectively connected to two opposite sides of the suction duct 4. end. The arrows shown in Figure 5 indicate the direction of airflow. Compared with the embodiment in which each suction duct 4 is provided with only one suction device 5, in this embodiment, the phenomenon that the suction force of each suction port 41 decays with distance can be reduced to make the suction force more uniform.

藉由上述結構,本創作的實施例的基板烘烤設備100透過設有軸承311的鏈輪31以減少粉塵的產生,並透過吸風管道4及抽氣裝置5將產生的粉塵抽出箱體1,以提高箱體1內的潔淨度,進而能夠降低停機維護的頻率,達到節省維護之時間成本及人力成本的效果。With the above structure, the substrate baking equipment 100 of the embodiment of the invention reduces the generation of dust through the sprocket 31 provided with the bearing 311, and extracts the generated dust out of the box 1 through the suction duct 4 and the air extraction device 5. , In order to improve the cleanliness of the cabinet 1, thereby reducing the frequency of shutdown and maintenance, and achieving the effect of saving maintenance time and labor costs.

以上之敘述以及說明僅為本創作之較佳實施例之說明,對於此項技術具有通常知識者當可依據以下所界定申請專利範圍以及上述之說明而作其他之修改,惟此些修改仍應是為本創作之創作精神而在本創作之權利範圍中。The above descriptions and descriptions are only descriptions of the preferred embodiments of this creation. Those with ordinary knowledge of this technology should make other modifications based on the scope of patent application defined below and the above descriptions, but these modifications should still be made. It is the creative spirit of this creation and within the scope of the rights of this creation.

100:基板烘烤設備 1:箱體 11:烘烤通道 11:箱體 12:爐內檢修門 2:烘烤裝置 21:進氣構件 22:加熱構件 23:進氣過濾構件 24:熱空氣過濾構件 3:載送裝置 31:鏈輪 31’:鏈輪 311:軸承 312:滾子 32:鏈條 33:吊架 331:連桿 332:夾具 4:吸風管道 41:抽氣口 5:抽氣裝置 S:基板 100: substrate baking equipment 1: cabinet 11: Baking channel 11: Cabinet 12: Inspection door in the furnace 2: Baking device 21: intake components 22: Heating component 23: intake filter component 24: Hot air filter component 3: Carrying device 31: Sprocket 31’: Sprocket 311: Bearing 312: Roller 32: chain 33: Hanger 331: connecting rod 332: Fixture 4: Suction duct 41: Exhaust Port 5: Air extraction device S: substrate

[第1圖]為顯示根據本創作的一實施例的基板烘烤設備之部分的立體示意圖; [第2圖]為顯示根據本創作的實施例的基板烘烤設備的內部的前視示意圖; [第3圖]為顯示根據本創作的實施例的基板烘烤設備內部的氣體流動的前視示意圖; [第4圖]為顯示根據本創作的實施例的基板烘烤設備的載送裝置的側視示意圖; [第5圖]顯示根據本創作的實施例的基板烘烤設備的載送裝置、吸風管道以及抽氣裝置的側視示意圖。 [Figure 1] is a three-dimensional schematic diagram showing part of a substrate baking equipment according to an embodiment of the present creation; [Figure 2] is a schematic front view showing the inside of the substrate baking device according to the embodiment of the present creation; [Figure 3] is a schematic front view showing the gas flow inside the substrate baking equipment according to the embodiment of the present creation; [Figure 4] is a schematic side view showing the carrier device of the substrate baking equipment according to the embodiment of the present creation; [Figure 5] A schematic side view showing the carrying device, the suction duct and the suction device of the substrate baking equipment according to the embodiment of the present creation.

31:鏈輪 31: Sprocket

31’:鏈輪 31’: Sprocket

311:軸承 311: Bearing

312:滾子 312: Roller

32:鏈條 32: chain

332:夾具 332: Fixture

Claims (6)

一種基板烘烤設備,包含:一箱體,該箱體內具有一烘烤通道;一烘烤裝置,設置於該箱體內,該烘烤裝置自該箱體外對於該烘烤通道進氣並進行加熱;以及一載送裝置,設置於該箱體內,該載送裝置包括一驅動構件、複數個鏈輪、一鏈條以及一吊架,該驅動構件驅動複數個該鏈輪旋轉,該吊架設置於該鏈條上,用以夾持基板,該鏈條抵於複數個該鏈輪並且隨著該鏈輪的旋轉而移動該吊架,其中,至少一個該鏈輪具有複數個軸承,複數個該軸承以該鏈輪的中心為中心而環狀排列,該鏈條抵於複數個該軸承,複數個該軸承為可旋轉,複數個該軸承個別的旋轉軸線為平行於該鏈輪的旋轉軸線。 A substrate baking equipment includes: a box body with a baking channel in the box body; a baking device arranged in the box body, and the baking device enters and heats the baking channel from outside the box body And a carrying device arranged in the box, the carrying device includes a drive member, a plurality of sprockets, a chain and a hanger, the drive member drives a plurality of the sprockets to rotate, the hanger is arranged in The chain is used to clamp the base plate, and the chain abuts against a plurality of the sprocket and moves the hanger with the rotation of the sprocket, wherein at least one of the sprocket has a plurality of bearings, and the plurality of bearings is The center of the sprocket is arranged in an annular shape, the chain abuts on a plurality of the bearings, the plurality of the bearings are rotatable, and the individual rotation axes of the plurality of the bearings are parallel to the rotation axis of the sprocket. 如請求項1之基板烘烤設備,更包括一吸風管道以及一抽氣裝置,該吸風管道設置於該鏈條的旁側,該吸風管道設有複數個抽氣口,複數個該抽氣口為朝向該鏈條,該抽氣裝置連通於該吸風管道以將該吸風管道內的空氣抽到該箱體外部。 For example, the substrate baking equipment of claim 1, further comprising a suction duct and a suction device, the suction duct is arranged beside the chain, the suction duct is provided with a plurality of suction openings, and a plurality of the suction openings To face the chain, the air suction device is connected to the suction duct to suck the air in the suction duct to the outside of the box. 如請求項2之基板烘烤設備,其中該吸風管道設置於該鏈條的下側並且支撐該鏈條。 Such as the substrate baking equipment of claim 2, wherein the suction duct is arranged on the lower side of the chain and supports the chain. 如請求項2之基板烘烤設備,其中每個該吸風管道設有二個該抽氣裝置,分別連通於該吸風管道的相對二端。 For example, the substrate baking equipment of claim 2, wherein each of the suction ducts is provided with two suction devices, which are respectively connected to two opposite ends of the suction duct. 如請求項1之基板烘烤設備,其中一個該鏈輪為驅動輪,該鏈輪的齒嚙合於該鏈條。 For example, in the substrate baking equipment of claim 1, one of the sprocket wheels is a driving wheel, and the teeth of the sprocket wheel mesh with the chain. 如請求項1之基板烘烤設備,其中複數個該軸承的滾子為圓筒狀。 Such as the substrate baking equipment of claim 1, wherein the plurality of rollers of the bearing are cylindrical.
TW109213513U 2020-10-15 2020-10-15 Substrate baking apparatus TWM607613U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113729067A (en) * 2021-11-05 2021-12-03 常州得盛炉具有限公司 Smoking furnace with internal circulation conveying function

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113729067A (en) * 2021-11-05 2021-12-03 常州得盛炉具有限公司 Smoking furnace with internal circulation conveying function
CN113729067B (en) * 2021-11-05 2022-01-18 常州得盛炉具有限公司 Smoking furnace with internal circulation conveying function

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